CN104051825A - A Bandpass Hopping Active Frequency Selective Surface - Google Patents
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Abstract
Description
技术领域 technical field
本发明涉及微波滤波领域,特别是一种带通跳变式有源频率选择表面。 The present invention relates to the field of microwave filtering, in particular to a bandpass hopping active frequency selective surface.
背景技术 Background technique
频率选择表面(Frequency Selective Surface, FSS)是一种对入射的电磁波具有选频特性的二维周期性阵列结构,该阵列结构是由大量的无源谐振单元周期性排列组成。频率选择表面对谐振频率处的入射电磁波表现出全反射或全透射的选频特性,从本质上看,频率选择表面是一种特殊的空间滤波器。 Frequency Selective Surface (FSS) is a two-dimensional periodic array structure with frequency selective characteristics for incident electromagnetic waves. The array structure is composed of a large number of passive resonant units periodically arranged. The frequency selective surface shows the frequency selection characteristics of total reflection or total transmission for the incident electromagnetic wave at the resonant frequency. In essence, the frequency selective surface is a special spatial filter.
频率选择表面在现代诸多技术中都具有很多重要的应用,具有代表性的就是频率选择表面在隐身技术中的应用。在现代三大军事技术中,隐身技术可谓是举世瞩目的重大军事技术。自从上世纪60年代以来,频率选择表面在雷达隐身技术中表现出了优异性能,使之一直倍受各国的高度重视。随着频率选择表面技术的发展,越来越多的单元结构被学者研究出来,实现了各种优异的隐身性能。但是现有的频率选择表面为无源频率选择表面,这种结构的谐振频率、工作带宽、稳定性等在加工完成后均无法改变,因而在复杂多变的电磁环境中无法快速适应外部电磁环境的变化而降低了其发挥的作用。 Frequency selective surfaces have many important applications in many modern technologies, the representative one is the application of frequency selective surfaces in stealth technology. Among the three modern military technologies, stealth technology can be described as a major military technology that has attracted worldwide attention. Since the 1960s, frequency selective surfaces have shown excellent performance in radar stealth technology, making it highly valued by many countries. With the development of frequency selective surface technology, more and more cell structures have been researched by scholars, and various excellent stealth properties have been realized. However, the existing frequency selective surface is a passive frequency selective surface. The resonant frequency, operating bandwidth, and stability of this structure cannot be changed after processing, so it cannot quickly adapt to the external electromagnetic environment in a complex and changeable electromagnetic environment. changes that reduce its effectiveness.
发明内容 Contents of the invention
为克服现有技术所存在的问题,本发明目提供一种通跳变式有源频率选择表面。 In order to overcome the problems existing in the prior art, the object of the present invention is to provide an active frequency selective surface of pass-hopping type.
实现本发明目的的技术方案是:一种带通跳变有源频率选择表面,呈紧贴的层状结构,前端为第二保护层,依次往后为第一层频率选择表面、第一保护层、第二层频率选择表面和第三保护层;所述的第一层频率选择表面和第二层频率选择表面相互平行,且双面依次镀制有金属电介质层和介质衬底;第一层频率选择表面上按照平行于较短边的中轴线对称光腐蚀六条镂空通道,其中通道一和通道六不相连且对称分布并平行于第一层频率选择表面的较长边、通道二和通道五对称分布且平行于第一层频率选择表面的较短边,通道三和通道四不相连且对称分布并平行于第一层频率选择表面的较长边,所述的通道一、通道二和通道三相连通,所述的通道四、通道五和通道六相连通;第二层频率选择表面的尺寸和结构与第一层频率选择表面相同;第一层频率选择表面的镂空通道内至少设置两组悬梁壁式MEMS开关,每一组悬梁壁式MEMS开关包含两个关于平行于较短边的中轴线对称设置的悬梁壁式MEMS开关,第一层频率选择表面上设置馈电网络与悬梁壁式MEMS开关连接;第二层频率选择表面的镂空通道至少设置两组悬梁壁式MEMS开关,且每一组悬梁壁式MEMS开关的位置与第一层频率选择表面上的悬梁壁式MEMS开关的位置相对应。 The technical solution for realizing the purpose of the present invention is: a band-pass hopping active frequency selective surface, which is a close-fitting layered structure, the front end is the second protection layer, and the back is the first layer of frequency selection surface, the first protection layer layer, the second layer of frequency selective surface and the third protective layer; the first layer of frequency selective surface and the second layer of frequency selective surface are parallel to each other, and the two sides are sequentially plated with metal dielectric layer and dielectric substrate; the first On the frequency selective surface of the layer, six hollow channels are symmetrically etched according to the central axis parallel to the shorter side, in which channel one and channel six are not connected and distributed symmetrically and parallel to the longer side, channel two and channel of the first layer of frequency selective surface Five symmetrically distributed and parallel to the shorter side of the first layer of frequency selective surface, channel three and channel four are not connected and symmetrically distributed and parallel to the longer side of the first layer of frequency selective surface, said channel one, channel two and The channels are connected in three phases, and the channel four, channel five and channel six are connected; the size and structure of the frequency selective surface of the second layer are the same as those of the frequency selective surface of the first layer; at least Two sets of cantilever wall MEMS switches, each set of cantilever wall MEMS switches include two cantilever wall MEMS switches symmetrically arranged about the central axis parallel to the shorter side, the feed network and the cantilever beam are arranged on the first layer of frequency selection surface Wall-type MEMS switch connection; at least two sets of cantilever-beam wall-type MEMS switches are set in the hollow channel on the second-layer frequency-selective surface, and the position of each group of cantilever-beam wall-type MEMS switches is the same as that of the cantilever-beam wall-type MEMS switch on the first-layer frequency-selective surface. corresponding to the position.
本发明与现有技术相比,其显著优点在于:(1)通过悬梁壁式MEMS开关的导通和断开,实现透波频段的跳变;(2)采用了两层频率选择表面和较小的单元间距,对于透波频段以外的频率具有非常好的衰减效果;(3)通带平坦度好、适用角度范围大、损耗小、稳定性高;(4)加工相对简单,可广泛适用于雷达系统中。 Compared with the prior art, the present invention has significant advantages in that: (1) through the conduction and disconnection of the cantilever wall MEMS switch, the hopping of the wave-transparent frequency band is realized; (2) the two-layer frequency selection surface and the Small unit spacing has a very good attenuation effect for frequencies other than the wave-transmitting frequency band; (3) Good flatness of passband, wide range of applicable angles, small loss, and high stability; (4) Relatively simple processing and widely applicable in the radar system.
附图说明 Description of drawings
图1是一种带通跳变式有源频率选择表面构示意图。 Fig. 1 is a schematic diagram of a bandpass hopping active frequency selective surface.
图2是一种带通跳变式有源频率选择表面的悬臂梁式MEMS开关加载方式示意图。 Fig. 2 is a schematic diagram of a loading method of a cantilever beam MEMS switch with a bandpass hopping active frequency selective surface.
图3是一种带通跳变式有源频率选择表面三组开关断开时透波性能曲线。 Fig. 3 is a wave transmission performance curve of a bandpass hopping active frequency selective surface when three groups of switches are turned off.
图4是一种带通跳变式有源频率选择表面仅第1组开关导通时透波性能曲线。 Fig. 4 is a wave transmission performance curve of a band-pass hopping active frequency selective surface when only the first group of switches is turned on.
图5是一种带通跳变式有源频率选择表面仅第2组开关导通时透波性能曲线。 Fig. 5 is a wave transmission performance curve of a band-pass hopping active frequency selective surface when only the second group of switches is turned on.
图6是一种带通跳变式有源频率选择表面仅第3组开关导通时透波性能曲线。 Fig. 6 is a wave transmission performance curve of a band-pass hopping active frequency selective surface when only the third group of switches is turned on.
具体实施方式 Detailed ways
下面结合附图对本发明作进一步详细描述。 The present invention will be described in further detail below in conjunction with the accompanying drawings.
一种带通跳变有源频率选择表面,呈紧贴的层状结构,前端为第二保护层2,依次往后为第一层频率选择表面4、第一保护层1、第二层频率选择表面5和第三保护层3;所述的第一层频率选择表面4和第二层频率选择表面5相互平行,且双面附有介质衬底;所述的第一层频率选择表面4和第二层频率选择表面5的尺寸和结构完全一样,进一步说,第一层频率选择表面4和第二层频率选择表面5上的镂空通道的尺寸和在频率选择表面上的位置完全一样。在实际操作中,两层频率选择表面比一层起到滤波的作用更明显,若设置两层以上频率选择表面,滤波特性显著降低。 A bandpass hopping active frequency selective surface, in a close-fitting layered structure, the front end is the second protective layer 2, followed by the first layer of frequency selective surface 4, the first protective layer 1, and the second layer of frequency The selection surface 5 and the third protective layer 3; the first frequency selection surface 4 and the second frequency selection surface 5 are parallel to each other, and a dielectric substrate is attached on both sides; the first frequency selection surface 4 The size and structure of the second-layer frequency selective surface 5 are exactly the same. Furthermore, the dimensions and positions of the hollow channels on the first-layer frequency selective surface 4 and the second-layer frequency selective surface 5 are exactly the same. In actual operation, two layers of frequency selective surfaces play a more obvious role in filtering than one layer. If more than two layers of frequency selective surfaces are installed, the filtering characteristics will be significantly reduced.
第一层频率选择表面4上光腐蚀六条镂空通道,其中每两条镂空通道按照平行于较短边的中轴线对称,其中通道一、通道二和通道三相连通,通道四、通道五和通道六相连通,通道一和通道六不相连且对称分布并平行于第一层频率选择表面4的较长边、通道二和通道五对称分布且平行于第一层频率选择表面4的较短边,通道三和通道四不相连且对称分布并平行于第一层频率选择表面4的较长边; The first layer of frequency selective surface 4 has six hollowed-out channels etched by light, and every two hollowed-out channels are symmetrical according to the central axis parallel to the shorter side, wherein channel 1, channel 2 and channel 3 are connected, and channel 4, channel 5 and channel The six phases are connected, channel one and channel six are not connected and distributed symmetrically and parallel to the longer side of the first layer of frequency selective surface 4, channel two and channel five are symmetrically distributed and parallel to the shorter side of the first layer of frequency selective surface 4 , channel three and channel four are not connected and distributed symmetrically and parallel to the longer side of the frequency selective surface 4 of the first layer;
第二层频率选择表面5上也光腐蚀六条镂空通道,其中每两条镂空通道按照平行于较短边的中轴线对称,其中通道七和通道十二不相连且对称分布并平行于第二层频率选择表面5的较长边、通道八和通道十一对称分布且平行于第二层频率选择表面5的较短边,通道九和通道十不相连且对称分布并平行于二层频率选择表面5的较长边,所述的通道七、通道八和通道九相连通,所述的通道十、通道十一和通道十二相连通; On the frequency selective surface 5 of the second layer, six hollowed-out channels are also etched by light, wherein every two hollowed-out channels are symmetrical according to the central axis parallel to the shorter side, wherein the seven channels and the twelve channels are not connected and symmetrically distributed and parallel to the second layer The longer side of the frequency selective surface 5, channel eight and channel eleven are symmetrically distributed and parallel to the shorter side of the second layer of frequency selective surface 5, channel nine and channel ten are not connected and symmetrically distributed and parallel to the second layer of frequency selective surface On the longer side of 5, said passage seven, passage eight and passage nine are connected, and said passage ten, passage eleven and passage twelve are connected;
为了实现通带跳变的功能,第一层频率选择表面4的镂空通道内至少设置两组悬梁壁式MEMS开关,当一组开关导通时完成一次频段的选择,当导通其余开关时,可以瞬间实现通带跳变,进而透波频段发生改变。每一组悬梁壁式MEMS开关包含两个关于平行于较短边的中轴线对称设置的悬梁壁式MEMS开关,第一层频率选择表面4上设置数量与悬梁壁式MEMS开关组数相同的馈电网络分别与悬梁壁式MEMS开关连接馈电;第二层频率选择表面5的镂空通道至少设置两组悬梁壁式MEMS开关,且每一组悬梁壁式MEMS开关的位置与第一层频率选择表面4上的悬梁壁式MEMS开关的位置相对应,即第一层频率选择表面4和第二层频率选择表面5上的悬梁壁式MEMS开关在频率选择表面上的位置完全一样。第一保护层1,第二保护层2和第三保护层3均由泡沫填充。 In order to realize the function of pass band jumping, at least two groups of cantilever wall MEMS switches are arranged in the hollow channel of the first layer of frequency selection surface 4. When one group of switches is turned on, a frequency band selection is completed; when the other switches are turned on, The passband jump can be realized instantaneously, and then the wave-transmissive frequency band will change. Each group of cantilever wall MEMS switches includes two cantilever wall MEMS switches that are symmetrically arranged about the central axis parallel to the shorter side, and the number of feeders that is the same as the number of cantilever wall MEMS switch groups is set on the frequency selection surface 4 of the first layer. The electrical network is respectively connected to the cantilever wall MEMS switch for power feeding; at least two groups of cantilever wall MEMS switches are set in the hollow channel of the frequency selection surface 5 of the second layer, and the position of each group of cantilever wall MEMS switches is the same as that of the first layer of frequency selection. The positions of the cantilever wall MEMS switches on the surface 4 are corresponding, that is, the positions of the cantilever wall MEMS switches on the first frequency selective surface 4 and the second frequency selective surface 5 are exactly the same on the frequency selective surfaces. The first protective layer 1, the second protective layer 2 and the third protective layer 3 are all filled with foam.
结合图2,在频率选择表面上设置馈电网络与悬梁壁式MEMS开关连接,起到馈电作用。该馈电网络由馈电线7、连接馈电线和悬梁壁式MEMS开关的金丝跳线8,以及连接悬梁壁式MEMS开关的地线9组成,馈电线7由金、银等导电金属制成,馈电网络为悬梁壁式MEMS开关馈电。 Combined with Figure 2, the feed network is set on the frequency selection surface to connect with the cantilever wall MEMS switch to play the role of feed. The feeder network consists of a feeder 7, a gold wire jumper 8 connecting the feeder and the cantilever wall MEMS switch, and a ground wire 9 connected to the cantilever wall MEMS switch. The feeder 7 is made of conductive metals such as gold and silver. , the feed network feeds the cantilever wall MEMS switch.
本发明的工作原理在于:频率选择表面上设置悬梁壁式MEMS开关后,改变了频率选择表面的具体图案,从而使电磁波表现出不同的滤波特性,根据悬梁壁式MEMS开关设置的位置可以满足频率选择表面对不同频率波段的选择,而开关的数量可以实现当导通每一组开关时均会发生透波频段的跳变现象。具体地,在频率选择表面上设置若干组悬梁壁式MEMS开关,第一组开关的通断可以实现两组状态;当第二组开关打开后,频率选择表面的图案发生改变,其通带特性使得第一组开关失效,即无论第一组开关处于何种状态其均不再影响频选特性;同理,在第三组开关导通后,第一组和第二组开关也将失效;以后每导通一组开关后,其前面导通的开关不再影响频选特性。 The working principle of the present invention is: after the cantilever wall MEMS switch is set on the frequency selection surface, the specific pattern of the frequency selection surface is changed, so that the electromagnetic wave shows different filtering characteristics, and the position of the cantilever wall MEMS switch can meet the frequency requirements. The selection surface selects different frequency bands, and the number of switches can realize that when each group of switches is turned on, the jump phenomenon of the wave-transmissive frequency band will occur. Specifically, several groups of cantilever wall MEMS switches are set on the frequency selective surface, and the on-off of the first group of switches can realize two groups of states; when the second group of switches is turned on, the pattern of the frequency selective surface changes, and its passband characteristics Make the first group of switches invalid, that is, no matter what state the first group of switches is in, it will no longer affect the frequency selection characteristics; similarly, after the third group of switches is turned on, the first group and the second group of switches will also fail; After each group of switches is turned on, the switches turned on before it no longer affect the frequency selection characteristics.
具体的,本发明选取X波段的有源频率选择表面作为实例进行描述,应理解,对于其他波段,有源频率选择表面的工作原理相同,只是频率选择表面尺寸、通道宽度、悬梁壁式MEMS开关的位置和个数可以根据频段要求进行改变。 Specifically, the present invention selects the active frequency selective surface of the X-band as an example for description. It should be understood that for other wave bands, the working principle of the active frequency selective surface is the same, only the frequency selective surface size, channel width, cantilever wall MEMS switch The position and number of can be changed according to the frequency band requirements.
结合图1,整个装置厚度为24.834mm,其中第一层频率选择表面4和第二层频率选择表面5的长宽分别为5.1mm和4.5mm,厚度为0.29mm,镂空通道宽度为0.5mm,距离选择表面边缘均为0.35mm,第一层频率选择表面4和第二层频率选择表面5的镂空通道上分别设置三组悬梁壁式MEMS开关;第一组悬梁壁式MEMS开关6-1设置于通道一和通道六内靠近平行于第一层频率选择表面4较短边的中轴线的位置处,具体为第一组悬梁壁式MEMS开关中每一个开关距离轴线均为0.9mm;第二组悬梁壁式MEMS开关6-2设置于通道一和通道六内远离平行于第一层频率选择表面4较短边的中轴线的位置处,具体为第二组悬梁壁式MEMS开关中每一个开关距离轴线均为1.4mm;第三组悬梁壁式MEMS开关6-3设置于通道三和通道四内,具体为第三组悬梁壁式MEMS开关中每一个开关距离轴线均为0.4mm;第四组开关设置在第二层频率选择表面5的镂空通道内且与第一组悬梁壁式MEMS开关的位置相对应,第五组开关设置在第二层频率选择表面5的镂空通道内且与第二组悬梁壁式MEMS开关的位置相对应,第六组开关设置在第二层频率选择表面5的镂空通道内且与第三组悬梁壁式MEMS开关的位置相对应。 Referring to Figure 1, the thickness of the entire device is 24.834mm, in which the length and width of the first layer of frequency selective surface 4 and the second layer of frequency selective surface 5 are 5.1mm and 4.5mm respectively, the thickness is 0.29mm, and the width of the hollow channel is 0.5mm. The distance from the edge of the selection surface is 0.35mm, and three groups of cantilever wall MEMS switches are respectively set on the hollow channels of the first frequency selection surface 4 and the second frequency selection surface 5; the first group of cantilever wall MEMS switches 6-1 are set In channel one and channel six, close to the central axis parallel to the shorter side of the frequency selective surface 4 of the first layer, specifically, each switch in the first group of cantilever wall MEMS switches is 0.9mm away from the axis; the second The group of cantilever wall type MEMS switches 6-2 is arranged in channel one and channel six away from the central axis parallel to the shorter side of the frequency selective surface 4 of the first layer, specifically each of the second group of cantilever wall type MEMS switches The switches are all 1.4mm away from the axis; the third group of cantilever wall MEMS switches 6-3 are arranged in channel three and channel four, specifically, each switch in the third group of cantilever wall MEMS switches is 0.4mm away from the axis; Four groups of switches are arranged in the hollow channel of the second layer of frequency selective surface 5 and correspond to the positions of the first group of cantilever wall MEMS switches, and the fifth group of switches are arranged in the hollow channel of the second layer of frequency selective surface 5 and correspond to the positions of the first group of cantilever wall MEMS switches. The position of the second group of cantilever wall MEMS switches corresponds to that of the third group of cantilever wall MEMS switches.
将介质衬底的厚度制作为0.127mm;第一保护层1的厚度为2~12mm,且介电常数为1.5,第二保护层2和第三保护层3的厚度为8~20mm,且介电常数为1.25。 The thickness of the dielectric substrate is made to be 0.127mm; the thickness of the first protective layer 1 is 2-12mm, and the dielectric constant is 1.5; the thickness of the second protective layer 2 and the third protective layer 3 is 8-20mm, and the dielectric constant The electric constant is 1.25.
如图3所示,当第一层频率选择表面4上的三组悬梁壁式MEMS开关和第二层频率选择表面5上的三组悬梁壁式MEMS开关都断开时,带通跳变有源频率选择表面的透波频段为为8-9GHz,其中横坐标表示频率,纵坐标表示单位分贝(dB),S11为驻波曲线、S22为衰减曲线,其中8-9GHz以外的频率衰减的非常快;如图4所示,当第一层频率选择表面4上的第一组悬梁壁式MEMS开关和第二层频率选择表面5上的第四组悬梁壁式MEMS开关导通,其他悬梁壁式MEMS开关断开时,透波频段跳变为9-10GHz;如图5所示,当第一层频率选择表面4上的第二组悬梁壁式MEMS开关和第二层频率选择表面5上的第五组悬梁壁式MEMS开关导通,透波频段跳变为10-11GHz;如图6所示,当第一层频率选择表面4上的第三组悬梁壁式MEMS开关和第二层频率选择表面5上的第六组悬梁壁式MEMS开关导通,透波频段跳变为11-12GHz。因此,通过控制悬梁壁式MEMS开关的导通或断开,带通跳变有源频率选择表面可以实现滤波的功能。 As shown in Figure 3, when the three groups of cantilever wall MEMS switches on the first layer of frequency selective surface 4 and the three groups of cantilever wall MEMS switches on the second layer of frequency selective surface 5 are all disconnected, the band-pass jump has The wave-transmitting frequency band of the source frequency selection surface is 8-9GHz, where the abscissa indicates the frequency, and the ordinate indicates the unit decibel (dB), S11 is the standing wave curve, S22 is the attenuation curve, and the attenuation of frequencies other than 8-9GHz is very Fast; as shown in Figure 4, when the first group of cantilever wall MEMS switches on the first layer of frequency selective surface 4 and the fourth group of cantilever wall MEMS switches on the second layer of frequency selective surface 5 are turned on, the other cantilever wall When the type MEMS switch is disconnected, the wave-transparent frequency band jumps to 9-10GHz; The fifth group of cantilever wall MEMS switches is turned on, and the wave-transparent frequency band jumps to 10-11GHz; as shown in Figure 6, when the third group of cantilever wall MEMS switches on the first layer frequency selection surface 4 and the second layer The sixth group of cantilever wall MEMS switches on the frequency selection surface 5 are turned on, and the wave-transmitting frequency band jumps to 11-12GHz. Therefore, by controlling the turn-on or turn-off of the cantilever wall MEMS switch, the band-pass hopping active frequency selective surface can realize the function of filtering.
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