CN104051574A - 一种受潮石墨舟去潮工艺 - Google Patents
一种受潮石墨舟去潮工艺 Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 26
- 239000010439 graphite Substances 0.000 title claims abstract description 26
- 238000007791 dehumidification Methods 0.000 title abstract 7
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Abstract
一种受潮石墨舟去潮工艺,采用以下顺序工艺步骤: 步骤一,将受潮的石墨舟放至炉管内;步骤二,对炉管进行抽真空,炉内压强保持在100mTorr以内;步骤三,向炉内充氮气,使气压保持在500-800mbar;步骤四,对炉管进行升温至300-500℃;步骤五,对炉管再次抽真空,炉内压强保持在100mTorr以内;步骤六,执行去潮:控制炉管进气流量在5slm,压强控制在3000mTorr,持续进行30-60min;步骤七,将石墨舟取出炉管并室温下静置,本发明工艺简单,去潮过程中仅需氮气即可达到去潮目的,并且不会对石墨舟造成损伤,极大的提高了效率,并减少了企业成本,避免了常规处理过程中的拆舟装舟过程,避免了氢氟酸溶液的消耗,省去了镀舟过程,节省了硅烷氨气,节省时间并提高产能。
Description
技术领域
本发明涉及一种处理受潮石墨舟的工艺方法,具体涉及一种无需拆舟装舟过程,无需氢氟酸溶液的消耗,并省去了镀舟过程,节省了硅烷氨气的石墨舟去潮工艺。
背景技术
目前,晶体硅太阳能电池生产工艺制程包含PECVD工段,这道工段的主要作用是在硅片表面镀一层蓝色氮化硅薄膜,目的是减少光的反射,降低电池片漏电,提高电池的电压与电流,当前对晶体硅电池转换效率有较高要求的同时对电池片外观颜色提出了较高要求,要求电池片外观颜色均匀一致;当前行业管式PECVD都会用石墨舟,石墨舟作为硅片镀膜的一种载体,其使用时的状态对氮化硅膜的质量有着决定性的影响。若石墨舟受潮,会直接导致氮化硅膜色不均匀,从而导致残次品率上升,给企业经营成本造成较大的浪费,现有石墨舟去潮过程包括为拆舟、洗舟、装舟、烘干、镀舟、镀膜工艺,在去潮过程中会大量使用氢氟酸溶液及大量的硅烷氨气,去潮周期时间较长,成本较高。
发明内容
为解决上述缺陷本发明提供一种受潮石墨舟去潮工艺,其工艺简单,去潮过程中仅需氮气即可达到去潮目的,并且不会对石墨舟造成损伤,极大的提高了效率,并减少了企业成本。
为实现上述目的,本发明采用以下技术方案:一种受潮石墨舟去潮工艺,采用以下顺序工艺步骤:
步骤一,将受潮的石墨舟放至炉管内;
步骤二,对炉管进行抽真空,炉内压强保持在100mTorr以内;
步骤三,向炉内充氮气,使气压保持在500-800mbar;
步骤四,对炉管进行升温至300-500℃;
步骤五,对炉管再次抽真空,炉内压强保持在100mTorr以内;
步骤六,执行去潮:控制炉管进气流量在5slm,压强控制在3000mTorr,持续进行30-60min;
步骤七,将石墨舟取出炉管并室温下静置。
与现有技术相比,本发明具有以下有益效果:其工艺简单,去潮过程中仅需氮气即可达到去潮目的,并且不会对石墨舟造成损伤,极大的提高了效率,并减少了企业成本,避免了常规处理过程中的拆舟装舟过程,避免了氢氟酸溶液的消耗,省去了镀舟过程,节省了硅烷氨气,节省时间并提高产能。
附图说明
下面结合附图和实施例对本发明进一步说明。
图1一种受潮石墨舟去潮工艺流程图。
具体实施方式
如图1所示,一种受潮石墨舟去潮工艺,采用以下顺序工艺步骤:
步骤一,将受潮的石墨舟放至炉管内;
步骤二,对炉管进行抽真空,炉内压强保持在100mTorr以内;
步骤三,向炉内充氮气,使气压保持在500-800mbar;
步骤四,对炉管进行升温至300-500℃;
步骤五,对炉管再次抽真空,炉内压强保持在100mTorr以内;
步骤六,执行去潮:控制炉管进气流量在5slm,压强控制在3000mTorr,持续进行30-60min;
步骤七,将石墨舟取出炉管并室温下静置。
显而易见,上述实施方式仅为本发明的较佳实施方式,任何在此基础上的简单改进均属于本发明的保护范围。
Claims (1)
1.一种受潮石墨舟去潮工艺,其特征在于采用以下顺序工艺步骤:
步骤一,将受潮的石墨舟放至炉管内;
步骤二,对炉管进行抽真空,炉内压强保持在100mTorr以内;
步骤三,向炉内充氮气,使气压保持在500-800mbar;
步骤四,对炉管进行升温至300-500℃;
步骤五,对炉管再次抽真空,炉内压强保持在100mTorr以内;
步骤六,执行去潮:控制炉管进气流量在5slm,压强控制在3000mTorr,持续进行30-60min;
步骤七,将石墨舟取出炉管并室温下静置。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110061099A (zh) * | 2019-04-28 | 2019-07-26 | 江苏格林保尔光伏有限公司 | 一种石英舟清洗后的处理方法 |
CN110449409A (zh) * | 2019-08-15 | 2019-11-15 | 平煤隆基新能源科技有限公司 | 一种避免pecvd工序中石墨舟印的处理工艺 |
Citations (3)
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WO2009138072A1 (de) * | 2008-05-14 | 2009-11-19 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Vakuum-druckmessvorrichtung für einen rtp-vakuumofen |
CN202871841U (zh) * | 2012-10-17 | 2013-04-10 | 上海太阳能电池研究与发展中心 | 一种专用于CdTe薄膜太阳能电池的热处理装置 |
CN103560171A (zh) * | 2013-10-29 | 2014-02-05 | 宁夏银星能源股份有限公司 | 一种太阳能电池片石墨舟饱和的方法 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2009138072A1 (de) * | 2008-05-14 | 2009-11-19 | Helmholtz-Zentrum Berlin Für Materialien Und Energie Gmbh | Vakuum-druckmessvorrichtung für einen rtp-vakuumofen |
CN202871841U (zh) * | 2012-10-17 | 2013-04-10 | 上海太阳能电池研究与发展中心 | 一种专用于CdTe薄膜太阳能电池的热处理装置 |
CN103560171A (zh) * | 2013-10-29 | 2014-02-05 | 宁夏银星能源股份有限公司 | 一种太阳能电池片石墨舟饱和的方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110061099A (zh) * | 2019-04-28 | 2019-07-26 | 江苏格林保尔光伏有限公司 | 一种石英舟清洗后的处理方法 |
CN110449409A (zh) * | 2019-08-15 | 2019-11-15 | 平煤隆基新能源科技有限公司 | 一种避免pecvd工序中石墨舟印的处理工艺 |
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