CN104049471B - A kind of radially zero additional force turntable - Google Patents
A kind of radially zero additional force turntable Download PDFInfo
- Publication number
- CN104049471B CN104049471B CN201410273266.3A CN201410273266A CN104049471B CN 104049471 B CN104049471 B CN 104049471B CN 201410273266 A CN201410273266 A CN 201410273266A CN 104049471 B CN104049471 B CN 104049471B
- Authority
- CN
- China
- Prior art keywords
- bearing
- roller
- turntable
- friction pulley
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Holding Or Fastening Of Disk On Rotational Shaft (AREA)
- Machine Tool Units (AREA)
Abstract
The invention discloses a kind of radially zero additional force turntable, including pedestal, bearing (ball) cover, front panel, friction pulley, bearing, Step Shaft, little bearing, pivot pin, pad, motor, motor cabinet, shaft coupling, fixing bearing, roller mount, roller, spring bearing, back-up ring, cushion block, workbench, coding disk, and rotating disk.Wherein pedestal, bearing (ball) cover, front panel, friction pulley, bearing, Step Shaft, little bearing, pivot pin, motor, motor cabinet, shaft coupling, fixing bearing, roller mount, roller, spring bearing, back-up ring and the drive mechanism of cushion block composition turntable；Workbench, coding disk and the orientation measurement mechanism of rotating disk composition turntable.Drive mechanism realizes coupling by " U-type groove " on bearing and rotating disk, and then the rotation realizing the workbench to turntable drives, and does not increase workbench radial drive power, it is ensured that the rotational stabilization of workbench simultaneously.
Description
Technical field
The present invention relates to for field of lithography turntable driving machine structure technical field, particularly a kind of radially zero additional force turntable driving machine
Structure.It can realize the rotation of radially zero additional force and drive, it is achieved the high stability of turntable center of rotation, including center of rotation
Beat and translation.
Background technology
Field of lithography or for photoetching configuration test platform, in order to reduce system complexity and cost, usual system does not configures
Focusing and leveling platform, when system is configured with turntable, just the stability to turntable center of rotation proposes the highest requirement, the most very
High beat precision and center translation precision, usual beat is within several seconds, and center translation is within 1um.
Traditional turntable generally uses worm screw turbine drive, and friction pulley drives, and gear drives, chain drive and belt wheel driving
Moving, directly configuring this kind of mechanism on a spinstand can have bigger additional force to rotary shaft, causes extra inclined of center of rotation
Pendulum and translation, can not meet axle center stability requirement.
Summary of the invention
It is an object of the invention to provide the drive mechanism of a kind of radial direction zero additional force and use this drive mechanism, axle center has height
The turntable of degree stability.
The technical solution used in the present invention is: a kind of radially zero additional force turntable, including pedestal, bearing (ball) cover, cover plate, friction
Wheel, bearing, Step Shaft, little bearing, pad, pivot pin, motor, motor cabinet, shaft coupling, fixing bearing, roller mount, rolling
Wheel, spring bearing, back-up ring, cushion block, workbench, coding disk and rotating disk；Wherein:
Pedestal, bearing (ball) cover, cover plate, friction pulley, bearing, Step Shaft, little bearing, pad, pivot pin, motor, motor cabinet,
Shaft coupling, fixing bearing, roller mount, roller, spring bearing, back-up ring and cushion block, form the drive mechanism of this turntable, it is provided that
The driving force of direction of rotation；Pedestal is the support frame of whole device, is arranged in outermost；Motor case part is solid with motor cabinet
Being scheduled on together, motor cabinet is fixed together with roller mount；In roller mount, one end is provided with fixing bearing, and the other end is provided with support
Bearing, roller is through fixing bearing and spring bearing, it is achieved the axial restraint of roller and radially fixed；Shaft coupling one end connects electricity
Machine rotating shaft, the other end connects roller, it is achieved motion transmission；Bearing inner race is fixed by the right side of Step Shaft and cover plate with pedestal
Together, for standing part；Bearing outer ring is fixed together with friction pulley, for motion parts；Pass through between friction pulley and roller
The roller mount with pretension function is tightly pressed together, and passes through frictional force, it is achieved motion transmission, i.e. the rotary motion of motor is delivered to
Roller, is then passed to friction pulley；End face and the bearing (ball) cover outer face of friction pulley link together, on the internal ring of bearing (ball) cover
Being pressed with a little bearing by pivot pin, pivot pin and bearing (ball) cover are threaded connection, and then the rotary motion of machine shaft is by roller,
Friction pulley, bearing (ball) cover and pivot pin are delivered on little bearing；
Workbench, coding disk and rotating disk form the orientation measurement part of this device, and wherein workbench is fixed on coding disk internal ring,
For the output stage of this device, coding disk is integrated with rotary steering structure and angle measuring sensor, internal ring connecting working table, outward
Ring is fixed on pedestal；The right side of workbench is fixed with a rotating disk, outside rotating disk on be configured with one " U-type groove "；
The driving force that drive mechanism provides realizes coupling by " U-type groove " arranged on bearing and rotating disk, completes driving force transmission,
And in rotating shaft radially without additional force, it is ensured that rotating shaft stability；
Further, " U-type groove " clamps little bearing, by manufacturing, it is ensured that have the precompressed to 5 μm of 2 μm, it is ensured that little bearing
Can slide smoothly in U-type groove, again without obvious gap, not only realize motion transmission but also do not increase radially additional force.
Further, described roller mount side is configured with plate spring structure, and opposite side is configured with hinge arrangement, roller mount leaf spring end and
Hinged end is all fixed with pedestal by pad, wherein by reconditioning pad, can regulate the pretightning force between roller and friction pulley,
" hinge+leaf spring " structure of roller mount also adapts to roller and the deviation from circular from of friction pulley and Rotary axle center error simultaneously, it is ensured that any
Time have enough pretightning forces, it is achieved system is moved reliably.
The principle of the present invention is:
The present invention is that a kind of in field of lithography, axle center has the turntable of high stability, and it includes pedestal, bearing (ball) cover,
Cover plate, friction pulley, bearing, Step Shaft, little bearing, pad, pivot pin, motor, motor cabinet, shaft coupling, fixing bearing,
Roller mount, roller, spring bearing, back-up ring and cushion block, form the drive mechanism of this device, use traditional friction pulley side
Case, it is provided that the driving force of direction of rotation；Workbench, coding disk and rotating disk form the orientation measurement part of this device, wherein encode
Dish is integrated with rotary steering structure and angle measuring sensor, it is ensured that rotating shaft stability and angle displacement are measured, it is achieved system controls
Closed loop.The driving force that drive mechanism provides realizes coupling by " U-type groove " arranged on bearing and rotating disk, completes driving force and passes
Pass, and in rotating shaft radially without additional force, it is ensured that rotating shaft stability；
Drive mechanism is by pedestal, bearing (ball) cover, cover plate, friction pulley, bearing, Step Shaft, little bearing, pad, pivot pin, electricity
Machine, motor cabinet, shaft coupling, fixing bearing, roller mount, roller, spring bearing, back-up ring and cushion block composition.Pedestal is whole
The support frame of device, is arranged in outermost；Motor case part is fixed together with motor cabinet, and motor cabinet is fixed with roller mount
Together；In roller mount, one end is provided with fixing bearing, and the other end is provided with spring bearing, and roller is through fixing bearing and support
Bearing, it is achieved the axial restraint of roller and radially fixed；Shaft coupling one end connects machine shaft, and the other end connects roller, it is achieved
Motion transmission.Bearing inner race is fixed together, for standing part by the right side of Step Shaft and cover plate with pedestal；Bearing outer ring
It is fixed together with friction pulley, for motion parts；Between friction pulley and roller, the roller mount by having pretension function is pressed on one
Rise, pass through frictional force, it is achieved motion transmission, i.e. the rotary motion of motor is delivered to roller, is then passed to friction pulley.Friction
End face and the bearing (ball) cover outer face of wheel link together, and the internal ring of bearing (ball) cover is pressed with a little bearing by pivot pin, pivot pin with
Bearing (ball) cover is threaded connection, and then the rotary motion of machine shaft is by roller, friction pulley, bearing (ball) cover and pivot pin transmission
On little bearing.
Orientation measurement part is by workbench, coding disk and rotating disk composition, and wherein workbench is fixed on coding disk internal ring, for this dress
The output stage put, coding disk is integrated with rotary steering structure and angle measuring sensor, internal ring connecting working table, and outer shroud is fixed
On pedestal；The right side of workbench is fixed with a rotating disk, outside rotating disk on be configured with one " U-type groove "." U-type groove " presss from both sides
Hold little bearing, by manufacturing, it is ensured that have the precompressed to 5 μm of 2 μm, it is ensured that little bearing can slide in U-type groove smoothly, again without
Substantially gap, not only realizes motion transmission but also do not increase radially additional force.
Roller mount side is configured with plate spring structure, and opposite side is configured with hinge arrangement, and roller mount leaf spring end and hinged end are all by pad
Sheet is fixed with pedestal, wherein by reconditioning pad, can regulate the pretightning force between roller and friction pulley, the simultaneously " hinge of roller mount
Chain+leaf spring " structure also adapts to roller and the deviation from circular from of friction pulley and Rotary axle center error, it is ensured that whenever have enough pre-
Clamp force, it is achieved system is moved reliably.
Present invention advantage compared with prior art is:
1, the present invention is not directly placed on workbench by described friction wheel driving mechanism, but by little bearing with " U-shaped
Groove " coupling so that the pretightning force of roller+friction pulley only acts in outer layer rotating shaft, and tangential force is passed by little bearing and U-type groove
Pass workbench, owing to workbench rotating shaft is only by tangential force, ensure that the stability in turntable axle center；
2, drive mechanism of the present invention still uses traditional friction wheel mechanism, but abandons traditional spring on pre-pressing structure
Clamping plan, but in roller mount, devise " hinge+leaf spring " structure so that structural reduction, roller can be compensated simultaneously,
The deviation from circular from of friction pulley and Rotary axle center error, it is ensured that have enough pretightning forces in any case.
Accompanying drawing explanation
Fig. 1 is the overall construction drawing of the present invention a kind of radial direction zero additional force turntable；In figure: 10-pedestal；12-cover plate；16-bearing；
18-pivot pin；30-motor；31-motor cabinet；34-roller mount；35-roller；36-spring bearing；38a, 38b-cushion block；52-turns
Dish；
Fig. 2 is the left view of Fig. 1；In figure: 10-pedestal；12-cover plate；16-bearing；18-pivot pin；31-motor cabinet；34-
Roller mount；35-roller；36-spring bearing；38a, 38b-cushion block；52-rotating disk；
Fig. 3 is the A-A sectional view of Fig. 2；10-pedestal；11-bearing (ball) cover；12-cover plate；13-friction pulley；14-bearing；15-
Step Shaft；16-bearing；17-pad；18-pivot pin；30-motor；31-motor cabinet；32-shaft coupling；33-fixes bearing；34-
Roller mount；35-roller；36-spring bearing；37-back-up ring；38a, 38b-cushion block；50-workbench；51-coding disk；52-rotating disk；
Fig. 4 is the B-B sectional view of Fig. 3；
Fig. 5 is roller mount topology view；34-roller mount；34-01-leaf spring；34-02-hinge.
Detailed description of the invention
Understandable in order to make the above-mentioned purpose of the present invention, feature and advantage become apparent from, it is embodied as the present invention below doing in detail
Explanation.
Such as Fig. 1, shown in Fig. 2, Fig. 3, one of the present invention radially zero additional force turntable is by pedestal 10, bearing (ball) cover 11, cover plate
12, friction pulley 13, bearing 14, Step Shaft 15, little bearing 16, pad 17, pivot pin 18, motor 30, motor cabinet 31,
Shaft coupling 32, fixing bearing 33, roller mount 34, roller 35, spring bearing 36, back-up ring 37, cushion block 38, workbench
50, coding disk 51 and rotating disk 52 form.Wherein pedestal 10, bearing (ball) cover 11, cover plate 12, friction pulley 13, bearing 14,
Step Shaft 15, little bearing 16, pad 17, pivot pin 18, motor 30, motor cabinet 31, shaft coupling 32, fixing bearing 33,
Roller mount 34, roller 35, spring bearing 36, back-up ring 37 and cushion block 38 form the drive mechanism of this turntable, use biography
The friction pulley scheme of system, it is provided that rotary driving force；Workbench 50, coding disk 51 and rotating disk 52 form the orientation measurement of this turntable
Part.
Such as Fig. 1, shown in Fig. 3, pedestal 10 is the support frame of whole turntable, is arranged in outermost；Motor 30 housing part
Being fixed together with motor cabinet 31, motor cabinet 31 is fixed together with roller mount 34；In roller mount 34, one end is provided with fixing
Bearing 33, the other end is provided with spring bearing 36, and roller 35 two ends are through fixing bearing 33 and spring bearing 36, it is achieved axle
To radially fixed；Shaft coupling 32 one end connects motor 30 rotating shaft, and the other end connects roller 35, it is achieved motion transmission；This part
Integral arrangement is on the top of this turntable.
Such as Fig. 3, shown in Fig. 4, bearing 14 inner ring is fixed on one by the right side of Step Shaft 15 and cover plate 12 and pedestal 10
Rise, for standing part；Bearing 14 outer ring is fixed together with friction pulley 13, for motion parts；Friction pulley 13 and roller 35
Between be tightly pressed together by the roller mount 34 with pretension function, pass through frictional force, it is achieved motion transmission, i.e. motor 30
Rotary motion is delivered to roller 35, then is delivered to friction pulley 13；
As it is shown on figure 3, friction pulley 13 left side and bearing (ball) cover 11 outer ring surface link together, the internal ring of bearing (ball) cover 11
Being pressed with a little bearing 16 by pivot pin 18 on face, pivot pin 18 and bearing (ball) cover 11 are threaded connection, and then the rotation of motor 30
Turn and move through roller 35, friction pulley 13, bearing (ball) cover 11 and pivot pin 18 and be delivered on little bearing 16；
As it is shown on figure 3, workbench 50, coding disk 51 and the orientation measurement part that rotating disk 52 is this turntable.Wherein workbench
50 are fixed on coding disk 51, for the output stage of this turntable；Coding disk 51 is integrated with rotary steering structure and angular surveying passes
Sensor, internal ring connecting working table 50, outer shroud is fixed on pedestal 10, it is achieved the guiding of workbench 50 and position feedback；Guarantee
Rotating shaft stability and angle displacement are measured, it is achieved system controls closed loop.The right side of workbench 50 is fixed with a rotating disk 52, turns
It is configured with one " U-type groove " on dish 52, sees Fig. 2；
As in figure 2 it is shown, on rotating disk 52, " U-type groove " of configuration clamps little bearing 16, and by manufacturing, it is ensured that there are 2 μm to arrive
The precompressed of 5 μm, it is ensured that little bearing 16 can slide in U-type groove smoothly, again without obvious gap, had not only realized motion transmission but also not
Increase radially additional force；
As it is shown in figure 5, roller mount 34 side is configured with leaf spring 34-01, opposite side is configured with hinge 34-02, roller mount 34
Leaf spring 34-01 end is fixed with pedestal 10 by cushion block 38a, and hinge 34-02 end is fixed with pedestal 10 by cushion block 38b, its
In by reconditioning cushion block 38, the pretightning force between roller 35 and friction pulley 13, the simultaneously " hinge of roller mount 34 can be regulated
+ leaf spring " structure also adapts to roller 35 and the deviation from circular from of friction pulley 13 and Rotary axle center error, it is ensured that whenever have enough
Pretightning force, it is achieved system is moved reliably.
Non-elaborated part of the present invention belongs to the known technology of art technology.
Claims (3)
1. a radial direction zero additional force turntable, it is characterised in that including: pedestal (10), bearing (ball) cover (11), cover plate (12),
Friction pulley (13), bearing (14), Step Shaft (15), little bearing (16), pad (17), pivot pin (18), motor (30),
Motor cabinet (31), shaft coupling (32), fixing bearing (33), roller mount (34), roller (35), spring bearing (36),
Back-up ring (37), cushion block (38), workbench (50), coding disk (51) and rotating disk (52)；Wherein:
By pedestal (10), bearing (ball) cover (11), cover plate (12), friction pulley (13), bearing (14), Step Shaft (15),
Little bearing (16), pad (17), pivot pin (18), motor (30), motor cabinet (31), shaft coupling (32), fixing bearing
(33), roller mount (34), roller (35), spring bearing (36), back-up ring (37) and cushion block (38), form this turntable
Drive mechanism, it is provided that the driving force of direction of rotation；Pedestal (10) is the support frame of whole turntable, is arranged in outermost；
Motor case part is fixed together with motor cabinet (31), and motor cabinet (31) is fixed together with roller mount (34)；Roller
Seat (34) interior one end is provided with fixing bearing (33), and the other end is provided with spring bearing (36), and roller (35) is through fixing
Bearing (33) and spring bearing (36), it is achieved the axial restraint of roller (35) and radially fixed；Shaft coupling (32) one end
Connecting motor (30) rotating shaft, the other end connects roller (35), it is achieved motion transmission；Bearing (14) inner ring passes through Step Shaft
(15) it is fixed together, for standing part with the right side of cover plate (12) and pedestal (10)；Bearing (14) outer ring with rub
Wipe wheel (13) to be fixed together, for motion parts；By having pretension function between friction pulley (13) and roller (35)
Roller mount (34) is tightly pressed together, and passes through frictional force, it is achieved motion transmission, the i.e. rotary motion of motor (30) are delivered to rolling
Wheel (35), is then passed to friction pulley (13)；End face and bearing (ball) cover (11) outer face of friction pulley (13) are connected to one
Rise, the internal ring of bearing (ball) cover (11) is pressed with a little bearing (16), pivot pin (18) and bearing (ball) cover by pivot pin (18)
(11) it is threaded connection, and then the rotary motion of motor (30) rotating shaft is by roller (35), friction pulley (13), bearing
End cap (11) and pivot pin (18) are delivered on little bearing (16)；
Workbench (50), coding disk (51) and rotating disk (52) form the orientation measurement part of this turntable, wherein workbench (50)
Being fixed on coding disk (51) internal ring, for the output stage of this turntable, coding disk (51) is integrated with rotary steering structure and angle
Degree measures sensor, and coding disk (51) internal ring connecting working table (50), coding disk (51) outer shroud is fixed on pedestal (10)
On；The right side of workbench (50) is fixed with a rotating disk (52), and rotating disk (52) is configured with one " U-type groove " on outside；
The driving force that drive mechanism provides realizes coupling by upper " U-type groove " arranged of bearing (14) and rotating disk (52), complete
Become driving force transmission, and in rotating shaft radially without additional force, it is ensured that rotating shaft stability.
A kind of radially zero additional force turntable the most according to claim 1, it is characterised in that: " U-type groove " clamps little bearing
(16), by manufacturing, it is ensured that there is the precompressed to 5 μm of 2 μm, it is ensured that little bearing (16) can slide in U-type groove smoothly,
Again without obvious gap, not only realize motion transmission but also do not increase radially additional force.
A kind of radially zero additional force turntable the most according to claim 1, it is characterised in that: described roller mount (34)
Side is configured with plate spring structure, and opposite side is configured with hinge arrangement, and roller mount leaf spring end and hinged end are all by cushion block and pedestal (10)
Fixing, wherein by reconditioning cushion block (38), the pretightning force between roller (35) and friction pulley (13) can be regulated, simultaneously
" hinge+leaf spring " structure of roller mount (34) also adapts to roller (35) and the deviation from circular from of friction pulley (13) and axle center
Error, it is ensured that whenever have enough pretightning forces, it is achieved system is moved reliably.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410273266.3A CN104049471B (en) | 2014-06-18 | 2014-06-18 | A kind of radially zero additional force turntable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410273266.3A CN104049471B (en) | 2014-06-18 | 2014-06-18 | A kind of radially zero additional force turntable |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104049471A CN104049471A (en) | 2014-09-17 |
| CN104049471B true CN104049471B (en) | 2016-08-31 |
Family
ID=51502516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410273266.3A Expired - Fee Related CN104049471B (en) | 2014-06-18 | 2014-06-18 | A kind of radially zero additional force turntable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104049471B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108338552B (en) * | 2018-02-02 | 2020-03-20 | 上海雅特兰家具科技有限公司 | Television cabinet |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109765A (en) * | 2009-12-25 | 2011-06-29 | 上海微电子装备有限公司 | Rotating platform |
| CN102129175A (en) * | 2010-01-19 | 2011-07-20 | 上海微电子装备有限公司 | Rotating platform supported by air flotation |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004047170A (en) * | 2002-07-09 | 2004-02-12 | Hitachi Ltd | Electron beam lithography system |
| JP2006286131A (en) * | 2005-04-04 | 2006-10-19 | Ricoh Co Ltd | Work rotation drive unit and exposure device for optical disk master disk |
| JP5085394B2 (en) * | 2007-08-02 | 2012-11-28 | 株式会社リコー | Rotating mechanism and electron beam drawing apparatus |
-
2014
- 2014-06-18 CN CN201410273266.3A patent/CN104049471B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109765A (en) * | 2009-12-25 | 2011-06-29 | 上海微电子装备有限公司 | Rotating platform |
| CN102129175A (en) * | 2010-01-19 | 2011-07-20 | 上海微电子装备有限公司 | Rotating platform supported by air flotation |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104049471A (en) | 2014-09-17 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203317051U (en) | Ultraprecise aerostatic rotating table | |
| CN106142027B (en) | Interior sheave intermittent rotary workbench | |
| JP2011510209A5 (en) | ||
| CN106482881B (en) | Measure the device of lubricant frictional force | |
| CN103406704A (en) | Shifter structure | |
| CN104049471B (en) | A kind of radially zero additional force turntable | |
| CN106012898A (en) | Gateway machine core | |
| CN104358979B (en) | A kind of split type ultraprecise static air pressure single axle table | |
| CN103252762B (en) | High-precision rotary table of gapless connecting rod mechanism and capable of moving slightly | |
| CN207329544U (en) | A kind of load-bearing rotary table support and regulating device | |
| JP5021652B2 (en) | Rotating shaft support mechanism | |
| CN104122281A (en) | Hollow shaft goniometer device | |
| CN209132497U (en) | A kind of mechanical speed-control device of mirror surface | |
| JP2013094725A (en) | Kneader | |
| CN206047166U (en) | A kind of bench drill of assembling arrangement of clutch | |
| TWI610753B (en) | Five-axis machining head unit | |
| CN209970665U (en) | Be applied to precision measurement's rotary platform | |
| TWI437169B (en) | Multi - plate centrifugal clutch | |
| CN107121876B (en) | Folding-axis mirror system capable of being positioned | |
| CN202853593U (en) | Apparatus for measuring assembling tooth space of bevel gear | |
| TWM539418U (en) | Five-axis machining head device | |
| CN104632702B (en) | The synchronous drive mechanism of axial flow compressor air inlet guide vane | |
| CN103029023A (en) | Device for correcting deviation of abrasive belts | |
| CN206795026U (en) | Compensation electrode wheel seat | |
| CN106195185B (en) | A kind of spindle gear |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160831 Termination date: 20210618 |