CN104035290B - 一种用于浸没式光刻机的气密封和两级多孔气液回收装置 - Google Patents
一种用于浸没式光刻机的气密封和两级多孔气液回收装置 Download PDFInfo
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CN201410285425.1A CN104035290B (zh) | 2014-06-24 | 2014-06-24 | 一种用于浸没式光刻机的气密封和两级多孔气液回收装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2022218616A1 (en) * | 2021-04-15 | 2022-10-20 | Asml Netherlands B.V. | A fluid handling system, method and lithographic apparatus |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104965392B (zh) * | 2015-07-17 | 2017-04-12 | 浙江大学 | 一种用于浸没式光刻机的垂直回收和气密封装置 |
CN107561865B (zh) * | 2016-06-30 | 2019-10-25 | 上海微电子装备(集团)股份有限公司 | 一种流体抽排装置和一种浸没式光刻机 |
CN112305867B (zh) * | 2019-07-31 | 2022-03-08 | 上海微电子装备(集团)股份有限公司 | 浸液回收防扰动装置、浸没头气液循环系统及光刻设备 |
CN113138537B (zh) * | 2020-01-17 | 2023-10-13 | 浙江大学 | 一种用于浸没式光刻机的浸液供给回收装置 |
CN113138540B (zh) * | 2020-01-17 | 2024-02-09 | 浙江启尔机电技术有限公司 | 一种具有气液分离回收功能的浸液供给回收装置 |
CN112414671B (zh) * | 2020-12-02 | 2022-10-11 | 浙江启尔机电技术有限公司 | 流体系统元器件力学性能检测装置、检测系统及检测方法 |
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CN102707580A (zh) * | 2012-05-30 | 2012-10-03 | 浙江大学 | 用于浸没式光刻机的气密封和气液分离回收装置 |
CN102880016A (zh) * | 2012-10-22 | 2013-01-16 | 浙江大学 | 用于浸没式光刻机的阶梯式自适应气体密封装置 |
CN102937777A (zh) * | 2012-11-12 | 2013-02-20 | 浙江大学 | 用于浸没式光刻机的气密封和气液隔离装置 |
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JP4622595B2 (ja) * | 2005-03-11 | 2011-02-02 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
JP5001343B2 (ja) * | 2008-12-11 | 2012-08-15 | エーエスエムエル ネザーランズ ビー.ブイ. | 流体抽出システム、液浸リソグラフィ装置、及び液浸リソグラフィ装置で使用される液浸液の圧力変動を低減する方法 |
JP2010205914A (ja) * | 2009-03-03 | 2010-09-16 | Nikon Corp | 露光装置、露光方法、及びデバイス製造方法 |
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CN102707580A (zh) * | 2012-05-30 | 2012-10-03 | 浙江大学 | 用于浸没式光刻机的气密封和气液分离回收装置 |
CN102880016A (zh) * | 2012-10-22 | 2013-01-16 | 浙江大学 | 用于浸没式光刻机的阶梯式自适应气体密封装置 |
CN102937777A (zh) * | 2012-11-12 | 2013-02-20 | 浙江大学 | 用于浸没式光刻机的气密封和气液隔离装置 |
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WO2022218616A1 (en) * | 2021-04-15 | 2022-10-20 | Asml Netherlands B.V. | A fluid handling system, method and lithographic apparatus |
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Inventor after: Fu Xin Inventor after: Xu Wenping Inventor after: Chen Wenyu Inventor after: Ma Yingcong Inventor after: Tong Zhangjin Inventor before: Fu Xin Inventor before: Chen Wenyu Inventor before: Xu Wenping Inventor before: Ma Yingcong Inventor before: Tong Zhangjin |
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Effective date of registration: 20200902 Address after: No.99 Lixin Road, Qingshanhu street, Lin'an District, Hangzhou City, Zhejiang Province Patentee after: ZHEJIANG QIER ELECTROMECHANICAL TECHNOLOGY Co.,Ltd. Address before: 310058 Xihu District, Zhejiang, Yuhang Tong Road, No. 866, No. Patentee before: ZHEJIANG University |