CN104034423B - High stability tilting mirror interferometer - Google Patents
High stability tilting mirror interferometer Download PDFInfo
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- CN104034423B CN104034423B CN201410284098.8A CN201410284098A CN104034423B CN 104034423 B CN104034423 B CN 104034423B CN 201410284098 A CN201410284098 A CN 201410284098A CN 104034423 B CN104034423 B CN 104034423B
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Abstract
The invention discloses a kind of high stability tilting mirror interferometer, comprise beam splitter, the first plane mirror, the second plane mirror, inclined mirror, the 3rd plane mirror and collection of energy mirror, wherein, described first plane mirror and described second plane mirror be arranged in parallel and form rotating mirror group, described rotating mirror group is fixedly connected with rotating shaft, rotated by the described rotating mirror group of the rotation of described rotating shaft, described inclined mirror has inclination angle, inclined mirror described in the emergent light vertical incidence of described rotating mirror group.Adopt pair of parallel level crossing to ensure that incident ray is parallel with emergent ray, the rotation of level crossing group ensure that system autostability and decreases detection time, and system architecture is simple, reduces processing resetting difficulty and production cost.
Description
Technical field
The present invention relates to spectrographic detection and technical field of imaging, particularly relate to a kind of high stability time-modulation type double beam interferometer.
Background technology
Fourier transform infrared spectrometer (FourierTransformInfraredSpectrometer, FTIR) be utilize the interference of light to realize the instrument measured the spectrum of target, there is the series of advantages such as hyperchannel, high flux, high s/n ratio, pinpoint accuracy, have a wide range of applications in fields such as industrial and agricultural production, scientific research, environmental monitoring, food security, airborne and spaceborne RS.
Interferometer is the core component of FTIR, and the performance of interferometer determines the quality of apparatus measures result.The interferometer of current FTIR is all based on Michelson interferometer and distressed structure thereof usually, its structure usually by beam splitter, index glass and horizontal glass three part form, index glass and horizontal glass adopt level crossing or cube catoptron usually, by the interference data of the different optical path difference of index glass motion detection.The mode of motion of index glass mainly contains two kinds, and one is rectilinear motion, and one is rotational motion.
For the interferometer of movable reflector straight-line motion, the most direct and the most succinct scheme adopts plane index glass, is still the core patented technology of some internationally famous manufacturers so far, as the Vectra patent of Nicolet company of the U.S..But its kinematic accuracy to index glass requires very strict, there is very high requirement to material, design.Motion process needs to arrange auxiliary optical path, utilizes laser to carry out real-time precise monitoring and correction to the direction collimation, velocity uniformity, displacement etc. that index glass moves; In addition, because the inclination of index glass is rocked measuring accuracy impact very large, just need a set of high-precision control system to make index glass at the uniform velocity easy motion, but this implements still more difficult in practice and cost is higher; Again, index glass straight reciprocating motion is comparatively strong to the processing technology dependence of tracks, and is subject to the interference of the external environments such as shake or vibrations.These reasons all cause interferometer structure complicated, and system stability is poor, and antijamming capability is low.
Too high difficulty is required in order to overcome plane index glass kinematic accuracy, there is the interferometer scheme of many employing corner reflector movable mirror rectilinear motions, greatly reduce the requirement to index glass bearing and movement detection systems, but due to the reciprocal feature of movable reflector straight-line motion, derivative spectomstry detection rate is lower.
On this basis, people propose to adopt and rotate or swing the interferometer scheme of form, and define many patented technologies, wherein the German Bruker company Rocksolid patent swung based on two corner reflectors of regarding as an honour, commercialization; The Dynascan patent swung based on two parallel mirror of PerkinElmer company of the U.S., overcomes the high-precision requirement in interferometer index glass motion process, achieves very high stability.But be still to-and-fro movement owing to swinging, speed of detection is still lower.
On the other hand, from spacer remote sensing angle, no matter be straight reciprocating motion or swing, all cannot avoid the process of acceleration-deceleration, it is difficult to overcome to the disturbance of satellite platform.
Also someone proposes the interferometer based at the uniform velocity rotating mirror in the world, overcomes reciprocating deficiency.But this interferometer generally needs tilting mirror and multiple horizontal glass composition, and structure is comparatively complicated, increases development and design difficulty, also has certain influence to portability.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of high stability tilting mirror interferometer, improves stability, simplifies structure, meanwhile, overcome reciprocating acceleration-deceleration process, enables to adapt to the more wide application such as high-speed inspection, spacer remote sensing.
The object of the embodiment of the present invention is achieved through the following technical solutions:
A kind of high stability tilting mirror interferometer, comprising:
Beam splitter, the first plane mirror, the second plane mirror, inclined mirror, the 3rd plane mirror and collection of energy mirror, wherein, described first plane mirror and described second plane mirror be arranged in parallel and form rotating mirror group, described rotating mirror group is fixedly connected with rotating shaft, by the rotation of described rotating shaft, described rotating mirror group is rotated, described inclined mirror has inclination angle, inclined mirror described in the emergent light vertical incidence of described rotating mirror group.
After directional light enters described beam splitter, a road transmitted ray vertically arrives described 3rd plane mirror and obtains the first transmitted ray, and another road reflection ray arrives described first plane mirror and obtains the first reflection ray;
Described first transmitted ray returns along original optical path after described 3rd catoptron reflection, again obtains the second reflection ray by described beam splitter reflection;
After described first reflection ray sequentially passes through described first plane mirror and described second plane mirror reflection, impinge perpendicularly on described inclined mirror, described second plane mirror is sequentially passed through and described first plane mirror returns along original optical path, again by obtaining the second transmitted ray after described beam splitter transmission through described inclined mirror reflection ray;
Described second reflection ray and described second transmitted ray are assembled through described collection of energy mirror and are arrived detector and formed and interfere.
The technical scheme provided as can be seen from the invention described above embodiment, pair of parallel level crossing is adopted to ensure that incident ray is parallel with emergent ray, rotating mirror group is in rotary course, and the direction of emergent ray is constant all the time, ensure that the stability of system and the coherence of outgoing beam.Because rotating mirror group can realize High Rotation Speed, improve system looks speed.Whole system structure is simple, reduces processing resetting difficulty and production cost.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the embodiment of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is that embodiment of the present invention high stability tilting mirror interferometer forms schematic diagram.
Fig. 2 is that in embodiment of the present invention high stability tilting mirror interferometer, rotating mirror group forms schematic diagram.
Fig. 3 is that in embodiment of the present invention high stability tilting mirror interferometer, rotating mirror group forms schematic diagram.
Fig. 4 is embodiment of the present invention high stability tilting mirror interferometer rotating mechanism schematic diagram.
Fig. 5 is that in embodiment of the present invention high stability tilting mirror interferometer, catoptron group normal and incident ray rotate schematic diagram.
Fig. 6 is the application flow schematic diagram of embodiment of the present invention high stability tilting mirror interferometer.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on embodiments of the invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to protection scope of the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of high stability tilting mirror interferometer, comprise beam splitter 11, first plane mirror 12, second plane mirror 13, inclined mirror 14, the 3rd plane mirror 16 and collection of energy mirror 17, wherein, first plane mirror 12 and the second plane mirror 13 be arranged in parallel and form rotating mirror group, rotating mirror group is fixedly connected with rotating shaft 15, by the rotation of rotating shaft 15, rotating mirror group is rotated, inclined mirror 14 has inclination angle, the emergent light vertical incidence inclined mirror 14 of rotating mirror group:
After directional light enters beam splitter 11, a road transmitted ray vertically arrives the 3rd plane mirror 16 and obtains the first transmitted ray, and another road reflection ray arrives the first plane mirror 12 and obtains the first reflection ray;
Described first transmitted ray returns along original optical path after the 3rd catoptron 16 reflects, and again obtains the second reflection ray by beam splitter 11 reflection;
After described first reflection ray sequentially passes through the first plane mirror 12 and the reflection of the second plane mirror 13, impinge perpendicularly on inclined mirror 14, the second plane mirror 13 is sequentially passed through and the first plane mirror 12 returns along original optical path, again by obtaining the second transmitted ray after beam splitter 11 transmission through inclined mirror 14 reflection ray;
Described second reflection ray and described second transmitted ray are assembled through collection of energy mirror 17 and are arrived detector and formed and interfere.
The technical scheme provided as can be seen from the invention described above embodiment, embodiment of the present invention high stability tilting mirror interferometer is a kind of high stability time-modulation type double beam interferometer, it adopts pair of parallel level crossing to ensure that incident ray is parallel with emergent ray, rotating mirror group is in rotary course, the direction of emergent ray is constant all the time, ensure that the stability of system and the coherence of outgoing beam.Because rotating mirror group can realize High Rotation Speed, improve system looks speed.Whole system structure is simple, reduces processing resetting difficulty and production cost.
The interferometer of the embodiment of the present invention, can also comprise detector, and along with the uniform rotation of rotating mirror group, detector receives interference strength during different optical path difference, the interferogram of formation time series arrangement.
Detector can be understood according to prior art, and therefore not to repeat here.Exemplary, as shown in Figure 1, detector 18.
Collection of energy mirror 17 can be spherical reflector or spherical lens, or described collection of energy mirror is non-spherical reflector or non-spherical lens, unrestricted, can be understood according to prior art.
Beam splitter 11 can comprise beam splitter or Amici prism, unrestricted, can be understood according to prior art.Exemplary, as shown in Figure 1, the light that light source 19 sends changes directional light into after collimation, enters beam splitter 11 and is divided into two bundles, be i.e. twin-beam.
Exemplary, the interferometer of the embodiment of the present invention, as shown in Figure 2, rotating mirror group is fixedly connected with the mode of rotating shaft, Ke Yiwei:
First plane mirror 21 is fixedly connected with by connecting link 23 with the second plane mirror 22, and the first plane mirror 21 is fixedly connected with rotating shaft 24.
Connecting link 23 can be 1 or many.
Or optionally, as shown in Figure 3, rotating mirror group is fixedly connected with the mode of rotating shaft, Ke Yiwei:
Second plane mirror 31 is fixedly connected with rotating shaft 33 by connecting link 32, and the first plane mirror 34 is fixedly connected with rotating shaft 33.
Visible, in axis of rotation process, the first plane mirror remains parallel with the second plane reflection mirror.It will be understood by those skilled in the art that mode that rotating mirror group is fixedly connected with rotating shaft is not by above-mentioned exemplary restriction, any other can implementation tool in protection domain.
As shown in Figure 1, 2, 3, the first plane mirror is fixedly connected with rotating shaft, can comprise:
According to the position of intersecting point of the first plane mirror and its normal (in figure shown in dotted line), rotating shaft one end is fixedly connected with the first plane mirror in position.
Rotating shaft can vertically be arranged, and rotating shaft one end is through inclined mirror.
The other end of rotating shaft connects motor, and motor exports at the uniform velocity rotating speed.
Visible, motor-driven rotatable shaft drives the first plane mirror and the second plane mirror to carry out uniform rotation.
As shown in Figure 4, the interferometer of the embodiment of the present invention, inclined mirror can comprise the plane of reflection (shown in AB plane) and surface level (shown in AC plane), and the plane of reflection is plane reflection minute surface, and the inclination angle theta of inclined mirror is the angle between reflecting slant and surface level.
Or inclined mirror is the plane mirror be obliquely installed, the inclination angle theta of inclined mirror is the angle of inclined mirror when being obliquely installed and between surface level.
Namely, inclined mirror can be the plane mirror be obliquely installed with inclination angle theta, or inclined mirror is wedge shape, and its plane of reflection and surface level are inclination angle theta.The set-up mode of inclined mirror, coordinates rotating mirror group to realize the incident inclined mirror of emergent light of rotating mirror group.
The interferometer of the embodiment of the present invention, when angle between the normal of the distance between the first plane mirror and the second plane mirror, the first plane mirror and rotating shaft and the inclination angle of inclined mirror are known, the rotating speed according to rotating shaft can determine optical path difference.Shown in concrete reference diagram 4, be described.
If the inclination angle of inclined mirror is θ, rotating shaft rotating speed is ω, and in a rotation period during any time t, the angle of the first plane mirror normal and rotating shaft is α, and the incident ray of the first plane mirror and the normal angle of this mirror are β.
In order to reach the object of measurement, need the optical path difference deriving this moment interferometer, concrete derivation step is as follows:
When light is incident to the first plane mirror by beam splitter, reflection ray O ' G that mistake the first plane mirror and rotating shaft intersection point O make boost line l and the second plane mirror being parallel to AB meets at D point, order:
L
1＝OO′；L
2＝O′D；
Vertical range between first plane mirror and the second plane mirror is h.
Can be obtained by triangle relation:
L
1=hcos β formula (1)
L
2=L
1cos (2 β) formula (2)
So:
The expression formula of cos β in derivation formula (2)
The normal of the first plane mirror rotates around the shaft, and as shown in Figure 5, OH is equivalent to rotating shaft to its geometric relationship, and EO is normal, and FO is equivalent to the incident ray of the first plane mirror, ∠ EHF=ω t.Order: HE=R
1, HF=R
2, EO=a, FO=b, FE=c.For convenience of deriving, then make OH=1.Then by triangle relation, have:
A=1cos α formula (4)
B=1cos θ formula (5)
R
1=tan α formula (6)
R
2=tan θ formula (7)
C
2=a
2+ b
2-2abcos β formula (9)
Simultaneous formula (4)-(9), can obtain:
Cos β=cos α cos θ+sin α sin θ cos (ω t) formula (10)
By formula (3) and (10), can obtain
L=2h [cos α cos θ+sin α sin θ cos (ω t)] formula (11)
By above formula, during desirable ω t=π 2, trying to achieve zero crossing light path is:
L
0=2hcos α cos θ formula (12)
Therefore, can obtain optical path difference Δ L is:
Δ L=2 (L-L
0)=4hsin α sin θ cos (ω t) formula (13)
H represents the vertical range between the first plane mirror and the second plane mirror, and α represents the angle between the normal of the first plane mirror and rotating shaft, and θ represents inclination angle.
From formula (13), when h, α, θ are known, as long as can accurately obtain phase place ω t, just can reach the object of precise measuring path difference.The resolution of interferometer can also be changed by changing distance h.
The size of described rotating shaft rotational speed omega can design according to user demand, and it depends primarily on detector sampling rate, incident radiation characteristic and sensitivity, does not repeat at this.Obtain the mode of phase place ω t, for be realized by laser calibration, specifically can be understood with reference to prior art, not repeat at this.
As shown in Figure 6, the concrete implementation step that interferometer of the present invention realizes interfering is:
61, radiation of light source light changes directional light into after collimation, enters beam splitter, and motor-driven rotatable shaft drives the first plane mirror and the second plane mirror to carry out uniform rotation simultaneously;
62, incoming parallel beam is by beam splitter light splitting, and a Reuter is mapped to and reaches the 3rd plane mirror and be called the first transmitted ray, and another road reflection arrival first plane mirror is called the first reflection ray;
63, the first reflection ray is successively after the first plane mirror and the reflection of the second plane mirror, impinges perpendicularly on inclined mirror;
64, the light incided on inclined mirror returns along original optical path after reflection, again by obtaining the second transmitted ray after beam splitter transmission;
65, the first transmitted ray returns along original optical path after the 3rd catoptron reflection, again obtains the second reflection ray by beam splitter reflection;
66, the second transmitted ray and the second reflection ray are assembled to detector through collection of energy mirror, obtain final interference signal.
The interferometer of the embodiment of the present invention:
Adopt inclined mirror and rotary mirror group to replace index glass, overcome the shortcoming of plane movable reflector straight-line motion formula interferometer, to kinematic error immunity, improve system stability, there is stronger antijamming capability.
Inclined mirror described in the emergent light vertical incidence of rotating mirror group, ensure that the former road of light path returns, system light path does not change, and optics into focus point is positioned at point probe all the time, is conducive to improving system stability.
System architecture is simple, reduces processing resetting difficulty and production cost.
Using uniform speed electric motor to carry out rotation to interferometer controls relatively easy, and by accurately obtaining phase place ω t, can reach precise measuring path difference, is conducive to improving measuring accuracy.
Omnidistance can sample at each rotation period, can High Rotation Speed be realized, greatly reduce detection time.
The above; be only the present invention's preferably embodiment, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (9)
1. a high stability tilting mirror interferometer, it is characterized in that, comprise beam splitter, the first plane mirror, the second plane mirror, inclined mirror, the 3rd plane mirror and collection of energy mirror, wherein, described first plane mirror and described second plane mirror be arranged in parallel and form rotating mirror group, described rotating mirror group is fixedly connected with rotating shaft, rotated by the described rotating mirror group of the rotation of described rotating shaft, described inclined mirror has inclination angle, inclined mirror described in the emergent light vertical incidence of described rotating mirror group:
After directional light enters described beam splitter, a road transmitted ray vertically arrives described 3rd plane mirror and obtains the first transmitted ray, and another road reflection ray arrives described first plane mirror and obtains the first reflection ray;
Described first transmitted ray returns along original optical path after described 3rd plane mirror reflection, again obtains the second reflection ray by described beam splitter reflection;
After described first reflection ray sequentially passes through described first plane mirror and described second plane mirror reflection, impinge perpendicularly on described inclined mirror, described second plane mirror is sequentially passed through and described first plane mirror returns along original optical path, again by obtaining the second transmitted ray after described beam splitter transmission through described inclined mirror reflection ray;
Described second reflection ray and described second transmitted ray are assembled through described collection of energy mirror and are arrived detector and interfere with each other.
2. high stability tilting mirror interferometer according to claim 1, is characterized in that, described rotating shaft rotating speed is ω, in a rotation period during any time t, and optical path difference Δ L=2 (L-L
0)=4hsin α sin θ cos (ω t),
Wherein, L=2h [cos α cos θ+sin α sin θ cos (ω t)];
When getting ω t=pi/2, L
0=2hcos α cos θ;
H represents the vertical range between described first plane mirror and described second plane mirror, and α represents the angle between the normal of described first plane mirror and described rotating shaft, and θ represents the inclination angle of described inclined mirror.
3. high stability tilting mirror interferometer according to claim 1 and 2, it is characterized in that, described inclined mirror comprises the plane of reflection and surface level, and the inclination angle of described inclined mirror is the angle between described reflecting slant and described surface level, and the described plane of reflection is plane reflection minute surface;
Or described inclined mirror is the plane mirror be obliquely installed, the inclination angle of described inclined mirror is the angle of described inclined mirror when being obliquely installed and between surface level.
4. high stability tilting mirror interferometer according to claim 1 and 2, is characterized in that, described first plane mirror is fixedly connected with by connecting link with described second plane mirror, and described first plane mirror is fixedly connected with described rotating shaft;
Or described second plane mirror is fixedly connected with described rotating shaft by connecting link, described first plane mirror is fixedly connected with described rotating shaft.
5. high stability tilting mirror interferometer according to claim 4, is characterized in that, described rotating shaft one end is fixedly connected with described first plane mirror with the position of intersecting point of its normal at described first plane mirror.
6. high stability tilting mirror interferometer according to claim 5, it is characterized in that, described rotating shaft is vertically arranged, and described rotating shaft one end is through described inclined mirror.
7. high stability tilting mirror interferometer according to claim 6, is characterized in that, the other end of described rotating shaft connects motor, and described motor exports at the uniform velocity rotating speed.
8. high stability tilting mirror interferometer according to claim 1, it is characterized in that, described beam splitter comprises Amici prism.
9. high stability tilting mirror interferometer according to claim 1, is characterized in that, described collection of energy mirror is spherical reflector or spherical lens, or described collection of energy mirror is non-spherical reflector or non-spherical lens.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5150172A (en) * | 1988-01-11 | 1992-09-22 | Nicolet Instrument Corporation | Interferometer spectrometer having tiltable reflector assembly and reflector assembly therefor |
| EP0634636A1 (en) * | 1993-07-07 | 1995-01-18 | DEUTSCHE FORSCHUNGSANSTALT FÜR LUFT- UND RAUMFAHRT e.V. | Michelson-type interferometer |
| CN101782431A (en) * | 2009-01-15 | 2010-07-21 | 中国科学院西安光学精密机械研究所 | High-resolution reflection type high-speed rotating mirror interference spectrometer |
-
2014
- 2014-06-23 CN CN201410284098.8A patent/CN104034423B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5150172A (en) * | 1988-01-11 | 1992-09-22 | Nicolet Instrument Corporation | Interferometer spectrometer having tiltable reflector assembly and reflector assembly therefor |
| EP0634636A1 (en) * | 1993-07-07 | 1995-01-18 | DEUTSCHE FORSCHUNGSANSTALT FÜR LUFT- UND RAUMFAHRT e.V. | Michelson-type interferometer |
| CN101782431A (en) * | 2009-01-15 | 2010-07-21 | 中国科学院西安光学精密机械研究所 | High-resolution reflection type high-speed rotating mirror interference spectrometer |
Non-Patent Citations (1)
| Title |
|---|
| 高速转镜干涉成像光谱仪;张文喜等;《光子学报》;20060831;第35卷(第8期);全文 * |
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