CN104034423A - Highly-stable rotating-mirror interferometer - Google Patents
Highly-stable rotating-mirror interferometer Download PDFInfo
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- CN104034423A CN104034423A CN201410284098.8A CN201410284098A CN104034423A CN 104034423 A CN104034423 A CN 104034423A CN 201410284098 A CN201410284098 A CN 201410284098A CN 104034423 A CN104034423 A CN 104034423A
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- mirror
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Abstract
The invention discloses a highly-stable rotating-mirror interferometer comprising a beam splitter, a first plane reflecting mirror, a second plane reflecting mirror, a tilt reflecting mirror, a third plane reflecting mirror and an energy collecting mirror. The first plane reflecting mirror and the second plane reflecting mirror are arranged parallelly to form a rotary reflecting mirror group fixedly connected to a rotary shaft, and the rotary reflecting mirror group is driven by rotation of the rotary shaft to rotate; the tilt reflecting mirror is provided with a tilt angle, and the emergent light of the rotary reflecting mirror group vertically enters the tilt reflecting mirror. The incident light and the emergent light are parallel to each other by arrangement of the pair of parallel plane mirrors, system self-stability is improved and detection time is reduced by rotation of the plan mirror group, system structure is simple, and processing, mounting and adjusting difficulties and production cost are lowered.
Description
Technical field
The present invention relates to spectrographic detection and technical field of imaging, relate in particular to a kind of high stability time-modulation type double beam interferometer.
Background technology
Fourier transform infrared spectrometer (Fourier Transform Infrared Spectrometer, FTIR) be to utilize interference of light to realize the instrument that the spectrum of target is measured, there is the series of advantages such as hyperchannel, high flux, high s/n ratio, pinpoint accuracy, in fields such as industrial and agricultural production, scientific research, environmental monitoring, food security, Aero-Space remote sensing, have a wide range of applications.
Interferometer is the core component of FTIR, and the performance of interferometer has determined the quality of apparatus measures result.The interferometer of FTIR is all based on Michelson interferometer and distressed structure thereof conventionally at present, its structure consists of beam splitter, index glass and horizontal glass three parts conventionally, index glass and horizontal glass adopt level crossing or cube catoptron conventionally, by the interference data of the different optical path differences of index glass motion detection.The mode of motion of index glass mainly contains two kinds, and a kind of is rectilinear motion, and a kind of is rotational motion.
For the interferometer of movable reflector straight-line motion, the most direct and the most succinct scheme is to adopt plane index glass, is still so far the core patented technology of some internationally famous manufacturers, as the Vectra patent of U.S. Nicolet company.But it is very strict that its kinematic accuracy to index glass requires, material, design are had to very high requirement.Motion process need to arrange auxiliary optical path, utilizes laser to carry out real-time precise monitoring and correction to the direction collimation of index glass motion, velocity uniformity, displacement etc.; In addition, very large because the inclination of index glass is rocked measuring accuracy impact, just need a set of high-precision control system make at the uniform velocity easy motion of index glass, still more difficult and cost is higher but this implements in practice; Again, index glass straight reciprocating motion is stronger to the processing technology dependence of tracks, and is subject to the interference of the external environments such as shake or vibrations.These reasons all cause interferometer structure complicated, and system stability is poor, and antijamming capability is low.
In order to overcome plane index glass kinematic accuracy, require too high difficulty, there is the straight-line interferometer scheme of many employing corner reflector movable mirror, greatly reduce the requirement to index glass bearing and movement detection systems, but due to the reciprocal feature of movable reflector straight-line motion, cause spectrographic detection speed lower.
On this basis, people propose adopt to rotate or the interferometer scheme of the form of swing, and have formed many patented technologies, the Rocksolid patent swinging based on two corner reflectors that wherein German Bruker company regards as an honour, commercialization; The Dynascan patent swinging based on two parallel mirrors of U.S. Perkin Elmer company, has overcome the high-precision requirement in interferometer index glass motion process, has realized very high stability.But owing to swinging, be still to-and-fro movement, speed of detection is still lower.
On the other hand, from spacer remote sensing angle, no matter be straight reciprocating motion or swing, all cannot avoid the process of acceleration-deceleration, its disturbance to satellite platform is difficult to overcome.
Also someone proposes, based on the interferometer of rotating mirror at the uniform velocity, to have overcome reciprocating deficiency in the world.But this interferometer generally needs tilting mirror and a plurality of horizontal glass to form, and structure is comparatively complicated, has increased development and design difficulty, and portability is also had to certain influence.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of high stability tilting mirror interferometer, improves stability, simplified structure, meanwhile, overcomes reciprocating acceleration-deceleration process, enables to adapt to the more wide applications such as high-speed inspection, spacer remote sensing.
The object of the embodiment of the present invention is achieved through the following technical solutions:
A high stability tilting mirror interferometer, comprising:
Beam splitter, the first plane mirror, the second plane mirror, inclined mirror, the 3rd plane mirror and collection of energy mirror, wherein, described the first plane mirror and described the second plane mirror be arranged in parallel and form rotating mirror group, described rotating mirror group is fixedly connected with rotating shaft, rotation by described rotating shaft is rotated described rotating mirror group, described inclined mirror has inclination angle, inclined mirror described in the emergent light vertical incidence of described rotating mirror group.
Directional light enters after described beam splitter, and described the 3rd plane mirror of the vertical arrival of a road transmitted ray obtains the first transmitted ray, and another road reflection ray arrives described the first plane mirror and obtains the first reflection ray;
Described the first transmitted ray returns along original optical path after described the 3rd catoptron reflection, again by described beam splitter reflection, obtains the second reflection ray;
Described the first reflection ray order is after described the first plane mirror and described the second plane mirror reflection, impinge perpendicularly on described inclined mirror, through described inclined mirror reflection ray, sequentially through described the second plane mirror and described the first plane mirror, along original optical path, return, again by obtaining the second transmitted ray after described beam splitter transmission;
Described the second reflection ray and described the second transmitted ray are assembled and are arrived detector formation interference through described collection of energy mirror.
The technical scheme being provided by the invention described above embodiment can be found out, adopt pair of parallel level crossing to guarantee that incident ray is parallel with emergent ray, rotating mirror group is in rotary course, and the direction of emergent ray is constant all the time, has guaranteed the stability of system and the coherence of outgoing beam.Because rotating mirror group can realize High Rotation Speed, improved system detection rate.Whole system is simple in structure, has reduced processing resetting difficulty and production cost.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the embodiment of the present invention, below the accompanying drawing of required use during embodiment is described is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain other accompanying drawings according to these accompanying drawings.
Fig. 1 is that embodiment of the present invention high stability tilting mirror interferometer forms schematic diagram.
Fig. 2 is that in embodiment of the present invention high stability tilting mirror interferometer, rotating mirror group forms schematic diagram.
Fig. 3 is that in embodiment of the present invention high stability tilting mirror interferometer, rotating mirror group forms schematic diagram.
Fig. 4 is embodiment of the present invention high stability tilting mirror interferometer rotating mechanism schematic diagram.
Fig. 5 is catoptron group normal and incident ray rotation schematic diagram in embodiment of the present invention high stability tilting mirror interferometer.
Fig. 6 is the application flow schematic diagram of embodiment of the present invention high stability tilting mirror interferometer.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on embodiments of the invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to protection scope of the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of high stability tilting mirror interferometer, comprise beam splitter 11, the first plane mirror 12, the second plane mirror 13, inclined mirror 14, the 3rd plane mirror 16 and collection of energy mirror 17, wherein, the first plane mirror 12 and the second plane mirror 13 be arranged in parallel and form rotating mirror group, rotating mirror group is fixedly connected with rotating shaft 15, by the rotation of rotating shaft 15, rotating mirror group is rotated, inclined mirror 14 has inclination angle, the emergent light vertical incidence inclined mirror 14 of rotating mirror group:
Directional light enters after beam splitter 11, and vertical the 3rd plane mirror 16 that arrives of a road transmitted ray obtains the first transmitted ray, and another road reflection ray arrives the first plane mirror 12 and obtains the first reflection ray;
Described the first transmitted ray returns along original optical path after the 3rd catoptron 16 reflections, again by beam splitter 11 reflections, obtains the second reflection ray;
Described the first reflection ray order is after the first plane mirror 12 and the second plane mirror 13 reflections, impinge perpendicularly on inclined mirror 14, through inclined mirror 14 reflection ray orders, through the second plane mirror 13 and the first plane mirror 12, along original optical path, return, again by obtaining the second transmitted ray after beam splitter 11 transmissions;
Described the second reflection ray and described the second transmitted ray are assembled and are arrived detector formation interference through collection of energy mirror 17.
The technical scheme being provided by the invention described above embodiment can be found out, embodiment of the present invention high stability tilting mirror interferometer is a kind of high stability time-modulation type double beam interferometer, it adopts pair of parallel level crossing to guarantee that incident ray is parallel with emergent ray, rotating mirror group is in rotary course, the direction of emergent ray is constant all the time, has guaranteed the stability of system and the coherence of outgoing beam.Because rotating mirror group can realize High Rotation Speed, improved system detection rate.Whole system is simple in structure, has reduced processing resetting difficulty and production cost.
The interferometer of the embodiment of the present invention, can also comprise detector, along with the uniform rotation of rotating mirror group, and interference strength when detector receives different optical path difference, the interferogram of formation time series arrangement.
Detector can be understood according to prior art, and therefore not to repeat here.Exemplary, as shown in Figure 1, detector 18.
Collection of energy mirror 17 can be spherical reflector or spherical lens, or described collection of energy mirror is non-spherical reflector or non-spherical lens, unrestricted, can be understood according to prior art.
Beam splitter 11 can comprise beam splitter or Amici prism, unrestricted, can be understood according to prior art.Exemplary, as shown in Figure 1, the light that light source 19 sends changes directional light into after collimation, enters beam splitter 11 and is divided into two bundles, i.e. twin-beam.
Exemplary, the interferometer of the embodiment of the present invention, as shown in Figure 2, rotating mirror group is fixedly connected with the mode of rotating shaft, can be:
The first plane mirror 21 is fixedly connected with by connecting link 23 with the second plane mirror 22, and the first plane mirror 21 is fixedly connected with rotating shaft 24.
Connecting link 23 can be 1 or many.
Or optional, as shown in Figure 3, rotating mirror group is fixedly connected with the mode of rotating shaft, can be:
The second plane mirror 31 is fixedly connected with rotating shaft 33 by connecting link 32, and the first plane mirror 34 is fixedly connected with rotating shaft 33.
Visible, in rotating shaft rotation process, the first plane mirror remains parallel with the second plane reflection mirror.It will be understood by those skilled in the art that the mode that rotating mirror group is fixedly connected with rotating shaft is not subject to above-mentioned exemplary limitations, any other can implementation tool in protection domain.
As shown in Figure 1, 2, 3, the first plane mirror is fixedly connected with rotating shaft, can comprise:
According to the position of intersecting point of the first plane mirror and its normal (in figure shown in dotted line), rotating shaft one end is fixedly connected with the first plane mirror in position.
Rotating shaft can vertically arrange, and rotating shaft one end is through inclined mirror.
The other end of rotating shaft connects motor, and motor is exported at the uniform velocity rotating speed.
Visible, motor-driven rotatable shaft drives the first plane mirror and the second plane mirror to carry out uniform rotation.
As shown in Figure 4, the interferometer of the embodiment of the present invention, inclined mirror can comprise the plane of reflection (plane shown in AB) and surface level (plane shown in AC), and the plane of reflection is plane reflection minute surface, and the inclination angle [theta] of inclined mirror is the angle between reflecting slant and surface level.
Or inclined mirror is the plane mirror being obliquely installed, the inclination angle [theta] of inclined mirror is the angle of inclined mirror while being obliquely installed and between surface level.
Namely, inclined mirror can be the plane mirror being obliquely installed with inclination angle [theta], or inclined mirror is wedge shape, and its plane of reflection and surface level are inclination angle [theta].The set-up mode of inclined mirror, coordinates rotating mirror group to realize the emergent light incident inclined mirror of rotating mirror group.
The interferometer of the embodiment of the present invention, when the normal of the distance between the first plane mirror and the second plane mirror, the first plane mirror and the inclination angle of the angle between rotating shaft and inclined mirror are while being known, according to the rotating speed of rotating shaft, can determine optical path difference.Specifically, with reference to shown in figure 4, describe.
If the inclination angle of inclined mirror is θ, rotating shaft rotating speed is ω, and during an interior any time t of rotation period, the angle of the first plane mirror normal and rotating shaft is α, and the incident ray of the first plane mirror and the normal angle of this mirror are β.
In order to reach the object of measurement, need to derive the optical path difference of this moment interferometer, the step of specifically deriving is as follows:
When light is by beam splitter during to the first plane mirror incident, cross the first plane mirror and rotating shaft intersection point O and do and be parallel to the boost line l of AB and the reflection ray O ' G of the second plane mirror meets at D point, make:
L
1＝OO′；L
2＝O′D；
Vertical range between the first plane mirror and the second plane mirror is h.
By triangle relation, can be obtained:
L
1=hcos β formula (1)
L
2=L
1cos (2 β) formula (2)
So:
The expression formula of cos β in derivation formula (2)
The normal of the first plane mirror rotates around the shaft, and as shown in Figure 5, OH is equivalent to rotating shaft to its geometric relationship, and EO is normal, and FO is equivalent to the incident ray of the first plane mirror, ∠ EHF=ω t.Order: HE=R
1, HF=R
2, EO=a, FO=b, FE=c.For convenience of deriving, then make OH=1., by triangle relation, have:
A=1cos α formula (4)
B=1cos θ formula (5)
R
1=tan α formula (6)
R
2=tan θ formula (7)
C
2=a
2+ b
2-2abcos β formula (9)
Simultaneous formula (4)-(9), can obtain:
Cos β=cos α cos θ+sin α sin θ cos (ω t) formula (10)
By formula (3) and (10), can obtain
L=2h[cos α cos θ+sin α sin θ cos (ω t)] formula (11)
By above formula, during desirable ω t=π 2, try to achieve zero crossing light path and be:
L
0=2hcos α cos θ formula (12)
Therefore, can obtain optical path difference Δ L is:
Δ L=2 (L-L
0)=4hsin α sin θ cos (ω t) formula (13)
H represents the vertical range between the first plane mirror and the second plane mirror, and α represents the normal of the first plane mirror and the angle between rotating shaft, and θ represents inclination angle.
From formula (13), h, α, in the known situation of θ, as long as can accurately obtain phase place ω t, just can reach the object of precise measuring path difference.Can also change by changing distance h the resolution of interferometer.
The size of described rotating shaft rotational speed omega can design according to user demand, and it depends primarily on detector sampling rate, incident radiation characteristic and sensitivity, at this, does not repeat.Obtain the mode of phase place ω t, can specifically can be understood with reference to prior art for realizing by laser calibration, at this, do not repeat.
As shown in Figure 6, the concrete implementation step that interferometer realization of the present invention is interfered is:
61, radiation of light source light changes directional light into after collimation, enters beam splitter, and motor-driven rotatable shaft drives the first plane mirror and the second plane mirror to carry out uniform rotation simultaneously;
62, incident parallel beam is by beam splitter light splitting, and a Reuter is mapped to and reaches the 3rd plane mirror and be called the first transmitted ray, and another road reflection arrives first plane mirror and is called the first reflection ray;
63, the first reflection ray, successively after the first plane mirror and the reflection of the second plane mirror, impinges perpendicularly on inclined mirror;
64, the light inciding on inclined mirror returns along original optical path after reflection, again by obtaining the second transmitted ray after beam splitter transmission;
65, the first transmitted ray returns along original optical path after the 3rd catoptron reflection, again by beam splitter reflection, obtains the second reflection ray;
66, the second transmitted ray and the second reflection ray are assembled to detector through collection of energy mirror, obtain final interference signal.
The interferometer of the embodiment of the present invention:
Adopt inclined mirror and rotary mirror group to replace index glass, overcome the shortcoming of plane movable reflector straight-line motion formula interferometer, to kinematic error immunity, improved system stability, there is stronger antijamming capability.
Inclined mirror described in the emergent light vertical incidence of rotating mirror group, the assurance former road of light path is returned, and system light path does not change, and optical system focus point is positioned at point probe all the time, is conducive to improve system stability.
System architecture is simple, has reduced processing resetting difficulty and production cost.
Use uniform speed electric motor that interferometer is rotated and controlled relatively easily, and by accurately obtaining phase place ω t, can reach precise measuring path difference, be conducive to improve measuring accuracy.
At each rotation period, can omnidistance sample, can realize High Rotation Speed, greatly reduce detection time.
The above; be only the present invention's embodiment preferably, but protection scope of the present invention is not limited to this, is anyly familiar with in technical scope that those skilled in the art disclose in the present invention; the variation that can expect easily or replacement, within all should being encompassed in protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (9)
1. a high stability tilting mirror interferometer, it is characterized in that, comprise beam splitter, the first plane mirror, the second plane mirror, inclined mirror, the 3rd plane mirror and collection of energy mirror, wherein, described the first plane mirror and described the second plane mirror be arranged in parallel and form rotating mirror group, described rotating mirror group is fixedly connected with rotating shaft, the described rotating mirror group of rotation by described rotating shaft is rotated, described inclined mirror has inclination angle, inclined mirror described in the emergent light vertical incidence of described rotating mirror group:
Directional light enters after described beam splitter, and described the 3rd plane mirror of the vertical arrival of a road transmitted ray obtains the first transmitted ray, and another road reflection ray arrives described the first plane mirror and obtains the first reflection ray;
Described the first transmitted ray returns along original optical path after described the 3rd catoptron reflection, again by described beam splitter reflection, obtains the second reflection ray;
Described the first reflection ray order is after described the first plane mirror and described the second plane mirror reflection, impinge perpendicularly on described inclined mirror, through described inclined mirror reflection ray, sequentially through described the second plane mirror and described the first plane mirror, along original optical path, return, again by obtaining the second transmitted ray after described beam splitter transmission;
Described the second reflection ray and described the second transmitted ray are assembled arrival detector through described collection of energy mirror and are interfered with each other.
2. high stability tilting mirror interferometer according to claim 1, is characterized in that, described rotating shaft rotating speed is ω, during an interior any time t of rotation period, and optical path difference Δ L=2 (L-L
0)=4hsin α sin θ cos (ω t),
Wherein, L=2h[cos α cos θ+sin α sin θ cos (ω t)];
While getting ω t=π 2, L
0=2hcos α cos θ;
H represents the vertical range between described the first plane mirror and described the second plane mirror, and α represents the normal of described the first plane mirror and the angle between described rotating shaft, and θ represents the inclination angle of described inclined mirror.
3. high stability tilting mirror interferometer according to claim 1 and 2, it is characterized in that, described inclined mirror comprises the plane of reflection and surface level, and the inclination angle of described inclined mirror is the angle between described reflecting slant and described surface level, and the described plane of reflection is plane reflection minute surface;
Or described inclined mirror is the plane mirror being obliquely installed, the inclination angle of described inclined mirror is the angle of described inclined mirror while being obliquely installed and between surface level.
4. high stability tilting mirror interferometer according to claim 1 and 2, is characterized in that, described the first plane mirror is fixedly connected with by connecting link with described the second plane mirror, and described the first plane mirror is fixedly connected with described rotating shaft;
Or described the second plane mirror is fixedly connected with described rotating shaft by connecting link, described the first plane mirror is fixedly connected with described rotating shaft.
5. high stability tilting mirror interferometer according to claim 4, is characterized in that, described rotating shaft one end is fixedly connected with described the first plane mirror with the position of intersecting point of its normal at described the first plane mirror.
6. high stability tilting mirror interferometer according to claim 5, is characterized in that, described rotating shaft vertically arranges, and described rotating shaft one end is through described inclined mirror.
7. high stability tilting mirror interferometer according to claim 6, is characterized in that, the other end of described rotating shaft connects motor, and described motor is exported at the uniform velocity rotating speed.
8. high stability tilting mirror interferometer according to claim 1, is characterized in that, described beam splitter comprises beam splitter or Amici prism.
9. high stability tilting mirror interferometer according to claim 1, is characterized in that, described collection of energy mirror is spherical reflector or lens, or described collection of energy mirror is non-spherical reflector or lens.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5150172A (en) * | 1988-01-11 | 1992-09-22 | Nicolet Instrument Corporation | Interferometer spectrometer having tiltable reflector assembly and reflector assembly therefor |
| EP0634636A1 (en) * | 1993-07-07 | 1995-01-18 | DEUTSCHE FORSCHUNGSANSTALT FÜR LUFT- UND RAUMFAHRT e.V. | Michelson-type interferometer |
| CN101782431A (en) * | 2009-01-15 | 2010-07-21 | 中国科学院西安光学精密机械研究所 | High-resolution reflection type high-speed rotating mirror interference spectrometer |
-
2014
- 2014-06-23 CN CN201410284098.8A patent/CN104034423B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5150172A (en) * | 1988-01-11 | 1992-09-22 | Nicolet Instrument Corporation | Interferometer spectrometer having tiltable reflector assembly and reflector assembly therefor |
| EP0634636A1 (en) * | 1993-07-07 | 1995-01-18 | DEUTSCHE FORSCHUNGSANSTALT FÜR LUFT- UND RAUMFAHRT e.V. | Michelson-type interferometer |
| CN101782431A (en) * | 2009-01-15 | 2010-07-21 | 中国科学院西安光学精密机械研究所 | High-resolution reflection type high-speed rotating mirror interference spectrometer |
Non-Patent Citations (1)
| Title |
|---|
| 张文喜等: "高速转镜干涉成像光谱仪", 《光子学报》 * |
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