CN104022684B - Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method - Google Patents
Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method Download PDFInfo
- Publication number
- CN104022684B CN104022684B CN201410293169.0A CN201410293169A CN104022684B CN 104022684 B CN104022684 B CN 104022684B CN 201410293169 A CN201410293169 A CN 201410293169A CN 104022684 B CN104022684 B CN 104022684B
- Authority
- CN
- China
- Prior art keywords
- output displacement
- longitudinal vibration
- driver
- displacement
- incentive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method, belong to piezoelectric driving technology field.In order to solve piezoelectric supersonic driver positioning precision that existing extensional vibration compound realizes driving and resolving power is difficult to improve, and cannot overcome strong to carry, fast, the problem of contradiction between Long Distances and high accuracy.This method is based on horizontal longitudinal vibration piezoelectric ceramic piece and vertical longitudinal vibration piezoelectric ceramic piece spatially quadrature arrangement and drive full existing, and select one of three kinds of incentive modes according to target output displacement, the combination of the combination of two kinds of incentive modes or three kinds of incentive modes realizes the output of different displacement yardstick, described incentive mode comprises interchange continuous pump pattern, pulse step incentive mode and direct current micro-move device pattern, driver is made not only to possess fast, Long Distances responding ability, possesses high accuracy simultaneously, nanoscale positioning function, final realization real across yardstick, ultraprecise drives.It drives across yardstick, ultraprecise for realizing in Piezoelectric Driving field.
Description
Technical field
The invention belongs to piezoelectric driving technology field.
Background technology
Piezoelectric supersonic Driving technique is a kind of inverse piezoelectric effect utilizing piezoelectric ceramic, motivate the vibration in supersonic range in the elastomer, the particle movement with particular track is formed at surface of elastomer specified point or specific region, and then the technology of the macroscopic motion microscopic motion of particle being converted to rotor that is coupled by the friction between stator, rotor.Piezoelectric supersonic driver has low speed high torque, without the need to gear, without electromagnetic interference, fast response time and the advantage such as to cut off self-lock.
It is simple that piezoelectric supersonic driver based on extensional vibration compound realization driving has structure, efficiency is high, to exert oneself large outstanding advantages, the such as patent No. is ZL200910306062.4, denomination of invention is the mandate patent of invention of " T-shaped linear ultrasonic motor oscillator ", which propose a kind of T-shaped longitudinal vibration composite mode beam type linear ultrasonic driver oscillator, solve the prior art problem that with mechanical fan-out capability of the mechanical-electric coupling efficiency low ultrasonic drivers that cause be restricted low because of ceramic material tensile strength, there is structure simple, flexible design, mechanical-electric coupling efficiency is high, high-torque can be realized export, stable performance, be easy to control, can the advantage of producing in serial form.But, by motivating the continuous print elliptic vibrations driving foot place particle to two groups of longitudinal vibration piezoelectric ceramic pieces applying continuous print alternating voltages during this piezoelectric actuator real work, and then realize mover actuating by friction coupling; Owing to adopting continuous alternating voltage to drive, its positioning precision and resolving power are generally micron order, are difficult to realize further raising, also cannot meet the needs of the field develop rapidlys such as Ultra-precision Turning, minute manufacturing and life science.
Summary of the invention
The piezoelectric supersonic driver positioning precision and resolving power that the object of the invention is to solve existing extensional vibration compound realization driving is difficult to improve, and cannot overcome strong to carry, fast, the problem of contradiction between Long Distances and high accuracy, the invention provides a kind of longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method.
Longitudinal vibration composite mode of the present invention foot formula piezoelectric actuator across yardstick driving method,
Described longitudinal vibration composite mode foot formula piezoelectric actuator comprises two groups of longitudinal vibration piezoelectric ceramic pieces and drives foot, two groups of longitudinal vibration piezoelectric ceramic pieces comprise one group of horizontal longitudinal vibration piezoelectric ceramic piece and one group of vertical longitudinal vibration piezoelectric ceramic piece, described horizontal longitudinal vibration piezoelectric ceramic piece and vertical longitudinal vibration piezoelectric ceramic piece spatially quadrature arrangement;
The output realizing different displacement yardstick across yardstick driving method according to one of following three kinds of incentive modes of target output displacement selection, the combination of two kinds of incentive modes or the combination of three kinds of incentive modes of described longitudinal vibration composite mode foot formula piezoelectric actuator; Three kinds of incentive modes are respectively:
The first is for exchanging continuous pump pattern, the continuous ac-excited voltage of two-phase that this incentive mode to two groups of longitudinal vibration piezoelectric ceramic pieces to apply to have in time 90 degree of phase differences respectively, to realize the complex incentive of driver two orthogonal extensional vibrations, thus the vibration of the elliptical orbit continued driving the generation of foot place stable; This vibratory drive mover realizes high thrust, Large travel range, quick and continuous print movement output displacement, and described Large travel range refers to that displacement size is unrestricted;
The second is pulse step incentive mode, this incentive mode applies the two-phase pulse driving voltage in time with 90 degree of phase differences to two groups of longitudinal vibration piezoelectric ceramic pieces respectively, to realize the pulsed complex incentive of driver two orthogonal extensional vibrations, thus the vibration driving foot place to produce intermittent elliptical orbit; This vibratory drive mover realizes micro-meter scale resolving power, low speed and interrupted stepping output displacement;
The third is direct current micro-move device pattern, this incentive mode is by applying direct voltage to horizontal longitudinal vibration piezoelectric ceramic piece, and vertically longitudinal vibration piezoelectric ceramic piece keeps vacant state, realize the longitudinal extension distortion of driver horizontal direction, thus export in the displacement driving foot place to produce horizontal direction; This displacement exports the output driving mover to realize nanoscale resolving power and micro-meter scale stroke, is realized the accurate adjustment of mover output displacement by adjustment direct voltage amplitude.
The maximum output displacement of driving foot that described longitudinal vibration composite mode foot formula piezoelectric actuator obtains under direct current micro-move device pattern higher than pulse step incentive mode under the driving foot optimum resolving power that obtains.
When the target output displacement of driver is less than or equal to the maximum output displacement of driving foot that can obtain under direct current micro-move device pattern, the maximum output displacement of this driving foot is micron dimension, then driver directly enters direct current micro-move device pattern, realizes accurately locating.
The driving foot maximum output displacement and not higher than millimeter magnitude that can obtain under the target output displacement of driver is greater than direct current micro-move device pattern, then first driver adopts pulse step incentive mode, until when the difference of the output displacement obtained under this incentive mode and target output displacement is less than or equal to the maximum output displacement under direct current micro-move device pattern, driver switches to direct current micro-move device pattern, realizes final accurate location.
When the target output displacement of driver is more than tens of milliseconds magnitude, then first driver adopts interchange continuous pump pattern to realize quick larger displacement output, stop after actual output displacement miss the mark output displacement, gather current actual output displacement, then calculate the difference of current actual output displacement and target output displacement;
If the actual output displacement of driver exchanged under continuous pump pattern and the difference of target output displacement are less than or equal to the maximum output displacement under direct current micro-move device pattern, are then directly converted to continuous current excitation pattern, realize final accurate location;
If the actual output displacement of driver exchanged under continuous pump pattern and the difference of target output displacement are greater than the maximum output displacement under direct current micro-move device pattern, then driver first switches to pulse step incentive mode, realize step by step modulating, until the displacement of the actual output of driver and the difference of target output displacement obtain under being less than or equal to direct current micro-move device pattern maximum output displacement time, driver switches to direct current micro-move device pattern again, realizes final accurate location.
Beneficial effect of the present invention is, method of the present invention is by the Combination application of above-mentioned interchange continuous pump pattern, pulse step incentive mode, direct current micro-move device pattern, make that piezoelectric actuator not only possesses fast, Long Distances responding ability, possess high accuracy, nanoscale positioning function simultaneously, real the driving across yardstick, ultraprecise of final realization, the method is widely used in driving the various longitudinal vibration mode compound that utilizes to realize the piezoelectric actuator activated.
Accompanying drawing explanation
Fig. 1 is longitudinal vibration composite mode of the present invention foot formula piezoelectric actuator at the schematic diagram exchanging under continuous pump pattern the continuous ac-excited voltage of two-phase that two groups of longitudinal vibration piezoelectric ceramic pieces apply;
Fig. 2 is the schematic diagram of the two-phase pulse driving voltage that longitudinal vibration composite mode of the present invention foot formula piezoelectric actuator two groups of longitudinal vibration piezoelectric ceramic pieces under pulse step incentive mode apply;
Fig. 3 is the schematic diagram of the direct voltage that under longitudinal vibration composite mode of the present invention foot formula piezoelectric actuator direct current micro-move device pattern, two groups of longitudinal vibration piezoelectric ceramic pieces apply.
Embodiment
Embodiment one: composition graphs 1 to Fig. 3 illustrates present embodiment, the longitudinal vibration composite mode foot formula piezoelectric actuator described in present embodiment across yardstick driving method,
Described longitudinal vibration composite mode foot formula piezoelectric actuator comprises two groups of longitudinal vibration piezoelectric ceramic pieces and drives foot, two groups of longitudinal vibration piezoelectric ceramic pieces comprise one group of horizontal longitudinal vibration piezoelectric ceramic piece and one group of vertical longitudinal vibration piezoelectric ceramic piece, described horizontal longitudinal vibration piezoelectric ceramic piece and vertical longitudinal vibration piezoelectric ceramic piece spatially quadrature arrangement;
The output realizing different displacement yardstick across yardstick driving method according to one of following three kinds of incentive modes of target output displacement selection, the combination of two kinds of incentive modes or the combination of three kinds of incentive modes of described longitudinal vibration composite mode foot formula piezoelectric actuator; Three kinds of incentive modes are respectively:
The first is for exchanging continuous pump pattern, the continuous ac-excited voltage of two-phase that this incentive mode to two groups of longitudinal vibration piezoelectric ceramic pieces to apply to have in time 90 degree of phase differences respectively, to realize the complex incentive of driver two orthogonal extensional vibrations, thus the vibration of the elliptical orbit continued driving the generation of foot place stable; This vibratory drive mover realizes high thrust, Large travel range, quick and continuous print movement output displacement, and described Large travel range refers to that displacement size is unrestricted;
The second is pulse step incentive mode, this incentive mode applies the two-phase pulse driving voltage in time with 90 degree of phase differences to two groups of longitudinal vibration piezoelectric ceramic pieces respectively, to realize the pulsed complex incentive of driver two orthogonal extensional vibrations, thus the vibration driving foot place to produce intermittent elliptical orbit; This vibratory drive mover realizes micro-meter scale resolving power, low speed and interrupted stepping output displacement;
The third is direct current micro-move device pattern, this incentive mode is by applying direct voltage to horizontal longitudinal vibration piezoelectric ceramic piece, and vertically longitudinal vibration piezoelectric ceramic piece keeps vacant state, realize the longitudinal extension distortion of driver horizontal direction, thus export in the displacement driving foot place to produce horizontal direction; This displacement exports the output driving mover to realize nanoscale resolving power and micro-meter scale stroke, is realized the accurate adjustment of mover output displacement by adjustment direct voltage amplitude.
The maximum output displacement of driving foot that described longitudinal vibration composite mode foot formula piezoelectric actuator obtains under direct current micro-move device pattern higher than pulse step incentive mode under the driving foot optimum resolving power that obtains.Can ensure that two kinds of mode of operations can realize effective linking with complementary like this.
During work, first the displacement that driver needs to export is set, then judges to adopt the combination of which kind of energisation mode or energisation mode to realize driving according to the described actual size of the displacement exported that needs:
(1) when the target output displacement of driver is less than or equal to the maximum output displacement of driving foot that can obtain under direct current micro-move device pattern, the maximum output displacement of this driving foot is micron dimension, then driver directly enters direct current micro-move device pattern, realizes accurately locating.
(2) the driving foot maximum output displacement and not higher than millimeter magnitude that can obtain under the target output displacement of driver is greater than direct current micro-move device pattern, then first driver adopts pulse step incentive mode, until when the difference of the output displacement obtained under this incentive mode and target output displacement is less than or equal to the maximum output displacement under direct current micro-move device pattern, driver switches to direct current micro-move device pattern, realizes final accurate location.
(3) when the target output displacement of driver is more than tens of milliseconds magnitude, then first driver adopts interchange continuous pump pattern to realize quick larger displacement output, stop after actual output displacement miss the mark output displacement, gather current actual output displacement, then calculate the difference of current actual output displacement and target output displacement;
If the actual output displacement of driver exchanged under continuous pump pattern and the difference of target output displacement are less than or equal to the maximum output displacement under direct current micro-move device pattern, are then directly converted to continuous current excitation pattern, realize final accurate location;
If the actual output displacement of driver exchanged under continuous pump pattern and the difference of target output displacement are greater than the maximum output displacement under direct current micro-move device pattern, then driver first switches to pulse step incentive mode, realize step by step modulating, until the displacement of the actual output of driver and the difference of target output displacement obtain under being less than or equal to direct current micro-move device pattern maximum output displacement time, driver switches to direct current micro-move device pattern again, realizes final accurate location.
Embodiment two: present embodiment is the further restriction across yardstick driving method to the longitudinal vibration composite mode foot formula piezoelectric actuator described in embodiment one, the voltage waveform applied under described interchange continuous pump pattern and pulse step incentive mode can be sine wave, square wave, triangular wave or trapezoidal wave.
Claims (5)
1. longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method, it is characterized in that, described longitudinal vibration composite mode foot formula piezoelectric actuator comprises two groups of longitudinal vibration piezoelectric ceramic pieces and drives foot, two groups of longitudinal vibration piezoelectric ceramic pieces comprise one group of horizontal longitudinal vibration piezoelectric ceramic piece and one group of vertical longitudinal vibration piezoelectric ceramic piece, described horizontal longitudinal vibration piezoelectric ceramic piece and vertical longitudinal vibration piezoelectric ceramic piece spatially quadrature arrangement;
The output realizing different displacement yardstick across yardstick driving method according to one of following three kinds of incentive modes of target output displacement selection, the combination of two kinds of incentive modes or the combination of three kinds of incentive modes of described longitudinal vibration composite mode foot formula piezoelectric actuator; Three kinds of incentive modes are respectively:
The first is for exchanging continuous pump pattern, the continuous ac-excited voltage of two-phase that this incentive mode to two groups of longitudinal vibration piezoelectric ceramic pieces to apply to have in time 90 degree of phase differences respectively, to realize the complex incentive of driver two orthogonal extensional vibrations, thus the vibration of the elliptical orbit continued driving the generation of foot place stable; This vibratory drive mover realizes high thrust, Large travel range, quick and continuous print movement output displacement, and described Large travel range refers to that displacement size is unrestricted;
The second is pulse step incentive mode, this incentive mode applies the two-phase pulse driving voltage in time with 90 degree of phase differences to two groups of longitudinal vibration piezoelectric ceramic pieces respectively, to realize the pulsed complex incentive of driver two orthogonal extensional vibrations, thus the vibration driving foot place to produce intermittent elliptical orbit; This vibratory drive mover realizes micro-meter scale resolving power, low speed and interrupted stepping output displacement;
The third is direct current micro-move device pattern, this incentive mode is by applying direct voltage to horizontal longitudinal vibration piezoelectric ceramic piece, and vertically longitudinal vibration piezoelectric ceramic piece keeps vacant state, realize the longitudinal extension distortion of driver horizontal direction, thus export in the displacement driving foot place to produce horizontal direction; This displacement exports the output driving mover to realize nanoscale resolving power and micro-meter scale stroke, is realized the accurate adjustment of mover output displacement by adjustment direct voltage amplitude;
The maximum output displacement of driving foot that described longitudinal vibration composite mode foot formula piezoelectric actuator obtains under direct current micro-move device pattern higher than pulse step incentive mode under the driving foot optimum resolving power that obtains.
2. longitudinal vibration composite mode according to claim 1 foot formula piezoelectric actuator across yardstick driving method, it is characterized in that, when the target output displacement of driver is less than or equal to the maximum output displacement of driving foot that can obtain under direct current micro-move device pattern, the maximum output displacement of this driving foot is micron dimension, then driver directly enters direct current micro-move device pattern, realizes accurately locating.
3. longitudinal vibration composite mode according to claim 1 foot formula piezoelectric actuator across yardstick driving method, it is characterized in that, the driving foot maximum output displacement and not higher than millimeter magnitude that can obtain under the target output displacement of driver is greater than direct current micro-move device pattern, then first driver adopts pulse step incentive mode, until when the difference of the output displacement obtained under this incentive mode and target output displacement is less than or equal to the maximum output displacement under direct current micro-move device pattern, driver switches to direct current micro-move device pattern, realizes final accurate location.
4. longitudinal vibration composite mode according to claim 1 foot formula piezoelectric actuator across yardstick driving method, it is characterized in that,
When the target output displacement of driver is more than ten millimeters of magnitudes, then first driver adopts interchange continuous pump pattern to realize quick larger displacement output, when actual output displacement miss the mark output displacement, each setting sampling period gathers once current actual output displacement; Calculate the difference of current actual output displacement and target output displacement again, and adopt one of following method to realize final accurately location;
If the actual output displacement of driver exchanged under continuous pump pattern and the difference of target output displacement are less than or equal to the maximum output displacement under direct current micro-move device pattern, are then directly converted to continuous current excitation pattern, realize final accurate location;
If the actual output displacement of driver exchanged under continuous pump pattern and the difference of target output displacement are greater than the maximum output displacement under direct current micro-move device pattern, then driver first switches to pulse step incentive mode, realize step by step modulating, until the displacement of the actual output of driver and the difference of target output displacement obtain under being less than or equal to direct current micro-move device pattern maximum output displacement time, driver switches to direct current micro-move device pattern again, realizes final accurate location.
5. the longitudinal vibration composite mode foot formula piezoelectric actuator according to claim 1,2,3 or 4 across yardstick driving method, it is characterized in that, the waveform exchanging the driving voltage of continuous pump pattern and pulse step incentive mode is sine waveform, square-wave waveform, triangular wave waveform or trapezoidal wave form.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410293169.0A CN104022684B (en) | 2014-06-25 | 2014-06-25 | Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410293169.0A CN104022684B (en) | 2014-06-25 | 2014-06-25 | Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104022684A CN104022684A (en) | 2014-09-03 |
| CN104022684B true CN104022684B (en) | 2016-03-09 |
Family
ID=51439295
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410293169.0A Active CN104022684B (en) | 2014-06-25 | 2014-06-25 | Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104022684B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3211562B2 (en) * | 1994-05-12 | 2001-09-25 | 株式会社村田製作所 | Piezoelectric vibrator |
| CN2904210Y (en) * | 2006-04-12 | 2007-05-23 | 合肥工业大学 | Large travel high-precision 2-D working bench |
| CN101719734B (en) * | 2009-12-24 | 2012-05-09 | 合肥工业大学 | Attitude adjustment and microstroke nanometer positioning control device for bimodal ultrasonic motor |
| CN103516252A (en) * | 2012-06-27 | 2014-01-15 | 森泉(上海)光电科技有限公司 | Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force |
| KR101822070B1 (en) * | 2012-08-13 | 2018-01-25 | 페어차일드코리아반도체 주식회사 | Piezo driving circuit, and piezo driving method |
-
2014
- 2014-06-25 CN CN201410293169.0A patent/CN104022684B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104022684A (en) | 2014-09-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107147328B (en) | It is bent the two-freedom piezoelectric actuator of piezoelectric vibrator and the motivational techniques for the two-freedom movement realized using the driver | |
| CN104038100B (en) | What realize based on polypody rotary piezoelectric driver drives motivational techniques across yardstick | |
| CN102629122B (en) | Large-stroke high-speed dual-drive nano positioning system | |
| CN108400722B (en) | A kind of two-freedom Piexoelectric actuator and its motivational techniques | |
| CN208782740U (en) | A kind of asymmetric piezoelectricity straight line driver of plow-shape structure | |
| Ning et al. | A dual-mode excitation method of flexure hinge type piezoelectric stick-slip actuator for suppressing backward motion | |
| CN104967355A (en) | Bionic crawling multi-foot linear piezoelectric actuator | |
| CN104022683A (en) | Driving method of super-precision straight line platform by adopting four-footed piezoelectric actuator | |
| CN104038101B (en) | A kind of buckling composite mode foot formula piezoelectric actuator is realized the method driving across yardstick | |
| CN110677073B (en) | Patch type traveling wave type double-sided staggered tooth ultrasonic motor stator | |
| CN104883090A (en) | Piezoelectric linear motor fused with shear piezoelectric actuator composite drive mode | |
| CN102882420A (en) | Surface-mounted piezoelectric ceramic and metal composite beam and method for exciting the composite beam to realize longitudinal and bending compounded vibration | |
| CN203645575U (en) | Cantilever beam piezoelectric motor having energy acquisition function | |
| CN104022682B (en) | Bending vibration composite mode foot formula piezoelectric actuator across yardstick driving method | |
| CN205545000U (en) | Piezoelectricity vibrating wriggling motor | |
| CN104022684B (en) | Longitudinal vibration composite mode foot formula piezoelectric actuator across yardstick driving method | |
| CN113258825A (en) | Piezoelectric driver based on stick-slip and impact principle coupling and control method thereof | |
| CN204349834U (en) | A kind of plate-like ultrasound electric machine with two degrees of freedom | |
| CN110601596B (en) | Standing wave type magnetic repulsion unidirectional rotating motor based on piezoelectric ceramic | |
| CN104578899A (en) | Patch-type circular ring double-pin ultrasonic motor vibrator | |
| CN103746601A (en) | Paster transducer cylinder traveling wave piezoelectric supersonic motor vibrator | |
| CN105245129A (en) | Ultrasonic high-precision linear displacement device | |
| CN103516252A (en) | Dual-mode ultrasonic linear motor with high speed, high resolution ratio and high driving force | |
| CN103560693A (en) | Cantilever beam piezoelectric motor with function of collecting energy | |
| CN102751900B (en) | Two-freedom supersonic motor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |