CN104020486B - A kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof - Google Patents

A kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof Download PDF

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CN104020486B
CN104020486B CN201410256381.XA CN201410256381A CN104020486B CN 104020486 B CN104020486 B CN 104020486B CN 201410256381 A CN201410256381 A CN 201410256381A CN 104020486 B CN104020486 B CN 104020486B
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dazzling film
crystal
radiation detector
radiation
crystal panel
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CN104020486A (en
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焦启刚
谢舒平
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PINGSENG HEALTHCARE (KUNSHAN) Inc
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PINGSENG HEALTHCARE (KUNSHAN) Inc
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Abstract

The present invention provides a kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof, and described manufacture method comprises the following steps: 1) provide a substrate, described substrate carries out pretreatment and is adapted to radiation crystal growth;2) crystal is radiated in described grown on substrates;3) a waterproof anti-dazzling film is provided, adopt laminating or the mode that covers of vacuum by fully enclosed for described radiation crystal between described substrate and waterproof anti-dazzling film, wherein, described waterproof anti-dazzling film at least includes waterproof layer and anti-dazzle photosphere, and described anti-dazzle photosphere is outermost layer.The present invention directly adopts waterproof anti-dazzling film that radiation crystal is packaged, and the simple high efficiency of method for packing, packaging effect are good, it is possible to greatly reduces processing step and production cost, and is possible to prevent to radiate the artifact problem that plane of crystal causes because of secondary reflection.

Description

A kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof
Technical field
The present invention relates to radiography field, particularly relate to a kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof.
Background technology
The radiation detector that radiation detection crystal is formed with visible light sensor (such as CCD, non-crystalline silicon or cmos sensor, photomultiplier tube) combination, the radiographic imaging arts such as these radiation detectors are widely applied and X ray, gamma-rays.It is the key components of radiation detector, and its performance determines the performance of radiation detector.
No matter above-mentioned is that medical imaging detector, and its electrooptical device all cannot shoot X ray or gamma-rays, and the effect of radiation transcrystalline layer is that X ray or gamma-rays are converted to fluorescence (visible ray) this process is essential.Therefore as the absorption efficiency of radiation detection crystal of the key substance that x-ray conversion or gamma-rays are become visible ray, photon conversion efficiency, performance long-time stability directly determine the final performance of detector.
But current high performance radiation detector crystal is all deliquescent material, if cesium iodide material lanthanum bromide etc. is all hygroscopic materials, easily absorb the moisture in air and deliquescence, the optical property making scintillator dies down, particularly image resolution ratio is substantially reduced, therefore, these radiation detector crystal how are effectively encapsulated more particularly important.The particularly restraining factors being encapsulated into decision large area detector performance of the radiation detector crystal of large area panel.
In relevant radiation detector crystal panel encapsulation at present, in common encapsulation scheme, a kind of mode is to encapsulate organic membrane in plane of crystal CVD mode, and it is that Hamamatsu CVD is deposited with Parylene (perlin) evaporation, sputtering inorganic layer (such as Al, SiO that CsI scintillation screen typically represents packaged type2) and Parylene (perlin) evaporation, this technology is disclosed in the patent application document that number of patent application is 99808601 and 200410002794.1.But, in the encapsulation of scintillation screen traditional handicraft, when carrying out Parylene growth by CVD method, its speed is very slow, the speed of growth be about 100-2000 angstrom per minute, with this speed calculation, the Parylene growth needs in patent application document 99808601 and 200410002794.1 100-2000 minute, and in packaging technology, the growth of CVD Parylene and a SiO need to be performed twice at2Sputtering growth, processing step is considerably complicated loaded down with trivial details, and poor effect.The performance of scintillator itself can be brought impact by some encapsulation, as Parylene can enter in the structure interval radiating crystal, affects the optical property etc. of scintillation screen.
Another kind of Normal practice encapsulation watertight transparent adhesive tape, but watertight transparent adhesive tape-discharging bright finish is smooth layer, radiation detector can bring artifact or secondary imaging problem, these artifacts are likely to bring the generation of the accidents such as the mistaken diagnosis in medical diagnosis, and therefore this way is seldom applied in the packaged type of radiation detector crystal.
Also having a kind of method for packing is after making crystal panel, adopts epoxy resin or silica gel etc. that the sidewall of radiation crystal is packaged, and this method technique is also more complicated, and technique and time cost are higher.
In order to solve the problems referred to above, it is an object of the invention to provide a kind of simply high efficiency, method for packing that packaging effect is good, to greatly reduce processing step and production cost.
Summary of the invention
The shortcoming of prior art in view of the above, it is an object of the invention to provide a kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof, be used for solving the problems such as radiation detector crystal panel packaging technology complexity in prior art, high cost, image quality be not good.
For achieving the above object and other relevant purposes, the present invention provides the manufacture method of a kind of anti-dazzling film encapsulation radiation detector crystal panel, comprises the following steps:
1) substrate is provided, described substrate is carried out pretreatment and is adapted to radiation crystal growth;
2) crystal is radiated in described grown on substrates;
3) a waterproof anti-dazzling film is provided, adopt laminating or the mode that covers of vacuum by fully enclosed for described radiation crystal between described substrate and waterproof anti-dazzling film, wherein, described waterproof anti-dazzling film at least includes waterproof layer and anti-dazzle photosphere, and described anti-dazzle photosphere is outermost layer.
Encapsulate a kind of preferred version of manufacture method of radiation detector crystal panel as the anti-dazzling film of the present invention, described substrate includes gripper shoe and sensor devices;Described gripper shoe includes the composite construction of one or more compositions of glass substrate, aluminium base, carbon base plate, fibre optic plate, plastic plate, glass mat;Described sensor devices includes photodiode, photomultiplier tube, the long-pending photomultiplier tube of silicon, non-crystalline silicon tft and CMOS photodiode.
A kind of preferred version of manufacture method of radiation detector crystal panel, step 1 is encapsulated as the anti-dazzling film of the present invention) pretreatment at least includes described substrate being carried out and dry step.
A kind of preferred version of manufacture method of radiation detector crystal panel, step 2 is encapsulated as the anti-dazzling film of the present invention) adopt the mode of vacuum growth to radiate crystal in described grown on substrates.
Encapsulate a kind of preferred version of manufacture method of radiation detector crystal panel as the anti-dazzling film of the present invention, described radiation crystal is for including CsI, CsI (Tl), LaBr3、LaBr3(CeBr3), the halogen system deliquescent crystal such as NaI, NaI (Tl).
Encapsulate a kind of preferred version of manufacture method of radiation detector crystal panel as the anti-dazzling film of the present invention, the light transmittance of described waterproof anti-dazzling film is not less than 80%.
The present invention also provides for a kind of anti-dazzling film encapsulation radiation detector crystal panel, including:
Substrate;
Radiation crystal, is formed on described substrate;
Waterproof anti-dazzling film, is covered in described radiation crystal, and by fully enclosed for described radiation crystal between described substrate and waterproof anti-dazzling film, wherein, described waterproof anti-dazzling film at least includes waterproof layer and anti-dazzle photosphere, and described anti-dazzle photosphere is outermost layer.
As a kind of preferred version of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention, described substrate includes gripper shoe and sensor devices;Described gripper shoe includes the composite construction of one or more compositions of glass substrate, aluminium base, carbon base plate, fibre optic plate, plastic plate, glass mat;Described sensor devices includes photodiode, photomultiplier tube, the long-pending photomultiplier tube of silicon, non-crystalline silicon tft and CMOS photodiode.
As a kind of preferred version of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention, the thickness of described substrate is 0.1mm~3mm.
As a kind of preferred version of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention, described radiation crystal is for including CsI, CsI (Tl), LaBr3、LaBr3(CeBr3), the halogen system deliquescent crystal such as NaI, NaI (Tl).
As a kind of preferred version of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention, the thickness of described radiation crystal is 0.05mm~2mm.
As a kind of preferred version of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention, the light transmittance of described waterproof anti-dazzling film is not less than 80%.
As it has been described above, the present invention provides a kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof, described manufacture method comprises the following steps: 1) provide a substrate, described substrate carries out pretreatment and is adapted to radiation crystal growth;2) crystal is radiated in described grown on substrates;3) a waterproof anti-dazzling film is provided, adopt laminating or the mode that covers of vacuum by fully enclosed for described radiation crystal between described substrate and waterproof anti-dazzling film, wherein, described waterproof anti-dazzling film at least includes waterproof layer and anti-dazzle photosphere, and described anti-dazzle photosphere is outermost layer.The present invention directly adopts waterproof anti-dazzling film that radiation crystal is packaged, and the simple high efficiency of method for packing, packaging effect are good, it is possible to greatly reduce processing step and production cost.
Accompanying drawing explanation
Fig. 1 is shown as the manufacture method steps flow chart schematic diagram of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention.
Fig. 2 is shown as the manufacture method step 1 of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention) structural representation that presents.
Fig. 3 is shown as the manufacture method step 2 of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention) structural representation that presents.
Fig. 4 is shown as the manufacture method step 3 of the anti-dazzling film encapsulation radiation detector crystal panel of the present invention) structural representation that presents.
Element numbers explanation
10 substrates
20 radiation crystal
30 waterproof anti-dazzling films
301 waterproof layers
302 anti-dazzle photospheres
S11~S13 step 1)~step 3)
Detailed description of the invention
Below by way of specific instantiation, embodiments of the present invention being described, those skilled in the art the content disclosed by this specification can understand other advantages and effect of the present invention easily.The present invention can also be carried out by additionally different detailed description of the invention or apply, and the every details in this specification based on different viewpoints and application, can also carry out various modification or change under the spirit without departing from the present invention.
Refer to Fig. 1~Fig. 4.It should be noted that, the diagram provided in the present embodiment only illustrates the basic conception of the present invention in a schematic way, then assembly that in graphic, only display is relevant with the present invention but not component count when implementing according to reality, shape and size drafting, during its actual enforcement, the kenel of each assembly, quantity and ratio can be a kind of random change, and its assembly layout kenel is likely to increasingly complex.
As shown in Figure 1 to 4, the present embodiment provides the manufacture method of a kind of anti-dazzling film encapsulation radiation detector crystal panel, comprises the following steps:
As shown in Figures 1 and 2, first carry out step 1) S11, it is provided that a substrate 10, described substrate 10 is carried out pretreatment be adapted to radiation crystal 20 grow.
Exemplarily, described substrate 10 includes gripper shoe or sensor devices;Described gripper shoe includes the composite construction of one or more compositions of glass substrate, aluminium base, carbon base plate, fibre optic plate, plastic plate, glass mat;Described sensor devices includes photodiode, photomultiplier tube, the long-pending photomultiplier tube of silicon, non-crystalline silicon tft and CMOS photodiode, and the thickness of described substrate 10 is 0.1mm~3mm.
In the present embodiment, described substrate 10 is carbon base plate, and the thickness of described substrate 10 is 1mm.
Exemplarily, described pretreatment at least includes described substrate 10 being carried out and dry step.
In addition, it is necessary to illustrate, suitable technique can be suitably added for specific substrate, make surface treatment be suitable to crystal growth;As during using carbon base plate as substrate, substrate need to be sequentially carried out the technical process such as growth of sandblasting, the growth of blooming, reflective membrane so that it is meet radiation crystal 20 and grow and optimize the process of relevant optical properties.
As shown in Figures 1 and 3, then carry out step 2) S12, growth radiation crystal 20 on described substrate 10.
Exemplarily, the mode adopting vacuum growth grows radiation crystal 20 on described substrate 10.Described radiation crystal 20 is for including CsI, CsI (Tl), LaBr3、LaBr3(CeBr3), the halogen system deliquescent crystal of NaI, NaI (Tl).The thickness of described radiation crystal 20 is 0.05mm~2mm.
In the present embodiment, described radiation crystal 20 is CsI, and the growth pattern of employing is vacuum PVD method, and the thickness of growth is 1mm.
As shown in Fig. 1 and Fig. 4, finally carry out step 3) S13, one waterproof anti-dazzling film 30 is provided, adopt laminating or the mode that covers of vacuum by fully enclosed for described radiation crystal 20 between described substrate 10 and waterproof anti-dazzling film 30, wherein, described waterproof anti-dazzling film 30 at least includes waterproof layer 301 and anti-dazzle photosphere 302, and described anti-dazzle photosphere 302 is outermost layer.
Exemplarily, the light transmittance of described waterproof anti-dazzling film 30 is not less than 80%, so can be prevented effectively from crystal 20 via radiation and change out the absorption problem of visible ray, it addition, the anti-dazzle waterproof membrane air penetrability of the present embodiment is for being not more than 0.5g/ (m2* day), to ensure its water resistance.It should be noted that waterproof anti-dazzling film 30 outermost layer of the present embodiment and exiting surface are necessary for anti-dazzle photosphere 302.
The present embodiment adopts waterproof anti-dazzling film 30 that radiation crystal 20 is packaged, namely described radiation crystal 20 is coated on described substrate 10 surface by described waterproof anti-dazzling film 30 completely, need not such as other the encapsulation step such as epoxy resin, step is very simple, and the effect of extraordinary waterproof and anti-dazzle can be reached, it is possible to effectively reduce packaging cost.
As shown in Figure 4, the present embodiment also provides for a kind of anti-dazzling film encapsulation radiation detector crystal panel, including:
Substrate 10;
Radiation crystal 20, is formed on described substrate 10;
Waterproof anti-dazzling film 30, it is covered in described radiation crystal 20, and by fully enclosed for described radiation crystal 20 between described substrate 10 and waterproof anti-dazzling film 30, wherein, described waterproof anti-dazzling film 30 at least includes waterproof layer 301 and anti-dazzle photosphere 302, and described anti-dazzle photosphere 302 is outermost layer.
Exemplarily, described substrate 10 includes gripper shoe or sensor devices;Described gripper shoe includes the composite construction of one or more compositions of glass substrate, aluminium base, carbon base plate, fibre optic plate, plastic plate, glass mat;Described sensor devices includes photodiode, photomultiplier tube, the long-pending photomultiplier tube of silicon, non-crystalline silicon tft and CMOS photodiode.The thickness of described substrate is 0.1mm~3mm.
In the present embodiment, described substrate 10 is carbon base plate, and the thickness of described substrate 10 is 1mm, and, described carbon base plate 10 surface is also formed with sandblasting, blooming and reflective membrane.
Exemplarily, described radiation crystal 20 is for including CsI, CsI (Tl), LaBr3、LaBr3(CeBr3), the halogen system deliquescent crystal of NaI, NaI (Tl).The thickness of described radiation crystal 20 is 0.05mm~2mm.
In the present embodiment, described radiation crystal 20 is CsI, and its thickness is 1mm.
A kind of preferred version as the anti-dazzling film encapsulation radiation detector crystal panel of the present invention, the light transmittance of described waterproof anti-dazzling film 30 is not less than 80%, so can be prevented effectively from crystal 20 via radiation and change out the absorption problem of visible ray, it addition, the anti-dazzle waterproof membrane air penetrability of the present embodiment is for being not more than 0.5g/ (m2* day), to ensure its water resistance.It should be noted that waterproof anti-dazzling film 30 outermost layer of the present embodiment and exiting surface are necessary for anti-dazzle photosphere 302.
The present embodiment adopts waterproof anti-dazzling film 30 that radiation crystal 20 is packaged, namely described radiation crystal 20 is coated on described substrate 10 surface by described waterproof anti-dazzling film 30 completely, need not such as other the encapsulation step such as epoxy resin, step is very simple, and the effect of extraordinary waterproof and anti-dazzle can be reached, it is possible to effectively reduce packaging cost.
As it has been described above, the present invention provides a kind of anti-dazzling film encapsulation radiation detector crystal panel and preparation method thereof, described manufacture method comprises the following steps: 1) provide a substrate 10, described substrate 10 carries out pretreatment and is adapted to radiation crystal 20 and grows;2) growth radiation crystal 20 on described substrate 10;3) a waterproof anti-dazzling film 30 is provided, adopt laminating or the mode that covers of vacuum by fully enclosed for described radiation crystal 20 between described substrate 10 and waterproof anti-dazzling film 30, wherein, described waterproof anti-dazzling film 30 at least includes waterproof layer 301 and anti-dazzle photosphere 302, and described anti-dazzle photosphere 302 is outermost layer.The present invention directly adopts waterproof anti-dazzling film 30 that radiation crystal 20 is packaged, and the simple high efficiency of method for packing, packaging effect are good, it is possible to greatly reduce processing step and production cost.So, the present invention effectively overcomes various shortcoming of the prior art and has high industrial utilization.
Above-described embodiment is illustrative principles of the invention and effect thereof only, not for the restriction present invention.Above-described embodiment all under the spirit and category of the present invention, can be modified or change by any those skilled in the art.Therefore, art has usually intellectual such as modifying without departing from all equivalences completed under disclosed spirit and technological thought or change, must be contained by the claim of the present invention.

Claims (12)

1. the manufacture method of an anti-dazzling film encapsulation radiation detector crystal panel, it is characterised in that comprise the following steps:
1) substrate is provided, described substrate is carried out pretreatment and is adapted to radiation crystal growth;
2) crystal is radiated in described grown on substrates;
3) a waterproof anti-dazzling film is provided, adopt laminating or the mode that covers of vacuum by fully enclosed for described radiation crystal between described substrate and waterproof anti-dazzling film, wherein, described waterproof anti-dazzling film at least includes waterproof layer and anti-dazzle photosphere, and described anti-dazzle photosphere is outermost layer.
2. the manufacture method of anti-dazzling film according to claim 1 encapsulation radiation detector crystal panel, it is characterised in that: described substrate includes gripper shoe or sensor devices;Described gripper shoe includes the composite construction of one or more compositions of glass substrate, aluminium base, carbon base plate, fibre optic plate, plastic plate, glass mat;Described sensor devices includes photodiode, photomultiplier tube and non-crystalline silicon tft.
3. the manufacture method of anti-dazzling film according to claim 1 encapsulation radiation detector crystal panel, it is characterised in that: step 1) pretreatment at least includes described substrate is carried out and dry step.
4. the manufacture method of anti-dazzling film according to claim 1 encapsulation radiation detector crystal panel, it is characterised in that: step 2) adopt the mode of vacuum growth to radiate crystal in described grown on substrates.
5. the manufacture method of anti-dazzling film according to claim 1 encapsulation radiation detector crystal panel, it is characterised in that: described radiation crystal is CsI, CsI (Tl), LaBr3、LaBr3(CeBr3), one in the halogen system deliquescent crystal of NaI, NaI (Tl).
6. the manufacture method of anti-dazzling film according to claim 1 encapsulation radiation detector crystal panel, it is characterised in that: the light transmittance of described waterproof anti-dazzling film is not less than 80%.
7. an anti-dazzling film encapsulation radiation detector crystal panel, it is characterised in that including:
Substrate;
Radiation crystal, is formed on described substrate;
Waterproof anti-dazzling film, is covered in described radiation crystal, and by fully enclosed for described radiation crystal between described substrate and waterproof anti-dazzling film, wherein, described waterproof anti-dazzling film at least includes waterproof layer and anti-dazzle photosphere, and described anti-dazzle photosphere is outermost layer.
8. anti-dazzling film according to claim 7 encapsulation radiation detector crystal panel, it is characterised in that: described substrate includes gripper shoe and sensor devices;Described gripper shoe includes the composite construction of one or more compositions of glass substrate, aluminium base, carbon base plate, fibre optic plate, plastic plate, glass mat;Described sensor devices includes photodiode, photomultiplier tube and non-crystalline silicon tft.
9. anti-dazzling film according to claim 7 encapsulation radiation detector crystal panel, it is characterised in that: the thickness of described substrate is 0.1mm~3mm.
10. anti-dazzling film according to claim 7 encapsulation radiation detector crystal panel, it is characterised in that: described radiation crystal is CsI, CsI (Tl), LaBr3、LaBr3(CeBr3), one in the halogen system deliquescent crystal of NaI, NaI (Tl).
11. anti-dazzling film according to claim 7 encapsulation radiation detector crystal panel, it is characterised in that: the thickness of described radiation crystal is 0.05mm~2mm.
12. anti-dazzling film according to claim 7 encapsulation radiation detector crystal panel, it is characterised in that: the light transmittance of described waterproof anti-dazzling film is not less than 80%.
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