CN104007028A - Micro component extension test device - Google Patents
Micro component extension test device Download PDFInfo
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- CN104007028A CN104007028A CN201410271032.5A CN201410271032A CN104007028A CN 104007028 A CN104007028 A CN 104007028A CN 201410271032 A CN201410271032 A CN 201410271032A CN 104007028 A CN104007028 A CN 104007028A
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Abstract
The invention discloses a micro component extension test device, and relates to a micro component mechanical property test device. By means of the device, measurement of mechanical property static parameters of micrometer-scale components and exploration of the fatigue characteristic can be achieved. Two guide rails are fixed to an L-shaped base. A precise drive unit is fixed to a right object-carrying platform. A movable object-carrying platform is fixedly connected with the precise drive unit. A fixed object-carrying platform and the movable object-carrying platform are provided with positioning grooves for fixing micro components. The fixed object-carrying platform is fixedly connected with a micro force sensor which is fixedly connected with a force sensor fixing block. The force sensor fixing block is fixedly connected with a left object-carrying platform. A grating ruler is installed on the front side face or the rear side face of the precise drive unit. A reading head installation frame is fixed to the right object-carrying platform. A reading head is fixed to the reading head installation frame. The right object-carrying platform is fixedly connected with a lead screw nut of a lead screw nut pair. The right object-carrying platform is connected with the two guide rails in a sliding mode through four right slide blocks. A stepping motor drives the lead screw nut pair to move. The left object-carrying platform is fixed relative to the guide rails. The micro component extension test device is used for the micro component mechanical property test.
Description
Technical field
The present invention relates to a kind of micro-member mechanics performance testing device.
Background technology
The micro-member of inertial navigation system high elastic modulus alloy loads as easy as rolling off a log fracture failure in test on ground, and in inertial sensor, the characteristic dimension of micro-member is roughly in sub-micron arrives the scope of millimeter.Arrive after micrometer/nanometer yardstick when trickle, due to size effect, all can there is very large change in physical property and the degree affected by environment etc. thereof of micro-construction material itself, significant variation also can occur the relativeness of its mechanical characteristic and suffered body force and surface force etc.Under macroscopic conditions, the mechanical property parameters of material can not meet the designing requirement of MEMS system architecture far away, and the series of technical of being brought by small test specimen makes traditional method of testing and installs also no longer applicable.
In recent years, Chinese scholars is more and more paid attention to the research of micro-construction material mechanical property, has proposed some new method of testing and proving installations.But the data dispersiveness that the whole bag of tricks records is larger, even most basic elastic modulus is the consistent generally acknowledged result of neither one all.In micro-member designs with while carrying out fail-safe analysis, due to the basic data lacking about micro-construction material mechanical property, also do not set up at present an effective design criteria, cause yield rate low, poor reliability, this has seriously hindered the development of MEMS.
In Measurement of Material Mechanical Performance, conventional method comprises uniaxial tension method, Using Nanoindentation, eardrum method, micro-beam deflection method and substrate curvature method etc.Wherein, the most frequently used method is uniaxial tension method, and micro-stretching experiment is to measure micron order elasticity modulus of materials, Poisson ratio, yield strength and the most direct method of fracture strength, and the data of stretching experiment easily explain, test result is more reliable than crooked experiment.But because specimen size is small, a series of technical barriers such as the measurement of the centering of micro-member, clamping, Micro-displacement Driving and small load and micrometric displacement make traditional method of testing and install also no longer applicable.At present also ununified standard of proving installation, and all more complicated of most of proving installation structure, required instrument is all very expensive, and test data dispersiveness is very large.How to reduce to greatest extent test error, ensure to obtain accurately consistent test result, improve testing efficiency, make test data can be processed rapidly and feed back monitoring or directly apply to production practices, these problems are that the difficulty urgently breaking through is also challenge to scientific research personnel.
Summary of the invention
The object of this invention is to provide a kind of micro-member tensile test device, to realize the mechanical property static parameter measurement of micro-meter scale member and probing into of fatigue properties.
The present invention addresses the above problem the technical scheme of taking:
Micro-member tensile test device of the present invention, it comprises accurate driver element, Micro-force sensor, linear grating measurement mechanism, high precision electromigration platform, objective table, power sensor fixed block, two fixtures, described high precision electromigration platform comprises left article carrying platform, right article carrying platform, screw pair, L shaped base, supporting seat, stepper motor, four left sliders, four right slide blocks, two guide rails, described objective table comprises moving objective table and quiet objective table, described linear grating measurement mechanism comprises grating ruler reading head erecting frame, read head and grating scale
The long slab of described L shaped base is horizontally disposed with, and two described guide rail parallels are in the long limit of L shaped base and be fixed on the long slab of L shaped base, described left article carrying platform and right article carrying platform left and right are set up in parallel, described accurate driver element is fixed on right article carrying platform upper surface, described moving objective table is fixedly connected with the left surface of accurate driver element, and the corresponding setting adjacent with moving objective table of described quiet objective table, the upper surface correspondence position of quiet objective table and moving objective table is processed with respectively a locating slot for fixing micro-member, described quiet objective table, Micro-force sensor and power sensor fixed block are successively set on the upper surface of left article carrying platform from right to left, and quiet objective table is fixedly connected with Micro-force sensor, Micro-force sensor is fixedly connected with power sensor fixed block, power sensor fixed block is fixedly connected with the upper surface of left article carrying platform, described grating scale is arranged on the leading flank or trailing flank of accurate driver element, on right article carrying platform, be positioned on the side of homonymy and be fixed with read head erecting frame with grating scale, described number of degrees head and grating scale are oppositely arranged and are fixed on read head erecting frame, the lower surface of described right article carrying platform is fixedly connected with the nut of screw pair, leading screw one end and the supporting seat of screw pair are rotationally connected, the leading screw other end of screw pair and the short slab of L shaped base are rotationally connected, supporting seat is fixedly connected with the long slab of L shaped base, the lower surface of right article carrying platform is fixedly connected with four right slide blocks of rectangular setting, four right slide blocks and two guide rails are slidably connected, described stepper motor is fixed on the short slab of L shaped base, and stepper motor drives feed screw nut secondary motion, the lower surface of left article carrying platform is fixedly connected with four left sliders of rectangular setting, four left sliders are arranged on two guide rails, be arranged between two left sliders on same guide rail a fixture being fixedly connected with guide rail is installed, in work, the relative guide rail of left article carrying platform maintains static, and the relative guide rail of right article carrying platform moves.
The present invention with respect to the beneficial effect of prior art is: the present invention not only can realize the micro-stretching static test of micro-member, and be combined with dynamic test, utilize accurate driver element to drive moving objective table micro-member to be carried out to the fatigue loading that draws of 0-4kHz, micro-member clamping is reliable; Adopt high-precision power sensor (precision 5mN), realize the accurate measurement of load; Adopt high precision linear grating measurement mechanism to realize the accurate detection of micrometric displacement, resolution is 5nm, is convenient to Installation and Debugging.This device can not only be realized the measurement of micro-member static parameter, as the measurement of elastic modulus, yield strength, fracture strength, and can also realize to the probing into of fatigue properties, as fatigue strength.
Brief description of the drawings
Fig. 1 is the overall wiring layout of micro-member tensile test device of the present invention;
Fig. 2 is the accurate driver element wiring layout in Fig. 1;
Fig. 3 is the A place partial enlarged drawing of Fig. 1.
The component names and the label that in above-mentioned figure, relate to are respectively:
L shaped base 1, stepper motor 2, supporting seat 3, power sensor fixed block 4, Micro-force sensor 5, quiet objective table 6, micro-member 7, moving objective table 8, accurate driver element 9, flexible hinge 9-1, pad 9-2, steel ball 9-3, mounting hole 9-4, pretension screw 9-5, piezoelectric ceramics 9-6, screw pair 10, right article carrying platform 11, right slide block 12, grating ruler reading head erecting frame 13, guide rail 14, read head 15, grating scale 16, fixture 17, left slider 18, left article carrying platform 19.
Embodiment
As shown in Fig. 1 ~ Fig. 3, micro-member tensile test device, it comprises accurate driver element 9, Micro-force sensor 5, linear grating measurement mechanism, high precision electromigration platform, objective table, power sensor fixed block 4, two fixtures 17, described high precision electromigration platform comprises left article carrying platform 19, right article carrying platform 11, screw pair 10, L shaped base 1, supporting seat 3, stepper motor 2, four left sliders 18, four right slide blocks 12, two guide rails 14, described objective table comprises moving objective table 8 and quiet objective table 6, described linear grating measurement mechanism comprises grating ruler reading head erecting frame 13, read head 15 and grating scale 16,
The long slab of described L shaped base 1 is horizontally disposed with, and two described guide rails 14 are parallel to the long limit of L shaped base 1 and are fixed on the long slab of L shaped base 1, described left article carrying platform 19 and right article carrying platform 11 left and right are set up in parallel, described accurate driver element 9 is fixed on right article carrying platform 11 upper surfaces, described moving objective table 8 is fixedly connected with the left surface of accurate driver element 9, and the corresponding setting adjacent with moving objective table 8 of described quiet objective table 6, quiet objective table 6 is processed with respectively a locating slot for fixing micro-member 7 with the upper surface correspondence position of moving objective table 8, utilize minuteness milling technology, process locating slot, described quiet objective table 6, Micro-force sensor 5 and power sensor fixed block 4 are successively set on the upper surface of left article carrying platform 19 from right to left, and quiet objective table 6 is fixedly connected with Micro-force sensor 5, Micro-force sensor 5 is fixedly connected with power sensor fixed block 4, power sensor fixed block 4 is fixedly connected with the upper surface of left article carrying platform 19, described grating scale 16 is arranged on the leading flank or trailing flank of accurate driver element 9, on right article carrying platform 11, be positioned on the side of homonymy and be fixed with read head erecting frame 13 with grating scale 16, described number of degrees head 15 is oppositely arranged and is fixed on read head erecting frame 13 with grating scale 16, the lower surface of described right article carrying platform 11 is fixedly connected with the nut of screw pair 10, leading screw one end and the supporting seat 3 of screw pair 10 are rotationally connected, the leading screw other end of screw pair 10 and the short slab of L shaped base 1 are rotationally connected, supporting seat 3 is fixedly connected with the long slab of L shaped base 1, the lower surface of right article carrying platform 11 is fixedly connected with four right slide blocks 12 of rectangular setting, four right slide blocks 12 and two guide rails 14 are slidably connected, lead, described stepper motor 2 is fixed on the short slab of L shaped base 1, stepper motor 2 drives screw pair 10 to move, the lower surface of left article carrying platform 19 is fixedly connected with four left sliders 18 of rectangular setting, four left sliders 18 are arranged on two guide rails 14, be arranged on a fixture 17 being fixedly connected with guide rail 14 is installed between two left sliders 18 on same guide rail 14, in work, the relative guide rail 14 of left article carrying platform 19 maintains static, and the relative guide rail 14 of right article carrying platform 11 moves.
Described Micro-force sensor 5 is commercial sensor, and Micro-force sensor 5 models are GSO-1000-T.
Described accurate driver element 9 comprises flexure hinge mechanism 9-1, pretension screw 9-5, piezoelectric ceramics 9-6, two pad 9-2, two steel ball 9-3, three mounting hole 9-4, described flexure hinge mechanism 9-1 middle part is provided with groove, described piezoelectric ceramics 9-6 is arranged in the groove of flexure hinge mechanism 9-1, piezoelectric ceramics 9-6 two ends are respectively by steel ball 9-3, pad 9-2 contacts with the groove inwall of flexure hinge mechanism 9-1, flexure hinge mechanism 9-1 is provided with three mounting hole 9-4 for being fixedly connected with right article carrying platform 11, in mounting hole 9-4, penetrate screw, flexure hinge mechanism 9-1 is fixedly connected with right article carrying platform 11 by screw, the right side of flexure hinge mechanism 9-1 is processed with threaded hole, described pretension screw 9-5 is threaded with the threaded hole of flexure hinge mechanism 9-1, pretension screw 9-5 is by pad 9-2 and steel ball 9-3 pre-pressing piezoelectric ceramics 9-6.
Accurate driver element 9 not only can be realized the driving of simple extension displacement, and can realize the fatigue loading of the certain frequency of micro-member.
This proving installation can carry out integratedly with CCD test macro or other testing apparatuss, is convenient to realize in-situ monitoring.
Concrete method of testing one: this proving installation is placed on marble vibration-isolating platform, laboratory environment cleaning, constant temperature.First opening control general supply, piezoelectric ceramics control power supply preheating 30 minutes.Adjust the position of dynamic and static objective table, make its mark center line coincidence (preferably utilizing the auxiliary adjustment of CCD).Then,, stick with glue in the locating slot of dynamic and static objective table micro-member taking-up of minuteness milling processes with tweezers.By adjusting, by the center line of dynamic and static objective table and micro-member center superposition (being preferably in CCD viewing field of camera centering), under CCD is auxiliary, test.Utilize the accurate driver element of piezoelectric ceramic actuator control, micro-member is carried out to La-La cyclic fatigue and load, in the time that circulation cycle reaches setting value, testing fatigue finishes.Carry out micro-stretching test, accurate driver element drives moving objective table to stretch to micro-member again, until micro-member is broken, record test data also carries out data processing.Finally infiltrate with acetone soln the micro-member being pulled off, after 5 minutes, with tweezers, micro-member is taken off, test process finishes.
Concrete method of testing two: preliminary work, with method one, is directly carried out micro-stretching test to micro-member, measures the static mechanical performance of test specimen.
Claims (2)
1. a micro-member tensile test device, it is characterized in that: it comprises accurate driver element (9), Micro-force sensor (5), linear grating measurement mechanism, high precision electromigration platform, objective table, power sensor fixed block (4), two fixtures (17), described high precision electromigration platform comprises left article carrying platform (19), right article carrying platform (11), screw pair (10), L shaped base (1), supporting seat (3), stepper motor (2), four left sliders (18), four right slide blocks (12), two guide rails (14), described objective table comprises moving objective table (8) and quiet objective table (6), described linear grating measurement mechanism comprises grating ruler reading head erecting frame (13), read head (15) and grating scale (16),
The long slab of described L shaped base (1) is horizontally disposed with, and described two guide rails (14) are parallel to the long limit of L shaped base (1) and are fixed on the long slab of L shaped base (1), described left article carrying platform (19) and right article carrying platform (11) left and right are set up in parallel, described accurate driver element (9) is fixed on right article carrying platform (11) upper surface, described moving objective table (8) is fixedly connected with the left surface of accurate driver element (9), and the corresponding setting adjacent with moving objective table (8) of described quiet objective table (6), quiet objective table (6) is processed with respectively a locating slot for fixing micro-member (7) with the upper surface correspondence position of moving objective table (8), described quiet objective table (6), Micro-force sensor (5) and power sensor fixed block (4) are successively set on the upper surface of left article carrying platform (19) from right to left, and quiet objective table (6) is fixedly connected with Micro-force sensor (5), Micro-force sensor (5) is fixedly connected with power sensor fixed block (4), power sensor fixed block (4) is fixedly connected with the upper surface of left article carrying platform (19), described grating scale (16) is arranged on the leading flank or trailing flank of accurate driver element (9), upper and the grating scale (16) of right article carrying platform (11) is positioned on the side of homonymy and is fixed with read head erecting frame (13), described number of degrees head (15) is oppositely arranged and is fixed on read head erecting frame (13) with grating scale (16), the lower surface of described right article carrying platform (11) is fixedly connected with the nut of screw pair (10), leading screw one end of screw pair (10) and supporting seat (3) are rotationally connected, the short slab of the leading screw other end of screw pair (10) and L shaped base (1) is rotationally connected, supporting seat (3) is fixedly connected with the long slab of L shaped base (1), the lower surface of right article carrying platform (11) is fixedly connected with four right slide blocks (12) of rectangular setting, four right slide blocks (12) are slidably connected with two guide rails (14), described stepper motor (2) is fixed on the short slab of L shaped base (1), stepper motor (2) drives screw pair (10) motion, the lower surface of left article carrying platform (19) is fixedly connected with four left sliders (18) of rectangular setting, four left sliders (18) are arranged on two guide rails (14), be arranged on a fixture (17) being fixedly connected with guide rail (14) is installed between two left sliders (18) on same guide rail (14), in work, the relative guide rail (14) of left article carrying platform (19) maintains static, and right article carrying platform (11) relatively guide rail (14) moves.
2. micro-member tensile test device according to claim 1, it is characterized in that: described accurate driver element (9) comprises flexure hinge mechanism (9-1), pretension screw (9-5), piezoelectric ceramics (9-6), two pads (9-2), two steel balls (9-3), three mounting holes (9-4), described flexure hinge mechanism (9-1) middle part is provided with groove, described piezoelectric ceramics (9-6) is arranged in the groove of flexure hinge mechanism (9-1), piezoelectric ceramics (9-6) two ends are respectively by steel ball (9-3), pad (9-2) contacts with the groove inwall of flexure hinge mechanism (9-1), flexure hinge mechanism (9-1) is provided with three mounting holes (9-4) for being fixedly connected with right article carrying platform (11), the right side of flexure hinge mechanism (9-1) is processed with threaded hole, described pretension screw (9-5) is threaded with the threaded hole of flexure hinge mechanism (9-1), pretension screw (9-5) is by pad (9-2) and steel ball (9-3) pre-pressing piezoelectric ceramics (9-6).
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104297065A (en) * | 2014-10-28 | 2015-01-21 | 郑州轻工业学院 | Piezoelectric actuation micro-tensile testing device |
| CN106059382A (en) * | 2016-06-06 | 2016-10-26 | 长春工业大学 | Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor |
| CN107210687A (en) * | 2015-01-29 | 2017-09-26 | 新港公司 | The micro, slight type motor mounting of integrated form |
| CN107464759A (en) * | 2017-09-18 | 2017-12-12 | 科广电子（东莞）有限公司 | A kind of device for drawing semi-conducting electrode lead |
| IT201700108535A1 (en) * | 2017-09-28 | 2019-03-28 | Univ Degli Studi Di Trento | DEVICE TO DETERMINE THE MECHANICAL PROPERTIES OF NANOMATERIALS AND RELATIVE METHOD |
| CN109655112A (en) * | 2019-01-25 | 2019-04-19 | 嘉兴学院 | Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement |
| CN110082208A (en) * | 2019-05-14 | 2019-08-02 | 中国石油大学(北京) | Miniature SMA comprehensive characteristic test device |
| CN111504826A (en) * | 2020-05-13 | 2020-08-07 | 吉林大学 | Online automatic detector for mechanical parameters of materials under complex working conditions |
| CN113624600A (en) * | 2021-07-21 | 2021-11-09 | 西安工程大学 | Functional microfilament three-dimensional shape fixing device |
| CN113624600B (en) * | 2021-07-21 | 2024-04-26 | 西安工程大学 | Three-dimensional solid device of functional microfilament |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100064765A1 (en) * | 2007-08-31 | 2010-03-18 | The Board Of Trustees Of The University Of Illinois | Apparatus and method for material testing of microscale and nanoscale samples |
| US20100186520A1 (en) * | 2008-11-12 | 2010-07-29 | Wheeler Iv Robert | Microtesting Rig with Variable Compliance Loading Fibers for Measuring Mechanical Properties of Small Specimens |
| CN102507339A (en) * | 2011-10-27 | 2012-06-20 | 哈尔滨工业大学 | Nanoscale micro-stretching device |
| CN103091178A (en) * | 2013-01-15 | 2013-05-08 | 天津大学 | Mechanical-thermal composite in-situ loading system |
-
2014
- 2014-06-18 CN CN201410271032.5A patent/CN104007028B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100064765A1 (en) * | 2007-08-31 | 2010-03-18 | The Board Of Trustees Of The University Of Illinois | Apparatus and method for material testing of microscale and nanoscale samples |
| US20100186520A1 (en) * | 2008-11-12 | 2010-07-29 | Wheeler Iv Robert | Microtesting Rig with Variable Compliance Loading Fibers for Measuring Mechanical Properties of Small Specimens |
| CN102507339A (en) * | 2011-10-27 | 2012-06-20 | 哈尔滨工业大学 | Nanoscale micro-stretching device |
| CN103091178A (en) * | 2013-01-15 | 2013-05-08 | 天津大学 | Mechanical-thermal composite in-situ loading system |
Non-Patent Citations (2)
| Title |
|---|
| H. OH ET AL.: "Mechanical characterization of sub-100-nm-thick Au thin films by electrostatically actuated tensile testing with several strain rates", 《JAPANESE JOURNAL OF APPLIED PHYSICS》, vol. 53, 14 January 2014 (2014-01-14), pages 027201 - 7 * |
| 苏才钧 等: "微构件材料力学性能测试方法", 《实验力学》, vol. 20, no. 3, 30 September 2005 (2005-09-30), pages 441 - 447 * |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104297065A (en) * | 2014-10-28 | 2015-01-21 | 郑州轻工业学院 | Piezoelectric actuation micro-tensile testing device |
| CN107210687A (en) * | 2015-01-29 | 2017-09-26 | 新港公司 | The micro, slight type motor mounting of integrated form |
| US10161560B2 (en) | 2015-01-29 | 2018-12-25 | Newport Corporation | Integrated picomotor mount |
| CN106059382A (en) * | 2016-06-06 | 2016-10-26 | 长春工业大学 | Rhombic hinge skewed slot type orthogonal driving type piezoelectric stick-slip linear motor and composite excitation method therefor |
| CN106059382B (en) * | 2016-06-06 | 2017-09-01 | 长春工业大学 | Rhombus hinge oblique slot type quadrature drive type piezoelectricity stick-slip line motor and its complex incentive method |
| CN107464759A (en) * | 2017-09-18 | 2017-12-12 | 科广电子（东莞）有限公司 | A kind of device for drawing semi-conducting electrode lead |
| IT201700108535A1 (en) * | 2017-09-28 | 2019-03-28 | Univ Degli Studi Di Trento | DEVICE TO DETERMINE THE MECHANICAL PROPERTIES OF NANOMATERIALS AND RELATIVE METHOD |
| WO2019064249A1 (en) * | 2017-09-28 | 2019-04-04 | Universita' Degli Studi Di Trento | Device and method for determining mechanical properties of nanomaterials |
| US11422075B2 (en) | 2017-09-28 | 2022-08-23 | Universita' Degli Studi Di Trento | Device and method for determining mechanical properties of nanomaterials |
| CN109655112A (en) * | 2019-01-25 | 2019-04-19 | 嘉兴学院 | Adjustable measuring device that is a kind of while measuring piezoelectric actuator load and output displacement |
| CN110082208A (en) * | 2019-05-14 | 2019-08-02 | 中国石油大学(北京) | Miniature SMA comprehensive characteristic test device |
| CN111504826A (en) * | 2020-05-13 | 2020-08-07 | 吉林大学 | Online automatic detector for mechanical parameters of materials under complex working conditions |
| CN113624600A (en) * | 2021-07-21 | 2021-11-09 | 西安工程大学 | Functional microfilament three-dimensional shape fixing device |
| CN113624600B (en) * | 2021-07-21 | 2024-04-26 | 西安工程大学 | Three-dimensional solid device of functional microfilament |
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