CN104006875B - The sense vibrations sensor with temperature-compensating based on surface acoustic wave - Google Patents
The sense vibrations sensor with temperature-compensating based on surface acoustic wave Download PDFInfo
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- CN104006875B CN104006875B CN201410257027.9A CN201410257027A CN104006875B CN 104006875 B CN104006875 B CN 104006875B CN 201410257027 A CN201410257027 A CN 201410257027A CN 104006875 B CN104006875 B CN 104006875B
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- piezoelectric
- piezoelectric substrate
- temperature
- acoustic wave
- surface acoustic
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Abstract
The present invention relates to a kind of sense vibrations sensor with temperature-compensating based on surface acoustic wave, housing and cap including sealed connection, also include pedestal, piezoelectric element and different three SAW resonators of resonant frequency, pedestal and be fixed on the bottom in housing；Piezoelectric element is made up of piezoelectric membrane and piezoelectric substrate, piezoelectric membrane is located at the upper surface of piezoelectric substrate, one end of piezoelectric substrate is fixing end, the other end is projecting end, one end of piezoelectric membrane and the fixing end of piezoelectric substrate are each attached on pedestal, and the upper surface of piezoelectric membrane is located at higher than the bottom surface in housing, at least one SAW resonator, remaining sound surface resonator is located between piezoelectric membrane and piezoelectric substrate；Surface acoustic wave caused by three SAW resonators is propagated in the Y direction, and the Y-direction refers to the direction perpendicular with stretching direction of the fixing end along piezoelectric substrate to the projecting end of piezoelectric substrate.The present invention can simultaneously monitoring vibration and temperature.
Description
Technical field
Present invention relates particularly to a kind of sense vibrations sensor with temperature-compensating based on surface acoustic wave.
Background technology
Existing real-time architecture health monitoring（Structural Health Monitoring, SHM）It is many industrial process
The key of control.In many commercial Applications, the health status of mechanical part under motion state is monitored, such as to high speed train wheel
Main bearing vibrational state real-time monitoring, be very important.With the maintenance based on state（Condition Based
Maintenance, CBM）To substitute current maintenance according to plan（Schedule Based Maintenance, SBM）It is drop
A kind of effective ways of low-maintenance and operation cost.In all of these situations, carried out using polytype sensor real-time
Health monitoring is to keep the key of continuous operating time to greatest extent.Compact-sized, wireless and passive sensor is especially suitable
For in the environment of danger, continuously entering in real time such as under outdoor bad weather circumstances, under high temperature, high electromagnetic radiation environment
Row real-time architecture health monitoring.These small-sized wireless sourceless sensors can the continuous health status of supervision equipment in real time,
And provide alarm signal to central control room when basic concept has exceeded specific scope.
Based on surface acoustic wave（SAW）Sensor, appearance and size is small, wireless, passive, is well suited for this kind of structural health prison
Survey application.Sensor based on SAW is completely passive（Without battery）, there is very high reliability.Coordinate with radio read-write device, this
The reading distance of a little passive sensors can reach more than 5 meters.
Because piezoelectric property is to the high sensitivity of outside environmental change, SAW device, as delay line, reflection delay line are harmonious
Shake device, is highly suitable for measuring stress, strain, temperature, pressure, acceleration, vibration, and other physical quantitys.In normal conditions
Under, SAW device makes in piezoelectric substrate, and it, which includes one or more, to be converted into sound surface by the electric signal of application
Ripple, then surface acoustic wave is converted to the interdigital transducer of electric signal（IDT）Structure.
The physical quantity and/or chemical composition of all outsides can all cause the pressure that can be monitored by the sensor based on SAW
The change of electric substrate material properties.Depending on the design structure of SAW sensor, such external physical amount and/or chemical composition
Change can be identified, they it is either associated with the resonance frequency shift of SAW resonator or with SAW delay lines
Time delay or the phase offset of electric signal be associated, or the reflection power spectrum density with SAW delay-line structures（PSD）'s
Change is associated.
In the prior art, a wired SAW vibrating sensor is by the difference on a piezoelectric cantilever substrate
Two identical SAW resonators are realized on surface respectively to accomplish.It is very that this design implements in a manufacturing process
Difficult, it is not only complicated, and production cost is also high, and therefore, it is difficult to provide any significant batch in reality
Production.Also some schemes are the structures using SAW filter, are installed near cantilever fixing end to do vibration monitoring.
But the device that this centre frequency by monitoring wave filter changes, due to no any reference data, it is difficult to effectively distinguish
Frequency change caused by vibration and temperature, thus be difficult to obtain accurate measurement so that measurement accuracy is low.It is also another
Design, it uses a single SAW resonator, near the fixing end of cantilever, monitored because caused by glass breaking
The acoustic vibration of specific frequency（Applied to intrusion detection）.Although it can be used for the application scenario, this design is only used for
Whether the vibration for monitoring a certain specific frequency occurs, and can not be used for monitoring the vibration in wide frequency ranges, and does not have
Temperature compensation function.
The content of the invention
The purpose of the present invention is：There is provided one kind be not only simple in structure, be compact, production cost is low, and can monitoring vibration,
And the high sense vibrations sensor with temperature-compensating based on surface acoustic wave of measurement accuracy, to overcome prior art not
Foot.
In order to achieve the above object, the technical scheme is that：It is a kind of that temperature-compensating is had based on surface acoustic wave
Sense vibrations sensor, including housing and cap, the housing and cap are tightly connected, and its innovative point is：
A, also include pedestal, piezoelectric element and three SAW resonators, the pedestal and be fixed on the bottom in housing；
B, the piezoelectric element is made up of piezoelectric membrane and piezoelectric substrate, and the piezoelectric membrane is located at the upper of piezoelectric substrate
Surface, one end of piezoelectric substrate is fixing end, and the other end is projecting end, and one end of piezoelectric membrane and the fixing end of piezoelectric substrate are equal
It is fixed on pedestal, and the bottom surface being higher than in housing,
At least one SAW resonator is located at the upper surface of piezoelectric membrane, and remaining sound surface resonator is located at pressure
Between conductive film and piezoelectric substrate；
C, three SAW resonators are connected in parallel, and resonant frequency is different；
D, surface acoustic wave caused by three SAW resonators is propagated in the Y direction, and the Y-direction refers to
The perpendicular direction with stretching direction of the fixing end along piezoelectric substrate to the projecting end of piezoelectric substrate.
In the above-mentioned technical solutions, in addition to briquetting；The briquetting is located at the projecting end of piezoelectric substrate, and the briquetting with
Piezoelectric substrate is either mutual being integrated of being fixedly connected.
In the above-mentioned technical solutions, when the briquetting is fixedly connected with piezoelectric substrate, the briquetting is golden briquetting, either
Silver-colored briquetting, or platinum briquetting.Certainly, it is not limited to which this, briquetting can also use the mass of other materials.
In the above-mentioned technical solutions, the housing and cap are metal shell and metal cap respectively.
In the above-mentioned technical solutions, the housing and cap are ceramic shell and metal cap respectively.
In the above-mentioned technical solutions, the piezoelectric membrane is zinc oxide either aluminium nitride.
In the above-mentioned technical solutions, the piezoelectric substrate can be that ST cuts quartz or be that FST- cuts quartz.The ST is cut
ST the or FST directions that quartz or FST- cut quartz overlap with the direction of propagation of surface acoustic wave caused by SAW resonator,
In the Y direction.Certainly, it is not limited to which this, piezoelectric substrate can also use other piezo-electric crystals.
Good effect is possessed by the present invention：After above-mentioned sensor construction, by three surface acoustic waves
Resonator is arranged on piezoelectric element, and is arranged to layer structure, is sealed in housing by cap；Therefore, the present invention not
It is only simple in construction, compact, and production cost is low, and be can measurement temperature and the surface acoustic wave of vibration simultaneously（SAW）Sensor,
And the measurement of temperature and vibration is realized by way of difference, by the way that the resonant frequency of the resonator of sense vibrations is subtracted
The change of the resonant frequency because of caused by temperature drift is gone, the measured value of the vibration of a temperature-compensating can be obtained；So, originally
Invention can monitor acceleration, have temperature compensation function, and measurement accuracy is high.
Brief description of the drawings
Fig. 1 is the structural representation of the first embodiment of the invention；
Fig. 2 is the A-A sectional views that Fig. 1 does not include housing；
Fig. 3 is the structural representation of second of embodiment of the invention；
Fig. 4 is the structural representation for the third embodiment that the present invention does not include housing and cap.
Embodiment
Below in conjunction with accompanying drawing and the embodiment provided, the present invention is further illustrated, but is not limited thereto.
As shown in Figure 1,2,3, 4, a kind of sense vibrations sensor with temperature-compensating based on surface acoustic wave, including shell
Body 1 and cap 2, the housing 1 and cap 2 are tightly connected, and its：
A, pedestal 8, piezoelectric element 5 and three SAW resonators 4 are also included, the pedestal 8 is fixed in housing 1
Bottom；
B, the piezoelectric element 5 is made up of piezoelectric membrane 6 and piezoelectric substrate 3, and the piezoelectric membrane is located at piezoelectric substrate 3
Upper surface, one end of piezoelectric substrate 3 is fixing end, and the other end is projecting end, one end of piezoelectric membrane 6 and piezoelectric substrate 3
Fixing end is each attached on pedestal 8, and the bottom surface being higher than in housing 1,
At least one SAW resonator 4 is located at the upper surface of piezoelectric membrane 6, and remaining sound surface resonator 4 is set
Between piezoelectric membrane 6 and piezoelectric substrate 3；
C, three SAW resonators 4 are connected in parallel, and resonant frequency is different；
D, surface acoustic wave caused by three SAW resonators 4 is propagated in the Y direction, and the Y-direction is
Refer to the direction perpendicular with stretching direction of the fixing end along piezoelectric substrate 3 to the projecting end of piezoelectric substrate 3.
As shown in figure 1, one of SAW resonator 4 is for sense vibrations, and the SAW resonator 4
It is located between piezoelectric membrane 6 and piezoelectric substrate 3 and close to pedestal 8；It is of course also possible to it is located at the upper surface of the one end of piezoelectric membrane 6
And close to pedestal 8；One of SAW resonator 4 is used for sensing temperature, and the SAW resonator 4 is located at piezoelectricity
The other end of substrate 3 and between piezoelectric membrane 6 and piezoelectric substrate 3, a remaining SAW resonator 4 are to be used to perceive
Reference temperature, and the SAW resonator 4 is located at the upper surface of the other end of piezoelectric membrane 6.
As shown in Figure 1,2,3, 4, in addition to briquetting 9；The briquetting 9 is located at the projecting end of piezoelectric substrate 3 and briquetting 9 is located at
On the upper surface of the other end of piezoelectric membrane 6, the briquetting 9 is fixedly connected with piezoelectric substrate 3（As shown in Figure 1）, or
The briquetting 9 and piezoelectric substrate 3 are mutually to be integrated, and briquetting 9 is located on the lower surface of the projecting end of piezoelectric substrate 3（Such as Fig. 3
It is shown）.The inner side of briquetting 9 is respectively positioned on for sensing temperature and two sound surface resonators 4 for perceiving reference temperature.For sensing
Two sound surface resonators 4 of temperature and perception reference temperature overlap in the projection of vertical direction.
As shown in figure 3, when the briquetting 9 is fixedly connected with piezoelectric substrate 3, the briquetting 9 is golden briquetting, or silver pressure
Block, or platinum briquetting, or the mass of other materials.Briquetting 9 is for obtaining desired piezoelectricity overarm（Piezoelectric substrate
3 with piezoelectric membrane 6）Native resonant frequency.
Housing 1 and cap 2 of the present invention are metal shell and metal cap respectively.Or the housing 1 and cap 2 divide
It is not ceramic shell and metal cap.
Piezoelectric membrane 6 of the present invention is zinc oxide either aluminium nitride.
Piezoelectric substrate 3 of the present invention can be that ST cuts quartz or be that FST- cuts quartz.The ST cuts quartz or FST-
ST the or FST directions for cutting quartz overlap with the direction of propagation of surface acoustic wave caused by SAW resonator, in the Y direction.
Certainly, it is not limited to which this, piezoelectric substrate can also use other piezo-electric crystals.
As shown in figure 3, the present invention is used for sensing temperature and perceives two sound surface resonators 4 of reference temperature in vertical side
To projection it is intersecting when, both angles are in the range of 0 ° ~ 180 °, and concrete numerical value is by two direction surface acoustic wave time delay temperature systems
Number（TCD）Difference maximum depending on, so may insure the two SAW resonators 4 temperature difference measurement it is sensitive
Spend to be optimal.
As shown in Figure 1, 2, the direction for the vibration that the present invention senses is the z-axis direction that piezoelectric substrate 3 moves up and down,
And three surface acoustic waves（SAW）The interdigital transducer that resonator has respectively（IDT）Caused surface acoustic wave passes in y directions
Broadcast.The piezoelectric substrate 3 in structure shown in Fig. 1,2（ST cuts quartz or is that FST- cuts quartz etc.）The tangential of crystal is sensor
The y-axis direction of structure；Sound surface of the SAW resonator 4 of sensing temperature with providing temperature reference signal in this case
Temperature coefficient difference between wave resonator 4（That is, the temperature measurement sensitivity of sensor）By the material parameter of piezoelectric membrane 6, pressure
The resonant frequency of the film thickness of conductive film 6 and two SAW resonators 7 difference determines.
As shown in figure 4, for sensing temperature and throwing of two sound surface resonators 4 in vertical direction for perceiving reference temperature
Shadow part overlaps, i.e., the SAW resonator 4 of sensing temperature and the SAW resonator 4 of sensing reference temperature are in vertical side
To projection intersect, be nonparallel in angle.The SAW resonator 4 of sensing temperature is with providing temperature in this case
The temperature coefficient difference spent between the SAW resonator 4 of reference signal（That is, the temperature measurement sensitivity of sensor）By piezoelectricity
The material parameter of film 6, the thickness of piezoelectric membrane 6, between sensing temperature and the SAW resonator 4 for perceiving reference temperature
The resonant frequency of angle and two resonators difference determines.
The acoustic surface wave propagation direction of SAW resonator of the present invention is located at ST the or FST directions of y directions quartz crystal,
Therefore its size in x directions is smaller；So the physical quantity that SAW resonator perceives has more locality（It is confined to x
One, direction is compared with minizone）, more can accurately reflect the physical quantity variation of institute's measuring point.
The present invention by the SAW resonator 4 of sensing temperature and the SAW resonator 4 of sensing reference temperature it
Between difference on the frequency skew can measure the temperature of external environment condition, then the first SAW resonator 4 from sense vibrations and sense
The frequency drift caused by temperature change is subtracted in the difference on the frequency surveyed between the 3rd SAW resonator 7 of reference temperature, from
And accurately calculate the frequency only as caused by vibration and change, and then measure the purpose of vibration.
Claims (6)
1. a kind of sense vibrations sensor with temperature-compensating based on surface acoustic wave, including housing (1) and cap (2), institute
State housing (1) and cap (2) be tightly connected, it is characterised in that：
A, pedestal (8), piezoelectric element (5) and three SAW resonators (4) are also included, the pedestal (8) is fixed on housing
(1) bottom in；
B, the piezoelectric element (5) is made up of piezoelectric membrane (6) and piezoelectric substrate (3), and the piezoelectric membrane is located at piezoelectricity base
The upper surface of piece (3), one end of piezoelectric substrate (3) is fixing end, and the other end is projecting end, one end of piezoelectric membrane (6) and pressure
The fixing end of electric substrate (3) is each attached on pedestal (8), and humorous higher than the bottom surface in housing (1), at least one surface acoustic wave
The device (4) that shakes is located at the upper surface of piezoelectric membrane (6), and remaining sound surface resonator (4) is located at piezoelectric membrane (6) and piezoelectric substrate
(3) between；
C, three SAW resonators (4) are connected in parallel, and resonant frequency is different；
D, surface acoustic wave caused by three SAW resonators (4) is propagated in the Y direction, and the Y-direction refers to
The perpendicular direction with stretching direction of the fixing end along piezoelectric substrate (3) to the projecting end of piezoelectric substrate (3)；
E, the piezoelectric substrate (3) is that ST cuts quartz or is that FST- cuts quartz.
2. the sense vibrations sensor with temperature-compensating according to claim 1 based on surface acoustic wave, its feature exist
In：Also include briquetting (9)；The briquetting (9) is located at the projecting end of piezoelectric substrate (3), and the briquetting (9) and piezoelectric substrate
(3) it is either mutual being integrated of being fixedly connected.
3. the sense vibrations sensor with temperature-compensating according to claim 2 based on surface acoustic wave, its feature exist
In：When the briquetting (9) is fixedly connected with piezoelectric substrate (3), the briquetting (9) is golden briquetting, or silver-colored briquetting, either
Platinum briquetting.
4. the sense vibrations sensor with temperature-compensating according to claim 1 based on surface acoustic wave, its feature exist
In：The housing (1) and cap (2) are metal shell and metal cap respectively.
5. the sense vibrations sensor with temperature-compensating according to claim 1 based on surface acoustic wave, its feature exist
In：The housing (1) and cap (2) are ceramic shell and metal cap respectively.
6. the sense vibrations sensor with temperature-compensating according to claim 1 based on surface acoustic wave, its feature exist
In：The piezoelectric membrane (6) is zinc oxide either aluminium nitride.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410257027.9A CN104006875B (en) | 2014-06-11 | 2014-06-11 | The sense vibrations sensor with temperature-compensating based on surface acoustic wave |
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| CN104006875B true CN104006875B (en) | 2018-04-10 |
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| CN116086546B (en) * | 2023-03-07 | 2023-06-30 | 中北大学 | Device and method for real-time in-situ simultaneous measurement of temperature and mechanical parameters |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4333342A (en) * | 1980-11-03 | 1982-06-08 | United Technologies Corporation | Fluid damped saw accelerometer |
| CN101793531A (en) * | 2008-12-23 | 2010-08-04 | 霍尼韦尔国际公司 | The micro-sensor apparatus and the method based on surface acoustic wave of while monitoring multiple conditions |
| CN103134606A (en) * | 2013-02-06 | 2013-06-05 | 常州智梭传感科技有限公司 | Differential type acoustic surface wave temperature sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4867858B2 (en) * | 2007-08-29 | 2012-02-01 | セイコーエプソン株式会社 | SAW sensor |
| CN102193001A (en) * | 2011-05-18 | 2011-09-21 | 中国电子科技集团公司第二十六研究所 | SAW-MEMS (surface acoustic waves-micro electro mechanical system) acceleration sensor and manufacturing method thereof |
| CN203908664U (en) * | 2014-06-11 | 2014-10-29 | 常州智梭传感科技有限公司 | Surface acoustic wave (SAW) based vibration sensor with temperature compensation |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4333342A (en) * | 1980-11-03 | 1982-06-08 | United Technologies Corporation | Fluid damped saw accelerometer |
| CN101793531A (en) * | 2008-12-23 | 2010-08-04 | 霍尼韦尔国际公司 | The micro-sensor apparatus and the method based on surface acoustic wave of while monitoring multiple conditions |
| CN103134606A (en) * | 2013-02-06 | 2013-06-05 | 常州智梭传感科技有限公司 | Differential type acoustic surface wave temperature sensor |
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Granted publication date: 20180410 |