CN103998647B - For laminated coating device and the band-shaped substrate Vacuum coating device of band-shaped substrate - Google Patents
For laminated coating device and the band-shaped substrate Vacuum coating device of band-shaped substrate Download PDFInfo
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- CN103998647B CN103998647B CN201380004387.1A CN201380004387A CN103998647B CN 103998647 B CN103998647 B CN 103998647B CN 201380004387 A CN201380004387 A CN 201380004387A CN 103998647 B CN103998647 B CN 103998647B
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- coating device
- compartment
- part system
- cooling roller
- band
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to a kind of laminated coating device for carrying out top coat to band-shaped substrate and a kind of band-shaped substrate Vacuum coating device with this laminated coating device.This laminated coating device comprises having and guides for the part-circular periphery cooling of the encirclement around all sides more than 180 ° the cooling roller of columniform all sides of band-shaped substrate and the part-circular periphery of the encirclement in all sides more than 180 ° distribute, there is the layout of the compartment of the treatment unit that at least one is arranged wherein respectively, wherein, the layout of compartment is divided into two by the separated part system of separation plane, the compartment of each part system is fixedly arranged position relative to each other, and each part system surrounds the part-circular periphery being no more than 180 ° of all sides of cooling roller, it is characterized in that, two part system can be with leaving cooling roller mobile on the direction vertical with separation plane.
Description
Technical field
The present invention relates to a kind of laminated coating device for carrying out top coat to band-shaped substrate of preamble according to claim 1, the especially band-shaped substrate Vacuum coating device of multilayer magnetic sputtering coating device and a kind of preamble according to claim 11.
Background technology
The known Vacuum coating device for carrying out coating to the strip material in process room comprises the unwinding device of the unreeling machine of inserting with strip material to be coated in the reel chamber that first can vacuumize, this unreeling machine is arranged in the first roller seat, and comprise the wrap-up of the winder that can remove of the material with coating in the second reel chamber that can vacuumize, this winder is arranged in the second roller seat.Between spool room, strip material to be coated is through at least one process room that can vacuumize, wherein, be furnished with the process roller seat of the guide arrangement had for strip material and cooling roller at each process chamber, at least one controlled sputtering source is positioned on its surface.
In other known band coating equipment, unreeling machine and winder are arranged in process chamber portion, and tool has the following advantages: do not need independent spool room, but also have following shortcoming: when can not changing spool to when whole process chamber ventilated.This device type also advantageously can be improved by the invention described in it.
By the known a kind of Vacuum coating device for strip material of DE19735603C1, it has two process rooms.In each process room, have roller seat, be supported with in this roller seat and turn to roller, belt tension measuring roller and cooling roller.Each roller seat energy level and vertically adjustably implementing, can realize adjustment each other and can avoid strip material formation fold thus.It is separated from one another with vacuum mode that banded valve is passed through in process room and spool room, so that can with different gas and different pressure duty.Strip material to be coated is transported through banded valve.
Unreeling machine and winder are arranged in spool room.Material to be coated is launched by unreeling machine and flows to coating procedure in the first spool room, and last rolling in the second spool room.
Such as controlled sputtering source can be used to give strip material coating, but also can use other coating sources (heat vapourizer as such as having gas-distribution pipe) or ion source, they can be relatively respective cooling roller adjustably arrange, thus to adjust with making the axis axis being parallel of the cooling roller that their middle longitudinal wire can be attached with them.Depend on used coating source can specify, one or more coating source is arranged in a compartment, this compartment be applicable to the relative process room of respective coating source gas delivery.
Except the coating source mentioned, other additional required process technologies also can be arranged in the periphery of cooling roller.Assembling about process technology can divide into two groups.Therefore, following process technology is known, and this process technology can be arranged in process room before the locular wall of closed process room.Another group process technology can in the following way after the locular wall of closed process room or when be just arranged in process room, this process technology is introduced in process room by the opening in locular wall, wherein, this process technology side according to the type of cant cantilever (Cantilever) remain on locular wall originally with it.
The Vacuum coating device of type is mentioned by the known a kind of beginning herein of DE10157186C1, wherein, roller seat for unreeling machine is fastened on the first fastening point in the first spool room, process roller seat is fastened in second in process room and the 3rd fastening point, and is fastened on the 4th fastening point in the second spool room for the roller seat of winder.Under the running status of equipment, the pressure difference between curling room and process room is 50Pa to the maximum.
Show in practice, the controlled sputtering source arranged with very little gap of the periphery on multiple surface along cooling roller is or/and be difficult to realize the movement of pure axis being parallel of layout of compartment does not contact between this layout with cooling roller usually.
Therefore, the past also uses a kind of trial to overcome the laminated coating device with cooling roller and the layout along the coating source of the periphery of cooling roller and compartment of this problem.For this reason, these layouts are divided into multiple, and be in most cases three compartment portion systems, they comprise being no more than the part-circular periphery of 180 ° and pivotally connecting of cooling roller respectively.
In the cooling roller of axis with horizontal orientation, treatment unit, picture such as coating source and around limiting the spatial arrangement of compartment for the treatment of unit on 2 o'clock, 4 o'clock, 6 o'clock, 8 o'clock and 10 o ' clock positions, wherein, with dial plate similar six-o ' clock position corresponding to the lower-most point of the periphery of cooling roller.
At this, because the pressure of necessity is separated in coating is run, the physically required distance of compartment and cooling roller is several millimeters, such as 2mm to 3mm.
In the such as maintenance weekly (such as, changing sputter equipment environment, target etc.) to laminated coating device, treatment unit and compartment from process environment, namely must be removed from cooling roller.
At this, except the structure expended, this process is very loaded down with trivial details and consuming time.At this, the part system first must not relying on compartment from process room removes the treatment unit on the locular wall that side is bearing in process room, as such as coating source.And then, the compartment portion system on 2 o'clock and 10 o ' clock positions of being arranged in can outside pivotable, and last whole compartment is arranged and moved straight down by lifting table or similar means.
Whole compartment just can be made after this procedure to arrange flatly move out from process room.
Summary of the invention
Therefore, task of the present invention is, simplify mention maintenance process and the structural structure of band-shaped substrate Vacuum coating device of the laminated coating device of type.
This task is by having the laminated coating device of the feature of claim 1 and being solved by the band-shaped substrate Vacuum coating device of the feature with claim 11.Describe preferred design and improvement project in the dependent claims.
Therefore, propose a kind of laminated coating device for carrying out top coat to band-shaped substrate, it comprises having and guides for the part-circular periphery cooling of the encirclement around all sides more than 180 ° the cooling roller of columniform all sides of band-shaped substrate and the part-circular periphery of the encirclement in all sides more than 180 ° distribute, there is the layout of the compartment of the treatment unit that at least one is arranged wherein respectively, wherein, the layout of compartment is divided into two by the separated compartment portion system of separation plane, compartment in each part system relative to each other position is fixedly arranged, and each part system is around the part-circular periphery being no more than 180 ° of all sides of cooling roller, wherein, two part system can be with leaving cooling roller mobile on the direction vertical with separation plane.
In other words, the layout of the compartment in the laminated coating device proposed is made up of at least two part system, these two part system do not connect each other, and therefore can move as follows, namely, the respective spacing of they and cooling roller can be increased by mobile, and wherein, two part system spacing to each other is side by side increased.
According to laminated coating device presented above, treatment unit not only can be configured to pretreatment unit, picture such as corrosion device, substrate register or other devices, and can coating device be configured to, as such as controlled sputtering source, the heat vapourizer with hot pipe arrangement, ion source or other devices.At this according to the present invention, the layout of pretreatment unit and coating device can be arranged on one and in same process room.
Such as, in the cooling roller of axis with horizontal location, treatment unit and compartment can in the circumferentially distributions of cooling roller, but wherein, the position at 6 o'clock keeps vacant.This position has the separation plane between two part system, can realize thus being that the layout of the compartment on 6 o ' clock positions can be separated into two part system that can move horizontally respectively.Specify in favourable design, the axis of cooling roller is arranged in division surface (mid-plane).
Maintenance process can realize now in following several step.
After process room is ventilated, first with the axis axis being parallel of cooling roller from process room, remove treatment unit, and and then by the part system of compartment respectively from cooling roller, such as open with 20mm motion in every side.
At this desirably, treatment unit is fixedly arranged in the position in the radial direction of cooling roller.At this, in order to optimized coatings process, can change the spacing for the treatment of unit to cooling roller, namely treatment unit is relative to their respective compartment relative movement limitedly.In this design, treatment unit does not move and can remove from process room with relying on the part system of compartment.This is for being favourable at side (cant cantilever) treatment unit be bearing on the locular wall of process room.
In addition, can also specify in alternative design, the section position that treatment unit surrounds the compartment for the treatment of unit is relatively fixedly arranged, that is, treatment unit is arranged in such a way respectively, that is, make they can with compartment part system synkinesis separately.Maintenance process can realize now in following several step.After ventilating to process room, the part system of compartment respectively from cooling roller, such as, is opened with 20mm motion in every side together with respective treatment unit.
Specify in design, two part system of compartment can move on the axial direction due of cooling roller.Thus it is achieved that, when having the cooling roller of axis of horizontal orientation, the part system of compartment moves out from process room through the opening closed by the locular wall being configured to chamber cap of process room, thus make compartment and treatment unit in order to the object safeguarded can be close better.At this, the axial motion of the part system of compartment on the height remained unchanged, that is when not having lifting table or this type of thing, horizontally outward can be carried out.
If removed from process room by the part system of compartment by this way, so part system further can be opened in this case outside process room.On this position, all relevant to the process part close to laminated coating device can be no problem carry out.
Can specify as alternative, the part system of compartment can individually and interdependently do not remove from process room in order to safeguard.The advantage of this design is, compartment part system separately outside process room, such as, is completely can be close to change target, shielding unit etc.
Specify in design, two part system of compartment can synchronously move.For this reason, part system can be such as coupled to each other by bar transmission rig or analogue as follows, that is, make two of compartment part system by one and same drive unit, as electric motor or analogue, move respectively with identical amount.Pneumatic actuating device is preferred.When there being obstacle in path, this pneumatic actuating device is milder and can stop.
Can specify in alternative design, two part system of compartment can not interdependently move.In this case, each part system needs oneself drive unit, or part system is manually moved by operator.
Increasing the quantity for the treatment of unit can cause odd number (3,5,7 etc.) treatment unit along the peripheral disposition of cooling roller.At this advantageously, 6 o ' clock position processing means occupy, thus specify that at least one treatment unit is arranged in the region of separation plane.At this, at least one treatment unit is arranged in compartment.At this, be arranged in the treatment unit in separation plane or do not remove from process room while compartment can be relied on, be arranged on one of them part system of compartment, thus make this treatment unit can move together with this part system of compartment and can remove from process room.
In order to reach the very high gas delivery value such as needed for low-E (lowemissivity low-launch-rate) coating, can specify, the compartment being enclosed in the treatment unit in the region of separation plane can construct dividually.Therefore, the compartment being arranged in 6 o ' clock positions is at least embodied as two portions, wherein, can specify, each part of this compartment is arranged in two part system of compartment.
According to the present invention such as, the sealing of the relative process room of two parts of this compartment by gap size closely, flexible sheet material lip part or also can be realized by elastomeric seal.As alternative, two parts of this compartment can the componental movement that is fixedly arranged of the position, relative process room of process technology relatively, to utilize it to form trim respectively.
In addition, can also specify in alternative design, the Partition screen being arranged in 6 o ' clock positions is unit and is only arranged on one of two part system.
Specify in another design, two part system of compartment design with being mutually symmetrical.Thus, laminated coating device structurally can keep simple especially.
Specify in another design, two part system of compartment are arranged on common support and guide arrangement, and this support and guide arrangement can achievement unit sub-system and separation plane axially moving vertically and at cooling roller.Support and guide arrangement such as can design as follows, that is, two part system that can achieve compartment move in the plane of similar x-y platform.
In addition, propose a kind of band-shaped substrate Vacuum coating device to solve this task, it has the process room that formed by locular wall and the laminated coating device of described type above having in this process room.
Specify in design, at least one locular wall in the region of the part system of compartment has the opening of energy vacuum-tight closing, and by this opening, part system can move out or be moved in process room from process room.Opening can be closed by door or lid, wherein, door or lid can be connected with one or two part system, thus make enabling or remove lid to cause part system to move through the described opening of locular wall or multiple opening, part system moves out from process room thus
Specify in another design, the part system of compartment outside process room can with separation plane vertically movement further, to increase their spacing.Thus, the described opening in locular wall or multiple opening can be made to keep very little., can specify, the part system of compartment is arranged on support and guide arrangement or is arranged on common support and guide arrangement for this reason.Part system only moves with several centimetres with leaving cooling roller, and and then, the axial direction due of cooling roller moves out from process room.In addition, just after this part system of compartment again with separation plane vertically movement further, thus increase their spacing to each other, so as to make they in order to the object safeguarded can be close better.
Accompanying drawing explanation
The present invention is explained in detail below by embodiment and accompanying drawing.At this:
Fig. 1 illustrates the side-view of laminated coating device in closure state with even number treatment unit;
Fig. 2 illustrates that laminated coating device in Fig. 1 is in open mode;
Fig. 3 illustrates the stereographic map of the laminated coating device in Fig. 1 and Fig. 2; And
Fig. 4 illustrates the side-view of the laminated coating device with odd number treatment unit.
Embodiment
Shown in Fig. 1 to Fig. 3 for (unshowned at this) band-shaped substrate, such as plastic film, the laminated coating device of top coat comprise and there is pivot center 11 and guide the cooling roller 1 of columniform all sides 12 of band-shaped substrate for the part-circular periphery cooling of the encirclement around all sides 12 more than 180 °.For this reason, band-shaped substrate imports the gap 13 between cooling roller 1 and the layout for the treatment of unit 4 from upper left side in the process room of band-shaped substrate Vacuum coating device.Band-shaped substrate is passed gap 13 and and then is placed guiding at the outer of cooling roller 1.
Amount to the encirclement part-circular periphery distribution more than 180 ° of layout around all sides 12 of cooling roller 1 that four are configured to treatment unit 4 that sputter magnetic control part, that have the coating device pointing to all sides 12 respectively respectively.Treatment unit 4 is arranged in compartment 21, and wherein, treatment unit 4 remains in the unshowned locular wall of process room in side.Treatment unit 4 relative to each other position is fixedly arranged.Compartment 21 can move by treatment unit 4 relatively.
Treatment unit 4 with coated material to the band-shaped substrate coating run through gap 13 time, band-shaped substrate is simultaneously by being cooled with the contact of cooling roller 1.Finally, the band-shaped substrate of coating leaves the gap 13 between the layout of cooling roller 1 and treatment unit 4 from upper right side.
The layout of compartment 21 is divided into two separated by separation plane 3, to comprise each two compartments 21 part system 2, and they build with being mutually symmetrical.As alternative, other layouts of compartment 21 and treatment unit 4 also can be used, such as, also six compartments 21 and treatment unit 4 can be realized, that is, each three compartments 21 and treatment unit 4 on every side, or realize other to arrange, and do not depart from basic idea of the present invention.
The position of part system 2 can mechanically, such as, be fixed by bolt during the course.Such as, in this course location, compartment 21 and cooling roller 1 have the spacing of 3mm.According to the difference of required pressure process, desired spacing can be different, and is such as 2mm to 4mm.
The compartment 21 of each part system 2 as follows relative to each other position be fixedly arranged, namely, they are connected with framework 22 respectively, this Frame Design is the space supporting device be made up of longeron 23 and support (Spant) 24, wherein, this longeron is the rod-like structure element extended abreast with the pivot center 11 of cooling roller 1, this support is the face-type structural element vertically extended with the pivot center 11 of cooling roller 1, and in addition, this framework also has two bottom brackets 25 respectively, this bottom bracket extends abreast with the pivot center 11 of cooling roller 1 as longeron 23, wherein, the bottom bracket 25 of two part system 2 is all arranged in same level plane.
Each in two part system 2 surrounds the part-circular periphery being no more than 180 ° of all sides 12 of cooling roller 1.This is following prerequisite, that is, part system 2 can leave cooling roller 1 ground respectively and moves on the direction vertical with separation plane 3, so as the spacing that has to each other of augmenting portion system 2 and they respectively with the spacing of cooling roller 1.
For this reason, part system 2 is bearing on two bottom brackets 25 respectively, they load laminated coating device time can be arranged in the process chamber portion of band-shaped substrate Vacuum coating device support and guide arrangement on, the movement that this support is vertical with separation plane 3 with guide arrangement energy achievement unit sub-system 2, namely in the diagram plane in Fig. 1 and Fig. 2 and at cooling roller 1 axially, namely parallel with the pivot center 11 of cooling roller 1 movement.
Shown in Figure 4 for band-shaped substrate 5, such as plastic film, the laminated coating device of top coat comprise and there is pivot center 11 and guide the cooling roller 1 of columniform all sides 12 of band-shaped substrate for the part-circular periphery cooling of the encirclement around all sides 12 more than 180 °.For this reason, band-shaped substrate 5 imports the gap 13 between cooling roller 1 and the layout being configured to the treatment unit 4 sputtering magnetic control part respectively from upper left side in the process room of band-shaped substrate Vacuum coating device.Band-shaped substrate 5 through the gap 13 cooling roller 1 and the sputtering plates 7 of compartment 21 and and then place guiding at the outer of cooling roller 1.
Amount to the encirclement part-circular periphery distribution more than 180 ° of layout around all sides 12 of cooling roller 1 that five have the treatment unit 4 of the coating device pointing to all sides 12 respectively.Treatment unit 4 in 2 o'clock, 4 o'clock, 8 o'clock and 10 o ' clock positions is embodied as tubulose magnetic control part.But different from the embodiment of Fig. 1 to Fig. 3, the quantity for the treatment of unit 4 is odd numbers in this embodiment, thus the 5th treatment unit 4 is arranged in separation plane 3 in 6 o ' clock positions, and is configured to planar magnetic control.But according to the present invention, the coating source 4 be arranged in 6 o ' clock positions also can be configured to tubulose magnetic control part or other treatment unit.
Every two tubulose magnetic control parts and a planar magnetic control are arranged in compartment 21, and wherein, treatment unit 4 remains in the unshowned locular wall of process room in side.Treatment unit 4 relative to each other position is fixedly arranged.Compartment 21 can cooling roller 1 and treatment unit 4 move relatively.
Treatment unit 4 with coated material to band-shaped substrate 5 coating run through gap 13 time, band-shaped substrate 5 is simultaneously by being cooled with the contact of cooling roller 1.Finally, the band-shaped substrate 5 of coating leaves the gap 13 between the layout of cooling roller 1 and treatment unit 4 from upper right side.
The layout of compartment 21 is divided into two separated by separation plane 3, to comprise a compartment 21 respectively part system 2, and they build with being mutually symmetrical.At this, another compartment 21 be arranged in 6 o ' clock positions is two-part, thus two of this compartment 21 parts must process room sealing relatively.For this reason, arrange as follows according to embodiment, that is, two parts of this compartment 21 can be moved by opposite brackets, and this Bracket setting is for keeping planar magnetic control.Also the sealing member only with a trim is provided with according to the present invention, that is two parts construct common trim, and sealing face such as by gap size closely, flexible sheet material lip part or also can be realized by elastomeric seal.
The position of part system 2 can mechanically, such as, be fixed by bolt during the course.Such as, in this course location, compartment 21 and cooling roller 1 have the spacing of 3mm.According to the difference of required pressure process, desired spacing can be different, and is such as 2mm to 4mm.
Each in two part system 2 surrounds the part-circular periphery being no more than 180 ° of all sides 12 of cooling roller 1.This is following prerequisite, that is, part system 2 can leave cooling roller 1 ground respectively and moves on the direction vertical with separation plane 3, so as the spacing that has to each other of augmenting portion system 2 and they respectively with the spacing of cooling roller 1.In the diagram, this direction vertical with separation plane 3 is shown for each in part system 2 respectively by four-headed arrow.
Reference numerals list
1 cooling roller
11 pivot centers
12 weeks sides
13 gaps
The part system of 2 compartments
21 compartments
22 frameworks
23 longerons
24 supports
25 bottom brackets
3 separation plane
4 treatment unit
5 band-shaped substrate
6 guide rolls
7 sputtering plates
Claims (13)
1. one kind for carrying out the laminated coating device of top coat to band-shaped substrate (5), the system of compartment (21) that described laminated coating device comprises the cooling roller (1) with columniform all sides (12) and distributes on part-circular periphery more than 180 ° of the encirclement of all sides (12), cooling roller is used for guiding band-shaped substrate (5) with cooling around the part-circular periphery of encirclement more than 180 ° of all sides (12), compartment has at least one treatment unit arranged (4) respectively wherein, wherein, the system divides of compartment (21) be two by separation plane (3) separated part system (2), the compartment (21) of each part system (2) is fixedly arranged position relative to each other, and each part system (2) surrounds the part-circular periphery being no more than 180 ° of all sides (12) of cooling roller (1), it is characterized in that, two part system (2) can be on the direction vertical with separation plane (3), with leaving cooling roller (1) mobile.
2. laminated coating device according to claim 1, is characterized in that, treatment unit (4) is fixedly arranged in the position in the radial direction of cooling roller (1).
3. laminated coating device according to claim 1, is characterized in that, the section position that treatment unit (4) surrounds the compartment (21) of this treatment unit (4) is relatively fixedly arranged.
4. the laminated coating device according to claim 1,2 or 3, is characterized in that, two part system (2) can be upper mobile at the axial direction due of cooling roller (1) (11).
5. the laminated coating device according to claim 1,2 or 3, is characterized in that, described two part system (2) can synchronously be moved.
6. the laminated coating device according to claim 1,2 or 3, is characterized in that, two part system (2) can be moved independently of one another.
7. the laminated coating device according to claim 1,2 or 3, is characterized in that, at least one treatment unit (4) is arranged in the region of separation plane (3).
8. laminated coating device according to claim 7, is characterized in that, the compartment (21) being enclosed in the treatment unit (4) in the region of separation plane (3) can construct dividually.
9. the laminated coating device according to claim 1,2 or 3, is characterized in that, described two part system (2) are designed with being mutually symmetrical.
10. the laminated coating device according to claim 1,2 or 3, it is characterized in that, described two part system (2) are arranged on common support and guide arrangement, vertical with separation plane (3) and on the axial direction due (11) of cooling roller (1) the movement of described support and guide arrangement energy achievement unit sub-system (2).
11. 1 kinds of band-shaped substrate Vacuum coating devices, described band-shaped substrate Vacuum coating device comprises the process room that is made up of locular wall and comprises laminated coating device according to any one of claim 1 to 10 in described process room.
12. band-shaped substrate Vacuum coating devices according to the claims 11, it is characterized in that, at least one locular wall in the region of part system (2) has the opening of energy vacuum-tight closing, through described opening, part system (2) can move out or be moved in process room from process room.
13. band-shaped substrate Vacuum coating devices according to the claims 11 or 12, is characterized in that, the external enwergy of part system (2) in process room and separation plane (3) vertically movement further, to increase their spacing.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012109836 | 2012-10-16 | ||
| DE102012109836.0 | 2012-10-16 | ||
| PCT/EP2013/071613 WO2014060468A1 (en) | 2012-10-16 | 2013-10-16 | Multiple coating device for strip substrates and strip substrate vacuum coating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103998647A CN103998647A (en) | 2014-08-20 |
| CN103998647B true CN103998647B (en) | 2016-01-13 |
Family
ID=49486461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380004387.1A Expired - Fee Related CN103998647B (en) | 2012-10-16 | 2013-10-16 | For laminated coating device and the band-shaped substrate Vacuum coating device of band-shaped substrate |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5768194B2 (en) |
| KR (1) | KR101500926B1 (en) |
| CN (1) | CN103998647B (en) |
| DE (1) | DE112013000168A5 (en) |
| WO (1) | WO2014060468A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013209033B4 (en) | 2013-05-15 | 2021-11-11 | VON ARDENNE Asset GmbH & Co. KG | Process stabilization method and strip substrate treatment system |
| DE102013107690B4 (en) | 2013-06-21 | 2017-12-28 | Von Ardenne Gmbh | Tape substrate treatment plant |
| DE102014112536A1 (en) | 2014-09-01 | 2016-03-03 | Von Ardenne Gmbh | Substrate treatment plant and heating device |
| DE102015104039B4 (en) | 2015-03-18 | 2018-06-21 | Von Ardenne Gmbh | Tape substrate coater with a magnetron assembly |
| KR20160117236A (en) * | 2015-03-31 | 2016-10-10 | 가부시키가이샤 고베 세이코쇼 | Film forming apparatus and partition structure of film forming apparatus |
| DE102016107985A1 (en) * | 2016-04-29 | 2017-11-02 | Von Ardenne Gmbh | Vacuum process chamber and method of manufacturing a chamber wall of a vacuum process chamber |
| DE102016114640B4 (en) * | 2016-08-08 | 2021-09-23 | VON ARDENNE Asset GmbH & Co. KG | Vacuum housing assembly, chamber body and chamber lid |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10147708C1 (en) * | 2001-09-27 | 2002-11-14 | Ardenne Anlagentech Gmbh | Vacuum deposition device used for coating strip-like material comprises magnetron chambers delimited by cooling rollers on one side and by magnetron chamber walls on the other side |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3858437B2 (en) * | 1998-04-13 | 2006-12-13 | ソニー株式会社 | Vacuum thin film forming equipment |
| JPH11350136A (en) * | 1998-06-11 | 1999-12-21 | Sony Corp | Vacuum film forming device |
| DE10352144B8 (en) * | 2003-11-04 | 2008-11-13 | Von Ardenne Anlagentechnik Gmbh | Vacuum coating system for coating longitudinal substrates |
| CN101313084B (en) * | 2005-11-21 | 2012-02-29 | 冯·阿德纳设备有限公司 | Separating device for process chambers of vacuum coating installations and vacuum coating installation |
| WO2008104169A1 (en) * | 2007-02-28 | 2008-09-04 | Von Ardenne Anlagentechnik Gmbh | Method and apparatus for the treatment of strip-shaped substrate in a vacuum coating system |
| KR100855068B1 (en) * | 2008-02-28 | 2008-08-29 | 주식회사 와이투스틸 | Apparatus for forming multilayer film |
| JP5542488B2 (en) * | 2010-03-18 | 2014-07-09 | 富士フイルム株式会社 | Deposition equipment |
| JP2012136724A (en) * | 2010-12-24 | 2012-07-19 | Kobe Steel Ltd | Take-up type continuous film-forming apparatus |
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2013
- 2013-10-16 DE DE112013000168.3T patent/DE112013000168A5/en not_active Withdrawn
- 2013-10-16 KR KR1020147011666A patent/KR101500926B1/en not_active IP Right Cessation
- 2013-10-16 JP JP2014558166A patent/JP5768194B2/en not_active Expired - Fee Related
- 2013-10-16 CN CN201380004387.1A patent/CN103998647B/en not_active Expired - Fee Related
- 2013-10-16 WO PCT/EP2013/071613 patent/WO2014060468A1/en active Application Filing
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10147708C1 (en) * | 2001-09-27 | 2002-11-14 | Ardenne Anlagentech Gmbh | Vacuum deposition device used for coating strip-like material comprises magnetron chambers delimited by cooling rollers on one side and by magnetron chamber walls on the other side |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2015508127A (en) | 2015-03-16 |
| DE112013000168A5 (en) | 2014-08-07 |
| KR101500926B1 (en) | 2015-03-10 |
| JP5768194B2 (en) | 2015-08-26 |
| CN103998647A (en) | 2014-08-20 |
| KR20140120298A (en) | 2014-10-13 |
| WO2014060468A1 (en) | 2014-04-24 |
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