CN205188432U - Two pair receipts winding coating devices of putting - Google Patents
Two pair receipts winding coating devices of putting Download PDFInfo
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- CN205188432U CN205188432U CN201520916605.5U CN201520916605U CN205188432U CN 205188432 U CN205188432 U CN 205188432U CN 201520916605 U CN201520916605 U CN 201520916605U CN 205188432 U CN205188432 U CN 205188432U
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Abstract
The utility model discloses a two pair receipts winding coating devices of putting, its device include real empty room and two sets of roller winding mechanism that receive and releases, and very empty room is the structure that horizontal cylindric or square case was described, and very the middle part in the empty room sets up coating film region and ion processing region, and the coating film zone bit is above the ion processing is regional, and the interior both sides of real empty room are located respectively to two sets of roller winding mechanisms that receive and release, respectively receive and release the regional and corresponding lateral surface in coating film region of coiled material process ion processing on the roller winding mechanism. Its method installs earlier to sputter target subassembly and ion processing subassembly on the target car, and the roller winding mechanism is receive and release in the installation on the coiling car, to sputter target subassembly, ion processing subassembly and receive and release during the roller winding mechanism sends into real empty room through target car and coiling car, start two sets of roller winding mechanisms that receive and release simultaneously, carry out two coating films of putting two receipts formulas and handle. The utility model discloses realize two coating film processings of putting two receipts formulas, improve production efficiency by a wide margin, be favorable to product cost control, improve market competitiveness of the product.
Description
Technical field
The utility model relates to coiled material surface coating technique field, particularly puts two receipts coil film coating apparatus for a kind of pair.
Background technology
Electromagnetic wave shield film is a kind of novel electromagnetic shielding material, and it can effectively intercept electric field, magnetic field, guarantees that circuit is not disturbed, also prevents line-hit external device.Being usually used in the shielding purposes of the product such as wiring board, data line at present, is the product that a kind of market demand is larger.
For the processing of electromagnetic shielding film, generally adopt the mode of coating to process at present, but this traditional manufacturing process not environmentally, cost is high, product quality is undesirable.Novel method adopts the physical method of vacuum winding plated film to carry out dry process, but traditional winding film coating machine once can only be coated with a coiling material, and cause production efficiency low, cost is higher, and the competitiveness of product in market is not strong.
Utility model content
The purpose of this utility model is to overcome the deficiencies in the prior art, provides that a kind of production efficiency is high, device structure integrated level is high, and two putting twoly receives coil film coating apparatus.
The technical solution of the utility model is: put two receipts coil film coating apparatus for a kind of pair, comprise vacuum chamber and two groups of folding and unfolding roller winding mechanisms, vacuum chamber is the structure of horizontal cylindrical shape or square box like, middle part in vacuum chamber arranges coating film area and plasma processing region, coating film area is positioned at above plasma processing region, two groups of folding and unfolding roller winding mechanisms are located at the left and right sides in vacuum chamber respectively, and the coiled material on each folding and unfolding roller winding mechanism is successively through plasma processing region and the corresponding outer side of coating film area.
The rear and front end of described vacuum chamber is respectively equipped with target car and winding car, arranges guide rail respectively bottom target car and winding car; Target car is arranged sputter target assemblies and ion processing assembly, winding car arranges two groups of folding and unfolding roller winding mechanisms; Target car runs along guide rail, drives that sputter target assemblies is corresponding enters or exit coating film area, drives ion processing assembly enter or exit plasma processing region simultaneously; Winding car runs along guide rail, drives two groups of folding and unfolding roller winding mechanisms enter simultaneously or exit vacuum chamber.Owing to arranging two groups of folding and unfolding roller winding mechanisms in vacuum chamber, so the integrated level of each building block is high in vacuum chamber, operation and maintenance is all quite complicated, difficulty is larger, for this reason, target car and winding car are set outside vacuum chamber, by target car, sputter target assemblies and ion processing assembly are installed, by winding car, two groups of folding and unfolding roller winding mechanisms are installed, use or when needing to safeguard, sputter target assemblies is driven by target car and winding car, ion processing assembly and winding mechanism enter or exit vacuum chamber, thus carry out installing or safeguarding, it is easy to operate, also maintenance difficulties can be reduced, can realize playing critical effect to realizing two winding film plating mode of putting two receipts in same vacuum chamber.Wherein, ion processing assembly can determine whether to install according to the actual needs of coating process and use.
Described target car comprises sputtering target erecting frame, ion source erecting frame, base, support link and support side plate, support side plate is connected with base by support link, support side plate sets gradually sputtering target erecting frame and ion source erecting frame from top to bottom, base bottom is provided with the target car roller matched with track.Wherein, support link has multiple, each support link is all hinged with base, because the quantity of magnetron sputtering target in sputter target assemblies and the quantity in ion processing assembly intermediate ion source all can adjust according to the needs of actual coating process, therefore by this articulated manner, in conjunction with external cylinder or other actuating unit, adjustable sputtering target erecting frame and ion source erecting frame relative to the height of base and verticality, thus make sputter target assemblies and ion processing assembly be in optimum position in vacuum chamber.
Described winding car comprises winding erecting frame, back up pad and back seat, back up pad is fixed on back seat, back up pad is arranged two cover winding erecting frames, two cover winding erecting frames are positioned at the left and right sides in back up pad, back seat side is provided with the winding car roller matched with track, and winding car roller is positioned at below back up pad.
Described coating film area comprises left plated film district and right plated film district, plasma processing region comprises left ion processing district and right ion processing district, the upper end of coating film area is provided with the first dividing plate, second partition is provided with between coating film area and plasma processing region, the lower end of plasma processing region is provided with the 3rd dividing plate, be provided with the 4th dividing plate between left plated film district and right plated film district, and the bottom of the 4th dividing plate extends between left ion processing district and right ion processing district.The setting of the first dividing plate, second partition, the 3rd dividing plate and the 4th dividing plate, Shi Zuo plated film district, right plated film district, left ion processing district and right ion processing district form independently region respectively, effectively can avoid phenomenon of collaborating, prevent crossed contamination, thus improve the quality of products.
Described sputter target assemblies comprises at least one left magnetron sputtering target and at least one right magnetron sputtering target, and left magnetron sputtering target is located in left plated film district, and right magnetron sputtering target is located in right plated film district; Ion processing assembly comprises at least one left ion source and at least one right ion source, and left ion source is located in left ion processing district, and right ion source is located in right ion processing district.Wherein, the quantity of magnetron sputtering target and the quantity in ion processing assembly intermediate ion source all can regulate according to the needs of actual coating process.
Described left magnetron sputtering target and right magnetron sputtering target are the one in planar targets or cylinder target.
Described folding and unfolding roller winding mechanism comprises let off roll, wind-up roll, guide roller, tension-sensing roller and drive roll, let off roll and wind-up roll are presented under type and are placed, multiple guide roller and tension-sensing roller is distributed with between let off roll and wind-up roll, drive roll is respectively equipped with plasma processing region lower end outside outside coating film area upper end, carry out stretching coiled material by tension control, the pending face of coiled material is parallel to plasma processing region and coating film area.Wherein, the quantity of various roller and mounting means can flexible configuration.
Realize a kind of pair by said apparatus and put two rolling around film coating method, comprise the following steps:
(1) according to the needs of coating process, target car is installed sputter target assemblies and ion processing assembly, folding and unfolding roller winding mechanism installed by winding car;
(2) target car and winding car are along rail moving, and sputter target assemblies, ion processing assembly and folding and unfolding roller winding mechanism are sent in vacuum chamber respectively, sputter target assemblies correspondence enters coating film area, and ion processing assembly correspondence enters plasma processing region;
(3) vacuum chamber is vacuumized, then start two groups of folding and unfolding roller winding mechanisms of the left and right sides in vacuum chamber simultaneously, coiled material on two groups of folding and unfolding roller winding mechanisms, simultaneously through the left and right sides of plasma processing region and coating film area, carries out two coating film treatment of putting two receipts formula.
Wherein, in step (3), unit is vacuumized by being equipped with molecular pump or diffusion pump etc. outward at vacuum chamber, after sputter target assemblies, ion processing assembly and folding and unfolding roller winding mechanism enter vacuum chamber, realize vacuum chamber is vacuumized, vacuumize unit adopt existing installation general vacuumize unit.
The utility model, relative to prior art, has following beneficial effect:
Put pair receipts coil film coating apparatus and the two plated film form of putting two receipts of method employing for this pair, two groups of folding and unfolding roller winding mechanisms are set in same vacuum chamber, and two groups of folding and unfolding roller winding mechanisms are located at respectively the both sides of coating film area and plasma processing region, realize coating film treatment processing simultaneously, production efficiency can be increased substantially, be conducive to the control of product cost, thus improve the competitiveness of product in market.
Put two receipts in coil film coating apparatus, coating film area and plasma processing region are carried out subregion isolation respectively, effectively can avoid phenomenon of collaborating, prevent crossed contamination, thus improve the quality of products for this pair.
Putting for this pair two receives in coil film coating apparatus, and each building block compact construction in vacuum chamber, integrated level are high, and therefore the space availability ratio of equipment is high, provides strong prerequisite for significantly improving production capacity.
Put in two receipts coil film coating apparatus for this pair, by arranging target car and winding car in two outer ends of vacuum chamber, and sputter target assemblies and ion processing assembly are installed on target car, two groups of folding and unfolding roller winding mechanisms are installed with on winding car, installation and maintenance is carried out as required again by target car and winding car, the operation and maintenance of simplified apparatus, makes equipment use convenient, and maintenance cost is also lower.
Accompanying drawing explanation
Fig. 1 is that this pair is put in two receipts coil film coating apparatus embodiment 1, the cross section structure schematic diagram in vacuum chamber.
Fig. 2 is that this pair is put in two receipts coil film coating apparatus embodiment 2, the cross section structure schematic diagram in vacuum chamber.
Fig. 3 is that this pair is put in two receipts coil film coating apparatus embodiment 3, the cross section structure schematic diagram in vacuum chamber.
Fig. 4 is that this pair puts two one-piece construction schematic diagram receiving coil film coating apparatus.
Fig. 5 is the A direction view of Fig. 4.
Fig. 6 is that this pair is put in two receipts coil film coating apparatus embodiment 1, the cross section structure schematic diagram in vacuum chamber.
Embodiment
Below in conjunction with embodiment, the utility model is described in further detail, but embodiment of the present utility model is not limited thereto.
Embodiment 1
The present embodiment a kind of pair puts two receipts coil film coating apparatus, as shown in Figure 1, comprise vacuum chamber 1 and two groups of folding and unfolding roller winding mechanisms, vacuum chamber is horizontal cylinder-like structure, middle part in vacuum chamber arranges coating film area 2 and plasma processing region 3, coating film area is positioned at above plasma processing region, and two groups of folding and unfolding roller winding mechanisms are located at the left and right sides in vacuum chamber respectively, and the coiled material on each folding and unfolding roller winding mechanism is successively through plasma processing region and the corresponding outer side of coating film area.
As shown in Fig. 4 or Fig. 5, the rear and front end of vacuum chamber is respectively equipped with target car 4 and winding car 5, arranges guide rail 6 respectively bottom target car and winding car; Target car is arranged sputter target assemblies and ion processing assembly, winding car arranges two groups of folding and unfolding roller winding mechanisms; Target car runs along guide rail, drives that sputter target assemblies is corresponding enters or exit coating film area, drives ion processing assembly enter or exit plasma processing region simultaneously; Winding car runs along guide rail, drives two groups of folding and unfolding roller winding mechanisms enter simultaneously or exit vacuum chamber.Owing to arranging two groups of folding and unfolding roller winding mechanisms in vacuum chamber, so the integrated level of each building block is high in vacuum chamber, operation and maintenance is all quite complicated, difficulty is larger, for this reason, sputtering target and winding car are set outside vacuum chamber, by target car, sputtering sputter target assemblies and ion processing assembly are installed, by winding car, two groups of folding and unfolding roller winding mechanisms are installed, use or when needing to safeguard, sputter target assemblies is driven by target car and winding car, ion processing assembly and winding mechanism enter or exit vacuum chamber, thus carry out installing or safeguarding, it is easy to operate, also maintenance difficulties can be reduced, can realize playing critical effect to realizing two winding film plating mode of putting two receipts in same vacuum chamber.Wherein, ion processing assembly can determine whether to install according to the actual needs of coating process and use.
Target car comprises sputtering target erecting frame 7, ion source erecting frame (not shown), base 9, support link 10 and support side plate 11, support side plate is connected with base by support link, support side plate sets gradually sputtering target erecting frame and ion source erecting frame from top to bottom, the junction of support link and base is hinged, and base bottom is provided with the target car roller 12 matched with track.Wherein, support link has multiple, each support link is all hinged with base, because the quantity of magnetron sputtering target in sputter target assemblies and the quantity in ion processing assembly intermediate ion source all can adjust according to the needs of actual coating process, therefore by this articulated manner, in conjunction with external cylinder or other actuating unit, adjustable sputtering target erecting frame and ion source erecting frame relative to the height of base and verticality, thus make sputter target assemblies and ion processing assembly be in optimum position in vacuum chamber.Winding car comprises winding erecting frame 13, back up pad 14 and back seat 15, back up pad is fixed on back seat, back up pad is arranged two winding erecting frames, two winding erecting frames are positioned at the left and right sides in back up pad, back seat side is provided with the winding car roller 16 matched with track, and winding car roller is positioned at below back up pad.
As shown in Figure 1, coating film area comprises left plated film district and right plated film district, plasma processing region comprises left ion processing district and right ion processing district, the upper end of coating film area is provided with the first dividing plate 17, second partition 18 is provided with between coating film area and plasma processing region, the lower end of plasma processing region is provided with the 3rd dividing plate 19, is provided with the 4th dividing plate 20 between left plated film district and right plated film district, and the bottom of the 4th dividing plate extends between left ion processing district and right ion processing district; First dividing plate, second partition, the 3rd dividing plate and the 4th dividing plate composition " king " character form structure.The setting of the first dividing plate, second partition, the 3rd dividing plate and the 4th dividing plate, Shi Zuo plated film district, right plated film district, left ion processing district and right ion processing district form independently region respectively, effectively can avoid phenomenon of collaborating, prevent crossed contamination, thus improve the quality of products.Sputter target assemblies comprises four left magnetron sputtering targets 21 and four right magnetron sputtering targets 22 (its quantity also can as required flexible configuration), each left magnetron sputtering target is arranged in left plated film district from top to bottom, and each right magnetron sputtering target is arranged in right plated film district from top to bottom; Ion processing assembly comprises at least one left ion source 23 and at least one right ion source 24, and left ion source is located in left ion processing district, and right ion source is located in right ion processing district.Wherein, the quantity of magnetron sputtering target and the quantity in ion processing assembly intermediate ion source all can regulate according to the needs of actual coating process.Left magnetron sputtering target and right magnetron sputtering target are the one in planar targets or cylinder target.
Folding and unfolding roller winding mechanism comprises let off roll 25, wind-up roll 26, guiding and tension-sensing roller 27 and drive roll 28, let off roll and wind-up roll are presented under type and are placed, multiple guide roller and tension-sensing roller is distributed with between let off roll and wind-up roll, drive roll is respectively equipped with plasma processing region lower end outside outside coating film area upper end, carry out stretching coiled material by tension control, the pending face of coiled material is parallel to plasma processing region and coating film area.
Realize a kind of pair by said apparatus and put two rolling around film coating method, comprise the following steps:
(1) according to the needs of coating process, target car is installed sputter target assemblies and ion processing assembly, folding and unfolding roller winding mechanism installed by winding car;
(2) target car and winding car are along rail moving, and sputter target assemblies, ion processing assembly and folding and unfolding roller winding mechanism are sent in vacuum chamber respectively, sputter target assemblies correspondence enters coating film area, and ion processing assembly correspondence enters plasma processing region;
(3) vacuum chamber is vacuumized, then start two groups of folding and unfolding roller winding mechanisms of the left and right sides in vacuum chamber simultaneously, coiled material on two groups of folding and unfolding roller winding mechanisms, simultaneously through the left and right sides of plasma processing region and coating film area, carries out two coating film treatment of putting two receipts formula.
Wherein, in step (3), unit is vacuumized by being equipped with molecular pump or diffusion pump etc. outward at vacuum chamber, after sputter target assemblies, ion processing assembly and folding and unfolding roller winding mechanism enter vacuum chamber, realize vacuum chamber is vacuumized, vacuumize unit adopt existing installation general vacuumize unit.
Embodiment 2
The present embodiment a kind of pair puts two receipts coil film coating apparatus, as shown in Figure 2, compared with embodiment 1, its difference is: sputter target assemblies comprises three left magnetron sputtering targets 21 and three right magnetron sputtering targets 22, each left magnetron sputtering target is arranged in left plated film district from top to bottom, and each right magnetron sputtering target is from top to bottom arranged in right plated film district.
Embodiment 3
The present embodiment a kind of pair puts two receipts coil film coating apparatus, as shown in Figure 3, compared with embodiment 1, its difference is: sputter target assemblies comprises two left magnetron sputtering targets 21 and two right magnetron sputtering targets 22, each left magnetron sputtering target is arranged in left plated film district from top to bottom, and each right magnetron sputtering target is from top to bottom arranged in right plated film district.
Embodiment 4
The present embodiment a kind of pair puts two receipts coil film coating apparatus, compared with embodiment 1, its difference is: do not establish ion source in plasma processing region, and does not establish second partition between coating film area and plasma processing region, and plasma processing region is communicated with coating film area.
Embodiment 5
The present embodiment a kind of pair puts two receipts coil film coating apparatus, and compared with embodiment 1, its difference is: as shown in Figure 6, and vacuum chamber is horizontal square box like structure.
As mentioned above, just can realize the utility model preferably, above-described embodiment is only preferred embodiment of the present utility model, is not used for limiting practical range of the present utility model; Namely all equalizations done according to the utility model content change and modify, all by the utility model claim scope required for protection is contained.
Claims (8)
1. pair to put and twoly receive coil film coating apparatus, it is characterized in that, comprise vacuum chamber and two groups of folding and unfolding roller winding mechanisms, vacuum chamber is horizontal cylindrical shape or square box like structure, middle part in vacuum chamber arranges coating film area and plasma processing region, coating film area is positioned at above plasma processing region, and two groups of folding and unfolding roller winding mechanisms are located at the left and right sides in vacuum chamber respectively, and the coiled material on each folding and unfolding roller winding mechanism is successively through plasma processing region and the corresponding outer side of coating film area.
2. put two receipts coil film coating apparatus for according to claim 1 pair, it is characterized in that, the rear and front end of described vacuum chamber is respectively equipped with target car and winding car, arranges guide rail respectively bottom target car and winding car; Target car is arranged sputter target assemblies and ion processing assembly, winding car arranges two groups of folding and unfolding roller winding mechanisms; Target car runs along guide rail, drives that sputter target assemblies is corresponding enters or exit coating film area, drives ion processing assembly enter or exit plasma processing region simultaneously; Winding car runs along guide rail, drives two groups of folding and unfolding roller winding mechanisms enter simultaneously or exit vacuum chamber.
3. put two receipts coil film coating apparatus for according to claim 2 pair, it is characterized in that, described target car comprises sputtering target erecting frame, ion source erecting frame, base, support link and support side plate, support side plate is connected with base by support link, support side plate sets gradually sputtering target erecting frame and ion source erecting frame from top to bottom, base bottom is provided with the target car roller matched with track.
4. put two receipts coil film coating apparatus for according to claim 2 pair, it is characterized in that, described winding car comprises winding erecting frame, back up pad and back seat, back up pad is fixed on back seat, back up pad is arranged two winding erecting frames, two winding erecting frames are positioned at the left and right sides in back up pad, and back seat side is provided with the winding car roller matched with track, and winding car roller is positioned at below back up pad.
5. put two receipts coil film coating apparatus for according to claim 2 pair, it is characterized in that, described coating film area comprises left plated film district and right plated film district, plasma processing region comprises left ion processing district and right ion processing district, the upper end of coating film area is provided with the first dividing plate, second partition is provided with between coating film area and plasma processing region, the lower end of plasma processing region is provided with the 3rd dividing plate, be provided with the 4th dividing plate between left plated film district and right plated film district, and the bottom of the 4th dividing plate extends between left ion processing district and right ion processing district.
6. put two receipts coil film coating apparatus for according to claim 5 pair, it is characterized in that, described sputter target assemblies comprises at least one left magnetron sputtering target and at least one right magnetron sputtering target, and left magnetron sputtering target is located in left plated film district, and right magnetron sputtering target is located in right plated film district; Ion processing assembly comprises at least one left ion source and at least one right ion source, and left ion source is located in left ion processing district, and right ion source is located in right ion processing district.
7. put two receipts coil film coating apparatus for according to claim 6 pair, it is characterized in that, described left magnetron sputtering target and right magnetron sputtering target are the one in planar targets or cylinder target.
8. put two receipts coil film coating apparatus for according to claim 1 pair, it is characterized in that, described folding and unfolding roller winding mechanism comprises let off roll, wind-up roll, guide roller, tension-sensing roller and drive roll, let off roll and wind-up roll are presented under type and are placed, multiple guide roller and tension-sensing roller is distributed with between let off roll and wind-up roll, drive roll is respectively equipped with plasma processing region lower end outside outside coating film area upper end, carry out stretching coiled material by tension control, the pending face of coiled material is parallel to plasma processing region and coating film area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520916605.5U CN205188432U (en) | 2015-11-17 | 2015-11-17 | Two pair receipts winding coating devices of putting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520916605.5U CN205188432U (en) | 2015-11-17 | 2015-11-17 | Two pair receipts winding coating devices of putting |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205188432U true CN205188432U (en) | 2016-04-27 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520916605.5U Expired - Fee Related CN205188432U (en) | 2015-11-17 | 2015-11-17 | Two pair receipts winding coating devices of putting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205188432U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105239052A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-release and double-collection winding film coating device and method |
| CN110983285A (en) * | 2019-12-31 | 2020-04-10 | 广东腾胜科技创新有限公司 | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials |
| CN114231938A (en) * | 2021-12-29 | 2022-03-25 | 上海子创镀膜技术有限公司 | Novel vacuum winding sputtering single machine |
-
2015
- 2015-11-17 CN CN201520916605.5U patent/CN205188432U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105239052A (en) * | 2015-11-17 | 2016-01-13 | 广东腾胜真空技术工程有限公司 | Double-release and double-collection winding film coating device and method |
| CN110983285A (en) * | 2019-12-31 | 2020-04-10 | 广东腾胜科技创新有限公司 | Vacuum winding coating equipment capable of simultaneously coating multiple rolls of base materials |
| CN114231938A (en) * | 2021-12-29 | 2022-03-25 | 上海子创镀膜技术有限公司 | Novel vacuum winding sputtering single machine |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160427 Termination date: 20191117 |
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| CF01 | Termination of patent right due to non-payment of annual fee |