JP6605073B2 - Evaporation source for organic material, deposition apparatus for depositing organic material in a vacuum chamber having an evaporation source for organic material, and method for evaporating organic material - Google Patents

Description

  Embodiments of the invention relate to organic material deposition, a source for organic materials, and a deposition apparatus for organic materials. Embodiments of the present invention relate in particular to an evaporation source for organic materials, a deposition apparatus for depositing organic materials in a vacuum chamber, and a method for evaporating organic materials.

  An organic evaporator is a tool for the production of organic light emitting diodes (OLEDs). An OLED is a special type of light emitting diode that includes a thin film of an organic compound with a light emitting layer therein. Organic light emitting diodes (OLEDs) are used in the manufacture of television screens, computer monitors, mobile phones, and other handheld devices for displaying information. OLEDs can also be used for general space illumination. The range of colors, brightness, and viewing angles possible with OLED displays is larger than that of conventional LCD displays because OLED pixels issue directly and do not require a backlight. Thus, the energy consumption of an OLED display is significantly less than that of a conventional LCD display. Furthermore, the fact that OLEDs can be manufactured on flexible substrates provides further applications. For example, an OLED display can include a layer of organic material located between two electrodes, all deposited on a substrate, to form a matrix display panel having individually energizable pixels. An OLED is typically placed between two glass panels, and the edges of the glass panel are sealed to encapsulate the OLED inside.

  There are many challenges encountered when manufacturing such display devices. In one example, there are many significant steps required to encapsulate an OLED between two glass panels to prevent possible contamination of the device. In another example, different sizes of display screens, as well as different sizes of glass panels, may require substantial reconstruction of the processing hardware used to form the processing and display devices. In general, OLED devices are desirably manufactured on large area substrates.

  One step in the manufacture of large scale OLED displays that pose various challenges is masking of the substrate, for example, for the deposition of patterned layers. Furthermore, in known systems, typically a small overall material utilization is, for example, less than 50%.

  Accordingly, there is a continuing need for new and improved apparatus and methods for forming OLED display devices.

  In view of the above, improved evaporation sources for organic materials, improved deposition apparatus for evaporating organic materials, and methods for evaporating organic materials are provided. Further aspects, advantages and features of embodiments of the invention will become apparent from the dependent claims, the description and the attached drawings.

According to one embodiment, an organic material evaporation source is provided. The evaporation source is an evaporation crucible configured to evaporate the organic material; a distribution pipe having one or more outlets in fluid communication with the evaporation crucible and rotatable about the axis during evaporation; And at least one side shield for shielding the organic material.

According to another embodiment, a deposition apparatus is provided for depositing an organic material into a vacuum chamber. A deposition apparatus includes: a vacuum chamber; an evaporation source according to embodiments described herein for evaporating organic material in the vacuum chamber; a substrate support system disposed in the vacuum chamber and having at least two tracks And at least two tracks of the substrate support system are configured for essentially vertical support of the substrate or carrier carrying the substrate in a vacuum chamber.

According to a further embodiment, a method for evaporating organic material is provided. The method includes moving the first substrate in a first vertical processing position; and evaporating the evaporation source along the first substrate in at least translational motion while the evaporation source evaporates the organic material. Moving; moving the second substrate in a second processing position that is essentially perpendicular to the first processing position; rotating the evaporation source distribution pipe about the axis during evaporation; Shielding the evaporation of the organic material with at least one side shield; moving the evaporation source along the second substrate with at least one further translational movement while the evaporation source evaporates the organic material; Including.

According to one embodiment, an evaporation source for organic materials is provided. The evaporation source includes an evaporation crucible configured to evaporate the organic material; a distribution pipe having one or more outlets in fluid communication with the evaporation crucible and rotatable about the shaft during evaporation; A support for the distribution pipe connected to or including the first driver, wherein the first driver is configured for translational movement of the support and the distribution pipe; And an evaporator control housing supported by the support and configured to maintain an internal atmospheric pressure.

According to another embodiment, a deposition apparatus is provided for depositing an organic material in a vacuum chamber. A deposition apparatus includes: a vacuum chamber; an evaporation source according to embodiments described herein for evaporating organic material in the vacuum chamber; a substrate support system disposed in the vacuum chamber and having at least two tracks And at least two tracks of the substrate support system are configured for essentially vertical support of the substrate or carrier carrying the substrate in a vacuum chamber.

According to a further embodiment, a method for evaporating organic material is provided. The method includes moving the first substrate in a first vertical processing position; and evaporating the evaporation source along the first substrate in at least translational motion while the evaporation source evaporates the organic material. Moving; moving the second substrate in a second processing position that is essentially perpendicular to the first processing position; rotating the distribution pipe of the evaporation source around the axis during evaporation; Moving the evaporation source along the second substrate in at least a further translational movement while the evaporation source evaporates the organic material, the evaporation source being supported by the support and reducing the internal atmospheric pressure An evaporator control housing configured to maintain is provided.

  In order that the above features of the present invention may be understood in detail, a more detailed description of the invention, briefly outlined above, may be obtained by reference to the embodiments. The accompanying drawings relate to embodiments of the invention and are described in the following description.

A to D show schematic diagrams illustrating evaporation sources for organic materials according to embodiments described herein at different deposition positions of a vacuum chamber of a deposition apparatus according to further embodiments described herein. FIG. 2 shows a schematic top view of a deposition apparatus for depositing organic material in a vacuum chamber according to embodiments described herein. FIG. 6 shows a schematic top view of another deposition apparatus for depositing organic material in a vacuum chamber according to embodiments described herein. A and B are a deposition apparatus for depositing an organic material in a vacuum chamber according to embodiments described herein, and an organic material according to embodiments described herein at different deposition locations in the vacuum chamber 1 shows a schematic side view of an evaporation source for evaporation. A and B are a deposition apparatus for depositing an organic material in a vacuum chamber according to embodiments described herein, and an organic material according to embodiments described herein at different deposition locations in the vacuum chamber 1 shows a schematic diagram of an evaporation source for evaporation. FIG. 2 shows a schematic diagram of a system having at least two deposition devices and an evaporation source for organic material evaporation according to embodiments described herein. A and B show a schematic diagram of a portion of an evaporation source according to embodiments described herein, and C shows a schematic diagram of another evaporation source according to an embodiment described herein. A and B are a deposition apparatus for depositing an organic material in a vacuum chamber according to embodiments described herein, and an organic material according to embodiments described herein at different deposition locations in the vacuum chamber 1 shows a schematic diagram of an evaporation source for evaporation. FIG. 6 shows a schematic diagram of another deposition apparatus for depositing organic material in a vacuum chamber according to embodiments described herein. FIG. 4 illustrates a flowchart illustrating a method for evaporating organic material according to embodiments described herein.

  Reference will now be made in detail to various embodiments of the invention, one or more examples of which are illustrated. Within the following description of the drawings, the same reference numbers refer to the same components. Generally, only the differences with respect to the individual embodiments are described. Each example is provided by way of explanation of the invention, but is not intended to limit the invention. In addition, features illustrated or described as part of one embodiment can be used in or combined with other embodiments to yield further embodiments. This specification is intended to cover such modifications and variations.

  FIGS. 1A-1D show the evaporation source 100 at various locations within the vacuum chamber 110. Movement between different positions is indicated by arrows 101B, 101C, and 101D. According to embodiments described herein, the evaporation source is configured for translation and rotation about an axis. 1A to 1D show an evaporation source 100 having an evaporation crucible 104 and a distribution pipe 106. The distribution pipe 106 is supported by the support body 102. Further, according to some embodiments, the evaporation crucible 104 can also be supported by the support 102. Two substrates 121 are provided in the vacuum chamber 110. Typically, a mask 132 for layer deposition on the substrate can be provided between the substrate and the evaporation source 100. As shown in FIGS. 1A to 1D, the organic material evaporates from the distribution pipe 106. This is indicated by reference numeral 10.

  In FIG. 1A, the evaporation source 100 is shown in a first position. As shown in FIG. 1B, the substrate on the left side of the vacuum chamber 110 is deposited with a layer of organic material by translation of the evaporation source, as indicated by arrow 101B. While the left substrate 121 is deposited with a layer of organic material, the second substrate, eg, the right substrate of FIGS. 1A-1D, can be replaced. FIG. 1B shows a transport track 124 for a substrate. After the left substrate 121 is deposited with a layer of organic material, the evaporation source distribution pipe 106 rotates as indicated by arrow 101C in FIG. 1C. During deposition of the organic material on the first substrate (the left substrate of FIG. 1B), the second substrate was positioned and aligned with respect to the mask 132. Thus, after the rotation shown in FIG. 1C, the right substrate, ie, the second substrate 121, can be coated with a layer of organic material as indicated by arrow 101D. The first substrate can be moved out of the vacuum chamber 110 while the second substrate 121 is coated with an organic material. FIG. 1D shows the transport track 124 in the position of the first substrate (left side of FIG. 1D).

  According to the embodiments described herein, the substrate is coated with an organic material in an essentially vertical position. In summary, the views shown in FIGS. 1A-1D are top views of an apparatus that includes an evaporation source 100. Typically, the distribution pipe is a steam distribution showerhead, in particular a straight steam distribution showerhead. Thereby, the distribution pipe provides an essentially vertically extending source. According to embodiments described herein, which can be combined with other embodiments described herein, essentially vertical is 10 degrees or less, especially when referring to substrate orientation. It is understood to allow deviation from the vertical direction. This deviation can be provided because a substrate support having some deviation from the vertical orientation can result in a more stable substrate position. However, the substrate orientation during the deposition of the organic material is considered essentially vertical and is considered different from the horizontal substrate orientation. Thereby, the surface of the substrate is coated with a source extending in one direction corresponding to a translation movement along one substrate dimension and another direction corresponding to the other substrate dimension.

  As shown in FIG. 1C, the rotation of the distribution pipe 106, that is, the rotation from the first substrate 121 to the second substrate 121 can be 180 degrees. After the second substrate is deposited as shown in FIG. 1D, the distribution pipe 106 can be rotated 180 degrees backward or can be rotated in the same direction as shown in FIG. 1C. Either. Thereby, the distribution pipe rotates 360 degrees in total. According to embodiments that can be combined with other embodiments described herein, the distribution pipe 106 can be used, for example, if the evaporation coil indicated by reference numeral 10 is not provided vertically on the surface of the substrate 121. , Rotated at least 160 degrees. Typically, however, the distribution pipe is rotated 180 degrees or at least 360 degrees.

  In accordance with embodiments described herein, an OLED display, for example, by a combination of translation of a source such as a linear vapor distribution showerhead and rotation of a source such as a linear vapor distribution showerhead, for example. High evaporation source efficiency and high material utilization for manufacturing are possible, in which case high precision masking of the substrate is desired. Since the substrate and mask can remain stationary, the translational movement of the source allows for high masking accuracy. While another substrate is coated with an organic material, it is possible to change the substrate of one substrate by rotational movement. This significantly improves material utilization as idle time, i.e., the time for the evaporation source to evaporate the organic material without coating the substrate, is significantly reduced.

Embodiments described herein relate specifically to the deposition of organic materials on large area substrates, for example, for OLED display manufacturing. According to some embodiments, a large area substrate, or a carrier that supports one or more substrates, ie, a large area carrier, may have a size of at least 0.174 m ² . Typically, the size of the carrier can be from about 1.4 m ² to about 8 m ² , more typically from about ² m ² to about 9 m ² , or up to 12 m ² . Typically, a rectangular area on which a substrate is supported and provided with the holding equipment, apparatus and methods according to embodiments described herein is a carrier having the size of a large area substrate described herein. is there. For example, a large area carrier that would correspond to the area of a single large area substrate, corresponding to the substrate of about ^{1.4m 2 (1.1m × 1.3m) GEN5} , about 4.29M ² substrate ( GEN 7.5 corresponding to 1.95 m × 2.2 m), GEN 8.5 corresponding to about 5.7 m ² substrate (2.2 m × 2.5 m), or about 8.7 m ² substrate (2.85 m) GEN10 corresponding to x3.05 m). Larger generations such as GEN11 and GEN12 and corresponding substrate areas can be realized as well. According to an exemplary embodiment that can be combined with other embodiments described herein, the thickness of the substrate can be 0.1 to 1.8 mm, and the holding equipment and in particular the holding device It can be adapted to the thickness of such a substrate. However, in particular the thickness of the substrate can be about 0.9 mm or less, for example 0.5 mm or 0.3 mm, and the holding equipment and especially the holding device are adapted to the thickness of such a substrate . Typically, the substrate can be made from any material suitable for material deposition. For example, the substrate is a group consisting of glass (eg, soda lime glass, borosilicate glass, etc.), metal, polymer, ceramic, composite material, carbon fiber material, or other material or combination of materials that can be coated by a deposition process. Can be made from materials selected from

  In order to achieve good reliability and yield rates, the embodiments described herein keep the mask and substrate stationary during the deposition of organic material. A movable linear source is provided for uniform coating of large area substrates. Idle time is reduced compared to operation, and after each deposition, the substrate needs to be replaced, which includes a new alignment step of the mask and substrate relative to each other. During idle time, the source is wasting material. Thus, having a second substrate that is easily aligned with the mask at the deposition location reduces idle time and increases material utilization.

  FIG. 2 shows an embodiment of a deposition apparatus 200 for depositing organic material in the vacuum chamber 110. The evaporation source 100 is provided in the vacuum chamber 110 on a track or linear guide 220. The linear guide 220 is configured for translational movement of the evaporation source 100. Thus, according to different embodiments that can be combined with other embodiments described herein, a driver for translational movement can be placed in a track or linear guide 220, in a vacuum chamber 110, or combinations thereof. In the evaporation source 100. FIG. 2 shows a valve 205 such as, for example, a gate valve. Valve 205 allows a vacuum seal to an adjacent vacuum chamber (not shown in FIG. 2). The valve can be opened for transfer of the substrate 121 or mask 132 into or out of the vacuum chamber 110.

  According to some embodiments, which can be combined with other embodiments described herein, an additional vacuum chamber, such as maintenance vacuum chamber 210, is provided adjacent to vacuum chamber 110. As a result, the vacuum chamber 110 and the maintenance vacuum chamber 210 are connected to the valve 207. Valve 207 is configured to open and close the vacuum seal between vacuum chamber 110 and maintenance vacuum chamber 210. The evaporation source 100 can be transferred to the maintenance vacuum chamber 210 while the valve 207 is open. Thereafter, the valve can be closed to provide a vacuum seal between the vacuum chamber 110 and the maintenance vacuum chamber 210. When valve 207 is closed, maintenance vacuum chamber 210 can be ventilated and opened for evaporation source 100 maintenance without breaking the vacuum in vacuum chamber 110.

  Two substrates 121 are supported on respective transport tracks in the vacuum chamber 110. In addition, two tracks are provided that provide a mask 132 thereon. Thereby, the coating of the substrate 121 can be masked by the respective masks 132. According to an exemplary embodiment, a mask 132, that is, a first mask 132 corresponding to the first substrate 121 and a second mask 132 corresponding to the second substrate 121 are in the mask frame 131. Provided and holds the mask 132 in place.

  According to some embodiments, which can be combined with other embodiments described herein, the substrate 121 can be supported by a substrate support 126 coupled to the alignment unit 112. The alignment unit 112 can adjust the position of the substrate 121 with respect to the mask 132. FIG. 2 shows an embodiment in which the substrate support 126 is coupled to the alignment unit 112. Thus, the substrate is moved relative to the mask 132 to provide proper alignment between the substrate and the mask during the deposition of the organic material. According to further embodiments that can be combined with other embodiments described herein, alternatively or additionally, the mask 132 and / or the mask frame 131 holding the mask 132 may be attached to the alignment unit 112. Can be linked. Thereby, either the mask can be positioned with respect to the substrate 121, or both the mask 132 and the substrate 121 can be positioned with respect to each other. The alignment unit 112 is configured to adjust the relative position between the substrate 121 and the mask 132 relative to each other, but allows for proper alignment of the mask during the deposition process and produces a high quality display. Or it becomes useful for LED display manufacture.

  An example of alignment of the mask and substrate relative to each other includes an alignment unit that allows relative alignment in at least two directions that define a plane of the substrate and a plane that is substantially parallel to the plane of the mask. For example, alignment can be performed at least in the x-direction and the y-direction, i.e., in two Cartesian directions that define the parallel planes. Typically, the mask and substrate can be essentially parallel to each other. In particular, the alignment can further be performed in a direction essentially perpendicular to the plane of the substrate and the plane of the mask. Therefore, the alignment unit is configured in at least XY alignment, in particular XYZ alignment of the mask and the substrate with respect to each other. One particular example that can be combined with other embodiments described herein is a mask that can hold the substrate stationary in the vacuum chamber 110 in the x-, y-, and z-directions. To align.

  As shown in FIG. 2, the linear guide 220 provides the direction of translation of the evaporation source 100. A mask 132 is provided on both sides of the evaporation source 1000. This allows the mask 132 to extend essentially parallel to the direction of translation. Furthermore, the substrate 121 on the opposite side of the evaporation source 100 can also extend essentially parallel to the direction of translation. According to an exemplary embodiment, the substrate 121 can be moved into and out of the vacuum chamber 110 via the valve 205. Accordingly, the deposition apparatus 200 can include respective transport tracks for transporting each of the substrates 121. For example, the transport track can extend into and out of the vacuum chamber 110 parallel to the substrate position shown in FIG.

  Typically, additional tracks are provided to support the mask frame 131 and hence the mask 132. Thus, some embodiments that can be combined with other embodiments described herein can include four tracks within the processing vacuum chamber 110. For example, to move one of the masks 132 out of the chamber, such as for mask cleaning, the mask frame 131 and thereby the mask can be moved onto the transport track of the substrate 121. Each mask frame can then enter and exit the vacuum chamber 110 on the substrate transport track. Even though it is possible to provide the mask frame 131 with transport tracks separated into and out of the vacuum chamber 110, the cost of ownership of the deposition apparatus 200 is only two tracks, i.e. transport tracks for the substrate. When extending into and out of the vacuum chamber 110, this can be eliminated, and in addition, the mask frame 131 can be moved to each of the transport tracks for the substrate by a suitable actuator or robot.

  FIG. 2 shows another exemplary embodiment of the evaporation source 100. The evaporation source 100 includes a support 102. The support 102 is configured for translational movement along the linear guide 220. The support 102 supports the evaporation crucible 104 and the distribution pipe 106 provided on the evaporation crucible 104. Thereby, the steam generated in the evaporation crucible can move upward from one or a plurality of outlets of the distribution pipe. According to the embodiments described herein, the distribution pipe 106 can also be considered a vapor distribution showerhead, eg, a straight vapor distribution showerhead.

  The one or more outlets may be, for example, one or more openings or one or more nozzles provided in a showerhead or other vapor distribution system. The evaporation source can include a vapor distribution showerhead, eg, a linear vapor distribution showerhead having a plurality of nozzles or openings. A showerhead can be understood herein to include a housing having an opening such that the pressure in the showerhead is at least an order of magnitude higher than the pressure outside the showerhead, for example.

  FIG. 2 further illustrates a shield assembly having at least one shield 202. Typically, as shown in FIG. 2, embodiments can include two shields 202, eg, side shields. Thereby, the evaporation of the organic material can be delimited in the direction towards the substrate. Evaporation to the side of the distribution pipe, i.e. evaporation in a direction perpendicular to the normal evaporation direction, for example, can be avoided or used only in the idle mode. In view of the fact that it may be easier to shut off the vapor beam of organic material as compared to switching off the vapor beam of organic material, the distribution pipe 106 also has an operating mode in which vapor release is not desired. In order to avoid vapor from exiting the evaporation source 100, it can be rotated towards one of the side shields 202.

  According to embodiments described herein, which can be combined with other embodiments described herein, rotation of the distribution pipe is provided by rotation of an evaporator control housing to which at least the distribution pipe is mounted. be able to. Typically, an evaporation crucible is also attached to the evaporator control housing. Accordingly, the evaporation source is at least a distribution pipe that is rotatably mounted, in particular, both, that is, a distribution pipe that is rotatably mounted and an evaporation crucible, and more specifically, can be rotated integrally. Includes mounted control housing, distribution pipe and evaporation crucible. Typically, one or more side shields can be fixedly attached and thus do not rotate integrally with the distribution pipe. According to a typical example, as shown in FIGS. 2 and 3, the side shield can be provided such that a vapor outlet is provided on two sides of the evaporation source, the two sides each having two Facing one of the substrates. Therefore, the fixed side shield is stationary with respect to the rotation of the distribution pipe around the axis. However, the side shield follows the translation movement and is movable with respect to the translation movement.

  FIG. 3 shows further modifications that can be combined with other embodiments described herein. Thus, details, aspects and features already described for FIG. 2 will be omitted for reference purposes. Compared to FIG. 2, the evaporation source 100 shown in FIG. 3 includes three evaporation crucibles 104 and three distribution pipes 106. To coat a substrate with a layer of organic material, one organic material can be evaporated or a plurality of organic materials can be evaporated for the purpose of depositing one layer of organic material. Thereby, a plurality of organic materials are mixed in the vapor state and / or on the surface of the substrate to form one layer of the organic material. With this in mind, according to some embodiments, which can be combined with other embodiments described herein, support a plurality of evaporating crucibles 104 and a plurality of distribution pipes 106 by a support 102. Can do. As previously described, the distribution pipe can provide a source, such as, for example, a linear distribution showerhead, and further, the support 102 can provide a linear guide 220 for depositing organic material on the substrate 121. Move along.

  According to further embodiments that can be combined with other embodiments described herein, the transfer of the evaporation source 100 in the maintenance vacuum chamber 210 can be provided by an elongated portion of the linear guide 220. This provides an additional linear guide 320 into the maintenance vacuum chamber 210. Further, the second evaporation source 100 can be provided at a standby position in the maintenance vacuum chamber 210. FIG. 3 shows a further evaporation source 100 in a standby position on the left side of the maintenance vacuum chamber. According to some embodiments of operating the deposition apparatus 200, the evaporation source 100 shown in the vacuum chamber 110 can be moved into the maintenance vacuum chamber 210, for example, when maintenance is desired. The valve 207 can be opened for this movement. The further evaporation source 100 shown in FIG. 3 in the standby position and ready for operation can be moved into the vacuum chamber 110. Thereafter, the valve 207 can be closed and the maintenance vacuum chamber 210 can be ventilated and opened for maintenance of the first evaporation source 100 that has just moved into a standby position in the maintenance vacuum chamber. As a result, the evaporation source can be quickly replaced. Thus, the deposition apparatus 200 has reduced downtime which creates a significant portion of the cost of ownership of the known deposition apparatus.

  Furthermore, the embodiments described herein allow for a stable evaporation rate on a time scale of one week or more, for example, about ± 5% or less. This can be provided in particular by improved maintenance situations. However, according to the method of operating organic material, refilling the evaporation crucible with the organic material can be performed without breaking the vacuum and without stopping the evaporation of the deposition apparatus. can do. Maintenance and replenishment of one evaporation source can be performed independently of the operation of another source. This improves cost of ownership (CoO) because source maintenance and replenishment is a bottleneck in many OLED manufacturing systems. In summary, high system uptime due to the absence of the need to vent the substrate handling or deposition chamber during routine maintenance or mask changes can significantly improve CoO. As mentioned above, one reason for this improvement is the maintenance vacuum chamber and / or other components associated with the maintenance vacuum chamber described herein, a separate chamber that can be evacuated, i.e., maintenance. Maintenance and preconditioning of one or more evaporation sources in a vacuum chamber or another source storage chamber is provided.

  4A and 4B show schematic side cross-sectional views of a deposition apparatus 200 for depositing organic materials. 4A shows the operating situation, and the left substrate 121 in the vacuum chamber 110 is coated with an organic material. FIG. 4B shows the operating situation, with the right substrate 121 in the vacuum chamber 110 after the distribution pipe 106 (two distribution pipes can be seen in FIGS. 4A and 4B) is rotated. Coated with organic material.

  4A and 4B show a first transport track for the first substrate 121 and a second transport track for the second substrate 121. FIG. A first roller assembly is shown on one side of the vacuum chamber 110 and a second roller assembly is shown on the opposite side of the vacuum chamber. 4A and 4B show the respective rollers 424 of the first roller assembly and the second roller assembly. The roller can rotate about shaft 425 and is driven by a driver system. Typically, a plurality of rollers are rotated by a single motor. The substrate 121 is supported in the carrier 421. According to some embodiments, which can be combined with other embodiments described herein, the carrier 421 has a rod on its underside that can engage a roller. Thus, according to an exemplary embodiment that can be combined with other embodiments described herein, a first transport trek for the first substrate and a second for the second substrate. Two transport treks are provided. Two further tracks are provided, for example, by respective roller assemblies. 4A and 4B show the rollers 403 on both sides of the vacuum chamber 110. FIG. A further track is configured to support a mask 132 that can be supported in a mask frame 131. According to an exemplary embodiment, the mask frame 131 can have a rod 431 on its underside for engaging the roller 403 of the respective roller assembly.

  According to some embodiments, which can be combined with other embodiments described herein, a carrier adapted for use in a processing system includes an electrode assembly and a support base. The electrode assembly is configured to generate an electrostatic attraction force for securing the substrate to the substrate carrier. According to a further additional or alternative modification, the support base has a heating / cooling reservoir formed therein. The electrode assembly and support base form a unitary body configured for transport within the processing system. The carrier can be coupled to the supply medium in the processing system. A quick disconnect can be coupled to the body and configured to capture the thermal conditioning medium in the reservoir heating / cooling reservoir when the body is disconnected from the source of the thermal conditioning medium. it can. The quick disconnect can be coupled to add an adsorbed charge.

  According to some embodiments, which can be combined with other embodiments described herein, an actuator or robot for moving the mask frame 131 from the roller 403 to the roller 424 is provided in the vacuum chamber 110. Provided. This provides a mask frame, as well as a mask, on a roller assembly that provides a transport track. Thus, the mask frame 131 can be moved into and out of the vacuum chamber 110 along a transport track provided by the substrate roller assembly.

  In FIG. 4A, the left substrate 121 is coated with an organic material. This is indicated by reference numeral 10 illustrating that the vapor of organic material is being guided from a plurality of discharge openings or nozzles in the distribution pipe 106. The substrate and carrier on the right side of the vacuum chamber 110 are shown in FIG. 4A by dotted lines. The dotted line indicates that the substrate is in or out of transfer from the vacuum chamber 110 or that the substrate and mask 132 are currently aligned with each other. Typically, the transport of the substrate coated with the organic material and the mask alignment are completed before the organic material is deposited on the left substrate. This allows the evaporation source 100 to immediately view from the deposition position of the left substrate to the deposition position of the right substrate, as shown in FIG. 4B.

  The evaporation source 100 includes an actuator 108 such as a torque motor, an electric robot, or a pneumatic rotor. The actuator 108 can provide torque via a vacuum rotary feedthrough 109 such as, for example, a ferrofluid feedthrough. The actuator 108 is configured to rotate at least the distribution pipe 106 about an axis that is essentially vertical. The evaporation source includes, for example, a support 102 that can accommodate the actuator 108 and the feedthrough 109. According to some embodiments, which can be combined with other embodiments described herein, the evaporation source 100 further includes an evaporator control housing 402. The evaporator control housing 402 may be an atmospheric box, i.e. a box configured to maintain an internal atmospheric pressure even when the vacuum chamber 110 is evacuated until it reaches a technical vacuum. For example, at least one element selected from the group consisting of a switch, a valve, a controller, a cooling unit, and a cooling control unit can be provided in the evaporator control housing 402. The support 102 further supports the evaporation crucible 104 and the distribution pipe 106.

  According to some embodiments, which can be combined with other embodiments described herein, the support 102 is engaged with a linear guide 433. Translational movement of the evaporation source can be provided by moving the support 102 into or on the linear guide 433. Thereby, actuators, drivers, motors, driver belts and / or driver chains can be provided in the linear guide or in the support 102. According to a further alternative, respective portions of the actuator, driver, motor, driver belt, and / or driver chain can be provided in both the linear guide and the support.

  From the coating position where the left substrate 121 in the vacuum chamber 110 is coated (see FIG. 1A) to the distribution pipe, the right substrate 121 in the vacuum chamber 110 is coated with an organic material (see FIG. 4B). After being rotated to (see), the evaporation source 100 is moved by a translational movement along a linear guide 433 for depositing the substrate 121 on the right side in the vacuum chamber 110. As shown by the dotted line on the left side of FIG. 4B, the first substrate pre-coated with an organic material is now removed from the vacuum chamber 110. A new substrate is provided in the processing region in the left vacuum chamber 110 and the mask 132 and the substrate 121 are aligned with respect to each other. Thus, after the right substrate 121 is coated with a layer of organic material, the distribution pipe 106 can be rotated by the actuator 108 to re-deposit the organic material on the new substrate 121 on the left side.

  As described above, the embodiments described herein provide translational movement of at least one distribution pipe that provides a source along one dimension of the substrate 121 and second processing from the first processing region. Each of the first processing region and the second processing region is configured to have a substrate supported therein. For example, the substrate in the processing region is supported in a carrier that is sequentially provided on the transport track and / or actuator for alignment of the substrate position. Typically, at least one distribution pipe 106 forming the source extends in an essentially vertical direction, i.e., the line defining the source extends in an essentially vertical direction and the at least one distribution pipe 106. The axis of rotation also extends essentially vertically. At least one distribution pipe 106 is configured to rotate during operation. As can be seen for the example with respect to FIGS. 4A and 4B, the direction of forming the source and the direction of the axis of rotation can be parallel.

  According to some embodiments, the evaporation source may include mechanical signals and / or power transfer to the source, such as having a sliding contact. For example, a combination of linear drivers, vacuum rotating units and / or sliding contacts can be provided for signal and / or power transfer to the evaporation source. According to further embodiments that can be combined with other embodiments described herein, the evaporation source can include inductive power transmission and / or inductive signal transmission. 4A and 4B show a first coil arrangement 452 in the evaporation source 100, for example, in the support 102, and a second coil arrangement 453 in the vacuum chamber 110. As a result, power and / or control signals can be inductively transmitted from the vacuum chamber 110 to the evaporation source 100. For example, the coil arrangement 453 can extend through the vacuum chamber so that power and / or signal transmission can be provided regardless of the position of the translational motion. According to different embodiments, at least one of the power for the evaporation crucible, i.e. at least one of the power for evaporating the organic material, the power for the actuator 108, i.e. the power for rotating the distribution pipe, for the evaporation control The control signal, the control signal for controlling the rotation of the distribution pipe, and the control signal for translational motion can be provided by a combination of coil arrangements.

  According to exemplary embodiments that can be combined with other embodiments described herein, the evaporation source includes at least one evaporation crucible and at least one distribution pipe, eg, at least one linear vapor distribution. Including a shower head. However, the evaporation source can include two or three, eventually four or even five evaporation crucibles and corresponding distribution pipes. This allows different organic materials to be evaporated in at least two of the several crucibles so as to form one organic layer on the substrate. Additionally or alternatively, similar organic materials can be evaporated in at least two of several crucibles so that the deposition rate can be increased. Organic materials can often evaporate only in a relatively small temperature range (eg, 20 ° C. or below), and therefore, by increasing the temperature in the crucible, the evaporation rate can be significantly increased. This is especially true because it cannot be increased.

  According to embodiments described herein, an evaporation source, a deposition apparatus, a method of operating an evaporation source and / or a deposition apparatus, and a method of manufacturing an evaporation source and / or deposition apparatus are configured for vertical deposition. That is, the substrate is supported in an essentially vertical orientation (eg, vertical ± 10 degrees) during layer deposition. Furthermore, by a combination of source, translation and rotation in the direction of evaporation, in particular around the axis where the axis is essentially perpendicular, for example, substrate orientation and / or rotation around the axis parallel to the line extension direction of the source. %, Or higher material utilization is possible. This is an improvement of at least 30% compared to other systems.

  A movable and pivotable evaporation source in the processing chamber, ie in the vacuum chamber for the deposition of the layers therein, allows a continuous or nearly continuous coating with high material utilization. In general, according to embodiments described herein, high evaporation source efficiency (> 85%) and high by using a scan source approach with a 180 degree swivel mechanism to coat alternating two substrates Material utilization (at least 50% or more) is possible. Thereby, the source efficiency takes into account the material loss caused by the fact that the vapor beam extends beyond the size of the large area substrate so that the entire area of the substrate to be coated can be uniformly coated. In addition, the material utilization also takes into account losses that occur during the idle time of the evaporation source, i.e. during the time when the evaporated source cannot deposit the evaporated material on the substrate.

  Still further, according to embodiments described herein with respect to vertical substrate orientation, deposition includes a small footprint of the deposition apparatus, and in particular, several deposition apparatuses for coating several layers of organic material on the substrate. The system becomes possible. Thus, the apparatus described herein can be considered configured for large area substrate processing or processing of multiple substrates in a large area carrier. Vertical orientation further allows for good scalability for current and future substrate size generations, which are current and future glass sizes.

  5A and 5B illustrate a further embodiment of the deposition apparatus 500. FIG. FIG. 5A shows a schematic top view of the deposition apparatus 500. FIG. 5B shows a schematic cross-sectional side view of the deposition apparatus 500. The deposition apparatus 500 includes a vacuum chamber 110. A valve 205, eg, a gate valve, allows a vacuum seal to the adjacent vacuum chamber. The valve can be opened for transfer of the substrate 121 or mask 132 into or out of the vacuum chamber 110. Two or more evaporation sources 100 are provided in the vacuum chamber 110. The example shown in FIG. 5A shows seven evaporation sources. According to exemplary embodiments that can be combined with other embodiments described herein, two evaporation sources, three evaporation sources, or four evaporation sources can be advantageously provided. Also, a maintenance logistic for a limited number of evaporation sources (eg, 2 to 4) may be easier compared to a larger number of evaporation sources that may be provided by some embodiments. Thus, the cost of ownership for such a system may be preferred.

  According to some embodiments, which can be combined with other embodiments described herein, a looped track 530 can be provided for the example shown in FIG. 5A. The looped track 530 can include a straight portion 534 and a curved portion 533. A loop track 530 is provided for translational movement of the evaporation source and rotation of the evaporation source. As mentioned above, the evaporation source can typically be a radiation source, for example, a linear vapor distribution showerhead.

  According to some embodiments, which can be combined with other embodiments described herein, a looped track is used to move one or more evaporation sources along the looped track. Includes rail device, roller device or magnetic guide.

  Based on the looped track 530, the source train can move in translation along the substrate 121, typically masked by the mask 132. A curved portion 533 of the loop track 530 rotates the evaporation source 100. Further, a curved portion 533 can be provided to position the evaporation source in front of the second substrate 121. A further straight portion 534 of the looped track 530 provides further translational movement along the further substrate 121. This allows the substrate 121 and mask 132 to remain essentially stationary during deposition, according to some embodiments, which can be combined with other embodiments described herein, as described above. is there. A source, eg, an evaporation source that provides multiple sources in an essentially vertical orientation of the line, is moved along a stationary substrate.

  According to some embodiments, which can be combined with other embodiments described herein, the substrate 121 shown in the vacuum chamber 110 is further driven by a substrate support having rollers 403 and 424. In the stationary deposition position, it can be supported by the substrate support 126 connected to the alignment unit 112. The alignment unit 112 can adjust the position of the substrate 121 with respect to the mask 132. Thus, the substrate can be moved relative to the mask 132 to provide proper alignment between the substrate and the mask during the deposition of the organic material. According to further embodiments that can be combined with other embodiments described herein, alternatively or additionally, the mask 132 and / or the mask frame 131 holding the mask 132 may be attached to the alignment unit 112. Can be linked. Thereby, either the mask can be positioned with respect to the substrate 121, or both the mask 132 and the substrate 121 can be positioned with respect to each other.

  The embodiment shown in FIGS. 5A and 5B shows two substrates 121 provided in the vacuum chamber 110. However, at least three substrates or at least four substrates can be provided, particularly for embodiments including a train of evaporation source 100 in a vacuum chamber. This allows sufficient time for the substrate exchange, i.e. the transfer of a new substrate into the vacuum chamber and the transfer of the processed substrate from the vacuum chamber, with multiple evaporation sources and Thus, even a deposition apparatus 500 with higher throughput can be provided.

  5A and 5B show a first transport track for the first substrate 121 and a second transport track for the second substrate 121. FIG. A first roller assembly is shown on one side of the vacuum chamber 110. The first roller assembly includes a roller 424. Further, the transport system includes a magnetic guide element 524. Similarly, a second transport system having rollers and magnetic guide elements is provided on the opposite side of the vacuum chamber. The transport system can be operated, for example, as described with respect to FIGS. 4A and 4B. The upper part of the carrier 421 is guided by a magnetic guide element 524. Similarly, according to some embodiments, the mask frame 131 can be supported by a roller 403 and a magnetic guide element 503.

  FIG. 5B exemplarily shows two supports 102 provided on each straight portion 534 of the looped track 530. The evaporation crucible 104 and the distribution pipe 106 are supported by the respective supports 102. Thus, FIG. 5B shows two distribution pipes 106 supported by the support 102. The support 102 is shown guided on a straight portion 534 of the looped track. According to some embodiments, which can be combined with other embodiments described herein, the actuators, drivers, motors, driver belts, and / or driver chains are along the looped track, i.e. Support 102 may be provided to move along the straight portion 534 of the looped track and along the curved portion 533 of the looped track (see FIG. 5A).

  FIG. 6 illustrates an embodiment of a deposition system 600 having a first deposition apparatus 200 and a second deposition apparatus 200. According to the embodiments described herein, which can be combined with other embodiments described herein, one or more transfer chambers are provided. FIG. 6 exemplarily shows a first transfer chamber 610 and a second transfer chamber 611. In addition, portions of transfer chambers 609 and 612 are shown. As shown in FIG. 6, a gate valve 605 is provided between the transfer chamber 610 and the transfer chamber 609. The gate valve 605 can be opened and closed to provide a vacuum seal between the transfer chamber 610 and the transfer chamber 609. According to some embodiments, which can be combined with other embodiments described herein, one or more gate valves can be provided between two adjacent transfer chambers. The presence of the gate valve 605 depends on the application of the deposition system 600, i.e. the type, number and order of the organic material layers deposited on the substrate. Accordingly, one or more gate valves 605 can be provided between the transfer chambers. Alternatively, no gate valve is provided between any of the transfer chambers.

  According to some embodiments, which can be combined with other embodiments described herein, one or more of the transfer chambers can be provided as a vacuum rotation chamber. Inside, the substrate 121 can be rotated around a central axis, for example, a vertical central axis. As a result, the orientation of the transport track 621 can be changed. As shown in the transfer chamber 611, the two substrates 121 are rotated. The two transport tracks 621R where the substrate 121 is located rotate relative to the two transport tracks 621 and extend from the transport track 621 of the deposition apparatus 200. Considering these, the two substrates 121 on the transport track 621R are respectively provided at positions to be transferred to the adjacent transfer chamber 610 or 612.

  The first deposition apparatus 200 is connected to the first transfer chamber 610 by a valve 205. According to some embodiments, as shown in FIG. 6 and can be combined with other embodiments described herein, the transport track 621 extends from the vacuum chamber 110 into the transfer chamber 610. Thereby, one or more of the substrates 121 can be transferred from the vacuum chamber 110 to the transfer chamber 610. As a result, the valve 205 is typically opened for transferring one or more substrates. The further deposition apparatus 200 is connected to the second transfer chamber 611 by a further valve 205. Thus, a substrate can be transferred from one deposition apparatus to a transfer chamber, from a transfer chamber to a further transfer chamber, and from a further transfer chamber to a further deposition apparatus. This allows several layers of organic material to be deposited on the substrate without exposing the substrate to atmospheric and non-vacuum conditions and / or undesired environments. According to an exemplary embodiment that can be combined with other embodiments described herein, the transfer chamber can, for example, transfer one or more substrates under vacuum conditions and / or a desired environment. It is the vacuum transfer chamber comprised.

  The deposition apparatus 200 shown in FIG. 6 is similar to or corresponds to the deposition apparatus described with respect to FIG. The aspects, details and features described herein for the position device can also be provided to the deposition system 600 exemplarily shown in FIG. According to some embodiments, which can be combined with other embodiments described herein, an evaporation source 100 ′ can be provided in the deposition apparatus 200. The evaporation source 100 ′ includes four distribution pipes configured to guide the organic material on the substrate 121. This allows different organic materials to be evaporated in at least two of the four crucibles so as to form an organic layer on the substrate. Additionally or alternatively, similar organic materials can be evaporated in at least two of the four crucibles so that the deposition rate can be increased. Each material evaporated in the four evaporation crucibles is guided toward the substrate 121 by each of the four distribution pipes shown in FIG.

  As described above, according to some embodiments, which can be combined with other embodiments described herein, the substrate 121 can be moved along a first direction from the vacuum chamber 110. . Thereby, the substrate 121 is moved along an essentially straight path into an adjacent vacuum chamber, for example into a transfer chamber. Within the transfer chamber, the substrate can be rotated so that it can move along a second straight path in a second direction different from the first direction. According to an exemplary embodiment, the second direction is substantially perpendicular to the first direction. This allows easy design of the deposition system. To load the substrate into the vacuum chamber 110, the substrate can be moved into the transfer chamber along the second direction and rotated therein. Thereafter, the substrate can be moved into the vacuum chamber 110 along a first direction different from the second direction.

  FIGS. 7A-7C illustrate a portion of an evaporation source that can be utilized in accordance with the embodiments described herein. The evaporation source can include a distribution pipe 106 and an evaporation crucible 104 as shown in FIG. 7A. Thereby, for example, this distribution pipe can be an elongated cube having a heating unit 715. The evaporation crucible can be a reservoir for organic material that evaporates in the heating unit 725. According to an exemplary embodiment that can be combined with other embodiments described herein, distribution pipe 106 provides a source. For example, a plurality of openings and / or nozzles are arranged along at least one line. According to an alternative embodiment, an elongated opening can be provided that extends along at least one line. For example, the elongated opening can be a slit. According to some embodiments, which can be combined with other embodiments described herein, the lines extend essentially vertically. For example, the length of the distribution pipe 106 corresponds at least to the height of the substrate deposited in the deposition apparatus. In many cases, the length of the distribution pipe 106 will be at least 10% or 20% longer than the height of the substrate being deposited. This can provide uniform deposition at the top and / or bottom of the substrate.

  According to some embodiments, which can be combined with other embodiments described herein, the length of the distribution pipe is 1.3 m or more, such as 2.5 m or more. can do. According to one configuration, the evaporation crucible 104 is provided at the lower end of the distribution pipe 106, as shown in FIG. 7A. The organic material evaporates in the evaporation crucible 104. Vapor of organic material enters the distribution pipe 106 at the bottom of the distribution pipe and is guided essentially from the side through a plurality of openings in the distribution pipe, for example, toward an essentially vertical substrate. . For illustrative purposes, an evaporation crucible 104 and distribution pipe 106 that does not include a heat shield is shown in FIG. 7A. Thereby, the heating unit 715 and the heating unit 725 can be seen in the schematic perspective view shown in FIG. 7A.

  FIG. 7B shows an enlarged schematic view of a portion of the evaporation source, with a distribution pipe 106 connected to the evaporation crucible 104. A flange unit 703 configured to connect between the evaporation crucible 104 and the distribution pipe 106 is provided. For example, the evaporation crucible and distribution pipe are provided as a separation unit that can be separated and connected or assembled with a flange unit, for example, for operation of the evaporation source.

  The distribution pipe 106 has a space 710 that is hollow inside. A heating unit 715 is provided to heat the distribution pipe. Thus, the distribution pipe 106 can be heated to a temperature at which the vapor of the organic material provided by the evaporation crucible 104 does not liquefy at the inner portion of the distribution pipe 106 wall. A shield 717 is provided around the pipe of the distribution pipe 106. The shield is configured to reflect the thermal energy provided by the heating unit 715 back toward the hollow space 710. Thereby, the energy required to heat the distribution pipe, that is, the energy provided to the heating unit 715 can be reduced because the shield 717 reduces heat loss. According to some embodiments, which can be combined with other embodiments described herein, the shield 717 can include one heating shield layer. Alternatively, two or more heat shield layers can be provided in the heat shield 717.

  Typically, as shown in FIG. 7B, the heat shield 717 includes an opening at the location of the opening 712 in the distribution pipe 106. The enlarged view of the evaporation source shown in FIG. 7B shows four openings 712. The opening 712 is provided along a line that is essentially parallel to the axis of the distribution pipe 106. As described herein, the distribution pipe 106 can be provided, for example, as a linear distribution showerhead having a plurality of openings disposed therein. Thereby, a showerhead as understood herein has a housing, a hollow space or a pipe that can provide or guide material from, for example, an evaporation crucible. The showerhead can have a plurality of openings (or elongated slits) such that the pressure inside the showerhead is higher than the pressure outside the showerhead. For example, the pressure inside the showerhead can be at least an order of magnitude higher than the pressure outside the showerhead.

  During operation, the distribution pipe 106 is connected to the crucible 104 evaporating at the flange unit 703. The evaporation crucible 104 is configured to receive an organic material to be evaporated and evaporate the organic material. FIG. 7B shows a cross-sectional view through the housing of the evaporation crucible 104. The refill opening is provided at the top of the evaporation crucible, which can be closed using, for example, a plug 722, lid, cover or the like to close the housing of the evaporation crucible 104.

  An outer heating unit 725 is provided in the housing of the evaporation crucible 104. The outer heating element can extend along at least a portion of the wall of the evaporation crucible 104. According to some embodiments, which can be combined with other embodiments described herein, one or more central heating elements 726 can be additionally or alternatively provided. FIG. 7B shows two central heating elements 726. The central heating element 726 can include a conductor 729 for supplying power to the central heating element. According to some embodiments, the evaporation crucible 104 can further include a shield 727. The shield 727 can be configured to reflect the thermal energy provided by the outer heating unit 725 and, if present, the central heating element 726 back into the housing of the evaporating crucible 104. This can provide efficient heating of the organic material within the evaporation crucible 104.

  According to some embodiments described herein, heat shields, such as shield 717 and shield 727, can be provided to the evaporation source. The heat shield can reduce the energy loss of the evaporation source. Thereby, energy consumption can be reduced. However, as a further aspect, especially for the deposition of organic materials, it is possible to reduce the thermal radiation generated from the evaporation source, in particular towards the mask and the substrate during the deposition. There is a need to accurately control substrate and mask temperatures, particularly for organic material deposition on masked substrates, and for display manufacturing. Thus, the heat radiation generated from the evaporation source can be reduced or avoided. Accordingly, some embodiments described herein include heat shields such as shield 717 and shield 727.

  These shields can include several shield layers to reduce heat radiation to the outside of the evaporation source. As a further option, the heat shield may include a shield layer that is actively cooled by a fluid such as air, nitrogen, water or other suitable cooling fluid. According to further embodiments that can be combined with other embodiments described herein, the one or more heat shields provided to the evaporation source may include an evaporation source, such as a distribution pipe 106 and / or an evaporation crucible 104. A sheet metal surrounding each portion of the plate. For example, the sheet metal can have a thickness of 0.1 mm to 3 mm and is selected from at least one material selected from the group consisting of ferrous metals (SS) and non-ferrous metals (Cu, Ti, Al). And / or can be spaced apart from each other, for example by a gap of 0.1 mm or more.

  According to some embodiments, an evaporation crucible 104 is provided at the lower end of the distribution pipe 106, as exemplarily shown in FIGS. 7A and 7B. According to further embodiments that can be combined with other embodiments described herein, the steam conduit 732 is located at a central portion of the distribution pipe or at another location between the lower end of the distribution pipe and the upper end of the distribution pipe. Can be provided to the distribution pipe 1006. FIG. 7C shows an example of an evaporation source having a distribution pipe 106 and an evaporation conduit 732 provided in the central portion of the distribution pipe. Organic material vapor is generated in the evaporation crucible 104 and guided through the vapor conduit 732 to the central portion of the distribution pipe 106. Steam exits distribution pipe 106 through a plurality of openings 712. Distribution pipe 106 is supported by support 102 as described with respect to the other embodiments described herein. According to further embodiments that can be combined with other embodiments described herein, two or more steam conduits 732 can be provided at different locations along the length of the distribution pipe 106. This allows the vapor conduit 732 to be connected to either one evaporating crucible 104 or several evaporating crucibles 104. For example, each vapor conduit 732 can have a corresponding evaporation crucible 104. Alternatively, the evaporation crucible 104 can be in fluid communication with two or more vapor conduits 732 that are connected to the distribution pipe 106.

  As described herein, the distribution pipe can be a hollow cylinder. Thereby, it can be understood that the term “cylinder” is generally recognized as having a circular bottom shape and a circular top shape, as well as a curved surface area or shell connected to the upper circle and a small lower circle. According to further embodiments that can be combined with other embodiments described herein, the term “cylinder” is curved to connect with any bottom shape and matching top shape, and top and bottom shapes. It can be further understood in the mathematical sense to have a surface area or shell. Thus, the cylinder does not necessarily have a circular cross section. Instead, the base surface and the top surface can have a different shape from the circle.

  As described with respect to FIGS. 5A and 5B, embodiments having an evaporation source train and / or an embodiment having looped tracks for translational and rotational movement of the evaporation source can vacuum three or more substrates. Benefits can be provided by providing in the chamber. Different embodiments for providing more than two substrates in the vacuum chamber 110 are shown in FIGS. 8A, 8B and 9. For the example shown in FIG. 8A, the vacuum chamber 110 can include four locations or processing regions where the substrate 121 can be processed, for example, organic materials can be deposited on the substrate 121. Thereby, according to some embodiments, which can be combined with other embodiments described herein, particularly for deposition apparatus 500 provided with multiple evaporation sources, to increase throughput Substrate replacement can be accelerated. The deposition apparatus 500 shown in FIG. 8A includes two transfer chambers 810. Each of the transfer chambers is provided adjacent to the vacuum chamber 110. For example, the transfer chamber 810 can be coupled to the vacuum chamber 110 via a valve 205. Instead of the two transfer chambers 810 shown in FIG. 8A, one transfer chamber can be provided as described with respect to other embodiments shown herein.

  A transport track 621 is provided in the transfer chamber 810. The transfer track 621 extends into the vacuum chamber 110. According to some embodiments, which can be combined with other embodiments described herein, the transport track comprises a roller arrangement, a magnetic guide element arrangement, and / or a substrate and / or a carrier having a substrate. The substrate can typically be oriented essentially vertically, with other transport elements configured for an essentially linear movement. As shown in FIG. 8A, for example, a substrate support 126 that supports a substrate can be provided by supporting a carrier 421 in which the substrate is disposed. According to some embodiments, which can be combined with other embodiments described herein, the substrate 121 can be provided at a processing position that naturally deviates from the transport track 621. For example, the substrate 121 can be moved in a direction essentially perpendicular to the direction of the transport track 621 for positioning the substrate into or out of the processing position.

  Four substrates 121 are provided in the vacuum chamber 110 and the two substrates can be positioned along a line that is essentially parallel to the direction of the transport track 621. Thus, the two substrates are positioned along the first line and the two substrates are positioned along the second line. A looped track 530 for moving the plurality of evaporation sources 100 is provided between the first line and the second line. According to some embodiments, the looped track can include two straight portions and two curved portions. The two straight portions can be essentially parallel to the first line and / or can be essentially parallel to the substrate 121. The evaporation source 100 can be moved along the straight position of the looped track 530 to provide translational movement to the position of the organic material on the substrate, for example with a linear distribution showerhead. The evaporation source 100 is rotated by the movement of the evaporation source along the curved portion of the looped track. Thus, the direction in which the vapor of the organic material is guided by the distribution pipe of the evaporation source is rotated, for example, 180 degrees. Therefore, the distribution pipe of the evaporation source can rotate at least 160 degrees.

  According to some embodiments, which can be combined with other embodiments described herein, for example, a mask 132 that can be supported by a mask frame 131 is a first line defined by a substrate position. And the loop track 530, or between the second line defined by the additional substrate position and the loop track 530, respectively. The loop track 530 allows translational movement of the plurality of evaporation sources 100 along the substrate masked by the mask 132. According to some embodiments, which can be combined with other embodiments described herein, two or more evaporation sources 100 are provided on the looped track 530. For example, FIG. 8A shows eight evaporation sources 100 provided on the loop track 530. Two or more evaporation sources can be transported across the substrate with translational movements in sequence. Thereby, for example, each of the evaporation sources 100 can deposit one layer of organic material. Thus, several different layers of organic material can be deposited on the substrate provided at the processing location. According to some embodiments, which can be combined with other embodiments described herein, two or more evaporation sources 100, or even each of the evaporation sources, can have different organic materials on the substrate. Different layers can be deposited.

  According to further embodiments that can be combined with other embodiments described herein, a maintenance vacuum chamber 210 can be provided. For example, the maintenance vacuum chamber 210 can be separated from the vacuum chamber 110 by a valve 207. Valve 207 is configured to open and close the vacuum seal between vacuum chamber 110 and maintenance vacuum chamber 210. The evaporation source 100 can be transferred to the maintenance vacuum chamber 210. Thereafter, the valve can be closed to provide a vacuum seal between the vacuum chamber 110 and the maintenance vacuum chamber 210. Thus, the maintenance vacuum chamber can be ventilated and opened without breaking the vacuum in the vacuum chamber 110.

  Additional tracks 820, eg, additional looped tracks, are provided in the maintenance vacuum chamber 210. As illustrated in FIG. 8A, the curved portion of the further track 820 can overlap the curved portion of the looped track 530. This allows the evaporation source 100 to be transferred from the looped track 530 to a further track 820. Thus, the evaporation source can be moved from the looped track 530 to the further track 820 and vice versa. This allows for movement of the evaporation source within the maintenance vacuum chamber 210 for maintenance of the evaporation source and for movement of the maintained evaporation source from the maintenance vacuum chamber 210 into the vacuum chamber 110. The maintained evaporation source can evaporate the organic material on the substrate in the vacuum chamber 110.

  Although not shown in FIG. 8A, one or more alignment units for alignment of the substrate and mask with respect to each other can be provided in the deposition apparatus 500 shown in FIG. 8A. FIG. 8A shows an embodiment in which a looped track 530 is provided between a first line defined by two substrate processing locations and a second line defined by two additional substrate processing locations. Indicates.

  An alternative arrangement of looped track 530 is shown in FIG. 8B. Thereby, the looped track 530 surrounds at least one substrate, typically two or more substrates disposed along a line defined by the processing location of the substrate. In view of the above, according to one option (see FIG. 8A), the at least two substrates can be oriented such that the respective surfaces of those substrates on which the organic material is deposited face each other. According to another option (see FIG. 8B), the substrate in the vacuum chamber 110 and their respective surfaces on which the organic material is deposited are oriented in the same direction. Although the deposition apparatus 500 shown in FIGS. 8A and 8B shows a vacuum chamber 110 configured to receive four substrates 121, each improvement is configured to store two substrates 121. It can also be provided in a vacuum chamber. For example, further details, aspects, and features relating to the maintenance vacuum chamber 210, additional track 820, transfer truck 621, transfer chamber 810, or the like, are described in the similar manner described for the embodiment shown in FIG. 8A. The method can be implemented in the embodiment shown in FIG. 8B.

  According to embodiments described herein, the deposition apparatus includes a chamber having two or more substrates, ie, a substrate processing region. As one substrate is being processed, another substrate is moved into or out of the chamber. Accordingly, one substrate can be processed in one substrate processing region. Furthermore, the substrate located in the second substrate processing region can be removed, and a new substrate can be moved into the second substrate processing region.

  As described herein, one or more evaporation sources can be provided as one or more sources that scan a stationary substrate by translation. At least one source per organic layer can be provided, particularly for embodiments having source trains and / or looped tracks. For example, when manufacturing a display, the radiation source can be provided in the light emitting layer, hole transport layer, hole injection layer, or the like.

  FIG. 9 shows a further embodiment of the deposition apparatus 500. The deposition apparatus 500 includes a transfer chamber 810, a valve 205, a maintenance vacuum chamber 210, and a further track 820 as previously described for other embodiments described herein. Although the embodiment shown in FIG. 9 includes four transfer chambers 810 to assist in better exchange of the substrate 121 into the vacuum chamber to deposit organic material on the substrate, A similar transport track is provided in the transfer chamber 810. The transport track extends into the vacuum rotation section 910 for transporting substrates into and out of the vacuum rotation section. FIG. 9 shows an example in which four vacuum rotation sections 910 are connected to the vacuum chamber 110. A looped track 530 is provided in the vacuum chamber 110. The plurality of evaporation sources 100 are supported by the looped track 530 and can therefore perform translational movement along a straight portion of the looped track and rotational movement along a curved portion of the looped track.

  The vacuum rotation compartment 910 is coupled to the vacuum chamber 110 so that the system including the vacuum chamber 110 and the vacuum rotation compartment 910 can be evacuated. Alternatively, a single chamber containing a rotating module can be provided. The rotation of the substrate within the vacuum rotation section 910 is indicated by a circle indicated by reference numeral 911. According to an exemplary embodiment that can be combined with other embodiments described herein, each of the vacuum rotation compartments includes a vacuum rotation module and loads the substrate onto the first portion of the vacuum rotation module or It can be removed from there. For example, when the substrate loaded from the transfer chamber 810 is rotated 180 degrees, the substrate 121 moves at the processing position, and the evaporation source scans along the surface of the substrate. According to a further alternative, the rotation of the substrate to provide the substrate into the processing position can also take place at an angle different from 180 degrees, for example when the vacuum chamber and compartment are arranged differently. it can. However, a 180 degree rotation to move the substrate from the transfer position to the processing position provides a relatively small footprint.

  As shown in FIG. 9, for example, the rotation module includes two alignment units 112 such that the substrate 121 and the mask 132 can be aligned with each other for each of the two substrate locations provided in the rotation module. Can be included. According to one embodiment, the deposition apparatus can include, for example, four vacuum rotation modules and eight substrate support locations. However, according to other embodiments that can be combined with further embodiments described herein, different numbers of substrate support positions and / or different numbers of vacuum rotation modules can be provided. For example, at least two substrate processing locations are provided according to the embodiments described herein. Thereby, the substrate processing position is arranged so that the substrate can be processed by the rotation of at least the distribution pipe of the evaporation source. As another example, at least two rotation modules, at least two substrate processing positions, and at least four substrate support positions (two of which are also substrate processing positions) can be provided.

  FIG. 10 illustrates a flowchart illustrating a method for evaporating organic material according to embodiments described herein. In general, two substrate locations are provided to improve metal utilization. This is combined with the translational and rotational movement of the evaporation source, in particular a source such as a linear distribution showerhead. In step 802, a first substrate provided in an essentially vertical orientation is moved in a first processing position. In step 804, the evaporation source moves in at least a translational motion along the first substrate located at the first processing position, for example, scanning the first substrate, and the organic material is on the first substrate. It is deposited on. While the first substrate is being processed, the second processing position can be prepared for the second substrate processing therein. In step 806, for example, the second substrate can be moved in a second processing position that is different from the first processing position. Further, the preparation of the second substrate can include removing the preprocessed substrate from the second processing location and / or aligning the mask and the second substrate relative to each other. In step 808, at least the distribution pipe of the evaporation source is rotated and then directed to the second processing position. As described herein, rotation can occur around an essentially vertical axis, typically around the axis from which the source extends. In step 809, the evaporation source is moved along the second substrate located at the second processing position, such as scanning the second substrate, at least in translational motion, and the organic material is on the second substrate. It is deposited on.

  According to one embodiment, an evaporation source for organic materials is provided. The evaporation source is an evaporation crucible configured to evaporate the organic material; a distribution pipe having one or more outlets in fluid communication with the evaporation crucible and rotatable about the axis during evaporation; A support for a distribution pipe that is connectable to or includes a first driver, wherein the first driver is configured for translational movement of the support and the distribution pipe; Including.

  According to another embodiment, a deposition apparatus is provided for depositing an organic material into a vacuum chamber. The deposition apparatus comprises: a processing vacuum chamber; an evaporation source for the organic material that evaporates the organic material in the processing vacuum chamber; a substrate support system disposed in the vacuum chamber and having at least two tracks. A substrate support system, eg, each track is configured for an essentially vertical support for a carrier carrying a substrate in a substrate or vacuum chamber. The evaporation source is an evaporation crucible configured to evaporate the organic material; a distribution pipe having one or more outlets in fluid communication with the evaporation crucible and rotatable about the axis during evaporation; A support for a distribution pipe that is connectable to or includes a first driver, wherein the first driver is configured for translational movement of the support and the distribution pipe; Including.

  According to a further embodiment, a method for evaporating organic material is provided. The method of evaporating the organic material includes moving the first substrate in a first vertical processing position; and along the first substrate at least in translational motion while the evaporation source evaporates the organic material. Moving the evaporation source; moving the second substrate in a second processing position that is essentially perpendicular to the first processing position; rotating the evaporation source distribution pipe about the axis during evaporation; And moving the evaporation source along the second substrate in at least one translational movement while the evaporation source evaporates the organic material.

  According to some embodiments combined with other embodiments described herein, the distribution pipe may be a steam distribution showerhead that includes one or more outlets. According to some embodiments combined with other embodiments described herein, the distribution pipe may be rotatable at least 180 degrees or at least 360 degrees. According to some embodiments combined with other embodiments described herein, the distribution pipe rotates the distribution pipe relative to the support, and more particularly rotates the evaporation crucible relative to the support. It may be rotatable around the axis by two drivers. According to some embodiments combined with other embodiments described herein, the distribution pipe may be rotatable about an axis by traveling along a looped track. According to some embodiments combined with other embodiments described herein, the evaporation source is an evaporator control housing configured to maintain atmospheric pressure therein, supported by a support. And a housing configured to house at least one element selected from the group consisting of a switch, a valve, a controller, a cooling unit, and a cooling control unit. According to some embodiments combined with other embodiments described herein, the evaporation source further comprises at least one side shield for shielding the evaporation of the organic material, in particular two side shields. Good. According to some embodiments combined with other embodiments described herein, the evaporation source may further comprise a coil for at least one of inductive power transmission and inductive signal transmission. According to some embodiments combined with other embodiments described herein, the deposition apparatus includes a maintenance vacuum chamber coupled to the processing vacuum chamber, and a vacuum seal between the processing vacuum chamber and the maintenance vacuum chamber. And a vacuum valve for opening and closing the evaporation source, and the evaporation source can be transferred from the processing vacuum chamber to the maintenance vacuum chamber and from the maintenance vacuum chamber to the processing vacuum chamber. According to some embodiments combined with other embodiments described herein, the second substrate is a substantially vertical second while the evaporation source is moved along the first substrate. It may be moved at two processing positions.

While the above is directed to embodiments of the invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope of the invention is as follows: Determined by the claims.
Moreover, this application contains the aspect described below.
(Aspect 1)
An evaporation source for organic materials,
An evaporation crucible configured to evaporate the organic material;
A distribution pipe having one or more outlets in fluid communication with the evaporating crucible and rotatable around an axis during evaporation;
At least one side shield for shielding the organic material;
Evaporation source comprising.
(Aspect 2)
A support for the distribution pipe, connectable to or including the first driver, wherein the first driver is configured for translational movement of the support and the distribution pipe Support
The evaporation source according to aspect 1, further comprising:
(Aspect 3)
The evaporation source according to aspect 2, wherein the at least one side shield is configured to follow the translational motion of the support and the distribution pipe.
(Aspect 4)
The evaporation source according to any one of aspects 1 to 3, wherein the at least one side shield comprises a further side shield.
(Aspect 5)
The evaporation source according to any one of aspects 1 to 4, wherein the at least one side shield is stationary when the distribution pipe is rotated around the axis.
(Aspect 6)
The evaporation source according to any one of aspects 1 to 5, wherein the at least one side shield is configured to delimit evaporation of the organic material in a direction toward the substrate.
(Aspect 7)
The evaporation source according to any one of aspects 1 to 6, wherein the at least one side shield is configured for lateral evaporation in idle mode.
(Aspect 8)
The evaporation source according to any one of aspects 1 to 7, wherein the distribution pipe is rotatable toward the side shield in order to avoid vapor from exiting the evaporation source.
(Aspect 9)
The evaporation source according to any one of aspects 1 to 8, further comprising an evaporator control housing, wherein the distribution pipe is rotatable by rotation of the evaporator control housing.
(Aspect 10)
The evaporation source according to any one of aspects 1 to 9, wherein the evaporation crucible is attached to the evaporator control housing, and the distribution pipe and the evaporation crucible are attached so that they can rotate together.
(Aspect 11)
The evaporation source of aspect 10, wherein the distribution pipe, the evaporation crucible, and the evaporator control housing are rotatable together.
(Aspect 12)
The evaporation source according to aspect 2, wherein the at least one side shield is fixedly attached to the support.
(Aspect 13)
The evaporation source according to aspect 12, wherein the at least one side shield is fixedly attached so as not to rotate together with the distribution pipe.
(Aspect 14)
The evaporation source according to any one of aspects 1 to 13, wherein the vapor distribution showerhead is a linear vapor distribution showerhead.
(Aspect 15)
Evaporation according to any of aspects 1 to 14, wherein the distribution pipe provides a source that extends essentially vertically and / or the axis that rotates the distribution pipe extends essentially vertically. source.
(Aspect 16)
The evaporation source according to any one of aspects 1 to 15, wherein the distribution pipe is rotatable at least 160 degrees.
(Aspect 17)
The evaporation source according to any one of aspects 1 to 16, wherein the distribution pipe is rotatable around the axis by a second driver that rotates the distribution pipe with respect to the support.
(Aspect 18)
The aspect of aspect 17, wherein the support includes a support housing configured to maintain atmospheric pressure therein, and the support supports the distribution pipe via a rotatable vacuum feedthrough. Evaporation source.
(Aspect 19)
At least one second evaporation crucible supported by the support;
At least one second distribution pipe supported by the support in fluid communication with the at least one second evaporation crucible;
The evaporation source according to any one of aspects 2 to 18, further comprising:
(Aspect 20)
A deposition apparatus for depositing an organic material in a vacuum chamber,
A vacuum chamber;
The evaporation source according to any one of aspects 1 to 19, wherein the organic material is evaporated in the vacuum chamber;
A substrate support system disposed in the vacuum chamber and having at least two tracks, wherein the at least two tracks of the substrate support system carry the substrate in the substrate or in the vacuum chamber. A substrate support system, configured for an essentially vertical support of
A deposition apparatus comprising:
(Aspect 21)
21. A deposition apparatus according to aspect 20, wherein the at least one side shield is configured to delimit evaporation of organic material in a direction toward the substrate.
(Aspect 22)
A method for evaporating organic material,
Moving the first substrate in an essentially vertical first processing position;
Moving the evaporation source along the first substrate in at least a translational movement while the evaporation source evaporates the organic material;
Moving the second substrate at a second processing position that is essentially perpendicular to the first processing position;
Rotating the evaporation source distribution pipe around the axis during evaporation;
Shielding the evaporation of the organic material with at least one side shield;
Moving the evaporation source along the second substrate with at least a further translational movement while the evaporation source evaporates the organic material;
Including methods.
(Aspect 23)
23. A method according to aspect 22, further comprising rotating the distribution pipe for lateral evaporation in idle mode.
(Aspect 24)
24. A method according to aspect 22 or 23, further comprising rotating the distribution pipe toward the side shield to avoid vapor exiting the evaporation source.
(Aspect 25)
Rotating the evaporation source distribution pipe around the axis during evaporation is performed in a first rotation direction, and after moving the evaporation source along the second substrate, the first rotation 25. A method according to any one of aspects 22 to 24, further comprising rotating the evaporation source distribution pipe about an axis during evaporation in the direction.
(Aspect 26)
26. A method according to any one of aspects 22 to 25, further comprising blocking a vapor beam with the side shield.

Claims (16)

An evaporation source for organic materials,
An evaporation crucible (104) configured to evaporate the organic material;
A distribution pipe (106) having one or more outlets in fluid communication with the evaporating crucible and rotatable about an axis during evaporation;
A support (102) of the distribution pipe coupled to or including the first driver, the support being configured for translational movement of the support and the distribution pipe (102)
An evaporator control housing (402) supported by the support (102) and configured to maintain an internal atmospheric pressure;
The evaporation source further comprises a controller housed in the evaporator control housing.   The evaporation source according to claim 1, wherein the evaporation crucible is attached to the evaporator control housing, and the distribution pipe and the evaporation crucible are attached so that they can rotate together.   The evaporation source of claim 2, wherein the distribution pipe, the evaporation crucible, and the evaporator control housing are rotatable together. The distribution pipe is steam distribution showerhead comprising the one or more discharge ports, the evaporation source according to any one of 1 to 3.   5. An evaporation source according to claim 1 or 4, wherein the distribution pipe provides a source that extends essentially vertically and / or the axis that rotates the distribution pipe extends essentially vertically.   6. The evaporation source according to claim 1, wherein the distribution pipe is rotatable at least 160 degrees, in particular 180 degrees.   The evaporation source according to claim 1, wherein the distribution pipe is rotatable around the axis by a second driver that rotates the distribution pipe with respect to the support.   8. The support of claim 7, wherein the support includes a support housing configured to maintain an internal atmospheric pressure, the support supporting the distribution pipe via a rotatable vacuum feedthrough. The source of evaporation. At least one second evaporation crucible supported by the support;
9. The apparatus of claim 1, further comprising at least one second distribution pipe supported by the support in fluid communication with the at least one second evaporation crucible. Evaporation source.   The evaporation source according to any one of claims 1 to 9, wherein the evaporator control housing further contains at least one element selected from the group consisting of a switch, a valve, a cooling unit and a cooling control unit. The evaporation source according to any one of claims 1 to 10, further comprising at least one side shield for shielding evaporation of the organic material.   The evaporation source according to any one of claims 1 to 11, further comprising a coil for at least one of inductive power transmission and inductive signal transmission. A deposition apparatus for depositing an organic material in a vacuum chamber,
A vacuum chamber;
The evaporation source according to claim 1, wherein the organic material is evaporated in the vacuum chamber.
A substrate support system disposed in the vacuum chamber and having at least two tracks, wherein the at least two tracks of the substrate support system are a substrate or a carrier carrying the substrate in the vacuum chamber. A substrate support system configured for essentially vertical support. A method for evaporating an organic material with an evaporation source,
Moving the first substrate in an essentially vertical first processing position;
Moving the evaporation source along the first substrate in at least a translational movement while the evaporation source evaporates the organic material;
Moving the second substrate at a second processing position that is essentially perpendicular to the first processing position;
Rotating the evaporation source distribution pipe around the shaft during evaporation;
Moving the evaporation source along the second substrate in at least a further translational movement while the evaporation source evaporates the organic material;
The evaporation source further includes an evaporator control housing supported by a support and configured to maintain an internal atmospheric pressure;
The method, wherein the evaporation source further comprises a controller housed in the evaporator control housing.   15. The method of claim 14, further comprising rotating the distribution pipe for lateral evaporation in idle mode.   Rotating the evaporation source distribution pipe around the axis during evaporation is performed in a first direction of rotation, and the method includes moving the evaporation source along the second substrate, 16. A method according to claim 14 or 15, further comprising further rotating the evaporation source distribution pipe around the axis in the first rotational direction during evaporation.

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