CN103983381B - System and method for testing single particle adhesive force and electric quantity under vacuum condition - Google Patents
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- 239000002245 particle Substances 0.000 title claims abstract description 131
- 238000012360 testing method Methods 0.000 title claims abstract description 34
- 238000000034 method Methods 0.000 title claims description 10
- 239000000853 adhesive Substances 0.000 title description 2
- 230000001070 adhesive effect Effects 0.000 title description 2
- 239000000463 material Substances 0.000 claims abstract description 41
- 230000005684 electric field Effects 0.000 claims abstract description 21
- 230000001133 acceleration Effects 0.000 claims description 14
- 230000005484 gravity Effects 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 6
- 238000010998 test method Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 239000012811 non-conductive material Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000010894 electron beam technology Methods 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- 239000000523 sample Substances 0.000 abstract description 6
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- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004630 atomic force microscopy Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005411 Van der Waals force Methods 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
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Abstract
本发明公开了一种真空条件下单颗粒与平板材料之间粘附力和颗粒带电量的测试系统，包括真空容器，真空容器内的一对平行电极板，两电极分别通过导线与真空容器外的直流电源电连接并通过该电源加载电压，使两电极之间产生均匀电场，真空容器内还设置有紫外光源或电子枪使单颗粒荷电，真空容器外还设置有颗粒运动摄录装置。本发明还公开了测试方法。与现有技术相比，本发明的测试系统的测试环境与真实环境较接近，测试结果符合度较好，且测试装置简单，在任何真空容器中均可实施，无需使用昂贵的原子力显微镜，也无需对探针区域做真空改造。
The invention discloses a test system for the adhesion force between a single particle and a flat material and the charged amount of the particle under vacuum conditions, which includes a vacuum container, a pair of parallel electrode plates in the vacuum container, and the two electrodes are respectively connected to the outside of the vacuum container through wires. The DC power supply is electrically connected and the voltage is applied through the power supply to generate a uniform electric field between the two electrodes. An ultraviolet light source or electron gun is also installed in the vacuum container to charge the single particle, and a particle motion recording device is also installed outside the vacuum container. The invention also discloses a testing method. Compared with the prior art, the test environment of the test system of the present invention is closer to the real environment, the test results have a better degree of agreement, and the test device is simple, and can be implemented in any vacuum container without using an expensive atomic force microscope. No vacuum modifications to the probe area are required.
Description
技术领域technical field
本发明属于物理参数测试技术领域，具体来说，本发明涉及真空条件下测试微小颗粒物与平板之间粘附力以及颗粒物带电量的系统，同时也给出了利用该系统进行单颗粒物与平板粘附力和颗粒带电量的测试方法。The invention belongs to the technical field of physical parameter testing. Specifically, the invention relates to a system for testing the adhesion between tiny particles and a flat plate and the charged amount of the particles under vacuum conditions. Test methods for adhesion and particle charge.
背景技术Background technique
通常，微小的颗粒物与平板材料进行接触，颗粒与平板之间会产生粘附效应，一般来说，颗粒粒径越小，粘附效应越明显，针对颗粒粒径小于1mm的情况，更是明显。在粘附力测量系统中，通常认为的粘附力是颗粒与平板之间的范德华力及静电力的合力，颗粒的重力则单独考虑。Usually, tiny particles come into contact with the plate material, and there will be an adhesion effect between the particles and the plate. Generally speaking, the smaller the particle size, the more obvious the adhesion effect, and it is even more obvious when the particle size is less than 1mm. . In the adhesion force measurement system, it is generally considered that the adhesion force is the resultant force of van der Waals force and electrostatic force between the particle and the flat plate, and the gravity of the particle is considered separately.
目前，通常采用原子力显微镜测试颗粒与平板材料之间粘附力的大小，其基本原理是将单个颗粒物固定在原子力显微镜的探针上，精确控制颗粒与平板材料之间的距离，受粘附力的作用，探针悬臂会发生形变，利用激光测试的方式可以测量探针悬臂的偏移量，根据形变量与受力的关系可计算得到单颗粒与平板间的粘附力，具体的一种测量方法可参见柳冠青等，微米颗粒与固体表面相互作用的AFM测量，工程热物理学报。第30卷，第5期，2009年5月，803-806页。但是，使用原子力显微镜测量单颗粒与平板材料之间的粘附力存在严重缺陷，主要表现在以下三个方面：At present, atomic force microscopy is usually used to test the size of the adhesion between particles and flat materials. The effect of the probe cantilever will be deformed. The offset of the probe cantilever can be measured by laser testing. According to the relationship between the deformation and the force, the adhesion force between the single particle and the flat plate can be calculated. A specific one The measurement method can be found in Liu Guanqing et al., AFM measurement of the interaction between microparticles and solid surfaces, Journal of Engineering Thermophysics. Volume 30, Issue 5, May 2009, Pages 803-806. However, the use of atomic force microscopy to measure the adhesion between single particles and flat materials has serious shortcomings, mainly in the following three aspects:
1、微小颗粒物必须牢固地固定在探针尖端，探针针尖半径一般为10到几十纳米，在如此微小的结构上牢固地固定颗粒难度很大。1. Tiny particles must be firmly fixed on the tip of the probe. The radius of the tip of the probe is generally 10 to tens of nanometers. It is very difficult to firmly fix the particles on such a tiny structure.
2、使用原子力显微镜测试单颗粒与平板间粘附力，二者之间的相对距离是测试人员人为设置和控制的，相对距离不能真实反映颗粒自然沉积条件下的实际间距，而颗粒与平板材料之间的距离是影响二者之间粘附力的最重要的因素之一，因此原子力显微镜测试方法不能反映真实情况。2. Use an atomic force microscope to test the adhesion between a single particle and a flat plate. The relative distance between the two is artificially set and controlled by the tester. The relative distance cannot truly reflect the actual distance between the particle and the flat plate material. The distance between them is one of the most important factors affecting the adhesion between the two, so the atomic force microscope test method cannot reflect the real situation.
3、在真空条件下，辐射光照等环境可能导致颗粒物带电，且带电电荷不易中和，颗粒带电量是影响颗粒粘附力的最重要的因素之一，原子力显微镜是成品测量仪器，其测试环境无法模拟颗粒荷电情况，测试得到的粘附力因此也不能反映真实情况。由此可见，现有的原子力显微镜测量单颗粒与平板的粘附力不能反映真实的情况，测量的误差很大，同时，也无法精确地获得单颗粒的带电量。基于此，提供能够真实反映单颗粒带电量以及单颗粒与平板材料之间的粘附力的测量系统和方法非常必要。3. Under vacuum conditions, environments such as radiation and light may cause particles to be charged, and the charged charges are not easy to neutralize. The amount of charged particles is one of the most important factors affecting the adhesion of particles. The atomic force microscope is a finished product measuring instrument, and its test environment Particle charging cannot be simulated, and the measured adhesion forces therefore do not reflect reality. It can be seen that the existing AFM measurement of the adhesion force between a single particle and a flat plate cannot reflect the real situation, the measurement error is large, and at the same time, the charge amount of a single particle cannot be accurately obtained. Based on this, it is necessary to provide a measurement system and method that can truly reflect the charge of a single particle and the adhesion between a single particle and a flat material.
发明内容Contents of the invention
本发明的目的在于提供一种能够真实反映单荷电颗粒与平板材料之间粘附力以及颗粒带电量的测试系统，该测试系统测试误差小，且能够模拟自然状态下颗粒与平板材料的粘附情况,且不需要对单颗粒进行微小尺度下的精确固定。The purpose of the present invention is to provide a test system that can truly reflect the adhesion between single-charged particles and flat materials and the amount of particle charge. The test system has a small test error and can simulate the adhesion between particles and flat materials in a natural state Attached to the situation, and does not require precise immobilization of single particles at the micro scale.
本发明的另一目的在于提供一种利用上述测量系统进行单颗粒与平板材料之间粘附力的测试方法。该测试方法采用非接触静电场法，联立电场参数和颗粒运动参数，在得到颗粒粘附力的同时也可得到颗粒带电电量，主要技术方案如下：Another object of the present invention is to provide a method for testing the adhesion between a single particle and a flat material using the above measuring system. The test method adopts the non-contact electrostatic field method, and combines the electric field parameters and particle motion parameters. While obtaining the particle adhesion force, the charge quantity of the particles can also be obtained. The main technical solutions are as follows:
真空条件下单颗粒与平板材料之间粘附力和颗粒带电量测试系统，包括真空容器，设置在真空容器内的一对平行设置的电极板，上部电极和下部电极分别通过导线与真空容器外的直流电源电连接并通过直流电源加载电压，使平行板之间产生均匀的电场，真空容器内还设置有紫外光源或电子枪对设置在下部电极上的单颗粒实施荷电操作，真空容器外还设置有颗粒运动摄录装置，以通过真空容器上对应摄录位置开设的观察窗对单颗粒的运动进行实时摄录，其中，上部电极与下部电极之间的间距为30mm-100mm，平板材料为导体材料，制成下部电极。The test system for the adhesion between single particles and flat materials and particle charge under vacuum conditions includes a vacuum container, a pair of electrode plates arranged in parallel in the vacuum container, and the upper electrode and the lower electrode are respectively connected to the outside of the vacuum container through wires. The DC power supply is electrically connected and the voltage is applied through the DC power supply, so that a uniform electric field is generated between the parallel plates. An ultraviolet light source or an electron gun is also installed in the vacuum container to charge the single particles on the lower electrode. A particle motion recording device is provided to record the movement of single particles in real time through the observation window set up at the corresponding recording position on the vacuum container, wherein the distance between the upper electrode and the lower electrode is 30mm-100mm, and the flat material is Conductive material to make the lower electrode.
其中，平板材料为非导体材料，并放置在下部电极的上表面。Wherein, the flat plate material is a non-conductive material, and is placed on the upper surface of the lower electrode.
其中，所述颗粒运动摄录装置为高速摄像机。Wherein, the particle motion recording device is a high-speed camera.
其中，平板材料为铜、银、铝、锌、铁或其合金。Wherein, the plate material is copper, silver, aluminum, zinc, iron or alloys thereof.
利用上述测试系统测量单颗粒与平板材料之间的粘附力和带电量的方法，包括如下步骤：Utilize above-mentioned test system to measure the method for the adhesion between single particle and plate material and charged quantity, comprise the steps:
将单颗粒放置在下部电极上，连接真空容器内外线缆之后关闭真空容器，打开真空获取装置直到指定真空度；Place the single particle on the lower electrode, close the vacuum container after connecting the inner and outer cables of the vacuum container, and open the vacuum acquisition device until the specified vacuum degree;
调节紫外光源或电子枪辐照单颗粒使其带电；Adjust the ultraviolet light source or electron gun to irradiate single particles to make them charged;
以不高于1V/s的速度升高直流电源的电压，同时开启颗粒运动摄录装置进行连续拍照或摄像。Increase the voltage of the DC power supply at a speed not higher than 1V/s, and at the same time turn on the particle motion video recording device for continuous photographing or video recording.
当颗粒发生运动时,停止升高电压,记录颗粒发生运动时刻的电压U，则颗粒运动的整个过程中,平板间电场E为恒定值,E＝U/d,d为上部电极和下部电极之间的距离，根据捕捉到的颗粒运动图像利用d＝at2/2计算颗粒运动加速度a，其中，t为颗粒从发生运动的时刻到到达上部电极的时刻所用的时间，再利用Fa＝m×a得到粘附力Fa，其中m为颗粒质量,再由FE＝Fa+G和FE＝Q×E得到颗粒的带电量Q,其中FE为电场力，G为颗粒的重力。When the particles move, stop increasing the voltage, and record the voltage U at the moment when the particles move. Then, during the whole process of particle movement, the electric field E between the plates is a constant value, E=U/d, and d is the difference between the upper electrode and the lower electrode. According to the captured particle motion image, use d=at 2 /2 to calculate the particle motion acceleration a, where t is the time taken by the particle from the moment when it moves to the moment when it reaches the upper electrode, and then use Fa=m× a Get the adhesion force Fa, where m is the mass of the particle, and then get the charged amount Q of the particle by FE=Fa+G and FE=Q×E, where FE is the electric field force, and G is the gravity of the particle.
其中，紫外光源辐射光波长在10nm-400nm,光强根据颗粒实际所受紫外辐射程度进行调节,辐照时间不少于10分钟。Among them, the ultraviolet light source radiates light with a wavelength of 10nm-400nm, the light intensity is adjusted according to the actual degree of ultraviolet radiation received by the particles, and the irradiation time is not less than 10 minutes.
其中，电子枪的电子束能量不高于20keV，辐照时间不少于10分钟。Among them, the electron beam energy of the electron gun is not higher than 20keV, and the irradiation time is not less than 10 minutes.
其中，当平板材料为非导电材料时，平板材料的厚度为d1,则根据捕捉到的颗粒运动图像利用2(d-d1)＝at2计算颗粒运动加速度a。Wherein, when the flat material is a non-conductive material, the thickness of the flat material is d1, and the particle motion acceleration a is calculated by using 2(d-d1)=at2 according to the captured particle motion image.
与现有技术相比，本发明的非接触测试方法的主要优点在于：Compared with the prior art, the main advantage of the non-contact testing method of the present invention is:
1、联立颗粒所受电场力和颗粒运动参数，用二元方程的方式同时获得颗粒粘附力和颗粒带电量，避免了单独求解粘附力带电电荷不确定无法获得粘附力的难题。1. Simultaneously combine the electric field force and particle motion parameters of the particles, and use the binary equation to obtain the particle adhesion force and particle charge at the same time, avoiding the problem that the adhesion force cannot be obtained without the uncertainty of the charged charge alone.
2、测试环境与真实环境较接近，测试结果符合度较高。2. The test environment is closer to the real environment, and the test results have a higher degree of conformity.
3、测试装置简单，在任何真空容器中均可实施，无需使用昂贵的原子力显微镜，也无需对探针区域做真空改造。3. The test device is simple, and can be implemented in any vacuum container, without using an expensive atomic force microscope, and without vacuum modification of the probe area.
附图说明Description of drawings
图1是本发明的真空条件下单颗粒与平板材料间粘附力和颗粒带电量测试系统示意图；Fig. 1 is a schematic diagram of the adhesion force and particle charge test system between a single particle and a flat material under vacuum conditions of the present invention;
其中，1为上部电极；2为下部电极；3为单颗粒；4为直流电源；5为真空容器；6为紫外光源；7为电子枪。Among them, 1 is an upper electrode; 2 is a lower electrode; 3 is a single particle; 4 is a DC power supply; 5 is a vacuum container; 6 is an ultraviolet light source; 7 is an electron gun.
图2是单颗粒在t＝t0时刻的受力状态示意图，其中；t＝t0时刻，FE＝Fa+G；Fig. 2 is a schematic diagram of the stressed state of a single particle at t=t 0 , wherein; at t=t 0 , F E =F a +G;
图3是单颗粒在t＝t0+Δt时刻的受力状态示意图，其中FE>G,加速度a＝(FE-G)/m，m为颗粒质量。Figure 3 is a schematic diagram of the force state of a single particle at the time t=t 0 +Δt, where F E >G, acceleration a=(F E -G)/m, and m is the mass of the particle.
图4是单颗粒在t＝t0+t1时刻的受力状态示意图，此时，颗粒与上部电极接触。Fig. 4 is a schematic diagram of the force state of a single particle at the moment t=t 0 +t 1 , at this time, the particle is in contact with the upper electrode.
具体实施方式detailed description
以下参照附图对本发明的真空条件下单颗粒与平板材料之间粘附力和颗粒带电量测试系统进行详细说明，但该描述仅仅示例性的，并不旨在对本发明的保护范围进行任何限制。The following is a detailed description of the adhesion force and particle charge test system between a single particle and a flat material under vacuum conditions of the present invention with reference to the accompanying drawings, but this description is only exemplary and is not intended to limit the protection scope of the present invention. .
参照图1，本发明的真空条件下单颗粒与平板材料之间粘附力和颗粒带电量测试系统，包括上部电极(1)、下部电极(2)、单颗粒(3)、直流电源(4)、真空容器(5)、紫外光源(6)或电子枪(7)以及颗粒运动摄录装置。上部电极(1)和下部电极(2)是一对平行的电极，设置在真空容器(5)内，上部电极(1)和下部电极(2)分别通过导线与真空容器外的直流电源(4)电连接并通过直流电源(4)加载电压，使平行板之间产生均匀的电场E，真空容器(5)内还设置有紫外光源(6)或电子枪(7)对设置在下部电极(2)上的单颗粒实施荷电操作，真空容器(5)外还设置有高速摄像机，以通过真空容器(5)上对应高速摄像机的位置开设的观察窗(未示出)对单颗粒的运动进行实时摄录，高速摄像机应能够捕捉微小颗粒运动的全过程，因此拍摄速度必须在清晰程度和拍摄速度之间进行平衡。其中，上部电极(1)与下部电极(2)之间的间距为30mm-100mm，平板材料为导体材料铜，制成下部电极。With reference to Fig. 1, under the vacuum condition of the present invention, adhesion between single particle and plate material and particle charge test system comprise upper electrode (1), lower electrode (2), single particle (3), DC power supply (4 ), a vacuum container (5), an ultraviolet light source (6) or an electron gun (7) and a particle motion video recording device. The upper electrode (1) and the lower electrode (2) are a pair of parallel electrodes, which are arranged in the vacuum container (5). The upper electrode (1) and the lower electrode (2) are respectively connected to the DC power supply (4 ) is electrically connected and loaded with a voltage through a DC power supply (4), so that a uniform electric field E is generated between the parallel plates, and an ultraviolet light source (6) or an electron gun (7) is also arranged on the lower electrode (2) in the vacuum container (5). ), the single particle on the vacuum container (5) is also provided with a high-speed camera to monitor the movement of the single particle through the observation window (not shown) provided at the position corresponding to the high-speed camera on the vacuum container (5). For real-time recording, the high-speed camera should be able to capture the whole process of the movement of tiny particles, so the shooting speed must be balanced between the clarity and the shooting speed. Wherein, the distance between the upper electrode (1) and the lower electrode (2) is 30mm-100mm, and the plate material is copper, which is a conductive material, and the lower electrode is made of it.
在另一实施方式中，平板材料为银、铝、锌、铁或其合金。In another embodiment, the plate material is silver, aluminum, zinc, iron or alloys thereof.
在另一实施方式中，下部电极为铜，而平板材料为非导体的电介质,非导体的平板厚度为1mm-3mm。In another embodiment, the lower electrode is copper, and the plate material is a non-conductor dielectric, and the thickness of the non-conductor plate is 1mm-3mm.
实施方式1 平板材料为导体，测试得到的粘附力是下部电极与单颗粒之间的粘附 力和颗粒带电量 Embodiment 1 The flat plate material is a conductor, and the adhesion force obtained from the test is the adhesion force between the lower electrode and a single particle and the charged amount of the particle
当平板材料为导体时，则下部电极直接使用平板材料所用的导体材料且采用相同的工艺制成。将单颗粒放置在下部电极(2)上，连接真空容器(5)内外线缆之后关闭真空容器(5)，打开真空获取装置直到真空容器内部达到预定的真空度。调节紫外光源(6)使单颗粒荷电，紫外光源的辐照强度根据颗粒可能受到的实际辐射情况确定、辐照时间不少于10分钟；以不快于1V/s的速度逐渐提升加载电压，则必然存在某个时刻t0，此时电场力FE等于粘附力Fa与颗粒重力G之和(如附图2所示)；t0时刻之后，由于电场力大于粘附力，颗粒向上运动，随着颗粒与平板材料的脱离，粘附力急剧减小，此时颗粒仅受重力G和电场力FE的作用，做恒定加速为a的运动(如图3所示)；假设在t0+t1时刻，颗粒运动至上极板位置，由于两个极板之间的距离d衡定(例如5cm)，根据恒定加速度运动学定律可计算得到颗粒的加速度a，根据加速度值可计算得到颗粒所受粘附力Fa，加上颗粒重力G即可得到颗粒电场力数值FE，同时FE除以电场E即可得到颗粒所带电荷量Q。When the plate material is a conductor, the lower electrode is directly made of the conductor material used for the plate material and is made by the same process. Place the single particle on the lower electrode (2), close the vacuum container (5) after connecting the inner and outer cables of the vacuum container (5), and open the vacuum acquisition device until the inside of the vacuum container reaches a predetermined vacuum degree. Adjust the ultraviolet light source (6) to charge the single particle. The irradiation intensity of the ultraviolet light source is determined according to the actual radiation situation that the particle may receive, and the irradiation time is not less than 10 minutes; gradually increase the loading voltage at a speed of no faster than 1V/s, Then there must be a certain moment t 0 , at this time, the electric field force F E is equal to the sum of the adhesion force F a and the particle gravity G (as shown in Figure 2); after time t0, because the electric field force is greater than the adhesion force, the Movement, with the separation of the particles from the flat material, the adhesion force decreases sharply. At this time, the particles are only affected by the gravity G and the electric field force FE, and move with a constant acceleration of a (as shown in Figure 3); assuming that at t0 At time +t1, the particle moves to the position of the upper plate. Since the distance d between the two plates is constant (for example, 5cm), the acceleration a of the particle can be calculated according to the law of constant acceleration kinematics, and the acceleration of the particle can be calculated according to the acceleration value. Adhesive force Fa and particle gravity G can be added to obtain particle electric field value FE, and FE can be divided by electric field E to obtain particle charge Q.
实施方式1 平板材料为非导体，非导体设置在下部电极上，测试得到的粘附力是 非导体平板材料与单颗粒之间的粘附力和颗粒带电量 Embodiment 1 The flat material is a non-conductor, and the non-conductor is placed on the lower electrode. The adhesion force obtained from the test is the adhesion force between the non- conductive flat material and a single particle and the charge amount of the particle
当平板材料为非导体如聚四氟乙烯时，在下部电极上放置厚度为d1的平板材料。将单颗粒放置在非导体的平板材料上，连接真空容器(5)内外线缆之后关闭真空容器(5)，打开真空获取装置直到真空容器内部达到预定的真空度。调节电子枪(7)使单颗粒荷电，电子枪的电子束能量低于30keV、辐照时间为不少于10分钟；以不快于1V/s的速度逐渐提升加载电压，则必然存在某个时刻t0，此时电场力FE等于粘附力Fa与颗粒重力G之和(如附图2所示)；t0时刻之后，由于电场力大于粘附力，颗粒向上运动，随着颗粒与平板材料的脱离，粘附力急剧减小，此时颗粒仅受重力G和电场力FE的作用，做恒定加速为a的运动(如图3所示)；假设在t0+t1时刻，颗粒运动至上极板位置，由于两个极板之间的距离d衡定，平板材料的厚度d1恒定，则颗粒的运动距离为d-d1(例如5cm)，根据恒定加速度运动学定律可计算得到颗粒的加速度a，根据加速度值可计算得到颗粒所受粘附力Fa，加上颗粒重力G即可得到颗粒电场力数值FE，同时FE除以电场E即可得到颗粒所带电荷量Q。When the plate material is a non-conductor such as polytetrafluoroethylene, place a plate material with a thickness of d1 on the lower electrode. Place the single particle on a non-conductive flat material, close the vacuum container (5) after connecting the inner and outer cables of the vacuum container (5), and open the vacuum acquisition device until the inside of the vacuum container reaches a predetermined vacuum degree. Adjust the electron gun (7) to charge the single particle, the electron beam energy of the electron gun is lower than 30keV, and the irradiation time is not less than 10 minutes; gradually increase the loading voltage at a speed not faster than 1V/s, then there must be a certain moment t 0 , at this time the electric field force FE is equal to the sum of the adhesion force F a and the gravity G of the particle (as shown in Figure 2); after t 0 , because the electric field force is greater than the adhesion force, the particle moves upwards. When the plate material is detached, the adhesion force decreases sharply. At this time, the particles are only affected by the gravity G and the electric field force FE, and move with a constant acceleration of a (as shown in Figure 3); assuming that at the time t0+t1, the particles move At the position of the upper pole plate, since the distance d between the two pole plates is constant, and the thickness d1 of the flat plate material is constant, the moving distance of the particles is d-d1 (for example, 5cm). According to the law of constant acceleration kinematics, the particle’s Acceleration a, according to the acceleration value, the adhesion force Fa on the particle can be calculated, and the particle electric field force value FE can be obtained by adding the particle gravity G, and the electric field force value Q of the particle can be obtained by dividing FE by the electric field E.
尽管上文对本发明的具体实施方式给予了详细描述和说明，但是应该指明的是，我们可以依据本发明的构想对上述实施方式进行各种等效改变和修改，其所产生的功能作用仍未超出说明书及附图所涵盖的精神时，均应在本发明的保护范围之内。Although the specific embodiments of the present invention have been described and illustrated in detail above, it should be pointed out that we can make various equivalent changes and modifications to the above-mentioned embodiments according to the concept of the present invention, and the functional effects produced by it are still the same. Anything beyond the spirit covered by the specification and drawings shall be within the protection scope of the present invention.
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