CN103969200B - For the method measuring gas composition concentration in measuring gas - Google Patents

For the method measuring gas composition concentration in measuring gas Download PDF

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Publication number
CN103969200B
CN103969200B CN201410040372.7A CN201410040372A CN103969200B CN 103969200 B CN103969200 B CN 103969200B CN 201410040372 A CN201410040372 A CN 201410040372A CN 103969200 B CN103969200 B CN 103969200B
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China
Prior art keywords
burst pulse
intensity
current
pulse signal
absorption curve
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Expired - Fee Related
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CN201410040372.7A
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CN103969200A (en
Inventor
托马斯·汉凯维奇
克里斯托弗·沃尔夫冈·马夸特
弗朗茨·施泰因巴赫尔
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Siemens AG
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Siemens AG
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/396Type of laser source
    • G01N2021/399Diode laser
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/069Supply of sources
    • G01N2201/0694Microprocessor controlled supply

Abstract

In order to measure gas composition concentration, after transmission measurement gas, detect the light intensity of the laser diode of energy adjusting wavelength and determine the concentration of gas componant according to the reduction of light intensity, owing to absorbing light in the position of the absorption curve of the selection of gas componant, light intensity being reduced.In order to according to wavelength detection absorption curve, control laser diode periodically corresponding to predetermined current time function.It utilizes burst pulse signal to control, and utilizes the intensity in the detection of the position of burst pulse signal to make the standard of luminous intensity in the detection of the position of absorption curve.In order to direct compensation light intensity in the measurements this is by timeliness or the impact of the change of other conditional decisions, set the current intensity of burst pulse signal, in order to it is corresponding to the current value of the current time function of the position at the absorption curve selected.Wavelength passes through laser diode specific strength more slowly to current response, in order to the wavelength of the light beam of generation based on burst pulse signal is not in the wavelength region of absorption curve.

Description

For the method measuring gas composition concentration in measuring gas
Technical field
The present invention relates to a kind of method for measuring gas composition concentration in measuring gas, Qi Zhongneng The light intensity of the light beam of the laser diode of adjusting wavelength after transmission measurement gas detected and Reduction according to light intensity determines the concentration of gas componant, due to the absorption of the selection in gas componant The position of curve absorbs light beam and light intensity is reduced, wherein corresponding to predetermined current time function Control laser diode periodically, in order to depend on the absorption curve of wavelength ground the detection of gas compositions, profit Control laser diode regularly with burst pulse signal, and utilize in the position of burst pulse signal The light intensity of place's detection makes the light intensity standard of the light beam in the detection of the position of absorption curve.
Background technology
A kind of such method is there is known by EP 2 072 979 A1.
The infrared active gas componant compared with the measured gas of small part of light beam when transmission measurement gas Absorb with depending on wavelength.Additionally by the optical element in light path, such as optical window and Carry out being not dependent on the absorption of wavelength by particulate, such as cigarette microgranule.Need for this to make measurement Standardization, in order to eliminate owing to being not dependent on the absorption of wavelength and the measurement of disturbed some effects.Right This such as produces burst pulse signal regularly according to each current time function, believes at this burst pulse In number, electric current is repeatedly changed between zero and maximum.The current intensity of burst pulse signal, i.e. it is Big value is chosen, thus in the position of burst pulse signal with being different from the current value of current time function The wavelength of the light beam that place produces is in the infrared active gas with other to be measured of measurement gas and becomes Outside the wave-length coverage of the absorption curve divided.Utilized by division and examine in the position of burst pulse signal The light intensity surveyed makes the light intensity standard in the detection of the position of absorption curve.
Another burst pulse signal can be additionally utilized to control laser two pole in the known process Pipe, the current intensity of this another burst pulse signal is different from the electric current of aforesaid burst pulse signal Intensity.It is achieved in that about the electric current for controlling laser diode to measure the light of the light beam of generation The change being determined (alterungsbedingte) by aging condition of intensity.
In order to enable directly to offset the light intensity of the light beam of generation this by timeliness or other conditional decisions Change on measure impact, there is the previous German patent application of document number 102011080086.7 Content be a kind of method, laser diode utilizes different sudden of at least two regularly in the method Send out pulse signal to control.Current intensity according to burst pulse signal and at this burst pulse signal The light intensity of position detection, is calculated for current value in the position of absorption curve by interpolation method Light intensity value and utilize this intensity level calculated to make the light intensity standard detected in this place.
Summary of the invention
It is different from the prior art of publicity, selects in this method starting described mode according to the present invention Select the current intensity of burst pulse signal, so that this current intensity is in the position of selected absorption curve Put place's current value corresponding to current time function.
The very rapidly control to laser diode of the light intensity of the light beam produced is reacted, so that Obtaining this light intensity actually can be follow directly from the change curve of current time function and burst pulse signal Change curve.So far it is also used for wavelength.But want it is considered that, wavelength is to through too drastic The reaction of the light intensity of the light beam that the significant reaction comparison of the electric current of optical diode produces is wanted slowly.Work as ripple Long also continuing to can be follow directly from typical slope shape or the change curve of delta current time function Time, set another wavelength in the position of more dynamic burst pulse signal, such as, utilize phase Same current intensity controls to draw this another wavelength during laser diode statically.The most possible Be, the position of absorption curve to be detected arrange with for current time function identical for sudden Send out the current value of pulse signal rather than make the ripple of the light beam produced in the position of burst pulse signal In the long wave-length coverage being in absorption curve.Thus utilize the light intensity of the light beam produced by laser diode Degree achieves standardization exactly in the position of absorption curve, so that the light intensity of the light beam produced The change determined by aging condition no longer have to measure interference effect.
In order to can monitor intensity variation that the light beam of generation occurs according to curent change and by The control susceptiveness of this laser diode, it is possible to selectively utilize another burst pulse signal rule Ground controls laser diode, and the current intensity of this another burst pulse signal is different from aforementioned arteries and veins of bursting Rush the current intensity of signal.This other burst pulse signal can be used for separately in an advantageous manner A kind of measurement standard of another absorption curve of gas componant.For this corresponding to predetermined another Current time function controls laser diode periodically, in order to detect with depending on wavelength this another inhale Receive curve.So selecting the current intensity of this another burst pulse signal, i.e. this current intensity is at this The position of another absorption curve is corresponding to the current value of this another current time function.Thus accurate Really utilize the light intensity position at another absorption curve of the light beam produced by laser diode Realize standardization, in order to it is right that the change determined by aging condition of the light intensity of the light beam of generation does not have The interference effect measured.
Such as by DE 102011079342 B3 it is known that utilize two in each control cycle Different continuous print current time function controls laser diode, in order to detect gas componant to be measured Absorption curve and detect the absorption curve of reference gas simultaneously.Then can be by reference gas The position of absorption curve so regulates the temperature of laser diode, i.e. absorption curve and has been at identical Position, is preferably at the middle of relevant current time function.Can root corresponding to the present invention According to kind, such as oxygen or the carbon monoxide of gas componant to be measured or when utilizing this electric current Between function or utilize another current time function to detect its absorption curve;Also with the most additionally The absorption curve of reference gas that uses respectively of current time function detection.Followed by burst pulse Signal makes the measurement standard with the gas componant of current time function and utilizes another to cross to burst Pulse signal makes the measurement standard with another current time function.
By aforesaid DE 102011079342 B3 it is known that by a cycle to next week Change that phase is carried out, current time function improves the wavelength stability of laser diode, such root The time period can be inserted directly into according to the current time function changed, compensate with current time within this time period Function changes the change of the magnitude of current being transferred to laser diode occurred.Same within the scope of the invention Sample can insert the time period before or after current time function and/or burst pulse signal, but This this time period has other purpose.The wavelength of the light beam produced as already mentioned is the most slow Slowly the dynamically control to laser diode is reacted.When utilizing constant electric current control within the time period During laser diode processed, this current value corresponding to corresponding back to back current time function or and then The initial value of burst pulse signal, which prevent and dynamically control (example to realize before the time period Such as burst pulse signal) the delayed response of wavelength can directly affect back to back dynamic control (such as Current time function) and this back to back dynamic control can be disturbed.Dynamically controlling and static control Wavelength offset between system depends on type (the such as distributed feedback laser of laser diode (DFB), vertical cavity surface emitting laser (VCSEL)) and operational factor (such as electric current, Temperature, regularly);Between each example of this laser diode that can also be expected to same configuration Difference.Suitable by the time period between each burst pulse signal and current time function Parametrization can set suitable operating point for each laser diode.
Accompanying drawing explanation
Further according to example, present invention will be described in detail with reference to the accompanying;Accompanying drawing is shown specifically
Fig. 1 is the schematic diagram of the laser spectrum analyser for carrying out the method according to the invention,
Fig. 2 is the example for detecting absorption curve with depending on wavelength,
Fig. 3 be corresponding to the light beam that the method according to the invention produced within the control cycle wavelength and The change curve of light intensity.
Fig. 4 be corresponding to the method according to the invention make measurement standard example and
Fig. 5 is the common example making measurement standard.
Detailed description of the invention
Fig. 1 illustrates for carrying out the concentration of at least one gas componant paid close attention to measuring gas 1 The laser spectrum analyser measured, this measurement gas is included in measurement volume 2, such as flows through process at this Gas pipeline.Laser spectrum analyser includes laser diode 3, and the light beam of this laser diode is by measuring Gas 1 and as necessary by be arranged in below, with reference gas fill reference gas vessel penetrate On detector 6.Laser diode 3 is controlled with injection current i by controlled current source 7, its Middle light intensity ILaserDepend on that electric current i and laser diode 3 run with the wavelength X of the light beam 4 produced Temperature.Current source 7 by the first signal generator 8 periodically with electricity predetermined, preferably slope shape Stream time function 9 controls, thus utilizes the light beam 4 of corresponding modulation to detect measurement with depending on wavelength The absorption curve of the selection of the gas componant paid close attention to of gas 1.Secondary signal generator 10 produces The sinusoidal signal 11 of frequency f, utilizes this signal to modulate slope shape in summation link 12 Current time function 9.In addition the first signal generator 8 produces regularly, such as with each periodically Burst pulse signal 13.The light beam produced by laser diode 3 when transmission measurement gas 1 less Absorbing with depending on wavelength of the infrared active gas componant of the measured gas of part 1.Additionally by Optical element, such as optical window in the optical path and entered by particulate, such as cigarette microgranule Row is not dependent on the absorption of wavelength.
Fig. 2 is exemplarily illustrated the absorption curve 14 of the selection in the gas componant measuring gas 1 The absorption (reduction of light intensity I) of wavelength is depended in region.Non-thread based on absorption curve 14 The electric current i of laser diode 3 is modulated creating by property by the signal 11 utilizing frequency to be f to be had The more or less respective change of light intensity I of the harmonic distortion of intensity.Centre at absorption curve 14 Extreme position (absorption maximum) place at place has the first harmonic of frequency 2f and occupies an leading position.? In wavelength region contrary beyond the middle of absorption curve 14 part of first harmonic at light beam 4 Strongly decline in light intensity.For this by the inspection produced according to light intensity I of detection by detector 6 Survey analysis 2f signal section in signal 15 and measure middle (the middle wavelength X at absorption curve 140) The absorption carried out.
As it is shown in figure 1, signal processing apparatus 16 is arranged in the downstream of detector 6, first at this letter The 2f signal section of number processing means medium frequency selectively amplification detection signal 15 and further Phase sensitive ground (lock-in amplifier (lock-in)) is processed into output signal I2f, this output signal phase The light intensity that Ying Yu detects in the position of absorption curve 14.In another signal processing apparatus 17 Directly amplify the signal section produced by burst pulse signal 13 of detection signal 15, thus obtain phase Output signal I of the light intensity that Ying Yu detects in the position of burst pulse signal 13Burst pulse.As follows It also illustrate, i.e. the current intensity of setting pulse signal 13, so that this current intensity is in selection The position of absorption curve 14 is corresponding to the current value i of current time function 9Absorb.For this at arteries and veins of bursting Rush the intensity I that the position of signal 13 is measuredBurst pulseCorresponding to light intensity, there is not absorption curve Time measure this light intensity in the position of absorption curve 14.Utilize this intensity level IBurst pulseIn standard The change stage 18 makes the light intensity in the detection of the position of absorption curve 14 when there is absorption curve 14 Degree I2fStandardization.For measure measure gas 1 the gas componant paid close attention to concentration, immediately The analytical equipment 19 is analyzed this most standardized light intensity I2f_ standard
Fig. 3 illustrates one for utilizing electric current i to produce when controlling laser diode 3 according to the present invention Light intensity ILaser, detection light intensity I and the example of wavelength X.Realize this control periodically, The most each control cycle includes the electric current of the slope shape having been described above for detecting absorption curve 14 Time function 9 and the burst pulse signal 13 being made up of rectangular current pulses and for detection in ginseng Examine another current time function 20 of the absorption curve 21 of reference gas in gas vessel 5 and another One burst pulse signal 22.Light intensity I of the light beam 4 producedLaserLaser two is depended on wavelength X The electric current i of pole pipe 3 and running temperature.In this light intensity ILaserUnceasingly can be follow directly from current time Function 9, the change curve with the change curve of burst pulse signal 13,22, i.e. electric current of 20. In the change curve of light intensity I of detection, additionally find out that the absorption measuring gas and reference gas is bent Line 14,21.The running temperature of laser diode 3 can be by the absorption curve 21 of reference gas Position so regulates, and i.e. the absorption curve 21 of reference gas is always situated in current time function 20 The position of the absorption curve 14 of middle and gas componant the most to be measured also is located at current time The middle of function 9.
It is different from light intensity I wavelength X very slowly electric current i to be reacted.When wavelength X also continues Continuous ground can follow directly from current time function 9,20 time, at more dynamic burst pulse signal 13, The position of 22 sets another wavelength, such as, utilizing equally valid current intensity to control statically This another wavelength is drawn during laser diode.Although burst pulse signal 13 is at absorption curve 14 Position has the current value (maximum) as current time function 9, at burst pulse signal The position of 13 sets the numerical value of wavelength X, and this numerical value is in investigative range or the wavelength model of absorption curve Beyond enclosing.Light intensity I measured in the position of burst pulse signal 13 for thisBurst pulseCorresponding to this Individual intensity, when there is not absorption curve, this intensity is measured in the position at absorption curve 14.
Fig. 4 is shown in the control cycle the standardized light of the light beam 4 produced respectively with dotted line and solid line Intensity ILaserTwo different change curves.Different change curves based on this, identical Electric current i, i.e. light efficiency decline low light intensities ILaser.The most as shown in Figure 4, believe by burst pulse Numbers 13 light utilizing the light beam produced in the position of absorption curve 14 by laser diode 3 exactly Intensity realizes making measurement standard.For this by timeliness or other conditional decisions, light beam light intensity Change the interference effect not having measuring.
Fig. 5 illustrates, in order to compare, the example generally utilizing burst pulse signal 13' to make measurement standard, It is different from the current value of current time function 9 to select the current intensity of this burst pulse signal, thus The wavelength of the light beam produced in the position of burst pulse signal 13' is in gas componant to be measured Beyond the wave-length coverage of absorption curve 14.This common standardization is insufficient, because inhaling Receive the intensity level of the position of curve 14, i.e. light intensity when there is not absorption curve 14 for Two being different for the intensity variation curve shown in dotted line and solid line.
Because produce light beam 4 wavelength X will be relatively slowly to laser diode 3 dynamically control make Go out reaction, the delay action of wavelength X can at least start time such as at other burst pulse signal Make on 22 to be subject to passive shadow by the wavelength change curve that back to back current time function 20 is to be produced Ring.For this reason, as it is shown on figure 3, control in the time period 23,24 with constant electric current respectively, Laser diode 3 in 25, at dynamically control (current time function, the arteries and veins of bursting that continuous print is different Rush signal) between insert this time period, the numerical value of this electric current is corresponding to each dynamically controlling then Initial value.In addition it can be beneficial that when wavelength X is similar to stable numerical value, ability is for accordingly Endpoint determination light intensity I of burst pulse signal 13,22Burst pulse
When drawing the wavelength at the burst pulse signal produced according to invention based on the composition measuring gas In the range of absorption curve, alternatively can produce two different burst pulses letter in known manner Number, the current intensity of this burst pulse signal is in one case more than the current value of current time function And in another case less than the current value of current time function.A kind of method is described in beginning The content of the previous German patent application with document number 102011080086.7, according to this side Method, according to the current intensity of burst pulse signal and the light intensity that detects in its position, passes through interpolation method Calculate the light intensity for current value in the position of absorption curve to be measured, and utilize this to count The intensity level calculated makes the light intensity standard detected in this place.

Claims (5)

1., for the method measuring gas composition concentration in measuring gas (1), wherein can regulate The light intensity (I) of the light beam (4) of the laser diode (3) of wavelength is being measured described in transmission It is detected after gas (1) and determines according to the reduction of described light intensity (I) described The concentration of gas componant, due to the absorption curve (14) of the selection in described gas componant Position absorbs described light beam (4) and described light intensity is reduced, wherein corresponding to predetermined Current time function (9) controls described laser diode (3) periodically, in order to depend on Wavelength ground detects the described absorption curve (14) of described gas componant, utilizes burst pulse to believe Number (13) control described laser diode (3) regularly, and utilize at described arteries and veins of bursting The intensity of the position detection rushing signal (13) makes the position in described absorption curve (14) Described light intensity (I) standardization of place's detection, it is characterised in that described burst pulse signal (13) current intensity is equivalent in the position of the described absorption curve (14) selected The current value of described current time function (9).
Method the most according to claim 1, it is characterised in that utilize another burst pulse to believe Number (22) control described laser diode (3) regularly, and another burst pulse described is believed Number current intensity be different from the current intensity of described burst pulse signal (13).
Method the most according to claim 2, it is characterised in that corresponding to another predetermined electricity Stream time function (20) controls described laser diode (3) periodically, in order to depend on ripple Detecting another absorption curve (21) of another kind of gas componant, described another is sudden longly The described current intensity sending out pulse signal (22) is equivalent to described another absorption curve (21) The described current value of described another current time function (20) of position, Yi Jili The intensity of the described position detection being used in another burst pulse signal (22) described makes Described light intensity (I) mark of the described position detection of described another absorption curve (21) Standardization.
4. according to method in any one of the preceding claims wherein, it is characterised in that when predetermined Between the inherent described current time function of section (24) (9) and/or described burst pulse signal (13) Utilize constant electric current to control described laser diode (3), the numerical value phase of described electric current before When in the initial value of described current time function (9) or described burst pulse signal (13).
Method the most according to claim 3, it is characterised in that in predetermined time period (23) Inherent described another current time function (20) and/or another burst pulse signal described (22) constant electric current is utilized to control described laser diode (3) before, described electric current Numerical value is equivalent to described another current time function (20) or another burst pulse described The initial value of signal (22).
CN201410040372.7A 2013-01-30 2014-01-27 For the method measuring gas composition concentration in measuring gas Expired - Fee Related CN103969200B (en)

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CN113439202A (en) * 2019-02-22 2021-09-24 普林斯顿大学董事会 Spectroscopic apparatus, system and method for optical sensing of molecular species
CN110806395A (en) * 2019-11-19 2020-02-18 国网重庆市电力公司电力科学研究院 Gas concentration measuring method, device, equipment and system
CN115684081B (en) * 2023-01-04 2023-05-05 杭州泽天春来科技有限公司 Laser gas analysis system

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