CN105136740A - Temperature and humidify monitoring system based on TDLAS - Google Patents
Temperature and humidify monitoring system based on TDLAS Download PDFInfo
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Abstract
The invention relates to a temperature and humidify monitoring system based on TDLAS. The system comprises a light source system, an online monitoring type air chamber and a receiving and processing system. The light source system comprises a laser device, a laser aligner and a laser device driving unit and is used for providing near infrared ray beams within an ideal wavelength range for the online monitoring type air chamber. The online monitoring type air chamber is divided into a signal connecting area and an exposure area and is used for exposing near infrared ray beams for monitoring in an environment to be tested, monitoring the temperature of the environment to be tested, and converting light signals into electric signals and the like. The receiving and processing system comprises a front amplifier, a lock phase amplifier and a data collecting and processing unit and is used for receiving temperature and humidity monitoring signals, extracting and analyzing harmonic signals, calculating and displaying relative humidity and temperature and the like. By means of the photoelectric type non-contact measuring method, the temperature and humidity of a corrosive environment can be monitored, and the method has the advantages of being high in accuracy and stability, wide in application range and the like.
Description
Technical field
The invention belongs to Near Infrared Spectroscopy Detection Technology field, be specifically related to a kind of humiture observation system based on tunable diode laser absorption spectroscopy (TDLAS).
Background technology
Temperature and humidity is the important parameter of describe environment condition, the industries such as Aero-Space, weaving, food, medicine, biotechnology, agricultural are all very strict to the requirement of humiture, carry out in real time, monitoring accurately has great importance to the relative humidity of environment.
For the monitoring of ambient humidity, commonly contact humidity sensor at present, this kind of sensor is directly exposed in environment to be measured, utilizes the potential change of humidity-sensitive element to carry out moisture measurement, can realize relative humidity and accurately, reliably monitor under conventional environment.But when environment to be measured contains Korrosionsmedium, humidity-sensitive element is easily corroded and causes that potential change is insensitive even to lose efficacy, there is the shortcomings such as life-span short, poor stability.
In recent years, photo-electric humidity sensor receives very big concern, and the application of photoelectric technology solves the problem that humidity-sensitive element is easily corroded and pollutes, and the non-contact detecting and the etching condition that achieve humidity sensor detect.Tunable diode laser absorption spectroscopy (TunableDiodeLaserAbsorptionSpectroscopy, TDLAS) technology is the one of spectrum detection technique, this technology utilizes specific gas molecule to produce this feature of absorption to specific infrared spectrum, the absorption line of light and gas concentration are connected, correlativity according to harmonic signal and gas concentration detects, and has that measuring accuracy is high, good stability, a feature such as applied widely.
Summary of the invention
The object of the invention is to the weak point overcoming contact humidity sensor, a kind of humiture observation system based on TDLAS technology is provided, this system adopts non-contacting detection mode, can realize corrosive atmosphere temperature and relative humidity online, accurate, reliably monitor.
For achieving the above object, technical scheme of the present invention is: a kind of humiture observation system based on TDLAS, by light-source system, on-line monitoring formula air chamber and reception form with disposal system, light-source system comprises laser instrument, laser aligner and laser drive unit, laser drive unit produces wavelength drive singal and sends into connected laser instrument, the absorption peak of near-infrared wavelength complete scan water vapor near selected wavelength that laser instrument is exported, the near infrared light that laser instrument exports is sent into after laser aligner carries out collimation process by optical fiber and is entered on-line monitoring formula air chamber, on-line monitoring formula air chamber comprises signal bonding pad and exposed region, signal bonding pad is positioned over outside environment to be measured, laser aligner and air plug is provided with in district, be respectively used to light signal and import exposed region into and monitor signal spreads out of from exposed region, exposed region is positioned in environment to be measured, photodetector and temperature sensor is provided with in district, near infrared light after collimation is absorbed by environment to be measured in exposed region, then the electric signal containing humidity information is changed into by photodetector, temperature sensor is arranged on the outer wall of exposed region, for monitoring environment temperature to be measured, the electric signal of moisture content information and temperature monitoring signal import reception and disposal system by electric wire into by air plug, receive and comprise prime amplifier, lock-in amplifier and data acquisition and procession unit with disposal system, humidity detection signal is amplified into lock-in amplifier through prime amplifier and carries out signal receiving, data acquisition and procession unit is sent into after obtaining first harmonic signal, according to the peak value of harmonic signal and the linear corresponding relation of vapor content, calculate the relative humidity of environment to be measured, and rh value and temperature value are passed back host computer and carry out showing and preserving.
Further, described laser instrument is tunable distributed feedback type semiconductor long wavelength laser, centre wavelength is 1370mm, laser instrument be arranged on there is temperature sensor and semiconductor thermoelectric refrigeration device TEC butterfly encapsulation base plate on, by controlling the drive current of TEC, realize the thermostatic control to laser instrument.
Further, described laser drive unit comprises temperature controller and current controller, temperature controller provides drive current to control with the temperature realizing laser instrument to TEC, current controller provides wavelength drive singal to laser instrument, wavelength drive singal comprises low frequency triangular signal and high_frequency sine wave signal, is respectively used to scanning and the modulation of wavelength; Meanwhile, laser drive unit produce and high_frequency sine wave with the sine wave of frequency or square wave as the reference signal of lock-in amplifier.
Further, described on-line monitoring formula air chamber adopts the structure of ready-package, and signal bonding pad is provided with fast-assembling chuck, carries out Fast Installation and dismounting by clip and the fast-assembling chuck being arranged on environment outer wall to be measured; Be provided with pad between chuck, ensure the leakproofness that chuck connects; Exposed region adopts hollow cylindrical design, outer wall perforate, ensures that near infrared light is fully exposed in environment to be measured; Air chamber adopts stainless steel to make.
Further, described lock-in amplifier is made up of signalling channel, reference channel, phase-sensitive detector (PSD) and low-pass filter, and the measuring-signal through prime amplifier is carried out filtering process by signalling channel, expands Dynamic Range, then sends into phase-sensitive detector (PSD); The same frequency reference signal that laser drive unit produces by reference channel is adjusted to suitable phase place, then sends into phase-sensitive detector (PSD); Measuring-signal and reference signal are carried out multiplying by phase-sensitive detector (PSD); Low-pass filter, by the AC portion filtering of signal, retains direct current component, thus completes the extraction of first harmonic signal and the suppression of noise.
Further, described data acquisition and procession unit comprises water saturation water Gas content data at different temperatures, after first harmonic signal sends into data acquisition and procession unit, according to the linear corresponding relation of signal amplitude and vapor content, obtain the vapor content in environment to be measured; Obtained the temperature of environment to be measured by temperature sensor, and then calculate the saturation water Gas content at this temperature; Using the relative humidity of the ratio of the vapor content of environment to be measured and saturation water Gas content as environment to be measured, and the relative humidity of environment and temperature information are reached host computer by data acquisition and procession unit carry out showing and preserve.
The present invention has following beneficial effect:
The present invention is based on the monitoring that TDLAS technology carries out ambient humidity, adopt non-contacting metering system, solve the contact humidity-sensitive element problem that easily contaminated, the life-span is short in corrosive atmosphere, the laser wavelength scope selected is consistent with water vapor absorption spectrum, circuit design is reasonable, good stability, can complete in the rugged surroundings such as corrosivity temperature and relative humidity online, accurate, reliably monitor.
The present invention changes routine spectra absorption techniques and gas to be measured is passed into the mode that air chamber carries out detecting, have employed on-line monitoring formula air chamber, directly utilize the structure of ready-package that air chamber exposed region is placed in environment to be measured, the error avoiding the recycle circuit between environment to be measured and air chamber and bring, achieve the on-line monitoring of ambient temperature and humidity, easy to operate, accuracy is high.
Present invention employs multiple method and reduce measuring error: utilize lock-in amplifier to carry out the extraction of harmonic signal and the suppression of noise; Starting point alignment is carried out to first harmonic signal, gross error is rejected, the multicycle on average etc. pre-service reduce measuring error etc.
Accompanying drawing explanation
Fig. 1 is a kind of structural representation of the present invention;
Fig. 2 is the structural representation of lock-in amplifier in Fig. 1.
Wherein: 1 light-source system, 2 on-line monitoring formula air chambers, 3 receive and disposal system, 11 laser instruments, 12 laser aligners, 13 laser drive unit, 21 signal bonding pads, 22 exposed regions, 23 air plugs, 24 photodetectors, 25 temperature sensors, 31 prime amplifiers, 32 lock-in amplifiers, 33 data acquisition and procession unit.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, the restriction not to its protection domain.
As shown in Figure 1, a kind of humiture observation system based on TDLAS, is made up of light-source system 1, on-line monitoring formula air chamber 2 and reception and disposal system 3,
Light-source system 1 comprises laser instrument 11, laser aligner 12 and laser drive unit 13.Laser instrument 11 selects the tunable distributed feedback type semiconductor long wavelength laser of Sichuan Teng Guang company, and laser instrument 11 centre wavelength is 1370nm, conforms to the characteristic absorpting spectrum line position of water vapor.Laser instrument 11 is furnished with the 14 pin butterfly encapsulation base plates with temperature sensor and semiconductor thermoelectric refrigeration device (TEC), by controlling the drive current of TEC, realize the thermostatic control to laser instrument 11, ensure output wavelength not by the impact of temperature fluctuation.Because laser instrument 11 laser beam when Emission Lasers is not parallel to each other but has certain angle of divergence, therefore, need to carry out collimation process to laser, 355110 series of products that laser aligner 12 have selected LightPath company carry out collimation to laser and process.Laser drive unit 13 comprises temperature controller and current controller, and temperature controller is the TEC temperature control circuit based on MAX1968 chip, provides drive current to control with the temperature realizing laser instrument to TEC; Current controller generates digital sinusoidal signal and the triangular signal of different frequency by the CPLDEPM1270 chip based on the STM32F103RCT6 microprocessor of ARM and ALTERA series, then becomes current signal from the digital to analog converter based on DAC904 chip and use as wavelength drive singal.Wavelength drive singal is made up of two parts: a part is low frequency triangular signal, signal frequency range is 10-50Hz, be used for regulating continuously the Injection Current size of laser instrument 11, the characteristic absorpting spectruming line of the comprehensive inswept water vapor of the infrared light wavelength that laser instrument 11 is produced; Another part is high_frequency sine wave signal, and signal frequency range is 1-50KHz, is used for modulating the absorption signal exported, to reduce the impact of low frequency ground unrest.Meanwhile, the generation of EPM1270 chip and high_frequency sine wave are with the reference signal of sine wave frequently as lock-in amplifier 32.
On-line monitoring formula air chamber 2 adopts the structure of ready-package, comprises signal bonding pad 21 and exposed region 22.Signal bonding pad 21 is positioned over outside environment to be measured, laser aligner 12 and air plug 23 is provided with in district, be respectively used to light signal and import exposed region 22 into and monitor signal spreads out of from exposed region 22, in addition, signal bonding pad is also provided with fast-assembling chuck, carry out Fast Installation and dismounting by clip and the fast-assembling chuck being arranged on environment outer wall to be measured, between chuck, be provided with pad, ensure the leakproofness that chuck connects, exposed region 22 is positioned in environment to be measured, adopt hollow cylindrical design, cylindrical outer wall is provided with 2 slots, ensure that near infrared light is fully exposed in environment to be measured, photodetector 24 and temperature sensor 25 is provided with in district, wherein InGaAs photodiode selected by photodetector 24, response wave length scope is 1100nm-2500nm, wider long wavelength near infrared spectrometry can be adapted to, light-sensitive surface diameter is 0.5mm, can effectively detect comparatively large spot, ADT7420 high accuracy number temperature sensor selected by temperature sensor 25, precision is ± 0.25 DEG C, be arranged on exposed region 22 outer wall, for monitoring environment temperature to be measured, air chamber adopts S31603 corrosion resistance stainless steel to make.
Receive and comprise prime amplifier 31, lock-in amplifier 32 and data acquisition and procession unit 33 with disposal system 3.The front road 31 of enlarge leadingly realizes based on AD795JR chip, and the ultra-weak electronic signal for being gathered by photodetector 24 carries out the preliminary amplification of voltage transitions and signal.Lock-in amplifier 33 carries out Detection of Weak Signals based on relevant Cleaning Principle, by the AC signal with noise after multiplier is multiplied sum-product intergrator integral operation, exports the direct current signal being proportional to input signal amplitude, thus removes noise, realize demodulation.As shown in Figure 2, lock-in amplifier 32 is made up of signalling channel, reference channel, phase-sensitive detector (PSD) and low-pass filter, and the measuring-signal through prime amplifier 32 is carried out filtering process by signalling channel, expands Dynamic Range, then sends into phase-sensitive detector (PSD); The same frequency reference signal that laser drive unit 13 produces by reference channel is adjusted to suitable phase place, then sends into phase-sensitive detector (PSD); Phase-sensitive detector (PSD), based on AD630KN chip design, can realize the multiplying of measuring-signal and reference signal; Low-pass filter realizes based on OP27JS chip, by the AC portion filtering of signal, can retain direct current component, thus complete the extraction of first harmonic signal and the suppression of noise.Data acquisition and procession unit 33 forms jointly by based on the STM32F103RCT6 microprocessor of ARM and the CPLDEPM1270 chip of ALTERA series equally, and the first harmonic signal extracted by lock-in amplifier 32 is carried out aftertreatment.Data acquisition and procession unit 33 comprises water saturation water Gas content data at different temperatures, after first harmonic signal sends into data acquisition and procession unit 33, according to the linear corresponding relation of signal amplitude and vapor content, obtains the vapor content in environment to be measured; Obtained the temperature of environment to be measured by temperature sensor 25, and then calculate the saturation water Gas content at this temperature; Using the relative humidity of the ratio of the vapor content of environment to be measured and saturation water Gas content as environment to be measured, and the relative humidity of environment and temperature information are reached host computer by data acquisition and procession unit 33 by RS485 serial communication mode carry out showing and preserve.In addition, in order to eliminate inevitable noise in system monitoring process, reduce impact that all extraneous factors bring into obtain the effective information of environment to be measured, data acquisition and procession unit also carries out starting point alignment to harmonic signal, gross error is rejected, the multicycle pre-service such as on average, to reduce measuring error.
The present invention is utilized to carry out the process of the temperature of environment to be measured and relative humidity as follows: first, need the demarcation carrying out monitoring system, utilize the linear corresponding relation of harmonic signal peak value and vapor content, the peak information of harmonic signal is measured respectively in the standard environment of different known humitures, and utilize least square method that the relation of harmonic signal peak value and vapor content is carried out linear fit, obtain demarcation straight line for actual measurement and by fitting data stored in data acquisition and procession unit 33.Then, carry out the temperature-humidity monitoring of environment to be measured, on-line monitoring formula air chamber 2 is installed by fast-assembling chuck, make exposed region be placed in environment to be measured; Produce wavelength drive singal by laser drive unit 13 and send into connected laser instrument 11, the absorption peak of near-infrared wavelength complete scan water vapor near selected wavelength that laser instrument 11 is exported, the near infrared light that laser instrument 11 exports is sent into after laser aligner 12 carries out collimation process by optical fiber and is entered on-line monitoring formula air chamber 2; Near infrared light after collimation is absorbed by environment to be measured in exposed region 22, then the electric signal containing humidity information is changed into by photodetector 24, temperature sensor 24 is arranged on the outer wall of exposed region 22, for monitoring environment temperature to be measured, the electric signal of moisture content information and temperature monitoring signal import reception and disposal system 3 by electric wire into by air plug 23; In reception with disposal system 3, humidity detection signal is amplified into lock-in amplifier 32 through prime amplifier 31 and carries out signal receiving, data acquisition and procession unit 33 is together sent into temperature monitoring signal after obtaining first harmonic signal, in data acquisition and procession unit 33, series of preprocessing is carried out to monitor signal, then calculate the relative humidity of environment to be measured according to the fitting a straight line of demarcating and the relation of temperature and saturation water Gas content, and rh value and temperature value are passed back host computer and carry out showing and preserving.
To sum up, the present invention is based on TDLAS technology, adopt non-contacting metering system, can complete in the rugged surroundings such as corrosivity temperature and relative humidity online, accurate, reliably monitor, temperature measurement accuracy is ± 0.25 DEG C, and relative humidity measurement precision is ± 3%; Have employed on-line monitoring formula air chamber, the error avoiding the recycle circuit between environment to be measured and air chamber and bring; Employ multiple method and reduce measuring error, have that measuring accuracy is high, good stability, the advantage such as applied widely.
Finally should understand, above embodiment is only not used in for illustration of the present invention and limits the scope of the invention, although with reference to preferred embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that, technical scheme of the present invention is modified or equivalent replacement, and do not depart from the spirit and scope of technical solution of the present invention, all should be encompassed in the middle of right of the present invention.
Claims (6)
1. the humiture observation system based on TDLAS, by light-source system (1), on-line monitoring formula air chamber (2) and receive and disposal system (3) form, it is characterized in that: light-source system (1) comprises laser instrument (11), laser aligner (12) and laser drive unit (13), laser drive unit (13) produces wavelength drive singal and sends into connected laser instrument (11), the absorption peak of near-infrared wavelength complete scan water vapor near selected wavelength that laser instrument (11) is exported, the near infrared light that laser instrument (11) exports is sent into after laser aligner (12) carries out collimation process by optical fiber and is entered on-line monitoring formula air chamber (2),
On-line monitoring formula air chamber (2) comprises signal bonding pad (21) and exposed region (22), signal bonding pad (21) is positioned over outside environment to be measured, laser aligner (12) and air plug (23) is provided with in signal bonding pad, be respectively used to light signal and import exposed region (22) into and monitor signal spreads out of from exposed region (22), exposed region (22) is positioned in environment to be measured, photodetector (24) and temperature sensor (25) is provided with in exposed region, near infrared light after collimation is absorbed by environment to be measured in exposed region (22), then the electric signal containing humidity information is changed into by photodetector (24), temperature sensor (25) is arranged on the outer wall of exposed region (22), for monitoring environment temperature to be measured, the electric signal of moisture content information and temperature monitoring signal import reception and disposal system (3) by electric wire into by air plug (23),
Receive and comprise prime amplifier (31), lock-in amplifier (32) and data acquisition and procession unit (33) with disposal system (3), humidity detection signal is amplified into lock-in amplifier (32) through prime amplifier (31) and carries out signal receiving, data acquisition and procession unit (33) is sent into after obtaining first harmonic signal, according to the peak value of harmonic signal and the linear corresponding relation of vapor content, calculate the relative humidity of environment to be measured, and rh value and temperature value are passed back host computer and carry out showing and preserving.
2. a kind of humiture observation system based on TDLAS according to claim 1, it is characterized in that: described laser instrument (11) is tunable distributed feedback type semiconductor long wavelength laser, centre wavelength is 1370mm, laser instrument (11) is arranged on to be had on the butterfly encapsulation base plate of temperature sensor and semiconductor thermoelectric refrigeration device, by controlling the drive current of semiconductor thermoelectric refrigerating unit, realize the thermostatic control to laser instrument (11).
3. a kind of humiture observation system based on TDLAS according to claim 1 and 2, it is characterized in that: described laser drive unit (13) comprises temperature controller and current controller, temperature controller provides drive current to control with the temperature realizing laser instrument (11) to semiconductor thermoelectric refrigeration device, current controller provides wavelength drive singal to laser instrument (11), wavelength drive singal comprises low frequency triangular signal and high_frequency sine wave signal, is respectively used to scanning and the modulation of wavelength; Meanwhile, laser drive unit (13) produce and high_frequency sine wave with the sine wave of frequency or square wave as the reference signal of lock-in amplifier (32).
4. a kind of humiture observation system based on TDLAS according to claim 1, it is characterized in that: described on-line monitoring formula air chamber (2) adopts the structure of ready-package, signal bonding pad (21) is provided with fast-assembling chuck, carries out Fast Installation and dismounting by clip and the fast-assembling chuck being arranged on environment outer wall to be measured; Be provided with pad between chuck, ensure the leakproofness that chuck connects; Exposed region (22) adopts hollow cylindrical design, outer wall perforate, ensures that near infrared light is fully exposed in environment to be measured; On-line monitoring formula air chamber adopts stainless steel to make.
5. a kind of humiture observation system based on TDLAS according to claim 1, it is characterized in that: described lock-in amplifier (32) is made up of signalling channel, reference channel, phase-sensitive detector (PSD) and low-pass filter, measuring-signal through prime amplifier (31) is carried out filtering process by signalling channel, expand Dynamic Range, then send into phase-sensitive detector (PSD); The same frequency reference signal that laser drive unit (13) produces by reference channel is adjusted to suitable phase place, then sends into phase-sensitive detector (PSD); Measuring-signal and reference signal are carried out multiplying by phase-sensitive detector (PSD); Low-pass filter, by the AC portion filtering of signal, retains direct current component, thus completes the extraction of first harmonic signal and the suppression of noise.
6. a kind of humiture observation system based on TDLAS according to claim 1, it is characterized in that: described data acquisition and procession unit (33) comprises water saturation water Gas content data at different temperatures, after first harmonic signal sends into data acquisition and procession unit (33), according to the linear corresponding relation of signal amplitude and vapor content, obtain the vapor content in environment to be measured; Obtained the temperature of environment to be measured by temperature sensor (25), and then calculate the saturation water Gas content at this temperature; Using the relative humidity of the ratio of the vapor content of environment to be measured and saturation water Gas content as environment to be measured, and the relative humidity of environment and temperature information are reached host computer by data acquisition and procession unit (33) carry out showing and preserve.
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| CN106841107A (en) * | 2016-12-30 | 2017-06-13 | 武汉六九传感科技有限公司 | A kind of micro- water detects special butterfly detector |
| CN107703083A (en) * | 2017-09-08 | 2018-02-16 | 东南大学 | A kind of hydrogen humidity measuring apparatus and method for hydrogen cooled generator |
| CN109060625A (en) * | 2018-08-15 | 2018-12-21 | 中国科学院合肥物质科学研究院 | A kind of test device and its test method detecting film moisture-vapor transmission |
| CN109425366A (en) * | 2017-09-04 | 2019-03-05 | 南京理工大学 | A kind of analog signal processing circuit for active optics micro-displacement sensor |
| JP2019513998A (en) * | 2016-04-12 | 2019-05-30 | ジョン ジンク カンパニー，エルエルシー | Method and apparatus for verification of TDLAS system operation |
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| CN110514320A (en) * | 2019-08-19 | 2019-11-29 | 北京航天易联科技发展有限公司 | Composite type optical fibre Temperature Humidity Sensor and its detection system, demodulation method |
| CN111758021A (en) * | 2018-02-27 | 2020-10-09 | 松下知识产权经营株式会社 | Water content detection device |
| CN114062314A (en) * | 2021-11-16 | 2022-02-18 | 浙江理工大学 | Photoelectric setting machine humidity detection device and method |
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| JP2019513998A (en) * | 2016-04-12 | 2019-05-30 | ジョン ジンク カンパニー，エルエルシー | Method and apparatus for verification of TDLAS system operation |
| CN106841107A (en) * | 2016-12-30 | 2017-06-13 | 武汉六九传感科技有限公司 | A kind of micro- water detects special butterfly detector |
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| CN109060625A (en) * | 2018-08-15 | 2018-12-21 | 中国科学院合肥物质科学研究院 | A kind of test device and its test method detecting film moisture-vapor transmission |
| CN110361360A (en) * | 2019-07-17 | 2019-10-22 | 华中科技大学 | Tunable laser half-wave scan control method and system for gas detection |
| CN110514320A (en) * | 2019-08-19 | 2019-11-29 | 北京航天易联科技发展有限公司 | Composite type optical fibre Temperature Humidity Sensor and its detection system, demodulation method |
| CN114062314A (en) * | 2021-11-16 | 2022-02-18 | 浙江理工大学 | Photoelectric setting machine humidity detection device and method |
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