CN103943445A - Sample placing auxiliary support - Google Patents
Sample placing auxiliary support Download PDFInfo
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- CN103943445A CN103943445A CN201410190364.0A CN201410190364A CN103943445A CN 103943445 A CN103943445 A CN 103943445A CN 201410190364 A CN201410190364 A CN 201410190364A CN 103943445 A CN103943445 A CN 103943445A
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- sample
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Abstract
The invention provides a sample placing auxiliary support. The support is composed of band rings different in diameter, segmentation plates and a disc with a sector notch. The band rings are in circular ring band-shaped; locking grooves are semi-cylindrical and connected with the band rings at equal heights, a notch section in each locking groove is trapezoidal column-shaped, all the locking grooves are evenly distributed inside and outside the band rings, and the locking grooves of the largest band ring are all distributed at the inner side; the segmentation plates are entirely cubic plate-shaped and as high as the locking grooves, the length of each segmentation plate is equal to a distance between the connected band rings, the two ends of each segmentation plate are trapezoidal column-shaped, and the section of each segmentation plate is slightly smaller than the notch in the locking groove; the entire sample placing auxiliary support is made of polypropylene plastics. In the preparation process before testing of scanning electron microscopes, for a common electron microscope plane sample stage and at the stage of fixing samples to a conductive double-sided adhesive, the sample placing auxiliary support is capable of isolating sample placement spaces from each other and effectively avoiding pollution between samples to meet actual requirements in scientific research work without affecting original operations and changing any component.
Description
Technical field
Patent of the present invention relates to the aid in scanning electron microscopy (SEM) use procedure, specifically, is that a kind of sample is laid auxiliary stand.
Background technology
The scanning electron microscopy (SEM) using both at home and abroad at present, its sample room internal structure complex precise.In general sample room, can hold larger sample, and carry out three-dimensional manipulating on sample stage.And on design space, consider that multi-signal gatherer installs needed physical dimension.So equipment supplier provides various multi-form sample stages.But consider the requirement of its signal collection, its sample stage is all generally that the metal of high conductivity is made, and sample itself needs requirements fixing and conduction two aspects.More commonly, adopt gold-plated method to improve conductivity, adopt conductive double sided adhesive tape to be fixed.Comparatively speaking, sample is fixedly a very loaded down with trivial details job.
In order to solve the fixation problem of sample on sample stage, the improvement of sample stage has become a focus.The first is the improvement of sample stage appearance forrns, as: Nantong University (ZL200720131193.X) has designed a kind of Multi-example loading combination device of scanning electronic microscope, comprise the bearing mating with electron microscope, on bearing, be provided with the pedestal of multiple grooves, specimen holder of difference plug-in mounting in the each groove on pedestal.State Nanometer Science Center (ZL201020676443.X) provides a kind of scanning electron microscopy sample stage, this scanning electron microscopy sample stage has body, described body has end face, the bottom surface being parallel to each other and is connected to the multiple sides between described end face and bottom surface, described side at least has a plane, it is characterized in that thering is breach on described body.Shanghai Failure Analysis Laboratory Co., Ltd. has designed a kind of fixture used for scanning of scanning electron microscope (ZL201120320091.9); this fixture comprises bowl-type backing, is fixedly installed in the annular pallet on described backing top; by sticking double faced adhesive tape in the supporting plate on described pallet top; described supporting plate is square structure; the length of side of described supporting plate is greater than the external diameter of described annular pallet, and described supporting plate is metal material.
The second is to increase some fixing structures or possess the mobile structure regulating.The patent " fetching device of sample holder and sweep electron microscope " of Zhongxin International Integrate Circuit Manufacture (Shanghai) Co Ltd. and Wuhan Xinxin Semiconductor Manufacturing Co., Ltd. (ZL201020210203.0) described sample holder comprises a sliding part, the fetching device of described sample holder comprises: base and be arranged at the slideway on described base, described slideway and described sliding part are slidably connected.(ZL200820130579.3), it comprises pedestal to the patent " Special fixture for scanning electronic microscope " of Pangang Group Institute Co., Ltd and Pangang (Group)Panzhihua Iron and Steel Research Institute(PISI) Co., Ltd., for placing sample; Be arranged on first clamping part of described pedestal one end, for clamping described sample and being the described offering sample clamping force of clamping; Be arranged on the second clamping part of the described pedestal other end, for clamping the position of described sample and the described sample of adjustment." being applied to the specimen holder of scanning electron microscopy " of Shanghai Hua Li Microelectronics Co., Ltd. (ZL201220138262.0); comprise base, be arranged at the metal platform of base top and be positioned at the spring chuck of the working face of metal platform; chip sample is directly placed on the working face of metal platform, and described spring chuck is pushed down chip sample and chip sample is fixed on to the working face of metal platform.
The third mentality of designing is to increase some functional structures or annex on common sample stylobate plinth, thereby realizes some special test needs.As Shanghai Steel and Iron Research Institute (CN87214469) has proposed a kind of ESEM Multifunctional Loading Attachment, comprise a pair of stepper motor asymmetrical load system, a pair of base plate, be arranged on the first template or the second template on base plate, and be fixed on the driven rod in template, wherein the first template can fixedly be carried out the first or second sample chuck of band or the tension test of silk material, the second template energy constant cross-section bending die, surface curvature (compression) mould, shears (punching press) mould etc.This sample stage has expanded the use function of ESEM, thereby can effectively simulate various loading processes, and the state parameter recording is recorded.What inherit this design philosophy is its patent No. 201020242090.2,201020251249.7,201020239339.4 of Shandong University Building, 201020232521.7,201020232512.8,201020232509.6, in increased separately some mechanical property measuring abilities.
Above-mentioned these patents, common feature is exactly the improvement to sample stage, again makes the novel sample stage that meets demand.And scanning electron microscopy specimen in use platform is to be all generally made up of the metal of high conductivity, but the manufacturing cost of single precision metallic product, and general enterprises and institutions and individual cannot bear.Secondly these sample stages cannot solve in fixation problem, especially the fixed sample process of powder sample, the mutual pollution problem causing due to misoperation or slight vibration between powder sample.
In sum, invent a kind of sample and lay that auxiliary stand is real to be necessary.
Summary of the invention
The object of patent of the present invention is to provide a kind of sample to lay auxiliary stand, in sem test process, on common Electronic Speculum planar sample platform, be fixed on the conductive double sided adhesive tape stage at sample, ensureing does not affect original operation and does not change under the prerequisite of any parts, this above-mentioned auxiliary stand can provide the sample setup space of mutual isolation, effectively avoids the pollution between sample, to meet the actual needs in research work.
In order to achieve the above object, patent of the present invention provides a kind of sample to lay auxiliary stand, it is characterized in that, 2-5 banded ring, 10-24 that described support is not waited by diameter are cut apart card and jointly form with the disk of sector notch.At least one place of the upper surfaces externally and internally of banded ring is uniform-distribution with draw-in groove, cuts apart card and inserts in draw-in groove, thereby above-mentioned banded ring is interconnected by use.
Described band shape ring is annulus band shape.
Described draw-in groove is that semi-cylindrical is connected with band shape ring is contour, and in draw-in groove, indentations section is trapezoidal column, and draw-in groove is evenly distributed on inside and outside banded ring, and maximum band shape is encircled its draw-in groove and is distributed in inner side.
The described card entirety of cutting apart is cube sheet, contour with draw-in groove, and length is the distance connecting between banded ring, cuts apart card two end sections and is trapezoidal column, and its cross-sectional sizes is slightly less than breach in draw-in groove.Cutting apart card middle there is the symmetrical draw-in groove in front and back or does not have.
The described disk with sector notch, its diameter should be greater than the maximum gauge of banded ring, and its sector notch central angle size is from 10-90 degree.
Described support, overall material is polypropylene plastics.
Mentality of designing of the present invention is, is first that scanning electron microscopy common sample platform is circular, so banded ring is annulus band shape.The second, consider and effectively cut apart sample, so this band shape ring has certain height and thickness.Secondly, can observe the actual needs of multiple samples in order to reach once test, so need to design a lot of sample setup compartments, and there is size and number in sample itself, its space should regulate completely as required, so designed the card of cutting apart of plug type, and designed draw-in groove on band shape ring.Design tight connection of also having realized between the each parts of whole support (banded ring and banded ring, banded ring with cut apart card) by this, easy to use and take care of.Finally, specifically, in the time utilizing cotton swab or dropper, by ensureing not polluted by ensuing powder sample of existing sample, provide a disk with sector notch.All samples must enter arrangement compartment through this breach, and in fixation procedure, the sample having fixed is covered by disk always.
Compared with prior art, the beneficial effect of patent of the present invention is:
(1) patent of the present invention by band shape ring size and quantity, cut apart the position of card and the adjustment of quantity, can obtain the space of different sizes and position, meet the fixing needs of the sample of different size and number.
(2) patent of the present invention has obtained the space of mutual isolation by cutting apart card, is fixed in conductive double sided adhesive tape process at sample, by the disk with sector notch, can effectively avoid the pollution between sample.
(3) material of patent of the present invention belongs to polypropylene (PP) plastics, in sample setup process, can not damage original metal sample platform.
(4) patent of the present invention does not change original sample stage that equipment vendor provides, and when support itself plays booster action, material belongs to polypropylene (PP) plastics, with low cost, easily universal use.
As the further improvement of technology, change banded ring size and quantity, within still belonging to this patent protection range.
As the further improvement of technology, change draw-in groove quantity and distributing position, within still belonging to this patent protection range.
As the further improvement of technology, change in draw-in groove notch geometry and cut apart card two ends shape and be used for buckle and be connected, within still belonging to this patent protection range.
Brief description of the drawings
The bracket component stereogram of Fig. 1, a kind of embodiment of patent of the present invention.(in figure, 1 is banded ring, the 2nd, and draw-in groove, the 3rd, cut apart card, the 4th, settle compartment)
The stereogram of cutting apart card and the vertical view of Fig. 2, a kind of embodiment of patent of the present invention.(in figure, 5 is draw-in grooves, the 6th, with the card of cutting apart of draw-in groove)
The bracket component vertical view of Fig. 3, a kind of embodiment of patent of the present invention.(in figure, 1 is banded ring, the 2nd, and draw-in groove, the 3rd, cut apart card, the 4th, settle compartment)
The band shape ring of Fig. 4, a kind of embodiment of patent of the present invention and cutting apart between card by the fixing details enlarged drawing of draw-in groove.(in figure, 2 is draw-in grooves, the 3rd, cut apart card)
The schematic diagram of the disk with sector notch of Fig. 5, a kind of embodiment of patent of the present invention.(in figure, 7 is sector notch)
The use procedure schematic diagram of Fig. 6, a kind of embodiment of patent of the present invention.(in figure, 8 is cylindrical sample platforms, the 9th, and cotton swab, the 10th, circular conductive double sided adhesive tape, the 11st, with the disk of sector notch, the 12nd, the bolt of cylindrical sample platform bottom, the 13rd, bracket component, the 4th, settle compartment)
The effect schematic diagram of sample setup after Fig. 7, a kind of embodiment of patent of the present invention.(in figure, 14 is powder sample habitats)
The electron scanning micrograph (SEM) of Fig. 8, ZnS and ZnO sample.(a is ZnS, and b is ZnO)
The energy spectrogram (EDS) of Fig. 9, ZnS and ZnO sample.(a is ZnS, and b is ZnO, line sweep pattern)
The electron scanning micrograph (SEM) of Figure 10, certain stainless steel and iron oxide yellow sample.(C is stainless steel, and D is iron oxide yellow, and 15,16 are respectively the regional location of the power spectrum of sample)
The energy spectrogram (EDS) of Figure 11, certain stainless steel and iron oxide yellow sample.(C is stainless steel, and D is iron oxide yellow, sector scanning pattern)
Embodiment
Cutting apart card has two classes, as the banded ring 1 of two of connections in Fig. 1 cut apart card 3, as shown in Figure 2, two ends connect banded ring 1 to another kind, what centre was provided with that draw-in groove 5 is used for that connection cuts apart card 3 cuts apart card 6.Utilize above-mentioned two classes to cut apart card 3 and 6, connect banded ring 1, as shown in Figure 1, its vertical view as shown in Figure 3 for its effect stereogram.
As shown in Figure 1 and Figure 4, to be trapezoidal column similar with cutting apart 3 liang of end sections of card for the draw-in groove 2 cross section notch geometries of utilizing banded ring 1, and cut apart card 3 cross-sectional sizes and be slightly less than the interior breach of draw-in groove 2, band shape can be encircled to 1 and cut apart the complete snap close of card 3 completely, and because both are contour, bottom and top planes are without obvious groove and projection.By according to test sample size and number, can artificially regulate banded ring 1 size and quantity, cut apart card 3 and cut apart the position of card 6 and the adjustment of quantity, can obtain the space of different sizes and position, meet the fixing needs of the sample of different size and number.
When above-mentioned assembling parts becomes after bracket component, start to be fixed the operation of sample, as shown in Figure 6.In Fig. 6, ensure that by cutting the diameter of circular conductive double sided adhesive tape 10 is less than the diameter of scanning electron microscopy cylindrical sample platform 8, then tear a surface protective film of circular conductive double sided adhesive tape 10 off, it is entirely affixed on scanning electron microscopy sample stage 8, then tear another side diaphragm off, bracket component as shown in Figure 1 13 is placed on conductive double sided adhesive tape 10, utilize the bolt 12 of cylindrical sample platform 8 bottoms to fix sample stage 8, then on it, put the disk with sector notch 11 as shown in Figure 5, adjust sector notch 7 positions on disk 11, ensure that sector notch 7 sizes are on arrangement compartment 4.Then by cotton swab 9, within required sample is shaken off to settle compartment 4 from sector notch 7; Often completing a sample shifts and fixes, can adjust clockwise or counterclockwise sector notch 7 positions, thereby within ensureing that sample enters different arrangement compartments 4, finally complete sample steady job, then remove the disk 11 with sector notch, finally remove bracket component.Powder sample steady job on sample stage completes.In Fig. 7, the schematic diagram that powder sample 14 distributes.
Under of the present invention assisting, effectively avoid the pollution between sample, met the actual needs in research work.Describe the present invention in detail below in conjunction with embodiment, it is more obvious that object of the present invention and effect will become.
Embodiment 1
The preparation of ZnS nanometer powder.Take zinc nitrate 0.561g in 200ml beaker; Measure 60m1 water and pour above-mentioned beaker into, put into magneton, be allowed to condition in magnetic stirring apparatus and stir 10min, it is dissolved completely; In stirring, measure 10ml diethanol amine (DEA) and slowly add above-mentioned solution, make its mixing; Take thiocarbamide 0.228g in above-mentioned solution; Measure 80ml ethylene glycol in above-mentioned solution, magnetic is stirred to evenly; Gained solution is drained to glass bar in the there-necked flask device of putting up, opens heating collar power supply, Temperature Setting, at 180 DEG C, is opened reflux, after heating a period of time; Product is poured out to there-necked flask, then with distilled water and absolute alcohol washing, product is centrifugal after, finally dry 4h in 60 DEG C of drying boxes, until product bone dry grinds, obtains sample.
The preparation of ZnO nano powder.By a certain amount of zinc acetate ((CH
3cOO)
2zn2H
2o, ZAD) be dissolved in absolute ethyl alcohol and prepare transparent ZnO colloidal sol, then in solution, add and the amount of substance monoethanolamine such as ZAD, 60min refluxes under the magnetic agitation of 60 DEG C of constant temperature.Synthetic vitreosol is dried to 30min in 100 DEG C of baking ovens of constant temperature, then in Muffle furnace taking heating rate as 5 DEG C/min, under calcining heat (300～700 DEG C) condition, heat-treat 120min, then carry out room temperature cooling, grind, obtain sample.
Adopt auxiliary fixing 5 samples separately of patent of the present invention, amount to 10 samples.Fixation procedure is under of the present invention assisting, very convenient.ZnS and ZnO nano powder are placed under the S-3400N of Hitachi scanning electron microscopy and observe, obtain the ZnS shown in Fig. 8 and ZnO nano powder scanning electron micrograph, then utilize the Model550i of ixrfsystems to connect EDS detector, power spectrum test is carried out in comparison film viewing area, and pattern is line sweep.In power spectrum Fig. 9, in ZnO sample, do not find the existence of element sulphur, illustrate that the middle oxygen element sulphur of two class samples does not have mutually to pollute substantially.
Embodiment 2
With sample and certain enterprise's iron oxide yellow (iron oxide) product after stainless steel product processing of certain company, in 1, carry out scanning electron microscopy and power spectrum test as implemented.Obtain electron scanning micrograph Figure 10, and 15 positions and 16 positions in Figure 10, carry out respectively sector scanning, obtain power spectrum Figure 11.In power spectrum Figure 11, in stainless steel sample, do not find the existence of iron oxide, illustrate adopt patent of the present invention auxiliary fixing in, effectively avoided the mutual pollution between sample.
Claims (5)
1. sample is laid an auxiliary stand, it is characterized in that, 2-5 banded ring, 10-24 that described support is not waited by diameter are cut apart card and jointly form with the disk of sector notch.At least one place of the upper surfaces externally and internally of banded ring is uniform-distribution with draw-in groove, cuts apart card and inserts in draw-in groove, thereby above-mentioned banded ring is interconnected by use.
2. banded ring according to claim 1 is annulus band shape.
3. draw-in groove according to claim 1 is that semi-cylindrical is connected with band shape ring is contour, and in draw-in groove, indentations section is trapezoidal column, and draw-in groove is evenly distributed on inside and outside banded ring, and maximum band shape is encircled its draw-in groove and is distributed in inner side.
4. the card entirety of cutting apart according to claim 1 is cube sheet, contour with draw-in groove, and length is the distance connecting between banded ring, cuts apart card two end sections and is trapezoidal column, and its cross-sectional sizes is slightly less than breach in draw-in groove.Cutting apart card middle there is the symmetrical draw-in groove in front and back or does not have.
5. the disk with sector notch according to claim 1, its diameter should be greater than the maximum gauge of banded ring, and its sector notch central angle size is from 10-90 degree.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410190364.0A CN103943445A (en) | 2014-04-30 | 2014-04-30 | Sample placing auxiliary support |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410190364.0A CN103943445A (en) | 2014-04-30 | 2014-04-30 | Sample placing auxiliary support |
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| Publication Number | Publication Date |
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| CN103943445A true CN103943445A (en) | 2014-07-23 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410190364.0A Pending CN103943445A (en) | 2014-04-30 | 2014-04-30 | Sample placing auxiliary support |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200957186Y (en) * | 2006-08-29 | 2007-10-10 | 许敏仓 | Dosed medicine case structure |
| CN201122570Y (en) * | 2007-12-04 | 2008-09-24 | 南通大学 | Multi-example loading combination device of scanning electronic microscope |
| JP2011060723A (en) * | 2009-09-14 | 2011-03-24 | Sanyu Electron Co Ltd | Sample table, sample holder and sample stage for microscope |
| CN202793870U (en) * | 2012-08-03 | 2013-03-13 | 沙县宏盛塑料有限公司 | Powder sample preparation device for scanning electron microscope |
| CN202848184U (en) * | 2012-08-22 | 2013-04-03 | 王强 | Medicine storage box for pharmacy |
| CN203408247U (en) * | 2013-08-07 | 2014-01-29 | 魏书靖 | Nursing medical box |
-
2014
- 2014-04-30 CN CN201410190364.0A patent/CN103943445A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200957186Y (en) * | 2006-08-29 | 2007-10-10 | 许敏仓 | Dosed medicine case structure |
| CN201122570Y (en) * | 2007-12-04 | 2008-09-24 | 南通大学 | Multi-example loading combination device of scanning electronic microscope |
| JP2011060723A (en) * | 2009-09-14 | 2011-03-24 | Sanyu Electron Co Ltd | Sample table, sample holder and sample stage for microscope |
| CN202793870U (en) * | 2012-08-03 | 2013-03-13 | 沙县宏盛塑料有限公司 | Powder sample preparation device for scanning electron microscope |
| CN202848184U (en) * | 2012-08-22 | 2013-04-03 | 王强 | Medicine storage box for pharmacy |
| CN203408247U (en) * | 2013-08-07 | 2014-01-29 | 魏书靖 | Nursing medical box |
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Application publication date: 20140723 |
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