CN103901732B - Silicon chip connection device - Google Patents
Silicon chip connection device Download PDFInfo
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- CN103901732B CN103901732B CN201210587414.XA CN201210587414A CN103901732B CN 103901732 B CN103901732 B CN 103901732B CN 201210587414 A CN201210587414 A CN 201210587414A CN 103901732 B CN103901732 B CN 103901732B
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- guide rail
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Abstract
The invention discloses a kind of silicon chip connection device, including contact pin hands, air-float guide rail device, drive mechanism and base, wherein, described air-float guide rail device includes air-float guide rail stator and air-float guide rail mover, described air-float guide rail stator is fixed on described base, described air-float guide rail mover is set on described air-float guide rail stator and fixes with described contact pin hands and is connected, and described drive mechanism drives the motion of described air-float guide rail device.The present invention solves the friction problem of guiding mechanism in prior art by using air-float guide rail device, ensure that and can return to lowest order at handing-over silicon chip back stay hands, eliminate silicon chip in existing technology and join owing to contact pin hands can not return to the potential safety hazard that lowest order exists, total is simple simultaneously, low cost.
Description
Technical field
The present invention relates to lithographic equipment field, particularly to a kind of silicon chip connection device.
Background technology
Lithographic equipment of the prior art, is mainly used in IC, flat display field or other is miniature
The manufacture of device.By lithographic equipment, there is the multi-layer mask of different mask pattern under accurately alignment successively
It is imaged on the wafer being coated with photoresist, such as semiconductor wafer or LCD panel.Refer to Fig. 1, be existing
There is the lithographic equipment i.e. structural representation of litho machine.From figure 1 it appears that litho machine includes: illumination system
System 11, mask platform 12, projection objective 13, work stage 14, laser interferometer 15, silicon chip connection device 16
And transmission system 17.Wherein, illuminator 11 provides exposure light source, mask platform 12 for exposure device
Support and location mask version 18, projection objective 13 provides exposure field, is existed by the graph exposure on mask 18
Silicon chip 19(or glass substrate) on.Work stage 14 carries silicon chip 19, and provide for silicon chip 19 support and
Location.The precise flange that laser interferometer 15 is work stage 14 provides position signalling.Silicon chip handing-over dress
Put 16 and transmission system 17 coordinated the fluctuating plate function of silicon chip 19.In described litho machine, work stage
14 mainly include coarse motion platform and micropositioner.Coarse motion platform completes big stroke motion and location, the micropositioner of silicon chip 19
Completing the little stroke motion of precision and the location of silicon chip 19, silicon chip connection device 16 coordinates transmission system 17 to complete
The handing-over function of silicon chip 19.
Silicon chip connection device 16 is generally of the catenary motion function of single-degree-of-freedom, and has Incision Machine's,
To complete the handing-over of silicon chip 19, carry and fix.Specifically refer to Fig. 2, it is existing silicon chip handing-over dress
Put the structural representation of 16.As in figure 2 it is shown, silicon chip connection device 16 includes: base plate 161, driving machine
Structure 162, guiding mechanism 165 and in order to accept the bearing plate 163 of silicon chip 19, wherein, drive mechanism 162
Being fixed on base plate 161 with guiding mechanism 165, drive mechanism 162 is driven by guiding mechanism 165 and holds
Fishplate bar 163, bearing plate 163 is further fixed on several contact pin hands 164, when transmitting silicon chip 19, can pass through
Several contact pin handss 164 accept silicon chip 19.Additionally, described guiding mechanism 165 is line slideway, due to straight line
Guide rail also exists certain friction during motion, again due to the precision problem that line slideway is vertically-mounted,
When can cause motor power-off, contact pin hands 164 can not drop to lowest order, it is possible to affects sucker suction silicon chip 19,
Be there is certain potential safety hazard in silicon chip 19 handing-over.
Summary of the invention
The present invention provides a kind of silicon chip connection device, there is peace to overcome in the silicon chip handshaking of prior art
The problem of full hidden danger.
For solving above-mentioned technical problem, the present invention provides a kind of silicon chip connection device, including contact pin hands, air supporting
Track-type facilities, drive mechanism and base, wherein, described air-float guide rail device include air-float guide rail stator and
Air-float guide rail mover, described air-float guide rail stator is fixed on described base, and described air-float guide rail mover is sheathed
Fixing on described air-float guide rail stator and with described contact pin hands and be connected, described drive mechanism drives described air supporting
Track-type facilities moves.
As preferably, described air-float guide rail device includes air-float guide rail stator and air-float guide rail mover, described gas
Floating guide rail stator is fixed on described base, and described air-float guide rail mover is set on described air-float guide rail stator
And fixing with described contact pin hands be connected.
As preferably, described air-float guide rail stator is cuboid, prism or cylinder.
As preferably, described air-float guide rail mover is the cuboid of hollow, prism or cylinder, and hollow
The shape at place is corresponding with the shape of described air-float guide rail stator.
As preferably, described air-float guide rail mover includes multiple air supporting block, passes through screw between described air supporting block
It is fastenedly connected.
As preferably, described air supporting block is respectively equipped with positive airway pressure and multiple throttle orifice, wherein, described just
The two ends calmed the anger connect with outside positive pressure source, and one end of described each throttle orifice is respectively with described positive airway pressure even
Logical, the other end of described each throttle orifice is interconnected by a balancing slit being arranged on described air supporting block inwall,
The position of described balancing slit is corresponding with described air-float guide rail stator, fixed with described air-float guide rail at described air supporting block
Air film is formed between son.
As preferably, described air-float guide rail stator is respectively equipped with positive airway pressure and multiple throttle orifice, wherein,
One end of described positive airway pressure connects with outside positive pressure source, one end of described each throttle orifice respectively with described malleation
Air flue connects, and the other end of each throttle orifice is communicated to the interface of described air supporting block and air-float guide rail stator,
Air film is formed between described air supporting block and air-float guide rail stator.
As preferably, described air supporting block being additionally provided with vacuum way, one end of described vacuum way connects with extraneous
Logical, the other end of described vacuum way is corresponding with described contact pin hands.
As preferably, a diameter of 0.08mm ~ 0.2mm of described throttle orifice.
As preferably, the width of described balancing slit is 0.1mm ~ 0.5mm, and the degree of depth of described balancing slit is
0.08mm~0.2mm。
As preferably, between described air-float guide rail mover and described air-float guide rail stator, it is additionally provided with anti-deflection dress
Put.
As preferably, described drive mechanism is voice coil motor.
As preferably, described driving structure includes electric rotating machine, gear and tooth bar, wherein, described electric rotating
Machine is fixed on base and is connected with described gear, and described gear agrees with described tooth bar, and described tooth bar is fixed
On described air-float guide rail mover.
As preferably, described electric rotating machine is fixed on described base by a motor mounting plate.
As preferably, described gear is fixed on described motor mounting plate by a bearing block.
As preferably, described air-float guide rail stator and air-float guide rail mover use non-magnet material or Porous material
Material is made.
As preferably, also include limit sensors, position-measurement device and mechanical stop limiter, described spacing
Sensor and mechanical stop limiter are arranged on described base, and described position-measurement device is fixed on described gas
On floating track-type facilities.
Compared with prior art, the invention have the advantages that the silicon chip connection device of the present invention, including connecing
Sheet hands, air-float guide rail device, drive mechanism and base, wherein, described air-float guide rail device includes air supporting
Guide rail stator and air-float guide rail mover, described air-float guide rail stator is fixed on described base, and described air supporting is led
Rail mover is set on described air-float guide rail stator and fixes with described contact pin hands and is connected, and described drive mechanism is driven
Dynamic described air-float guide rail device motion.The present invention leads by using air-float guide rail device to solve in prior art
To the friction problem of mechanism, it is ensured that lowest order can be returned at handing-over silicon chip back stay hands, eliminate existing skill
In art, silicon chip joins owing to contact pin hands can not return to the potential safety hazard that lowest order exists, and total is simple simultaneously,
Low cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of litho machine in prior art；
Fig. 2 is the structural representation of silicon chip connection device in prior art；
Fig. 3 is the structural representation of silicon chip connection device in embodiment of the present invention 1；
Fig. 4 is the structural representation of air-float guide rail device in embodiment of the present invention 1；
Fig. 5 is the structural representation of air supporting block in embodiment of the present invention 1；
Fig. 6 is the structural representation of air-float guide rail device in embodiment of the present invention 2；
Fig. 7 is the structural representation of air-float guide rail device in embodiment of the present invention 3.
In Fig. 1 ~ 2: 11-illuminator, 12-mask platform, 13-projection objective, 14-work stage, 15-laser are dry
Interferometer, 16-silicon chip connection device, 161-base plate, 162-drive mechanism, 163-bearing plate, 164-contact pin hands,
165-guiding mechanism, 17-transmit system, 18-mask plate, 19-silicon chip (or glass substrate).
In Fig. 3 ~ 5: 1-contact pin hands, 2-air-float guide rail device, 21-air-float guide rail stator, 22-air-float guide rail are dynamic
Son, 220-air supporting block, 2201-throttle orifice, 2202-positive airway pressure, 2203-balancing slit, 2204-vacuum way,
3-drive mechanism, 31-electric rotating machine, 32-gear, 33-tooth bar, 34-motor mounting plate, 35-bearing block, 4-
Base, 5-limit sensors, 6-position-measurement device, 7-mechanical stop limiter.
In Fig. 6: 2 '-air-float guide rail device, 21 '-air-float guide rail stator, 22 '-air-float guide rail mover.
In Fig. 7: 2 "-air-float guide rail device, 21 "-air-float guide rail stator, 22 "-anti-deflection device, 23 "-air supporting
Guide rail mover.
Detailed description of the invention
Understandable for enabling the above-mentioned purpose of the present invention, feature and advantage to become apparent from, the most right
The detailed description of the invention of the present invention is described in detail.It should be noted that, accompanying drawing of the present invention all uses simplification
Form and all use non-ratio accurately, only in order to convenient, aid in illustrating the mesh of the embodiment of the present invention lucidly
's.
The invention provides a kind of silicon chip connection device, by using air-float guide rail device to solve prior art
The friction problem of middle guiding mechanism, it is ensured that lowest order can be returned at handing-over silicon chip back stay hands, eliminate existing
Technology in silicon chip handing-over due to contact pin hands can not return to lowest order exist potential safety hazard, total simultaneously
Simply, low cost.
Embodiment 1
Refer to Fig. 3, and combine Fig. 4 ~ 5, the silicon chip connection device of the present embodiment, including contact pin hands 1, gas
Floating track-type facilities 2, drive mechanism 3 and base 4.Wherein, described contact pin hands 1 is fixed on described air supporting and leads
The top of rail device 2, described air-float guide rail device 2 and drive mechanism 3 be each attached on described base 4,
Described drive mechanism 3 drives described air-float guide rail device 2 to move.Specifically, described contact pin hands 1 is used for inhaling
Attached silicon chip also provides supporting surface for silicon chip；Described air-float guide rail device 2 realizes the Incision Machine's of silicon chip,
That is, vacuum flows to described contact pin hands 1 by described air-float guide rail device 2；Described drive mechanism 3 is silicon chip
Connection device provides the driving force of catenary motion, and the catenary motion for silicon chip connection device provides friction free straight
Line guide function.Therefore, the silicon chip connection device in the present embodiment, solve guiding mechanism in prior art
Friction problem, simultaneously as the present embodiment have employed air-float guide rail device 2, in motor process, drive
During motivation structure 3 power-off, contact pin hands 1 can fall to return to lowest order, it is to avoid because of contact pin during drive mechanism 3 power-off
Hands 1 can not drop to lowest order and make fragmented risk, eliminates silicon chip in prior art and joins due to contact pin
Hands 1 can not return to the potential safety hazard that lowest order exists.
Refer to Fig. 3 ~ 4, and combine Fig. 5, described air-float guide rail device 2 includes air-float guide rail stator 21 He
Air-float guide rail mover 22, described air-float guide rail stator 21 is fixed on described base 4, and described air-float guide rail moves
Son 22 is set on described air-float guide rail stator 21 and fixes with described contact pin hands 1 and is connected.Specifically, institute
State air-float guide rail mover 22 under the driving of drive mechanism 3, drive described contact pin hands 1 to move up and down, complete
Silicon chip transfer operation, and when action completes or described silicon chip connection device has a power failure, drive described contact pin hands 1
It is back to lowest order, eliminates the potential safety hazard of silicon chip handing-over.
It is also preferred that the left described air-float guide rail stator 21 is cuboid, described air-float guide rail mover 22 is hollow
Cuboid, and the shape in middle vacancy is corresponding with the shape of described air-float guide rail stator 21, uses the gas of cuboid
Floating guide rail stator 21 and air-float guide rail mover 22 can effectively prevent from air-float guide rail from moving stator 21 deflecting,
Avoid because occurred level rotates between air-float guide rail stator 21 and air-float guide rail mover 22, and cause contact pin hands 1
The silicon chip accepted damages or the upper surface of contact pin hands 1 is not parallel with base 4, affects follow-up photoetching process.
Refer to Fig. 4 ~ 5, and combine Fig. 3, in the present embodiment, described air-float guide rail mover 22 includes multiple
Air supporting block 220, is fastenedly connected by screw (not shown) between described air supporting block 220.It is also preferred that the left it is described
Positive airway pressure 2202 and multiple throttle orifice 2201, wherein, described positive airway pressure it is respectively equipped with on air supporting block 220
One end of 2202 is in communication with the outside, and connects malleation source of the gas, and the other end plug of positive airway pressure 2202 seals.
Described throttle orifice 2201 connects with described positive airway pressure 2202, and equal by one between described throttle orifice 2201
Indent 2203 connects, the position of described throttle orifice 2201 and balancing slit 2203 and described air-float guide rail stator 21
Correspondence, forms air film between described air supporting block 220 and described air-float guide rail stator 21.That is, described throttling
Hole 2201 and balancing slit 2203 are arranged on described air supporting block 220 on the face of described air-float guide rail stator 21,
It is to say, throttle orifice 2201 and balancing slit 2203 are arranged in the air bearing surface of air supporting block 220.It is also preferred that the left
A diameter of 0.08mm ~ 0.2mm of described throttle orifice 2201, the width of described balancing slit 2203 is
0.1mm ~ 0.5mm, the degree of depth of described balancing slit 2203 is 0.08mm ~ 0.2mm.Specifically, barotropic gas
It is transported in the air bearing surface relative with air-float guide rail stator 21 by positive airway pressure 2202, with described air supporting
High pressure air film is formed between guide rail stator 21.That is, gases at high pressure flow to described joint from positive airway pressure 2202
Discharge orifice 2201, owing to described throttle orifice 2201 is coupled together by balancing slit 2203, is enclosed at balancing slit 2203
The higher-pressure region that pressure is relatively stable is formed, it is ensured that the stability of high pressure gas film stiffness in the region become.It is also preferred that the left
The thickness of described high pressure air film is generally 5 ~ 20um.It is also preferred that the left for preventing barotropic gas and vacuum leak, often
It is additionally provided with sealing device (not shown) on the joint face of individual air supporting block 220.
Continue referring to Fig. 4 ~ 5, and combine Fig. 3, described air supporting block 220 is additionally provided with vacuum way 2204,
One end of described vacuum way 2204 is in communication with the outside, and the other end of described vacuum way 2204 connects with described
Sheet hands 1 is corresponding.Specifically, described silicon chip connection device will absorption silicon chip institute by described vacuum way 2204
The vacuum handling needed is to contact pin hands 1, it is achieved the absorption action to silicon chip.
Refer to Fig. 3 ~ 5, in the present embodiment, described drive mechanism 3 includes electric rotating machine 31, gear 32 and
Tooth bar 33, wherein, described electric rotating machine 31 is fixed on base 4 and is connected with described gear 32, described
Gear 32 agrees with described tooth bar 33, and described tooth bar 33 is fixed on described air-float guide rail mover 22.Relatively
Good, described electric rotating machine 31 is fixed on described base 4 by a motor mounting plate 34, described gear
32 are fixed on described motor mounting plate 34 by a bearing block 35.Specifically, electric rotating machine 31 is described
Drive mechanism 3 provides rotary motion, is converted into described air-float guide rail mover 22 by gear 32 and tooth bar 33
The namely linear motion of contact pin hands 1, provides the driving force of catenary motion for silicon chip connection device.Therefore,
By ripe electric rotating machine 31, gear 32 and the drive mechanism 3 of tooth bar 33 composition, control described rotation
The forward and backward of motor 31 and start-stop control the motion of described contact pin hands 1 so that the knot of silicon chip connection device
Structure is the simplest, and cost is the cheapest.Certainly, the present embodiment can also use voice coil motor as described
The drive mechanism of silicon chip connection device so that the overall structure of described silicon chip connection device is simple, be easily installed.
It is also preferred that the left refer to Fig. 3 ~ 5, described air-float guide rail stator 21 and air-float guide rail mover 22 use non-leading
Magnetic material or porous material are made, it is to avoid residing for electromagnetism that drive mechanism 3 produces and silicon chip connection device
The electromagnetic field environment electromagnetic interference to silicon chip connection device, thus improve the reliability of silicon chip connection device.
It is also preferred that the left the material of described air-float guide rail device 2 can be aluminium alloy, engineering ceramics or austenitic stainless steel.
Continuing referring to Fig. 3 ~ 5, described silicon chip connection device also includes limit sensors 5, position-measurement device
6 and mechanical stop limiter 7, described limit sensors 5 and mechanical stop limiter 7 are arranged at described base 4
On, for detecting and limit the shift position of described air-float guide rail device 2, it is to avoid described air-float guide rail device 2
Beyond stroke, described position-measurement device 6 is fixed on described air-float guide rail device 2, for detection in real time
The position of described air-float guide rail device 2.
Continue referring to Fig. 3 ~ 5, in the present embodiment work process of silicon chip connection device is described more detail below.
First, the work stage of litho machine is after receiving the signal of bottom sheet, and work stage moves to silicon chip handing-over position,
Sucker vacuum is closed simultaneously, and silicon chip connection device moves to the adsorption plane of sucker from lowest order；
Then, contact pin hands 1 adsorbs silicon chip, i.e. the vacuum in air supporting block 220 is opened, and passes through vacuum way
2204 arrive at contact pin hands 1, and contact pin hands 1 adsorbs silicon chip；
Meanwhile, positive airway pressure 2202 is opened, and electric rotating machine 31 rotarily drives air-float guide rail mover 22 and moves,
Thus contact pin hands 1 is taken to handing-over position, now, signal is passed to electric rotating machine 31 by position-measurement device 6,
Electric rotating machine 31 stops operating；
Then, silicon chip is taken away by the transmission manipulator in litho machine, and the removed rear electric rotating machine 31 of silicon chip obtains
Starting reversion after the signal that described position-measurement device 6 transmits, air-float guide rail mover 22 drives contact pin hands 1 time
To minimum point, complete silicon chip transfer operation.
It is also preferred that the left described positive airway pressure 2202 and throttle orifice 2201 can also be arranged on air-float guide rail stator 21
On.Specifically, positive airway pressure 2202 is radially opened on air-float guide rail stator 21, positive airway pressure 2202
One end connect with extraneous malleation source of the gas, other end plug sealing, the radially even distribution of throttle orifice 2201
In air-float guide rail stator 21, the barotropic gas in positive airway pressure 2202 is directed to described air supporting block 220
With the interface of air-float guide rail stator 21, formed between described air supporting block 220 and air-float guide rail stator 21
High pressure air film.
Embodiment 2
From the distinctive points of embodiment 1, the present embodiment is that the planform of air-float guide rail device is different.
Refer to Fig. 6, in the present embodiment, air-float guide rail device 2 ' includes that air-float guide rail stator 21 ' and air supporting are led
Rail mover 22 ', wherein, described air-float guide rail stator 21 ' is prism, during described air-float guide rail mover 22 ' is
Empty prism or cuboid, and the shape in middle vacancy is corresponding with the shape of described air-float guide rail stator 21 '.
Same, the air-float guide rail device 2 ' in the present embodiment can effectively prevent air-float guide rail from moving stator 21 ' with described
Deflect between air-float guide rail mover 22 ', it is to avoid silicon chip is damaged or the upper surface of contact pin hands and base
Not parallel, affect follow-up photoetching process.
Embodiment 3
The distinctive points of the present embodiment and embodiment 1 and embodiment 2 is structure and the shape of air-float guide rail device
And gas channel is different.
Refer to Fig. 7, in the present embodiment, described air-float guide rail device 2 " include air-float guide rail stator 21 " gentle
Floating guide rail mover 23 ", described air-float guide rail stator 21 " it is cylinder, described air-float guide rail mover 23 " for round
Cylinder or cuboid, and the shape in middle vacancy and described air-float guide rail stator 21 " shape corresponding.It is also preferred that the left
Described air-float guide rail mover 23 " and described air-float guide rail stator 21 " between be additionally provided with anti-deflection device 22 ",
Avoid described air-float guide rail stator 21 " and described air-float guide rail mover 23 " between deflect.Equally, described
Air-float guide rail device 2 " can effectively prevent air-float guide rail from moving stator 21 " and described air-float guide rail mover 23 " between
Deflect, it is to avoid silicon chip is damaged or the upper surface of contact pin hands is not parallel with base, affects follow-up
Photoetching process.
Certainly, positive airway pressure and throttle orifice can also be arranged on air-float guide rail stator 21 " on, in the present embodiment,
Positive airway pressure is radially opened in air-float guide rail stator 21 " on, one end of positive airway pressure is with extraneous malleation source of the gas even
Logical, other end plug seals, and throttle orifice is radially even is distributed in air-float guide rail stator 21 " in, by malleation
Barotropic gas in air flue is directed to described air-float guide rail mover 23 " with air-float guide rail stator 21 " interface,
At described air-float guide rail mover 23 " and air-float guide rail stator 21 " between formed high pressure air film.
In sum, the silicon chip connection device of the present invention, including contact pin hands, air-float guide rail device, driving machine
Structure and base.Wherein, described air-float guide rail device includes air-float guide rail stator and air-float guide rail mover, institute
Stating air-float guide rail stator to be fixed on described base, it is fixed that described air-float guide rail mover is set in described air-float guide rail
Fixing on son and with described contact pin hands and be connected, described drive mechanism drives the motion of described air-float guide rail device.This
Invent by using air-float guide rail device to solve the friction problem of guiding mechanism in prior art, it is ensured that
Handing-over silicon chip back stay hands can return to lowest order, eliminates silicon chip in existing technology and joins owing to contact pin hands can not
Returning to the potential safety hazard that lowest order exists, total is simple simultaneously, low cost.
Obviously, those skilled in the art can carry out various change and modification without deviating from the present invention to invention
Spirit and scope.So, if the present invention these amendment and modification belong to the claims in the present invention and
Within the scope of equivalent technologies, then the present invention is also intended to change and including modification include these.
Claims (15)
1. a silicon chip connection device, it is characterised in that include contact pin hands, air-float guide rail device, driving machine
Structure and base, wherein, described air-float guide rail device includes air-float guide rail stator and air-float guide rail mover, institute
Stating air-float guide rail stator to be fixed on described base, it is fixed that described air-float guide rail mover is set in described air-float guide rail
Fixing on son and with described contact pin hands and be connected, described drive mechanism drives the motion of described air-float guide rail device；Institute
State air-float guide rail mover and include multiple air supporting block；Described air supporting block or air-float guide rail stator are provided with positive pressure gas
Road and multiple throttle orifice, wherein, one end of described positive airway pressure connects with outside positive pressure source, described each throttling
The one end in hole connects with described positive airway pressure respectively, and the other end of each throttle orifice is communicated to described air supporting block and gas
The interface of floating guide rail stator, forms air film between described air supporting block and air-float guide rail stator.
2. silicon chip connection device as claimed in claim 1, it is characterised in that described air-float guide rail stator is
Cuboid, prism or cylinder.
3. silicon chip connection device as claimed in claim 2, it is characterised in that described air-float guide rail mover is
The cuboid of hollow, prism or cylinder, and the shape of the shape in middle vacancy and described air-float guide rail stator
Corresponding.
4. silicon chip connection device as claimed in claim 3, it is characterised in that pass through between described air supporting block
Screw is fastenedly connected.
5. silicon chip connection device as claimed in claim 4, it is characterised in that described air supporting block is just provided with
Calming the anger and during multiple throttle orifice, the other end of described each throttle orifice is arranged on the equal of air supporting block inwall by one
Indent is interconnected, and the position of described balancing slit is corresponding with described air-float guide rail stator, described air supporting block with
Air film is formed between air-float guide rail stator.
6. silicon chip connection device as claimed in claim 1, it is characterised in that be additionally provided with on described air supporting block
Vacuum way, one end of described vacuum way connects with external vacuum source, the other end of described vacuum way with
Described contact pin hands correspondence connects, for the vacuum of described contact pin hands conveying absorption.
7. silicon chip connection device as claimed in claim 1, it is characterised in that described throttle orifice a diameter of
0.08mm～0.2mm.
8. silicon chip connection device as claimed in claim 5, it is characterised in that the width of described balancing slit is
0.1mm～0.5mm, the degree of depth of described balancing slit is 0.08mm～0.2mm.
9. silicon chip connection device as claimed in claim 4, it is characterised in that described air-float guide rail mover with
It is additionally provided with anti-deflection device between described air-float guide rail stator.
10. the silicon chip connection device as according to any one of claim 1～9, it is characterised in that described in drive
Motivation structure is voice coil motor.
The 11. silicon chip connection devices as according to any one of claim 1～9, it is characterised in that described in drive
Motivation structure includes electric rotating machine, gear and tooth bar, wherein, described electric rotating machine be fixed on base and with institute
Stating gear to be connected, described gear agrees with described tooth bar, and described tooth bar is fixed on described air-float guide rail mover.
12. silicon chip connection devices as claimed in claim 11, it is characterised in that described electric rotating machine leads to
Cross a motor mounting plate to be fixed on described base.
13. silicon chip connection devices as claimed in claim 12, it is characterised in that described gear passes through one
Bearing block is fixed on described motor mounting plate.
The 14. silicon chip connection devices as according to any one of claim 2～9, it is characterised in that described gas
Floating guide rail stator and air-float guide rail mover use non-magnet material or porous material to make.
The 15. silicon chip connection devices as according to any one of claim 2～9, it is characterised in that also include
Limit sensors, position-measurement device and mechanical stop limiter, described limit sensors and mechanical stop limiter
Being arranged on described base, described position-measurement device is fixed on described air-float guide rail device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210587414.XA CN103901732B (en) | 2012-12-28 | 2012-12-28 | Silicon chip connection device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210587414.XA CN103901732B (en) | 2012-12-28 | 2012-12-28 | Silicon chip connection device |
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| Publication Number | Publication Date |
|---|---|
| CN103901732A CN103901732A (en) | 2014-07-02 |
| CN103901732B true CN103901732B (en) | 2016-08-24 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103217130B (en) * | 2012-11-22 | 2015-10-28 | 北京智朗芯光科技有限公司 | Silicon chip buffering loading device |
| CN109426092B (en) * | 2017-08-31 | 2020-06-16 | 上海微电子装备（集团）股份有限公司 | Motion module and method |
| CN109597279B (en) * | 2017-09-30 | 2023-09-29 | 上海微电子装备（集团）股份有限公司 | Vacuum adsorption hand, substrate handing-over device and photoetching machine |
| CN118107004B (en) * | 2024-04-28 | 2024-07-09 | 德瑞精工（深圳）有限公司 | ZR shaft manipulator |
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| JP3583400B2 (en) * | 2001-11-19 | 2004-11-04 | タカノ株式会社 | Clamping device, table provided with clamping device, and coupling device |
| JP5199777B2 (en) * | 2008-08-04 | 2013-05-15 | 株式会社ディスコ | Cutting equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102129175A (en) * | 2010-01-19 | 2011-07-20 | 上海微电子装备有限公司 | Rotating platform supported by air flotation |
| CN201732777U (en) * | 2010-05-21 | 2011-02-02 | 上海微电子装备有限公司 | Compound air flotation device and silicon wafer stage moving device with same |
| CN102569151A (en) * | 2010-12-30 | 2012-07-11 | 上海微电子装备有限公司 | Silicon wafer mechanical hand |
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