CN103862468B - Wafer transport robot - Google Patents
Wafer transport robot Download PDFInfo
- Publication number
- CN103862468B CN103862468B CN201210550707.0A CN201210550707A CN103862468B CN 103862468 B CN103862468 B CN 103862468B CN 201210550707 A CN201210550707 A CN 201210550707A CN 103862468 B CN103862468 B CN 103862468B
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- column
- slide rail
- screw rod
- hole
- screw
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Abstract
The present invention is a kind of wafer transport robot, wherein comprises: the ball screw driving a column to run and linear slide rail; An extension line is extended by the center of the screw rod of this ball screw, an extension line is extended by the center of the slide rail of this linear slide rail, two these extension lines meet at a bit, this point is about overlapping with the central point of this column, and the angle of two these extension lines approximates 90 degree, by the configuration relation of this linear slide rail and ball screw, the moment produced during to be reduced in and to drive this column, and the running precision of this column is promoted.
Description
Technical field
The present invention is a kind of industrial robot, espespecially a kind of wafer transport robot being applied to semiconductor industry.
Background technology
In order to reduce human cost and improve output in manufacture of semiconductor, utilize multiple robot to assist moving object, and such as the TaiWan, China special permission of the mechanism of existing common wafer transport robot discloses 2009-500865 patent, in this case, in the pedestal of robot, there is drive division, drive division is provided with a king-post, this drive division can drive this king-post to rotate, and this drive division connects with a ball screw and two linear slide rails respectively, and when driving this ball screw to run by linear drives portion, this drive division is driven to make Z-axis direction linear translation, and two these linear slide rails provide the function of guiding,
And aforementioned prior art has following problem points:
Because the relative position of this ball screw and linear slide rail is in the same plane, therefore the linear slide rail moment of bearing more greatly and also can draw and ring smooth degree when running to ball screw, another configuration of therefore planting pattern makes linear slide rail must use two, therefore add processing and the cost of parts of pedestal, extend the group vertical correction time-histories of ball screw and linear slide rail in addition, have necessity of improvement in fact.
Based on the problem points of above-mentioned prior art, the present inventor, after research improvement, has the invention of the object really reaching following invention to be born eventually.
Summary of the invention
The object of the invention is to provide a kind of wafer transport robot, and it has is convenient to the vertical and rigidity preferably column driving mechanism of group, to reduce the vertical cost of group and to promote quality.
In order to achieve the above object, solution of the present invention is:
A kind of wafer transport robot, comprises:
One pedestal, it comprises: a base plate, a riser and top board, this riser external form is the kenel of long strip type tabular, the two ends defining this length direction are respectively first end and the second end, this first end and the second end are fixed for this base plate and top board and form the structure kenel of a U-shaped respectively, and this top board is provided with a perforating;
One column, is arranged in this perforating, and can this perforating shift reciprocately relatively;
One ball screw, comprise: a screw rod and a nut, this screw rod extends to strip structure along a direction, defining this bearing of trend is direction of principal axis, the axial two ends of this screw rod are defined as first end and the second end respectively, this first end is fixed on this top board, and this second end is fixed on this base plate, and it is provided with spiral helicine first rolling channel; This nut is provided with the through hole worn for this screw rod, and the inner edge surface of this through hole is provided with the second rolling channel of this first rolling channel relatively, is provided with multiple first rolling member between this first rolling channel and the second rolling channel; This nut and this column link;
One linear slide rail, comprises: a slide rail and a slide block, and this slide rail extends to strip structure along a direction, and defining this bearing of trend is direction of principal axis, and this slide rail is fixed on this riser, and the direction of principal axis both sides of this slide rail are respectively equipped with the 3rd rolling channel; This slide block set is located at this slide rail and can be relatively run by this slide rail, and this slide block is provided with the 4th rolling channel of the 3rd rolling channel relatively, is provided with multiple second rolling member between the 3rd rolling channel and the 4th rolling channel; This slide block and this column link;
One power source, it is fixed on this base plate, and this power source is connected with the second end of this screw rod and drives this screw rod to rotate;
Wherein, extend an extension line by the center of this screw rod, extend an extension line by the center of this slide rail, two these extension lines meet at a bit, and this point is about overlapping with the central point of this column, and the angle of two these extension lines is 90 degree;
Wherein, when this screw rod rotates via the driving of this power source, make this slide block make linear displacement and drive this perforating displacement relatively of this column.
Further, riser opposite is provided with an auxiliary riser.
Further, more comprise one year seat, it is provided with a seat surface, run through the accommodating hole of this seat surface, a trepanning and one second mating surface, the bottom of this seat surface and this column links, the accommodation space of this accommodating hole relatively set by this column is arranged, and this second mating surface and the first mating surface set by this slide block are done to link; This spiro cap is located at this trepanning.
Further, more comprise a motor base and be fixed on this base plate, this motor base is provided with one second through hole, and this second through hole provides the axle center of this power source to wear wherein, and this axle center is provided with one first belt pulley.
Further, top board is more provided with an installing hole.
Further, more comprise a screw foot and diaxon bearing, this bearing base is fixed on this base plate, this screw foot is provided with one first through hole, two these bearing blocks are individually fixed in this installing hole and this screw foot, bearing is provided with in two these bearing blocks, this first end is arranged in the bearing block being fixed on this installing hole, after this second end is arranged in this first through hole, be located in the bearing block of this screw foot again and protrude out for this bearing block outside, the second end convexedly stretching in this bearing block outside is provided with this second belt pulley, this first belt pulley and the second belt pulley are by the sheathed connection of a belt.
Further, this power source relatively this accommodation space and accommodating hole is arranged, and when this column shrinks in this base interior, this power source has local can be placed in this accommodation space and accommodating hole.
Adopt after said structure, by the configuration relation of this linear slide rail with ball screw, the moment produced during to be reduced in this column of driving, and the running precision of this column is promoted.When this column shrinks in this base interior, this power source has local can be placed in this accommodation space and accommodating hole, so, can reduce the volume of this pedestal entirety, and simplify the structural design of this pedestal.
Accompanying drawing explanation
Fig. 1 is wafer transport robot system diagram of the present invention;
Fig. 2 is the column driving mechanism stereogram of wafer transport robot of the present invention;
Fig. 3 is wafer transport robot constitutional diagram of the present invention;
Fig. 4 is wafer transport robot top view of the present invention;
Fig. 5 is wafer transport robot actuator state figure of the present invention, for straight to sectional view;
Fig. 6 is wafer transport robot actuator state figure of the present invention, for straight to sectional view.
[primary clustering symbol description]
1 base plate 2 riser
3 top board 31 perforatings
32 installing holes 4 assist riser
5A ball screw 5B linear slide rail
50 screw rod 501 first rolling channels
502 first end 503 second ends
51 nut 511 through holes
512 second rolling channel 52 first rolling members
54 slide rails 541 the 3rd rolling channel
55 slide blocks 551 the 4th rolling channel
552 first mating surface 56 second rolling members
57 bearing block 6 years seats
61 accommodating hole 62 second mating surfaces
63 seat surface 64 trepannings
7A screw foot 71A first through hole
7B motor base 71B second through hole
8 power source 81 axles
9A first belt pulley 9B second belt pulley
10 belt A columns
A2 top, A1 bottom
A3 accommodation space A4 first motor
A5 second motor G screw
Z-direction Q angle
X pitch extension line Y slide rail center extension line
W column central point.
Detailed description of the invention
In order to explain technical scheme of the present invention further, below by specific embodiment, the present invention will be described in detail.
First, referring to Fig. 1 to Fig. 4 is a preferred embodiment of the present invention, and wafer transport robot of the present invention comprises: a pedestal, ball screw 5A, linear slide rail 5B, screw foot 7A, motor base 7B, power source 8, first belt pulley 9A, the second belt pulley 9B, belt 10, diaxon bearing 57, year seat 6, column A and multiple screw G;
This pedestal comprises: base plate 1, riser 2 and a top board 3, this riser 2 external form is the kenel of long strip type tabular, the length direction two ends of this riser 2 are combined with top board 3 with this base plate 1 respectively, and form the structure kenel of a ㄇ font, this top board 3 is provided with a perforating 31 and installing hole 32, in the present embodiment, the link between this base plate 1, top board 3 and riser 2 locks by multiple screw G, with in conjunction with this base plate 1, top board 3 and riser 2; In addition, in order to strengthen the rigidity of this pedestal, the present embodiment is provided with an auxiliary riser 4 in this riser 2 opposite, and this auxiliary riser 4 also locks by screw G with this base plate 1 and top board 3, this auxiliary riser 4, top board 3 and base plate 1 to be combined;
This column A, be arranged in this perforating 31, and can this perforating 31 shift reciprocately relatively, this column A has bottom A1 and top A2, this bottom A1 is arranged with an accommodation space A3, is provided with the first motor A4 and the second motor A5 above this accommodation space A3, this first motor A4 and the stacking setting of the second motor A5, and the driving shaft of this first motor A4 and the second motor A5 protrudes out to this top A2, link in order to not show to do with arm and this arm can be driven to get the function of thing and load;
This year seat 6, it is provided with a seat surface 63, runs through the accommodating hole 61 of this seat surface 63 and one second mating surface 62, this seat surface 63 and the bottom A1 of this column A link its mode of connection and screw G can be used both to be locked combine, after this bottom A1 is combined with this seat surface 63, relative this accommodation space A3 of this accommodating hole 61 is arranged, this second mating surface 62 and this first mating surface 552 set by slide block 55 are made to link its mode of connection and screw G can be used both to be locked combine, and this year seat 6 is provided with a trepanning 64, be C font structure in this trepanning 64 of the present embodiment;
This screw foot 7A and motor base 7B is all fixed on this base plate 1, this screw foot 7A is provided with one first through hole 71A, this motor base 7B is provided with one second through hole 71B, and this second through hole 71B provides the axle center 81 of this power source 8 to wear wherein, and this axle center 81 is provided with the first belt pulley 9A;
Two these bearing blocks 57 are individually fixed in this installing hole 32 and this screw foot 7A, are provided with bearing in two these bearing blocks 57;
This ball screw 5A, comprise: screw rod 50 and a nut 51, this screw rod 50 extends to strip structure along a direction, defining this bearing of trend is direction of principal axis Z, the two ends of the direction of principal axis Z of this screw rod 50 are defined as first end 502 and the second end 503 respectively, this first end 502 is arranged in the bearing block 57 being fixed on this installing hole 32, after this second end 503 is arranged in this first through hole 71A, be located in the bearing block 57 of this screw foot 7A again and protrude out for this bearing block 57 outside, the second end 503 convexedly stretching in this bearing block 57 outside is provided with this second belt pulley 9B as shown in the second figure, this the first belt pulley 9A and the second belt pulley 9B is by the sheathed connection of a belt 10, and rotate by this power source 8 outputting power to drive this screw rod 52, this screw rod 50 is provided with spiral helicine first rolling channel 501, this nut 51 is provided with the through hole 511 worn for this screw rod 50, and the inner edge surface of this through hole 511 is provided with the second rolling channel 512 of this first rolling channel 501 relatively, is provided with multiple first rolling member 52 between this first rolling channel 501 and the second rolling channel 512, this nut 51 is sheathed on this trepanning 64 and links its mode of connection with this year seat 6 and screw can be used both to be locked combine,
This linear slide rail 5B, comprise: slide rail 54 and a slide block 55, this slide rail 54 extends to strip structure along a direction, defining this bearing of trend is direction of principal axis Z, this slide rail 54 is fixed on this its mode of connection of riser 2 and screw G can be used both to be locked combination, the direction of principal axis Z both sides of this slide rail 54 are respectively equipped with the 3rd rolling channel 541, implement this slide rail 54 in this and use wide version type, compare down with prior art, slide rail 54 width of the present invention is that the width twice of the slide rail of prior art is large, therefore this slide rail 54 need only use one; This slide block 55 is sheathed on this slide rail 54 and can relatively runs by this slide rail 54, and this slide block 55 is provided with between the 4th rolling channel the 551, three rolling channel 541 of relatively the 3rd rolling channel 541 and the 4th rolling channel 551 and is provided with multiple second rolling member 56; This slide block 55 is provided with the first mating surface 552, and this first mating surface 552 and this second mating surface 62 can use screw G both to be locked in conjunction with its mode of connection and combine;
Finally, refer to shown in Fig. 5 and Fig. 6, for the state diagram of robot running, make this screw rod 50 rotate when this power source 8 gives screw rod 50 1 power, and drive this nut 51 and this year seat 6 linear displacement, this slide block 55 this slide rail 54 relative is made to make linear displacement, and this slide block 55 drives this to wear seat 6 and column A towards direction of principal axis Z displacement, what deserves to be explained is, relative this accommodation space A3 of power source 8 of the present invention and accommodating hole 61 are arranged, therefore when this column A shrinks in this base interior, this power source 8 has local can be placed in this accommodation space A3 and accommodating hole 61, so, the volume of this pedestal entirety can be reduced, and simplify the structural design of this pedestal.
Separately, refer to shown in Fig. 4, that is seen by top view extends an extension line X by the center of this screw rod 50, separately extend an extension line Y by the center of this slide rail 54, two extension lines meet at a bit, and this point is about overlapping with the central point W of this column A, and the angle Q of two these extension lines approximates 90 degree, by the configuration relation of this linear slide rail and ball screw, the moment produced during to be reduced in and to drive this column, and the running precision of this column is promoted.
Clearly demonstrating implementation feature of the present invention for asking, below the present invention's comparatively prior art progress part and practical way being described:
By the configuration relation of this linear slide rail and ball screw, the moment produced during to be reduced in and to drive this column, and the running precision of this column is promoted.When this column shrinks in this base interior, this power source has local can be placed in this accommodation space and accommodating hole, so, can reduce the volume of this pedestal entirety, and simplify the structural design of this pedestal.
Above-described embodiment and graphic and non-limiting product form of the present invention and style, any person of an ordinary skill in the technical field, to its suitable change done or modification, all should be considered as not departing from patent category of the present invention.
Claims (6)
1. a wafer transport robot, is characterized in that, comprises:
One pedestal, it comprises: a base plate, a riser and top board, this riser external form is the kenel of long strip type tabular, the two ends defining this riser length direction are respectively first end and the second end, this first end and the second end are fixed for this base plate and top board and form the structure kenel of a U-shaped respectively, and this top board is provided with a perforating;
One column, is arranged in this perforating, and can this perforating shift reciprocately relatively;
One ball screw, comprise: a screw rod and a nut, this screw rod extends to strip structure along a direction, defining this bearing of trend is direction of principal axis, the axial two ends of this screw rod are defined as first end and the second end respectively, the first end of this screw rod is fixed on this top board, and the second end of this screw rod is fixed on base plate, and it is provided with spiral helicine first rolling channel; This nut is provided with the through hole worn for this screw rod, and the inner edge surface of this through hole is provided with the second rolling channel of relative first rolling channel, is provided with multiple first rolling member between this first rolling channel and the second rolling channel; Nut is connected with column;
One linear slide rail, comprises: a slide rail and a slide block, and this slide rail extends to strip structure along a direction, and defining this bearing of trend is direction of principal axis, and this slide rail is fixed on this riser, and the direction of principal axis both sides of this slide rail are respectively equipped with the 3rd rolling channel; This slide block set is located at this slide rail and can be relatively run by slide rail, and this slide block is provided with the 4th rolling channel of the 3rd rolling channel relatively, is provided with multiple second rolling member between the 3rd rolling channel and the 4th rolling channel; This slide block is connected with this column;
One power source, it is fixed on base plate, and this power source is connected with the second end of this screw rod and drive screw rotates;
One motor base is fixed on this base plate, and this motor base is provided with one second through hole, and this second through hole provides the axle center of this power source to wear wherein, and this axle center is provided with one first belt pulley;
Wherein, extend an extension line from the center of this screw rod toward the center position of column, extend an extension line from the center of this slide rail toward the center position of column, two extension lines meet at a bit, this point is overlapping with the central point of this column, and the angle of two these extension lines is 90 degree;
Wherein, when this screw rod rotates via the driving of this power source, make this slide block make linear displacement and drive this perforating displacement relatively of this column.
2. wafer transport robot as claimed in claim 1, is characterized in that: this riser opposite is provided with an auxiliary riser.
3. wafer transport robot as claimed in claim 1, it is characterized in that: more comprise one year seat, it is provided with a seat surface, run through the accommodating hole of this seat surface, a trepanning and one second mating surface, this seat surface is connected with the bottom of this column, the accommodation space of this accommodating hole relatively set by this column is arranged, and this second mating surface and the first mating surface set by this slide block connect; This spiro cap is located at this trepanning.
4. wafer transport robot as claimed in claim 1, is characterized in that: this top board is more provided with an installing hole.
5. wafer transport robot as claimed in claim 4, it is characterized in that: more comprise a screw foot and diaxon bearing, this screw foot is fixed on this base plate, this screw foot is provided with one first through hole, two these bearing blocks are individually fixed in this installing hole and this screw foot, bearing is provided with in two these bearing blocks, the first end of this screw rod is arranged in the bearing block being fixed on this installing hole, after second end of this screw rod is arranged in this first through hole, be located in the bearing block of this screw foot again and protrude out for this bearing block outside, the second end convexedly stretching in this bearing block outside is provided with one second belt pulley, this first belt pulley is connected by a belt is sheathed with the second belt pulley.
6. wafer transport robot as claimed in claim 3, is characterized in that: this power source relatively this accommodation space and accommodating hole is arranged, and when this column shrinks in this base interior, this power source has local can be placed in this accommodation space and accommodating hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210550707.0A CN103862468B (en) | 2012-12-18 | 2012-12-18 | Wafer transport robot |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210550707.0A CN103862468B (en) | 2012-12-18 | 2012-12-18 | Wafer transport robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103862468A CN103862468A (en) | 2014-06-18 |
| CN103862468B true CN103862468B (en) | 2016-03-30 |
Family
ID=50901792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210550707.0A Active CN103862468B (en) | 2012-12-18 | 2012-12-18 | Wafer transport robot |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103862468B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5273381A (en) * | 1990-10-25 | 1993-12-28 | Thk Co., Ltd. | Ball screw guide unit and transporting table using the same |
| US5598043A (en) * | 1993-04-13 | 1997-01-28 | Nsk Ltd. | Dust-proof structure for a linear motion actuator |
| CN2415208Y (en) * | 2000-03-22 | 2001-01-17 | 上银科技股份有限公司 | Ball-screw with spacer |
| CN2463108Y (en) * | 2001-02-19 | 2001-12-05 | 上银科技股份有限公司 | High-load guiding actuating platform |
| CN1344194A (en) * | 1999-01-15 | 2002-04-10 | 阿西斯特技术公司 | Workpiece handling robot |
| CN101689525A (en) * | 2008-01-31 | 2010-03-31 | 佳能安内华股份有限公司 | Vacuum transportation device |
-
2012
- 2012-12-18 CN CN201210550707.0A patent/CN103862468B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5273381A (en) * | 1990-10-25 | 1993-12-28 | Thk Co., Ltd. | Ball screw guide unit and transporting table using the same |
| US5598043A (en) * | 1993-04-13 | 1997-01-28 | Nsk Ltd. | Dust-proof structure for a linear motion actuator |
| CN1344194A (en) * | 1999-01-15 | 2002-04-10 | 阿西斯特技术公司 | Workpiece handling robot |
| CN2415208Y (en) * | 2000-03-22 | 2001-01-17 | 上银科技股份有限公司 | Ball-screw with spacer |
| CN2463108Y (en) * | 2001-02-19 | 2001-12-05 | 上银科技股份有限公司 | High-load guiding actuating platform |
| CN101689525A (en) * | 2008-01-31 | 2010-03-31 | 佳能安内华股份有限公司 | Vacuum transportation device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103862468A (en) | 2014-06-18 |
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