CN103861853A - Charge type precise automatic liquid supplementing system and liquid supplementing method of automatic liquid supplementing system - Google Patents
Charge type precise automatic liquid supplementing system and liquid supplementing method of automatic liquid supplementing system Download PDFInfo
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- CN103861853A CN103861853A CN201410107057.1A CN201410107057A CN103861853A CN 103861853 A CN103861853 A CN 103861853A CN 201410107057 A CN201410107057 A CN 201410107057A CN 103861853 A CN103861853 A CN 103861853A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention provides a charge type precise automatic liquid supplementing system for silicon chip washing. The charge type precise automatic liquid supplementing system comprises a high-position liquid storage tank, wherein a liquid conveying pipeline with a first pneumatic valve and a liquid supplementing pipe with a second pneumatic valve are arranged at the bottom of the high-position liquid storage tank, a small quantitative pipe is arranged beside the high-position liquid storage tank, the bottom of the small quantitative pipe is provided with a small-dosage liquid supplementing pipe with a fourth pneumatic valve, the third pneumatic valve is connected between an input opening of the second pneumatic valve and an input opening of the fourth pneumatic valve, a plurality of detection liquid levels with volume marks are respectively arranged in the high-position liquid storage tank and the small quantitative pipe, the highest detection liquid level of the high-position liquid storage tank is higher than the highest detection liquid level of the small quantitative pipe, and the volume formed by the differences between the two highest defection liquid levels in an inner cavity of the high-position liquid storage tank is greater than or equal to the volume of the highest detection liquid level in the small quantitative pipe. The four pneumatic values and detection sensors used for each detection liquid level of the high-position liquid storage tank and the small quantitative pipe are connected with one controller. The invention also discloses an automatic liquid supplementing method. Through multi-point liquid level detection, various supplementing addition quantities can be obtained through combination, and each kind of supplementing addition quantity can reach the precision being +/-1.5 percent.
Description
Technical field
The present invention relates to solar energy cleaning equipment and wet processing apparatus, relate in particular to accurate automatic liquid supply system and liquid replenishing method thereof that a kind of polysilicon chip being applied in photovoltaic industry cleans.
Background technology
Traditional manufacture of solar cells equipment, in silicon chip production process, add a certain amount of liquid need to reactive tank regular replenishment, such as every production 50 silicon chips need add the liquid of 100ml.Be all generally to adopt a high-order fluid reservoir at present, fluid infusion is flowed out from this high position fluid reservoir, then adopts flowmeter metering or metering computing time or similar mode to measure fluid infusion, is the typical metering method flowing out of controlling.These fluid infusion modes all have some common shortcomings: the size, fluid temperature, the pipe that are vulnerable to the compressed air pressure of by-pass valve control in pipeline hinder the impact of factors such as (pipe blockings or different in size), thereby have restricted the precision of whole fluid infusion system.
Therefore, the factors such as compressed air pressure size, fluid temperature, pipe resistance of improving affect the fluid infusion precision in reactive tank, are technical problems urgently to be resolved hurrily in the industry.
Summary of the invention
The present invention, in order to solve the problems of the technologies described above, provides a kind of accurate automatic liquid supply system and liquid replenishing method thereof that can improve Wafer Cleaning production efficiency.
The accurate automatic liquid supply system of a kind of surplus-returning type that the present invention proposes, it comprises: be located at the high-order fluid reservoir of heavy dose of fluid infusion of reactive tank top, the bottom of this high position fluid reservoir is provided with the liquid-transport pipe-line with the first pneumatic operated valve.The bottom of described high-order fluid reservoir is provided with the liquid supplementation pipe with the second pneumatic operated valve, the other little quantity tube that is provided with a low dose of fluid infusion of high-order fluid reservoir, little quantity tube bottom is provided with the low dose of liquid supplementation pipe with the 4th pneumatic operated valve, and the 3rd pneumatic operated valve is connected between described the second pneumatic operated valve input port and the input port of the 4th pneumatic operated valve and by liquid supplementation pipe and low dose of liquid supplementation pipe UNICOM;
In described high-order fluid reservoir, be provided with from high to low multiple detection liquid levels with volumetric marks, in little quantity tube, be provided with from high to low multiple detection liquid levels with volumetric marks, the highest detection liquid level of high-order fluid reservoir is higher than the highest detection liquid level of little quantity tube, and the volume that the difference of the highest detection liquid level of high-order fluid reservoir and the highest detection liquid level of little quantity tube forms in high-order storage tank interior is more than or equal to the volume of highest detection liquid level in little quantity tube;
Described first, second, third and fourth pneumatic operated valve, be connected with a controller for the detecting sensor of each detection liquid level of high-order fluid reservoir and little quantity tube.
Preferably, in described high-order fluid reservoir, be provided with from high to low four and detect liquid level, be respectively the highest detection liquid level of volumetric marks 5L, the second detection liquid level of volumetric marks 4L, the 3rd detection liquid level of volumetric marks 3L and the lowest detection liquid level of volumetric marks 1L; In described little quantity tube, be provided with from high to low three and detect liquid level, be respectively the highest detection liquid level of volumetric marks 100mL, the middle detection liquid level of volumetric marks 50mL and the low detection liquid level that volumetric marks is zero.
The present invention also proposes the liquid replenishing method of the accurate automatic liquid supply system of a kind of surplus-returning type, and its step is as follows:
Step 1: close described liquid supplementation pipe, also close between liquid supplementation pipe and low dose of liquid supplementation pipe, by described liquid-transport pipe-line, liquid is transported in described high-order fluid reservoir, until liquid liquid level arrives after highest detection liquid level, stop liquid and carry;
Step 2: amount of liquid medicine that need to be supplementary according to described reactive tank, first detected the volumetric marks of liquid level by described high-order fluid reservoir and cooperation, and carry out strong dose liquid by described liquid supplementation pipe reactive tank downwards and supplement, liquid-transport pipe-line is closed, and between liquid supplementation pipe and low dose of liquid supplementation pipe, also closes;
Adopt continuously step 1 and step 2 to carry out strong dose liquid and supplement, until described high-order fluid reservoir can not detect the required low dose of fluid infusion of the volumetric marks accurate-metering of liquid level by it time;
Step 3: repeating step 1, then by described high-order fluid reservoir and little quantity tube UNICOM, high-order fluid reservoir is flowed in little quantity tube, until liquid rises to the highest detection liquid level of little quantity tube;
Step 4: need the low dose of liquid supplementing according to described reactive tank residue, again by described little quantity tube and detect the volumetric marks of liquid level, and carry out low dose of liquid by low dose of liquid supplementation pipe reactive tank downwards and supplement, between described liquid supplementation pipe and low dose of liquid supplementation pipe, close;
Adopt continuously step 3 and step 4 to carry out low dose of liquid and supplement, until complete supplementing of required amount of liquid medicine;
Inputing or outputing by first, second, third and fourth pneumatic operated valve and detecting sensor described in described controller control of described high-order fluid reservoir, little quantity tube liquid carried out automatically.
The present invention adopts two complementary methods of complementary medicine liquid tank of size, and the liquid level of two medicine liquid tanks is fixed, to prior art " precision (control liquid and flow out to the precision in reactive tank) of controlling out " is changed into " precision (control liquid and add the precision in complementary flow container to) of controlling ".As long as effectively control the precision that liquid adds complementary medicine liquid tank to, liquid flows out only needs all drained (or Selection and Constitute or automation change), thereby reach the effect of accurate automatic liquid supply, so make that solar silicon wafers cleaning conversion efficiency does higher.
Compared with prior art, tool of the present invention has the following advantages:
1, by this system, avoid traditional fluid infusion mode to be subject to the restriction of many on-the-spot objective condition, only need control the liquid that is added to high-order fluid reservoir or little quantity tube, just can reach more accurate fluid infusion requirement.
2, detect by multiple spot liquid level, can combine and obtain various additional amounts, and all can reach ± 1.5% precision of every kind of additional amount.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of preferred embodiment automatic liquid supply system of the present invention.
The specific embodiment
As shown in Figure 1, the accurate automatic liquid supply system of a kind of surplus-returning type that preferred embodiment of the present invention provides, comprise be located at reactive tank top for heavy dose supplement the high-order fluid reservoir 1 of liquid, the bottom of this high position fluid reservoir is provided with the liquid-transport pipe-line 3 with the first pneumatic operated valve V01 and the liquid supplementation pipe with the second pneumatic operated valve V02 4.The other parallel little quantity tube 2 that is provided with a low dose of fluid infusion of high-order fluid reservoir 1, little quantity tube 2 bottoms are provided with the low dose of liquid supplementation pipe 5 with the 4th pneumatic operated valve V04, the 3rd pneumatic operated valve V03 is connected between the second pneumatic operated valve V02 input port and the input port of the 4th pneumatic operated valve V04, and by liquid supplementation pipe 4 and low dose of liquid supplementation pipe 5 UNICOMs.
In high-order fluid reservoir 1, be provided with from high to low multiple detection liquid levels with volumetric marks, in little quantity tube 2, be also provided with from high to low multiple detection liquid levels with volumetric marks, the highest detection liquid level A of high-order fluid reservoir 1 is higher than the highest detection liquid level X of little quantity tube 2.The volume that the difference L of the high-order highest detection liquid level A of fluid reservoir 1 and the highest detection liquid level X of little quantity tube 2 forms at high-order fluid reservoir 1 inner chamber is more than or equal to the volume of the interior highest detection liquid level of little quantity tube 2 X.First, second, third and fourth pneumatic operated valve, be connected with a controller for the detecting sensor of each detection liquid level of high-order fluid reservoir 1 and little quantity tube 2.
As shown in Figure 1, in the present embodiment, in high-order fluid reservoir 1, be provided with from high to low four and detect liquid levels, be respectively the second lowest detection liquid level D that detects the 3rd of liquid level B, volumetric marks 3L and detect liquid level C and volumetric marks 1L of highest detection liquid level A, the volumetric marks 4L of volumetric marks 5L.In little quantity tube 2, be provided with from high to low three and detect liquid levels, be respectively the middle detection liquid level Y of highest detection liquid level X, volumetric marks 50mL of volumetric marks 100mL and the low detection liquid level Z that volumetric marks is zero.Excessive for preventing carrying liquid, and the safety of assurance container is also provided with a protection and detects liquid level H on the highest detection liquid level A of high-order fluid reservoir 1, high-order fluid reservoir 1 and little quantity tube 2 tops are also provided with overflow pipe 6.Malfunctioning for preventing pneumatic operated valve, on liquid-transport pipe-line 3 below the first pneumatic operated valve V01, be also provided with the first hand-operated valve S01, also be provided with the second hand-operated valve S02 near in the liquid supplementation pipe 4 of high-order fluid reservoir 1, the left end of the 3rd pneumatic operated valve V03 is connected in the liquid supplementation pipe 4 between the second pneumatic operated valve V02 and the second hand-operated valve S02.Detecting sensor can adopt the one of photoelectric sensor, capacitance type sensor, ultrasonic liquid level sensor.
The liquid replenishing method of the accurate automatic liquid supply system of surplus-returning type that the embodiment of the present invention proposes, its step following (please refer to Fig. 1):
Step 1: close liquid supplementation pipe 4 by the second pneumatic operated valve V02, close the UNICOM between liquid supplementation pipe 4 and low dose of liquid supplementation pipe 5 by the 3rd pneumatic operated valve V03, by liquid-transport pipe-line 3, liquid is transported in high-order fluid reservoir 1, until liquid liquid level arrives after highest detection liquid level A, close the first pneumatic operated valve V01 and stop liquid conveying.
Step 2: amount of liquid medicine that need to be supplementary according to silicon material processing technology reactive tank, is first detected the volumetric marks of liquid level and is carried out strong dose liquid by liquid supplementation pipe 4 reactive tank downwards and supplement by high-order fluid reservoir 1 and cooperation.Liquid-transport pipe-line 3 is now closed, and between liquid supplementation pipe 4 and low dose of liquid supplementation pipe 5, also closes.
In the present embodiment, in high-order fluid reservoir 1, be provided with volumetric marks 5L(liter) the second lowest detection liquid level D that detects the 3rd of liquid level B, volumetric marks 3L and detect liquid level C and volumetric marks 1L of highest detection liquid level A, volumetric marks 4L.Each heavy dose of fluid infusion can only detect liquid level from downward certain of highest detection liquid level A to be carried out, i.e. A → B, A → C, A → D.When amount more than reactive tank demand fluid infusion 1L, such as fluid infusion 4L, first to the interior interpolation liquid of high-order fluid reservoir 1 5L, liquid level is arrived after highest detection liquid level A, then supplement liquid to reactive tank, until liquid level while dropping to D point (1L position), stops fluid infusion.Now supplement liquid 4L to reactive tank.Then, close the second pneumatic operated valve V02, again open the first pneumatic operated valve V01, continue to infuse to high-order fluid reservoir 1, the position that makes liquid level arrive 5L stops, so that fluid infusion again.In like manner, also can supplement 1L(at every turn and make highest detection liquid level A drop to the second detection liquid level B), or supplementary 2L(makes highest detection liquid level A drop to the 3rd detection liquid level C).In the time that the amount infused of demand is the multiple of above volume, repeatedly repeat above action.
Adopt continuously step 1 and step 2 to carry out strong dose liquid and supplement, until can not be by the required low dose of fluid infusion of the volumetric marks accurate-metering of the detection liquid level of high-order fluid reservoir 1 time.
Step 3: repeating step 1, the position of liquid level arrival 5L in high-order fluid reservoir 1 is stopped, open again the 3rd pneumatic operated valve V03 by high-order fluid reservoir 1 and little quantity tube 2 UNICOMs, high-order fluid reservoir 1 is flowed in little quantity tube 2, until liquid rises to the highest detection liquid level X of little quantity tube 2.
In the present embodiment, in little quantity tube 2, be provided with volumetric marks 100mL(milliliter) the middle detection liquid level Y of highest detection liquid level X, volumetric marks 50mL and the low detection liquid level Z that volumetric marks is zero.
Step 4: need the low dose of liquid supplementing according to reactive tank residue, again by little quantity tube 2 and detect the volumetric marks of liquid level, and carry out low dose of liquid by low dose of liquid supplementation pipe 5 reactive tank downwards and supplement, now between liquid supplementation pipe 4 and low dose of liquid supplementation pipe 5, close.When low dose of below reactive tank demand fluid infusion 1L, each fluid infusion can only downward certain of highest detection liquid level X from little quantity tube 2 detects liquid level to be carried out, i.e. X → Y, X → Z.Such as fluid infusion 100 mL, first to interior interpolation liquid 100 mL of little quantity tube 2, liquid level is arrived after highest detection liquid level X, then supplement liquid to reactive tank, until the liquid level in little quantity tube 2 while dropping to Z point (0 mL position), stops fluid infusion.Now supplement liquid 100mL to reactive tank.In the time of the amount of reactive tank demand fluid infusion 150ml, can adopt said method, first fluid infusion for the first time 100 ml, then make liquid level in little quantity tube 2 from highest detection liquid level X to detection liquid level Y dropping to, 50 ml of fluid infusion for the second time.
Adopt continuously step 3 and step 4 to carry out low dose of liquid and supplement, until complete supplementing of required amount of liquid medicine.In whole fluid infusion rules, high-order fluid reservoir 1, inputing or outputing by first, second, third and fourth pneumatic operated valve of controller control and detecting sensor of little quantity tube 2 liquids are carried out automatically, and the first hand-operated valve S01 and the second hand-operated valve S02 all open, when whenever necessary, then by manually closing or opening.
The present invention has avoided traditional fluid infusion mode to be subject to the restriction of many on-the-spot objective condition, only need control the liquid that is added to high-order fluid reservoir or little quantity tube, just can reach more accurate fluid infusion requirement.Detect by multiple spot liquid level, can combine and obtain various additional amounts, and all can reach ± 1.5% precision of every kind of amount.
Claims (6)
1. the accurate automatic liquid supply system of surplus-returning type, comprise the high-order fluid reservoir (1) of heavy dose of fluid infusion of being located at reactive tank top, the bottom of this high position fluid reservoir is provided with the liquid-transport pipe-line (3) with the first pneumatic operated valve (V01), it is characterized in that, the bottom of described high-order fluid reservoir (1) is provided with the liquid supplementation pipe (4) with the second pneumatic operated valve (V02), the other little quantity tube (2) that is provided with a low dose of fluid infusion of high-order fluid reservoir (1), little quantity tube (2) bottom is provided with the low dose of liquid supplementation pipe (5) with the 4th pneumatic operated valve (V04), the 3rd pneumatic operated valve (V03) is connected between described the second pneumatic operated valve (V02) input port and the input port of the 4th pneumatic operated valve (V04) and by liquid supplementation pipe (4) and low dose of liquid supplementation pipe (5) UNICOM,
In described high-order fluid reservoir (1), be provided with from high to low multiple detection liquid levels with volumetric marks, in little quantity tube (2), be provided with from high to low multiple detection liquid levels with volumetric marks, the highest detection liquid level (A) of high-order fluid reservoir (1) is higher than the highest detection liquid level (X) of little quantity tube (2), and the volume that poor (L) of the highest detection liquid level (A) of high-order fluid reservoir (1) and the highest detection liquid level (X) of little quantity tube (2) forms at high-order fluid reservoir (1) inner chamber is more than or equal to the volume of highest detection liquid level (X) in little quantity tube (2);
Described first, second, third and fourth pneumatic operated valve, be connected with a controller for the detecting sensor of each detection liquid level of high-order fluid reservoir (1) and little quantity tube (2).
2. the accurate automatic liquid supply system of surplus-returning type as claimed in claim 1, it is characterized in that, in described high-order fluid reservoir (1), be provided with from high to low four and detect liquid level, be respectively the highest detection liquid level (A) of volumetric marks 5L, the second detection liquid level (B) of volumetric marks 4L, the 3rd detection liquid level (C) of volumetric marks 3L and the lowest detection liquid level (D) of volumetric marks 1L; In described little quantity tube (2), be provided with from high to low three and detect liquid level, be respectively the highest detection liquid level (X) of volumetric marks 100mL, the middle detection liquid level (Y) of volumetric marks 50mL and the low detection liquid level (Z) that volumetric marks is zero.
3. the accurate automatic liquid supply system of surplus-returning type as claimed in claim 1; it is characterized in that; on the highest detection liquid level (A) of described high-order fluid reservoir (1), be also provided with a protection and detect liquid level (H), described high-order fluid reservoir (1) and little quantity tube (2) top are also provided with overflow pipe (6).
4. the accurate automatic liquid supply system of surplus-returning type as claimed in claim 1, is characterized in that, is also provided with the first hand-operated valve (S01) on described liquid-transport pipe-line (3), in described liquid supplementation pipe (4), is also provided with the second hand-operated valve (S02).
5. the accurate automatic liquid supply system of surplus-returning type as claimed in claim 1, is characterized in that, described detecting sensor is the one of photoelectric sensor, capacitance type sensor, ultrasonic liquid level sensor.
6. a liquid replenishing method for the accurate automatic liquid supply system of surplus-returning type as claimed in claim 1, it comprises the steps:
Step 1: close described liquid supplementation pipe (4), between liquid supplementation pipe (4) and low dose of liquid supplementation pipe (5), also close, by described liquid-transport pipe-line (3), liquid is transported in described high-order fluid reservoir (1), until liquid liquid level arrives after highest detection liquid level (A), stops liquid and carry;
Step 2: amount of liquid medicine that need to be supplementary according to described reactive tank, first detected the volumetric marks of liquid level by described high-order fluid reservoir (1) and cooperation, and carry out strong dose liquid by described liquid supplementation pipe (4) reactive tank downwards and supplement, liquid-transport pipe-line (3) is closed, and between liquid supplementation pipe (4) and low dose of liquid supplementation pipe (5), also closes;
Adopt continuously step 1 and step 2 to carry out strong dose liquid and supplement, until described high-order fluid reservoir (1) can not detect the required low dose of fluid infusion of the volumetric marks accurate-metering of liquid level by it time;
Step 3: repeating step 1, then by described high-order fluid reservoir (1) and little quantity tube (2) UNICOM, high-order fluid reservoir (1) is flowed in little quantity tube (2), until liquid rises to the highest detection liquid level (X) of little quantity tube (2);
Step 4: need the low dose of liquid supplementing according to described reactive tank residue, again by described little quantity tube (2) and detect the volumetric marks of liquid level, and carry out low dose of liquid by low dose of liquid supplementation pipe (5) reactive tank downwards and supplement, between described liquid supplementation pipe (4) and low dose of liquid supplementation pipe (5), close;
Adopt continuously step 3 and step 4 to carry out low dose of liquid and supplement, until complete supplementing of required amount of liquid medicine;
Inputing or outputing by first, second, third and fourth pneumatic operated valve and detecting sensor described in described controller control of described high-order fluid reservoir (1), little quantity tube (2) liquid carried out automatically.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410107057.1A CN103861853B (en) | 2014-03-21 | 2014-03-21 | A kind of accurate automatic liquid supply system of surplus-returning type and liquid replenishing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410107057.1A CN103861853B (en) | 2014-03-21 | 2014-03-21 | A kind of accurate automatic liquid supply system of surplus-returning type and liquid replenishing method thereof |
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| CN103861853A true CN103861853A (en) | 2014-06-18 |
| CN103861853B CN103861853B (en) | 2015-12-16 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107731713A (en) * | 2017-09-26 | 2018-02-23 | 南通华林科纳半导体设备有限公司 | A kind of black silicon making herbs into wool etching-cleaning machine of convenient supplement acid solution |
| WO2019090925A1 (en) * | 2017-11-09 | 2019-05-16 | 常州捷佳创精密机械有限公司 | Liquid addition system and method |
| CN111169941A (en) * | 2020-01-19 | 2020-05-19 | 江苏中烟工业有限责任公司 | Quantitative pipe flow control method based on different material height conversion rates |
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| CN111169941A (en) * | 2020-01-19 | 2020-05-19 | 江苏中烟工业有限责任公司 | Quantitative pipe flow control method based on different material height conversion rates |
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| CN103861853B (en) | 2015-12-16 |
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