JPH0938589A - Chemical liquid weighing instrument for automatic washing machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a chemical liquid weighing instrument for an automatic washer which can be supplemented with a chemical liquid correctly, is free from the deterioration of parts, and can reduce maintenance costs. SOLUTION: This chemical liquid weighing instrument for an automatic washer, in which two or more kinds of chemical liquids are weighed by respective weighing tanks 2, and the liquids are mixed to be used in washing, is equipped with a measuring container 6 for chemical liquid supplement which is arranged for the chemical liquid to overflow when a prescribed amount of it is stored, a supply valve 4 connected with both upper and lower parts of the measuring container 6, and a supplement liquid feed valve 7. The chemical liquid supplied from the valve 4 is stored in the measuring container 6, the excess chemical liquid overflows, and the chemical liquid in the container 6 is fed into a treatment tank 1 from the valve 7.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid weighing device for an automatic cleaning machine for semiconductors and the like, and more specifically, in an automatic cleaning machine using a mixed solution of two or more kinds of chemical solutions, the mixing ratio thereof is kept at an appropriate value. The present invention relates to a chemical solution weighing device for an automatic washing machine, which is suitable for replenishing each chemical solution.

[0002]

2. Description of the Related Art In the case of using a mixed solution of two or more kinds of chemicals in an automatic washing machine for semiconductors, etc., the solution has such a property that the mixing ratio changes due to a chemical reaction, and the mixture is used for the purpose of use. It is necessary to keep the ratio at a proper value. In this case, the following specifications are required. (1) There is a weighing tank for each chemical solution for preparing a mixed solution. (2) There is a replenishment function of each chemical solution for keeping the mixing ratio of the mixed solution constant. The problem here is (2) above.
The following two methods are known. (2-a) Replenishment method by pump (2-b) Method using a weighing tank with a level sensor for replenishment

FIG. 4 shows a schematic structure of the replenishment method (2-a). In FIG. 4, two weighing tanks 2 (for two kinds of mixed solutions) for weighing each chemical solution are provided above the processing tank 1 of the automatic washing machine in which the mixed solution is stored. A charging valve 3 is provided in the lower part of 2, and a supply valve 4 is provided in the upper part thereof, and a pump 5 is connected to each weighing tank 2. The operation interval of the pump 5 is set by a timer or the like, and thus the interval at which each chemical solution is replenished in the processing tank 1 is set. Further, the replenishment amount of the chemical solution to the processing tank 1 is determined by the time when the pump 5 operates. That is, a graph showing the relationship between the pump operating time and the amount of replenishment of the chemical liquid is created and used as a guide for the amount of the replenishment of the chemical liquid. The pump 5 operates regardless of the amount of the chemical liquid in the weighing tank 2.

FIG. 5 shows a schematic configuration of the method (2-b). In FIG. 5, the supply and supply valves 3,
4, the operation interval is set by a timer or the like, and thereby the replenishment interval of each chemical solution to the processing tank 1 is set.
The weighing tank 2 is provided with a level sensor 12, which detects the weighing quantitative level L1, the replenishment level L2, and the weighing empty level L3 from above.

The replenishing device of FIG. 5 operates as follows. When the supply valve 4 is opened (the closing valve 3 is closed at this time), the chemical solution is supplied to the weighing tank 2, and when the chemical solution reaches the fixed amount level L1, the level sensor 12 detects this and the supply valve 4 is closed. The charging valve 3 is opened and the chemical solution is charged into the processing tank 1.

When the chemical reaches the replenishment level L2, the level sensor 12 detects this and the closing valve 3 is closed.
This operation is a normal replenishing operation for keeping the mixing ratio of the mixed liquid at an appropriate value, and this replenishing operation is repeated thereafter. It operates as follows when exchanging chemicals. When the chemical reaches the quantitative level and the level sensor 12 detects it, the supply valve 4 is closed, the injection valve 3 is opened, and the chemical is treated in the treatment tank 1.
When the chemical reaches the empty space level L3, the level sensor 12 detects this and the injection valve 3 is closed to return to the normal replenishing operation.

[0007]

However, in the replenishment method (2-a) shown in FIG. 4, the pump operation time-
Since the relationship of the chemical liquid replenishment amount changes due to variations in pump performance, deterioration of the pump, etc., the chemical liquid replenishment amount becomes inaccurate. Further, there is a problem that the cost and maintenance cost of the pump are required, and a space for installing the pump is required.

In the replenishment method (2-b) shown in FIG. 5, most of the problems (2-a) are solved, but the level sensor 12 for determining the replenishment amount is a pressure type or an optical type. Therefore, it is inevitable that the replenishment amount varies depending on the sensor performance.

The present invention has been made by paying attention to the above points, and by using a replenishment measuring container, an accurate amount of chemical liquid can be replenished, and maintenance costs can be reduced without deterioration of parts and the like, and automatic cleaning. An object of the present invention is to provide a chemical liquid weighing device for a machine.

[0010]

In order to achieve the above-mentioned object, the present invention is an automatic washing machine which weighs a plurality of kinds of chemical liquids in respective weighing tanks and mixes the chemical liquids to use for washing a substance. A measuring device for replenishing a chemical liquid, wherein each of the measuring tanks is configured to overflow when a predetermined amount of the chemical liquid is stored, and connected to an upper part and a lower part of the measuring container for replenishing the chemical liquid, respectively. The supply valve and the replenishing liquid supply valve, and the supply valve and the replenishing liquid are detected by detecting that the chemical liquid stored in the chemical liquid replenishment measuring container has reached the replenishment quantitative level and the chemical liquid has reached the replenishment empty level. And a level sensor that outputs a signal for opening and closing the closing valve.

Further, the present invention is characterized in that the chemical liquid overflowing from the chemical liquid replenishing measuring container flows into the weighing tank. Further, in the present invention, the chemical solution replenishing measuring container is integrally formed with the weighing tank, and the chemical solution of the chemical solution replenishing measuring container overflows and flows into the weighing tank through an opening formed in a side wall of the weighing tank. It is characterized by being configured as follows.
Further, in the present invention, the chemical solution replenishing measuring container is vertically movably attached to the weighing tank, and a distance between a bottom surface of the chemical solution replenishing measuring container and an opening formed in the weighing tank is variable. It is characterized in that the amount of the drug solution stored in the drug solution replenishing measuring container is adjusted by.
Further, according to the present invention, a pipe connected between the chemical solution replenishment measuring container and the replenisher solution injection valve is slidably attached to the chemical solution replenishment measuring container, and the pipe protrudes in the chemical solution replenishment measuring container. It is characterized in that the amount of the drug solution stored in the drug solution replenishing measuring container is adjusted by the height.

According to the present invention, when the supply valve is opened, the liquid medicine is supplied to the replenishment measuring container, and when the liquid medicine reaches the replenisher liquid fixed level, the supply valve is closed according to the detection signal of the level sensor and a small amount of the liquid medicine is supplied. Overflows from the replenishment measuring container, a fixed amount of the replenishing liquid is stored in the replenishing measuring container, and when the replenishing liquid feeding valve is opened, the fixed amount of the replenishing liquid is introduced into the processing tank.

Further, in the present invention, the chemical liquid overflowing from the chemical liquid replenishing measuring container flows into the weighing tank, and the chemical liquid is not wasted. Further, in the present invention, since the replenishing liquid measuring container is integrated with the weighing tank, the liquid medicine replenishing means can be compactly arranged and the installation space can be small. Further, in the present invention, the amount of the replenishing chemical solution stored in the chemical solution replenishing measuring vessel can be adjusted by moving the chemical solution replenishing measuring vessel up and down. Further, in the present invention, the amount of the replenishing chemical solution stored in the medicinal solution replenishing measuring container can be adjusted by moving the pipe of the replenishing solution feeding valve up and down to change the protruding height in the medicinal solution replenishing measuring container.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below based on an embodiment shown in the drawings. 1 and 2 show a first embodiment of the present invention.
An example is shown, and a weighing tank 2 for weighing each chemical solution is provided above the processing tank 1 of the automatic washing machine in which the mixed solution is stored.
2 (in case of 2 kinds of mixed liquid) are provided, and each weighing tank 2
An injection valve 3 is provided in the lower part of the. A measuring liquid replenishing measuring container 6 is provided on the side of each weighing tank 2, a supply valve 4 is connected to the upper portion of the liquid medicine replenishing measuring container 6, and a replenishing liquid charging valve 7 is connected to the lower portion thereof. As shown in FIG. 2, the chemical solution replenishing measuring container 6 is integrally formed with the weighing tank 2, and an opening 9 is formed in a partition wall 8 between the measuring tank 2 and the weighing tank 2.

The connection pipe 11 of the replenisher injection valve 7 is
It is slidably attached to the bottom surface 6a of the chemical solution replenishment measuring container 6 via a sealing material 13 such as an O-ring, and the height of the pipe 11 protruding in the chemical solution replenishment measuring container 6 allows the chemical solution replenishment to be performed. The amount of the replenisher solution accumulated in the measuring container 6 can be adjusted. Level sensors 14 and 15 are installed inside the weighing tank 2 and the chemical solution replenishment measuring container 6, respectively. The intervals at which the supply valve 3, the supply valve 4, and the replenisher supply valve 7 operate are preset by a timer or the like.

The replenishment operation of the chemical liquid is performed as follows. First, the supply valve 4 is opened to supply the drug solution to the drug solution replenishment measuring container 6. When the chemical level of the chemical replenishing measuring container 6 reaches the replenisher level L4 just before reaching the opening 9, the level sensor 14 detects this and the supply valve 4 is detected.
This detection signal is transmitted to and the supply valve 4 is closed after a preset delay time has elapsed. Therefore, until the level sensor 14 outputs a detection signal and the supply valve 4 is closed, the supply of the chemical liquid continues for a while, and a small amount of the chemical liquid remains in the opening 9.
Overflows and flows into the weighing tank 2. The replenishment liquid injection valve 7 is opened at a preset replenishment interval, and the chemical liquid in the replenishment measuring container 6 is introduced into the processing tank 1. Then, the chemical liquid level in the replenishment measuring container 6 is the replenishment empty level L.
When it reaches 5, the replenisher injection valve 7 closes and returns to the initial state. By repeating the above operation, each chemical solution is replenished in the processing tank 1.

Liquid exchange in the processing tank 1 is performed as follows.
First, the supply valve 4 is opened and the chemical liquid overflowing from the opening 9 is stored in the weighing tank 2. When the chemical liquid level in the weighing tank 2 reaches the weighed quantitative level L3, the level sensor 15 outputs a detection signal, and this signal causes the supply valve 4 to operate.
To close. In the above replenishing operation, the chemical liquid that overflows and is accumulated in the weighing tank 2 is taken in as a part of the fixed amount here and is not wasted. Also, when the chemical level in the weighing tank 2 reaches the weighed quantitative level L3,
The charging valve 3 is opened, and the chemical solution in the weighing tank 2 is transferred to the processing tank 1.
It is thrown into. When the liquid level in the weighing tank 2 reaches the empty level L3 for weighing, the closing valve 3 is closed by the signal from the level sensor 14, and the initial state is restored. afterwards,
It returns to the above-mentioned supplement operation.

As described above, in the chemical solution weighing device of the automatic cleaning machine of the first embodiment, the replenisher solution is measured in the chemical solution replenishment measuring container 6 and put into the processing tank 1, so that the quantitative determination is always accurate. The chemical solution can be added, and even if the chemical solution overflows due to an error of the level sensor 14 or the like, the chemical solution is stored in the weighing tank 2, so that the chemical solution is not wasted. Also, pipe 1
By moving 1 up and down, the amount of the liquid medicine accumulated in the liquid medicine replenishing measuring container 6 can be arbitrarily changed, and the amount of the liquid replenisher can be set arbitrarily.

FIG. 3 shows a second embodiment of the present invention. A sliding portion 16 is formed on the side of the weighing tank 2, and the chemical solution replenishing measuring container 6 is slidably attached to the sliding portion 16. An opening 17 is formed on the side of the measuring container 6 for replenishing the chemical liquid, and the opening 17 and the opening 9 of the weighing tank 2 communicate with each other. A seal material 18 is provided at a sliding portion between the weighing tank 2 and the chemical liquid replenishment measuring container 6.

In the second embodiment, the distance between the bottom surface 6a of the chemical liquid replenishing measuring container 6 and the opening 9 of the weighing tank 2 is changed by moving the chemical liquid replenishing measuring container 6 up and down.
The amount of the replenisher in the medicinal solution replenishing container 6 can be adjusted.

In the second embodiment, the chemical solution replenishing measuring container 6 is incorporated in the weighing tank 2, but the chemical solution replenishing measuring container 6 may be completely independent of the weighing tank 2.
In this case, it is preferable that the chemical liquid overflowing from the opening 17 of the chemical liquid replenishing measuring container 6 be received by another container or be put into the weighing tank 2 by a pipe or the like.

[0022]

As described in detail above, according to the present invention, since the chemical solution is measured in the replenishment measuring container, an accurate amount of the replenisher solution is always put into the processing tank, and the replenisher solution is measured. Since only the container is used and equipment such as a pump and a sensor is not used, there is no deterioration of parts and the maintenance cost can be reduced. Further, according to the present invention, the chemical liquid overflowing from the chemical liquid replenishing measuring container flows into the weighing tank, and the chemical liquid is not wasted. Further, according to the present invention, since the replenishing liquid measuring container is formed integrally with the weighing tank, the chemical liquid replenishing means can be compactly assembled and the installation space can be small. Further, in the present invention, the amount of the drug solution stored in the drug solution replenishing measuring container can be adjusted by moving the drug solution refilling measuring container up and down.
Further, in the present invention, the amount of the drug solution stored in the drug solution replenishment measuring container can be adjusted by moving the pipe of the injection valve up and down to change the protruding height in the drug solution refilling measuring container.

[Brief description of drawings]

FIG. 1 is an explanatory diagram showing a first embodiment of a chemical liquid weighing device for an automatic washing machine according to the present invention.

FIG. 2 is a vertical cross-sectional side view of a replenishing tank including a chemical liquid replenishing measuring container according to the first embodiment.

FIG. 3 is a vertical cross-sectional side view of a replenishment tank including a chemical liquid replenishment measuring container according to a second embodiment of the present invention.

FIG. 4 is an explanatory diagram showing an example of a chemical liquid weighing device of a conventional automatic cleaning machine.

FIG. 5 is an explanatory view showing another example of the chemical liquid weighing device of the conventional automatic cleaning machine.

[Explanation of symbols]

 1 Processing Tank 2 Weighing Tank 4 Supply Valve 6 Chemical Solution Replenishing Measuring Container 6a Bottom 7 Replenisher Injection Valve 9 Opening 11 Connection Pipe 15 Level Sensor

Claims (5)

[Claims] 1. A chemical liquid weighing device for an automatic washing machine, wherein a plurality of chemical liquids are weighed in respective weighing tanks, and the chemical liquids are mixed to be used for washing a substance. A metering container for replenishing a chemical solution configured to overflow when a fixed amount of the medicinal solution is stored; a supply valve and a replenishing solution injection valve respectively connected to an upper part and a lower part of the measuring container for refilling a chemical solution; A level sensor is provided, which detects that the chemical solution stored in the measuring container has reached a replenishment quantitative level and that the chemical solution has reached a replenishment empty level, and outputs a signal for opening and closing the supply valve and the replenishment solution input valve. A chemical liquid weighing device for an automatic washing machine, which is characterized in that 2. The chemical solution weighing device for an automatic washing machine according to claim 1, wherein the chemical solution overflowing from the chemical solution replenishing measuring container is configured to flow into the weighing tank. 3. The chemical solution replenishing measuring container is formed integrally with the weighing tank, and the chemical solution of the chemical liquid replenishing measuring container overflows and flows into the weighing tank through an opening formed in a side wall of the weighing tank. The chemical liquid weighing device for an automatic washing machine according to claim 1 or 2, which is configured as described above. 4. The chemical solution replenishing measuring container is vertically movably attached to the weighing tank, and a distance between a bottom surface of the chemical solution replenishing measuring container and an opening formed in the weighing tank is variable. The chemical solution weighing device for an automatic washing machine according to claim 1 or 2, wherein an amount of the chemical solution stored in the chemical solution replenishing container is adjusted. 5. A pipe connected between the chemical liquid replenishment measuring container and the replenisher liquid injection valve is slidably attached to the chemical liquid replenishment measuring container, and the projection height of the pipe in the chemical liquid replenishment measuring container is increased. The chemical solution weighing device for an automatic washing machine according to claim 1 or 2, wherein the quantity of the chemical solution stored in the chemical solution replenishing measuring container is adjusted accordingly.