KR101525428B1 - Precise and quantitative suppliance tank and suppliance apparatus using the same - Google Patents

Abstract

The present invention relates to a precise and quantitative supply tank and a precise and quantitative supply device using the same using a way of filling objects to be measured up to a full level so as to solve errors that an existing quantitative supply method using a quantitative pump has. According to the present invention, the precise and quantitative supply tank comprises: a housing having an outer wall of which top represents the full level; a receiving part formed inside the housing to store the object formed of liquid or powder; a bottom discharge part; and an upper weir part.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a precise quantitative supply tank,

The present invention relates to a precise quantitative supply tank and a precise quantitative supply apparatus using the same,

And more particularly, to a precise quantitative supply tank employing a method of filling a measured object up to a full level in order to solve an error problem of a quantitative supply method using a conventional quantitative pump and a precise quantitative supply device using the same.

Conventionally, a metering pump is mainly used to supply a fluid such as a liquid in a fixed amount.

The related art related to this is the patent registration No. 10-1255595 (registered on Apr. 04, 2013) [metering pump]

The above-mentioned patent is basically not using an elastic spring, so that it is easy to control the quantity, and it is possible to achieve a simple and stable structure compared to the conventional one. In the metering pump, the power of the motor is transmitted to the diaphragm, To a regulating device.

The patent discloses that the diaphragm is moved in a state in which the elastic force of the automatic return spring is excluded, thereby solving the problem that the range of the driving force is limited by the elastic force, and the quantity adjustment can be easily performed even without stopping the pump And provides power transmission to the diaphragm with a simple and stable structure that is not provided with an automatic return spring.

However, the conventional metering pump including this patent necessarily requires a difference in pumping force due to the continuous operation of the metering pump, and the metering is inevitably changed, and the error increases with the lapse of time due to wear of the connected piping.

In order to solve the problem of the conventional metering pump, a container-type (tank or container) type metering feeding method may be employed.

Regarding this, Patent Registration No. 10-0151077 (registered on June 17, 1998) [Automatic Regulated Quantity Feeder]

The above-mentioned patent relates to an automatic controlled quantity supply device capable of supplying a fixed quantity in accordance with a change in a mixed composition ratio,

In particular, the importance of the cleaning process is accelerating due to the high integration of semiconductor devices in the manufacturing process on the peninsula. However, the criterion for particle control becomes stricter, and the cleaning process for micro contamination such as organic matters, Current trends and the kinds of chemical solutions used in the cleaning process are diversified. In order to develop an efficient and optimized cleaning process, the composition control for maximizing the cleaning effect by mixing various chemical solutions has not only a cleaning effect Compared with the fact that the yield of the device is greatly influenced

In the microcontrolling of the existing chemical composition ratio, the aging of the metering pump and the change of the sensitivity of the level sensor at the time of long-term use do not meet the current trend of demanding the mixing ratio in which the quantitative supply method can not be changed due to the overflow. there is,

In order to solve the above problems, the patent discloses an automatic controlled quantity supply device capable of controlling a constant composition ratio of various chemical solutions as well as quantitative control according to various process conditions,

Specifically, the patent includes a metering chamber for receiving a solution supplied through a chemical solution supply pipe; An overflow pipe for draining the overflow solution of the metering chamber; A sensing sensor installed on the overflow pipe for sensing an amount of overflowing ozone; A fixed amount supply pipe for supplying the solution from the metering chamber to the process bath in a free-fall manner; A cylindrical core installed in the metering chamber and movable up and down; And an automatic control device for automatically adjusting the height of the cylindrical core according to an overflow amount of the detection sensor.

However, this patent does not disclose a solution to the problem that a minute error occurs when the water or the water-soluble solution or the like is full-level due to the surface tension, that is, a method of securing high precision.

In addition, Patent Registration No. 10-0592584 (date of registration June 15, 2006) (liquid dispensing device and liquid supply system and method of semiconductor manufacturing process using it)

This patent discloses a new liquid quantitative supply device of a new type capable of quantitative adjustment in accordance with a change in mixed composition ratio of various process conditions, and a liquid supply system and method of a semiconductor manufacturing process using the same.

In addition, in order to provide a new type liquid quantitative supply device capable of supplying a chemical liquid within a short period of time and having excellent precision and reproducibility, and a liquid supply system and method of a semiconductor manufacturing process using the same,

A metering chamber having a liquid chamber filled with liquid through the liquid inlet port and an outlet port through which the liquid filled in the liquid chamber flows out; And a quantitative adjustment member having a spacer movably installed in the liquid chamber.

However, this patent regulates the quantity through the spacer inserted into the liquid chamber, and its structure is complicated, and once the full level is filled, the quantification is controlled through the insertion of the spacer, It is necessary to introduce an outside air inflow path separately for the problem caused by the chemical solution remaining between the inner wall and the spacer or for discharging by the natural flow. Therefore, it has a complexity and error problem, It is a problem.

In addition, there is patent registration No. 10-0726246 (registered on June 01, 2007) [water wheel type fixed quantity supply device]

The patent discloses a water wheel-type fixed amount supply device that minimizes the sedimentation of solid matter at the bottom of the medicine inlet chamber due to the shape characteristics of the water storage tank, and can stably and economically use the aeration means.

However, the product based on this patent is suitable for a specific purpose, has a problem in general application, and its structure is also complicated.

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a precise quantitative supply tank employing a method of filling a measured object up to a full level in order to solve an error problem of a quantitative supply method using a conventional quantitative pump, and a precise quantitative supply device using the same The purpose.

Further, in order to prevent a minute error when a subject to be measured such as water or an aqueous solution is heated to a full level by surface tension or the like, a housing having an outer wall corresponding to a full level at the upper end is introduced, And to provide a precise quantitative supply tank and a precise quantitative supply apparatus using the same.

It is another object of the present invention to provide a precise quantitative supply tank capable of discharging the entire quantity of a subject to be measured by forming a sloped slope toward the discharge portion of the bottom portion of the housing and a precise quantity supply device using the same.

According to another aspect of the present invention, there is provided a lid at an upper end of an outer wall of a housing to prevent the occurrence of errors due to surface tension of a subject to be measured, and the receiving portion is partitioned by a partition wall, So that the problem of overflow due to the flow during filling of the subject and the delay in reaching the static state of the fluid to be measured can be excluded as much as possible, and a precise quantity supply device using the precise quantity supply tank.

It is another object of the present invention to provide a precise quantitative supply tank and a precise quantity supply device using the same, wherein the inner surface of the housing has a hydrophobic or hydrophilic coating layer so that the metered body does not stick to the outer wall of the housing, .

It is another object of the present invention to provide a precise quantitative supply tank capable of increasing the capacity of a subject to be measured through a separate capacity addition means without changing the size of one housing and a precise quantity supply device using the same.

In order to accomplish the above object, the precise quantity supply tank according to the present invention comprises:

A housing having an outer wall having an upper end corresponding to a full level,

A housing for storing a metered body made up of liquid or powder formed in the housing;

A bottom discharge portion,

And an upper swirl portion.

Further, in the precise quantity supply tank according to the present invention

The bottom portion of the housing in contact with the accommodating portion has a slope inclined toward the discharge portion,

The housing has a hexahedral shape,

A lid is provided at an upper end of the outer wall of the housing,

Wherein the accommodating portion is partitioned by a partition wall to have partition accommodating portions, the partition accommodating portions being connected to the exhaust portion,

Wherein the inner surface of the housing in contact with the accommodating portion has a hydrophobic or hydrophilic coating layer,

Further comprising a capacity increasing means for connecting the housing and the housing,

The capacity increasing means includes a first 1-1 coupling portion at the bottom of the housing, a first 1-2 coupling portion at the top of the housing, an upper 2-1 coupling portion coupled to the 1-1 coupling portion of the housing, And a linker having a lower second 2-2 coupling portion coupled to the 1-2 coupling portion and a coupling portion connecting the second 2-1 coupling portion and the second 2-1 coupling portion.

Further, the precise quantity supply device according to the present invention

A housing having an upper portion at an outer wall corresponding to a full level, a housing portion for housing a metered body made of liquid or powder formed in the housing, and a housing portion communicating with the housing portion, A precisely fixed amount supply tank communicating with the accommodating portion and having a swirling portion provided on the upper portion of the housing; And

A recovery tank for storing the metered matter discharged from the ridge portion;

.

Further, in the precise quantity supply device according to the present invention

Further comprising a discharge pump connected to an outlet of the supply tank,

Wherein the bottom portion of the housing in contact with the accommodating portion in the supply tank has a slope inclined toward the discharge portion, and a lid is provided at an upper end of the outer wall of the housing, the accommodating portion is partitioned by the partition wall to have the partition accommodating portions, The receiving portion is connected to the discharging portion,

Further comprising a replenishing tank connected to the receiving portion of the supply tank,

Wherein the supplementary tank serves as a recovery tank and further includes a recovery pump for connecting the rinsing tank of the supply tank with the recovery tank,

Wherein the accommodating portion of the supply tank is partitioned by the partition wall to have the partition accommodating portions, the partition accommodating portions being connected to the exhaust portion,

The inner surface of the housing, which is in contact with the receiving portion of the supply tank, has a hydrophobic or hydrophilic coating layer.

The precision quantitative supply tank according to the present invention and the precise quantitative supply apparatus using the same can solve the error problem of the quantitative supply system using the conventional quantitative pump by adopting the method of filling the measured object up to the full level, Or water-soluble solution can be secured with high accuracy by introducing a housing having an outer wall corresponding to a full level at the upper end so as to prevent a minute error when the meter is full level due to surface tension, Further, the bottom surface portion of the housing forms a slope inclined toward the discharge portion so that the entire amount of the metered matter can be discharged without remaining, and the lid is provided at the upper end of the outer wall of the housing. And the accommodating portion is partitioned by the partition wall to have the partition accommodating portions, It is possible to eliminate the problem of overflow due to flow during filling of the subject to be weighed or to delay the arrival of the metered fluid in a static state as much as possible. Further, since the inner surface of the housing has a hydrophobic or hydrophilic coating layer, It is possible to discharge all the metered amount so as not to stick to the outer wall and further increase the capacity of the metered body through the additional capacity addition means without changing the size of one housing.

1 is a perspective view of a precise quantity supply tank according to the present invention;
2 is a schematic diagram of a precise quantitative feeder according to the present invention;
3 is a schematic view of a precise quantity supply tank associated with the capacity expansion means;

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings.

While the present invention has been described in connection with certain embodiments, it is obvious that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the invention. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

In the drawings, the same reference numerals are used for the same reference numerals, and in particular, the numerals of the tens and the digits of the digits, the digits of the tens, the digits of the digits and the alphabets are the same, Members referred to by reference numerals can be identified as members corresponding to these standards.

In the drawings, the components are expressed by exaggeratingly larger (or thicker) or smaller (or thinner) in size or thickness in consideration of the convenience of understanding, etc. However, It should not be.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the term " comprising " or " consisting of ", or the like, refers to the presence of a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

It is to be understood that the first to second aspects described in the present specification are merely referred to in order to distinguish between different components and are not limited to the order in which they are manufactured, It may not match.

In describing the precise quantitative supply tank Ts according to the present invention and the precise quantity supply apparatus A using the precise quantity supply tank Ts according to the present invention,

The direction is specified in accordance with this standard unless otherwise specified in the detailed description and claims of the invention relating to the other drawings.

As shown in FIG. 1, the precise quantity supply tank Ts according to the present invention includes a housing 10, a receiving portion 20 for a subject to be measured, a discharging portion 30, and a sweeping portion 40 .

The housing 10 has a shape similar to a hexahedron when viewed from the outside and can be easily installed at various places. The housing 10 can be deformed into various shapes such as a cylindrical shape if necessary.

It is preferable that the outer wall 15 of the housing 10 corresponds to the full level of the outer wall 15 so that the metered matter composed of the liquid or the powder stored in the accommodating portion 20 corresponds to the quantity of the accommodating portion After filling up to the full level, overflowing overflows through the overflow section 40.

As shown in a plan view showing a modified example in the alternate long and short dashed line in the lower part of Fig. 1, on the outer wall of the housing 10, there is provided a tray-type overflow reservoir 43 in which the metered matter overflows through the overflow portion 40 And the overflowed metered matter is preferably collected in the recovery tank Tc (see FIG. 2) through the recovery hole 43a.

It is preferable that the bottom portion of the overflow portion 43 is inclined toward the recovery hole 43a.

The bottom portion 11 of the housing in contact with the receiving portion 20 has a slope 11S inclined toward the discharging portion 30 so that the metered body in the receiving portion filled with a fixed amount is discharged through the discharging portion 30 So that the entire amount is discharged.

On the other hand, the discharge part (30) provided in the bottom of the housing communicates with the housing part, and occupies a part of the amount of the housing part, and a valve (31) is provided. The valve may be comprised of a manual valve or a motorized valve controlled by a controller (not shown).

As shown in FIG. 2, the sweeping part 40 provided at the upper part of the housing communicates with the accommodating part. The sweeping part 40 has a swirling flow dividing wall 41 and is filled through the filling part 13 of the housing 10 It is preferable that the metering body is configured such that when the metering body reaches near the full level, there is no problem that the metered body flows out through the overflow portion due to a shock caused by filling shock or other external impacts.

Further, the accommodating portion 20 is divided by the partition 21 to have the divided accommodating portions 23 so that vibrations are applied to the subject to be filled in a predetermined amount by various types of impacts, .

It is preferable that these divided accommodating portions 23 are connected to the discharge portion 23. Each of the divided accommodating portions 23 is communicated with the discharge portion 23 through the communicating portion 21a corresponding to the cut- And is connected to the discharge part.

If necessary, the partition wall forming each divided storage portion is lower than the outer wall 15 of the housing, and the metered body filling each divided storage portion overflows. In this case, the left first divided storage portion is filled and then the right divided other divided storage portions are sequentially filled , ≪ / RTI >

In another form, the divided accommodating portions may be interrupted, and each divided accommodating portion may independently communicate with the discharge portion.

In the claims, the term " split receiving portion is connected to the discharging portion " means that the divided receiving portion is separately communicated with the discharging portion, or one split receiving portion (right side) is connected to the discharging portion, And middle) is a concept that encompasses both forms connected to this division receiving portion (right side).

The lid 17 is provided at the upper end of the outer wall of the housing 10 so that the lid 17 is waterproof to prevent a situation where an error is generated due to the surface tension of the meter to be measured at a full level. 'For the supply of the metered body.

The inner surface of the housing 10 in contact with the receptacle 20 has a hydrophobic (Teflon coating or the like) or a hydrophilic coating layer 10c to provide a hydrophobic or hydrophilic coating depending on the water receptability of the metered body, It is preferable that the metered body metered by the selective application is discharged so that the entire quantity of the metered body does not stick to the inner wall of the housing.

The hydrophilic coating layer 10c is preferably formed on the inner surface of the outer wall, the upper surface of the slope 11S, the lower surface of the lid 17, and both surfaces of the partition 21 as shown in the cross- Do.

Meanwhile, the precise quantity supply tank Ts according to the present invention can be utilized as a reagent supply source, a malodor removing agent application device to a dilution tank of a spray liquid injection device for removing a malodor of a sewer pipe,

It is preferable to have the capacity increasing means 50 for supplying the metered matter of various capacities.

As shown in FIG. 3, the capacity increasing means 50 is configured to connect the housing 10 to the housing,

A first 1-1 coupling portion 51A at the lower outer side of the housing 10 and a 1-2 coupling portion 51B at the upper portion of the housing 10,

An upper 2-1 coupling portion 53A coupled to the 1-1 coupling portion 51A of the housing, a lower 2-2 coupling portion 53B coupled to the 1-2 coupling portion 51B, And a linker 53 having a connecting portion 53C connecting the 2-1 and 2-2 coupling portions.

The second-first engaging portion 53A and the second-second engaging portion 53B of the linker 53 are made of a material having elasticity and each end serves as widening end portions 53a and 53b, When the protruding type 1-1 coupler 51A and the protruding type 1-2 coupler 51B at the upper left of the housing are forcibly pushed in, the respective widening end portions 53a and 53b are opened and the engaging portions 51A, 53A (51B, 53B).

In addition, a pedestal 55 is provided at the lower left of the linker 53 to allow horizontal support of the connected upper left housing 10, and the upper end of the pedestal and the linker can be coupled in various ways.

The pedestal 55 includes a lower first powder 55A, a second powder 55B inserted into the first powder and displaced in a telescopic type so as to be adjustable in height, (55C), particularly a bolt-type fixing member.

Meanwhile, the supply tank Ts or the capacity addition means 50 is preferably provided with a horizontal system (not shown) so that the supply tank Ts or the capacity addition means 50 can be horizontally installed when the present supply tank is installed.

3, a modified linker 53M is shown in the one-dot chain line below the pedestal 55, which is a link bar 60 to be coupled to the housing 10 of various sizes, 60A, and second and third pipes 60B, 60C coupled to the left and right of the first pipe. The tension means 60D interconnects the second and third pipes coupled to the first pipe, The coil-spring type tension means is built in the first pipe, and the second-first coupling portion 53A provided at both ends of the second and third pipes are securely coupled to the first- So as to press the pressing member 51A.

In Fig. 3, the second-second coupling portion 53B provided under the third pipe 60C of the deformed linker 53M in the intermediate one-

Like the third pipe 60M of another modification shown in the right one-dot chain line and the remaining one-dot chain line,

And the deformed second-2 engaging portion 53m and the deformed connecting portion 53c are coupled to the moving body 61 and are configured to be variable in position .

More specifically, the deformed second-2 engaging portion 53m and the deformed connecting portion 53c can move in accordance with the movement of the moving body 61. [

This moving body 61 includes a slider 63 corresponding to the main body (the combination of the slider 63 and the deformed link portion 53c and the deformed second-2 link portion 53m can be variously selected) ,

The slider 63 exposed on the bottom surface of the third pipe 60M is arranged in the receiving portion 60g of the third pipe 60M and is engaged with the rack 60r, And has an elastic body (65).

The locking elastic body 65 having the locking projections 65a protruding from one side of the slider 63 and engaging with the rack gear 60r of the third pipe 60M has the locking projections 65a at the center, And a leaf spring 65b.

On the left side of the slider 63 of the moving body 61, a long slider 63 is provided for stable sliding movement, and a slit 61s is provided at the center thereof for slimming.

The state in which the second-second engaging portion 53m is moved with respect to the deformed third pipe 60M by the movement of the moving body 61 can be maintained in this state by the operation of the lock button 67. [

3, a main part of the slider 63 is schematically shown in the one-dot-chain line circles shown in the bottom left one-dotted line in Fig. 3, and the lock button 67 (only schematically showing the functional end (denoted by "black square") of the locking projections 67a formed downwardly protruding on one side)

The downward protruding locking protrusion 67a of the illustrated locking button 67 is fitted between the elastic portion 65b of the locking elastic body 65 and the slider 63 in accordance with the retreating

And is implemented in such a manner as to prevent deformation of the elastic portion 65b so that the locking projection 65a is kept in engagement with the rack gear 60r.

Next, the precise quantity supply device A using the precise quantity supply tank Ts according to the present invention includes a precisely fixed quantity supply tank Ts, a recovery tank Tc (not shown) for storing the metered matter discharged from the circulation unit 40, ).

The metered matter discharged from the discharge portion 30 of the supply tank Ts is supplied to the entire supply destination Td and the supply method thereof can be a natural delivery method or a forced delivery method by the discharge pump Ps , The discharge pump (Ps) and the discharge pump (31) can be controlled by a separate controller.

The metered matter overflowed in the sweeping unit 40 is collected in the collection tank Tc. In this case, the collection can be performed using the natural descent system or the collection pump Pc.

Further, the recovery tank Tc may be a replenishing tank Tr for filling the metered matter, and may be constituted by a separate tank if necessary.

The initial filling or re-filling of the supply tank (Ts) is carried out through the supplementary tank (Tr), and the metered matter discharged from the supplement tank is filled with the feed tank by a natural spring or a supplementary pump (Pr) As shown in FIG.

Meanwhile, although not shown, the metered matter supplying apparatus A using the supply tank Ts of a predetermined amount according to the present invention may be configured such that a weight having various volumes is charged into the accommodating portion in order to reduce a predetermined capacity of the accommodating portion 20 .

In the above description, conventionally known techniques relating to the kind of the subject to be measured, the capacity setting method of the supply tank, the hydrophobic or hydrophilic coating method and the like are omitted, but those skilled in the art can easily guess and deduce it and reproduce it.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It will be apparent to those skilled in the art that various modifications, And substitutions are to be construed as falling within the scope of protection of the present invention.

A: Precise Quantity Feeder Ts: Precision Quantity Feeder
Tr: supplement tank Tc: recovery tank
Ps, Pr, Pc: Pump Td: Pour point
10: housing 20: accommodating portion
21: partition wall 23:
30: discharge part 40:
50: capacity increasing means

Claims (14)

A housing having an outer wall having an upper end corresponding to a full level,
A housing for storing a metered body made up of liquid or powder formed in the housing;
A discharge portion communicating with the accommodating portion and provided on a bottom surface of the housing,
And a swirling portion communicating with the accommodating portion and provided at an upper portion of the housing,

Further comprising a capacity increasing means for connecting the housing and the housing,
The capacity increasing means
A first 1-1 coupling portion at the bottom of the housing, a 1-2 coupling portion at the top of the housing,
An upper 2-1 coupling unit coupled to the 1-1 coupling unit of the housing, a lower 2-2 coupling unit coupled to the 1-2 coupling unit, and a 2-1 coupling unit And a linker having a connecting portion connecting the connecting portions. The method according to claim 1,
Wherein the bottom portion of the housing in contact with the receiving portion has a slope inclined toward the discharge portion. 3. The method of claim 2,
Wherein the housing has a hexahedral shape. 4. The method according to any one of claims 1 to 3,
A lid is provided at an upper end of the outer wall of the housing,
Wherein the accommodating portion is partitioned by the partition wall to have the partition accommodating portions, and these partition accommodating portions are connected to the exhaust portion. 4. The method according to any one of claims 1 to 3,
Wherein the inner surface of the housing in contact with the receiving portion has a hydrophobic or hydrophilic coating layer. 4. The method according to any one of claims 1 to 3,
The linker 53 of the capacity increasing means has the entry expanding end portions 53a and 53b made of a material having elasticity at each end of the 2-1 coupling portion 53A and the 2-2 coupling portion 53B When the protruding type 1-1 fitting portion 51A at the lower end of the housing and the protruding type 1-2 fitting portion 51B at the upper portion of the housing are forcibly pushed in, the respective widening end portions 53a and 53b are opened, 51A, 53A (51B, 53B) are connected to each other. The method according to claim 6,
A base 55 is provided at one side of the linker 53 to support the connected upper housing 10 horizontally,
The pedestal 55 includes a lower first powder 55A, a second powder 55B inserted into the first powder and displaced in a telescopic type so as to be adjustable in height, (55C). ≪ / RTI > A housing having an upper portion at an outer wall corresponding to a full level, a housing portion for housing a metered body made of liquid or powder formed in the housing, and a housing portion communicating with the housing portion, A precisely fixed amount supply tank communicating with the accommodating portion and having a swirling portion provided on the upper portion of the housing; And
A recovery tank for storing the metered matter discharged from the ridge portion;
, ≪ / RTI >

Further comprising a capacity increasing means for connecting the housing of the precise quantity supply tank with the housing,
The capacity increasing means
A first 1-1 coupling portion at the bottom of the housing, a 1-2 coupling portion at the top of the housing,
An upper 2-1 coupling unit coupled to the 1-1 coupling unit of the housing, a lower 2-2 coupling unit coupled to the 1-2 coupling unit, and a 2-1 coupling unit And a linker having a connecting portion connecting the connecting portions. 9. The method of claim 8,
And a discharge pump connected to a discharge portion of the supply tank. 9. The method of claim 8,
In the supply tank
The bottom portion of the housing in contact with the accommodating portion has a slope inclined toward the discharge portion,
A cover is provided on an upper end of the outer wall of the housing,
Wherein the accommodating portion is partitioned by a partition wall and has divided accommodating portions, and the divided accommodating portions are connected to the discharging portion. 9. The method of claim 8,
Further comprising a replenishing tank connected to the receiving portion of the supply tank. 12. The method of claim 11,
The supplemental tank serves as a recovery tank,
Further comprising a recovery pump for connecting the rinse portion of the supply tank to the recovery tank. 13. The method according to any one of claims 8 to 12,
Wherein the accommodating portion of the supply tank is partitioned by the partition wall to have the partition accommodating portions, the partition accommodating portions being connected to the exhaust portion,
Wherein the inner surface of the housing which is in contact with the receiving portion of the supply tank has a hydrophobic or hydrophilic coating layer. 13. The method according to any one of claims 8 to 12,
In the supply tank, the linker (53) of the capacity increasing means has the second-first engaging portion (53A) and the second-second engaging portion (53B) 53b to force the protruding type 1-1 fitting portion 51A at the lower end of the housing and the protruding type 1-2 fitting portion 51B at the upper portion of the housing to force the entry widening ends 53a, The engaging portions 51A, 53A, and 51B are engaged with each other,
A lower part of the linker 53 is provided with a pedestal 55 so that the connected upper housing 10 can be horizontally supported. The pedestal 55 is provided with a lower first powder 55A, A second powder (55B) inserted into the first powder and displaced to a telescopic type, and a fixing member (55C) for fixing the height in a state of being adjusted.

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