WO2019090925A1 - Liquid addition system and method - Google Patents

Liquid addition system and method Download PDF

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Publication number
WO2019090925A1
WO2019090925A1 PCT/CN2017/118031 CN2017118031W WO2019090925A1 WO 2019090925 A1 WO2019090925 A1 WO 2019090925A1 CN 2017118031 W CN2017118031 W CN 2017118031W WO 2019090925 A1 WO2019090925 A1 WO 2019090925A1
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WIPO (PCT)
Prior art keywords
liquid
storage tank
addition
controller
liquid storage
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PCT/CN2017/118031
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French (fr)
Chinese (zh)
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左国军
夏展
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常州捷佳创精密机械有限公司
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Publication of WO2019090925A1 publication Critical patent/WO2019090925A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the invention relates to the field of battery sheet production in the solar photovoltaic industry, and in particular to a liquid medicine adding system and method.
  • the present invention provides a chemical liquid addition system and method, which can effectively ensure that the production process of the product is stable and reliable, and improve product yield.
  • the technical solution adopted by the present invention is to design a medical liquid adding system, which comprises a liquid storage tank, a sensor, a human-computer interaction module and a controller.
  • the liquid storage tank stores a chemical liquid used in processing a product.
  • the reservoir includes an outlet valve.
  • the liquid outlet valve is used to control the liquid medicine in the liquid storage tank to flow into a reaction tank.
  • the sensor is used to sense the liquid level of the liquid in the liquid storage tank.
  • the human-computer interaction module is configured to pass data input by the user to the controller.
  • the human-computer interaction module is further configured to select an add mode and/or add a mode based on a user operation. This addition includes manual addition and/or automatic addition, which includes quantitative addition and/or dynamic addition.
  • the controller is configured to calculate the volume of the liquid medicine in the liquid storage tank according to the data sensed by the sensor, thereby calculating the liquid discharge amount of the liquid storage tank.
  • the controller is further configured to add a chemical solution to the reaction tank according to the data set by the human-computer interaction module.
  • the controller is also used to store production batches for the product.
  • the human-computer interaction module sets a chemical liquid addition amount based on a user operation, and the user manually opens the liquid discharge valve, so that the liquid medicine in the liquid storage tank flows into the reaction tank, when the control When the device detects that the liquid discharge amount of the liquid storage tank reaches the chemical liquid addition amount, the liquid discharge valve is automatically closed.
  • the adding mode is further selected; when the quantitative adding is selected, the human-computer interaction module sets the fixed interval batch and the fixed adding amount based on the user operation, and the controller according to the fixed interval batch and The fixed addition amount automatically opens the liquid discharge valve for chemical liquid addition, and automatically closes the liquid discharge valve when the addition is completed.
  • the human-computer interaction module sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on a user operation, and the controller adds the dynamic batch interval, the dynamic interval batch, and the dynamic according to the dynamic batch interval.
  • the amount automatically opens the liquid outlet valve for chemical liquid addition, and automatically closes the liquid outlet valve when the addition is completed.
  • controller is further configured to record and store data in the process of adding the liquid medicine, and count the consumption of the liquid medicine in each time period.
  • the human-computer interaction interface is also used to display the data obtained by the controller.
  • controller is further configured to detect whether the liquid storage tank can be normally discharged.
  • the liquid storage tank further includes an inlet valve for controlling the flow of the liquid medicine of a peripheral liquid supply system into the liquid storage tank.
  • the controller is further configured to calculate the liquid intake amount of the liquid storage tank according to the data sensed by the sensor.
  • the controller is also used to detect whether the liquid storage tank can normally enter the liquid.
  • controller is further configured to ensure the normal supply of the liquid medicine in the reaction tank to the maximum when the liquid storage tank cannot be properly fed.
  • controller is further configured to detect whether the sensor is damaged.
  • the invention also provides a chemical liquid adding method, comprising the steps of: providing a liquid storage tank, a sensor and a controller, wherein the liquid storage tank stores a liquid medicine used in processing a product, and includes a liquid discharging valve, The sensor senses the liquid level of the liquid medicine in the liquid storage tank, the controller calculates the liquid discharge amount of the liquid storage tank according to the data sensed by the sensor, and also stores the production batch of the product; the human-machine interaction module is based on the user operation Select the adding method, the adding method includes manual adding and/or automatic adding; if manual adding is selected, the user manually opens the liquid discharging valve, so that the liquid medicine in the liquid storage tank flows into a reaction tank; if automatic addition is selected, Then, it is necessary to continue to select an adding mode on the human-computer interaction interface, the adding mode includes quantitative adding and/or dynamic adding; the controller automatically turns on the liquid discharging valve according to the selected adding mode, so that the medicine in the liquid storage tank The liquid flows into the reaction tank.
  • the step "if the manual addition is selected, the user manually opens the liquid outlet valve so that the liquid medicine in the liquid storage tank flows into a reaction tank” further includes the following steps: the human-computer interaction module is based on user operation Setting a chemical liquid addition amount; the user manually opens the liquid discharge valve, so that the liquid medicine in the liquid storage tank flows into the reaction tank, and when the controller detects that the liquid discharge amount of the liquid storage tank reaches the liquid chemical addition amount The outlet valve is automatically closed.
  • the step “the controller automatically opens the liquid discharge valve according to the selected addition mode, so that the liquid medicine in the liquid storage tank flows into the reaction tank” further includes the following steps: if the quantitative addition is selected, the person The machine interaction module sets the fixed interval batch and the fixed addition amount based on the user operation; the controller automatically opens the liquid outlet valve according to the fixed interval batch and the fixed addition amount to perform the liquid medicine addition, and automatically closes the liquid discharge when the addition is completed. valve.
  • the step “the controller automatically opens the liquid discharge valve according to the selected addition mode, so that the liquid medicine in the liquid storage tank flows into the reaction tank” further includes the following steps: if the dynamic addition is selected, the person The machine interaction module sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on user operations; the controller automatically opens the liquid outlet valve according to the dynamic batch interval, the dynamic interval batch, and the dynamic addition amount to perform liquid medicine Add, automatically close the outlet valve when added.
  • the method for adding a liquid medicine further comprises the steps of: recording and storing data in the process of adding the liquid medicine, and counting the consumption amount of the liquid medicine in each time period; and the artificial interaction interface displaying the result obtained by the controller data.
  • the liquid medicine adding method further comprises the following steps: the controller detects whether the liquid storage tank can be normally discharged.
  • the liquid storage tank further includes an inlet valve for controlling the flow of the liquid medicine of a peripheral liquid supply system into the liquid storage tank; the controller is further configured to calculate according to the data sensed by the sensor The liquid intake amount of the liquid storage tank; the chemical liquid adding method further comprises the following steps: the controller detects whether the liquid storage tank can normally enter the liquid.
  • the chemical liquid adding method further comprises the following steps: the controller ensures the normal supply of the chemical liquid in the reaction tank to the utmost when detecting that the liquid storage tank cannot be normally fed.
  • liquid medicine adding method further includes the following steps: the controller detects whether the sensor is damaged.
  • the beneficial effects of the invention are: high precision, flexibility and intelligence, which can effectively ensure the stable and reliable production process of the product, improve the product yield and reduce the product rework rate.
  • FIG. 1 is a functional block diagram of a medical liquid adding system according to a first embodiment of the present invention
  • FIG. 2 is a flow chart of a method for adding a liquid medicine according to a second embodiment of the present invention
  • FIG. 3 is a sub-flow diagram of step S3 of Figure 2;
  • step S4 of FIG. 2 is a sub-flow diagram of step S4 of FIG. 2.
  • the medical liquid adding system 100 proposed by the present invention comprises a liquid storage tank 10, a sensor 20, a human-machine interaction module 30, a controller 40 and an alarm 50.
  • the liquid storage tank 10 is for storing a chemical liquid used in processing a product such as a silicon wafer or the like.
  • the liquid storage tank 10 includes an inlet valve 11 and an outlet valve 12.
  • the liquid inlet valve 11 is for controlling the flow of the chemical liquid of the peripheral liquid supply system 200 into the liquid storage tank 10.
  • the liquid discharge valve 12 is for controlling the flow of the chemical liquid in the liquid storage tank 10 into one reaction tank 300.
  • the sensor 20 is used to sense the liquid level of the liquid in the liquid storage tank 10.
  • the sensor 20 is a linear sensor.
  • the human-computer interaction module 30 is configured to transmit data input by the user to the controller 40, and can also display data obtained by the controller 40. Specifically, the user selects “add mode” (ie, manual addition and/or automatic addition), “add mode” (ie, quantitative addition and/or dynamic addition) through the human-computer interaction module 30, and can also set interval batches and The amount of liquid medicine added to each batch. If the user selects "manually add", the user needs to manually open the liquid outlet valve 11 for chemical liquid addition. The human-computer interaction module 30 sets a chemical liquid addition amount based on a user operation, and the controller 40 automatically closes the liquid discharge valve 12 after the chemical liquid is added.
  • add mode ie, manual addition and/or automatic addition
  • additive mode ie, quantitative addition and/or dynamic addition
  • the human-computer interaction module 30 directly transmits data to the controller 40, and the controller 40 controls the opening and closing of the liquid outlet valve 12 to add the chemical liquid.
  • the controller 40 controls the opening and closing of the liquid outlet valve 12 to add the chemical liquid.
  • the fixed interval batch is 5, and the fixed addition amount is 1 liter, which means that every 5 batches are placed in the reaction tank. Add 1 liter of liquid.
  • “Dynamic Add” you need to set the dynamic batch interval, dynamic interval batch and dynamic addition amount (such as dynamic batch interval is 100, 200, 300..., dynamic interval batch is 5, 4, 3...
  • the dynamic addition amount is 1 liter, 1.5 liter, 2 liters... It means that 1 liter of liquid medicine is added every 5 batches in the first 100 batches, and 1.5 liters of liquid medicine is added every 4 batches in 100-200 batches. , add 2 liters of liquid medicine, etc., every 3 batches in 200-300 batches).
  • a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
  • the controller 40 is configured to calculate a volume of the liquid medicine in the liquid storage tank 10 according to the data sensed by the sensor 20, and store a production batch of the product, and send the data to the reaction tank 300 according to the data set by the human-machine interaction module 30. Add liquid medicine inside.
  • the volume of the liquid medicine in the liquid storage tank 10 is calculated by first calculating the bottom area of the liquid storage tank 10, and then reading the value of the sensor 20 in real time, and converting the measurement range of the sensor 20 to be converted.
  • the liquid level of the chemical liquid in the liquid storage tank 10 is finally calculated based on the shape and area calculation formula of the liquid storage tank 10 to calculate the volume of the chemical liquid in the liquid storage tank 10.
  • the controller 40 closes the liquid discharge valve 12. Specifically, the controller 40 reads the value of the sensor 20 when the liquid outlet valve 12 is just opened, calculates the initial volume of the liquid medicine in the liquid storage tank 10, and subtracts the liquid medicine set by the user from the initial volume. The amount is added to obtain an estimated volume; when the volume of the remaining liquid in the liquid storage tank 10 is equal to the estimated volume, the liquid discharge valve 12 is controlled to be closed, and the liquid chemical addition is completed.
  • the user sets the fixed interval batch and the fixed addition amount in the human-computer interaction module 30 (for example, the fixed interval batch is 5, and the fixed addition amount is 1 liter, which means 5 intervals per interval).
  • the fixed interval batch is 5
  • the fixed addition amount is 1 liter, which means 5 intervals per interval.
  • 1 liter of the chemical solution is added to the reaction tank, and the controller 40 automatically opens the liquid outlet valve 12 according to the fixed interval batch and the fixed addition amount to add the liquid medicine, and automatically closes when the addition is completed.
  • a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
  • the human-computer interaction module 30 sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on the user operation (for example, the dynamic batch interval is 100, 200, 300). ..., the dynamic interval batch is 5, 4, 3..., the dynamic addition amount is 1 liter, 1.5 liter, 2 liters... It means that 1 liter of liquid medicine is added every 5 batches in the first 100 batches, 100- 1.5 litres of chemical solution are added in 4 batches in 200 batches, 2 liters of chemical solution are added in 3 batches in 200-300 batches, etc.), and the controller 40 automatically according to the dynamic interval batch and the dynamic addition amount.
  • the liquid discharge valve 12 is opened to perform the chemical liquid addition, and the liquid discharge valve 12 is automatically closed when the addition is completed. It can be understood that as the production batch is gradually increased, the activity and concentration of the chemical liquid in the reaction tank 300 will gradually decrease. If the chemical solution is added to the reaction tank according to the fixed interval batch and the fixed addition amount, the process The effect will gradually deteriorate, so the dynamic addition method can prolong the life of the liquid in the reaction tank 300 and ensure the process effect.
  • a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
  • the controller 40 can also detect whether the liquid storage tank 10 can be normally discharged. Specifically, when the reaction tank 300 needs to add a chemical liquid, the controller 40 detects the liquid level of the liquid medicine in the liquid storage tank 10 through the sensor 20 every time a predetermined time interval after the liquid discharge valve 12 is opened, and The liquid levels of two adjacent predetermined time intervals are compared to determine whether the liquid level of the liquid medicine in the liquid storage tank 10 continues to decrease. If the liquid level of the liquid medicine in the liquid storage tank 10 does not continuously decrease, it is judged that the liquid storage tank 10 cannot be discharged normally and the alarm device 50 is activated to perform a liquid discharge alarm, and the failure causes include: the liquid discharge valve 12 is damaged or The outlet pipe is blocked.
  • the controller 40 can also detect whether the liquid storage tank 10 can normally enter the liquid. Specifically, the controller 40 detects the liquid level of the liquid medicine in the liquid storage tank 10 in real time. When the liquid level of the chemical liquid in the liquid storage tank 10 is too low, the peripheral liquid supply system 200 is required to perform liquid supply, and the control is performed. The device 40 opens the liquid inlet valve 11 and detects the liquid level of the liquid medicine in the liquid storage tank 10 through the sensor 20 every predetermined time interval, and compares the liquid levels of two adjacent predetermined time intervals to determine the liquid level. Whether the liquid level of the chemical liquid in the liquid storage tank 10 continues to rise.
  • the alarm device 50 is activated to perform the liquid inlet alarm.
  • the cause of the failure includes: the liquid inlet valve 11 is damaged. , or the inlet pipe is blocked or the peripheral liquid supply system 200 is malfunctioning.
  • the alarm device 50 is embedded in the human-machine interaction module 30, and an alarm is generated in the form of text prompt information presented on the human-machine interaction module 30. It can be understood that the alarm 50 can also be a light emitting diode or a buzzer or a voice broadcast.
  • the liquid inlet alarm and the liquid discharge alarm are different types of alarm signals, such as two different sounds or two different lights or one sound alarm, and another light alarm.
  • the liquid storage tank 10 cannot be properly charged, the liquid storage tank 10 cannot be replenished with the chemical liquid in the reaction tank 300 in time, thereby affecting the production process of the product. Therefore, by detecting whether the liquid storage tank 110 can normally enter the liquid, the production process can be ensured to be stable and reliable, and the product yield can be improved.
  • the controller 40 is further configured to maximize the normal supply of the liquid medicine in the reaction tank 300 when the liquid storage tank 10 fails to properly enter the liquid and causes the alarm 50 to enter the liquid alarm. Specifically, if the liquid storage tank 10 cannot normally enter the liquid, the controller 40 detects whether the reaction tank 300 has a request for chemical liquid addition. If the reaction tank 300 has a request for the addition of the chemical solution at this time, the controller 40 first determines whether the remaining chemical liquid in the liquid storage tank 10 can satisfy the liquid chemical replenishment of the reaction tank 300. If it is satisfied, the liquid inlet alarm is ignored, and the liquid discharge valve 12 is continuously opened, so that the liquid storage tank 10 adds the chemical liquid to the reaction tank 300.
  • the liquid storage tank 10 continues to wait for the liquid medicine of the peripheral liquid supply system 200 to be replenished. This ensures that after the liquid inlet alarm occurs, the liquid storage tank 10 can continue to perform at least one chemical liquid addition operation to the reaction tank 300, thereby leaving the worker with more trouble processing time.
  • the controller 40 is also used to record and store data in the process of adding the liquid medicine, and to calculate the amount of liquid medicine consumed in each time period.
  • the controller 40 can also display the data in the process of adding the drug solution and/or the consumption of the liquid medicine in each time period (such as hourly, daily, monthly and yearly) in the form of a report on the human-computer interaction module. 30, easy for the staff to find.
  • the controller 40 also derives data in the chemical addition process and/or drug consumption in each time period in a plurality of document formats to facilitate data analysis.
  • the controller 40 can also detect if the sensor 20 is damaged. Specifically, the controller 40 reads the value of the sensor 20 in real time, and defines the maximum value and the minimum value that the motor 20 can reach when moving in the entire stroke range according to the installation position of the sensor 20 (this value is obtained through actual testing). Then, after relaxing a certain range as a predetermined stroke, if the value read by the controller 40 exceeds the predetermined stroke, it is judged that the sensor 20 is damaged.
  • a second embodiment of the present invention provides a method for adding a medical solution, which includes the following steps:
  • S1 providing a liquid storage tank, a sensor and a controller, the liquid storage tank storing a chemical liquid used in processing the product, and the liquid storage tank comprises an outlet valve and an inlet valve.
  • the liquid outlet valve is used to control the liquid medicine in the liquid storage tank to flow into a reaction tank.
  • the liquid inlet valve is used to control the flow of the liquid medicine of a peripheral liquid supply system into the liquid storage tank.
  • the sensor senses the level of the liquid in the reservoir.
  • the controller calculates the liquid discharge amount and the liquid intake amount of the liquid storage tank according to the data sensed by the sensor.
  • the controller also stores production batches for the product.
  • a human-computer interaction module selects an adding manner based on a user operation, and the adding manner includes manual adding and/or automatically adding.
  • step S3 If manual addition is selected, the user manually opens the liquid discharge valve, so that the chemical liquid in the liquid storage tank flows into the reaction tank, and the process proceeds to step S5.
  • the step S3 further includes the following sub-steps:
  • the human-computer interaction module sets a chemical liquid addition amount based on a user operation.
  • step S33 When the controller detects that the liquid discharge amount of the liquid storage tank reaches the liquid chemical addition amount, the liquid discharge valve is automatically closed.
  • the step S33 further comprises the following substeps: reading the value of the sensor when the liquid outlet valve is just opened, calculating the initial volume of the liquid medicine in the liquid storage tank; and subtracting the medicine set by the user from the initial volume The liquid addition amount is obtained to obtain an estimated volume; when the volume of the remaining chemical liquid in the liquid storage tank is equal to the predicted volume, the liquid discharge valve is closed to complete the liquid chemical addition.
  • step S4 If automatic adding is selected, the user needs to continue to select an adding mode on the human-computer interaction interface, the adding mode includes quantitative adding and/or dynamic adding, and then the controller automatically turns on the liquid discharging valve according to the selected adding mode. The chemical liquid in the liquid storage tank is caused to flow into the reaction tank, and the process proceeds to step S5.
  • step S4 further includes the following sub-steps:
  • the human-computer interaction interface selects an add mode based on a user operation.
  • the human-computer interaction module sets the fixed interval batch and the fixed addition amount based on the user operation (for example, the fixed interval batch is 5, and the fixed addition amount is 1 liter, indicating that each batch is 5 batches, To the reaction tank, 1 liter of the chemical solution is added, and the controller automatically opens the liquid outlet valve according to the fixed interval batch and the fixed addition amount to add the liquid medicine, and automatically closes the liquid outlet valve when the addition is completed.
  • a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
  • the human-computer interaction module sets dynamic batch interval, dynamic interval batch and dynamic addition amount based on user operation (for example, the dynamic batch interval is 100, 200, 300..., the dynamic interval batch is 5, 4, 3..., the dynamic addition amount is 1 liter, 1.5 liter, 2 liters... It means that 1 liter of liquid medicine is added every 5 batches in the first 100 batches, and 4 batches are every 100-200 batches. Add 1.5 liters of drug solution, add 2 liters of drug solution every 3 batches in 200-300 batches, etc.), and the controller automatically starts the output according to the dynamic batch interval, the dynamic interval batch and the dynamic addition amount.
  • the liquid valve is added with the liquid medicine, and the liquid discharge valve is automatically closed when the addition is completed.
  • a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
  • the controller records and stores the data in the process of adding the chemical solution to the reaction tank, and counts the consumption of the liquid medicine in each time period (such as hourly, daily, monthly and yearly).
  • the step S5 further includes the following sub-steps: displaying the data in the process of adding the drug solution and/or the consumption of the drug solution in each time period (such as hourly, daily, monthly and yearly) in the form of a report on the person On the machine interaction module, it is convenient for the staff to perform the search; and/or the data in the process of adding the chemical liquid and/or the consumption of the liquid medicine in each time period are exported in various document formats, which is convenient for data analysis.
  • the artificial interaction interface displays the data obtained by the controller.
  • the chemical liquid addition method further comprises the step of detecting whether the liquid storage tank can be normally discharged. Specifically, the step further includes the following sub-steps: when the reaction tank needs to add the liquid medicine, after the liquid outlet valve is opened, the liquid level of the liquid medicine in the liquid storage tank is detected by the sensor every predetermined time interval, and The liquid levels of two adjacent predetermined time intervals are compared to determine whether the liquid level of the liquid medicine in the liquid storage tank continues to decrease. If the liquid level of the liquid medicine in the liquid storage tank is not continuously falling, it is judged that the liquid storage tank cannot be discharged normally and an alarm system is activated to perform an outflow alarm, and the failure causes include: the outlet valve is damaged or discharged Pipes are blocked.
  • the liquid medicine adding method further comprises the step of: detecting whether the liquid storage tank can be normally fed. Specifically, the step further includes the following substeps: detecting the liquid level of the liquid medicine in the liquid storage tank in real time, and when the liquid level of the liquid medicine in the liquid storage tank is too low, a peripheral liquid supply system is required for liquid supply, and the liquid is turned on.
  • the liquid inlet valve detects the liquid level of the liquid medicine in the liquid storage tank through the sensor every predetermined time interval, and compares the liquid levels of two adjacent predetermined time intervals to determine the liquid medicine in the liquid storage tank. Whether the liquid level continues to rise.
  • the liquid level of the liquid medicine in the liquid storage tank does not continuously rise, it is judged that the liquid storage tank cannot be normally infused and an alarm system is activated to perform an infusion alarm, and the cause of the failure includes damage of the inlet valve and blockage of the inlet pipe. Or the peripheral liquid supply system malfunctions, and the like. If the liquid storage tank cannot be properly fed, the liquid storage tank cannot be replenished with the chemical liquid in time, thereby affecting the production process of the product. Therefore, by detecting whether the liquid storage tank can normally enter the liquid, the production process of the product can be ensured to be stable and reliable, and the product yield can be improved.
  • the chemical liquid addition method further comprises the steps of: when the liquid storage tank cannot be normally fed, and the liquid inlet alarm occurs, the normal supply of the chemical liquid in the reaction tank is ensured to the utmost.
  • the step further includes the following sub-step: when the liquid storage tank is unable to enter the liquid normally, detecting whether the reaction tank has a request for adding the chemical liquid; if the reaction tank has a request for adding the chemical liquid, first determining Whether the remaining liquid in the liquid storage tank can satisfy the liquid replenishment of the reaction tank; if it is satisfied, the liquid discharge valve is continuously opened, so that the liquid storage tank adds the chemical liquid to the reaction tank; Then, the liquid storage tank continues to wait for the liquid medicine of the peripheral liquid supply system to be replenished. This ensures that after the liquid inlet alarm occurs, the liquid storage tank can continue to perform at least one chemical liquid addition operation to the reaction tank, thereby leaving the staff with more troubleshooting time.
  • the liquid addition method further includes the step of detecting whether the sensor is damaged. Specifically, the step further includes the following sub-step: reading the value of the sensor in real time during the liquid discharge and liquid inlet of the liquid storage tank, and defining the movement position of the sensor in advance according to the installation position of the sensor The maximum and minimum values that will be reached (this value is obtained by actual testing), and then a certain range is relaxed as a predetermined stroke. If the read value exceeds the predetermined stroke, the sensor is judged to be damaged.
  • the liquid medicine adding system and method of the invention are high-precision, flexible and intelligent, can effectively ensure the stable and reliable production process of the product, improve the product yield and reduce the product rework rate.

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Abstract

Provided are a liquid addition system (100) and method. The system (100) comprises a liquid storage tank (10), a sensor (20), a human-computer interaction module (30) and a controller (40). The liquid storage tank (10) is used for storing a liquid and comprises a liquid outlet valve (12), the liquid outlet valve (12) being used for controlling the liquid in the liquid storage tank (10) to flow into a reaction groove (300). The sensor (20) is used for sensing a liquid level of the liquid in the liquid storage tank (10). The human-computer interaction module (30) is used for transferring data input by a user to the controller (40) and selecting an addition method and/or addition mode according to user operation. The addition method comprises manual addition and/or automatic addition. The addition mode comprises quantitative addition and/or dynamic addition. The controller (40) is used for calculating volume of the liquid in the liquid storage tank (10) according to data sensed by the sensor (20) so as to calculate liquid outlet quantity of the liquid storage tank (10), and the controller (40) also can be used for adding the liquid into the reaction groove (300) according to data set by the human-computer interaction module (30). The liquid addition system (100) and method have the advantages of stability, reliability, high accuracy, flexibility and intelligence.

Description

一种药液添加系统及方法Liquid medicine adding system and method 技术领域Technical field
本发明涉及太阳能光伏行业电池片生产领域，尤其涉及一种药液添加系统及方法。The invention relates to the field of battery sheet production in the solar photovoltaic industry, and in particular to a liquid medicine adding system and method.
背景技术Background technique
在太阳能光伏行业，将硅片加工成电池片的工艺中，需要用到多种化学处理设备，如槽式制绒设备、链式制绒设备、湿法刻蚀设备、抛光设备等等，这些设备都是以化学腐蚀的方式对硅片进行不同的工艺处理，在批量生产的过程中需要定量且精确地补充药液的消耗来保持药液的浓度及活性，所以一套稳定且精确的药液添加系统对工艺处理流程至关重要。但是现在的药液添加系统存在着精度不够高，添加方式不够灵活，系统出现故障时无法准确判断故障点等诸多问题，使得电池片的生产工艺不稳定，产品良率下降。In the solar photovoltaic industry, in the process of processing silicon wafers into cells, a variety of chemical processing equipment, such as trough-type texturing equipment, chain-type texturing equipment, wet etching equipment, polishing equipment, etc., are required. The equipment is processed in different ways by chemical etching. In the process of mass production, it is necessary to quantitatively and accurately replenish the consumption of the liquid to maintain the concentration and activity of the liquid, so a stable and accurate medicine is provided. The liquid addition system is critical to the process flow. However, the current chemical liquid addition system has many problems such as insufficient precision, inflexible addition mode, and inability to accurately determine the fault point when the system fails, so that the production process of the battery sheet is unstable and the product yield is lowered.
发明内容Summary of the invention
针对上述现有技术存在的问题，本发明提出一种药液添加系统及方法，能有效保证产品的生产工艺稳定可靠，提高产品良率。In view of the above problems existing in the prior art, the present invention provides a chemical liquid addition system and method, which can effectively ensure that the production process of the product is stable and reliable, and improve product yield.
本发明采用的技术方案是，设计一种药液添加系统，其包括一个储液罐、一个传感器、一个人机交互模块及一个控制器。该储液罐存储一产品加工时所使用的药液。该储液罐包括出液阀。该出液阀用于控制该储液罐内的药液流入一个反应槽内。该传感器用于感测该储液罐内药液的液位。该人机交互模块用于将用户输入的数据传递给该控制器。该人机交互模块还用于基于用户操作选择添加方式及/或添加模式。该添加方式包括手动添加及/或自动添加，该添加模式包括定量添加及/或动态添加。该控制器用于根据该传感器所感测的数据计算该储液罐内药液的体积，从而计算出该储液罐的出液量。该控制器还用于根据该人机交互模块设置的数据向该反应槽内添加药液。该控制器还用于存储该 产品的生产批次。The technical solution adopted by the present invention is to design a medical liquid adding system, which comprises a liquid storage tank, a sensor, a human-computer interaction module and a controller. The liquid storage tank stores a chemical liquid used in processing a product. The reservoir includes an outlet valve. The liquid outlet valve is used to control the liquid medicine in the liquid storage tank to flow into a reaction tank. The sensor is used to sense the liquid level of the liquid in the liquid storage tank. The human-computer interaction module is configured to pass data input by the user to the controller. The human-computer interaction module is further configured to select an add mode and/or add a mode based on a user operation. This addition includes manual addition and/or automatic addition, which includes quantitative addition and/or dynamic addition. The controller is configured to calculate the volume of the liquid medicine in the liquid storage tank according to the data sensed by the sensor, thereby calculating the liquid discharge amount of the liquid storage tank. The controller is further configured to add a chemical solution to the reaction tank according to the data set by the human-computer interaction module. The controller is also used to store production batches for the product.
进一步的，当选择手动添加时，该人机交互模块基于用户操作设置一药液添加量，用户手动开启该出液阀，使得该储液罐内的药液流入该反应槽内，当该控制器检测到该储液罐的出液量达到该药液添加量时，自动关闭该出液阀。Further, when manual addition is selected, the human-computer interaction module sets a chemical liquid addition amount based on a user operation, and the user manually opens the liquid discharge valve, so that the liquid medicine in the liquid storage tank flows into the reaction tank, when the control When the device detects that the liquid discharge amount of the liquid storage tank reaches the chemical liquid addition amount, the liquid discharge valve is automatically closed.
进一步的，当选择自动添加时，需继续选择该添加模式；当选择定量添加时，该人机交互模块基于用户操作设置固定间隔批次及固定添加量，该控制器根据该固定间隔批次及该固定添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。Further, when the automatic adding is selected, the adding mode is further selected; when the quantitative adding is selected, the human-computer interaction module sets the fixed interval batch and the fixed adding amount based on the user operation, and the controller according to the fixed interval batch and The fixed addition amount automatically opens the liquid discharge valve for chemical liquid addition, and automatically closes the liquid discharge valve when the addition is completed.
进一步的，若选择动态添加，该人机交互模块基于用户操作设置动态批次区间、动态间隔批次及动态添加量，该控制器根据该动态批次区间、该动态间隔批次及该动态添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。Further, if dynamic addition is selected, the human-computer interaction module sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on a user operation, and the controller adds the dynamic batch interval, the dynamic interval batch, and the dynamic according to the dynamic batch interval. The amount automatically opens the liquid outlet valve for chemical liquid addition, and automatically closes the liquid outlet valve when the addition is completed.
进一步的，该控制器还用于记录并存储药液添加过程中的数据，统计出各时间段内的药液消耗量。该人机交互界面还用于显示该控制器所得的数据。Further, the controller is further configured to record and store data in the process of adding the liquid medicine, and count the consumption of the liquid medicine in each time period. The human-computer interaction interface is also used to display the data obtained by the controller.
进一步的，该控制器还用于检测该储液罐是否能正常出液。Further, the controller is further configured to detect whether the liquid storage tank can be normally discharged.
进一步的，该储液罐还包括进液阀，该进液阀用于控制一外围供液系统的药液流入该储液罐内。该控制器还用于根据该传感器所感测的数据计算出该储液罐的进液量。该控制器还用于检测该储液罐是否能正常进液。Further, the liquid storage tank further includes an inlet valve for controlling the flow of the liquid medicine of a peripheral liquid supply system into the liquid storage tank. The controller is further configured to calculate the liquid intake amount of the liquid storage tank according to the data sensed by the sensor. The controller is also used to detect whether the liquid storage tank can normally enter the liquid.
进一步的，该控制器还用于当该储液罐不能正常进液时，最大限度地保证该反应槽内药液的正常供给。Further, the controller is further configured to ensure the normal supply of the liquid medicine in the reaction tank to the maximum when the liquid storage tank cannot be properly fed.
进一步的，该控制器还用于检测该传感器是否损坏。Further, the controller is further configured to detect whether the sensor is damaged.
本发明还提出一种药液添加方法，其包括如下步骤：提供一储液罐、一传感器及一控制器，该储液罐存储一产品加工时所使用的药液，且包括出液阀，该传感器感测该储液罐内药液的液位，该控制器根据该传感器所感测的数据计算该储液罐的出液量，还存储产品的生产批次；一人机交互模块基于用户操作选择添加方式，该添加方式包括手动添加及/或自动添加；若选择手动添加，则用户手动开启该出液阀，使得该储液罐内的药液流入一个反应槽内；若选择自动添加，则需继续在该人机交互界面上选择添加模式，该添加模式包括定量添加及/或动态添加；该控制器根据所选择的添加模式自动开启该出液阀，使得该 储液罐内的药液流入该反应槽内。The invention also provides a chemical liquid adding method, comprising the steps of: providing a liquid storage tank, a sensor and a controller, wherein the liquid storage tank stores a liquid medicine used in processing a product, and includes a liquid discharging valve, The sensor senses the liquid level of the liquid medicine in the liquid storage tank, the controller calculates the liquid discharge amount of the liquid storage tank according to the data sensed by the sensor, and also stores the production batch of the product; the human-machine interaction module is based on the user operation Select the adding method, the adding method includes manual adding and/or automatic adding; if manual adding is selected, the user manually opens the liquid discharging valve, so that the liquid medicine in the liquid storage tank flows into a reaction tank; if automatic addition is selected, Then, it is necessary to continue to select an adding mode on the human-computer interaction interface, the adding mode includes quantitative adding and/or dynamic adding; the controller automatically turns on the liquid discharging valve according to the selected adding mode, so that the medicine in the liquid storage tank The liquid flows into the reaction tank.
进一步的，该步骤“若选择手动添加，则用户手动开启该出液阀，使得该储液罐内的药液流入一个反应槽内”的步骤还包括如下步骤：该人机交互模块基于用户操作设置一药液添加量；用户手动开启该出液阀，使得该储液罐内的药液流入该反应槽内，当该控制器检测到该储液罐的出液量达到该药液添加量时，自动关闭该出液阀。Further, the step "if the manual addition is selected, the user manually opens the liquid outlet valve so that the liquid medicine in the liquid storage tank flows into a reaction tank" further includes the following steps: the human-computer interaction module is based on user operation Setting a chemical liquid addition amount; the user manually opens the liquid discharge valve, so that the liquid medicine in the liquid storage tank flows into the reaction tank, and when the controller detects that the liquid discharge amount of the liquid storage tank reaches the liquid chemical addition amount The outlet valve is automatically closed.
进一步的，该步骤“该控制器根据所选择的添加模式自动开启该出液阀，使得该储液罐内的药液流入该反应槽内”还包括如下步骤：若选择定量添加，则该人机交互模块基于用户操作设置固定间隔批次及固定添加量；该控制器根据该固定间隔批次及该固定添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。Further, the step “the controller automatically opens the liquid discharge valve according to the selected addition mode, so that the liquid medicine in the liquid storage tank flows into the reaction tank” further includes the following steps: if the quantitative addition is selected, the person The machine interaction module sets the fixed interval batch and the fixed addition amount based on the user operation; the controller automatically opens the liquid outlet valve according to the fixed interval batch and the fixed addition amount to perform the liquid medicine addition, and automatically closes the liquid discharge when the addition is completed. valve.
进一步的，该步骤“该控制器根据所选择的添加模式自动开启该出液阀，使得该储液罐内的药液流入该反应槽内”还包括如下步骤：若选择动态添加，则该人机交互模块基于用户操作设置动态批次区间、动态间隔批次及动态添加量；该控制器根据该动态批次区间、该动态间隔批次及该动态添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。Further, the step “the controller automatically opens the liquid discharge valve according to the selected addition mode, so that the liquid medicine in the liquid storage tank flows into the reaction tank” further includes the following steps: if the dynamic addition is selected, the person The machine interaction module sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on user operations; the controller automatically opens the liquid outlet valve according to the dynamic batch interval, the dynamic interval batch, and the dynamic addition amount to perform liquid medicine Add, automatically close the outlet valve when added.
进一步的，该药液添加方法还包括如下步骤：该控制器记录并存储药液添加过程中的数据，统计出各时间段内的药液消耗量；及该人工交互界面显示该控制器所得的数据。Further, the method for adding a liquid medicine further comprises the steps of: recording and storing data in the process of adding the liquid medicine, and counting the consumption amount of the liquid medicine in each time period; and the artificial interaction interface displaying the result obtained by the controller data.
进一步的，该药液添加方法还包括如下步骤：该控制器检测该储液罐是否能正常出液。Further, the liquid medicine adding method further comprises the following steps: the controller detects whether the liquid storage tank can be normally discharged.
进一步的，该储液罐还包括进液阀，该进液阀用于控制一外围供液系统的药液流入该储液罐内；该控制器还用于根据该传感器所感测的数据计算出该储液罐的进液量；该药液添加方法还包括如下步骤：该控制器检测该储液罐是否能正常进液。Further, the liquid storage tank further includes an inlet valve for controlling the flow of the liquid medicine of a peripheral liquid supply system into the liquid storage tank; the controller is further configured to calculate according to the data sensed by the sensor The liquid intake amount of the liquid storage tank; the chemical liquid adding method further comprises the following steps: the controller detects whether the liquid storage tank can normally enter the liquid.
进一步的，该药液添加方法还包括如下步骤：该控制器当检测到该储液罐不能正常进液时，最大限度地保证该反应槽内药液的正常供给。Further, the chemical liquid adding method further comprises the following steps: the controller ensures the normal supply of the chemical liquid in the reaction tank to the utmost when detecting that the liquid storage tank cannot be normally fed.
进一步的，该药液添加方法还包括如下步骤：该控制器检测该传感器是否损坏。Further, the liquid medicine adding method further includes the following steps: the controller detects whether the sensor is damaged.
与现有技术相比，本发明的有益效果是：高精度、灵活且智能，能有效保证产品的生产工艺稳定可靠，提升产品良率，降低产品返工率。Compared with the prior art, the beneficial effects of the invention are: high precision, flexibility and intelligence, which can effectively ensure the stable and reliable production process of the product, improve the product yield and reduce the product rework rate.
附图说明DRAWINGS
图1为本发明第一实施例提供的药液添加系统的功能模块图；1 is a functional block diagram of a medical liquid adding system according to a first embodiment of the present invention;
图2为本发明第二实施例提供的药液添加方法的流程图；2 is a flow chart of a method for adding a liquid medicine according to a second embodiment of the present invention;
图3为图2的步骤S3的子流程图；Figure 3 is a sub-flow diagram of step S3 of Figure 2;
图4为图2的步骤S4的子流程图。4 is a sub-flow diagram of step S4 of FIG. 2.
具体实施方式Detailed ways
下面结合附图和实施例对发明进行详细的说明。The invention will be described in detail below with reference to the accompanying drawings and embodiments.
如图1所示，本发明提出的药液添加系统100包括一个储液罐10、一个传感器20、一个人机交互模块30、一个控制器40及一个报警器50。As shown in FIG. 1, the medical liquid adding system 100 proposed by the present invention comprises a liquid storage tank 10, a sensor 20, a human-machine interaction module 30, a controller 40 and an alarm 50.
该储液罐10用于存储一产品(比如硅片等)加工时所使用的药液。该储液罐10包括一个进液阀11及一个出液阀12。该进液阀11用于控制一个外围供液系统200的药液流入该储液罐10内。该出液阀12用于控制该储液罐10内的药液流入一个反应槽300内。The liquid storage tank 10 is for storing a chemical liquid used in processing a product such as a silicon wafer or the like. The liquid storage tank 10 includes an inlet valve 11 and an outlet valve 12. The liquid inlet valve 11 is for controlling the flow of the chemical liquid of the peripheral liquid supply system 200 into the liquid storage tank 10. The liquid discharge valve 12 is for controlling the flow of the chemical liquid in the liquid storage tank 10 into one reaction tank 300.
该传感器20用于感测该储液罐10内药液的液位。在本实施例中，该传感器20为线性传感器。The sensor 20 is used to sense the liquid level of the liquid in the liquid storage tank 10. In the present embodiment, the sensor 20 is a linear sensor.
该人机交互模块30用于将用户输入的数据传递给该控制器40，还能显示该控制器40所得到的数据。具体的，用户通过该人机交互模块30选择“添加方式”(即手动添加及/或自动添加)、“添加模式”(即定量添加及/或动态添加)等，还能设置间隔批次及各批次的药液添加量。若用户选择“手动添加”，则需要用户手动开启该出液阀11进行药液添加。该人机交互模块30基于用户操作设置一药液添加量，等药液添加完毕后，该控制器40自动关闭该出液阀12。若用户选择“自动添加”，则该人机交互模块30直接将数据传递给该控制器40，由该控制器40控制该出液阀12的开启及关闭，以添加药液。当用户选择“自动添加”时，还需进一步选择“添加模式”。若用户选择“定量添加”，则需设置固定间隔批次及固定添加量(比如固定间隔批次为5，固定添加量为1升， 则表示每间隔5个批次，就向该反应槽内添加1升的药液)。若用户选择“动态添加”，则需要设置动态批次区间、动态间隔批次及动态添加量(比如动态批次区间为100、200、300……，动态间隔批次为5、4、3……,动态添加量为1升、1.5升、2升……则表示前100批次内每间隔5批次添加1升药液，100－200批次内每间隔4批次添加1.5升药液，200－300批次内每间隔3批次添加2升药液等)。在本实施例中，一批产品代表3篮或4篮硅片，每一篮有100片硅片。The human-computer interaction module 30 is configured to transmit data input by the user to the controller 40, and can also display data obtained by the controller 40. Specifically, the user selects “add mode” (ie, manual addition and/or automatic addition), “add mode” (ie, quantitative addition and/or dynamic addition) through the human-computer interaction module 30, and can also set interval batches and The amount of liquid medicine added to each batch. If the user selects "manually add", the user needs to manually open the liquid outlet valve 11 for chemical liquid addition. The human-computer interaction module 30 sets a chemical liquid addition amount based on a user operation, and the controller 40 automatically closes the liquid discharge valve 12 after the chemical liquid is added. If the user selects "automatically add", the human-computer interaction module 30 directly transmits data to the controller 40, and the controller 40 controls the opening and closing of the liquid outlet valve 12 to add the chemical liquid. When the user selects "Auto Add", you need to further select "Add Mode". If the user selects “Quantitative Addition”, it is necessary to set the fixed interval batch and the fixed addition amount (for example, the fixed interval batch is 5, and the fixed addition amount is 1 liter, which means that every 5 batches are placed in the reaction tank. Add 1 liter of liquid). If the user selects “Dynamic Add”, you need to set the dynamic batch interval, dynamic interval batch and dynamic addition amount (such as dynamic batch interval is 100, 200, 300..., dynamic interval batch is 5, 4, 3... ..., the dynamic addition amount is 1 liter, 1.5 liter, 2 liters... It means that 1 liter of liquid medicine is added every 5 batches in the first 100 batches, and 1.5 liters of liquid medicine is added every 4 batches in 100-200 batches. , add 2 liters of liquid medicine, etc., every 3 batches in 200-300 batches). In this embodiment, a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
该控制器40用于根据该传感器20所感测的数据计算该储液罐10内的药液的体积，并存储产品的生产批次，根据该人机交互模块30设置的数据向该反应槽300内添加药液。The controller 40 is configured to calculate a volume of the liquid medicine in the liquid storage tank 10 according to the data sensed by the sensor 20, and store a production batch of the product, and send the data to the reaction tank 300 according to the data set by the human-machine interaction module 30. Add liquid medicine inside.
具体的，该储液罐10内药液的体积的计算方法为：先计算出该储液罐10的底面积，然后实时读取该传感器20的数值，结合该传感器20的测量量程以换算出该储液罐10内药液的液位，最后根据该储液罐10的形状及面积计算公式计算出该储液罐10内药液的体积。Specifically, the volume of the liquid medicine in the liquid storage tank 10 is calculated by first calculating the bottom area of the liquid storage tank 10, and then reading the value of the sensor 20 in real time, and converting the measurement range of the sensor 20 to be converted. The liquid level of the chemical liquid in the liquid storage tank 10 is finally calculated based on the shape and area calculation formula of the liquid storage tank 10 to calculate the volume of the chemical liquid in the liquid storage tank 10.
当用户选择手动添加时，用户在该人机交互模块30设置一药液添加量，并人工手动开启该出液阀12，该储液罐10内的药液流入该反应槽300内，直至该储液罐10的出液量达到该药液添加量时，该控制器40关闭该出液阀12。具体的，该控制器40实时读取该出液阀12刚开启时该传感器20的数值，计算出该储液罐10内药液的初始体积；用该初始体积减去该用户设置的药液添加量，得到一个预计体积；当该储液罐10内的剩余药液的体积等于该预计体积时，控制该出液阀12关闭，完成药液添加。When the user selects manual addition, the user sets a chemical liquid addition amount in the human-computer interaction module 30, and manually opens the liquid discharge valve 12, and the liquid medicine in the liquid storage tank 10 flows into the reaction tank 300 until the When the liquid discharge amount of the liquid storage tank 10 reaches the chemical liquid addition amount, the controller 40 closes the liquid discharge valve 12. Specifically, the controller 40 reads the value of the sensor 20 when the liquid outlet valve 12 is just opened, calculates the initial volume of the liquid medicine in the liquid storage tank 10, and subtracts the liquid medicine set by the user from the initial volume. The amount is added to obtain an estimated volume; when the volume of the remaining liquid in the liquid storage tank 10 is equal to the estimated volume, the liquid discharge valve 12 is controlled to be closed, and the liquid chemical addition is completed.
当用户选择自动添加且选择定量添加时，用户在该人机交互模块30设置固定间隔批次及固定添加量(比如固定间隔批次为5，固定添加量为1升，则表示每间隔5个批次，就向该反应槽内添加1升的药液)，该控制器40根据该固定间隔批次及该固定添加量自动开启该出液阀12进行药液添加，当添加完毕后自动关闭该出液阀12。在本实施例中，一批产品代表3篮或4篮硅片，每一篮有100片硅片。When the user selects the automatic addition and selects the quantitative addition, the user sets the fixed interval batch and the fixed addition amount in the human-computer interaction module 30 (for example, the fixed interval batch is 5, and the fixed addition amount is 1 liter, which means 5 intervals per interval). In the batch, 1 liter of the chemical solution is added to the reaction tank, and the controller 40 automatically opens the liquid outlet valve 12 according to the fixed interval batch and the fixed addition amount to add the liquid medicine, and automatically closes when the addition is completed. The liquid discharge valve 12. In this embodiment, a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
当用户选择“自动添加”且选择“动态添加”时，该人机交互模块30基于用户操作设置动态批次区间、动态间隔批次及动态添加量(比如动态批次区间 为100、200、300……，动态间隔批次为5、4、3……,动态添加量为1升、1.5升、2升……则表示前100批次内每间隔5批次添加1升药液，100－200批次内每间隔4批次添加1.5升药液，200－300批次内每间隔3批次添加2升药液等)，该控制器40根据该动态间隔批次及该动态添加量自动开启该出液阀12进行药液添加，当添加完毕后自动关闭该出液阀12。可以理解，随着生产批次逐渐增加，该反应槽300内的药液的活性及浓度会慢慢降低，如果一直按照固定的间隔批次和固定添加量对反应槽进行药液添加，则工艺效果会慢慢变差，因此采用动态添加的方式能延长该反应槽300内药液的寿命，并且保证工艺效果。在本实施例中，一批产品代表3篮或4篮硅片，每一篮有100片硅片。When the user selects “automatically add” and selects “dynamic addition”, the human-computer interaction module 30 sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on the user operation (for example, the dynamic batch interval is 100, 200, 300). ..., the dynamic interval batch is 5, 4, 3..., the dynamic addition amount is 1 liter, 1.5 liter, 2 liters... It means that 1 liter of liquid medicine is added every 5 batches in the first 100 batches, 100- 1.5 litres of chemical solution are added in 4 batches in 200 batches, 2 liters of chemical solution are added in 3 batches in 200-300 batches, etc.), and the controller 40 automatically according to the dynamic interval batch and the dynamic addition amount. The liquid discharge valve 12 is opened to perform the chemical liquid addition, and the liquid discharge valve 12 is automatically closed when the addition is completed. It can be understood that as the production batch is gradually increased, the activity and concentration of the chemical liquid in the reaction tank 300 will gradually decrease. If the chemical solution is added to the reaction tank according to the fixed interval batch and the fixed addition amount, the process The effect will gradually deteriorate, so the dynamic addition method can prolong the life of the liquid in the reaction tank 300 and ensure the process effect. In this embodiment, a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
该控制器40还能检测该储液罐10是否能正常出液。具体的，当该反应槽300需要添加药液时，该控制器40在该出液阀12开启后，每间隔一预定时间通过该传感器20检测该储液罐10内药液的液位，并将相邻两个预定时间间隔的液位进行比较，以判断该储液罐10内药液的液位是否持续下降。若该储液罐10内药液的液位没有持续下降，则判断该储液罐10不能正常出液并启动该报警器50进行出液报警，其故障原因包括：该出液阀12损坏或出液管道堵塞等。The controller 40 can also detect whether the liquid storage tank 10 can be normally discharged. Specifically, when the reaction tank 300 needs to add a chemical liquid, the controller 40 detects the liquid level of the liquid medicine in the liquid storage tank 10 through the sensor 20 every time a predetermined time interval after the liquid discharge valve 12 is opened, and The liquid levels of two adjacent predetermined time intervals are compared to determine whether the liquid level of the liquid medicine in the liquid storage tank 10 continues to decrease. If the liquid level of the liquid medicine in the liquid storage tank 10 does not continuously decrease, it is judged that the liquid storage tank 10 cannot be discharged normally and the alarm device 50 is activated to perform a liquid discharge alarm, and the failure causes include: the liquid discharge valve 12 is damaged or The outlet pipe is blocked.
该控制器40还能检测该储液罐10是否能正常进液。具体的，该控制器40实时检测该储液罐10内药液的液位，当该储液罐10内药液的液位过低，需要该外围供液系统200进行供液时，该控制器40会开启该进液阀11，每间隔一预定时间通过该传感器20检测该储液罐10内药液的液位，并将相邻两个预定时间间隔的液位进行比较，以判断该储液罐10内药液的液位是否持续升高。若该储液罐10内药液的液位没有持续升高，则判断该储液罐10不能正常进液并启动该报警器50进行进液报警，其故障原因包括：该进液阀11损坏、或进液管道堵塞或外围供液系统200出现故障等。The controller 40 can also detect whether the liquid storage tank 10 can normally enter the liquid. Specifically, the controller 40 detects the liquid level of the liquid medicine in the liquid storage tank 10 in real time. When the liquid level of the chemical liquid in the liquid storage tank 10 is too low, the peripheral liquid supply system 200 is required to perform liquid supply, and the control is performed. The device 40 opens the liquid inlet valve 11 and detects the liquid level of the liquid medicine in the liquid storage tank 10 through the sensor 20 every predetermined time interval, and compares the liquid levels of two adjacent predetermined time intervals to determine the liquid level. Whether the liquid level of the chemical liquid in the liquid storage tank 10 continues to rise. If the liquid level of the liquid medicine in the liquid storage tank 10 does not continuously rise, it is judged that the liquid storage tank 10 cannot normally enter the liquid and the alarm device 50 is activated to perform the liquid inlet alarm. The cause of the failure includes: the liquid inlet valve 11 is damaged. , or the inlet pipe is blocked or the peripheral liquid supply system 200 is malfunctioning.
在本实施例中，该报警器50嵌入在该人机交互模块30内，且以该人机交互模块30上呈现文字提示信息的形式进行报警。可以理解，该报警器50也可以为发光二极管或蜂鸣器或语音播报。该进液报警与该出液报警为不同形式的报警信号，比如两个不同的声音或者两个不同的灯光或者一个声音警报，另一个灯光警报等。In the embodiment, the alarm device 50 is embedded in the human-machine interaction module 30, and an alarm is generated in the form of text prompt information presented on the human-machine interaction module 30. It can be understood that the alarm 50 can also be a light emitting diode or a buzzer or a voice broadcast. The liquid inlet alarm and the liquid discharge alarm are different types of alarm signals, such as two different sounds or two different lights or one sound alarm, and another light alarm.
可以理解，若该储液罐10不能正常进液，则会导致该储液罐10不能及时 给该反应槽300补充药液，从而对产品的生产工艺产生影响。因此通过检测该储液罐110是否能正常进液，能保证生产工艺稳定可靠，提高产品良率。It can be understood that if the liquid storage tank 10 cannot be properly charged, the liquid storage tank 10 cannot be replenished with the chemical liquid in the reaction tank 300 in time, thereby affecting the production process of the product. Therefore, by detecting whether the liquid storage tank 110 can normally enter the liquid, the production process can be ensured to be stable and reliable, and the product yield can be improved.
该控制器40还用于当该储液罐10不能正常进液而导致该报警器50出现进液报警时，最大限度地保证该反应槽300内药液的正常供给。具体的，若该储液罐10不能正常进液时，该控制器40检测该反应槽300是否有药液添加的请求。若此时该反应槽300有药液添加的请求，该控制器40先判断该储液罐10内剩余的药液是否能满足该反应槽300此次的药液补充。若能满足，则忽略该进液报警，继续开启该出液阀12，使得该储液罐10向该反应槽300添加药液。若不满足，则该储液罐10继续等待该外围供液系统200的药液补充。这样能保证在出现进液报警后，该储液罐10还能持续向该反应槽300进行至少一次药液添加动作，从而留给工作人员更多的故障处理时间。The controller 40 is further configured to maximize the normal supply of the liquid medicine in the reaction tank 300 when the liquid storage tank 10 fails to properly enter the liquid and causes the alarm 50 to enter the liquid alarm. Specifically, if the liquid storage tank 10 cannot normally enter the liquid, the controller 40 detects whether the reaction tank 300 has a request for chemical liquid addition. If the reaction tank 300 has a request for the addition of the chemical solution at this time, the controller 40 first determines whether the remaining chemical liquid in the liquid storage tank 10 can satisfy the liquid chemical replenishment of the reaction tank 300. If it is satisfied, the liquid inlet alarm is ignored, and the liquid discharge valve 12 is continuously opened, so that the liquid storage tank 10 adds the chemical liquid to the reaction tank 300. If not, the liquid storage tank 10 continues to wait for the liquid medicine of the peripheral liquid supply system 200 to be replenished. This ensures that after the liquid inlet alarm occurs, the liquid storage tank 10 can continue to perform at least one chemical liquid addition operation to the reaction tank 300, thereby leaving the worker with more trouble processing time.
该控制器40还用于记录并存储药液添加过程中的数据，统计出各时间段内的药液消耗量。该控制器40还能将该药液添加过程中的数据及/或各时间段(比如每小时、每天、每月及每年)内的药液消耗量以报表的形式显示在该人机交互模块30上，便于工作人员进行查找。该控制器40还将该药液添加过程中的数据及/或各时间段内的药液消耗量以多种文档格式导出，便于进行数据分析。The controller 40 is also used to record and store data in the process of adding the liquid medicine, and to calculate the amount of liquid medicine consumed in each time period. The controller 40 can also display the data in the process of adding the drug solution and/or the consumption of the liquid medicine in each time period (such as hourly, daily, monthly and yearly) in the form of a report on the human-computer interaction module. 30, easy for the staff to find. The controller 40 also derives data in the chemical addition process and/or drug consumption in each time period in a plurality of document formats to facilitate data analysis.
该控制器40还能检测该传感器20是否损坏。具体的，该控制器40实时读取该传感器20的数值，根据该传感器20的安装位置提前定义好其在整个行程范围内运动时会达到的最大值和最小值(此值经过实际测试得到)，然后放宽一定范围后作为一预定行程，若该控制器40读取到的数值超出该预定行程，则判断该传感器20损坏。The controller 40 can also detect if the sensor 20 is damaged. Specifically, the controller 40 reads the value of the sensor 20 in real time, and defines the maximum value and the minimum value that the motor 20 can reach when moving in the entire stroke range according to the installation position of the sensor 20 (this value is obtained through actual testing). Then, after relaxing a certain range as a predetermined stroke, if the value read by the controller 40 exceeds the predetermined stroke, it is judged that the sensor 20 is damaged.
如图2所示，本发明第二实施例提供一种药液添加方法，其包括如下步骤：As shown in FIG. 2, a second embodiment of the present invention provides a method for adding a medical solution, which includes the following steps:
S1：提供一储液罐、一传感器及一控制器，该储液罐存储一产品加工时所使用的药液，且该储液罐包括出液阀及进液阀。该出液阀用于控制该储液罐内的药液流入一个反应槽内。该进液阀用于控制一外围供液系统的药液流入该储液罐内。该传感器感测该储液罐内药液的液位。该控制器根据该传感器所感测的数据计算该储液罐的出液量及进液量。该控制器还存储该产品的生产批次。S1: providing a liquid storage tank, a sensor and a controller, the liquid storage tank storing a chemical liquid used in processing the product, and the liquid storage tank comprises an outlet valve and an inlet valve. The liquid outlet valve is used to control the liquid medicine in the liquid storage tank to flow into a reaction tank. The liquid inlet valve is used to control the flow of the liquid medicine of a peripheral liquid supply system into the liquid storage tank. The sensor senses the level of the liquid in the reservoir. The controller calculates the liquid discharge amount and the liquid intake amount of the liquid storage tank according to the data sensed by the sensor. The controller also stores production batches for the product.
S2：一人机交互模块基于用户操作选择添加方式，该添加方式包括手动添加及/或自动添加。S2: A human-computer interaction module selects an adding manner based on a user operation, and the adding manner includes manual adding and/or automatically adding.
S3：若选择手动添加，则用户手动开启该出液阀，使得该储液罐内的药液流入该反应槽内，转入步骤S5。S3: If manual addition is selected, the user manually opens the liquid discharge valve, so that the chemical liquid in the liquid storage tank flows into the reaction tank, and the process proceeds to step S5.
具体的，如图3所示，该步骤S3还包括如下子步骤：Specifically, as shown in FIG. 3, the step S3 further includes the following sub-steps:
S31：该人机交互模块基于用户操作设置一药液添加量。S31: The human-computer interaction module sets a chemical liquid addition amount based on a user operation.
S32：用户手动开启该出液阀，使得该储液罐内的药液流入该反应槽内。S32: The user manually opens the liquid discharge valve, so that the liquid medicine in the liquid storage tank flows into the reaction tank.
S33：当该控制器检测到该储液罐的出液量达到该药液添加量时，自动关闭该出液阀。其中，该步骤S33还包括如下子步骤：实时读取该出液阀刚开启时该传感器的数值，计算出该储液罐内药液的初始体积；用该初始体积减去该用户设置的药液添加量，得到一个预计体积；当该储液罐内的剩余药液的体积等于该预计体积时，关闭该出液阀，完成药液添加。S33: When the controller detects that the liquid discharge amount of the liquid storage tank reaches the liquid chemical addition amount, the liquid discharge valve is automatically closed. Wherein, the step S33 further comprises the following substeps: reading the value of the sensor when the liquid outlet valve is just opened, calculating the initial volume of the liquid medicine in the liquid storage tank; and subtracting the medicine set by the user from the initial volume The liquid addition amount is obtained to obtain an estimated volume; when the volume of the remaining chemical liquid in the liquid storage tank is equal to the predicted volume, the liquid discharge valve is closed to complete the liquid chemical addition.
S4：若选择自动添加，则用户需继续在该人机交互界面上选择添加模式，该添加模式包括定量添加及/或动态添加，然后该控制器根据所选择的添加模式自动开启该出液阀，使得该储液罐内的药液流入该反应槽内，转入步骤S5。S4: If automatic adding is selected, the user needs to continue to select an adding mode on the human-computer interaction interface, the adding mode includes quantitative adding and/or dynamic adding, and then the controller automatically turns on the liquid discharging valve according to the selected adding mode. The chemical liquid in the liquid storage tank is caused to flow into the reaction tank, and the process proceeds to step S5.
具体的，如图4所示，该步骤S4还包括如下子步骤：Specifically, as shown in FIG. 4, the step S4 further includes the following sub-steps:
S41：该人机交互界面基于用户操作选择添加模式。S41: The human-computer interaction interface selects an add mode based on a user operation.
S42：若选择定量添加，则该人机交互模块基于用户操作设置固定间隔批次及固定添加量(比如固定间隔批次为5，固定添加量为1升，则表示每间隔5个批次，就向该反应槽内添加1升的药液)，该控制器根据该固定间隔批次及该固定添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。在本实施例中，一批产品代表3篮或4篮硅片，每一篮有100片硅片。S42: If the quantitative addition is selected, the human-computer interaction module sets the fixed interval batch and the fixed addition amount based on the user operation (for example, the fixed interval batch is 5, and the fixed addition amount is 1 liter, indicating that each batch is 5 batches, To the reaction tank, 1 liter of the chemical solution is added, and the controller automatically opens the liquid outlet valve according to the fixed interval batch and the fixed addition amount to add the liquid medicine, and automatically closes the liquid outlet valve when the addition is completed. In this embodiment, a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
S43：若选择动态添加，则该人机交互模块基于用户操作设置动态批次区间、动态间隔批次及动态添加量(比如动态批次区间为100、200、300……，动态间隔批次为5、4、3……,动态添加量为1升、1.5升、2升……则表示前100批次内每间隔5批次添加1升药液，100－200批次内每间隔4批次添加1.5升药液，200－300批次内每间隔3批次添加2升药液等)，该控制器根据该动态批次区间、该动态间隔批次及该动态添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。在本实施例中，一批产品代表3篮或4篮硅片，每一篮有100片硅片。S43: If dynamic addition is selected, the human-computer interaction module sets dynamic batch interval, dynamic interval batch and dynamic addition amount based on user operation (for example, the dynamic batch interval is 100, 200, 300..., the dynamic interval batch is 5, 4, 3..., the dynamic addition amount is 1 liter, 1.5 liter, 2 liters... It means that 1 liter of liquid medicine is added every 5 batches in the first 100 batches, and 4 batches are every 100-200 batches. Add 1.5 liters of drug solution, add 2 liters of drug solution every 3 batches in 200-300 batches, etc.), and the controller automatically starts the output according to the dynamic batch interval, the dynamic interval batch and the dynamic addition amount. The liquid valve is added with the liquid medicine, and the liquid discharge valve is automatically closed when the addition is completed. In this embodiment, a batch of products represents 3 baskets or 4 baskets of silicon wafers, and each basket has 100 wafers.
S5：该控制器记录并存储在对该反应槽进行药液添加过程中的数据，统计 出各时间段(比如每小时、每天、每月及每年)内的药液消耗量。该步骤S5还包括如下子步骤：将该药液添加过程中的数据及/或各时间段(比如每小时、每天、每月及每年)内的药液消耗量以报表的形式显示在该人机交互模块上，便于工作人员进行查找；及/或将该药液添加过程中的数据及/或各时间段的药液消耗量以多种文档格式导出，便于进行数据分析。S5: The controller records and stores the data in the process of adding the chemical solution to the reaction tank, and counts the consumption of the liquid medicine in each time period (such as hourly, daily, monthly and yearly). The step S5 further includes the following sub-steps: displaying the data in the process of adding the drug solution and/or the consumption of the drug solution in each time period (such as hourly, daily, monthly and yearly) in the form of a report on the person On the machine interaction module, it is convenient for the staff to perform the search; and/or the data in the process of adding the chemical liquid and/or the consumption of the liquid medicine in each time period are exported in various document formats, which is convenient for data analysis.
S6：该人工交互界面显示该控制器所得的数据。S6: The artificial interaction interface displays the data obtained by the controller.
该药液添加方法还包括步骤：检测该储液罐是否能正常出液。具体的，该步骤还包括如下子步骤：当该反应槽需要添加药液时，在该出液阀开启后，每间隔一预定时间通过该传感器检测该储液罐内药液的液位，并将相邻两个预定时间间隔的液位进行比较，以判断该储液罐内药液的液位是否持续下降。若该储液罐内药液的液位没有处于持续下降中，则判断该储液罐不能正常出液并启动一报警系统进行出液报警，其故障原因包括：该出液阀损坏或出液管道堵塞等。The chemical liquid addition method further comprises the step of detecting whether the liquid storage tank can be normally discharged. Specifically, the step further includes the following sub-steps: when the reaction tank needs to add the liquid medicine, after the liquid outlet valve is opened, the liquid level of the liquid medicine in the liquid storage tank is detected by the sensor every predetermined time interval, and The liquid levels of two adjacent predetermined time intervals are compared to determine whether the liquid level of the liquid medicine in the liquid storage tank continues to decrease. If the liquid level of the liquid medicine in the liquid storage tank is not continuously falling, it is judged that the liquid storage tank cannot be discharged normally and an alarm system is activated to perform an outflow alarm, and the failure causes include: the outlet valve is damaged or discharged Pipes are blocked.
该药液添加方法还包括步骤：检测该储液罐是否能正常进液。具体的，该步骤还包括如下子步骤：实时检测该储液罐内药液的液位，当该储液罐内药液的液位过低，需要一外围供液系统进行供液时，开启该进液阀，每间隔一预定时间通过该传感器检测该储液罐内药液的液位，并将相邻两个预定时间间隔的液位进行比较，以判断该储液罐内药液的液位是否持续升高。若该储液罐内药液的液位没有持续升高，则判断该储液罐不能正常进液并启动一报警系统进行进液报警，其故障原因包括该进液阀损坏、进液管道堵塞或该外围供液系统出现故障等。若该储液罐不能正常进液，则会导致该储液罐不能及时给该反应槽补充药液，从而对产品的生产工艺产生影响。因此通过检测该储液罐是否能正常进液，能保证产品的生产工艺稳定可靠，提高产品良率。The liquid medicine adding method further comprises the step of: detecting whether the liquid storage tank can be normally fed. Specifically, the step further includes the following substeps: detecting the liquid level of the liquid medicine in the liquid storage tank in real time, and when the liquid level of the liquid medicine in the liquid storage tank is too low, a peripheral liquid supply system is required for liquid supply, and the liquid is turned on. The liquid inlet valve detects the liquid level of the liquid medicine in the liquid storage tank through the sensor every predetermined time interval, and compares the liquid levels of two adjacent predetermined time intervals to determine the liquid medicine in the liquid storage tank. Whether the liquid level continues to rise. If the liquid level of the liquid medicine in the liquid storage tank does not continuously rise, it is judged that the liquid storage tank cannot be normally infused and an alarm system is activated to perform an infusion alarm, and the cause of the failure includes damage of the inlet valve and blockage of the inlet pipe. Or the peripheral liquid supply system malfunctions, and the like. If the liquid storage tank cannot be properly fed, the liquid storage tank cannot be replenished with the chemical liquid in time, thereby affecting the production process of the product. Therefore, by detecting whether the liquid storage tank can normally enter the liquid, the production process of the product can be ensured to be stable and reliable, and the product yield can be improved.
该药液添加方法还包括步骤：当该储液罐不能正常进液而导致出现进液报警时，最大限度地保证该反应槽内药液的正常供给。具体的，该步骤还包括如下子步骤：当该储液罐不能正常进液时，检测该反应槽是否有药液添加的请求；若此时该反应槽有药液添加的请求，则先判断该储液罐内剩余的药液是否能满足该反应槽此次的药液补充；若能满足，则继续开启该出液阀，使得该储液罐向该反应槽添加药液；若不满足，则该储液罐继续等待该外围供液系统的药液 补充。这样保证在出现进液报警后，该储液罐还能持续向该反应槽进行至少一次药液添加动作，从而留给工作人员更多的故障处理时间。The chemical liquid addition method further comprises the steps of: when the liquid storage tank cannot be normally fed, and the liquid inlet alarm occurs, the normal supply of the chemical liquid in the reaction tank is ensured to the utmost. Specifically, the step further includes the following sub-step: when the liquid storage tank is unable to enter the liquid normally, detecting whether the reaction tank has a request for adding the chemical liquid; if the reaction tank has a request for adding the chemical liquid, first determining Whether the remaining liquid in the liquid storage tank can satisfy the liquid replenishment of the reaction tank; if it is satisfied, the liquid discharge valve is continuously opened, so that the liquid storage tank adds the chemical liquid to the reaction tank; Then, the liquid storage tank continues to wait for the liquid medicine of the peripheral liquid supply system to be replenished. This ensures that after the liquid inlet alarm occurs, the liquid storage tank can continue to perform at least one chemical liquid addition operation to the reaction tank, thereby leaving the staff with more troubleshooting time.
该药液添加方法还包括步骤：检测该传感器是否损坏。具体的，该步骤还包括如下子步骤：在该储液罐出液及进液的过程中，实时读取该传感器的数值，根据该传感器的安装位置提前定义好其在整个行程范围内运动时会达到的最大值和最小值(此值经过实际测试得到)，然后放宽一定范围后作为一预定行程，若读取到的数值超出该预定行程，则判断该传感器损坏。The liquid addition method further includes the step of detecting whether the sensor is damaged. Specifically, the step further includes the following sub-step: reading the value of the sensor in real time during the liquid discharge and liquid inlet of the liquid storage tank, and defining the movement position of the sensor in advance according to the installation position of the sensor The maximum and minimum values that will be reached (this value is obtained by actual testing), and then a certain range is relaxed as a predetermined stroke. If the read value exceeds the predetermined stroke, the sensor is judged to be damaged.
与现有技术相比，本发明的药液添加系统及方法，高精度、灵活且智能，能有效保证产品的生产工艺的稳定可靠，提升产品良率，降低产品返工率。Compared with the prior art, the liquid medicine adding system and method of the invention are high-precision, flexible and intelligent, can effectively ensure the stable and reliable production process of the product, improve the product yield and reduce the product rework rate.
上述实施例仅用于说明本发明的具体实施方式。应当指出的是，对于本领域的普通技术人员来说，在不脱离本发明构思的前提下，还可以做出若干变形和变化，这些变形和变化都应属于本发明的保护范围。The above embodiments are merely illustrative of specific embodiments of the invention. It is to be noted that a number of variations and modifications may be made by those skilled in the art without departing from the spirit and scope of the invention.

Claims (18)

  1. 一种药液添加系统，包括一个储液罐，其特征在于，该药液添加系统还包括一个传感器、一个人机交互模块及一个控制器；该储液罐包括出液阀；该出液阀用于控制该储液罐内的药液流入一个反应槽内；该传感器用于感测该储液罐内药液的液位；该人机交互模块用于将用户输入的数据传递给该控制器；该人机交互模块还用于基于用户操作选择添加方式及/或添加模式；该添加方式包括手动添加及/或自动添加，该添加模式包括定量添加及/或动态添加；该控制器用于根据该传感器所感测的数据计算该储液罐内药液的体积，从而计算出该储液罐的出液量；该控制器还用于根据该人机交互模块设置的数据向该反应槽内添加药液；该控制器还用于存储该产品的生产批次。A liquid medicine adding system, comprising a liquid storage tank, characterized in that the liquid chemical adding system further comprises a sensor, a human-computer interaction module and a controller; the liquid storage tank comprises an liquid discharging valve; the liquid discharging valve The utility model is configured to control the liquid medicine in the liquid storage tank to flow into a reaction tank; the sensor is configured to sense a liquid level of the chemical liquid in the liquid storage tank; the human-machine interaction module is configured to transmit data input by the user to the control The human-computer interaction module is further configured to select an add mode and/or an add mode based on a user operation; the add mode includes manual addition and/or automatic addition, and the add mode includes quantitative addition and/or dynamic addition; the controller is used for Calculating the volume of the liquid medicine in the liquid storage tank according to the data sensed by the sensor, thereby calculating the liquid discharge amount of the liquid storage tank; the controller is further configured to send the data set in the human-machine interaction module to the reaction tank according to the data A chemical solution is added; the controller is also used to store a production batch of the product.
  2. 如权利要求1所述的药液添加系统，其特征在于，当选择手动添加时，该人机交互模块基于用户操作设置一药液添加量，用户手动开启该出液阀，使得该储液罐内的药液流入该反应槽内，当该控制器检测到该储液罐的出液量达到该药液添加量时，自动关闭该出液阀。The medical liquid adding system according to claim 1, wherein when the manual adding is selected, the human-computer interaction module sets a chemical liquid addition amount based on a user operation, and the user manually opens the liquid discharging valve to make the liquid storage tank The liquid medicine inflows into the reaction tank, and when the controller detects that the liquid discharge amount of the liquid storage tank reaches the chemical liquid addition amount, the liquid discharge valve is automatically closed.
  3. 如权利要求1所述的药液添加系统，其特征在于，当选择自动添加时，需继续选择该添加模式；若选择定量添加，该人机交互模块基于用户操作设置固定间隔批次及固定添加量，该控制器根据该固定间隔批次及该固定添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。The medical liquid adding system according to claim 1, wherein when the automatic adding is selected, the adding mode is further selected; if the quantitative adding is selected, the human-computer interaction module sets the fixed interval batch and the fixed adding based on the user operation. The controller automatically opens the liquid outlet valve according to the fixed interval batch and the fixed addition amount to add the liquid medicine, and automatically closes the liquid outlet valve when the addition is completed.
  4. 如权利要求1或3所述的药液添加系统，其特征在于，若选择动态添加，该人机交互模块基于用户操作设置动态批次区间、动态间隔批次及动态添加量，该控制器根据该动态批次区间、该动态间隔批次及该动态添加量，自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。The medical liquid adding system according to claim 1 or 3, wherein, if dynamic addition is selected, the human-computer interaction module sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on a user operation, and the controller is based on The dynamic batch interval, the dynamic interval batch and the dynamic addition amount automatically open the liquid outlet valve for chemical liquid addition, and automatically close the liquid discharge valve when the addition is completed.
  5. 如权利要求1所述的药液添加系统，其特征在于，该控制器还用于记录并存储药液添加过程中的数据，统计出各时间段内的药液消耗量；该人机交互界面还用于显示该控制器所得的数据。The medical liquid adding system according to claim 1, wherein the controller is further configured to record and store data in the process of adding the liquid medicine, and calculate the consumption amount of the liquid medicine in each time period; the human-computer interaction interface Also used to display the data obtained by the controller.
  6. 如权利要求1所述的药液添加系统，其特征在于，该控制器还用于检测该储液罐是否能正常出液。The medical fluid addition system according to claim 1, wherein the controller is further configured to detect whether the liquid storage tank can be normally discharged.
  7. 如权利要求1所述的药液添加系统，其特征在于，该储液罐还包括进液 阀，该进液阀用于控制一外围供液系统的药液流入该储液罐内；该控制器还用于根据该传感器所感测的数据计算出该储液罐的进液量；该控制器还用于检测该储液罐是否能正常进液。The medical liquid adding system according to claim 1, wherein the liquid storage tank further comprises an inlet valve for controlling a chemical liquid of a peripheral liquid supply system to flow into the liquid storage tank; the control The device is further configured to calculate the liquid intake amount of the liquid storage tank according to the data sensed by the sensor; the controller is further configured to detect whether the liquid storage tank can normally enter the liquid.
  8. 如权利要求7所述的药液添加系统，其特征在于，该控制器还用于当该储液罐不能正常进液时，最大限度地保证该反应槽内药液的正常供给。The medical liquid adding system according to claim 7, wherein the controller is further configured to ensure the normal supply of the chemical liquid in the reaction tank to a maximum extent when the liquid storage tank cannot be normally fed.
  9. 如权利要求1所述的药液添加系统，其特征在于，该控制器还用于检测该传感器是否损坏。The medical fluid addition system according to claim 1, wherein the controller is further configured to detect whether the sensor is damaged.
  10. 一种药液添加方法，其特征在于，其包括如下步骤：提供一储液罐、一传感器及一控制器，该储液罐存储一产品加工时所使用的药液，且包括出液阀，该传感器感测该储液罐内药液的液位，该控制器根据该传感器所感测的数据计算该储液罐的出液量，还存储产品的生产批次；一人机交互模块基于用户操作选择添加方式，该添加方式包括手动添加及/或自动添加；若选择手动添加，则用户手动开启该出液阀，使得该储液罐内的药液流入一个反应槽内；若选择自动添加，则需继续在该人机交互界面上选择添加模式，该添加模式包括定量添加及/或动态添加；该控制器根据所选择的添加模式自动开启该出液阀，使得该储液罐内的药液流入该反应槽内。A method for adding a liquid medicine, comprising the steps of: providing a liquid storage tank, a sensor, and a controller, wherein the liquid storage tank stores a liquid medicine used in processing the product, and includes a liquid discharging valve, The sensor senses the liquid level of the liquid medicine in the liquid storage tank, the controller calculates the liquid discharge amount of the liquid storage tank according to the data sensed by the sensor, and also stores the production batch of the product; the human-machine interaction module is based on the user operation Select the adding method, the adding method includes manual adding and/or automatic adding; if manual adding is selected, the user manually opens the liquid discharging valve, so that the liquid medicine in the liquid storage tank flows into a reaction tank; if automatic addition is selected, Then, it is necessary to continue to select an adding mode on the human-computer interaction interface, the adding mode includes quantitative adding and/or dynamic adding; the controller automatically turns on the liquid discharging valve according to the selected adding mode, so that the medicine in the liquid storage tank The liquid flows into the reaction tank.
  11. 如权利要求10所述的药液添加方法，其特征在于，该步骤“若选择手动添加，则用户手动开启该出液阀，使得该储液罐内的药液流入一个反应槽内”的步骤还包括如下步骤：该人机交互模块基于用户操作设置一药液添加量；用户手动开启该出液阀，使得该储液罐内的药液流入该反应槽内，当该控制器感测到该储液罐的出液量达到该药液添加量时，自动关闭该出液阀。The method for adding a liquid medicine according to claim 10, wherein the step "if the manual addition is selected, the user manually opens the liquid discharge valve so that the liquid medicine in the liquid storage tank flows into a reaction tank" The method further includes the following steps: the human-computer interaction module sets a chemical liquid addition amount based on a user operation; the user manually opens the liquid discharge valve, so that the liquid medicine in the liquid storage tank flows into the reaction tank, when the controller senses When the liquid discharge amount of the liquid storage tank reaches the chemical liquid addition amount, the liquid discharge valve is automatically closed.
  12. 如权利要求10所述的药液添加方法，其特征在于，该步骤“该控制器根据所选择的添加模式自动开启该出液阀，使得该储液罐内的药液流入该反应槽内”还包括如下步骤：若选择定量添加，则该人机交互模块基于用户操作设置固定间隔批次及固定添加量，该控制器根据该固定间隔批次及该固定添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。The method for adding a liquid medicine according to claim 10, wherein the step "the controller automatically opens the liquid discharge valve according to the selected addition mode, so that the liquid medicine in the liquid storage tank flows into the reaction tank" The method further includes the following steps: if the quantitative addition is selected, the human-computer interaction module sets a fixed interval batch and a fixed addition amount based on a user operation, and the controller automatically opens the liquid outlet valve according to the fixed interval batch and the fixed addition amount. The liquid is added, and the outlet valve is automatically closed when the addition is completed.
  13. 如权利要求10或12所述的药液添加方法，其特征在于，该步骤“该控制器根据所选择的添加模式自动开启该出液阀，使得该储液罐内的药液流入该反应槽内”还包括如下步骤：若选择动态添加，则该人机交互模块基于用户 操作设置动态批次区间、动态间隔批次及动态添加量，该控制器根据该动态批次区间、该动态间隔批次及该动态添加量自动开启该出液阀进行药液添加，当添加完毕后自动关闭该出液阀。The method for adding a liquid medicine according to claim 10 or 12, wherein the step "the controller automatically opens the liquid discharge valve according to the selected addition mode, so that the liquid medicine in the liquid storage tank flows into the reaction tank. The method further includes the following steps: if dynamic addition is selected, the human-computer interaction module sets a dynamic batch interval, a dynamic interval batch, and a dynamic addition amount based on a user operation, and the controller batches the dynamic batch interval according to the dynamic batch interval. The dynamic addition amount automatically opens the liquid discharge valve for chemical liquid addition, and automatically closes the liquid discharge valve when the addition is completed.
  14. 如权利要求10所述的药液添加方法，其特征在于，还包括如下步骤：该控制器记录并存储药液添加过程中的数据，统计出各时间段内的药液消耗量；及该人工交互界面显示该控制器所得的数据。The method according to claim 10, further comprising the steps of: recording and storing data in the process of adding the liquid medicine, and counting the consumption amount of the drug solution in each time period; and the artificial The interactive interface displays the data obtained by the controller.
  15. 如权利要求10所述的药液添加方法，其特征在于，还包括如下步骤：该控制器检测该储液罐是否能正常出液。The method of adding a liquid medicine according to claim 10, further comprising the step of: detecting whether the liquid storage tank can be normally discharged.
  16. 如权利要求10所述的药液添加方法，其特征在于，该储液罐还包括进液阀，该进液阀用于控制一外围供液系统的药液流入该储液罐内；该控制器还用于根据该传感器所感测的数据计算出该储液罐的进液量；该药液添加方法还包括如下步骤：该控制器检测该储液罐是否能正常进液。The liquid medicine adding method according to claim 10, wherein the liquid storage tank further comprises an inlet valve for controlling the flow of the liquid medicine of a peripheral liquid supply system into the liquid storage tank; the control The device is further configured to calculate the liquid intake amount of the liquid storage tank according to the data sensed by the sensor; the chemical liquid adding method further includes the following steps: the controller detects whether the liquid storage tank can normally enter the liquid.
  17. 如权利要求16所述的药液添加方法，其特征在于，还包括如下步骤：该控制器当检测到该储液罐不能正常进液时，最大限度地保证该反应槽内药液的正常供给。The method according to claim 16, further comprising the step of: when detecting that the liquid storage tank cannot be normally fed, the controller ensures the normal supply of the chemical liquid in the reaction tank to the utmost extent. .
  18. 如权利要求10所述的药液添加方法，其特征在于，还包括如下步骤：该控制器检测该传感器是否损坏。The method according to claim 10, further comprising the step of: detecting whether the sensor is damaged.
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