CN103852048B - Process for measuring shape and shape measuring apparatus - Google Patents

Abstract

The present invention provides a kind of process for measuring shape and shape measuring apparatus, and it makes contact pilotage smoothly scan along mensuration face, thus realizes high accuracy and quick measuring shape.Repeat include the relative movement relative to the face of mensuration moved in parallel with the gauge head (26) including orthogonal movement, this moves in parallel and makes contact pilotage (20) move the distance specified to the direction parallel with mensuration face relative to mensuration face, this orthogonal movement with include the position of contact pilotage (20) relative to contact pilotage displacement vector D including the displacement of the position of gauge head (26) and direction of displacement_iMensuration face on make the size of normal direction become the mode of setting value C of predetermined intrusion, make gauge head (26) to according to current stylus position S_iStylus position S with the past_i' difference and calculate measure face normal direction move.

Description

Process for measuring shape and shape measuring apparatus

Technical field

The present invention relates to one makes contact pilotage be scanned while contacting with mensuration face, sequentially reads coordinate and contact pilotage inclines Tiltedly, the process for measuring shape thus shape in the face of mensuration being measured and shape measuring apparatus.

Background technology

With the minitype high-performance of industrial products, high-precision parts are continuously increased.In order to carry out with above-mentioned parts etc. For measuring the sweep measuring of the arbitrary 3D shape of object, propose have one to make contact pilotage sweep while contacting with mensuration face Retouch, sequentially read coordinate, the thus shape measuring apparatus to the mode that the shape in the face of mensuration is measured.Survey in this type of shape In Ding, the various technology making contact pilotage automatically be scanned control relative to mensuration face is proposed.

In the automatic scan control method of existing contact pilotage, in order to avoid automatically scanning the vibration caused to measurement result Produce impact, and there is the situation being equipped with the control method for the purpose of smooth scanning automatically.(for example, referring to patent literary composition Offer 1.)

Fig. 7 A～Fig. 9 is to represent the existing shape measuring apparatus described in above-mentioned patent documentation 1 and process for measuring shape Figure.

Fig. 7 A and Fig. 7 B is the figure representing apparatus structure of the prior art, is roughly divided into three-dimensional measurement device 22, this three-dimensional The control device 23 of determinator 22 and arithmetic unit 24.Three-dimensional measurement device 22 makes the contact pilotage 20 arranged on gauge head 26 and measures thing It is measured while the mensuration face 25a contact of 25.Gauge head 26 has spherical in the lower end of the contact pilotage axle being installed on flexure member Contact pilotage 20, in upper end, there is reflecting mirror.For the mensuration power in the XY direction from the face of mensuration, contact pilotage axle is by flexure member Tilt, detect its tilt quantity according to the laser reflected by reflecting mirror.It addition, for the survey of the Z-direction from the face of mensuration Determining power, contact pilotage axle is moved upward by flexure member, surveys long laser by the Z-direction reflected by reflecting mirror and detects Z side To displacement.Control device 23 and possess X-coordinate test section 31, Y coordinate test section 32, Z coordinate test section 33, tilt detection portion 34, focus error signal test section 35 etc..Arithmetic unit 24 possesses measuring point position operational part 41, contact pilotage displacement vector calculating section 43, mobile vector calculating section 49, mobile instruction unit 87, coefficient of kinetic friction storage part 40 etc..

According to above-mentioned structure, when contact pilotage 20 produces displacement, according to by X-coordinate test section 31, Y coordinate test section 32, Z Probe location that coordinate detection unit 33 detects and the inclination of contact pilotage 20 (contact pilotage axle) detected by tilt detection portion 34 are calculated Go out contact pilotage displacement vector.Further, use adds the direction angle changing of the contact pilotage displacement vector that kinetic force of friction causes and calculates Mobile vector M performs scanning, and wherein, this kinetic force of friction is according to the contact pilotage 20 being previously stored in coefficient of kinetic friction storage part 40 Calculate with the coefficient of kinetic friction measuring face 25a.

Fig. 8 represents the track of probe location P of the prior art and stylus position S.Gauge head 26 is from contact pilotage 20 and the face of mensuration (in this position, contact pilotage 20 is not affected by mensuration power to discontiguous probe location P0 of 25a, thus does not produce position relative to gauge head 26 Move.Therefore, probe location P0 is positioned at the position identical with stylus position S0) by contact pilotage 20 with measure the contact pilotage that connects of face 25a Position S1, and move to be pressed into probe location P1 of intrusion D1 of regulation.By from probe location P to the contact pilotage position in this moment The vector putting S is referred to as contact pilotage displacement vector D.It is D1 from probe location P1 to the displacement vector of stylus position S1.Then, gauge head is made 26 move mobile vector M1 from probe location P1 to the direction vertical with contact pilotage displacement vector D1.Then, at the work of kinetic force of friction F Under with, contact pilotage displacement vector D tilts to have change angle, direction θ relative to the vector N at a right angle with mensuration face.For edge and mensuration Parallel direction, face carries out copying control to gauge head 26, relative to contact pilotage displacement vector D, on the θ of change angle, direction plus 90 ° And the direction obtained carries out gauge head and moves, wherein, the direction change angle θ according to the coefficient of kinetic friction μ being previously stored, and by θ= The relation of arctan μ derives.

Citation

Patent documentation

Patent documentation 1: No. 4611403 description of Japanese Patent No.

Brief summary of the invention

The problem that invention is to be solved

In above-mentioned existing method, because of the direction of inclination or the change of size of gauge head 26, and scanning direction and press-in are repaiied Positive direction all changes, and therefore becomes the sweep measuring that can not referred to as smooth.In the scope that the increase and decrease of kinetic force of friction is the least, Above-mentioned existing method also is able to expect smooth scanning.But, for actual mensuration thing, there is the material because measuring thing The increase and decrease of the kinetic force of friction that the electrostatic attraction between contact pilotage and mensuration thing that the material of matter shape and contact pilotage causes causes.Because being somebody's turn to do The increase and decrease of kinetic force of friction, the kinetic force of friction F in Fig. 8 changes, because kinetic force of friction F makes the change angle, direction of contact pilotage displacement vector Degree θ changes.

Fig. 9 is to illustrate so that the mode that Y-axis tilts the size (in the graph, the longitudinal axis is 0.7mm) becoming fixing is pressed into Contact pilotage the figure of the situation along the contact pilotage displacement vector D during X axis negative direction plane of scanning motion.Head center position P is in Y-axis Do not produce the variation of press-in on direction, scan about 1mm with 0.01mm spacing in the X-axis direction.Contact pilotage displacement vector D is relative to survey The head value of center P and be indicated with about 200 times.The inclination of X-direction is not fixed, and produces what contact pilotage displacement vector D was intersected Position.So, existing sweep measuring method cannot realize the sweep measuring smoothed, and produces vibration and makes evaluated error increase, And minute also extends.

Summary of the invention

The present invention is used for solving above-mentioned existing problem, it is intended that enter while making contact pilotage contact with mensuration face Row scanning also sequentially reads coordinate, the shape measuring apparatus of mode being thus measured the shape in mensuration face and measuring shape In method, make contact pilotage smoothly scan along mensuration face, thus realize high accuracy and quick measuring shape.

Solution

First form of the present invention provides a kind of process for measuring shape, wherein, prepares contact pilotage, and this contact pilotage is by from mensuration The mensuration power in face and be supported to repeat include moving in parallel and the described survey including orthogonal movement relative to gauge head displacement Head relative to the relative movement in described mensuration face, described in move in parallel and make described contact pilotage relative to described mensuration face to described The distance specified is moved in parallel direction, mensuration face, and described orthogonal movement makes described gauge head to according to current stylus position and mistake The difference of the stylus position gone and the normal direction in described mensuration face that calculates move so that relative in the position including described contact pilotage Displacement and direction of displacement in the position of described gauge head make normal direction on the described mensuration face of interior contact pilotage displacement vector Size become the setting value of predetermined intrusion.

Second form of the present invention provides a kind of shape measuring apparatus, it is characterised in that described shape measuring apparatus possesses: Gauge head, its by contact pilotage supporting for can be by from measuring the mensuration power in face and displacement；Moving part, it makes described gauge head and described Moving relative to position of mensuration face so that described mensuration face is scanned by described contact pilotage；Contact pilotage displacement vector test section, it is right Enter relative to the contact pilotage displacement vector including the displacement of the position of described gauge head and direction of displacement include the position of described contact pilotage Row detection；Normal direction output unit, it exports the normal direction at the measuring point in described mensuration face；Normal direction vector component is calculated Go out portion, its value exported based on described normal direction output unit, calculate the described normal direction component of contact pilotage displacement vector And output it；Press-in vector calculating section, the setting value of its intrusion based on the normal direction on described mensuration face and normal The output of direction vector component calculating section calculates press-in vector so that the normal direction component of described contact pilotage displacement vector becomes institute State the setting value of intrusion；Sweep vector calculating section, it calculates to become on the direction vertical with described normal direction and sets in advance The sweep vector of fixed scanning speed；Mobile vector calculating section, it is according to the output of described press-in vector calculating section and described sweeps Retouch the output of vector calculating section, calculate the move to described gauge head i.e. mobile vector；And mobile control division, it is to described The movement of moving part is controlled so that described gauge head moves according to described mobile vector.

Even if contact pilotage displacement vector changes, from the intrusion of the contact pilotage measuring surface because of change such as the external force of friction etc. Also fixed value is become.Even if measuring mask have arbitrary inclination, because of frictional force, contact pilotage displacement vector does not becomes relative to mensuration face For right angle orientation, it is also possible to detect the direction at a right angle with mensuration face according to mensuration power, so that contact pilotage is being put down with the face of mensuration The side of row scans up and is measured.Even if it addition, there is change on the angle of inclination in the face of mensuration, also contact pilotage displacement can be vowed The size of amount is maintained predetermined setting.In other words, even if there is change on the angle of inclination in the face of mensuration, it is also possible to The mode not producing change in the size of contact pilotage displacement vector is scanned such that it is able to make contact pilotage more accurately with mensuration It is scanned on the direction that face is parallel.And, when sweep measuring starts in addition to the necessary data relevant to mensuration face, Need not excessive data.

Invention effect

Process for measuring shape according to the present invention and shape measuring apparatus, even if contact pilotage displacement vector is because of the external force of friction etc. Change and change, also become fixed value, even if from having arbitrary inclined plane from the intrusion of the contact pilotage measuring surface The mensuration power measuring face do not become the direction at a right angle with mensuration face because of frictional force, it is also possible to detect according to mensuration power With direction at a right angle, the face of mensuration, make the normal direction component of contact pilotage displacement vector fix, and make simultaneously contact pilotage with mensuration face Parallel side scans up and is measured, therefore, it is possible to realize smooth, more rapid, the measuring shape of higher precision, it is possible to have Help realize the product manufacturing of the precise fine of industrial products, high precision int and high finished product rate.

Accompanying drawing explanation

Figure 1A is the structure chart of the shape measuring apparatus of embodiments of the present invention.

Figure 1B is the structure chart of the shape measuring apparatus of embodiments of the present invention.

Fig. 2 is the structure chart of the gauge head of embodiments of the present invention.

Fig. 3 is for the stylus position of embodiments of the present invention, probe location and the figure of contact pilotage displacement vector are described.

Fig. 4 is the flow chart of the flow process of the process representing embodiments of the present invention.

Fig. 5 is the image graph that the labeling method of the trajectory plane figure to embodiments of the present invention assists.

Fig. 6 is the figure measuring track representing embodiments of the present invention.

Fig. 7 A is the structure chart of the shape measuring apparatus of existing invention.

Fig. 7 B is the structure chart of the shape measuring apparatus of existing invention.

Fig. 8 is the figure measuring track representing existing invention.

Fig. 9 is the figure of the contact pilotage displacement vector based on copying control representing existing invention.

Description of reference numerals is as follows:

20 contact pilotages

22 3 d measurement devices

23 control device

24 arithmetic units

25 measure thing

25a measures face

26 gauge heads

27 XY worktables

28 Z workbench

31 X-coordinate test sections

32 Y coordinate test sections

33 Z coordinate test sections

34 tilt detection portions

35 focus error signal test sections

37 X-axis control portions

38 Y-axis control portions

39 Z axis control portions

40 coefficient of kinetic friction storage parts

41 measuring point position operational parts

42 error op output units

43 contact pilotage displacement vector calculating sections

43a X-component test section

43b Y-component test section

43c Z component test section

The 44 previous storage parts that locate

45 normal direction vector output units

46 normal direction vector calculating sections

47 press-in vector calculating sections

48 scanning direction unit vector calculating sections

49 mobile vector calculating sections (adder)

51A, 51B flexure member

53 contact pilotage axles

54 reflecting mirrors

61 frequency of oscillation stabilisation laser

62 X are with reference to reflecting mirror

63y, 63z laser

64 Y are with reference to reflecting mirror

68 semiconductor lasers

69 laser

70 collimating lens

71 apertures

72 beam splitters

73 dichroic mirrors

74 polarizing prisms

75 dichroic mirrors

76 lens

79 photo detectors

81 integrated elements

82 laser

83 diffraction gratings

84 collimating lens

87 move instruction unit

88 X-axis motor

89 Y-axis motor

91 normal directions set storage part

92 scanning speed configuration parts

93 scanning direction vector calculating sections

94 intrusion configuration parts

95 switching switches

Detailed description of the invention

Hereinafter, referring to the drawings, embodiments of the present invention are illustrated.In the drawings, to identical composition part Mark identical reference, and omit the description.

(embodiment 1)

Figure 1A and Figure 1B is that the 3 d shape testing device representing embodiments of the present invention 1 (is surveyed hreinafter referred to as shape Determine device.) the figure of structure.This shape measuring apparatus is roughly divided into 3 d measurement device 22, controls device 23, by structures such as computers The arithmetic unit 24 become.

3 d measurement device 22 makes the contact pilotage 20 arranged on gauge head 26 enter while contacting with the mensuration face 25a measuring thing 25 Row measures.As the moving part making mensuration face 25a move up in XYZ side with the relative position of gauge head 26, possess: by making mensuration The X-axis motor 88 that face 25a moves in the X direction and the Y-axis motor 89 making mensuration face 25a move in the Y direction drive XY worktable 27；Gauge head 26 and the Z workbench 28 making gauge head 26 move in z-direction are installed in lower end.It should be noted that In the case of measuring large-scale mensuration thing, it is also possible to by the knot making mensuration face fix and make gauge head move up in XYZ side Structure is implemented.

Control device 23 possess X-coordinate test section 31, Y coordinate test section 32, Z coordinate test section 33, tilt detection portion 34, Focus error signal test section 35, X-axis control portion 37, Y-axis control portion 38 and Z axis control portion 39.

Arithmetic unit 24 possesses measuring point position operational part 41, error op output unit 42, contact pilotage displacement vector calculating section 43, the previous storage part 44 that locates, normal direction vector output unit 45, normal direction vector calculating section 46, press-in vector are calculated Go out portion 47, scanning direction unit vector calculating section 48, mobile vector calculating section 49, mobile instruction unit 87, normal direction setting Storage part 91, scanning speed configuration part 92, scanning direction vector calculating section 93, intrusion configuration part 94, switching switch 95.

X-coordinate test section 31 utilizes X fixing on XY worktable 27 to make by frequency of oscillation stabilisation with reference to reflecting mirror 62 Laser after laser 61 generation branch is (not shown.) reflection.X is made to comprise the long change information of reflected light path with reference to reflecting mirror 62 The laser of this reflection light and the benchmark not comprising optical path length change information interfere, and by known Laser Measuring regular way pair The amount of movement of the X-direction of XY worktable 27 detects.That is, X-coordinate Px of probe location P is surveyed by X-coordinate test section 31 Fixed.Equally, Y coordinate test section 32 utilizes Y fixing on XY worktable 27 to make by frequency of oscillation stabilisation with reference to reflecting mirror 64 Laser 63y reflection after laser 61 generation branch, makes this reflection light comprising optical path length change information and does not comprise optical path length The laser of the benchmark of change information interferes, and by the movement to the Y-direction of XY worktable 27 of the known Laser Measuring regular way Amount detects.That is, the Y coordinate Py of probe location P is measured by Y coordinate test section 32.

Z coordinate test section 33 make to be produced by frequency of oscillation stabilisation laser 61 and laser 63z after branch as shown in Figure 2 that Sample reflects at the reflecting mirror 54 of the upper end of contact pilotage axle 53, makes comprise this reflection light of optical path length change information and do not comprise light path The laser of the benchmark of long change information interferes, and by the known Laser Measuring regular way amount of movement to the Z-direction of contact pilotage 20 Detect.That is, the Z coordinate Sz of stylus position S is measured by Z coordinate test section 33.

So, the determination data obtained based on laser length measurement is XY coordinate Px, Py relative to the face of mensuration of probe location P The Z coordinate Sz relative to the face of mensuration with stylus position S.

Fig. 2 is the structure chart of the gauge head in embodiments of the present invention 1.Gauge head 26 possesses via flexure member 51A, 51B And the contact pilotage 20 installed.There is the component of the character of flexure when flexure member 51A, 51B are to have applying power, partial accession cut Mouthful and in above-below direction (Z-direction) and laterally (XY direction) upper leaf spring having resilient metal or the composition such as plastics, rubber.Touch Pin 20 is mounted relative to the lower end of the fixing contact pilotage axle 53 of flexure member 51A, 51B, has puted up instead in the upper end of contact pilotage axle 53 Penetrate mirror 54.By the mensuration power to contact pilotage 20 from mensuration face 25a, contact pilotage 20 can be in XYZ direction relative to gauge head 26 In any direction on relatively displacement.When acting on contact pilotage 20 from the mensuration power measuring face 25a, from XY direction Under the effect of mensuration power, flexure member 51A, 51B deform and make reflecting mirror 54 tilt, in the mensuration power from Z-direction Under effect, reflecting mirror 54 is moved upward.

Fig. 3 is the figure illustrating stylus position S, probe location P and contact pilotage displacement vector D.

Fig. 3 (a) expression does not acts on contact pilotage 20 all not to be sent out on mensuration power and the contact pilotage 20 any direction in XYZ direction The state of raw displacement.Fig. 3 (b) represents that effect has mensuration power and contact pilotage 20 to there occurs displacement on XYZ direction on contact pilotage 20 State.

Stylus position S is defined as the coordinate at the center of ball when approximating the surface of contact pilotage 20 with sphere.Contact pilotage Position S is represented like that by following formula.

Mathematical expression 1

S=(S_x S_y S_z)^T

By do not act on contact pilotage 20 be not all subjected to displacement on mensuration power and the contact pilotage 20 any direction in XYZ direction time Stylus position S be defined as probe location P.Probe location P is expressed from the next.When the contact pilotage 20 any direction in XYZ direction On when not all being subjected to displacement, stylus position S is consistent with probe location P.

Mathematical expression 2

P=(P_x P_y P_z)^T

Expression displacement when effect has mensuration power and stylus position S-phase are subjected to displacement for probe location P and displacement The vector definition in direction is contact pilotage displacement vector.Contact pilotage displacement vector is by below formula subrepresentation.

Mathematical expression 3

D=(D_x D_y D_z)^T

The coordinate components of contact pilotage displacement vector D is represented by following formula (1).

Mathematical expression 4

$D=\left(\begin{array}{c}{D}_x\\ D_y\\ D_z\end{array}\right)=\left(\begin{array}{c}{S}_x-P_x\\ S_y-P_y\\ S_z-P_z\end{array}\right)---\left(1\right)$

In fig. 2, from the laser 69 of semiconductor laser 68 via collimating lens 70, aperture 71, beam splitter 72, dichroic mirror 73, polarizing prism 74, dichroic mirror 75 and lens 76 and inject to the reflecting mirror 54 of the upper end of contact pilotage axle 53.It addition, reflecting mirror 54 Reflection light inject to photo detector 79 via lens 76, dichroic mirror 75, polarizing prism 74, dichroic mirror 73 and beam splitter 72. When reflecting mirror 54 tilts, reflect the light incoming position generation changing of the relative positions to photo detector 79.Tilt detection portion 34 (with reference to Figure 1A and The changing of the relative positions to the incoming position of this photo detector 79 Figure 1B) is utilized to detect the angle of inclination of reflecting mirror 54, specifically, detection Tilt angle theta x of the X-direction of contact pilotage 20 and tilt angle theta y of Y-direction.Tilt detection portion 34 is by tilt angle theta x, θ y respectively Export to the X-component test section 43a and Y-component test section 43b of contact pilotage displacement vector calculating section 43.X-component test section 43a and Y Component detection portion 43b according to distance Ls at the center of tilt angle theta x, θ y and the inclination from known contact pilotage axle 53 to contact pilotage 20, Calculate XY coordinate components Dx, Dy of contact pilotage displacement vector D represented by following formula (2).

Mathematical expression 5

When referring again to Fig. 2, from the laser 82 of integrated element 81 of semiconductor laser and photo detector via spreading out Penetrate grating 83, collimating lens 84, polarizing prism 74, dichroic mirror 75 and lens 76 and penetrate to the reflecting mirror 54 of the upper end of contact pilotage axle 53 Enter.Further, the reflection light (the reflection light of laser 82) of reflecting mirror 54 is via lens 76, dichroic mirror 75, polarizing prism 74, collimation thoroughly Mirror 84 and diffraction grating 83 and return to integrated element 81.When reflecting mirror 54 is moved upward, collimating lens 84 assemble Reflection light spot position produce the changing of the relative positions.Focus error signal test section 35 (with reference to Figure 1A and Figure 1B) is according to integrated element The changing of the relative positions of the spot position on the photo detector of 81 detects reflecting mirror 54 amount of movement upward.Focus error signal test section The reflecting mirror 54 that 35 detect amount of movement upward is used in focus control (makes mensuration face 25a solid with the distance of contact pilotage 20 Fixed.).It addition, the amount of movement that the reflecting mirror 54 that detects of focus error signal test section 35 is upward is calculated to contact pilotage displacement vector Go out the Z component test section 43c output in portion 43.Z component test section 43c use from focus error signal test section 35 input and Calculate the Z coordinate component Dz of contact pilotage displacement vector D.

The gauge head position from X-coordinate test section 31 is inputted respectively to measuring point position operational part 41 (with reference to Figure 1A and Figure 1B) Put P X-component Px, from Y coordinate test section 32 probe location P Y-component Py, from the contact pilotage position of Z coordinate test section 33 Put the Z coordinate Sz of S.It addition, will touch from the X-component test section 43a and Y-component test section 43b of contact pilotage displacement vector calculating section 43 The X-component Dx of pin displacement vector D and Y-component Dy input to measuring point position operational part 41 respectively.Measuring point position operational part 41 Use above-mentioned input, and according to the relation of the above-mentioned formula (1) between stylus position S, probe location P and contact pilotage displacement vector D Calculate XYZ coordinate Sx, SV, Sz of stylus position S.Specifically, the measuring point position operational part 41 in present embodiment leads to Cross below formula (3) and calculate XYZ component Sx, Sy, Sz of stylus position S.

Mathematical expression 6

$S=\left(\begin{array}{c}{S}_x\\ S_y\\ S_z\end{array}\right)=\left(\begin{array}{c}{P}_x+D_x\\ P_y+D_y\\ S_z\end{array}\right)---\left(3\right)$

In the case of the gauge head 26 using the structure shown in Fig. 2, as it has been described above, the Z coordinate Sz of stylus position S is sat by Z Mark test section 33 directly measures.Therefore, as shown in formula (3), the Z component Dz of contact pilotage displacement vector D is not as determination data Stylus position S calculate middle use, and use the most in the controlling.

It addition, stylus position S calculated in formula (3) is converted to the positional information of measuring point by measuring point position operational part 41 (XYZ coordinate).This conversion is by employing the XYZ coordinate Sx of stylus position S, Sy, Sz, the angle of inclination of mensuration face 25a and touching The computing including trigonometric function of the radius of curvature of pin 20 and be capable of.For this stylus position S is converted into measuring point The operation method of positional information is known, therefore omits the description.This operation method is documented in such as Japanese Unexamined Patent Publication 2001- In No. 21494 publications.

The positional information of the measuring point calculated by measuring point position operational part 41 inputs to error op output unit 42.Error The design load of the positional information of the computing output unit 42 measuring point to inputting from measuring point position operational part 41 and mensuration object is entered Row compares, its error of union.

In Figure 1A and Figure 1B, switching switch 95 to the output of contact pilotage displacement vector calculating section 43, make measuring point position transport The output of calculation portion 41 and the normal direction vector output unit 45 of the difference 90-degree rotation of the previous storage part 44 that locates, previously according to The output of the normal direction setting storage part 91 that the information measuring thing sets storage normal direction switches over.Normal side The normal direction measuring face 25a all can be set storage to setting storage part 91, it is also possible to especially sweeping The normal direction of the part retouching beginning is set storage.

The normal direction calculating contact pilotage displacement vector based on the normal direction vector of switching switch 95 output is set The normal direction vector calculating section 46 of component, output according to intrusion configuration part 94 and switching switch 95 calculate press-in vector Press-in vector calculating section 47, calculate the scanning direction Unit Vector of scanning direction unit vector according to the output of switching switch 95 Amount calculating section 48, according to from the output (scanning direction unit vector) of scanning direction unit vector calculating section 48 and scanning speed The output (scanning speed) of configuration part 92 calculates the scanning direction vector calculating section 93 of scanning direction amount of movement.

The output of 49 pairs of normal direction vector calculating sections 46 of mobile vector calculating section (adder), press-in vector calculating section 47 Output, the output of scanning direction vector calculating section 93 carries out plus and minus calculation and calculates mobile vector M.This mobile vector M's Calculate use servo described later open and servo close execution required for information and be stored in scanning speed configuration part 92 In the scanning being performed mensuration face 25a by contact pilotage 20 required for information (including the path of scanning, end of scan condition etc.).

The mobile vector M calculated by mobile vector calculating section 49 exports to mobile instruction unit 87.Mobile instruction unit 87 uses Mobile vector M calculates the amount of movement of XY worktable 27 and Z workbench 28.Amount of movement after calculating is to X-axis control portion 37, Y-axis Control portion 38, Z axis control portion 39 export, and make X-axis motor 88, Y-axis motor 89, not shown Z axis electric motor operation enter Row profiling action.

Fig. 4 is the flow chart of the flow process of the process representing the present invention.Fig. 5 is the labeling method of the trajectory plane figure to Fig. 6 Carry out the image graph assisted.Fig. 6 is the figure measuring track representing the present invention, is to be combined with later explanation and carry out decomposing mark The figure of note, represents the probe location in the plane parallel with X/Y plane observed from the direction (above Z axis) of the arrow of Fig. 5 P and the relation of stylus position S.In the following description, probe location P is labeled as position P, stylus position S is labeled as position Put S.

First, use Fig. 6 (a), the step 1 of Fig. 4 is illustrated.

In Fig. 6 (a), gauge head 26 is located in the position P0 that contact pilotage 20 does not contacts with mensuration face 25a.Position P0 is positioned at head First with in the substantially normal direction at the some S1 measured on the mensuration face 25a that thing 25 contacts, such as, positioned by range estimation etc.. In this position, contact pilotage 20 does not contacts with mensuration face 25a, the most not by mensuration power, thus S0=PO.

Make gauge head 26 exceed contact pilotage 20 from position P0 and move into place P1 with measuring the position S1 that contacts of face 25a.Should Action is referred to as servo and opens.Position P1 is that the size from contact pilotage displacement vector D1 of position P1 to position S1 becomes predetermined The position of intrusion C.It is exaggerated labelling in figure 6, but in actual form measuring instrument, intrusion C is about 3 μm.

Specifically, when servo is opened, the quadratic sum of XYZ component Dx, Dy, Dz of contact pilotage displacement vector D is supervised Make gauge head 26 move while depending on, and make the mobile stopping of gauge head 26 in the moment that below formula (4) is set up.Mobile vector calculates Portion 49 performs the supervision of this quadratic sum.

Mathematical expression 7

$\sqrt{{D_x}^2+{D_y}^2+{D_z}^2}\≥C---\left(4\right)$

Then, in the step 2 of Fig. 4, making current probe location P is position P1, makes current stylus position S set position S1, and to make contact pilotage displacement vector be D1.It addition, when with reference to Fig. 6 (b), normal direction vector calculating section 46 makes contact pilotage displacement vow Amount D1 is normal direction N1 (vector) at the P1 of position.

Then, use Fig. 6 (c) and Fig. 6 (d), the step 3 of Fig. 4 is illustrated.Make the position being positioned at shown in Fig. 6 (c) The gauge head 26 at outer place from position P1 to being perpendicular to normal direction N1 and for the direction displacement Lc1 (mobile vector in X/Y plane M1), P2 is moved into place.

About distance Lc1, set its value according to following such viewpoint.When excessive hour of distance Lc1, the shifting of gauge head 26 Dynamic distance shortens, even if making gauge head 26 move from probe location P1, there is also because of friction of rest contact pilotage 20 not from stylus position The probability that S1 moves.On the contrary, when distance Lc1 is the biggest, the displacement of gauge head 26 is elongated, is easily subject to mensuration face 25a The impact of angle change, the change of the size or direction that there is contact pilotage displacement vector D becomes big probability.Therefore, away from Be set as meeting from Lc1 makes contact pilotage 20 in the range of mobile such condition on mensuration face 25a by moving of gauge head 26 Minimum range, and be set as small distance compared with the fluctuating measuring face 25a.

Scanning direction unit vector calculating section 48 calculates unit vector (the scanning direction Unit Vector in the direction of mobile vector M1 Amount).First, there are two kinds of methods in calculating of scanning direction unit vector when making gauge head 26 move.One is according to contact pilotage position The method that current contact pilotage displacement vector D1 (normal direction N1) that shifting vector calculating section 43 is calculated calculates.Another kind is profit Method with the direction (substantially normal direction) of servo breakdown action.Later scanning direction when making gauge head 26 move Calculating of unit vector can also be performed by the former method.Fig. 6 (C) is contact pilotage displacement vector D1 and servo breakdown action The situation that direction is consistent.The scanning side that scanning direction vector calculating section 93 is calculated according to scanning direction unit vector calculating section 48 To unit vector and the scanning speed that set by scanning speed configuration part 92 to calculate the mobile vector M1 of gauge head 26, and to movement Vector calculating section 49 exports that (value that calculates in step 3, making scanning direction unit vector calculating section 48 is directly becoming mobile vector M1)。

When Uz is unit vector, the mobile vector M1 from position P1 to P2 can pass through below formula (5) and represent.

Mathematical expression 8

$M_1=\left(\begin{array}{c}{M}_{1x}\\ M_{1y}\\ 0\end{array}\right)=L_{c1}\·\frac{D_1}{\left|D_1\right|}\×u_z=\frac{L_{c1}}{\sqrt{{D_{1x}}^2+{D_{1y}}^2}}\left(\begin{array}{c}-D_{1y}\\ D_{1x}\\ 0\end{array}\right)---\left(5\right)$

Fig. 6 (d) represent gauge head 26 from position P1 to position P2 move time state.The position S2 of contact pilotage 20 now passes through The effect of the kinetic force of friction F worked in the direction contrary with direction of action, and from by position P2 with measure face 25a become straight The vector NR2 deviation at angle.

Then, use Fig. 6 (e) that the step 4 of Fig. 4 is illustrated.Determine the method at current probe location in step 4 Line direction.After this, the position according to current contact pilotage 20 of following description and the position of contact pilotage 20 before are repeated Obtain the step of ensuing scanning direction, therefore current stylus position is labeled as S_i, by current probe location mark It is designated as P_i, current contact pilotage displacement vector is labeled as D_i, stylus position before is labeled as S_i-1, by probe location before It is labeled as P_i-1, and contact pilotage displacement vector before is labeled as D_i-1, simplify explanation.(i=2,3,4 ...).

Make from current probe location P_iTo by stylus position S before_i-1With current stylus position S_iLink up The point that straight line draws vertical line and obtains is T_i.When making from probe location P_iTo T_iDirection be probe location P_iNormal direction N at place_i Time, there is the relation of below formula (6).

Mathematical expression 9

N_i=(S_i-S_i-1)×U_z (6)

U_Z: unit vector

Normal direction vector output unit 45 is according to stylus position S before_i-1(vector) and current stylus position S_i(vow Amount) calculate normal direction N_i(vector).

Further, use Fig. 6 (e) that the step 5 of Fig. 4 is also carried out explanation.In steps of 5, movement is obtained in the following sequence Vector M_i。

P_iIntrusion DV of the normal direction at place_i(scalar) is represented by below formula (7).

Mathematical expression 10

${\mathrm{DV}}_i=D_i\·\frac{N_i}{\left|N_i\right|}=|T_i-P_i|---\left(7\right)$

In order to make P_i+1The intrusion of point becomes setting value C (scalar), needs to make P_iMobile vector M is moved to normal direction_i Normal direction component M_iV (press-in vector M_iv).Press-in vector calculating section 47 calculates this press-in vector M_iv.Press-in vector M_iV by Below formula (8) represents.

Mathematical expression 11

$M_{i}v=({\mathrm{DV}}_i-C)\frac{N_i}{\left|N_i\right|}---\left(8\right)$

When the scan velocity V for setting is multiplied by the amount of movement Lc measuring Ts sample time and obtain, mobile vector M_i's Scanning direction component (scanning direction mobile vector) M_iH is represented by below formula (9).From this formula (9), scanning direction is moved Vector M_iThe direction of h is stylus position S from before_i-1(vector) is towards current stylus position S_iThe direction of (vector).

Mathematical expression 12

$M_{i}h=L_c\frac{(S_i-S_{i-1})}{|S_i-S_{i-1}|}=V*T_S\frac{(S_i-S_{i-1})}{|S_i-S_{i-1}|}---\left(9\right)$

Scanning direction unit vector calculating section 48 calculates scanning direction mobile vector M_iThe unit vector in the direction of h.Scanning Scan velocity V that direction vector calculating section 93 according to this unit vector, is set by scanning speed configuration part 92, measure sample time Ts calculates scanning direction mobile vector M_ih。

P_iMobile vector M at Dian_iRepresented by below formula (10).

Mathematical expression 13

$\begin{array}{c}{M}_i=M_{i}v+M_{i}h=({\mathrm{DV}}_i-C)\frac{N_i}{\left|N_i\right|}+\mathrm{Lc}\frac{(S_i-S_{i-1})}{|S_i-S_{i-1}|}\\ =[D_i\·\frac{N_i}{{|N}_i|}]\frac{N_i}{{|N}_i|}-C\frac{N_i}{{|N}_i|}+\mathrm{Lc}\frac{(S_i-S_{i-1})}{|S_i-S_{i-1}|}\end{array}---\left(10\right)$

The Section 1 of formula (10) is the output of normal direction vector calculating section 46, and Section 2 is press-in vector calculating section 47 Output, Section 3 is the output of scanning direction vector calculating section 93.

In the step 6 of Fig. 4, repeat before the mensuration end position specified before probe location P arrives and measures step 4 and Step 5, when arriving mensuration end position, makes the mobile stopping of gauge head 26.

In the step 7 of Fig. 4, when, after the mobile stopping making gauge head 26, making gauge head 26 in contact pilotage displacement vector D_iDirection Upper movement is than contact pilotage displacement vector D_iBig distance (this action being referred to as servo close) also terminates to measure.

Above, the plane parallel with two coordinate axess is illustrated, but arbitrary plane can be suitable for.Main Determine to implement the plane of sweep measuring, then plane and the intersection measuring face 25a just become mensuration track.

By the measuring shape of present embodiment, even if the displacement of contact pilotage is because of the friction of effect on the moving direction of contact pilotage Power and from the direction changing of the relative positions at a right angle of the face of mensuration, it is also possible to make contact pilotage move to the direction along the face of mensuration, wherein, this contact pilotage Displacement by from tilt to any direction measure face mensuration power cause.Further, it is possible to make contact pilotage along to arbitrarily side Smoothly move on the direction measuring face tilted.Therefore, by the measuring shape of present embodiment, it is possible to increase measure speed Degree stability, and mensuration power can also be made to fix and improve measurement accuracy.

(embodiment 2)

In embodiment 2, the mode for as follows: (control cycle T s second more rapid compared with calculating with normal direction Interval) implement to be used for making contact pilotage displacement vector D_iNormal direction component become the correction of fixed value DV=C, and previous mensuration Position before the use several times of position.

In embodiment 1, the situation that drive system is moved according to command value the most at once as premise, thus Normal direction moves becomes below formula (8).

Mathematical expression 14

$M_{i}v=({\mathrm{DV}}_i-C)\frac{N_i}{\left|N_i\right|}---\left(8\right)$

The change of intrusion during in order to reduce scanning, time interval Ts reducing execution formula (8) shortens the control cycle It is effective.But, there is delay, therefore when shortening time interval Ts, i.e. make the control cycle become in actually drive system Time quickly, become oscillatory regime.

Therefore, as shown in below formula (11), by being multiplied by by gain g≤1 postponing to determine of drive system, it is possible to carry The high control cycle, and make having stable behavior, reduce the change of intrusion.

Mathematical expression 15

$M_{i}v=g({\mathrm{DV}}_i-C)\frac{N_i}{\left|N_i\right|}---\left(11\right)$

It addition, in embodiment 1, to the situation that drive system is moved according to command value the most at once as front Carry, and make the correction of normal direction component and normal direction calculate to become identical time interval and be illustrated.As long as being steady Fixed action, then be that (displacement Lc=sets scan velocity V * and controls cycle T s).

It practice, the train of mechanism that causes of the inertia that there is workbench etc. postpone vibration, the delay of control system.Cause This, calculate when implementing normal direction with the short control cycle identical with the correction of quick normal direction component of good performance Time, the error of normal direction becomes big, and normal direction produces vibration, thus cannot be carried out the copying control along the face of mensuration, gauge head 26 move circuitously, and the most apparent scanning speed becomes less than setting value.In order to the most also to set scanning Speed V carries out stable scanning, make the previous position of presumption normal direction be the position before a time be to have to postpone the control cycle Effect.Each amount of movement M controlling the cycle now_iAs shown in below formula (12).

Mathematical expression 16

$M_i=g[D_i\·\frac{N_i}{\left|N_i\right|}-C]\frac{N_i}{\left|N_i\right|}+\mathrm{Lc}\frac{(S_i-S_{i-a})}{|S_i-S_{i-a}|}---\left(12\right)$

By the measuring shape of present embodiment, it is possible to increase the control performance of intrusion C, and it is capable of stable sweeping Retouch.

Above-mentioned normal direction vector calculating section 46 can be in contact pilotage displacement vector than the pressing direction displacement vector of contact pilotage 20 1/2 hour output contact pilotage displacement vector, when contact pilotage displacement vector is bigger than the 1/2 of the pressing direction displacement vector of contact pilotage 20, Normal direction is exported in the way of the line orthogonal located with the stylus position and current contact pilotage that link the past.

Industrial applicability

The shape measuring apparatus of the present invention and process for measuring shape have and can improve measurement accuracy, finding speed and make survey Determine the feature that power is fixing, therefore can also be applicable to cannot high precision int or yield rate cannot carry owing to measuring in the past The shape of high non-spherical lens and driving relative to the eccentric precision of side or the lens barrel of focal length lenses, focal length groove shape, hard disk The diameter of axle of galvanic electricity motivation and the internal diameter of hydraulic fluid bearing or bearing lateral groove shape, the parts mould of common electric product Internal diameter and outer diameter shape, the mensuration of shape etc. of tooth of gear.

Claims (9)

1. a process for measuring shape, wherein,

Prepare contact pilotage, this contact pilotage by from measure the mensuration power in face and be supported to can relative to gauge head displacement,

Repeat include the relative movement relative to described mensuration face moved in parallel with the described gauge head including orthogonal movement, described Move in parallel and make described contact pilotage move, to the direction parallel with described mensuration face, the distance specified relative to described mensuration face, institute State orthogonal mobile detection include the position of described contact pilotage relative to including the displacement of the position of described gauge head and direction of displacement Contact pilotage displacement vector, the value of the normal direction at measuring point based on described mensuration face, calculate the method for described contact pilotage displacement vector Line durection component, the setting value of intrusion based on the normal direction on described mensuration face and described normal direction component, make institute State the gauge head normal direction to the described mensuration face calculated according to current stylus position and the difference of stylus position in the past to move Dynamic so that the normal direction component of described contact pilotage displacement vector becomes the setting value of described intrusion.

Process for measuring shape the most according to claim 1, wherein,

Before the relative movement relative to described mensuration face repeating described gauge head, so that described contact pilotage is described with known The mode that orthogonal side, mensuration face moves up makes described gauge head move, and makes described contact pilotage contact with described mensuration face, and in institute The size of the normal direction stating the described mensuration face of contact pilotage displacement vector stops surveying when becoming more than the setting value of described intrusion The movement of head.

Process for measuring shape the most according to claim 1 and 2, wherein,

Described move in parallel by below formula subrepresentation,

$M_{i}h=\mathrm{Lc}\frac{S_i-S_i^{\′}}{|S_i-S_i^{\′}|}$

M_iH: it is vector, represents the size and Orientation moved in parallel,

Lc: it is scalar, represents amount of movement,

S_i: it is vector, represents current stylus position,

S_i': it is vector, represents stylus position in the past.

Process for measuring shape the most according to claim 1 and 2, wherein,

Described orthogonal movement by below formula subrepresentation,

$M_{i}v=({\mathrm{DV}}_i-C)\frac{N_i}{\left|N_i\right|}$

M_iV: it is vector, represents the size and Orientation of orthogonal movement,

DV_i: it is scalar, represents current probe location P_iThe intrusion of the normal direction at place,

C: it is scalar, represents the setting value of intrusion,

N_i: it is normal direction vector,

N_i=(S_i-S_i’)×Uz

S_i: it is vector, represents current stylus position,

S_i': it is vector, represents stylus position in the past,

Uz: it is unit vector.

5. a shape measuring apparatus, it is characterised in that

Described shape measuring apparatus possesses:

Gauge head, its by contact pilotage supporting for can be by from measuring the mensuration power in face and displacement；

Moving part, it makes moving relative to position of described gauge head and described mensuration face so that described mensuration face is entered by described contact pilotage Row scanning；

Contact pilotage displacement vector test section, it is to including that the position of described contact pilotage is relative to the displacement of the position of described gauge head and position Move direction to detect in interior contact pilotage displacement vector；

Normal direction output unit, the normal direction at the measuring point in its described mensuration face of output, described normal direction is according to current The difference of stylus position and stylus position in the past calculate；

Normal direction vector component calculating section, its value exported based on described normal direction output unit, calculate contact pilotage displacement The normal direction component of vector also outputs it；

Press-in vector calculating section, the setting value of its intrusion based on the normal direction on described mensuration face and normal direction vector The output of component calculating section calculates press-in vector so that the normal direction component of described contact pilotage displacement vector becomes described intrusion Setting value；

Sweep vector calculating section, it calculates becomes scanning speed set in advance on the direction vertical with described normal direction Sweep vector；

The output of mobile vector calculating section, its output according to described press-in vector calculating section and described sweep vector calculating section, Calculate the move to described gauge head i.e. mobile vector；And

Mobile control division, the movement of described moving part is controlled by it so that described gauge head moves according to described mobile vector.

Shape measuring apparatus the most according to claim 5, it is characterised in that

Described normal direction output unit exports the described normal direction of the value set when sweep measuring starts, and opens at sweep measuring After beginning by with by the past locate with the current line orthogonal linked up that locates in the way of defeated to normal direction Go out to be updated.

Shape measuring apparatus the most according to claim 6, it is characterised in that

Described normal direction output unit exports described contact pilotage displacement vector when described sweep measuring starts.

8. according to the shape measuring apparatus according to any one of claim 5 to 7, it is characterised in that

Locate with the time interval currently located than described movement before described normal direction output unit uses The difference according to described normal direction component with intrusion setting in vector calculating section calculates the time of normal direction amount of movement Interval is big.

Shape measuring apparatus the most according to claim 5, it is characterised in that

Described normal direction output unit is less than the 1/2 of the pressing direction displacement vector of described contact pilotage in described contact pilotage displacement vector Time, export contact pilotage displacement vector, when described contact pilotage displacement vector is bigger than the 1/2 of the pressing direction displacement vector of described contact pilotage, By with locating the past and exporting normal direction in the way of the current line orthogonal linked up that locates.