CN103836883A - 以双转子压缩机为核心的氦气压缩净化机组 - Google Patents
以双转子压缩机为核心的氦气压缩净化机组 Download PDFInfo
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- CN103836883A CN103836883A CN201410085691.XA CN201410085691A CN103836883A CN 103836883 A CN103836883 A CN 103836883A CN 201410085691 A CN201410085691 A CN 201410085691A CN 103836883 A CN103836883 A CN 103836883A
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- pipeline
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- spool compressor
- gas cooler
- pressure
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- 239000001307 helium Substances 0.000 title claims abstract description 42
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 42
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 230000006835 compression Effects 0.000 title claims abstract description 23
- 238000007906 compression Methods 0.000 title claims abstract description 23
- 238000000746 purification Methods 0.000 title abstract description 4
- 239000007789 gas Substances 0.000 claims abstract description 72
- 239000006096 absorbing agent Substances 0.000 claims abstract description 16
- 239000003921 oil Substances 0.000 claims description 73
- 238000001816 cooling Methods 0.000 claims description 22
- 239000000498 cooling water Substances 0.000 claims description 19
- 238000007789 sealing Methods 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 6
- 230000001681 protective effect Effects 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 2
- 239000010725 compressor oil Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 5
- 238000011160 research Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 239000002609 medium Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
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- 239000000843 powder Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 206010044565 Tremor Diseases 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010622 cold drawing Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
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- 238000012544 monitoring process Methods 0.000 description 1
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- 239000006163 transport media Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
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Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410085691.XA CN103836883B (zh) | 2014-03-10 | 2014-03-10 | 以双转子压缩机为核心的氦气压缩净化机组 |
Applications Claiming Priority (1)
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CN201410085691.XA CN103836883B (zh) | 2014-03-10 | 2014-03-10 | 以双转子压缩机为核心的氦气压缩净化机组 |
Publications (2)
Publication Number | Publication Date |
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CN103836883A true CN103836883A (zh) | 2014-06-04 |
CN103836883B CN103836883B (zh) | 2016-02-03 |
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CN201410085691.XA Expired - Fee Related CN103836883B (zh) | 2014-03-10 | 2014-03-10 | 以双转子压缩机为核心的氦气压缩净化机组 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106762529A (zh) * | 2016-12-22 | 2017-05-31 | 无锡五洋赛德压缩机有限公司 | 45kw低温型压缩机结构 |
CN106762527A (zh) * | 2016-12-22 | 2017-05-31 | 无锡五洋赛德压缩机有限公司 | 45kw压缩机结构 |
CN110487024A (zh) * | 2018-05-14 | 2019-11-22 | 成都黄金地真空技术开发有限公司 | 氦气压缩净化机组系统 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5685172A (en) * | 1995-06-30 | 1997-11-11 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process and device for the preparation of a flow which is substantially purified with respect to at least one of the impurities oxygen and carbon monoxide |
CN101655305A (zh) * | 2009-08-17 | 2010-02-24 | 成都黄金地真空技术开发有限公司 | 一种以涡旋式压缩机为核心的氦气压缩净化机组 |
CN203731792U (zh) * | 2014-03-10 | 2014-07-23 | 陈勇 | 以双转子压缩机为核心的氦气压缩净化机组 |
-
2014
- 2014-03-10 CN CN201410085691.XA patent/CN103836883B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5685172A (en) * | 1995-06-30 | 1997-11-11 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Process and device for the preparation of a flow which is substantially purified with respect to at least one of the impurities oxygen and carbon monoxide |
CN101655305A (zh) * | 2009-08-17 | 2010-02-24 | 成都黄金地真空技术开发有限公司 | 一种以涡旋式压缩机为核心的氦气压缩净化机组 |
CN203731792U (zh) * | 2014-03-10 | 2014-07-23 | 陈勇 | 以双转子压缩机为核心的氦气压缩净化机组 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106762529A (zh) * | 2016-12-22 | 2017-05-31 | 无锡五洋赛德压缩机有限公司 | 45kw低温型压缩机结构 |
CN106762527A (zh) * | 2016-12-22 | 2017-05-31 | 无锡五洋赛德压缩机有限公司 | 45kw压缩机结构 |
CN110487024A (zh) * | 2018-05-14 | 2019-11-22 | 成都黄金地真空技术开发有限公司 | 氦气压缩净化机组系统 |
CN110487024B (zh) * | 2018-05-14 | 2024-04-16 | 成都智合芯电科技开发有限公司 | 氦气压缩净化机组系统 |
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CN103836883B (zh) | 2016-02-03 |
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Effective date of registration: 20180315 Address after: No. 502, No. 1, A building, No. 1, new and high tech entrepreneurship center, No. two, Sichuan high tech Park Patentee after: Chengdu Golden place Vacuum Technical Development Co.,Ltd. Address before: No. 19, No. 19, Yongan street, Qingyang District, Chengdu, Sichuan Province, No. 2 Patentee before: Chen Yong |
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Effective date of registration: 20210210 Address after: No.12, unit 1, building 5, No.2 Lidu Road, Wuhou District, Chengdu, Sichuan 610000 Patentee after: Zhong Min Address before: No. 502, building a, high tech entrepreneurship service center, No. 1, Keyuan 2nd Road, high tech Zone, Chengdu, Sichuan 610000 Patentee before: CHENGDU GOLDEN PLACE VACUUM TECHNICAL DEVELOPMENT Co.,Ltd. |
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Granted publication date: 20160203 |