CN103830926B - Electronic-stage hydrofluoric acid production rectifying column - Google Patents
Electronic-stage hydrofluoric acid production rectifying column Download PDFInfo
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- CN103830926B CN103830926B CN201410079650.XA CN201410079650A CN103830926B CN 103830926 B CN103830926 B CN 103830926B CN 201410079650 A CN201410079650 A CN 201410079650A CN 103830926 B CN103830926 B CN 103830926B
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- rectifying column
- pipe
- hydrofluoric acid
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- dividing plate
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Abstract
The invention discloses a kind of electronic-stage hydrofluoric acid production rectifying column, this rectifying tower only has the hand hole of stripping section setting for overhauling with it.In such scheme, eliminate traditional rectifying column all arranges hand hole scheme at rectifying section and stripping section, avoid the junction of hand hole and rectifying column tower body cannot reach good seamless adhesion, form leakage point, prevent outside impurity from entering rectifying column internal contamination electronic-stage hydrofluoric acid, ensure the quality of product.
Description
Technical field
The present invention relates to electronic-stage hydrofluoric acid production field, be specifically related to a kind of electronic-stage hydrofluoric acid production rectifying column.
Background technology
Electronic-stage hydrofluoric acid is mainly used in producing integrated circuit in electronics, photovoltaic industry, and require content Cl≤5000ppb, NO3-≤3000ppb, PO43-≤1000ppb, the SO42-≤5000ppb of nonmetalloid, the content requirement of metallic element is lower than 10ppb.At present mainly by industrial hydrofluoric acid, oxidation and rectifying removal of impurities are carried out further for the Acid of Hydrofluoric Acid Production of electron level, but the hydrofluoric acid impurity content obtained after current rectifying is still higher.
Summary of the invention
The object of this invention is to provide a kind of electronic-stage hydrofluoric acid production rectifying column, it effectively can reduce the impurity content in the electronic-stage hydrofluoric acid after rectifying column process.
For achieving the above object, present invention employs following technical scheme: a kind of electronic-stage hydrofluoric acid production rectifying column, is characterized in that: this rectifying tower only has the hand hole of stripping section setting for overhauling with it.
In such scheme, eliminate traditional rectifying column all arranges hand hole scheme at rectifying section and stripping section, avoid the junction of hand hole and rectifying column tower body cannot reach good seamless adhesion, form leakage point, prevent outside impurity from entering rectifying column internal contamination electronic-stage hydrofluoric acid, ensure the quality of product.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2,3 is two kinds of close-up schematic view at A place.
Detailed description of the invention
The object of the present invention is to provide a kind of electronic-stage hydrofluoric acid production rectifying column, its scheme taked as shown in Figure 1, this rectifying column 10 tower body only has the hand hole 12 of stripping section 10b setting for overhauling.In actual production, the hydrofluoric acid after traditional rectifying column 10 pairs of oxidation processes is adopted to carry out the rectification effect that rectifying does not often reach expection, after being analyzed by a large amount of field experiment, find that it is because the junction of the hand hole on rectifying column 10 and rectifying column 10 body cannot reach good seamless adhesion, therefore on the tower body of rectifying column 10, more leakage point is formed, and the product that rectifying is produced is the DHF of electron level, any one leakage point all can cause product defective.Because the purity of the feed hydrogen fluoric acid of rectifying column 10 rectifying is higher, after the rectifying of stripping section, the purity of product is very high, therefore in rectifying column 10 filler of rectifying section 10a without the need to cleaning, arrange so eliminate in the present invention at the hand hole of rectifying column 10 rectifying section 10a, only hand hole 12 is set at stripping section 10b, the to the greatest extent maximum risk that may reduce product and be polluted, improves the qualification rate of product.Cancel hand hole 12 also makes the equipment cost of rectifying column 10 decline simultaneously.If rectifying section 10a equipment damages and can only return factory so certainly, cannot on-the-spot be overhauled by hand hole.Rectifying column 10 tower height is 19 meters, only 9 meters, tower body bottom arranges the hand hole 12 for overhauling, and every 3 meters of tower body height arranges two hand holes 12, and rectifying column 10 tower body comprises unit joint and the tower top superposition formation of 63 meters, in 3 unit joints of bottom, each unit joint offers two hand holes 12.
Another problem that the present invention will solve is condensate liquid being uniformly distributed in rectifying column of improving backflow in rectifying column 10.Tradition rectifying column 10 adopts spray equipment and homogenizing plate that condensate liquid is uniformly distributed in rectifying column, but due to the limitation of spray equipment, condensate liquid cannot be made effectively to be sprayed to edge and the center position of homogenizing plate, therefore the distribution of rectifying column inner condensat liquid is still more uneven, affects the effect of rectifying.For this reason, the present invention adopts technical scheme as shown in Figure 2 to implement, that is: be provided with the condenser steam of rectifying column 10 gaseous phase outlet discharge being carried out to condensing reflux above this rectifying column 10, on condenser, the discharge opeing mouth of pipe of condensate liquid return duct 11 extends to rectifying column 10 inside, in rectifying column 10, the position relative with the discharge opeing mouth of pipe of condensate liquid return duct 11 is provided with the dividing plate 13 arranged in the horizontal direction in plate face, on rectifying column 10 interior separation becomes by dividing plate 13, under two regions being separated by, dividing plate 13 evenly offers the jack running through plate body, the current-sharing pipe 14 that vertical shape is arranged is plugged respectively in each jack, each current-sharing pipe 14 mouth of pipe end extended to above dividing plate 13 is that concordant shape is arranged.Like this, the condensate liquid of condensing reflux first can be stored in dividing plate 13 and be formed in bucket chamber with rectifying column 10 inwall, when the liquid level of condensate liquid and the height of each current-sharing pipe 14 upper end match, condensate liquid will flow in the filler of rectifying section 10a along each current-sharing pipe 14, because current-sharing pipe 14 is uniformly distributed on dividing plate 13, therefore, it is possible to realize condensate liquid being uniformly distributed at rectifying column 10, improve rectification effect.Certainly also the installation of rectifying column 10 is had higher requirement like this.
Concrete operation scheme is, the height of the discharge opeing mouth of pipe of condensate liquid return duct 11 is lower than the height of the current-sharing pipe 14 upper end mouth of pipe.The discharge opeing mouth of pipe place of condensate liquid return duct 11 is arranged with that Open Side Down, the circular current stabilization cover 15 covered on dividing plate 13, the circumference of current stabilization cover 15 sidewall evenly offers through hole, the height of this through hole is lower than the mouth of pipe height of current-sharing pipe 14 upper end, jack is evenly offered on the dividing plate 13 plate face of current stabilization cover 15 periphery, as shown in Figure 3.During due to practical operation, the condensate liquid that dividing plate 13 stores can not be too many, the condensate liquid fallen from condensate liquid return duct 11 causes liquid fluctuating, cause each current-sharing pipe 14 discharge opeing uneven, therefore a current stabilization cover 15 is set at the discharge opeing mouth of pipe place of condensate liquid return duct 11, prevent the fluctuation that liquid level is larger, ensure that condensate liquid is uniformly distributed.
In a word, the present invention effectively can reduce electronic-stage hydrofluoric acid and produce the impact arranging pollution by hand hole, improves the quality of products, and can ensure being uniformly distributed of condensate liquid simultaneously, improves rectification effect.
Claims (4)
1. an electronic-stage hydrofluoric acid production rectifying column, is characterized in that: this rectifying column (10) tower body only has the hand hole (12) of stripping section (10b) setting for overhauling, this rectifying column (10) top is provided with the condenser steam of rectifying column (10) gaseous phase outlet discharge being carried out to condensing reflux, on condenser, the discharge opeing mouth of pipe of condensate liquid return duct (11) extends to rectifying column (10) inside, in rectifying column (10), the position relative with the discharge opeing mouth of pipe of condensate liquid return duct (11) is provided with the dividing plate (13) arranged in the horizontal direction in plate face, on rectifying column (10) interior separation becomes by dividing plate (13), under two regions being separated by, (13) evenly offer the jack running through plate body with dividing plate, the current-sharing pipe (14) that vertical shape is arranged is plugged respectively in each jack, the mouth of pipe end that each current-sharing pipe (14) extends to dividing plate (13) top is that concordant shape is arranged.
2. electronic-stage hydrofluoric acid production rectifying column as claimed in claim 1, is characterized in that: the height of the discharge opeing mouth of pipe of condensate liquid return duct (11) is lower than the height of current-sharing pipe (14) the upper end mouth of pipe.
3. electronic-stage hydrofluoric acid production rectifying column as claimed in claim 1, it is characterized in that: the discharge opeing mouth of pipe place of condensate liquid return duct (11) is arranged with that Open Side Down, the circular current stabilization cover (15) covered on dividing plate (13), the circumference of current stabilization cover (15) sidewall evenly offers through hole, the height of this through hole is lower than the mouth of pipe height of current-sharing pipe (14) upper end, and jack is evenly offered being positioned on peripheral dividing plate (13) the plate face of current stabilization cover (15).
4. electronic-stage hydrofluoric acid production rectifying column as claimed in claim 1, it is characterized in that: rectifying column (10) tower height is 19 meters, only 9 meters, tower body bottom arranges the hand hole (12) for overhauling, and every 3 meters of tower body height arranges two hand holes (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410079650.XA CN103830926B (en) | 2014-03-05 | 2014-03-05 | Electronic-stage hydrofluoric acid production rectifying column |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410079650.XA CN103830926B (en) | 2014-03-05 | 2014-03-05 | Electronic-stage hydrofluoric acid production rectifying column |
Publications (2)
| Publication Number | Publication Date |
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| CN103830926A CN103830926A (en) | 2014-06-04 |
| CN103830926B true CN103830926B (en) | 2015-12-23 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410079650.XA Active CN103830926B (en) | 2014-03-05 | 2014-03-05 | Electronic-stage hydrofluoric acid production rectifying column |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1151781A2 (en) * | 2000-05-04 | 2001-11-07 | BASF Aktiengesellschaft | Rectification column |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4126465B2 (en) * | 1997-01-13 | 2008-07-30 | 英正 ▲鶴▼田 | Method of fractionating light components from the residual liquor |
| CN102320573B (en) * | 2011-09-19 | 2013-04-03 | 瓮福（集团）有限责任公司 | Method for preparing electronic grade hydrofluoric acid |
| CN202785641U (en) * | 2012-06-14 | 2013-03-13 | 江阴苏龙微电子材料有限公司 | Device for producing ultra-clean and high-purity hydrofluoric acid |
| CN203874487U (en) * | 2014-03-05 | 2014-10-15 | 宣城亨泰化工科技有限公司 | Rectifying tower for production of electronic-grade hydrofluoric acid |
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2014
- 2014-03-05 CN CN201410079650.XA patent/CN103830926B/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1151781A2 (en) * | 2000-05-04 | 2001-11-07 | BASF Aktiengesellschaft | Rectification column |
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| CN103830926A (en) | 2014-06-04 |
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Address after: 242000 east of Qilin Road, Xuancheng Economic Development Zone, Xuanzhou District, Anhui, China Applicant after: XUANCHENG HENGTAI ELECTRONIC CHEMICAL MATERIAL CO., LTD. Address before: 242000 east of Qilin Road, Xuancheng Economic Development Zone, Xuanzhou District, Anhui, China Applicant before: XUANCHENG XIANGTAI CHEMICAL TECHNOLOGY CO., LTD. |
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