CN202785641U - Device for producing ultra-clean and high-purity hydrofluoric acid - Google Patents
Device for producing ultra-clean and high-purity hydrofluoric acid Download PDFInfo
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- CN202785641U CN202785641U CN 201220280686 CN201220280686U CN202785641U CN 202785641 U CN202785641 U CN 202785641U CN 201220280686 CN201220280686 CN 201220280686 CN 201220280686 U CN201220280686 U CN 201220280686U CN 202785641 U CN202785641 U CN 202785641U
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- hydrofluoric acid
- rectifying tower
- production equipment
- discharge port
- mixing tank
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Abstract
The utility model discloses a device for producing ultra-clean and high-purity hydrofluoric acid. The device comprises a rectifying tower kettle communicated with a hydrogen fluoride storage tank; the bottom of the rectifying tower kettle is provided with a slag hole; the upper part of the rectifying tower kettle is provided with a rectifying tower communicated with the rectifying tower kettle; a tower top discharge hole of the rectifying tower is provided with a condenser; a discharge hole of the condenser is communicated with a hydrofluoric acid feeding hole of a mixer by a pipeline; a tower bottom hydrofluoric acid discharge hole of the mixer is communicated with a feeding hole of a cooler; a discharge hole of the cooler is sequentially communicated with an intermediate tank, an acid-proof pump, a micro-strainer and a finished product tank; a hydrofluoric acid reflux branch pipe is arranged on a pipeline between the micro-strainer and a valve; the hydrofluoric acid reflux branch pipe is provided with another valve; and another valve is arranged between a tee joint provided with the branch pipe and the micro-strainer. The device is reasonable in technological process, high in production efficiency, good in cooling effect of the hydrofluoric acid and stable in product quality.
Description
Technical field
The utility model relates to the superhigh-purity reagent purification techniques, is specifically related to a kind of production equipment of super clean, high purified hydrofluoric acid.
Background technology
Ultra-clean and high pure chemical reagent is one of indispensable key basic chemical industry raw material during the electronic applications microfabrication is made, and is mainly used in cleaning and the etching of chip.Super clean, high purified hydrofluoric acid is mainly used in the rinsing process of semicon industry ultraviolet negative photoresist.
Along with the development of electronic applications technology, the also day by day raising of purity requirement to electronic chemical product in order to reach the requirement of rinsing ultraviolet negative photoresist and noresidue, needs to improve cleanliness and the purity of used rinse reagent.Batch production technique is adopted in hydrofluoric production more, and production efficiency is low; In the prior art hydrogen fluoride by absorbing pure water after the polyethylene coil pipe heat exchange of adopting, cooling performance is not good, causes the temperature in the tundish higher, is unfavorable for concentration and definite discharging time of monitor hydrogen fluoric acid; In addition, hydrogen fluoride directly enters the rectifying tower reactor in the prior art, and step need of production is heated to boiling state by room temperature, and it is longer that single is produced the heating-up time, affects production efficiency.
The utility model content
The purpose of this utility model is to overcome the defective that exists in the prior art, provides that a kind of technical process is reasonable, production efficiency is high, the production equipment of the super clean, high purified hydrofluoric acid of hydrofluoric acid good cooling results, constant product quality.
For achieving the above object, the technical solution of the utility model is: a kind of production equipment of super clean, high purified hydrofluoric acid, it is characterized in that, described production equipment comprises the rectifying tower reactor that communicates for the hydrogen fluoride storage tank, described rectifying tower reactor bottom is provided with slag-drip opening, described rectifying tower reactor top is provided with the rectifying tower of connection, the cat head discharge port of described rectifying tower is provided with condenser, the discharge port of described condenser is connected with the hydrofluoric acid opening for feed of mixing tank by pipeline, the hydrofluoric acid discharge port is connected with the water cooler opening for feed at the bottom of the tower of described mixing tank, the discharge port of described water cooler successively with tundish, vacuum pump, micro-strainer and finished pot are connected, be provided with hydrofluoric acid backflow arm on the pipeline between described micro-strainer and the valve, be provided with valve on the described hydrofluoric acid backflow arm, arrange between threeway place of described arm and the micro-strainer and be provided with valve.
Wherein, be provided with the discharging arm on the pipeline between described condenser and the mixing tank, arrange between threeway place of described discharging arm and the mixing tank and be provided with valve, also be provided with valve on the described discharging arm, the unsettled inner low side of low-boiling-point substance treatment tank that is arranged on of the discharge end of described discharging arm.
Wherein, the top of described low-boiling-point substance treatment tank, mixing tank and finished pot is respectively arranged with offgas duct, described offgas duct communicates and is connected with the tail gas opening for feed on described tundish top, the top of described tundish also is provided with the tail gas discharge port, described tail gas discharge port communicates with buffer barrel by pipeline, the unsettled inner low side of vent gas treatment tank that is arranged on of the discharge nozzle discharge end that the discharge port of buffer barrel connects, the top of described vent gas treatment tank is provided with blow-down pipe.
Wherein, described mixing tank and water cooler are provided with the water condensation system, and connecting between the water condensation system of described mixing tank and water cooler communicates.
Wherein, be connected with preheater on the pipeline between described storage tank and the rectifying tower reactor.
Wherein, be provided with the pure water feed mouth on the described tundish.
Wherein, described acid proof pump is the tetrafluoroethylene pump.
Wherein, described water cooler is the poly-PFA tubular heat exchange of secondary.
Wherein, the filter membrane aperture of described micro-strainer is 0.05～0.10 μ m.
Advantage of the present utility model and beneficial effect are:
This apparatus structure is reasonable, reaches the pipe of condenser and mixing tank to arm and corresponding valve are set between tundish and micro-strainer, has realized the continuous production of hydrofluoric acid;
Adopt secondary PFA tubular heat exchange, good cooling results has been avoided the higher phenomenon that is unfavorable for monitoring purity and definite efflux time of hydrofluoric acid temperature in the tundish;
Between hydrogen fluoride storage tank and rectifying tower reactor, be provided with preheater in this equipment, reduce the heat-up time of hydrogen fluoride in the rectifying tower reactor, help to enhance productivity.
Description of drawings
Fig. 1 is the structural representation of the production equipment of the utility model super clean, high purified hydrofluoric acid.
Among the figure: 1, hydrogen fluoride storage tank; 2, rectifying tower reactor; 3, rectifying tower; 4, condenser; 5, mixing tank; 6, water cooler; 7, tundish; 8, vacuum pump; 9, micro-strainer; 10, finished pot; 11, hydrofluoric acid backflow arm; 12, discharging arm; 13, low-boiling-point substance treatment tank; 14, blow-down pipe; 15, preheater; 16, pure water feed mouth; 17, buffer barrel; 18, vent gas treatment tank.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is further described.Following examples only are used for the technical solution of the utility model more clearly is described, and can not limit protection domain of the present utility model with this.
As shown in Figure 1, present embodiment is a kind of production equipment of super clean, high purified hydrofluoric acid, comprise the rectifying tower reactor 2 that communicates for hydrogen fluoride storage tank 1, rectifying tower reactor 2 bottoms are provided with slag-drip opening, rectifying tower reactor 2 tops are provided with the rectifying tower 3 of connection, the cat head discharge port of rectifying tower 3 is provided with condenser 4, the discharge port of condenser 4 is connected with the hydrofluoric acid opening for feed of mixing tank 5 by pipeline, the hydrofluoric acid discharge port is connected with water cooler 6 opening for feeds at the bottom of the tower of mixing tank 5, the discharge port of water cooler 6 successively with tundish 7, pump 8, micro-strainer 9 and finished pot 10 are connected, be provided with hydrofluoric acid backflow arm 11 on the pipeline between micro-strainer 9 and the valve, be provided with valve on the hydrofluoric acid backflow arm 11, arrange between threeway place of arm and the micro-strainer 9 and be provided with valve.
In the present embodiment, be provided with discharging arm 12 on the pipeline between condenser 4 and the mixing tank 5, arrange between threeway place of discharging arm 12 and the mixing tank 5 and be provided with valve, also be provided with valve on the discharging arm 12, the unsettled low-boiling-point substance treatment tank 13 inner low sides that are arranged on of the discharge end of discharging arm 12.
In the present embodiment, the top of low-boiling-point substance treatment tank 13, mixing tank 5 and finished pot 10 is respectively arranged with offgas duct, offgas duct communicates and is connected with the tail gas opening for feed on tundish 7 tops, the top of tundish 7 also is provided with the tail gas discharge port, the tail gas discharge port communicates with buffer barrel 17 by pipeline, the unsettled vent gas treatment tank 18 inner low sides that are arranged on of discharge nozzle discharge end that the discharge port of buffer barrel 17 connects, the top of vent gas treatment tank 18 is provided with blow-down pipe 14.
In the present embodiment, mixing tank 5 and water cooler 6 are provided with the water condensation system, and connecting between the water condensation system of mixing tank 5 and water cooler 6 communicates.
In the present embodiment, be connected with preheater 15 on the pipeline between storage tank and the rectifying tower reactor 2.
In the present embodiment, be provided with pure water feed mouth 16 on the tundish 7.
In the present embodiment, vacuum pump 8 is the tetrafluoroethylene pump.
In the present embodiment, water cooler 6 is secondary PFA tubular heat exchange.
In the present embodiment, the filter membrane aperture of micro-strainer 9 is 0.05～0.10 μ m.
Hydrogen fluoride enters rectifying tower still 2 after preheater 15 preheatings, at the continuous boiling point that is warming up to of rectifying tower reactor 2 relayings, hydrogen fluoride passes through repeatedly exchange of substance of packing layer in rectifying tower 3, be back to tower reactor by 4 of rectifying tower 3 tops so that be higher than hydrogen fluoride boiling point impurity, lower boiling overhead product at first enters low-boiling-point substance treatment tank 13 carrying out washing treatment through discharging arm 12, the hydrogen fluoride that distillates is imported into mixing in the mixing tank 5 by the switching of pipeline, the hydrofluoric acid that generates in the mixing tank 5 flows in the tundish 7 that circulate with mixing tank 5 formation through the cooling of water cooler 6.When hydrofluoric acid concentration does not also reach the finished product requirement in the tundish 7, by acid proof pump 8 hydrofluoric acid of low concentration is pumped into mixing tank 5, further absorb hydrogen fluoride; When the concentration of hydrofluoric acid in the tundish 7 reaches finished product and requires, switch pipeline, hydrofluoric acid is pumped in the micro-strainer 9 filter, then filtrate is imported finished pot 10.The tail gas of finished pot 10, low-boiling-point substance treatment tank 13 and mixing tank 5 all imports tundish 7, and the tail gas in the tundish 7 flows in the vent gas treatment tank 18 through buffer barrel 17, and by alkali liquor absorption, the unabsorbed tail gas of alkali lye enters in the atmosphere through blow-down pipe 14.
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (9)
1. the production equipment of a super clean, high purified hydrofluoric acid, it is characterized in that, described production equipment comprises the rectifying tower reactor that communicates for the hydrogen fluoride storage tank, described rectifying tower reactor bottom is provided with slag-drip opening, described rectifying tower reactor top is provided with the rectifying tower of connection, the cat head discharge port of described rectifying tower is provided with condenser, the discharge port of described condenser is connected with the hydrofluoric acid opening for feed of mixing tank by pipeline, the hydrofluoric acid discharge port is connected with the water cooler opening for feed at the bottom of the tower of described mixing tank, the discharge port of described water cooler successively with tundish, acid proof pump, micro-strainer and finished pot are connected, be provided with hydrofluoric acid backflow arm on the pipeline between described micro-strainer and the valve, be provided with valve on the described hydrofluoric acid backflow arm, arrange between threeway place of described arm and the micro-strainer and be provided with valve.
2. the production equipment of super clean, high purified hydrofluoric acid according to claim 1, it is characterized in that, be provided with the discharging arm on the pipeline between described condenser and the mixing tank, arrange between threeway place of described discharging arm and the mixing tank and be provided with valve, also be provided with valve on the described discharging arm, the unsettled inner low side of low-boiling-point substance treatment tank that is arranged on of the discharge end of described discharging arm.
3. the production equipment of super clean, high purified hydrofluoric acid according to claim 2, it is characterized in that, the top of described low-boiling-point substance treatment tank, mixing tank and finished pot is respectively arranged with offgas duct, described offgas duct communicates and is connected with the tail gas opening for feed on described tundish top, the top of described tundish also is provided with the tail gas discharge port, described tail gas discharge port communicates with buffer barrel by pipeline, the unsettled inner low side of vent gas treatment tank that is arranged on of the discharge end of the discharge nozzle that the discharge port of buffer barrel connects, the top of described vent gas treatment tank is provided with blow-down pipe.
4. the production equipment of super clean, high purified hydrofluoric acid according to claim 3 is characterized in that, described mixing tank and water cooler are provided with the water condensation system, and connecting between the water condensation system of described mixing tank and water cooler communicates.
5. the production equipment of super clean, high purified hydrofluoric acid according to claim 4 is characterized in that, is connected with preheater on the pipeline between described storage tank and the rectifying tower reactor.
6. the production equipment of super clean, high purified hydrofluoric acid according to claim 5 is characterized in that, is provided with the pure water feed mouth on the described tundish.
7. the production equipment of super clean, high purified hydrofluoric acid according to claim 6 is characterized in that, described acid proof pump is the tetrafluoroethylene pump.
8. the production equipment of super clean, high purified hydrofluoric acid according to claim 7 is characterized in that, described water cooler is secondary PFA tubular heat exchange.
9. the production equipment of the described super clean, high purified hydrofluoric acid of any one in 8 according to claim 1 is characterized in that the filter membrane aperture of described micro-strainer is 0.05～0.10 μ m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220280686 CN202785641U (en) | 2012-06-14 | 2012-06-14 | Device for producing ultra-clean and high-purity hydrofluoric acid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220280686 CN202785641U (en) | 2012-06-14 | 2012-06-14 | Device for producing ultra-clean and high-purity hydrofluoric acid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202785641U true CN202785641U (en) | 2013-03-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220280686 Expired - Fee Related CN202785641U (en) | 2012-06-14 | 2012-06-14 | Device for producing ultra-clean and high-purity hydrofluoric acid |
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| CN (1) | CN202785641U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103830926A (en) * | 2014-03-05 | 2014-06-04 | 宣城亨泰化工科技有限公司 | Rectifying tower for producing electronic grade hydrofluoric acid |
-
2012
- 2012-06-14 CN CN 201220280686 patent/CN202785641U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103830926A (en) * | 2014-03-05 | 2014-06-04 | 宣城亨泰化工科技有限公司 | Rectifying tower for producing electronic grade hydrofluoric acid |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20140614 |
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| EXPY | Termination of patent right or utility model |