CN202785681U - Device for continuously producing ultra-clean and high-purity ammonia water - Google Patents
Device for continuously producing ultra-clean and high-purity ammonia water Download PDFInfo
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- CN202785681U CN202785681U CN2012202808029U CN201220280802U CN202785681U CN 202785681 U CN202785681 U CN 202785681U CN 2012202808029 U CN2012202808029 U CN 2012202808029U CN 201220280802 U CN201220280802 U CN 201220280802U CN 202785681 U CN202785681 U CN 202785681U
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- ammoniacal liquor
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Abstract
The utility model discloses a device for continuously producing ultra-clean and high-purity ammonia water. The device comprises a buffer tank connected with an ammonia storage tank; a discharge hole of the buffer tank is connected with gas-washing bottles in series; outlets of the gas-washing bottles are connected with an ammonia feeding hole of an absorption tower; an ammonia water discharge hole in the bottom of the absorption tower is communicated with an intermediate tank; a discharge hole of the intermediate tank is sequentially connected with a vacuum pump, a micro-strainer and a finished product tank in series by pipelines; an ammonia water feeding branch pipe is arranged on a pipeline arranged between the vacuum pump and micro-strainer; the ammonia water feeding branch pipe is communicated with the absorption tower; the device further comprises a tail gas absorption tank; the absorption tower and a tail gas pipe of the intermediate tank are communicated with the tail gas absorption tank and extend into the lower end of the inner cavity of the tail gas absorption tank; and a discharge hole arranged in the lower end of the tail gas absorption tank is communicated with the intermediate tank. The device is reasonable in technological process, high in production efficiency and high in equipment utilization rate and in accordance with the requirements of environmental friendliness.
Description
Technical field
The utility model relates to the superhigh-purity reagent purification techniques, is specifically related to a kind of continuous production device of super-clean high-purity ammoniacal liquor.
Background technology
Ultra-clean and high pure chemical reagent is one of indispensable key basic chemical industry raw material during the electronic applications microfabrication is made, and is mainly used in cleaning and the etching of chip.Super-clean high-purity ammoniacal liquor is alkalescence, is mainly used in the rinsing process of semicon industry ultraviolet negative photoresist, can support the use with developer for negative photoresist.
Along with the development of electronic applications technology, to the also day by day raising of purity requirement of electronic chemical product.The super-clean high-purity ammoniacal liquor production equipment that generally adopts at present mostly is intermittent type, and product quality monitoring is loaded down with trivial details, and production efficiency and plant factor are lower, and in addition, sour neutralisation is adopted in the absorption of tail gas usually in the Production Flow Chart, can produce certain waste water.Therefore, be necessary ammoniacal liquor production unit of the prior art is improved.
The utility model content
The purpose of this utility model is to overcome the defective that exists in the prior art, provide a kind of technical process rationally, production efficiency and plant factor be high, the continuous production device that meets the super-clean high-purity ammoniacal liquor of environmental requirement.
For achieving the above object, the technical solution of the utility model is: a kind of continuous production device of super-clean high-purity ammoniacal liquor, described continuous production device comprises the surge tank that is connected with the ammonia storage tank, discharge port and the scrubbing bottle of described surge tank are in series, the outlet of described scrubbing bottle links to each other with the ammonia feed mouth on absorption tower, it is characterized in that, the ammoniacal liquor discharge port that arranges at the bottom of the described absorbing tower communicates with tundish, the discharge port of described tundish is by the pipeline vacuum pump of connecting successively, micro-strainer and finished pot, be provided with the ammoniacal liquor feed-inputing branched pipe on the pipeline between vacuum pump and the micro-strainer, described ammoniacal liquor feed-inputing branched pipe communicates with described absorption tower, described continuous production device also comprises tail gas absorption tank, the offgas duct of described absorption tower and tundish communicates with described tail gas absorption tank and is extended down to the low side of tail gas absorption tank inner chamber, and the low side discharge port of described tail gas absorption tank communicates with tundish.
After reaching finite concentration, enter micro-strainer by vacuum pump for the ease of ammoniacal liquor, the structure of simplified apparatus, preferred technical scheme is provided with the ammoniacal liquor valve on the described ammoniacal liquor feed-inputing branched pipe, also is provided with the ammoniacal liquor valve between described ammoniacal liquor feed-inputing branched pipe interface and the micro-strainer.
, the top of described tail gas absorption tank and tundish is respectively arranged with the pure water feed mouth, and described pure water feed mouth respectively pure water arm is connected.
In order to simplify the structure of production equipment, preferred technical scheme is that described pure water arm communicates with DI, is respectively arranged with the pure water valve on the described pure water arm.
For tail gas a small amount of in tail gas absorption tank and the finished pot is in time discharged, avoid that air pressure is too high in tail gas absorption tank and the finished pot has an accident, preferred technical scheme is that the top of described tail gas absorption tank and finished pot is respectively arranged with blow-down pipe, is connected with respectively blow-off valve on the described blow-down pipe.
In order to increase the heat transfer area of ammonia absorption tower, in time absorb the heat that discharges when generating ammoniacal liquor, preferred technical scheme is that described absorption tower periphery is provided with water cooling system.
In order respectively the impurity in the raw material ammonia to be cleaned, preferably technical scheme is, described scrubbing bottle is at least two, and series connection is connected between the described scrubbing bottle.
For more effective control ammonia flow, to be convenient to simultaneously when being in an emergency, stop, preferred technical scheme is to be connected with the ammonia valve on the pipeline between described ammonia storage tank and the surge flask.
Advantage of the present utility model and beneficial effect are:
This apparatus structure advantages of simple, tundish are set realize the Matter Transfer of absorption tower and tail gas absorption tank, ammoniacal liquor in tundish reaches finite concentration makes the switching pipeline, in time gets rid of the ammoniacal liquor that meets production requirement, has realized the continuous production of super-clean high-purity ammoniacal liquor;
The tail gas of this device absorbs and adopts pure water, and the product lower concentration ammoniacal liquor that tail gas absorbs is imported the further ammonia that absorbs in the absorption tower, is conducive to taking full advantage of of material, and the production equipment emission is less, meets environmental requirement.
Description of drawings
Fig. 1 is the structural representation of the continuous production device of the utility model super-clean high-purity ammoniacal liquor.
Among the figure: 1, ammonia storage tank; 2, surge tank; 3, scrubbing bottle; 4, absorption tower; 5, tundish; 6, tail gas recycle tank; 7, vacuum pump; 8, micro-strainer; 9, finished pot; 10, ammoniacal liquor feed-inputing branched pipe; 11, offgas duct; 12, ammoniacal liquor valve; 13, pure water arm; 14, DI; 15, pure water valve; 16, blow-down pipe; 17, blow-off valve; 18, ammonia valve.
Embodiment
Below in conjunction with drawings and Examples, embodiment of the present utility model is further described.Following examples only are used for the technical solution of the utility model more clearly is described, and can not limit protection domain of the present utility model with this.
As shown in Figure 1, present embodiment is a kind of continuous production device of super-clean high-purity ammoniacal liquor, continuous production device comprises the surge tank 2 that is connected with ammonia storage tank 1, the discharge port of surge tank 2 and scrubbing bottle 3 are in series, the outlet of scrubbing bottle 3 links to each other with the ammonia feed mouth on absorption tower 4, the ammoniacal liquor discharge port that arranges at the bottom of 4 towers of absorption tower communicates with tundish 5, the discharge port of tundish 5 is by the pipeline vacuum pump 7 of connecting successively, micro-strainer 8 and finished pot 9, be provided with ammoniacal liquor feed-inputing branched pipe 10 on the pipeline between vacuum pump 7 and the micro-strainer 8, ammoniacal liquor feed-inputing branched pipe 10 communicates with absorption tower 4, continuous production device also comprises tail gas absorption tank 6, the offgas duct 11 of absorption tower 4 and tundish 5 communicates with tail gas absorption tank 6 and is extended down to the low side of tail gas absorption tank 6 inner chambers, and the low side discharge port of tail gas absorption tank 6 communicates with tundish 5.
In the present embodiment, be provided with ammoniacal liquor valve 12 on the ammoniacal liquor feed-inputing branched pipe 10, also be provided with ammoniacal liquor valve 12 between ammoniacal liquor feed-inputing branched pipe 10 interfaces and the micro-strainer 8.
In the present embodiment, tail gas absorption tank 6 is respectively arranged with the pure water feed mouth with the top of tundish 5, and pure water feed mouth respectively pure water arm 13 is connected.
In the present embodiment, pure water arm 13 communicates with DI 14, is respectively arranged with pure water valve 15 on the pure water arm 13.
In the present embodiment, the top of tail gas absorption tank 6 and finished pot 9 is respectively arranged with blow-down pipe 16, is connected with respectively blow-off valve 17 on the blow-down pipe 16.
In the present embodiment, absorption tower 4 peripheries are provided with water cooling system.
In the present embodiment, scrubbing bottle 3 is two, and two scrubbing bottle 3 series connection are connected.
In the present embodiment, be connected with ammonia valve 18 on the pipeline between ammonia storage tank 1 and the surge flask 2.
This device workflow is:
The first step: open the blow-down pipe on the tail gas recycle tank;
Second step: open the pure water valve and in tundish and tail gas recycle tank, add a certain amount of pure water, then close two pure water valves;
The 3rd step: the cooling system of fetching boiling water, open the ammoniacal liquor valve on the ammoniacal liquor feed-inputing branched pipe, close charging and lead to ammoniacal liquor valve on the pipeline of micro-strainer, then open vacuum pump;
The 4th step: open the ammonia valve, ammonia is through the purifying of surge tank and scrubbing bottle, enter the absorption tower, the ammoniacal liquor that generates in the absorption tower flows in the tundish through pipeline, ammoniacal liquor in the tundish is sent into again via vacuum pump absorbs ammonia in the absorption tower, ammonia concn increases, the unnecessary offgas duct of ammonia through the top, absorption tower in absorption tower enters the tail gas recycle tank, by the absorbing pure water in the tail gas recycle tank, the ammoniacal liquor that generates flows in the tundish through the low side discharge port of tail gas recycle tank, and the offgas duct of the tail gas of tundish through the top imports the recycle of tail gas recycle tank;
The 5th step: in time monitor the concentration of ammoniacal liquor in the tundish, when the ammoniacal liquor in the tundish reaches predetermined concentration, close the ammoniacal liquor valve on the ammoniacal liquor feed-inputing branched pipe, open charging and lead to ammoniacal liquor valve on the pipeline of micro-strainer, ammoniacal liquor imports in the finished pot through micro-strainer.
The above only is preferred implementation of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (8)
1. the continuous production device of a super-clean high-purity ammoniacal liquor, described continuous production device comprises the surge tank that is connected with the ammonia storage tank, discharge port and the scrubbing bottle of described surge tank are in series, the outlet of described scrubbing bottle links to each other with the ammonia feed mouth on absorption tower, it is characterized in that, the ammoniacal liquor discharge port that arranges at the bottom of the described absorbing tower communicates with tundish, the discharge port of described tundish is by the pipeline vacuum pump of connecting successively, micro-strainer and finished pot, be provided with the ammoniacal liquor feed-inputing branched pipe on the pipeline between vacuum pump and the micro-strainer, described ammoniacal liquor feed-inputing branched pipe communicates with described absorption tower, described continuous production device also comprises tail gas absorption tank, the offgas duct of described absorption tower and tundish communicates with described tail gas absorption tank and is extended down to the low side of tail gas absorption tank inner chamber, and the low side discharge port of described tail gas absorption tank communicates with tundish.
2. the continuous production device of super-clean high-purity ammoniacal liquor according to claim 1 is characterized in that, is provided with the ammoniacal liquor valve on the described ammoniacal liquor feed-inputing branched pipe, also is provided with the ammoniacal liquor valve between described ammoniacal liquor feed-inputing branched pipe interface and the micro-strainer.
3. the continuous production device of super-clean high-purity ammoniacal liquor according to claim 2 is characterized in that, the top of described tail gas absorption tank and tundish is respectively arranged with the pure water feed mouth, and described pure water feed mouth respectively pure water arm is connected.
4. the continuous production device of super-clean high-purity ammoniacal liquor according to claim 3 is characterized in that, described pure water arm communicates with DI, on the described pure water arm pure water valve is set respectively.
5. the continuous production device of super-clean high-purity ammoniacal liquor according to claim 1 is characterized in that, the top of described tail gas absorption tank and finished pot is respectively arranged with blow-down pipe, is connected with respectively blow-off valve on the described blow-down pipe.
6. the continuous production device of super-clean high-purity ammoniacal liquor according to claim 1 is characterized in that, described absorption tower periphery is provided with water cooling system.
7. the continuous production device of super-clean high-purity ammoniacal liquor according to claim 1 is characterized in that, described scrubbing bottle is at least two, and series connection is connected between the described scrubbing bottle.
8. the continuous production device of super-clean high-purity ammoniacal liquor according to claim 1 is characterized in that, is connected with the ammonia valve on the pipeline between described ammonia storage tank and the surge flask.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202808029U CN202785681U (en) | 2012-06-14 | 2012-06-14 | Device for continuously producing ultra-clean and high-purity ammonia water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012202808029U CN202785681U (en) | 2012-06-14 | 2012-06-14 | Device for continuously producing ultra-clean and high-purity ammonia water |
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| CN202785681U true CN202785681U (en) | 2013-03-13 |
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| CN2012202808029U Expired - Fee Related CN202785681U (en) | 2012-06-14 | 2012-06-14 | Device for continuously producing ultra-clean and high-purity ammonia water |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103691285A (en) * | 2013-12-25 | 2014-04-02 | 贵州开磷（集团）有限责任公司 | Special ammonia water preparation device for washing sulfuric acid tail gas |
| CN103833048A (en) * | 2014-03-18 | 2014-06-04 | 长沙有色冶金设计研究院有限公司 | System and method for rapid preparation of ammonia water |
| CN104801212A (en) * | 2015-04-28 | 2015-07-29 | 西安热工研究院有限公司 | Automatic ammonia-water preparing device and method |
-
2012
- 2012-06-14 CN CN2012202808029U patent/CN202785681U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103691285A (en) * | 2013-12-25 | 2014-04-02 | 贵州开磷（集团）有限责任公司 | Special ammonia water preparation device for washing sulfuric acid tail gas |
| CN103691285B (en) * | 2013-12-25 | 2017-01-04 | 贵州开磷集团股份有限公司 | A kind of ammonia preparation device being exclusively used in washing sulfuric acid tail gas |
| CN103833048A (en) * | 2014-03-18 | 2014-06-04 | 长沙有色冶金设计研究院有限公司 | System and method for rapid preparation of ammonia water |
| CN103833048B (en) * | 2014-03-18 | 2015-08-12 | 长沙有色冶金设计研究院有限公司 | A kind of quick preparation system of ammoniacal liquor and method |
| CN104801212A (en) * | 2015-04-28 | 2015-07-29 | 西安热工研究院有限公司 | Automatic ammonia-water preparing device and method |
| CN104801212B (en) * | 2015-04-28 | 2017-02-01 | 西安热工研究院有限公司 | Automatic ammonia-water preparing device and method |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130313 Termination date: 20140614 |
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| EXPY | Termination of patent right or utility model |