CN202398241U - Chlorosilane washing tower - Google Patents

Chlorosilane washing tower Download PDF

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Publication number
CN202398241U
CN202398241U CN2011203384185U CN201120338418U CN202398241U CN 202398241 U CN202398241 U CN 202398241U CN 2011203384185 U CN2011203384185 U CN 2011203384185U CN 201120338418 U CN201120338418 U CN 201120338418U CN 202398241 U CN202398241 U CN 202398241U
Authority
CN
China
Prior art keywords
chlorosilane
gas
scrubbing tower
washing
tower according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN2011203384185U
Other languages
Chinese (zh)
Inventor
黄小华
赵翠
曾炟
许晟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI MORIMATSU NEW ENERGY EQUIPMENT CO Ltd
Original Assignee
SHANGHAI MORIMATSU NEW ENERGY EQUIPMENT CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHANGHAI MORIMATSU NEW ENERGY EQUIPMENT CO Ltd filed Critical SHANGHAI MORIMATSU NEW ENERGY EQUIPMENT CO Ltd
Priority to CN2011203384185U priority Critical patent/CN202398241U/en
Application granted granted Critical
Publication of CN202398241U publication Critical patent/CN202398241U/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a chlorosilane washing tower which comprises a washing section, a connecting flange and a heat exchange section. The washing section comprises a tapered end socket, a liquid-phase space and a gas-phase space, wherein the high-temperature chlorosilane gas with dust passes through a chlorosilane gas inlet of the tapered end socket and enters into the washing tower; the chlorosilane gas fully reacts in the washing liquid in the liquid-phase space; the dust impurities in the chlorosilane gas are remained in the washing liquid; due to the gravity, the dust impurities are deposited at the bottom end of the tapered end socket; slagging is performed at regular intervals at a slagging port at the bottom end; the high-temperature chlorosilane gas after being washed enters into a heat exchange pipe of the heat exchange section; a cooling medium is introduced into the shell of the heat exchange section; and the chlorosilane gas after being subjected to full heat exchange enters into the next process from a gas outlet of an upper end socket of the heat exchange section. The chlorosilane washing tower provided by the utility model can wash and exchange the heat of the high-temperature chlorosilane gas, so that the chlorosilane gas can directly enter into the next production process and the pretreatment is performed for the subsequent production process.

Description

The chlorosilane scrubbing tower
Technical field:
The utility model relates to a kind of chlorosilane scrubbing tower, and particularly a kind of chlorosilane scrubbing tower that has washing and heat exchange function belongs to photovoltaic industrial technology field.
Background technology:
Polysilicon is a primary raw material of making silicon polished, solar cell and HIGH-PURITY SILICON goods, is the basic material of information industry and new forms of energy industry.Under the golden eggs of photovoltaic industry, various places polysilicon project starts one after another, and the polysilicon industrial prospect is wide, has become the focus of China's investment.
Extensively adopt Siemens Method to prepare polysilicon in the prior art.Siemens Method is in reduction furnace, SiHCl 3And H 2In air inlet pipe gets into body of heater, reduction reaction takes place Deng process gas, generation Si also is deposited on the silicon core electrode.Meanwhile, produce 1000 tons of polysilicons and will generate about 15000 tons of SiCl 4(being silicon tetrachloride) not only caused energy waste, also brings immense pressure for the polysilicon enterprise production.Existing new technology is with SiCl 4Be converted into SiHCl 3, participate in again producing, be the trend of current production of polysilicon.In this conversion process, through the high temperature SiHCl of series reaction generation 3Contain dust granules in the gas, in order to make this high temperature SiHCl 3Gas gets into again and produces polysilicon in the reduction furnace, must wash and lowers the temperature the impurity dust.
The utility model content:
The purpose of the utility model is to provide a kind of chlorosilane scrubbing tower; This chlorosilane scrubbing tower can effectively fully wash the high-temperature chlorine silane gas that contains dust; And the high-temperature chlorine silane gas is carried out heat exchange; Effectively reduce the temperature of chlorosilane gas, make it can directly get into next production process.
For realizing above-mentioned purpose, the chlorosilane scrubbing tower that the utility model adopts comprises upper cover, heat exchanging segment, washing section and low head from top to bottom, and said heat exchanging segment is connected through flange with washing section; Said low head is provided with gas feed; Said upper cover is provided with gas vent, and said heat exchanging segment is provided with cooling medium outlet and cooling medium inlet.
A kind of preferred version as the utility model; Said heat exchanging segment comprises a housing, and said enclosure interior is provided with several heat exchanger tubes, and said heat exchanger tube is fixed in tube sheet; Said cooling medium inlet is located at housing the latter half, and the casing upper half branch is located in said cooling medium outlet.The high-temperature chlorine silane gas carries out exchange heat through heat exchanger tube and the outer cooling medium of heat exchanger tube, reaches the purpose of cooling.
As a kind of preferred version of the utility model, the diameter of the cross section of said heat exchanger tube is less than its length.
As a kind of preferred version of the utility model, the cross section of said heat exchanger tube is circular, perhaps polygon, and said heat exchanger tube is uniformly distributed in the said housing.
As a kind of preferred version of the utility model, the top of said washing section is a gas-phase space, and the below is the liquid phase space, and said liquid phase is full of cleaning solution in the space.
As a kind of preferred version of the utility model, said liquid phase space is provided with cleaning solution import and cleaning solution outlet.
As a kind of preferred version of the utility model, said low head is taper.
As a kind of preferred version of the utility model, said low head bottom is provided with slag-drip opening.
As a kind of preferred version of the utility model, said slag-drip opening is provided with weight valve.
The operation principle of the utility model: the chlorosilane gas of the high temperate zone dust that a last operation is produced; Get into the liquid phase space of washing section through gas feed; The liquid phase space is full of certain density cleaning solution, and the chlorosilane gas of band dust is fully washing in cleaning solution, and dust is stayed in the cleaning solution; Dust is deposited on the bottom of washing section through the gravity effect, through the regular deslagging of the slag-drip opening of washing section; Chlorosilane gas after washing gets into gas-phase space; Chlorosilane gas after the washing gets into the heat exchanger tube of heat exchanging segment through the washing section gas-phase space; Be full of cooling medium in the housing of heat exchanging segment; High-temperature chlorine silane gas in the heat exchanger tube and the cooling medium in the housing carry out heat exchange; Through the gas outlet entering subsequent processing of cooled chlorosilane gas from the heat exchanging segment top.
The chlorosilane scrubbing tower that the utility model provides can wash the chlorosilane gas of high temperature and heat exchange; Effectively remove the impurity such as dust granules in the chlorosilane gas; Reduce gas temperature greatly, make it can directly get into next production process, for follow-up production process is carried out preliminary treatment.
Description of drawings:
Fig. 1 is the structural representation of the chlorosilane scrubbing tower of the utility model.
Reference numeral: the 1st, slag-drip opening, the 2nd, conical head, the 3rd, gas feed, the 4th, washing section liquid phase space, the 5th, washing section gas-phase space; The 6th, flange, the 7th, tube sheet, the 8th, heat exchanger tube, the 9th, housing; The 10th, upper cover, the 11st, gas vent, the 12nd, cooling medium outlet, the 13rd, cooling medium inlet.
The specific embodiment:
Below in conjunction with accompanying drawing the utility model is further described, but the utility model is not limited to described embodiment.
As shown in Figure 1, the chlorosilane scrubbing tower comprises conical head 2, washing section liquid phase space 4, washing section gas-phase space 5, flange 6, tube sheet 7, heat exchanger tube 8, housing 9, upper cover 10 from bottom to top.Heat exchanger tube 8 is fixed on the tube sheet 7, and housing 9 connects as one through flange 6 with washing section; Conical head 2 bottoms are provided with slag-drip opening 1, and its side is provided with gas feed 3, and housing 9 is provided with cooling medium outlet 12 and cooling medium inlet 13, and the top of upper cover 10 is provided with gas vent 11.
The course of work of present embodiment is: during operate as normal, the chlorosilane gas of the high temperate zone dust of being come by a last operation is got into the liquid phase space 4 of washing sections by the gas feed 3 of scrubbing tower conical head 2; In the cleaning solution of certain concentration, can the dust impurity in the chlorosilane gas that get into fully be washed; Dust impurity is deposited into scrubbing tower conical head 2 bottoms owing to gravity in cleaning solution, by slag-drip opening 1 regular deslagging; Do not get into washing section gas-phase space 5 through washing with the chlorosilane gas of dust; The chlorosilane gas of high temperature is got in the heat exchanger tube 8 of heat exchanging segment by washing section; The abundant heat exchange of cooling medium in high-temperature chlorine silane gas in the heat exchanger tube 8 and the housing 9 is cooled to uniform temperature, gets into upper cover 10, by the gas vent 11 entering subsequent processings of upper cover.

Claims (9)

1. chlorosilane scrubbing tower, it is characterized in that: comprise upper cover, heat exchanging segment, washing section and low head from top to bottom, said heat exchanging segment is connected through flange with washing section;
Said low head is provided with gas feed; Said upper cover is provided with gas vent, and said heat exchanging segment is provided with cooling medium outlet and cooling medium inlet.
2. chlorosilane scrubbing tower according to claim 1; It is characterized in that: said heat exchanging segment comprises a housing; Said enclosure interior is provided with several heat exchanger tubes; Said heat exchanger tube is fixed in tube sheet, and said cooling medium inlet is located at housing the latter half, and the casing upper half branch is located in said cooling medium outlet.
3. chlorosilane scrubbing tower according to claim 2 is characterized in that: the diameter of the cross section of said heat exchanger tube is less than its length.
4. chlorosilane scrubbing tower according to claim 2 is characterized in that: the cross section of said heat exchanger tube is for circular, perhaps polygon, and said heat exchanger tube is uniformly distributed in the said housing.
5. chlorosilane scrubbing tower according to claim 1 is characterized in that: the top of said washing section is a gas-phase space, and the below is the liquid phase space, and said liquid phase is full of cleaning solution in the space.
6. chlorosilane scrubbing tower according to claim 5 is characterized in that: said liquid phase space is provided with cleaning solution import and cleaning solution outlet.
7. chlorosilane scrubbing tower according to claim 1 is characterized in that: said low head is taper.
8. chlorosilane scrubbing tower according to claim 1 is characterized in that: said low head bottom is provided with slag-drip opening.
9. chlorosilane scrubbing tower according to claim 8 is characterized in that: said slag-drip opening is provided with weight valve.
CN2011203384185U 2011-09-09 2011-09-09 Chlorosilane washing tower Expired - Fee Related CN202398241U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011203384185U CN202398241U (en) 2011-09-09 2011-09-09 Chlorosilane washing tower

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011203384185U CN202398241U (en) 2011-09-09 2011-09-09 Chlorosilane washing tower

Publications (1)

Publication Number Publication Date
CN202398241U true CN202398241U (en) 2012-08-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN2011203384185U Expired - Fee Related CN202398241U (en) 2011-09-09 2011-09-09 Chlorosilane washing tower

Country Status (1)

Country Link
CN (1) CN202398241U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103542257A (en) * 2013-11-05 2014-01-29 昆明冶研新材料股份有限公司 Packing type chlorosilane condensing and storing device
CN109141066A (en) * 2017-06-15 2019-01-04 广州新致晟环保科技有限公司 Tail gas clean-up and heat recovery system and method for Treatment of Sludge

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103542257A (en) * 2013-11-05 2014-01-29 昆明冶研新材料股份有限公司 Packing type chlorosilane condensing and storing device
CN103542257B (en) * 2013-11-05 2016-04-06 昆明冶研新材料股份有限公司 Material filling type chlorosilane condensate storage facilities
CN109141066A (en) * 2017-06-15 2019-01-04 广州新致晟环保科技有限公司 Tail gas clean-up and heat recovery system and method for Treatment of Sludge

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Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20120829

Termination date: 20180909

CF01 Termination of patent right due to non-payment of annual fee