CN103824834A - Semiconductor device with improved package structure and manufacturing method of semiconductor device - Google Patents
Semiconductor device with improved package structure and manufacturing method of semiconductor device Download PDFInfo
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- CN103824834A CN103824834A CN201410075114.2A CN201410075114A CN103824834A CN 103824834 A CN103824834 A CN 103824834A CN 201410075114 A CN201410075114 A CN 201410075114A CN 103824834 A CN103824834 A CN 103824834A
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- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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Abstract
The invention discloses a semiconductor device with an improved package structure and a manufacturing method of the semiconductor device. The semiconductor device comprises a semiconductor chip, a lead frame and package resin. The semiconductor chip is located in a slide island area of the lead frame; the lead frame comprises pin areas, wherein the upper end of a second pin area is connected with a second bonding area. The semiconductor chip is electrically connected with the second bonding area through a metal lead. Compared with the prior art, the second bonding area is larger so that the maximum fusing current limited by the metal lead can be effectively increased and the turn-on resistance of the semiconductor device is reduced when the chip is packaged, and therefore, the actual current capability of the chip can be developed to the hilt. The semiconductor device with the improved package structure is suitable for MOSFET (Metal-Oxide-Semiconductor Field Effect Transistor) devices and IGBT (Insulated Gate Bipolar Translator) devices.
Description
Technical field
The present invention relates to semiconductor device and manufacture method thereof through encapsulation, especially a kind of power MOSFET device or IGBT device and manufacture method thereof with modified model encapsulating structure, belongs to the technical field of semiconductor device.
Background technology
Semiconductor device can finally use on PCB circuit board, conventionally will pass through chip manufacturing and chip package two parts course of processing, and therefore, the characteristic of chip self and the quality of encapsulation technology have all directly determined the performance that a device products is final.Be accompanied by the continuous lifting of chip manufacture technology integrated level and fineness, the performance of chip self has obtained significant progress, many times, encapsulation technology has become the bottleneck of the actual serviceability of limits product, and this point is especially embodied in that some are high-power, on the semiconductor power device of large electric current.
The semiconductor power device generally using at present comprises MOSFET(MOS (metal-oxide-semiconductor) memory) and IGBT(insulated gate bipolar transistor), the three-end electrode device that this two large class device is all voltage driven type, MOSFET comprises grid, source electrode and drain electrode, wherein grid and source electrode are usually located at the front of chip, and drain electrode is usually located at the back side of chip; IGBT comprises grid, emitter and collector electrode, and wherein grid and emitter are usually located at the front of chip, and collector electrode is usually located at the back side of chip.By existing traditional encapsulation process technology, MOSFET chip or igbt chip are encapsulated in or paster type encapsulation framework direct insertion into now widely used three pins, three pin electrodes of final finished device are respectively grid (G), drain electrode (D), source electrode (S) or grid (G), collector electrode (C), emitter (E), as shown in Fig. 1-a and Fig. 1-b.
Why the pin of above-mentioned MOSFET or IGBT device is to arrange according to G-D-S or G-C-E, is to be determined by the structure of existing conventional package lead frame.For MOSFET chip, to use at present comparatively widely TO-220 encapsulating lead as example, as shown in Fig. 2-a and Fig. 2-b, this lead frame comprises frame body district, slide glass Ji Daoqu and pin area, wherein slide glass Ji Dao district adheres to the platform that loads chip, and provide electricity and the passage of heat of chip to wiring board, pin area is to arrive the electric path outside encapsulation for connecting chip, pin area comprises three pins, wherein the first pin is not connected with slide glass Ji Dao district with the 3rd pin, and the second pin is connected with slide glass Ji Dao district.The back side of chip adheres to and is loaded into surface, slide glass Ji Dao district, and like this, the drain electrode that is positioned at chip back is just connected with the second pin electricity; Grid, source electrode and first pin of chip front side carries out bonding with the bonding region on the 3rd pin top by metal lead wire and is connected.The electric current that need to circulate due to grid is far smaller than the electric current that source electrode circulates, therefore, top has the first pin of less bonding region area as grid leading foot, and top has the 3rd pin of larger bonding region area as source electrode leading foot, thereby the pin that finally forms G-D-S is arranged.
Owing to being equally spaced between three pins, and the 3rd pin is positioned at side, be limited to first area of bonding region, pin top and the position of the second pin, the Area comparison on the 3rd bonding region, pin top is limited, so can be subject to larger restriction in metal lead wire quantity and the wire diameter of the 3rd bonding region, pin top surface bond, when the maximum current that allows to flow through when chip is greater than the maximum current that source metal lead-in wire allows to flow through, the bottleneck that encapsulation just becomes the performance of limits product performance and promotes.Current traditional TO-220 the 3rd bonding region, pin top can bonding aluminum steel quantity and the upper limit of wire diameter be generally the aluminum steel of 3 20mil or the aluminum steel of 4 15mil, or the aluminium strip of 1 80mil*10mil, corresponding maximum blowout current ability is approximately 120A, so, in the time that chip current ability exceedes 120A, the maximum of final packaged finished product device can be limited in 120A by electric current.The maximum of device is " Package limit " parameter in product specification by electric current.
In addition, because source metal number of leads and wire diameter that can bonding be limited, the bonding area on these metal lead wires and chip source electrode surface also can be limited so, can cause like this contact resistance of metal lead wire and chip surface to become large, thereby increase the conducting resistance of device entirety, and the MOSFET device of a larger electric current, the conducting resistance of its device itself is just very little, if introduced above-mentioned this part contact resistance, its total conducting resistance is still had a significant impact, with a groove-shaped 80V, the MOSFET of 80A is example, in the time adopting 2 20mil aluminum wire bondings, its conducting resistance is approximately 6.5m Ω, if use 4 20mil aluminum wire bondings instead, its conducting resistance can be reduced to 5.8m Ω, the range of decrease exceedes 10%.The conducting resistance of device is " Rdson " parameter in product specification.
For IGBT device, also there is similar situation.Collector electrode on grid on conventional I GBT chip the first interarea and emitter and the second interarea; The maximum current of its emitting stage can be subject to the metal lead wire quantity of corresponding the 3rd bonding region, pin top surface bond and the restriction of wire diameter, and affects the conducting resistance of device.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, a kind of semiconductor device and manufacture method thereof with modified model encapsulating structure is provided, for MOFET chip and igbt chip, on its source electrode or emitter pin, there is more large-area metal lead wire bonding region, thereby the maximum current that boost device allows, reduce the conducting resistance of device, bring into play to greatest extent chip actual current ability.
Technical scheme of the present invention is as follows:
There is a semiconductor device for modified model encapsulating structure, comprise semiconductor chip, lead frame and potting resin;
Described semiconductor chip has the first corresponding interarea and the second interarea, and three electrodes of described semiconductor chip are respectively first utmost point, second utmost point and the 3rd utmost point; On described the first interarea, be provided with first utmost point and second utmost point of semiconductor chip, on described the second interarea, be provided with the 3rd utmost point of semiconductor chip;
Described lead frame comprises the frame body district on top, the slide glass Ji Daoqu of centre and the pin area of bottom; Described pin area comprises three arranges and mutually disjunct the first pin, the second pin, the 3rd pin side by side, and described the second pin is positioned in the middle of the first pin and the 3rd pin; Described the first pin top is provided with the first bonding region, and the second pin top is provided with the second bonding region, and the area of described the second bonding region is greater than the area of the first bonding region; Described frame body district is connected with slide glass Ji Dao district, and described slide glass Ji Daoqu is connected with the 3rd pin of pin area; The second interarea of described semiconductor chip adheres to and is mounted on surface, slide glass Ji Dao district;
Between first utmost point on described semiconductor chip the first interarea and the first bonding region, be connected by metal lead wire electricity, between second utmost point on described semiconductor chip the first interarea and the second bonding region, be connected by metal lead wire electricity; The 3rd utmost point on described the second interarea is connected with the 3rd pin electricity with slide glass Ji Dao district;
Described potting resin parcel semiconductor chip, the first bonding region, the second bonding region, the 3rd pin top and metal lead wire;
For MOSFET semiconductor chip, first grid of MOSFET chip very of described semiconductor chip; Second source electrode of MOSFET chip very of described semiconductor chip; The 3rd very drain electrode of MOSFET chip of described semiconductor chip;
For IGBT semiconductor chip, first grid of igbt chip very of described semiconductor chip; Second emitter of igbt chip very of described semiconductor chip; The 3rd collector electrode of igbt chip very of described semiconductor chip.
Its further technical scheme is: the first pin in the pin area of described non-encapsulated resin parcel equates with the spacing of the 3rd pin with spacing and second pin of the second pin on same cross section.
Its further technical scheme is: the area of described the second bonding region is the more than 1.1 times of the first bonding region area, and the shape of described the second bonding region comprises by line segment or curve head and the tail and is connected in turn formed any enclosed figure with the shape of the first bonding region.
Its further technical scheme is: exchange can be exchanged in the position of described the first pin and the 3rd pin.
A manufacture method with the semiconductor device of modified model encapsulating structure, the method comprises:
A., the semiconductor chip with two relative interareas is provided, and described semiconductor chip comprises first utmost point and second utmost point being positioned on the first interarea and is positioned at the 3rd utmost point on the second interarea;
B., row lead wire framework is provided, described row lead wire framework comprises the lead frame that multiple connections arranged side by side are arranged, wherein each lead frame comprises frame body district, slide glass Ji Dao district, pin area and framework bonding pad, described frame body district, slide glass Ji Daoqu and pin area form the agent structure of single lead frame, framework bonding pad is for linking together each lead frame, described pin area comprises the first pin, the second pin and the 3rd pin, described the first pin top is provided with the first bonding region, described the second pin top is provided with the second bonding region, described the 3rd pin top is connected with corresponding slide glass Ji Dao district,
C. in the slide glass Ji Dao district of the each lead frame in described row lead wire framework, be coated with liquid silver slurry, the slide glass Ji Dao district area being covered by the coating of silver slurry is less than the area in whole slide glass Ji Dao district;
D. described semiconductor chip is pasted above the slide glass Ji Dao district that is placed on above-mentioned coated silver slurry, the second interarea of described chip contacts and is connected with silver slurry;
E. the described row lead wire framework that is pasted with chip is placed on and under low temperature nitrogen environment, carries out solidifying of silver slurry;
F. first the first bonding region surface bond metal lead wire in surface and the lead frame corresponding with it extremely on described chip the first interarea, thus first utmost point is connected with the first pin electricity; Second the second bonding region surface bond metal lead wire in surface and the lead frame corresponding with it extremely on described semiconductor chip the first interarea, thus second utmost point is connected with the second pin electricity;
G. described row lead wire framework is carried out injection moulding and sealed with potting resin, the top of semiconductor chip, metal lead wire, the first bonding region, the second bonding region and the 3rd pin above described potting resin parcel slide glass Ji Dao district;
H. the described row lead wire framework that is enclosed with potting resin is carried out to the hot setting of potting resin;
I. by the redundancy potting resin in the region of non-encapsulated resin parcel on described row lead wire framework, flash is removed;
J. the lead frame of non-encapsulated resin parcel on described row lead wire framework is electroplated, the metal material that described plating is used comprises tin;
K. each lead frame that process has been sealed in described row lead wire framework is carried out to Trim Molding, the framework bonding pad on lead frame is removed in cutting, make several device cells that are originally fastened on row lead wire framework be cut into multiple independently device cells, simultaneously, as required the first pin of each device, the second pin and the 3rd pin are bent to the shape of appointment, make its pin shape be suitable for the installation requirements of final finished device straight cutting or paster on pcb board;
L. above-mentioned each independently device cell is carried out to the test of designated parameter, and the device that meets test specification requirement is carried out to laser typewriting on its potting resin surface.
For MOSFET semiconductor chip, first grid of MOSFET chip very of described semiconductor chip; Second source electrode of MOSFET chip very of described semiconductor chip; The 3rd very drain electrode of MOSFET chip of described semiconductor chip;
For IGBT semiconductor chip, first grid of igbt chip very of described semiconductor chip; Second emitter of igbt chip very of described semiconductor chip; The 3rd collector electrode of igbt chip very of described semiconductor chip.
Its further technical scheme is: the material of described row lead wire framework comprises copper.
Its further technical scheme is: the material of described metal lead wire comprises aluminium or copper or gold.
Its further technical scheme is: the shape of described metal lead wire comprises thread or banded.
Its further technical scheme is: the shape of described pin comprises vertical unbent direct plugging-in pin or bending patch-type pin.
The technique effect that the present invention is useful is:
One, in lead frame, because the second pin is positioned at the centre of the first pin and the 3rd pin, extension can fully be expanded to its left and right sides in second bonding region on the second pin top, the area of its second bonding region is increased as much as possible, therefore, on the second bonding region, the wire diameter of the metal lead wire of institute's bonding can increase, radical can increase, make device allow the maximum blowout current passing through to increase, this process of encapsulation is eliminated the restriction of chip maximum current, made the parameter of device reach the parameter limit of chip itself.
Two, the second bonding region in structure of the present invention can bonding wire diameter larger, the more metal lead wire of radical, metal lead wire and chip contact area are increased, thereby reduce the conducting resistance of device itself, for the semiconductor device of large electric current, conducting resistance itself is just very low, the conducting resistance further reducing will account for larger proportion in the conducting resistance numerical value of itself, for the lifting meeting of the overall performance of semiconductor device clearly.
Three, in structure of the present invention in the encapsulating structure of semiconductor device, the second pin is between the first pin and the 3rd pin, under slide glass Ji Dao district, the metal lead wire that connects chip and the second pin has the shortest air line distance, can reduce like this stray inductance that metal lead wire brings and the resistance of metal lead wire, and can effectively reduce bonding source metal lead-in wire time, lead-in wire needs the angle of reversing, prevent that metal lead wire is torn and pulls apart in twist process, thereby improve stability and the reliability of bonding technology.
Accompanying drawing explanation
Fig. 1-a is MOSFET device profile and the pin electrode schematic diagram of existing traditional TO-220 encapsulating structure.
Fig. 1-b is IGBT device profile and the pin electrode schematic diagram of existing traditional TO-220 encapsulating structure.
Fig. 2-a is the single lead frame front plan view of existing traditional TO-220 encapsulating structure.
Fig. 2-b is the front plan view after the single lead frame metal lead wire bonding of existing traditional TO-220 encapsulating structure.
Fig. 3 is the MOSFET device three-dimensional perspective view of the TO-220 encapsulating structure of embodiment 1.
Fig. 4 is the MOSFET device three-dimensional perspective view of the TO-263 encapsulating structure of embodiment 2.
Fig. 5 to Figure 13 is that concrete technology step of the present invention is implemented schematic diagram, wherein:
Fig. 5 is MOSFET chip three-dimensional side view.
Fig. 6 be row lead wire framework just, back side vertical view.
Fig. 7 is the vertical view after silver coating slurry in slide glass Ji Dao district.
Fig. 8 is the vertical view after adhesion loading MOSFET chip in slide glass Ji Dao district.
Fig. 9-a is the vertical view after metal lead wire bonding in embodiment 1.
Fig. 9-b is the three-dimensional side view after metal lead wire bonding in embodiment 1.
Figure 10-a is the vertical view after metal lead wire bonding in embodiment 2.
Figure 10-b is the three-dimensional side view after metal lead wire bonding in embodiment 2.
Figure 11-a is that in embodiment 1, potting resin is sealed later three-dimensional perspective schematic side view.
Figure 11-b is that in embodiment 2, potting resin is sealed later three-dimensional perspective schematic side view.
Figure 12 is the three-dimensional perspective after MOSFET device pin Trim Molding in embodiment 1.
Figure 13 is the three-dimensional perspective after MOSFET device pin Trim Molding in embodiment 2.
Embodiment
Below in conjunction with concrete drawings and Examples, the invention will be further described.
Embodiment 1:
As shown in Figure 3, on the three-dimensional perspective of described semiconductor device, comprise MOSFET chip, TO-220 lead frame and TO-220 potting resin.Described MOSFET chip has two corresponding interareas, is respectively the first interarea and the second interarea, wherein on the first interarea, has grid and the source electrode of MOSFET chip, and source region, much larger than area of grid, has the drain electrode of MOSFET chip on the second interarea; Described TO-220 lead frame comprises the slide glass Ji Dao district at frame body district, the lead frame middle part that is positioned at lead frame top and the pin area of lead frame bottom, and three regions are connected to each other; The second interarea of described MOSFET chip adheres to and is mounted on above slide glass Ji Dao district; Described pin area comprises the first pin, the second pin and the 3rd pin, and described the second pin is positioned at the centre of the first pin and the 3rd pin; Described the first pin top is provided with the first bonding region, and described the second pin top is provided with the second bonding region, and the area of the second bonding region is much larger than the area of the first bonding region; Described the 3rd pin top is connected with slide glass Ji Dao district, and described the first pin is not connected with slide glass Ji Dao district with the second pin; Between the grid of described MOSFET chip and the first bonding region, be provided with the grid aluminium wire of 1 5mil diameter, two ends are connected with the surface bond of the first bonding region at grid respectively, thereby grid is connected with the first pin electricity; Between the source electrode of described MOSFET chip and the second bonding region, be provided with the source electrode aluminium wire of 4 20mil diameters, the two ends of source electrode aluminium wire are connected with the second bonding region surface bond at source electrode respectively, thereby source electrode is connected with the second pin electricity; The drain electrode of described MOSFET chip is connected with the 3rd pin electricity by slide glass Ji Dao district; Described potting resin covers MOSFET chip, slide glass Ji Dao district, the first bonding region, the second bonding region, the 3rd pin top, grid aluminium wire and source electrode aluminium wire parcel.
Embodiment 2:
As shown in Figure 4, on the three-dimensional perspective of described semiconductor device, comprise MOSFET chip, TO-263 lead frame and TO-263 potting resin.Described MOSFET chip has two corresponding interareas, is respectively the first interarea and the second interarea, wherein on the first interarea, has grid and the source electrode of MOSFET chip, and source region, much larger than area of grid, has the drain electrode of MOSFET chip on the second interarea; Described TO-263 lead frame comprises the slide glass Ji Dao district at frame body district, the lead frame middle part that is positioned at lead frame top and the pin area of lead frame bottom, and three regions are connected to each other; The second interarea of described MOSFET chip adheres to and is mounted on above slide glass Ji Dao district; Described pin area comprises the first pin, the second pin and the 3rd pin, and described the second pin is positioned at the centre of the first pin and the 3rd pin; Described the first pin top is provided with the first bonding region, and described the second pin top is provided with the second bonding region, and the area of the second bonding region is much larger than the area of the first bonding region; Described the 3rd pin top is connected with slide glass Ji Dao district, and described the first pin is not connected with slide glass Ji Dao district with the second pin; Between the grid of described MOSFET chip and the first bonding region, be provided with the grid aluminium wire of 1 5mil diameter, two ends are connected with the surface bond of the first bonding region at grid respectively, thereby grid is connected with the first pin electricity; Between the source electrode of described MOSFET chip and the second bonding region, be provided with the source electrode aluminium strip of 2 80mil*8mil, the two ends of source electrode aluminium strip are connected with the second bonding region surface bond at source electrode respectively, thereby by source electrode and the second pin electricity phase; The drain electrode of described MOSFET chip is connected with the 3rd pin electricity by slide glass Ji Dao district; Described potting resin covers MOSFET chip, slide glass Ji Daoqu, a bonding region, the second bonding region, the 3rd pin top, grid aluminium wire and source electrode aluminium strip parcel.
The above-mentioned MOSFET device through encapsulation, realize by following processing step:
A., the semiconductor MOS fet chip with two relative interareas is provided, and described MOSFET chip comprises grid and the source electrode being positioned on the first interarea and is positioned at the drain electrode on the second interarea, as shown in Figure 5;
B., TO-220 row lead wire framework is provided, and described row lead wire framework comprises the TO-220 lead frame that multiple connections arranged side by side are arranged, and wherein each TO-220 lead frame comprises frame body district, slide glass Ji Daoqu, pin area and framework bonding pad; Described frame body district, slide glass Ji Daoqu and pin area form the agent structure of single lead frame, and framework bonding pad is for linking together each lead frame; Described pin area comprises the first pin, the second pin and the 3rd pin, described the first pin top is provided with the first bonding region, described the second pin top is provided with the second bonding region, and described the 3rd pin top is connected with corresponding slide glass Ji Dao district, as shown in Figure 6;
In the time adopting the structure of embodiment 2, the row lead wire framework of described TO-263 is consistent with the row lead wire framework of TO-220;
C. in the slide glass Ji Dao district of the each lead frame in described TO-220 row lead wire framework, be coated with liquid silver slurry, the slide glass Ji Dao district area being covered by the coating of silver slurry is less than the area in whole slide glass Ji Dao district, as shown in Figure 7;
D. described MOSFET chip attach is placed on above the slide glass Ji Dao district of above-mentioned coated silver slurry, the second interarea of described MOSFET chip contacts and is connected with silver slurry, as shown in Figure 8;
E. the row lead wire framework of the described MOSFET of being pasted with chip is placed on and under low temperature nitrogen environment, carries out solidifying of silver slurry;
F. the grid on described MOSFET chip the first interarea and and its corresponding lead frame in the first bonding region between the grid aluminium wire of a 5mil diameter of bonding, the two ends of described grid aluminium wire respectively bonding are connected in grid and the first surface, bonding region, thereby grid is connected with the first pin electricity, simultaneously, source electrode on described MOSFET chip the first interarea and and its corresponding lead frame in the second bonding region between the source electrode aluminium wire of four 20mil diameters of bonding, the two ends of described source electrode aluminium wire respectively bonding are connected in source electrode and the second surface, bonding region, thereby source electrode is connected with the second pin electricity, as shown in Fig. 9-a and Fig. 9-b,
In the time adopting the structure of embodiment 2, source electrode on described MOSFET chip the first interarea and and its corresponding lead frame in the second bonding region between the source electrode aluminium strip of two 80mil*8mil of bonding, the two ends of described source electrode aluminium strip respectively bonding are connected in source electrode and the second surface, bonding region, thereby source electrode is connected with the second pin electricity, as shown in Figure 10-a and Figure 10-b;
G. described TO-220 row lead wire framework is carried out injection moulding and sealed with potting resin, the top portion of MOSFET chip, grid aluminium wire, source electrode aluminium wire/the first bonding region, the second bonding region and the 3rd pin above described potting resin parcel slide glass Ji Dao district, as shown in Figure 11-a and Figure 11-b;
H. the described TO-220 row lead wire framework that is enclosed with potting resin is carried out to the hot setting of potting resin;
I. by the redundancy potting resin in the region of non-encapsulated resin parcel on described TO-220 row lead wire framework, flash is removed;
J. the lead frame of non-encapsulated resin parcel on described TO-220 row lead wire framework is electroplated, the electroplating metal material using comprises tin;
K. each lead frame that process has been sealed in described TO-220 row lead wire framework is carried out to Trim Molding, the framework bonding pad on lead frame is removed in cutting, make several device cells that are originally fastened on row lead wire framework be cut into multiple independently TO-220 device cells, as shown in Figure 12 and Fig. 3;
In the time adopting the structure of embodiment 2, the framework bonding pad on lead frame is removed in cutting, make several device cells that are originally fastened on row lead wire framework be cut into multiple independently TO-263 device cells, simultaneously, this tagma of part frame is removed in cutting, and by three pin cutting bend fixings, make it meet the requirement that paster is installed on pcb board of final finished device, as shown in Figure 13 and Fig. 4;
L. above-mentioned each independently device cell is carried out to the test of designated parameter, and the device that meets test specification requirement is carried out to laser typewriting on its potting resin surface.
The present invention is the semiconductor device with modified model encapsulating structure, for MOSFET device, the source electrode connection of MOSFET device is positioned at the second pin in the middle of three pins, the first pin that connects grid is positioned at both sides with the 3rd pin that is connected drain electrode, because gate drive current is conventionally very little compared to source current, gate metal lead-in wire is generally 1 aluminium wire that 5mil is thick, therefore the first bonding region area on the first top, pin area does not need very large, be positioned at avris because connect the 3rd pin in slide glass Ji Dao district again, so being positioned at second bonding region on the second pin top can be fully extending transversely to its both sides, as much as possible by the enlarged areas of the second bonding region, like this, wire diameter and the radical of source metal lead-in wire that can bonding above the second bonding region just can promote effectively, thereby allow the maximum current and the blowout current that flow through source metal lead-in wire significantly to increase MOSFET device.As shown in Fig. 2-a and Fig. 2-b, compared to original avris that MOSFET device source lead is arranged on to three pins, the second bonding region area change for bonding source metal lead-in wire in structure of the present invention exceedes 40%, the aluminium wire of 20mil wire diameter can be promoted to by 3 of original maximum bondings can bonding 5, the aluminium strip of 80mil*8mil can be promoted to by 1 of original maximum bonding can bonding 2, and the maximum blowout current amplification of MOSFET device exceedes 50%.
For the MOSFET device of large electric current, conventionally its chip area is enough large, chip surface is also enough large for the source region of bonding source metal lead-in wire, structure of the present invention has solved the bottleneck of bonding source metal lead-in wire on bonding region, lead frame pin top, therefore, also can bonding in chip surface source region the source metal lead-in wire of more, can effectively reduce like this contact resistance of source metal lead-in wire and chip, and for the MOSFET device of large electric current, the total break-over of device resistance of this part contact resistance accounting is relatively high, so device architecture of the present invention can reduce the total conducting resistance of device effectively, the current characteristics of boost device, reduce the temperature rise in device use procedure.
In structure of the present invention source metal lead-in wire from chip surface vertically downward bonding be connected to second bonding region on the second pin top, and do not need to be connected to as the certain angle bonding that will tilt in original structure the bonding region, pin top of avris, reduce so on the one hand the length of metal lead wire, reduce the stray inductance of lead-in wire, the Splitting that also very big degree has avoided metal lead wire to cause because corner is excessive in bonding process on the other hand, has promoted the reliability and stability that encapsulate bonding technology.
Above-described is only the preferred embodiment of the present invention, the invention is not restricted to above embodiment.Be appreciated that the oher improvements and changes that those skilled in the art directly derive or associate without departing from the spirit and concept in the present invention, within all should thinking and being included in protection scope of the present invention.
Claims (9)
1. a semiconductor device with modified model encapsulating structure, is characterized in that: comprise semiconductor chip, lead frame and potting resin;
Described semiconductor chip has the first corresponding interarea and the second interarea, and three electrodes of described semiconductor chip are respectively first utmost point, second utmost point and the 3rd utmost point; On described the first interarea, be provided with first utmost point and second utmost point of semiconductor chip, on described the second interarea, be provided with the 3rd utmost point of semiconductor chip;
Described lead frame comprises the frame body district on top, the slide glass Ji Daoqu of centre and the pin area of bottom; Described pin area comprises three arranges and mutually disjunct the first pin, the second pin, the 3rd pin side by side, and described the second pin is positioned in the middle of the first pin and the 3rd pin; Described the first pin top is provided with the first bonding region, and the second pin top is provided with the second bonding region, and the area of described the second bonding region is greater than the area of the first bonding region; Described frame body district is connected with slide glass Ji Dao district, and described slide glass Ji Daoqu is connected with the 3rd pin of pin area; The second interarea of described semiconductor chip adheres to and is mounted on surface, slide glass Ji Dao district;
Between first utmost point on described semiconductor chip the first interarea and the first bonding region, be connected by metal lead wire electricity, between second utmost point on described semiconductor chip the first interarea and the second bonding region, be connected by metal lead wire electricity; The 3rd utmost point on described the second interarea is connected with the 3rd pin electricity with slide glass Ji Dao district;
Described potting resin parcel semiconductor chip, the first bonding region, the second bonding region, the 3rd pin top and metal lead wire;
For MOSFET semiconductor chip, first grid of MOSFET chip very of described semiconductor chip; Second source electrode of MOSFET chip very of described semiconductor chip; The 3rd very drain electrode of MOSFET chip of described semiconductor chip;
For IGBT semiconductor chip, first grid of igbt chip very of described semiconductor chip; Second emitter of igbt chip very of described semiconductor chip; The 3rd collector electrode of igbt chip very of described semiconductor chip.
2. the semiconductor device according to claim 1 with modified model encapsulating structure, is characterized in that: the first pin in the pin area of described non-encapsulated resin parcel equates with the spacing of the 3rd pin with spacing and second pin of the second pin on same cross section.
3. there is according to claim 1 the semiconductor device of modified model encapsulating structure, it is characterized in that: the area of described the second bonding region is the more than 1.1 times of the first bonding region area, the shape of described the second bonding region comprises by line segment or curve head and the tail and is connected in turn formed any enclosed figure with the shape of the first bonding region.
4. the semiconductor device according to claim 1 with modified model encapsulating structure, is characterized in that: exchange can be exchanged in the position of described the first pin and the 3rd pin.
5. a manufacture method with the semiconductor device of modified model encapsulating structure, is characterized in that: the method comprises:
A., the semiconductor chip with two relative interareas is provided, and described semiconductor chip comprises first utmost point and second utmost point being positioned on the first interarea and is positioned at the 3rd utmost point on the second interarea;
B., row lead wire framework is provided, described row lead wire framework comprises the lead frame that multiple connections arranged side by side are arranged, wherein each lead frame comprises frame body district, slide glass Ji Dao district, pin area and framework bonding pad, described frame body district, slide glass Ji Daoqu and pin area form the agent structure of single lead frame, framework bonding pad is for linking together each lead frame, described pin area comprises the first pin, the second pin and the 3rd pin, described the first pin top is provided with the first bonding region, described the second pin top is provided with the second bonding region, described the 3rd pin top is connected with corresponding slide glass Ji Dao district,
C. in the slide glass Ji Dao district of the each lead frame in described row lead wire framework, be coated with liquid silver slurry, the slide glass Ji Dao district area being covered by the coating of silver slurry is less than the area in whole slide glass Ji Dao district;
D. described semiconductor chip is pasted above the slide glass Ji Dao district that is placed on above-mentioned coated silver slurry, the second interarea of described chip contacts and is connected with silver slurry;
E. the described row lead wire framework that is pasted with chip is placed on and under low temperature nitrogen environment, carries out solidifying of silver slurry;
F. first the first bonding region surface bond metal lead wire in surface and the lead frame corresponding with it extremely on described chip the first interarea, thus first utmost point is connected with the first pin electricity; Second the second bonding region surface bond metal lead wire in surface and the lead frame corresponding with it extremely on described semiconductor chip the first interarea, thus second utmost point is connected with the second pin electricity;
G. described row lead wire framework is carried out injection moulding and sealed with potting resin, the top of semiconductor chip, metal lead wire, the first bonding region, the second bonding region and the 3rd pin above described potting resin parcel slide glass Ji Dao district;
H. the described row lead wire framework that is enclosed with potting resin is carried out to the hot setting of potting resin;
I. by the redundancy potting resin in the region of non-encapsulated resin parcel on described row lead wire framework, flash is removed;
J. the lead frame of non-encapsulated resin parcel on described row lead wire framework is electroplated, the metal material that described plating is used comprises tin;
K. each lead frame that process has been sealed in described row lead wire framework is carried out to Trim Molding, the framework bonding pad on lead frame is removed in cutting, make several device cells that are originally fastened on row lead wire framework be cut into multiple independently device cells, simultaneously, as required the first pin of each device, the second pin and the 3rd pin are bent to the shape of appointment, make its pin shape be suitable for the installation requirements of final finished device straight cutting or paster on pcb board;
L. above-mentioned each independently device cell is carried out to the test of designated parameter, and the device that meets test specification requirement is carried out to laser typewriting on its potting resin surface.
For MOSFET semiconductor chip, first grid of MOSFET chip very of described semiconductor chip; Second source electrode of MOSFET chip very of described semiconductor chip; The 3rd very drain electrode of MOSFET chip of described semiconductor chip;
For IGBT semiconductor chip, first grid of igbt chip very of described semiconductor chip; Second emitter of igbt chip very of described semiconductor chip; The 3rd collector electrode of igbt chip very of described semiconductor chip.
6. the manufacture method according to claim 5 with the semiconductor device of modified model encapsulating structure, is characterized in that: the material of described row lead wire framework comprises copper.
7. the manufacture method according to claim 5 with the semiconductor device of modified model encapsulating structure, is characterized in that: the material of described metal lead wire comprises aluminium or copper or gold.
8. the manufacture method according to claim 5 with the semiconductor device of modified model encapsulating structure, is characterized in that: the shape of described metal lead wire comprises thread or banded.
9. the manufacture method according to claim 5 with the semiconductor device of modified model encapsulating structure, is characterized in that: the shape of described pin comprises vertical unbent direct plugging-in pin or bending patch-type pin.
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Effective date of registration: 20190910 Address after: 214028 South of R&D Second Road and East of R&D First Road in Xinwu District, Wuxi City, Jiangsu Province Patentee after: Wuxi Electric-based Integrated Technology Co., Ltd. Address before: 214131, No. 2, building B1, No. 999 High East Road, Binhu District, Jiangsu, Wuxi Patentee before: Wuxi NCE Power Co., Ltd. |