CN103823234B - Pulse charged particle beam detector - Google Patents
Pulse charged particle beam detector Download PDFInfo
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- CN103823234B CN103823234B CN201410088372.4A CN201410088372A CN103823234B CN 103823234 B CN103823234 B CN 103823234B CN 201410088372 A CN201410088372 A CN 201410088372A CN 103823234 B CN103823234 B CN 103823234B
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Abstract
The invention provides a pulse charged particle beam detector which is provided with a detection plate for dividing a pulse charged particle beam into a plurality of non-adjacent region units, wherein an array consisting of a plurality of charged particle collection units is arranged on the detection plate and is used for collecting charges of the pulse charged particle beam in each corresponding region unit, converting the charges into pulse signals and outputting the pulse signals to a signal acquisition system; an electric field is formed in the detection plate and is used for preventing secondary electrons from overflowing from the detection plate. According to the pulse charged particle beam detector, the structure is compact, the crosstalk between the pulse signals is small, the influence of the secondary electrons is eliminated, the profile and the change process of the pulse charged particle beam can be detected, and the space distribution situation and the time evolution process of the beam current density of the pulse charged particle beam can be accurately detected.
Description
Technical field
The invention belongs to particle beam field of measuring technique, and in particular to a kind of pulse charged particle beam detector, can be used for
The detection of pulse charged particle beam current density contours.
Background technology
Pulse charged particle beam can be divided into pulsed electron beam and pulsed ionizing beam, and pulse charged particle beam changes in material surface
It is widely applied in property, nuclear physics and the field such as nuclear technology, plasma physics, Aero-Space.Pulse charged particle beam
The measurement of current density contours seems extremely important in many applications, in prior art, for charged particle beam beam current density
The measurement of distribution typically adopts mechanical scanning, becomes color chips method, scintillator photoelectric method, array of plate electrodes etc..Mechanical scanning
It is not suitable for the measurement compared with fast pulse charged particle beam current density contours；Although it is directly perceived to become color chips method, no time resolution, no
It is applied to the measurement of pulse charged particle beam current density contours；Scintillator photoelectric method has time resolution, but pulse charged ion
The temperature-rise effect that bundle and scintillator interact will cause the non-linear of measurement, and different ions species causes the response of scintillator to exist
, there is luminescent saturation problem in difference；Array of plate electrodes time response is fast, but do not exclude secondary electron interference it is impossible to
Go out exact value.
Content of the invention
For existing charged particle beam measurement apparatus can not be quantitative provide pulse charged particle beam current density contours
Deficiency, the present invention provides a kind of pulse charged particle beam detector.
The pulse charged particle beam detector of the present invention, is characterized in, described detector includes detecting plate, is used for external letter
The signal-transmitting cable of number acquisition system, the bias cable for external grid bias power supply, external conductive casing；Described detecting plate, signal
Transmission cable, bias cable be fixedly connected with external conductive casing respectively, described signal-transmitting cable, bias cable respectively with detecting plate
It is fixedly connected, detecting plate is provided with sampling plate, insulation board I, bias layer, insulation board II, charged particle collecting layer, described sampling
Plate, insulation board I, bias layer, insulation board II, charged particle collecting layer are fixedly connected sequentially；Sampling plate on described detecting plate will
Pulse charged particle beam to be measured is divided into multiple non-conterminous territory elements, detecting plate is provided with one by multiple charged particles
The array that collector unit is constituted, for collecting the quantity of electric charge of pulse charged particle beam in corresponding each territory element, charged particle is received
The quantity of electric charge is converted to pulse signal and exports to signal acquiring system by collection unit, and described pulse signal is used for calculating pulse powered
The current density contours of particle beam；The described bias external grid bias power supply of cable, makes to form an electric field in detecting plate, described
Electric field is used for stoping the secondary electron that charged particle beam is produced with the effect of detecting plate inner surface from overflowing detecting plate, excludes secondary electron
Interference to measurement.
Sampling through hole is provided with described sampling plate, the quantity of sampling through hole is more than one, multiple sampling through holes constitute one
The individual hole array that part charged particle beam can be made to pass through.
Insulated vias I are provided with described insulation board I, the quantity of insulated vias I is identical with the quantity of sampling through hole, multiple
Insulated vias I constitute one with multiple sample the corresponding hole arrays of through hole.
Described bias layer includes plate bias voltage, insulation frame；Biasing through hole, the quantity of biasing through hole are provided with described plate bias voltage
Identical with the quantity of sampling through hole, multiple biasing through hole constitute one with multiple corresponding hole arrays of through hole of sampling, described insulation
One through hole that can accommodate plate bias voltage is provided with frame, plate bias voltage is fixedly connected in the through hole of insulation frame.
Insulated vias II and bias cable headspace I, the number of described insulated vias II are provided with described insulation board II
Amount is identical with the quantity of sampling through hole, multiple insulated vias II constitute one with multiple corresponding hole arrays of through hole of sampling.
Described charged particle collecting layer includes electrically-conductive backing plate, charged particle collector unit；It is provided with described electrically-conductive backing plate
Collector unit placement hole, bias cable headspace II, the quantity of collector unit placement hole is identical with the quantity of sampling through hole, many
Individual collector unit placement hole constitute one with multiple corresponding hole arrays of through hole of sampling, the position of described bias cable headspace II
Put corresponding with the position biasing cable headspace I；Described charged particle collector unit includes insulating cylinder, charged particle is collected
Cylinder, signal conversion element, insulating cylinder is provided with a through hole that can accommodate charged particle surge drum, and charged particle surge drum is fixed
It is connected in the through hole of insulating cylinder, be provided with a cavity, one end open in charged particle surge drum, the other end is closed, powered
Particle collection cylinder is electric conductor, and for collecting the quantity of electric charge entrained by charged particle, signal conversion element is provided with two connections
Port, one end is fixedly connected conducting with the blind end of charged particle surge drum, and the other end is fixedly connected conducting with electrically-conductive backing plate；Institute
The quantity stating charged particle collector unit is identical with the quantity of collector unit placement hole, and charged particle collector unit is fixedly connected on
Collector unit disposes in the hole.
Described sampling through hole, insulated vias I, biasing through hole, insulated vias II are bellmouth, and small end is outwardly；Insulation is logical
The end diameter in hole I is more than the outside diameter of sampling through hole, and the end diameter of biasing through hole is straight more than the big end of insulated vias I
Footpath, the end diameter of insulated vias II is more than the outside diameter of biasing through hole, and the outside diameter of described insulated vias II is less than band
The opening inside diameter of charged particle surge drum.
Described signal-transmitting cable is disposed with signal-transmitting cable inner wire, signal-transmitting cable insulation from inside to outside
Layer, signal-transmitting cable screen layer, signal-transmitting cable outer jacket, in the signal-transmitting cable of described signal-transmitting cable one end
Conductor is fixedly connected conducting, the other end outer signal acquisition system of transmission cable with charged particle surge drum, and described signal passes
The quantity of transmission cable is identical with the quantity of charged particle collector unit.
Described bias cable is disposed with bias cable inner conductor, bias cable insulation, bias cable from inside to outside
Screen layer, bias protective coverings of cable, the bias cable insulation of described bias cable one end is fixedly connected with insulation board II, bias
Cable insulation passes from bias cable headspace I, bias cable headspace II, and bias cable inner conductor is solid with plate bias voltage
The fixed external grid bias power supply of the other end connecting conducting, biasing cable.
Described detecting plate is arranged in external conductive casing, and signal-transmitting cable, bias cable pass through the logical of external conductive casing respectively
Hole passes, and external conductive casing is fixedly connected and leads with sampling plate, electrically-conductive backing plate, signal-transmitting cable screen layer, bias cable shield
Logical, external conductive casing is electrically insulated with plate bias voltage.
Electrically-conductive backing plate in the pulse charged particle beam detector of the present invention adopts conductive material to make, and electrically-conductive backing plate has
Excellent electric conductivity and heat dispersion, can play the effect of large area ground wire, reduce inductance between pulse signal, electric capacity and
Crosstalk etc., there is provided excellent electrical property, the residue in addition to detecting plate, signal-transmitting cable, bias cable in external conductive casing
Space can realize high-density packages by the way of solid embedding, and the quantity of sampling through hole on sampling plate and array layout can enter
Row adjustment, to meet different test requests.
It is an advantage of the invention that：Compact conformation, between each pulse signal, crosstalk is little, and internal electric field eliminates the shadow of secondary electron
Ring, the profile of pulse charged particle beam and its change procedure can be detected moreover it is possible to accurately detect pulse charged particle beam bundle
The space distribution situation of current density and time-evolution process.
Brief description
Fig. 1 is a kind of axle side partial sectional view of pulse charged particle beam detector of the present invention；
Fig. 2 is a kind of partial sectional view of pulse charged particle beam detector of the present invention；
Fig. 3 is the blast partial sectional view of the detecting plate in the present invention；
In figure：1. detecting plate 11. sampling plate 11a. sampling through hole 12. insulation board I 12a. insulated vias I 13. bias
Layer 131. plate bias voltage 131a. biasing through hole 132. insulation frame 14. insulation board, II 14a. insulated vias II 14b. bias plasma
Cable headspace I 15. charged particle collecting layer 151. electrically-conductive backing plate 151a. collector unit placement hole 151b. biases cable
Headspace II 152. charged particle collector unit, 1521. insulating cylinder, 1522. charged particle surge drum 1523. signal is changed
Element 2. signal-transmitting cable, 21. signal-transmitting cable inner wire, 22. signal-transmitting cable insulating barrier 23. signal transmission electricity
Cable screen layer 24. signal-transmitting cable outer jacket 3. bias cable 31. bias cable inner conductor 32. bias cable insulation
33. bias cable shield 34. bias protective coverings of cable 4. external conductive casings.
Specific embodiment
The present invention is described in detail below in conjunction with the accompanying drawings.
Embodiment 1
Fig. 1 is that a kind of axle of present invention pulse charged particle beam detector surveys partial sectional view, and Fig. 2 is a kind of arteries and veins of the present invention
Rush the partial sectional view of charged particle beam detector, Fig. 3 is the blast partial sectional view of the detecting plate 1 in the present invention, Fig. 1～
In Fig. 3, the detector of the present invention include detecting plate 1, the signal-transmitting cable 2 for outer signal acquisition system, for external
The bias cable 3 of grid bias power supply, external conductive casing 4；Described detecting plate 1, signal-transmitting cable 2, bias cable 3 respectively with conduction outside
Shell 4 is fixedly connected, and described signal-transmitting cable 2, bias cable 3 are fixedly connected with detecting plate 1 respectively, and detecting plate 1 is provided with
Sampling plate 11, insulation board I 12, bias layer 13, insulation board II 14, charged particle collecting layer 15, described sampling plate 11, insulation board I
12nd, bias layer 13, insulation board II 14, charged particle collecting layer 15 are fixedly connected sequentially；Sampling plate 22 on described detecting plate 1 will
Pulse charged particle beam to be measured is divided into multiple non-conterminous territory elements, detecting plate 1 is provided with one by multiple band electrochondrias
The array that sub- collector unit is constituted, for collecting the quantity of electric charge of pulse charged particle beam in corresponding each territory element, charged particle
The quantity of electric charge is converted to pulse signal and exports to signal acquiring system by collector unit, and described pulse signal is used for calculating pulse band
The current density contours of electrochondria beamlet；The described bias external grid bias power supply of cable 3, makes to form an electric field, institute in detecting plate 1
The electric field stated is used for stoping the secondary electron that charged particle beam is produced with the effect of detecting plate 1 inner surface from overflowing detecting plate 1, exclusion time
The interference to measurement for the level electronics.
Sampling through hole 11a is provided with described sampling plate 11, the quantity of sampling through hole 11a is more than one, and multiple samplings are logical
Hole constitutes a hole array that part charged particle beam can be made to pass through.
Insulated vias I 12a, the number of the quantity of insulated vias I 12a and sampling through hole 11a are provided with described insulation board I 12
Amount is identical, multiple insulated vias I constitute one with multiple corresponding hole arrays of through hole of sampling.
Described bias layer 13 includes plate bias voltage 131, insulation frame 132；It is provided with biasing through hole on described plate bias voltage 131
131a, the quantity of biasing through hole 131a is identical with the quantity of sampling through hole 11a, and multiple biasing through hole constitute one and multiple samplings
The corresponding hole array of through hole, described insulation frame 132 is provided with a through hole that can accommodate plate bias voltage 131, and plate bias voltage 131 is solid
Surely it is connected in the through hole of insulation frame 132.
Insulated vias II 14a and bias cable headspace I 14b is provided with described insulation board II 14, described insulation is led to
The quantity of hole II 14a is identical with the quantity of sampling through hole 11a, multiple insulated vias II constitute one corresponding with multiple through holes of sampling
Hole array.
Described charged particle collecting layer 15 includes electrically-conductive backing plate 151, charged particle collector unit 152；Described electrically-conductive backing plate
It is provided with collector unit placement hole 151a, bias cable headspace II 151b, the quantity of collector unit placement hole 151a on 151
Identical with the quantity of sampling through hole 11a, multiple collector unit placement holes constitute one with multiple corresponding hole arrays of through hole of sampling,
The position of described bias cable headspace II 151b is corresponding with the position of bias cable headspace I 14b；Described charged particle
Collector unit 152 includes insulating cylinder 1521, charged particle surge drum 1522, signal conversion element 1523, and insulating cylinder 1521 is arranged
There is a through hole that can accommodate charged particle surge drum 1522, charged particle surge drum 1522 is fixedly connected on insulating cylinder 1521
In through hole, it is provided with a cavity, one end open in charged particle surge drum 1522, the other end is closed, charged particle surge drum
1522 is electric conductor, and for collecting the quantity of electric charge entrained by charged particle, signal conversion element 1523 is provided with two connection ends
Mouthful, one end is fixedly connected conducting with the blind end of charged particle surge drum 1522, and the other end is fixedly connected with electrically-conductive backing plate 151 and leads
Logical；The quantity of described charged particle collector unit 152 is identical with the quantity of collector unit placement hole 151a, and charged particle is collected single
Unit 152 is fixedly connected in collector unit placement hole 151a.
Described sampling through hole 11a, insulated vias I 12a, biasing through hole 131a, insulated vias II 14a are bellmouth, little
End is outwardly；The end diameter of insulated vias I 12a is more than the outside diameter of sampling through hole 11a, the end diameter of biasing through hole 131a
More than the outside diameter of insulated vias I 12a, the end diameter of insulated vias II 14a is more than the outside diameter of biasing through hole 131a,
The outside diameter of described insulated vias II 14a is less than the opening inside diameter of charged particle surge drum 1522.
Described signal-transmitting cable 2 is disposed with signal-transmitting cable inner wire 21, signal-transmitting cable from inside to outside
Insulating barrier 22, signal-transmitting cable screen layer 23, signal-transmitting cable outer jacket 24, the letter of described signal-transmitting cable 2 one end
Number transmission cable inner wire 21 is fixedly connected conducting, the other end outer signal of transmission cable 2 with charged particle surge drum 1522
Acquisition system, the quantity of described signal-transmitting cable 2 is identical with the quantity of charged particle collector unit 152.
Described bias cable 3 is disposed with bias cable inner conductor 31, bias cable insulation 32, bias from inside to outside
Cable shield 33, bias protective coverings of cable 34, the bias cable insulation 32 of described bias cable 3 one end and insulation board II 14
It is fixedly connected, bias cable insulation 32 passes from bias cable headspace I 14b, bias cable headspace II 151b, partially
Voltage cable inner wire 31 is fixedly connected conducting, the external grid bias power supply of the other end of bias cable 3 with plate bias voltage 131.
Described detecting plate 1 is arranged in external conductive casing 4, and signal-transmitting cable 2, bias cable 3 pass through external conductive casing 4 respectively
Through hole pass, external conductive casing 4 and sampling plate 11, electrically-conductive backing plate 151, signal-transmitting cable screen layer 23, bias cable shield
Layer 33 is fixedly connected conducting, and external conductive casing 4 is electrically insulated with plate bias voltage 131.
As shown in Fig. 1 ~ Fig. 3, in the present embodiment, electrically-conductive backing plate 151 is made using aluminum；Insulation board II 14, insulation
Cylinder 1521, insulation frame 132 are all made using aluminium oxide, and charged particle surge drum 1522, plate bias voltage 131 are all made of copper, and adopt
Model 11 is made using graphite.
Described sampling number of openings is 25, and sampling through hole 11a is one of, and insulated vias I 12a is multiple insulation
One of through hole I, biasing through hole 131a is one of multiple biasing through hole, and insulated vias II 14a is multiple insulated vias
One of II, the hole arrays that multiple sampling through holes are constituted are square, and signal conversion element 1523 is noninductive resistance, arteries and veins to be measured
Rushing charged particle beam is argon ion（Ar+）Bundle, external conductive casing 4 is grounded, the grid bias power supply of the bias external -1kV of cable 3, is detecting
Form an electric field in plate 1.
The operation principle of the present invention is, when pulse charged particle beam from along sampling plate 11 incident when, sampling plate 11 is by arteries and veins
Rush charged particle beam and be divided into multiple non-conterminous territory elements, the pulse charged particle beam in each territory element sequentially passes through sampling
Through hole 11a, insulated vias I 12a, biasing through hole 131a and insulated vias II 14a reach charged particle surge drum 1522, pulse band
The secondary electron that electrochondria beamlet is produced with charged particle surge drum 1522 inwall is suppressed by electric field, and by charged particle surge drum
1522 absorptions, the electric charge of pulse charged particle beam is collected by charged particle surge drum 1522, and signal conversion element 1523 will be powered
The charge signal that particle collection cylinder 1522 is collected is converted to pulse voltage signal, and pulse voltage signal passes through signal-transmitting cable 2
Export to signal acquiring system, the transmission area of the pulse voltage signal in each territory element and sampling through hole 11a can calculate
The beam current density of pulse charged particle beam in this territory element, in conjunction with the locus of sampling through hole 11a, can be obtained by interpolation
The current density contours of pulse charged particle beam and its change procedure in whole sampling via-hole array envelope region.
The pulse charged particle beam panel detector structure of the present invention is compact, and between each pulse signal, crosstalk is little, and internal electric field is excluded
The impact of secondary electron, can detect the profile of pulse charged particle beam and its change procedure moreover it is possible to accurately detect arteries and veins
Rush space distribution situation and the time-evolution process of charged particle beam beam current density.
Embodiment 2
The present embodiment is identical with the structure of embodiment 1, is a difference in that, described sampling number of openings is 256, powered
Particle collection cylinder, plate bias voltage are all made using graphite.
Embodiment 3
The present embodiment is identical with the structure of embodiment 1, is a difference in that, described sampling number of openings is 50, multiple
The hole array that sampling through hole is constituted is circle.
Above-described embodiment is only some embodiments of the present invention, in order to be better understood upon the present invention, Ke Yigai
The quantity of Variable sampling through hole and hole array layout, and accordingly change insulated vias I, biasing through hole, insulated vias II, collector unit
Placement hole, charged particle collector unit, the quantity of signal-transmitting cable and array layout can obtain other embodiment.
Claims (8)
1. a kind of pulse charged particle beam detector it is characterised in that：Described detector includes detecting plate（1）, be used for external letter
The signal-transmitting cable of number acquisition system（2）, for external grid bias power supply bias cable（3）, external conductive casing（4）；Described spy
Drafting board（1）, signal-transmitting cable（2）, bias cable（3）Respectively with external conductive casing（4）It is fixedly connected, described signal-transmitting cable
（2）, bias cable（3）Respectively with detecting plate（1）It is fixedly connected, detecting plate（1）On be provided with sampling plate（11）, insulation board I
（12）, bias layer（13）, insulation board II（14）, charged particle collecting layer（15）, described sampling plate（11）On to be provided with sampling logical
Hole（11a）, described insulation board II（14）On be provided with insulated vias II（14a）With bias cable headspace I（14b）；Described
Sampling plate（11）, insulation board I（12）, bias layer（13）, insulation board II（14）, charged particle collecting layer（15）The company of fixation successively
Connect；Described detecting plate（1）On sampling plate（11）Pulse charged particle beam to be measured is divided into multiple non-conterminous territory elements,
Detecting plate（1）On be provided with an array being made up of multiple charged particle collector units, for collecting corresponding each territory element
The quantity of electric charge of middle pulse charged particle beam, the quantity of electric charge is converted to pulse signal and exports to signals collecting by charged particle collector unit
System, described pulse signal is used for calculating the current density contours of pulse charged particle beam；Described bias cable（3）External inclined
Voltage source, makes detecting plate（1）One electric field of interior formation, described electric field is used for stoping charged particle beam and detecting plate（1）Interior table
The secondary electron that face effect produces overflows detecting plate（1）, the interference to measurement for the exclusion secondary electron；
Described charged particle collecting layer（15）Including electrically-conductive backing plate（151）, charged particle collector unit（152）；Described conductive base
Plate（151）On be provided with collector unit placement hole（151a）, bias cable headspace II（151b）, collector unit placement hole
（151a）Quantity with sampling through hole（11a）Quantity identical, multiple collector unit placement holes constitute one logical with multiple samplings
The corresponding hole array in hole, described bias cable headspace II（151b）Position with bias cable headspace I（14b）Position
Put correspondence；Described charged particle collector unit（152）Including insulating cylinder（1521）, charged particle surge drum（1522）, signal turns
Change element（1523）, insulating cylinder（1521）It is provided with one and can accommodate charged particle surge drum（1522）Through hole, charged particle
Surge drum（1522）It is fixedly connected on insulating cylinder（1521）Through hole in, charged particle surge drum（1522）Inside it is provided with a sky
Chamber, one end open, the other end is closed, charged particle surge drum（1522）For electric conductor, for collecting entrained by charged particle
The quantity of electric charge, signal conversion element（1523）It is provided with two connectivity ports, one end and charged particle surge drum（1522）Closing
End is fixedly connected conducting, the other end and electrically-conductive backing plate（151）It is fixedly connected conducting；Described charged particle collector unit（152）'s
Quantity and collector unit placement hole（151a）Quantity identical, charged particle collector unit（152）It is fixedly connected on collector unit
Placement hole（151a）Interior.
2. pulse charged particle beam detector according to claim 1 it is characterised in that：Described sampling plate（11）Upper setting
Sampling through hole（11a）Quantity more than one, multiple sampling through holes constitute the holes that part charged particle beam can be made to pass through
Array.
3. pulse charged particle beam detector according to claim 2 it is characterised in that：Described insulation board I（12）On set
It is equipped with insulated vias I（12a）, insulated vias I（12a）Quantity with sampling through hole（11a）Quantity identical, multiple insulated vias
I composition one and multiple sampling corresponding hole arrays of through hole.
4. pulse charged particle beam detector according to claim 2 it is characterised in that：Described bias layer（13）Including partially
Pressing plate（131）, insulation frame（132）；Described plate bias voltage（131）On be provided with biasing through hole（131a）, biasing through hole（131a）'s
Quantity and sampling through hole（11a）Quantity identical, multiple biasing through hole constitute one with multiple corresponding hole arrays of through hole of sampling,
Described insulation frame（132）On be provided with one and can accommodate plate bias voltage（131）Through hole, plate bias voltage（131）It is fixedly connected on absolutely
Edge frame（132）Through hole in.
5. pulse charged particle beam detector according to claim 2 it is characterised in that：Described insulated vias II（14a）
Quantity with sampling through hole（11a）Quantity identical, multiple insulated vias II constitute one with multiple corresponding holes of through hole of sampling
Array.
6. pulse charged particle beam detector according to claim 1 it is characterised in that：Described signal-transmitting cable（2）
It is disposed with signal-transmitting cable inner wire from inside to outside（21）, signal-transmitting cable insulating barrier（22）, signal-transmitting cable
Screen layer（23）, signal-transmitting cable outer jacket（24）, described signal-transmitting cable（2）The signal-transmitting cable inner wire of one end
（21）With charged particle surge drum（1522）It is fixedly connected conducting, signal-transmitting cable（2）The other end outer signal collection system
System, described signal-transmitting cable（2）Quantity and charged particle collector unit（152）Quantity identical.
7. pulse charged particle beam detector according to claim 4 it is characterised in that：Described bias cable（3）From interior
It is disposed with bias cable inner conductor to outward（31）, bias cable insulation（32）, bias cable shield（33）, bias plasma
Cable outer jacket（34）, described bias cable（3）The bias cable insulation of one end（32）With insulation board II（14）It is fixedly connected, partially
Voltage cable insulating barrier（32）From bias cable headspace I（14b）, bias cable headspace II（151b）Pass, bias plasma
Cable inner wire（31）With plate bias voltage（131）It is fixedly connected conducting, bias cable（3）The external grid bias power supply of the other end.
8. pulse charged particle beam detector according to claim 4 it is characterised in that：Described detecting plate（1）It is arranged at
External conductive casing（4）Interior, signal-transmitting cable（2）, bias cable（3）Pass through external conductive casing respectively（4）Through hole pass, conductive outer
Shell（4）With sampling plate（11）, electrically-conductive backing plate（151）, signal-transmitting cable screen layer（23）It is fixedly connected conducting, external conductive casing
（4）With plate bias voltage（131）Electric insulation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410088372.4A CN103823234B (en) | 2014-03-12 | 2014-03-12 | Pulse charged particle beam detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410088372.4A CN103823234B (en) | 2014-03-12 | 2014-03-12 | Pulse charged particle beam detector |
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| CN103823234A CN103823234A (en) | 2014-05-28 |
| CN103823234B true CN103823234B (en) | 2017-02-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410088372.4A Expired - Fee Related CN103823234B (en) | 2014-03-12 | 2014-03-12 | Pulse charged particle beam detector |
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| CN (1) | CN103823234B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110673197A (en) * | 2019-09-24 | 2020-01-10 | 清谱（上海）分析仪器有限公司 | High-voltage charged particle conical spray detector |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4992742A (en) * | 1988-12-22 | 1991-02-12 | Mitsubishi Denki Kabushiki Kaisha | Charged-particle distribution measuring apparatus |
| EP1073894B1 (en) * | 1998-10-06 | 2010-10-06 | The University Of Washington | Charged particle beam detection system |
| RU2449317C2 (en) * | 2010-06-16 | 2012-04-27 | Государственное образовательное учреждение Высшего профессионального образования Национальный исследовательский Томский политехнический университет | Method of measuring current density distribution in charged particle beam |
| US8481962B2 (en) * | 2010-08-10 | 2013-07-09 | Fei Company | Distributed potential charged particle detector |
| FR2968393B1 (en) * | 2010-12-07 | 2015-03-06 | Techniques Metallurgiques Avancees Techmeta | DEVICE AND METHOD FOR ANALYZING THE DENSITY OF A BEAM OF CHARGED PARTICLES. |
| CN102353978B (en) * | 2011-06-30 | 2013-01-02 | 南京理工大学 | Faraday cup sensing device used in electron beam processing beam quality test |
| CN102867722B (en) * | 2011-07-05 | 2016-04-06 | 北京中科信电子装备有限公司 | Device for detecting ion beam profile density distribution and ion beam uniformity distribution in real time |
| CN102610478B (en) * | 2012-02-29 | 2014-07-30 | 中国工程物理研究院电子工程研究所 | Charged particle beam measurement device |
| CN102621577B (en) * | 2012-04-13 | 2014-03-26 | 北京大学 | Real-time monitoring method of each component beam intensity and injection dosage of mixed ion beam |
| CN203745659U (en) * | 2014-03-12 | 2014-07-30 | 中国工程物理研究院电子工程研究所 | Pulse charged particle beam detector |
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2014
- 2014-03-12 CN CN201410088372.4A patent/CN103823234B/en not_active Expired - Fee Related
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| CN103823234A (en) | 2014-05-28 |
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