CN207007763U - A kind of planar delta capacitive array sensor - Google Patents
A kind of planar delta capacitive array sensor Download PDFInfo
- Publication number
- CN207007763U CN207007763U CN201720666757.3U CN201720666757U CN207007763U CN 207007763 U CN207007763 U CN 207007763U CN 201720666757 U CN201720666757 U CN 201720666757U CN 207007763 U CN207007763 U CN 207007763U
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- electrode
- triangulation
- form excitation
- insulated substrate
- array sensor
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Abstract
The utility model discloses a kind of planar delta capacitive array sensor, including insulated substrate, the upper surface of insulated substrate is provided centrally with form excitation electrode, the both sides of form excitation electrode are respectively interstage shielding electrode a and interstage shielding electrode b, sides of the interstage shielding electrode a away from form excitation electrode 8 is provided with triangulation electrode b, triangulation electrode c, sides of the interstage shielding electrode b away from form excitation electrode is provided with triangulation electrode a, triangulation electrode d, insulating protective layer is covered with above insulated substrate, guard electrode is wrapped in the lower surface of insulated substrate.The utility model solves the problems, such as that existing planar capacitance sensor can not be accurately positioned to dielectric property skewness region in field domain.
Description
Technical field
The utility model belongs to technical field of capacitance sensor, and in particular to a kind of planar delta array type capacity sensing
Device.
Background technology
Advanced composite material (ACM) is more and more extensive in sector applications such as space flight, metallurgy, medical treatment.It is but in use, compound
Easily there is fatigue damage, crackle, inundation, opens phenomena such as viscous in material；Therefore, the non-destructive testing technology of Development of Novel, preferably
Meeting the testing requirements of nonmetal structure material turns into important technical need.
Capacitance method, Near-Infrared Absorption Method and microwave method belong to nondestructiving detecting means, but Near-Infrared Absorption Method easily by measured material shape,
The influence of size, density.Microwave method is had a great influence by material property, and expensive, it is difficult to is promoted the use of.Capacitance method is basis
The dielectric property of measured material is detected, and the change of material dielectric constant will necessarily cause the change of measurement capacitance to be examined
Survey.Compare, capacitance measurement has the advantages that simple in construction, cheap, response quickly, easy to operate；And electrode
Flexible design, a variety of measuring conditions can be met, it is easy to utilize.
At present, mainly there is the progress of plane capacitance array combination chromatography imaging technique on plane capacitance Non-Destructive Testing both at home and abroad
Detect and utilize two methods of labyrinth electrode (interdigitation, screw type, Back Word type etc.) detection.First method region is sensitive
It is complicated to spend low and algorithm；Second method is complicated, is not easy to process, and can not accurately obtain damage field positional information.
Utility model content
The purpose of this utility model is to provide a kind of planar delta capacitive array sensor, solves existing plane capacitance
Sensor can not be to the problem of dielectric property skewness region is accurately positioned in field domain.
The utility model is the technical scheme adopted is that a kind of planar delta capacitive array sensor, including insulation base
Plate, the upper surface of insulated substrate are provided centrally with form excitation electrode, and the both sides of form excitation electrode are respectively interstage shielding
The side of electrode a and interstage shielding electrode b, interstage shielding electrode a away from form excitation electrode 8 be provided with triangulation electrode b,
Sides of the triangulation electrode c, interstage shielding electrode b away from form excitation electrode is provided with triangulation electrode a, triangulation
Electrode d, insulating protective layer is covered with above insulated substrate, guard electrode is wrapped in the lower surface of insulated substrate.
The characteristics of the utility model, also resides in：
Plate one layer of epoxy resin insulating layers in the upper surface of insulated substrate.
Form excitation electrode and triangulation electrode a, triangulation electrode b, triangulation electrode c, triangulation electrode d
Between spacing be 0.1-0.5 times of form excitation electrode width.
Interstage shielding electrode a and interstage shielding electrode b width are form excitation electrode and triangulation electrode a, triangle
0.5 times of spacing between measuring electrode b, triangulation electrode c, triangulation electrode d.
Triangulation electrode a, triangulation electrode b, triangulation electrode c, triangulation electrode d are on form excitation electricity
It is extremely symmetrical.
All electrodes are connected by PCB vias technology with exterior shield binding post.
The beneficial effects of the utility model are：A kind of planar delta capacitive array sensor of the utility model, structure letter
It is list, flexible arrangement, cheap, and due to its special triangle pole plate shape, there is higher measurement sensitivity and good
The linearity；, can be fast using form excitation electrode and the characteristic of the symmetrical arrangement of triangle detecting electrode in the utility model
Speed determines the position in dielectric distribution inequality region.
Brief description of the drawings
Fig. 1 is the front view of the utility model planar delta capacitive array sensor；
Fig. 2 is the side view of the utility model planar delta capacitive array sensor；
Fig. 3 is the use connection figure of the utility model planar delta capacitive array sensor；
Fig. 4 is the structural representation of signal conditioning circuit in the utility model planar delta capacitive array sensor use
Figure.
In figure, 1. multichannel triarray planar capacitance sensors, 2. signal conditioning circuits, 3. data acquisition equipments, 4.
Computer, 5.C/V change-over circuits, 6. filtering and amplifying circuits, 7. phase-sensitive detection circuits, 8. form excitation electrodes, 9. triangulations
Electrode a, 10. triangulation electrode b, 11. triangulation electrode c, 12. triangulation electrode d, 13. interstage shielding electrode a, 14.
Interstage shielding electrode b, 15. insulated substrates, 16. insulating protective layers, 17. guard electrodes.
Embodiment
The utility model is described in detail with reference to the accompanying drawings and detailed description.
A kind of planar delta capacitive array sensor of the utility model, front view is as shown in figure 1, side view such as Fig. 2 institutes
Show, multichannel triarray planar capacitance sensor 1 includes insulated substrate 15, and the upper surface of insulated substrate 15 is provided centrally with
Form excitation electrode 8, the both sides of form excitation electrode 8 are respectively interstage shielding electrode a13 and interstage shielding electrode b14, interpolar
Sides of the bucking electrode a13 away from form excitation electrode 8 is provided with triangulation electrode b10, triangulation electrode c11, interpolar
Sides of the bucking electrode b14 away from form excitation electrode 8 is provided with triangulation electrode a9, triangulation electrode d12, and insulate base
The top of plate 15 is covered with insulating protective layer 16, and guard electrode 17 is wrapped in the lower surface of insulated substrate 15, reduces internal electric field
Leakage, suppression circuit measurement parasitic capacitance and outside electromagnetic interference.
Form excitation electrode 8 and 4 triangulation etching electrodes are on the same plane of insulated substrate 15, triangulation electrode
It is symmetrical on form excitation electrode 8, realize the measurement to plane composite material.Meanwhile special triangle pole piece structure
And symmetric arrays mode, realize and dielectric distribution inequality region in field domain is accurately positioned.
Exciting electrode is shaped as rectangle, and measuring electrode is shaped as triangle, is arranged with traditional rectangular or square
Mode is compared, and the measuring electrode and configuration of electrodes of this shape can effectively improve the signal intensity of sensor, dynamic inspection
Survey scope, measurement sensitivity and penetration depth.
Interstage shielding electrode between exciting electrode and measuring electrode be present, it is possible to reduce the crosstalk between different Measurement channels
Noise.
One layer of epoxy resin insulating layers are plated in the upper surface of insulated substrate 15, can effectively reduce external noise to measurement signal
Interference, improve measurement sensitivity.
Form excitation electrode 8 and triangulation electrode a9, triangulation electrode b10, triangulation electrode c11, triangle are surveyed
Spacing between amount electrode d12 is to determine the principal element of signal intensity, in order that sensor output signal strength performance optimizes,
Its spacing typically takes 0.1-0.5 times of the width of form excitation electrode 8.
Interstage shielding electrode a13 and interstage shielding electrode b14 are distributed in form excitation electrode 8 and 4 triangulation electrodes
Between, interstage shielding electrode width is bigger, and signal intensity is weaker, but penetration depth increase；Interstage shielding electrode can be with simultaneously
The crosstalk noise between different Measurement channels is effectively reduced, its width is typically taken between form excitation electrode 8 and triangulation electrode
Away from 0.5 times.
All electrodes are connected by PCB vias technology with exterior shield binding post, convenient to access signal conditioning circuit
2。
In use, as shown in figure 3, multichannel triarray planar capacitance sensor 1 successively with signal conditioning circuit 2, number
Connected according to collecting device 3, computer 4.Form excitation electrode 8, triangulation in multichannel triarray planar capacitance sensor 1
Electrode a9, triangulation electrode b10, triangulation electrode c11, triangulation electrode d12, interstage shielding electrode a13, interpolar screen
Electrode b14 is covered to be connected with signal conditioning circuit 2.
Signal conditioning circuit 2 is as shown in figure 4, C/V change-over circuits 5, filtering and amplifying circuit 6 and phase sensitivity including being sequentially connected in series
Detecting circuit 7, C/V change-over circuits 5 are connected with multichannel triarray planar capacitance sensor 1, phase-sensitive detection circuit 7 and data
Collecting device 3 connects.The binding post of each electrode of multichannel triarray planar capacitance sensor 1 is led by single shielding
Line is connected with C/V change-over circuits 5.
The gathered data of data acquisition equipment 3 is simultaneously sent into computer 4, the output signal by computer 4 to data acquisition equipment 3
Data processing and threshold decision are carried out, determines position and the size in dielectric distribution inequality region, and then calculate and obtain sample to be tested
Internal dielectric property distribution situation.
Claims (6)
- A kind of 1. planar delta capacitive array sensor, it is characterised in that including insulated substrate (15), insulated substrate (15) Upper surface is provided centrally with form excitation electrode (8), and the both sides of form excitation electrode (8) are respectively interstage shielding electrode a (13) and the side of interstage shielding electrode b (14), interstage shielding electrode a (13) away from form excitation electrode 8 is provided with triangle survey The side of electrode b (10), triangulation electrode c (11), interstage shielding electrode b (14) away from form excitation electrode (8) is measured to set There are triangulation electrode a (9), triangulation electrode d (12), insulating protective layer (16) is covered with above insulated substrate (15), protect Shield electrode (17) is wrapped in the lower surface of insulated substrate (15).
- A kind of 2. planar delta capacitive array sensor according to claim 1, it is characterised in that the insulated substrate (15) one layer of epoxy resin insulating layers are plated in upper surface.
- A kind of 3. planar delta capacitive array sensor according to claim 1, it is characterised in that the form excitation Electrode (8) and the triangulation electrode a (9), triangulation electrode b (10), triangulation electrode c (11), triangulation electricity Spacing between pole d (12) is 0.1-0.5 times of form excitation electrode (8) width.
- A kind of 4. planar delta capacitive array sensor according to claim 2, it is characterised in that the interstage shielding Electrode a (13) and interstage shielding electrode b (14) width are the form excitation electrode (8) and the triangulation electrode a (9), 0.5 times of the spacing between triangulation electrode b (10), triangulation electrode c (11), triangulation electrode d (12).
- A kind of 5. planar delta capacitive array sensor according to claim 1, it is characterised in that the triangulation Electrode a (9), triangulation electrode b (10), triangulation electrode c (11), triangulation electrode d (12) swash on the rectangle It is symmetrical to encourage electrode (8).
- A kind of 6. planar delta capacitive array sensor according to claim 1, it is characterised in that all electrodes It is connected by PCB vias technology with exterior shield binding post.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720666757.3U CN207007763U (en) | 2017-06-08 | 2017-06-08 | A kind of planar delta capacitive array sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720666757.3U CN207007763U (en) | 2017-06-08 | 2017-06-08 | A kind of planar delta capacitive array sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207007763U true CN207007763U (en) | 2018-02-13 |
Family
ID=61447163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720666757.3U Expired - Fee Related CN207007763U (en) | 2017-06-08 | 2017-06-08 | A kind of planar delta capacitive array sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207007763U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813770A (en) * | 2019-03-14 | 2019-05-28 | 大连海事大学 | A kind of condenser type ferromagnetism wear particle detection sensor and production method |
| CN110579622A (en) * | 2019-08-22 | 2019-12-17 | 西安理工大学 | Metal particle flow velocity measuring device and method based on triangular electrode capacitance sensor |
| CN111579604A (en) * | 2020-05-20 | 2020-08-25 | 中国民航大学 | Rotatable planar capacitive tomography sensor |
| CN112730542A (en) * | 2020-10-15 | 2021-04-30 | 中国民航大学 | Planar array capacitance value imaging sensor |
-
2017
- 2017-06-08 CN CN201720666757.3U patent/CN207007763U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813770A (en) * | 2019-03-14 | 2019-05-28 | 大连海事大学 | A kind of condenser type ferromagnetism wear particle detection sensor and production method |
| CN110579622A (en) * | 2019-08-22 | 2019-12-17 | 西安理工大学 | Metal particle flow velocity measuring device and method based on triangular electrode capacitance sensor |
| CN110579622B (en) * | 2019-08-22 | 2021-08-06 | 西安理工大学 | Metal particle flow velocity measuring device and method based on triangular electrode capacitance sensor |
| CN111579604A (en) * | 2020-05-20 | 2020-08-25 | 中国民航大学 | Rotatable planar capacitive tomography sensor |
| CN111579604B (en) * | 2020-05-20 | 2023-12-05 | 中国民航大学 | Rotatable planar capacitance tomography sensor |
| CN112730542A (en) * | 2020-10-15 | 2021-04-30 | 中国民航大学 | Planar array capacitance value imaging sensor |
| CN112730542B (en) * | 2020-10-15 | 2023-01-17 | 中国民航大学 | Planar array capacitance value imaging sensor |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180213 Termination date: 20200608 |