CN103808383A - Working volume measuring device and method for reducing device wall air outlet error - Google Patents
Working volume measuring device and method for reducing device wall air outlet error Download PDFInfo
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- CN103808383A CN103808383A CN201310724789.0A CN201310724789A CN103808383A CN 103808383 A CN103808383 A CN 103808383A CN 201310724789 A CN201310724789 A CN 201310724789A CN 103808383 A CN103808383 A CN 103808383A
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Abstract
The invention provides a working volume measuring device and method for reducing a device wall air outlet error. The device comprises a working volume body and a reference volume body which are connected through a first valve, the reference volume body is connected with a first non-evapotranspiration getter pump through a second valve, the reference volume body is connected with an air exhausting system through a third valve, the working volume body is connected with a second non-evapotranspiration getter pump through a fourth valve, and the working volume body is connected with a vacuum meter. According to the scheme, the active gases separating from absorbing on the wall of the working volume body and the wall of the reference volume body are correspondingly and selectively pumped through the first non-evapotranspiration getter pump and the second non-evapotranspiration getter pump, the static pressure inside the working volume body and the static pressure inside the reference volume body are kept, and the volume measuring precision of the working volume body is further improved.
Description
Technical field
The present invention relates to volume measurement technique field, relate in particular to a kind of wall give vent to anger work volume measurement equipment and method of error of reducing.
Background technology
The high progress gas micro-flowmeter of gas micro standard is mainly used in the measurement of gas micro, and wherein, work has determined the measuring accuracy of gas micro by the measurement progress of the volumetric values of volume.At present, generally adopt static expanding method to measure the volumetric values of high-precision gas micro-flowmeter work volume.
Adopt aforesaid way, having can in site measurement, simple operation and other advantages.But, when it adopts capacitor thin film vacuum meter gaging pressure, can be subject to the impact of thermal transpiration effect, measurement result is had a negative impact, in addition, the measuring error that aforesaid way cannot avoid the work wall desorbing gas of volume to introduce, and the main contributions component of this measured deviation uncertainty component that is measurement result.
Summary of the invention
Provide hereinafter about brief overview of the present invention, to the basic comprehension about some aspect of the present invention is provided.Should be appreciated that this general introduction is not about exhaustive general introduction of the present invention.It is not that intention is determined key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its object is only that the form of simplifying provides some concept, using this as the preorder in greater detail of discussing after a while.
The invention provides a kind of wall give vent to anger work volume measurement equipment and the method for error, measuring accuracy in order to raising work with volume volume of reducing.
The invention provides a kind of give vent to anger work volume measurement equipment of error of wall that reduces, comprise work volume and reference volume body, described work is connected by the first valve with described reference volume body by volume, described reference volume body is connected with the first nonevaporable getter pump by the second valve, described reference volume body is connected with extract system by the 3rd valve, described work is connected with the second nonevaporable getter pump by volume by the 4th valve, and described work is connected with vacuum meter by volume.
The present invention also provides a kind of method for measuring volume that adopts said apparatus, comprises the following steps:
Step 1: close described the second valve and described the 4th valve, open described the first valve, described the 3rd valve and described extract system, described work is bled with volume and described reference volume body;
Step 2: be evacuated to final vacuum in described work volume and described reference volume body and reach while setting the order of magnitude, open described the second valve and described the 4th valve, and activate described the first nonevaporable getter pump and described the second nonevaporable getter pump, after described the first nonevaporable getter pump and described the second nonevaporable getter pumping work, close described the second valve and described the 4th valve;
Step 3: open described vacuum meter, and described vacuum meter is at least stablized after scheduled duration, close described the first valve and described the 3rd valve, described the second valve of corresponding unlatching and described the 4th valve, extract described work volume and the attached active gases of described reference volume body wall emaciated face by described the first nonevaporable getter pump, the corresponding selectivity of described the second nonevaporable getter pump, maintain static pressure in described work volume and described reference volume body;
Step 4: be filled with the inert gas of scheduled volume to work by volume, stablize after the first setting duration, obtain the vacuum tightness p of described work volume by described vacuum meter
1;
Step 5: open described the first valve, make the described inert gas of described work in volume be expanded to described reference volume body, stablize after the second setting duration, obtain the vacuum tightness p of described work volume by described vacuum meter
2;
Step 6: by p
1, p
2and the volumetric values of described reference volume body, obtain the volumetric values of described work volume according to Boyle-boyle's law.
Such scheme provided by the invention, extract work volume and the attached active gases of reference volume body wall emaciated face by the first nonevaporable getter pump, the corresponding selectivity of the second nonevaporable getter pump, maintain static pressure in work volume and reference volume body, and then improved the volumetric measurement precision of work volume.
Accompanying drawing explanation
Below with reference to the accompanying drawings illustrate embodiments of the invention, can understand more easily above and other objects, features and advantages of the present invention.Parts in accompanying drawing are just in order to illustrate principle of the present invention.In the accompanying drawings, same or similar technical characterictic or parts will adopt same or similar Reference numeral to represent.
Fig. 1 reduces the give vent to anger work schematic diagram of volume measurement equipment of error of wall for what the embodiment of the present invention provided.
Embodiment
Embodiments of the invention are described with reference to the accompanying drawings.The element of describing in an accompanying drawing of the present invention or a kind of embodiment and feature can combine with element and feature shown in one or more other accompanying drawing or embodiment.It should be noted that for purposes of clarity, in accompanying drawing and explanation, omitted expression and the description of unrelated to the invention, parts known to persons of ordinary skill in the art and processing.
Fig. 1 reduces the give vent to anger work schematic diagram of volume measurement equipment of error of wall for what the embodiment of the present invention provided, as shown in Figure 1, what the embodiment of the present invention provided reduce wall the gives vent to anger work volume measurement equipment of error, comprise work volume 3 and reference volume body 5, work is connected by the first valve 4 with reference volume body 5 by volume 3, reference volume body 5 is connected with the first nonevaporable getter pump 7 by the second valve 6, reference volume body 5 is connected with extract system 9 by the 3rd valve 8, work is connected with the second nonevaporable getter pump 11 by volume 3 by the 4th valve 10, work is connected with vacuum meter 2 by volume 3.
Such scheme provided by the invention, extract the active gases of work volume 3 and reference volume body 5 wall desorptions by the first nonevaporable getter pump 7, the corresponding selectivity of the second nonevaporable getter pump 11, maintain work volume 3 and the interior static pressure of reference volume body 5, and then improved the volumetric measurement precision of work volume 3.
In actual use, reference volume body 5 is for carrying out the parts with fixed volume size after Accurate Calibration.The demarcation of reference volume body 5 volumes can be demarcated in the measurement unit of authorized by state.Work is parts with specific volume size by volume 3.
Work is connected with source of the gas 12 by the 5th valve 1 by volume 3, and source of the gas 12 can be filled with the gases such as nitrogen, argon gas or helium for work by volume 3.
Wherein, the first valve 4, the second valve 6, the 3rd valve 8, the 4th valve 10 and the 5th valve 1 are vacuum valve, to guarantee good impermeability, make that work volume 3 and reference volume body 5 are interior can keep a higher vacuum tightness.
The embodiment of the present invention also provides a kind of above-described embodiment that adopts to reduce the give vent to anger work method for measuring volume of volume measurement equipment of error of wall, comprises the following steps:
Step 1: close described the second valve 6 and described the 4th valve 10, open described the first valve 4, described the 3rd valve 8 and described extract system 9, described work is bled with volume 3 and described reference volume body 5; Extract system 9 can be, but not limited to as one or more vacuum pumps, and it is for vacuumizing processing to work with volume 3 and reference volume body 5.
Step 2: be evacuated to described work volume 3 and the interior final vacuum of described reference volume body 5 and reach while setting the order of magnitude, open described the second valve 6 and described the 4th valve 10, and activate described the first nonevaporable getter pump 7 and described the second nonevaporable getter pump 11, after described the first nonevaporable getter pump 7 and described the second nonevaporable getter pump 11 activation, close described the second valve 6 and described the 4th valve 10; The first nonevaporable getter pump 7 and the second nonevaporable getter pump 11 are heated to activate, and wherein, activationary temperature can be, but not limited to select 150 degree, and it is 1 hour that activationary time can be, but not limited to, and adopts and reaches 10 in final vacuum
-6when the Pa order of magnitude, activate the first nonevaporable getter pump 7 and the second nonevaporable getter pump 11, can improve activation efficiency, reduce the damage to the first nonevaporable getter pump 7 and the second nonevaporable getter pump 11, increase the service life.
Step 3: open described vacuum meter 2, and described vacuum meter 2 is at least stablized after scheduled duration, close described the first valve 4 and described the 3rd valve 8, described the second valve 6 of corresponding unlatching and described the 4th valve 10, by described the first nonevaporable getter pump 7, the corresponding selectivity of described the second nonevaporable getter pump 11 extracts the active gases of described work volume 3 and described reference volume body 5 wall desorptions, maintain described work volume 3 and the interior static pressure of described reference volume body 5, wherein, vacuum meter 2 can be, but not limited to adopt magnetic suspension spinning rotor vacuum gauge.Active gases herein can be H
2, CO etc.Carry out the static pressure in optionally decision work volume 3 and reference volume body 5 according to concrete actual needs, be for example and without limitation to 3.83 × 10
-6pa.
Step 4: be filled with the inert gas of scheduled volume to work by volume 3, stablize after the first setting duration, obtain the vacuum tightness p of described work volume 3 by described vacuum meter 2
1.
Step 5: open described the first valve 4, make the described inert gas in described work volume 3 be expanded to described reference volume body 5, stablize after the second setting duration, obtain the vacuum tightness p of described work volume 3 by described vacuum meter 2
2.
Step 6: by described p
1, described p
2and the volumetric values of described reference volume body 5, obtain the volumetric values of described work volume 3 according to Boyle-boyle's law.
Due to the measuring error that the first nonevaporable getter pump 7, the second nonevaporable getter pump 11 have effectively avoided work volume 3 and reference volume body 5 wall desorbing gas to produce, uncertainty of measurement is reduced to U
relin=0.1%, improve the measuring accuracy of work volume 3 volumes.
In actual use, the pressure of inert gas can be, but not limited to the order of magnitude into 0.1Pa-1Pa.Scheduled duration is at least 4 hours.First sets duration is at least 50 seconds.Second sets duration is at least 50 seconds, so that the inert gas being filled with is stable fully, prevents pressure surge.Inert gas can be selected argon gas or helium.The setting order of magnitude of final vacuum is for example and without limitation to 10
-6pa.
For example, in the embodiment of the present invention, can select by source of the gas 12 to work with the argon gas that is filled with about 0.5Pa in volume 3, stablize after 50 seconds, record p
1for 0.5864Pa.Open the first valve 4, argon gas is expanded into reference volume body 5, then stablize after 50 seconds, record p
2be 3.3789 × 10
-2pa.If the volume of reference volume body 5 is 1.0086 × 10
-3m
3, the volume that obtains described work volume 3 according to Boyle-boyle's law is 6.1670 × 10
-5m
3.
Finally it should be noted that: above embodiment only, in order to technical scheme of the present invention to be described, is not intended to limit; Although the present invention is had been described in detail with reference to previous embodiment, those of ordinary skill in the art is to be understood that: its technical scheme that still can record aforementioned each embodiment is modified, or part technical characterictic is wherein equal to replacement; And these modifications or replacement do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (10)
1. one kind reduces the give vent to anger work volume measurement equipment of error of wall, it is characterized in that, comprise work volume and reference volume body, described work is connected by the first valve with described reference volume body by volume, described reference volume body is connected with the first nonevaporable getter pump by the second valve, described reference volume body is connected with extract system by the 3rd valve, described work is connected with the second nonevaporable getter pump by volume by the 4th valve, and described work is connected with vacuum meter by volume.
2. the give vent to anger work volume measurement equipment of error of wall that reduces according to claim 1, is characterized in that, described work is connected with source of the gas by the 5th valve by volume.
3. the give vent to anger work volume measurement equipment of error of wall that reduces according to claim 2, is characterized in that, described the first valve, described the second valve, described the 3rd valve, described the 4th valve and described the 5th valve are vacuum valve.
4. according to reducing the give vent to anger work volume measurement equipment of error of wall described in claim 1-3 any one, it is characterized in that, described vacuum is counted magnetic suspension spinning rotor vacuum gauge.
5. adopt to reduce the give vent to anger method for measuring volume of work volume measurement equipment of error of wall described in claim 1-4 any one, it is characterized in that, comprise the following steps:
Step 1: close described the second valve and described the 4th valve, open described the first valve, described the 3rd valve and described extract system, described work is bled with volume and described reference volume body;
Step 2: be evacuated to final vacuum in described work volume and described reference volume body and reach while setting the order of magnitude, open described the second valve and described the 4th valve, and activate described the first nonevaporable getter pump and described the second nonevaporable getter pump, after described the first nonevaporable getter pump and described the second nonevaporable getter pumping work, close described the second valve and described the 4th valve;
Step 3: open described vacuum meter, and described vacuum meter is at least stablized after scheduled duration, close described the first valve and described the 3rd valve, described the second valve of corresponding unlatching and described the 4th valve, extract described work volume and the attached active gases of described reference volume body wall emaciated face by described the first nonevaporable getter pump, the corresponding selectivity of described the second nonevaporable getter pump, maintain static pressure in described work volume and described reference volume body;
Step 4: be filled with the inert gas of scheduled volume to work by volume, stablize after the first setting duration, obtain the vacuum tightness p of described work volume by described vacuum meter
1;
Step 5: open described the first valve, make the described inert gas of described work in volume be expanded to described reference volume body, stablize after the second setting duration, obtain the vacuum tightness p of described work volume by described vacuum meter
2;
Step 6: by described p
1, described p
2and the volumetric values of described reference volume body, obtain the volumetric values of described work volume according to Boyle-boyle's law.
6. method for measuring volume according to claim 5, is characterized in that, the pressure of described inert gas is the 0.1Pa-1Pa order of magnitude; And/or the setting order of magnitude of described final vacuum is 10
-6pa.
7. according to the method for measuring volume described in claim 5 or 6, it is characterized in that, described scheduled duration is at least 4 hours.
8. according to the method for measuring volume described in claim 5 or 6, it is characterized in that, described first sets duration is at least 50 seconds.
9. according to the method for measuring volume described in claim 5 or 6, it is characterized in that, described second sets duration is at least 50 seconds.
10. according to the method for measuring volume described in claim 5 or 6, it is characterized in that, described inert gas is argon gas or helium.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310724789.0A CN103808383B (en) | 2013-12-24 | 2013-12-24 | Working volume measuring device and method for reducing device wall air outlet error |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310724789.0A CN103808383B (en) | 2013-12-24 | 2013-12-24 | Working volume measuring device and method for reducing device wall air outlet error |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103808383A true CN103808383A (en) | 2014-05-21 |
| CN103808383B CN103808383B (en) | 2017-01-25 |
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ID=50705486
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310724789.0A Expired - Fee Related CN103808383B (en) | 2013-12-24 | 2013-12-24 | Working volume measuring device and method for reducing device wall air outlet error |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105067070A (en) * | 2015-07-16 | 2015-11-18 | 兰州空间技术物理研究所 | Method for measuring volume ratio of vacuum container in low-pressure environment |
| CN105115559A (en) * | 2015-09-06 | 2015-12-02 | 中国人民解放军63653部队 | Container volume measurement device and measurement method based on secondary micro-variation allowance pressure principles |
| CN109751233A (en) * | 2018-12-06 | 2019-05-14 | 兰州空间技术物理研究所 | A kind of device and method based on minipump measurement inert gas pumping speed |
| CN109827066A (en) * | 2018-12-17 | 2019-05-31 | 兰州空间技术物理研究所 | A kind of external vacuum maintenance device and method |
| CN111928996A (en) * | 2020-05-28 | 2020-11-13 | 上海利方达真空技术有限公司 | Laser space filter using non-evaporable getter pump |
| CN118032580A (en) * | 2024-04-12 | 2024-05-14 | 成都工业学院 | High-precision solid material surface equilibrium state net desorption gas amount testing instrument and method |
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| WO2002095369A1 (en) * | 2001-05-18 | 2002-11-28 | Tetra Laval Holdings & Finance S.A. | Method and device for determining the permeation of a barrier layer |
| CN1865888A (en) * | 2006-06-15 | 2006-11-22 | 中国航天科技集团公司第五研究院第五一○研究所 | Device and method for measuring small orifice admittance by employing linear vacuum gauge |
| CN101709987A (en) * | 2009-12-17 | 2010-05-19 | 中国航天科技集团公司第五研究院第五一○研究所 | Device and method for measuring volume ratio of vacuum container by linear vacuometer |
| CN103017850A (en) * | 2012-11-27 | 2013-04-03 | 中国航天科技集团公司第五研究院第五一〇研究所 | Device and method for measuring volume ratio of vacuum container |
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2013
- 2013-12-24 CN CN201310724789.0A patent/CN103808383B/en not_active Expired - Fee Related
Patent Citations (4)
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|---|---|---|---|---|
| WO2002095369A1 (en) * | 2001-05-18 | 2002-11-28 | Tetra Laval Holdings & Finance S.A. | Method and device for determining the permeation of a barrier layer |
| CN1865888A (en) * | 2006-06-15 | 2006-11-22 | 中国航天科技集团公司第五研究院第五一○研究所 | Device and method for measuring small orifice admittance by employing linear vacuum gauge |
| CN101709987A (en) * | 2009-12-17 | 2010-05-19 | 中国航天科技集团公司第五研究院第五一○研究所 | Device and method for measuring volume ratio of vacuum container by linear vacuometer |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105067070A (en) * | 2015-07-16 | 2015-11-18 | 兰州空间技术物理研究所 | Method for measuring volume ratio of vacuum container in low-pressure environment |
| CN105115559A (en) * | 2015-09-06 | 2015-12-02 | 中国人民解放军63653部队 | Container volume measurement device and measurement method based on secondary micro-variation allowance pressure principles |
| CN109751233A (en) * | 2018-12-06 | 2019-05-14 | 兰州空间技术物理研究所 | A kind of device and method based on minipump measurement inert gas pumping speed |
| CN109827066A (en) * | 2018-12-17 | 2019-05-31 | 兰州空间技术物理研究所 | A kind of external vacuum maintenance device and method |
| CN111928996A (en) * | 2020-05-28 | 2020-11-13 | 上海利方达真空技术有限公司 | Laser space filter using non-evaporable getter pump |
| CN118032580A (en) * | 2024-04-12 | 2024-05-14 | 成都工业学院 | High-precision solid material surface equilibrium state net desorption gas amount testing instrument and method |
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| Publication number | Publication date |
|---|---|
| CN103808383B (en) | 2017-01-25 |
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