CN101709987B - Device and method for measuring volume ratio of vacuum container by linear vacuometer - Google Patents
Device and method for measuring volume ratio of vacuum container by linear vacuometer Download PDFInfo
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- CN101709987B CN101709987B CN 200910259326 CN200910259326A CN101709987B CN 101709987 B CN101709987 B CN 101709987B CN 200910259326 CN200910259326 CN 200910259326 CN 200910259326 A CN200910259326 A CN 200910259326A CN 101709987 B CN101709987 B CN 101709987B
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- volume ratio
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Abstract
The invention discloses a device and a method for measuring a volume ratio of a vacuum container by a linear vacuometer, and belongs to the technical field of measurement. The device comprises a pressure stabilizing chamber, a vacuum valve, a container, a vacuometer, an air bottle and a vacuum pump. The vacuum container is vacuumized, and gas flows in the vacuum container; and the vacuum pressure is measured by the vacuometer. The device for measuring the volume ratio of the vacuum container by the linear vacuometer has a simple structure; because only one linear vacuometer is used, components causing measurement uncertainty are less; the linear vacuometer for measuring the vacuum degree is not required to measure absolute pressure, and a calibration coefficient thereof is not required to be known, so the uncertainty due to calibration is avoided; and the method for measuring the volume ratio of the vacuum container is simple, and has low measurement cost and small measurement uncertainty.
Description
Technical field
A kind of device and method with linear vacuum gauge measurement vacuum tank volume ratio of the present invention belongs to field of measuring technique.
Background technology
Document " the static expanding method vacuum standard volumetric ratio is measured and uncertainty evaluation, " vacuum and low temperature " the 14th volume, the 3rd phase in 2008, the 143rd～145 page " has been introduced a kind of method of measurement vacuum tank volume ratio.This method is to use piston manometer to measure the pressure of expansion front and back, utilizes capacitor thin film vacuum meter device as a comparison.Produce a higher original pressure with piston manometer, the pressure after the expansion shows by a capacitor thin film vacuum meter, notes this indicating value.Then piston manometer is communicated with the capacitor thin film vacuum meter, and allow it produce a little pressure, make the capacitor thin film vacuum meter indicating value that is attached thereto reappear indicating value under the last registration as much as possible, record is the reading of piston manometer at this moment, the reading of twice piston manometer in front and back is just compared can be determined volumetric ratio.
The weak point of this method is exactly that the uncertainty of measurement result is big, main cause is: used the capacitor thin film vacuum meter as a comparison during device, measure the interior pressure of the back container that expands with when being connected with piston manometer, during by the indicated value before the reproduction of regulating piston pressure gauge, can not prevent effectively that the uncertainty of measurement that can not make full use of linear every capacitor thin film vacuum meter of vacuum meter is not less than 0.4% because temperature fluctuation accurately reappears the influence of the indicated value under the last registration to the capacitor thin film vacuum meter; Environmental temperature fluctuation is big to the measurement result influence of pressure variety.
Summary of the invention
The objective of the invention is in order to overcome the deficiencies in the prior art, a kind of device and method of measuring vacuum tank volume ratio with linear vacuum gauge is provided, this method is utilized the ratio of twice reading of linear vacuum gauge, the uncertainty of measurement of having avoided deviation of reading to introduce, make the uncertainty of measuring orifice conductance by former greater than 1%, be reduced to less than 0.3%.
The objective of the invention is to be achieved through the following technical solutions.
A kind of device with linear vacuum gauge measurement vacuum tank volume ratio of the present invention comprises: pressure stabilizing chamber, vacuum valve, container, vacuum meter, gas cylinder and vacuum pump; Its annexation is: gas cylinder is connected by valve with pressure stabilizing chamber, pressure stabilizing chamber is connected by valve with vacuum chamber, vacuum chamber is connected by valve with vacuum chamber, linear vacuum gauge directly is connected on the vacuum chamber, the unit of bleeding is connected by valve with vacuum chamber, by the unit gas bleeding from vacuum chamber of bleeding.
A kind of method of the present invention with linear vacuum gauge measurement vacuum tank volume ratio, its concrete implementation step is as follows:
1) be that the container of v, container, pressure stabilizing chamber and the connecting tube that volume is V vacuumize with vacuum pump to volume;
2) pressure stabilizing chamber charges into single component gas, reconciles valve, makes gas flow into vacuum tank with constant pressure;
3) measure the initial minimum pressure p ' of vacuum system with linear vacuum gauge
0Minimum pressure p ' during with termination
1
4) measure initial gaseous tension p in the vacuum tank with linear vacuum gauge
0, and stop gaseous tension p
1
5) vessel volume ratio
Just equal
Vacuum tightness in the described step 1) in vacuum tank, pressure stabilizing chamber and the connecting tube is less than 1 * 10
-1Pa;
Described step 2) the pressure stabilizing chamber volume can satisfy in the container inner pressure measuring process that pressure changes less than 0.01% in the pressure stabilizing chamber in;
The initial minimum pressure p ' of vacuum system in the described step 3)
0Minimum pressure p ' during with termination
1Pressure changes less than 0.001%;
Vessel volume ratio in the described step 5)
Get the mean value of repeatedly measuring.
Beneficial effect
1) apparatus structure with linear vacuum gauge measurement vacuum tank volume ratio is simple, owing to only use a linear vacuum gauge, causes that the component of uncertainty of measurement is also just few;
2) linear vacuum gauge of measurement of vacuum does not require its measurement absolute pressure, just needn't know its calibration factor yet, thereby has avoided because the uncertainty that calibration is introduced;
3) method of measurement vacuum tank volume ratio is simple, and it is low to measure cost, and uncertainty of measurement is little.
Description of drawings
Fig. 1 measures the structural principle synoptic diagram of vacuum tank volume ratio device with linear vacuum gauge for the present invention;
Wherein, 1-pressure stabilizing chamber, 2-vacuum valve, 3-container, 4-vacuum valve, 5-container, 6-vacuum meter, 7-vacuum valve, 8-gas cylinder, 9-vacuum valve, 10-vacuum pump.
Embodiment
As shown in Figure 1, the measurement vacuum tank volume ratio device of the present invention's employing comprises pressure stabilizing chamber 1, vacuum valve 2, container 3, vacuum valve 4, container 5, vacuum meter 6, vacuum valve 7, gas cylinder 8, vacuum valve 9 and vacuum pump 10.
1) open vacuum pump 10, open vacuum valve 2,4,9, pressure stabilizing chamber 6 and each connecting tube state that is evacuated is noted the reading p ' of vacuum meter 6
0(3.305 * 10
-5Pa).
2) valve-off 2, by valve 7 to pressure stabilizing chamber 1 air inlet.
3) valve-off 7, regulate micrometering valve 2, and gas is flowed in the vacuum tank 3 and 5 with constant pressure, when the reading of vacuum meter 6 no longer changes, note the reading p of vacuum meter 6
0(5.967 * 10
1Pa).
4) valve-off 4, open valve 9, and container 5 state that is evacuated is noted the reading p ' of vacuum meter 6
1(8.634 * 10
-5Pa).
5) valve-off 9, open valve 4, and gas is entered in the vacuum tank 5, when the reading of vacuum meter 6 no longer changes, note the reading p of vacuum meter 6
1(5.793 * 10
-1Pa).
6) vacuum tank volume ratio to be measured
Just equal
Calculate, be worth and be (1.020 * 10
2).
7) vacuum tank volume ratio to be measured
Relative combined standard uncertainty less than 0.3%.
Claims (6)
1. device of measuring vacuum tank volume ratio with linear vacuum gauge, it is characterized in that: this device comprises pressure stabilizing chamber (1), vacuum valve A (2), vacuum tank A (3), vacuum valve B (4), vacuum tank B (5), linear vacuum gauge (6), vacuum valve C (7), gas cylinder (8), vacuum valve D (9) and vacuum pump (10); Its annexation is: gas cylinder (8) is connected by vacuum valve C (7) with pressure stabilizing chamber (1), pressure stabilizing chamber (1) is connected by vacuum valve A (2) with vacuum tank A (3), vacuum tank A (3) is connected by vacuum valve B (4) with vacuum tank B (5), linear vacuum gauge (6) directly is connected on the vacuum tank B (5), vacuum pump (10) is connected by vacuum valve D (9) with vacuum tank B (5), by vacuum pump (10) gas bleeding from vacuum tank B (5).
2. measure the method for vacuum tank volume ratio with linear vacuum gauge for one kind, it is characterized in that: adopt and as claimed in claim 1ly a kind ofly measure the device of vacuum tank volume ratio with linear vacuum gauge, these method concrete steps are:
1) opens vacuum pump (10), open vacuum valve A (2), vacuum valve B (4), vacuum valve D (9), is that the vacuum tank A (3) of v, vacuum tank B (5), pressure stabilizing chamber (1) and the connecting tube that volume is V vacuumize with vacuum pump to volume, notes the reading p ' of linear vacuum gauge (6)
0
2) close vacuum valve A (2), by vacuum valve C (7) to pressure stabilizing chamber (1) air inlet;
3) close vacuum valve C (7), regulate vacuum valve A (2), gas is flowed in vacuum tank A (3) and the vacuum tank B (5) with constant pressure, when the reading of linear vacuum gauge (6) no longer changes, note the reading p of linear vacuum gauge (6)
0
4) close vacuum valve B (4), open vacuum valve D (9), vacuum tank B (5) state that is evacuated is noted the reading p ' of linear vacuum gauge (6)
1
5) close vacuum valve D (9), open vacuum valve B (4), gas is entered in the vacuum tank B (5), when the reading of linear vacuum gauge (6) no longer changes, note the reading p of linear vacuum gauge (6)
1
6) vacuum tank volume ratio to be measured
Just equal
3. a kind of method with linear vacuum gauge measurement vacuum tank volume ratio according to claim 2, it is characterized in that: the vacuum tightness in the described step 1) in vacuum tank A (3), vacuum tank B (5), pressure stabilizing chamber and the connecting tube is less than 1 * 10
-1Pa.
4. according to claim 2ly a kind ofly measure the method for vacuum tank volume ratio with linear vacuum gauge, it is characterized in that: the pressure stabilizing chamber volume can satisfy in the vacuum tank internal pressure measuring process that pressure changes less than 0.01% in the pressure stabilizing chamber described step 2).
5. a kind of method with linear vacuum gauge measurement vacuum tank volume ratio according to claim 2 is characterized in that: the reading p ' of described step 1) neutral line vacuum meter (6)
0Reading p ' with described step 4) linear vacuum gauge (6)
1Pressure changes less than 0.001%.
6. a kind of method with linear vacuum gauge measurement vacuum tank volume ratio according to claim 2 is characterized in that: vacuum tank volume ratio in the described step 5)
Get the mean value of repeatedly measuring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910259326 CN101709987B (en) | 2009-12-17 | 2009-12-17 | Device and method for measuring volume ratio of vacuum container by linear vacuometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910259326 CN101709987B (en) | 2009-12-17 | 2009-12-17 | Device and method for measuring volume ratio of vacuum container by linear vacuometer |
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| Publication Number | Publication Date |
|---|---|
| CN101709987A CN101709987A (en) | 2010-05-19 |
| CN101709987B true CN101709987B (en) | 2011-03-30 |
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|---|---|---|---|
| CN 200910259326 Active CN101709987B (en) | 2009-12-17 | 2009-12-17 | Device and method for measuring volume ratio of vacuum container by linear vacuometer |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101995275B (en) * | 2010-10-26 | 2011-12-07 | 中国航天科技集团公司第五研究院第五一○研究所 | Static expansion method vacuum standard based method for measuring minimum gas flow |
| CN101995277B (en) * | 2010-10-26 | 2012-02-08 | 中国航天科技集团公司第五研究院第五一○研究所 | Device for measuring ultralow gas flow |
| CN103017850B (en) * | 2012-11-27 | 2014-06-25 | 中国航天科技集团公司第五研究院第五一〇研究所 | Device and method for measuring volume ratio of vacuum container |
| CN103808383B (en) * | 2013-12-24 | 2017-01-25 | 兰州空间技术物理研究所 | Working volume measuring device and method for reducing device wall air outlet error |
| CN105067070A (en) * | 2015-07-16 | 2015-11-18 | 兰州空间技术物理研究所 | Method for measuring volume ratio of vacuum container in low-pressure environment |
| CN105628129A (en) * | 2015-12-23 | 2016-06-01 | 安徽威迈光机电科技有限公司 | System and method for measuring volume of irregular container |
| US10150471B2 (en) | 2016-12-23 | 2018-12-11 | Centurylink Intellectual Property Llc | Smart vehicle apparatus, system, and method |
| CN108759733A (en) * | 2018-08-22 | 2018-11-06 | 上海力信能源科技有限责任公司 | With the device and method of gasmetry irregularly shaped object volume |
| CN109029619B (en) * | 2018-09-21 | 2020-02-14 | 合肥工业大学 | Volume measuring device based on dynamic differential pressure attenuation |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3315238A1 (en) * | 1983-04-27 | 1984-10-31 | Leybold-Heraeus GmbH, 5000 Köln | Method for volume measurement |
| GB2278691A (en) * | 1993-04-23 | 1994-12-07 | Belmec Limited | Measuring the volume of void(s) in structures |
| CN101458109A (en) * | 2008-12-22 | 2009-06-17 | 中国航天科技集团公司第五研究院第五一○研究所 | Constant pressure type gas flowmeter transfiguration chamber bellows volume change measuring set |
-
2009
- 2009-12-17 CN CN 200910259326 patent/CN101709987B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3315238A1 (en) * | 1983-04-27 | 1984-10-31 | Leybold-Heraeus GmbH, 5000 Köln | Method for volume measurement |
| GB2278691A (en) * | 1993-04-23 | 1994-12-07 | Belmec Limited | Measuring the volume of void(s) in structures |
| CN101458109A (en) * | 2008-12-22 | 2009-06-17 | 中国航天科技集团公司第五研究院第五一○研究所 | Constant pressure type gas flowmeter transfiguration chamber bellows volume change measuring set |
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| Publication number | Publication date |
|---|---|
| CN101709987A (en) | 2010-05-19 |
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