CN103780130B - A kind of cantilever type impulse generator - Google Patents

A kind of cantilever type impulse generator Download PDF

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CN103780130B
CN103780130B CN201310222360.1A CN201310222360A CN103780130B CN 103780130 B CN103780130 B CN 103780130B CN 201310222360 A CN201310222360 A CN 201310222360A CN 103780130 B CN103780130 B CN 103780130B
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cantilever
frictional layer
layer
film
type impulse
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CN103780130A (en
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杨维清
陈俊
王中林
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Beijing Institute of Nanoenergy and Nanosystems
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Beijing Institute of Nanoenergy and Nanosystems
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Abstract

The invention provides a kind of cantilever type impulse generator, comprising: the first cantilever having one end to be fixed respectively, the second cantilever and the 3rd cantilever, wherein, the lower surface of the first cantilever is provided with the first electrode layer and the first frictional layer; Flexible second cantilever upper surface is provided with the second electrode lay and the second frictional layer, and lower surface arranges third electrode layer and the 3rd frictional layer; The upper surface of the 3rd cantilever is provided with the 4th electrode layer and the 4th frictional layer; When being subject to the External Force Actings such as vibration, second cantilever vibrates between the first cantilever and the 3rd cantilever, at least part of second frictional layer upper surface and the first frictional layer lower surface are contacting and separating, at least part of 3rd frictional layer lower surface and the 4th frictional layer upper surface be contacting and separating, between the first electrode layer and the second electrode lay and/or between third electrode layer and the 4th electrode layer, have pulse electrical signal to export.Generator of the present invention can change the vibration mechanical energy that wave, highway, bridge etc. are formed into electric energy.

Description

A kind of cantilever type impulse generator
Technical field
The present invention relates to a kind of generator, particularly relate to and will vibrate the cantilever type impulse generator that the changes mechanical energy produced is electric energy.
Background technology
Vibration mechanical energy is the form of energy extensively existed, comprise the form such as vibration, the vibration of automobile through out-of-date highway, bridge and tunnel of wave, engine, and human motion as walking, run, the form such as twisting, capital produces vibration mechanical energy, although these vibration mechanical energies extensively exist, but usually out in the cold, do not have effective collect means to be used, be usually wasted.
At present, the principle that the generator that changes mechanical energy is electric energy utilizes mainly contains electrostatic induction, the piezoelectric property, electrostatic pulse generator etc. of electromagnetic induction and special material.But the electrostatic induction electricity generator invented, there is the shortcomings such as volume is large, applicability is narrow, induction generator and piezoelectric generator then ubiquity complex structure, has particular/special requirement and the more high defect of cost to material.Electrostatic pulse generator is not enough to some extent in miniaturization and lightweight, and output power density is less, can not meet the needs collected various vibration mechanical energy.
Summary of the invention
The present invention relates to a kind of simple cantilever type impulse generator of structure that the vibration mechanical energy of wave, highway, bridge etc. form can be converted into electric energy, can for microelectronic device as navigation mark, road sign, warning sign etc. provide the power supply of coupling.
For achieving the above object, the invention provides a kind of cantilever type impulse generator, comprising: the first cantilever having one end to be fixed respectively, the second cantilever and the 3rd cantilever, wherein,
The lower surface of described first cantilever is provided with the first electrode layer, and the lower surface contact of described first electrode layer is provided with the first frictional layer;
The upper surface of described second cantilever is provided with the second electrode lay, and the upper surface contact of described the second electrode lay is provided with the second frictional layer, and the upper surface of described second frictional layer and the lower surface of described first frictional layer are oppositely arranged; The lower surface of described second cantilever arranges third electrode layer, and the lower surface contact of described third electrode layer is provided with the 3rd frictional layer; Described second cantilever is elastic cantilever;
The upper surface of described 3rd cantilever is provided with the 4th electrode layer, and the upper surface contact of described 4th electrode layer is provided with the 4th frictional layer; The upper surface of described 4th frictional layer and the lower surface of described 3rd frictional layer are oppositely arranged;
When described generator is subject to External Force Acting, described second cantilever vibrates between described first cantilever and the 3rd cantilever, described second frictional layer upper surface and described first frictional layer lower surface are at least partly contacting and separating, at least partly described 3rd frictional layer lower surface and described 4th frictional layer upper surface be contacting and separating, have pulse electrical signal to export between described first electrode layer and the second electrode lay and/or between described third electrode layer and the 4th electrode layer.
Preferably, the free end of described first cantilever, the second cantilever and the 3rd cantilever is all in the same side of stiff end.
Preferably, described first cantilever, the second cantilever and the 3rd cantilever are fixed in same fixture.
Preferably, described second cantilever also comprises weight, and described weight is arranged on the free end of described second cantilever.
Preferably, described first cantilever and/or the 3rd cantilever are elastic cantilever.
Preferably, described second cantilever is electric conducting material, and described second cantilever substitutes described the second electrode lay and third electrode layer.
Preferably, described first cantilever and/or the 3rd cantilever adopt electric conducting material; Described first cantilever substitutes described first electrode layer, and/or described 3rd cantilever substitutes described 4th electrode layer.
Preferably, described second frictional layer and described 3rd frictional layer adopt electric conducting material, and described second cantilever replaces described second frictional layer and described 3rd frictional layer.
Preferably, the upper surface of described second cantilever and/or lower surface are provided with micro structure array decorative layer.
Preferably, described first frictional layer adopts electric conducting material, and described first cantilever replaces described first frictional layer;
And/or,
Described 4th frictional layer adopts electric conducting material, and described 3rd cantilever replaces described 4th frictional layer.
Preferably, the lower surface of described first cantilever and/or the upper surface of the 3rd cantilever are provided with micro structure array decorative layer.
Preferably, described micro structure array decorative layer comprises:
Be arranged on the micro structure array of described cantilever upper surface and/or lower surface;
Be deposited on the conductive membrane layer that preparation has the cantilever surfaces of described micro structure array.
Preferably, described micro structure array is selected from nano wire, nanocone, the nanometer stick array of oxide semiconductor.
Preferably, the height of described micro structure array is 200 nanometers to 2 micron.
Preferably, described conductive membrane layer is selected from metal film layer, and the thickness of described thin layer is 50 nanometer to 400 nanometers.
Preferably, described electric conducting material is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy formed by above-mentioned metal, or stainless steel and beallon.
Preferably, described first cantilever, the second cantilever and/or the 3rd cantilever are laminated structure.
Preferably, there is electrode sequence difference between described first frictional layer material and the second frictional layer material; Electrode sequence difference is there is between described 3rd frictional layer material and the 4th frictional layer material.
Preferably, the thickness of described first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer is 0.1-0.8 millimeter.
Preferably, described first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer are selected from insulator or semi-conducting material.
Preferably, described insulating material is selected from macromolecule polymer material: polytetrafluoroethylene, dimethyl silicone polymer, polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, regenerated fiber sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, poly-methyl film, methacrylic acid ester film, polyvinyl alcohol film, polyester film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, phenolic resins film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, poly-(vinylidene chloride-co-acrylonitrile) film or polyethylene third diphenol carbonate thin film, polystyrene, polymethyl methacrylate, Merlon or polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride,
The solid solution that described semi-conducting material is selected from silicon, germanium, the IIIth and the Vth compounds of group, the IIth and the VIth compounds of group and is made up of III-V compounds of group and II-VI compounds of group.
Preferably, described first frictional layer or the second frictional layer are selected from electric conducting material; And/or described 3rd frictional layer or the 4th frictional layer are selected from electric conducting material.
Preferably, described electric conducting material is selected from metal, alloy or conductive oxide, and wherein, described metal is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium; Described alloy is selected from alloy, stainless steel, the beallon that gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium are formed.
Preferably, the upper surface of the lower surface of described first frictional layer, the upper surface of the second frictional layer, the lower surface of the 3rd frictional layer and/or the 4th frictional layer has the micro-structural of micron or secondary micron dimension or interspersing or coating of nano material; Described micro-structural is selected from nano wire, nanotube, nano particle, nanometer channel, micron trenches, nanocone, micron cone, nanosphere and micron chondritic.
Preferably, described first frictional layer and the 4th frictional layer are selected from dimethyl silicone polymer, and described second frictional layer and the 3rd frictional layer are selected from beallon.
Preferably, described external force is external periodic force, and the frequency of described external periodic force is close to the resonance frequency of described generator.
Preferably, described generator connects the resistance value of load in megaohm magnitude.
Compared with prior art, the present invention has following beneficial effect:
1, cantilever type impulse generator provided by the invention has three cantilevers be arranged above and below, therefore, within a vibration period, the vibration of flexible second cantilever between the first cantilever and the second cantilever makes generator produce four electrostatic pulse, effectively can change vibration mechanical energy into electric energy.
2, adopt conduction cantilever to replace being arranged on the electrode layer on its surface, the structure of generator can be simplified.Further, the first frictional layer or the second frictional layer adopt electric conducting material, and the 3rd frictional layer or the 4th frictional layer adopt electric conducting material, directly can replace the frictional layer material of conduction, the structure of generator is simplified further with the cantilever of conduction.
3, for the generator adopting the cantilever of conduction to replace frictional layer, micro-structural modification can be carried out on the surface of conduction cantilever, the power output of generator can be improved.In addition, be combined with full-bridge rectifier and can change the ac signal of output into direct current signal, not only can directly apply to the fields such as electrochemistry as the pulse power, can also be capacitor or lithium ion cell charging, also can provide required power supply for various small-sized portable electronic device.
4, electric generator structure of the present invention is simple, and preparation method is easy, and to material without particular/special requirement, the vibration mechanical energy can collecting the generations such as wave, highway, bridge, plant equipment and human motion changes electric energy into, has practical use widely.
Accompanying drawing explanation
Shown in accompanying drawing, above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.Reference numeral identical in whole accompanying drawing indicates identical part.Deliberately do not draw accompanying drawing by actual size equal proportion convergent-divergent, focus on purport of the present invention is shown.
Fig. 1 and Fig. 3 is the structural representation of generator embodiment one of the present invention;
Fig. 2 is the electricity generating principle schematic diagram of generator of the present invention;
Fig. 4 and Fig. 5 is the structural representation of generator embodiment two of the present invention;
Fig. 6 and Fig. 7 is the structural representation of generator embodiment three of the present invention;
Fig. 8 and Fig. 9 is the structural representation arranging micro structure array decorative layer in embodiment four at conduction cantilever surfaces;
Figure 10 is the structural representation of generator embodiment four of the present invention;
The zinc oxide nano array that Figure 11 prepares on the surface of beallon shell fragment, and the electromicroscopic photograph of deposited copper nano thin-film thereon;
Figure 12 is the open circuit voltage measurement result of generator under frequency is 3.7Hz External Force Acting;
Figure 13 is the rectification short circuit current measurement result of generator under frequency is 3.7Hz External Force Acting;
Figure 14 is the open circuit voltage measurement result of generator under frequency is 2.0Hz ~ 5.0Hz External Force Acting;
Figure 15 is the rectification short circuit current measurement result of many cantilevers electrostatic pulse vibrating electricity generator under frequency is 2.0Hz ~ 5.0Hz External Force Acting.
Embodiment
In today of the microelectronic component fast development of Highgrade integration, the research of corresponding energy supply system but relatively lags behind.In order to adapt to miniaturization, portability, the demand such as multi-functional, the energy of these microelectronic components is all directly or indirectly from this traditional energy supply device of battery.And battery is owing to self being difficult to the limitation overcome, comprise larger volume and weight, limited useful life, to the potential hazard etc. of environment and human body, be difficult to adapt to the requirements such as sustainable, low cost, environmental protection.Therefore, develop the alternative energy-provision way satisfied the demands to be significant.
The invention provides a kind of simple cantilever type impulse generator of the structure vibration mechanical energy that wave, highway, bridge, tunnel and human motion etc. exist naturally being converted into electric energy, the power supply of coupling can be provided for microelectronic device.The technical scheme of generator of the present invention is, adopt three elastic cantilever structures of upper, middle and lower, the apparent surface of adjacent two cantilevers, frictional layer is set, when generator is subject to external forces, middle cantilever vibrates between upper lower cantalever, two frictional layers are contacted with each other, by electronics or the transfer of ion generation surface charge, can contact at frictional layer after disconnected from each other between the electrode layer arranged and produce pulse electrical signal output in the moment contacted with each other.
The embodiment of cantilever type impulse generator of the present invention is introduced in detail below in conjunction with accompanying drawing.
Embodiment one:
See Fig. 1, it is elasticity that cantilever type impulse generator comprises at least the second cantilever 200 in the first cantilever 100, second cantilever 200 and the 3rd cantilever 300, three cantilevers, and the first cantilever 100, second cantilever 200 and the 3rd cantilever 300 have one end to be fixed respectively; Wherein, the lower surface of the first cantilever 100 be provided with the first electrode layer 101, first electrode layer 101 lower surface contact be provided with the first frictional layer 102; The upper surface of the second cantilever 200 is provided with the second electrode lay 201, and the upper surface contact of the second electrode lay 201 is provided with the second frictional layer 202, and the upper surface of the second frictional layer 202 and the lower surface of the first frictional layer 102 are oppositely arranged; The lower surface of the second cantilever 200 is provided with third electrode layer 203, and the lower surface contact of third electrode layer 203 is provided with the 3rd frictional layer 204; The upper surface contact that the upper surface of the 3rd cantilever 300 is provided with the 4th electrode layer the 301, four electrode layer 301 is provided with the 4th frictional layer 302, and the upper surface of the 4th frictional layer 302 and the lower surface of the 3rd frictional layer 204 are oppositely arranged.When generator is subject to External Force Acting (effect of vibration), second cantilever 200 vibrates between the first cantilever 100 and the second cantilever 300, make that at least part of second frictional layer 202 upper surface and the first frictional layer 102 lower surface are contacting and separating, at least part of 3rd frictional layer 204 lower surface and the second frictional layer 302 upper surface be contacting and separating, between the first electrode layer 101 and the second electrode lay 201 and/or between third electrode layer 203 and the 4th electrode layer 301, have pulse electrical signal to export.
In cantilever type impulse generator of the present invention, second frictional layer 202 upper surface and the first frictional layer 102 lower surface (or the 3rd frictional layer 204 lower surface and the second frictional layer 302 upper surface) separate completely after can contact completely, also can separate after part contact, the namely vibration of the second cantilever between the first cantilever and the 3rd cantilever, makes the contact area of the second frictional layer 202 upper surface and the first frictional layer 102 lower surface (or the 3rd frictional layer 204 lower surface and the second frictional layer 302 upper surface) occur constantly to change.
The principle of surface charge transfer is there is in cantilever type impulse generator of the present invention when make use of the frictional layer material with differentiated friction electrode sequence." friction electrode sequence " described in the present invention, refer to the sequence carried out according to the attraction degree of material to electric charge, the moment that bi-material is contacting with each other, positive charge is transferred to the material surface of friction electrode sequence Semi-polarity calibration from the material surface that friction electrode sequence Semi-polarity is comparatively born on the contact surface.Up to now, also do not have the mechanism of the explanation Charger transfer that a kind of unified theory can be complete, it is generally acknowledged, this Charger transfer is relevant with the surface work function of material, realizes Charger transfer by the transfer on the contact surface of electronics or ion.It should be noted that, friction electrode sequence is a kind of statistics based on experience, namely bi-material differs far away in the sequence, the probability that the positive negativity that after contact, institute produces electric charge and this sequence are consistent is larger, and the result of reality is subject to the impact of many factors, such as material surface roughness, ambient humidity and whether have Relative friction etc.If the present inventor finds that bi-material is in more close position in friction electrode sequence, after contact CHARGE DISTRIBUTION positive negativity may and do not meet the prediction of this sequence.Needing to further illustrate is that the transfer of electric charge does not need the Relative friction between bi-material, contacts with each other as long as exist, and therefore, strictly speaking, the statement of friction electrode sequence is inaccurate, but uses till today due to historical reasons always.
" contact electric charge " described in the present invention, refer to the material that there are differences two kinds of friction electrode sequence polarity contact and is separated afterwards its surperficial with electric charge, it is generally acknowledged, this electric charge is only distributed in the surface of material, and distribution depth capacity is only about 10 nanometers.Research finds, this electric charge can keep the longer time, the environmentally factor such as middle humidity, its retention time even reaches a couple of days in a few hours, and its quantity of electric charge disappeared can be supplemented by again contacting, therefore, the present inventor thinks, the electricity contacting electric charge in the present invention can be similar to thinks that maintenance is constant.It should be noted that, the symbol of contact electric charge is the symbol of net charge, namely may there is the aggregation zone of negative electrical charge in the some areas with the material surface just contacting electric charge, but the symbol of whole net surface charge is just.
In generator of the present invention, the Material selec-tion of the first frictional layer, the second frictional layer, the 3rd frictional layer and the 4th frictional layer, as long as meet: the first frictional layer material and the second frictional layer material exist the electrode sequence difference that rubs, and the 3rd frictional layer material and the 4th frictional layer material exist the electrode sequence difference that rubs.Generator of the present invention is equivalent to the first electrode layer 101, first frictional layer 102, second frictional layer 202 between the first cantilever and the second cantilever and the second electrode lay 201 forms the first friction nanometer generating unit, and the third electrode layer 203 between the second cantilever and the 3rd cantilever, the 3rd frictional layer 204, the 4th frictional layer 302 and the 4th electrode layer 301 form the second friction nanometer generating unit.Two friction nanometer power generator that generator of the present invention comprises can carry out parallel connection or series connection by external circuit, can obtain higher power output.
Composition graphs 2 is described the described first friction nanometer generating cell operation principle.In Fig. 2, the first frictional layer 102 and the second frictional layer 202 are 2 kinds of materials that there is friction electrode sequence difference, under the initial condition not having External Force Acting,, between the first frictional layer 102 and the second frictional layer 202, there is certain interval (see step A in Fig. 2) in the first cantilever 100 be fixed owing to there being one end respectively and the existence of the second cantilever 200.When there being external force (vibration) to act on, because at least the second cantilever 200 is elastic cantilever, second cantilever 200 moves towards the first cantilever 100, first frictional layer 102 and the second frictional layer 202 are contacted with each other, so there is surface charge transfer in the moment of contact, form layer of surface contact electric charge (see step B in Fig. 2).Because the first frictional layer 102 is different with the position of material in friction electrode sequence of the second frictional layer 202, second frictional layer 202 surface produces negative electrical charge, and the first frictional layer 102 surface produces positive charge, the electricity size of two kinds of electric charges is identical, therefore between the first electrode layer 101 and the second electrode lay 201, do not have electrical potential difference, just there is no flow of charge yet.Because the first cantilever 100 is to the inhibition of the second cantilever 200, second cantilever 200 is moved towards the direction away from the first cantilever 100, first frictional layer 102 starts to be separated with the second frictional layer 202, the entirety be now made up of the first electrode layer 101 and the first frictional layer 102 has clean surplus positive charge, and the entirety that the second electrode lay 104 and the second frictional layer 103 are formed has clean surplus negative electrical charge, therefore between the first electrode layer 101 and the second electrode lay 201, create electrical potential difference.For balancing this electrical potential difference, electronics flows into the first electrode layer 101 by external wire by the second electrode lay 201, thus produce by the transient current (see Fig. 2 in step C) of the first electrode layer to the second electrode lay at external circuit, when the first frictional layer 102 gets back to initial position, spacing between it and the second frictional layer 202 reaches maximum, the electric charge of the two all reaches balance, between the first electrode layer 101 and the second electrode lay 201, there is no electrical potential difference, just do not have electric current to produce (in see Fig. 2 D step) at external circuit yet.When the second cantilever 200 moves towards the first cantilever 100 again, due to the pitch smaller of the first electrode layer 101 and the second frictional layer 202, the negative electrical charge on the second frictional layer 202 surface strengthens the repulsive interaction of negative electrical charge in the first electrode layer 101, the positive charge on the first frictional layer 102 surface also strengthens the sucking action of negative electrical charge in the second electrode lay 201 simultaneously, causes the electrical potential difference between the first electrode layer 101 and the second electrode lay 201 to reduce thus.For balancing this electrical potential difference further, electronics flows into the second electrode lay 201 by external circuit by the first electrode layer 101, thus produces the transient current (see Fig. 2 in step e) contrary with first time direction at external circuit.Second cantilever 200 continues, after the first cantilever 100 makes the first frictional layer 102 and the second frictional layer 202 come in contact, to repeat the situation of B-E step above.As can be seen here, when external force (effect of vibration) acts on cantilever type impulse generator, flexible second cantilever 200 can be impelled to drive the second frictional layer 202 that reciprocal mechanical oscillation occur, and by two processes that are constantly contacting and separating of the first frictional layer 102 and the second frictional layer 103, produce the contrary pulse current in direction respectively, realize the pulse generating between the first electrode layer 101 and the second electrode lay 201.
The electricity generating principle of the second friction nanometer generating unit is identical with the electricity generating principle of the first friction nanometer power generator, flexible second cantilever 200 drives the 3rd frictional layer 204 that reciprocal mechanical oscillation occur, and by two processes that are constantly contacting and separating of the 3rd frictional layer 204 and the 4th frictional layer 302, produce the contrary pulse current in direction respectively, realize the pulse generating between third electrode layer 203 and the 4th electrode layer 301.Therefore, cantilever type impulse generator of the present invention, in the vibration period of the second cantilever 200, can produce 4 pulse electrical signals.
In order to strengthen the vibrating effect of the second cantilever 200 between the first cantilever 100 and the 3rd cantilever 300, can fix a weight M on the second cantilever, the fixed position of weight M is preferably fixed on the free end corresponding with stiff end of the second cantilever 200.
Three cantilevers of cantilever type impulse generator can be separately fixed on different fixtures, and see Fig. 1, one end of the first cantilever 100 is fixed on the first fixture G1, and the other end is free end; One end of second cantilever 200 is fixed on the second fixture G2, and the other end is free end; One end of 3rd cantilever 300 is fixed on the 3rd fixture G3, and the other end is free end.Preferably, the free end of three cantilevers, in the same side of respective stiff end, as shown in Figure 1, can ensure the second frictional layer 202(that the second cantilever 200 drives or the 3rd frictional layer 204) area is maximum when contacting with the first frictional layer 102, the 4th frictional layer 302.
Preferably, three cantilevers can be fixed on same fixture G, and the free end of three cantilevers is in the same side of fixture G, see Fig. 3.
Fixture described in the present invention can be definitely fixing object as building, bridge etc., also can be that relatively-stationary object is as machinery, vehicle etc.
Insulating material, such as conventional high molecular polymer all has triboelectric characteristics, all can as preparation the present invention first frictional layer 102, second frictional layer 202, the material of the 3rd frictional layer 204 and the 4th frictional layer 302, enumerates the macromolecule polymer material that some are conventional herein: polytetrafluoroethylene, dimethyl silicone polymer, polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellophane, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, regenerated fiber sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, poly-methyl film, methacrylic acid ester film, polyvinyl alcohol film, polyester film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, phenolic resins film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, poly-(vinylidene chloride-co-acrylonitrile) film or polyethylene third diphenol carbonate thin film, polystyrene, polymethyl methacrylate, Merlon or polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride.Reason as space is limited; can not carry out exhaustive to all possible material; only list several concrete polymeric material herein from people's reference; but obviously these concrete materials can not become the restrictive factor of scope; because under the enlightenment of invention, those skilled in the art is easy to the material selecting other similar according to the triboelectric characteristics that these materials have.
Relative to insulator, semiconductor and metal all have the triboelectric characteristics easily losing electronics, in the list of friction electrode sequence, be often positioned at end place.Therefore, semiconductor and metal also can as the raw materials of preparation first frictional layer 102 or the second frictional layer 202, and the raw material of the 3rd frictional layer 204 or the 4th frictional layer 302.Conventional semiconductor comprises: silicon, germanium; IIIth and the Vth compounds of group, such as GaAs, gallium phosphide etc.; IIth and the VIth compounds of group, such as cadmium sulfide, zinc sulphide etc.; And the solid solution to be made up of III-V compounds of group and II-VI compounds of group, such as gallium aluminum arsenide, gallium arsenic phosphide etc.Except above-mentioned Crystalline Semiconductors, also have amorphous glass semiconductor, organic semiconductor etc.Non-conductive oxide, conductor oxidate and complex oxide also have triboelectric characteristics, surface charge can be formed at friction process, therefore also frictional layer of the present invention can be used as, the such as oxide of manganese, chromium, iron, copper, also comprises silica, manganese oxide, chromium oxide, iron oxide, cupric oxide, zinc oxide, BiO 2and Y 2o 3; Conventional metal comprises gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and alloy is selected from alloy, stainless steel, the beallon that gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium are formed.Certainly, other materials with conductive characteristic can also be used to serve as the frictional layer material easily losing electronics, such as indium tin oxide ITO.
Found through experiments, when the first frictional layer 102 and the second frictional layer 202 material (or the 3rd frictional layer 204 and the 4th frictional layer 302 material) electronic capability differ larger (namely differing far away in the position in electrode sequence that rubs) time, the signal of telecommunication of generator output is stronger.So, can according to actual needs, select suitable material to prepare the first frictional layer 102, second frictional layer 202, the 3rd frictional layer 204 and the 4th frictional layer 302 to obtain better output effect.
In cantilever type impulse generator, the thickness of the first frictional layer 102, second frictional layer 202, the 3rd frictional layer 204 or the 4th frictional layer 302 has no special requirements, and is preferably 0.1-0.8 millimeter in the present invention.
In generator of the present invention, physical modification can also be carried out to the upper surface of the lower surface of the upper surface of the lower surface of the first frictional layer 102, the second frictional layer 202, the 3rd frictional layer 204 and/or the 4th frictional layer 302, its surface is made to have the micro-structural of micron or secondary micron dimension or interspersing or coating of nano material, to strengthen the contact area of (or between the 3rd frictional layer and the 4th frictional layer) between the first frictional layer and the second frictional layer.Described micro-structural can be selected from nano wire, nanotube, nano particle, nanometer channel, micron trenches, nanocone, micron cone, nanosphere and micron chondritic.Be preferably and comprise at the upper surface of the lower surface of the first frictional layer 102, the upper surface of the second frictional layer 202, the lower surface of the 3rd frictional layer 204 and/or the 4th frictional layer 302 array that above-mentioned micro-structural formed.
Preferably, the first frictional layer 102, second frictional layer 202, the 3rd frictional layer 204 or the 4th frictional layer 302 Material selec-tion elastomeric material, can increase contact area when being subject to External Force Acting.
The material of the first electrode layer 101, the second electrode lay 201, third electrode layer 204 or the 4th electrode layer 302 can select the electrode material commonly used; such as metal, alloy, conductive oxide or organic substance conductor etc., the selection of concrete electrode material is not as the factor limiting scope.In reality, those skilled in the art can according to the selection of each frictional layer material, determine the selection of respective electrode layer material and preparation method, to guarantee the excellent electric contact of electrode layer and corresponding frictional layer (such as the first electrode layer 101 and the first frictional layer 102).The selection of concrete electrode layer material is not as the condition limiting scope.Fixing between each electrode layer and cantilever, can paste fixing mode by material, and the mode preparing electrode layer at cantilever surfaces also can be adopted to arrange.
In cantilever type impulse generator of the present invention, at least the second cantilever 200 is elastic cantilever, and the first cantilever 100 and/or the 3rd cantilever 300 also can be elastic cantilever.The material of elastic cantilever can select to have flexible insulating material, and the materials such as such as electro-insulating rubber, also can select to have flexible conductor material, such as sheet metal, elastomeric alloy sheet etc.
In the present invention, the cantilever of generator can adopt conduction or non-conducting material preparation, if be conduction cantilever, can substitute the electrode layer material being arranged on its surface.This structure saves the step arranging electrode layer at cantilever surfaces, can simplify the structure of generator.
Electric generator structure of the present invention is simple, and preparation method is simple, to material without particular/special requirement, in actual use, only need simply fix and encapsulate, namely can be applicable to the vibration mechanical energy collected wave, highway, bridge, plant equipment etc. and produce, there is practical use widely.
In cantilever type impulse generator of the present invention, the size of the interaction force when major parameter affecting single generator unit power output is the Contact of frictional layer, its interaction force of resonance frequency more close to generator is larger, and the power output of generator is also larger.Therefore, when conditions permits such as mechanical oscillation intensity, in order to obtain larger power output, the first cantilever, the second cantilever and the 3rd cantilever and the first frictional layer, the second frictional layer, the 3rd frictional layer and the 4th frictional layer need to choose the good material of elasticity.
Embodiment two:
The cantilever that first spiral arm and/or the 3rd cantilever can adopt electric conducting material to prepare, is all cantilever prepared by electric conducting material for the first cantilever and the 3rd cantilever here, specifically introduces the structure of generator in the present embodiment.See Fig. 4, the cantilever that the first cantilever 111 is prepared for electric conducting material, the lower surface contact of the first cantilever is provided with the first frictional layer 112; The upper surface of the second cantilever 200 is provided with the second electrode lay 201, and the upper surface contact of the second electrode lay 201 is provided with the second frictional layer 202, and the upper surface of the second frictional layer 202 and the lower surface of the first frictional layer 112 are oppositely arranged; The lower surface of the second cantilever 200 is provided with third electrode layer 203, and the lower surface contact of third electrode layer 203 is provided with the 3rd frictional layer 204; The cantilever that 3rd cantilever 311 is prepared for electric conducting material, the upper surface contact of the 3rd cantilever is provided with the 4th frictional layer 312, and the upper surface of the 4th frictional layer 312 and the lower surface of the 3rd frictional layer 204 are oppositely arranged.
In the present embodiment, the second cantilever also can adopt flexible electric conducting material to prepare, and here for the cantilever that three cantilevers all adopt electric conducting material to prepare, specifically introduces the structure of generator in the present embodiment.See Fig. 5, be with the difference of the generator shown in Fig. 4, the second cantilever 211 adopts flexible electric conducting material to prepare, and instead of the second electrode lay in Fig. 4 and third electrode layer.In the present embodiment, directly contact respectively in the upper and lower surface of the second cantilever 211 and second frictional layer 212 and the 3rd frictional layer 214 are set, the lower surface of the upper surface of the second frictional layer 212 and the first frictional layer 112 is oppositely arranged, and the upper surface of the 4th frictional layer 312 and the lower surface of the 3rd frictional layer 214 are oppositely arranged.
In the present embodiment, the Material selec-tion of generator each several part and identical in embodiment one, here no longer repeat, also identical with embodiment one of the operation principle of generator when being subject to extraneous vibration.
In the present embodiment, if adopt three cantilevers to be the situation (shown in figure 3) be fixed on same fixture, according to the selection of the first cantilever, the second cantilever and/or the 3rd cantilever material, can determine that described fixture is insulator or conductor.The Material selec-tion of described fixture is here not specifically limited.
Embodiment three:
Electric conducting material contacts with insulator or semi-conducting material or is separated after rubbing, Charger transfer can be there is on the surface of the two, in embodiment one or embodiment two, first frictional layer or the second frictional layer can adopt electric conducting material, and same 3rd frictional layer or the 4th frictional layer also can adopt electric conducting material.In the present embodiment, with the frictional layer in the cantilever alternate embodiment two of conduction, simplify the structure of cantilever type impulse generator further.
Below in conjunction with Fig. 6 and Fig. 7, specifically introduce the structure of generator in the present embodiment.
See Fig. 6, the first frictional layer selects conductor material, and can be substituted by the first cantilever 111 conducted electricity, the second frictional layer 212 adopts insulator or semiconductor, and the lower surface of the upper surface of the second frictional layer 212 and the first cantilever 111 is oppositely arranged.Equally, the 4th frictional layer selects conductor material, and can be substituted by the 3rd cantilever 311 conducted electricity, the 3rd frictional layer 214 adopts insulator or semiconductor, and the lower surface of the upper surface of the 3rd cantilever 311 and the 3rd frictional layer 214 is oppositely arranged.Fixture G can select insulating material, to ensure the insulation of the first cantilever, the second cantilever and the 3rd cantilever.In other embodiments, the first frictional layer or the 4th frictional layer also can be only had to adopt conductor material.
See Fig. 7, different from the generator in Fig. 6, here the second frictional layer and the 3rd frictional layer are selected from conductor material, can be substituted by the second cantilever 211 conducted electricity, first frictional layer 112 contact be arranged on conduction the first cantilever 111(substitute the first electrode layer) lower surface, 4th frictional layer 312 contact is arranged on the upper surface of the 3rd cantilever of conduction, and the upper surface of the second cantilever 211 and the lower surface of the first frictional layer 112 are oppositely arranged; The lower surface of the second cantilever 211 and the lower surface of the 4th frictional layer 312 are oppositely arranged.
The material of cantilever of conducting electricity in the present embodiment can be selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy formed by above-mentioned metal, or stainless steel and beallon.Be preferably, the first cantilever, the second cantilever and/or the 3rd cantilever are laminated structure, such as beallon sheet or stainless steel substrates.
In the present embodiment, preferably the first cantilever 111, second cantilever 211 and the 3rd cantilever 311 are elastic cantilever.
In the present embodiment, the Material selec-tion of generator each several part and identical in embodiment one or embodiment two, here no longer repeat.Preferably, in the present embodiment, the first frictional layer 112 and/or the 4th frictional layer 312 select insulating material, preferred, and the first frictional layer 112 and/or the 4th frictional layer 312 select insulating polymeric material.
The power generation process of the generator of the present embodiment is: under the effect of cycle external force, and the second cantilever 211 does forced vibration, periodically contacts with the first frictional layer 112 and is separated with the 4th frictional layer 312 bi-material.There is Charger transfer when contacting, forming opposite polarity contact electric charge on each face when being separated.The increase of bi-material distance during owing to being separated, the contact electric charge of positively charged contacts the electromotive force that electric charge produces on the first cantilever 111 and the second cantilever 211 there are differences with electronegative.When there being applied load, this electrical potential difference causes free electron to redistribute between two cantilevers (electrode layer), to balance this electrical potential difference, thus forms the pulse current by load.When the second cantilever 211 and the first frictional layer 112(or the 4th frictional layer 312) near time, because the distance between the first frictional layer 112 and the second cantilever 211 is changed, electrical potential difference between the first cantilever 111 and the second cantilever 211 occurs again, the CHARGE DISTRIBUTION reaching balance is changed, and the electric charge of redistribution causes again by the pulse current of applied load.It should be noted that, when load accesses, second cantilever 211 and the first frictional layer 112(or the 4th frictional layer 312) be separated and producing contrary electrical potential difference in approach process, therefore, the flow direction of the pulse current in two processes is contrary, and within a vibration period, produce two contacts and separating cycle, thus produce four primary current pulses.Three cantilevers are in parallel by outside lead, as final output.In sum, the generating function of the present embodiment exports the pulse ac electricity with corresponding frequencies under periodic vibration External Force Acting.
Embodiment four:
The micro-structural that the contact surface of the first frictional layer of cantilever type impulse generator of the present invention and/or the second frictional layer (or the 3rd frictional layer and/or the 4th frictional layer) arranges nanometer or micron dimension effectively can increase contact area, improves the power output of generator.
In the present embodiment, the basis of the 3rd embodiment can prepare micro structure array decorative layer at conduction cantilever-face on the surface of frictional layer further, increase generator and conduct electricity the contact area of cantilever and frictional layer when being subject to External Force Acting.
That is, the first cantilever for conduction replaces the generator of the first frictional layer, and the lower surface of the first cantilever is provided with micro structure array decorative layer; Or the 3rd cantilever for conduction replaces the generator of the 4th frictional layer, and the upper surface of the 3rd cantilever is provided with micro structure array decorative layer; Or the second cantilever for conduction replaces the generator of the second frictional layer and the 3rd frictional layer, is provided with micro structure array decorative layer in the upper and lower surface of the second cantilever.Described micro structure array is specially: the oxide micro structure array being prepared in conduction cantilever surfaces, and is deposited on the conductive membrane layer that preparation has the cantilever surfaces of described micro structure array.
Conduction cantilever prepares micro structure array decorative layer process specifically see Fig. 8.
See a step in Fig. 8, on the surface of conduction cantilever 10, (surface of frictional layer particularly) prepares micro structure array 11.Micro structure array 11 can be the material that can be prepared into arbitrarily micron or nanosized microstructure, the array of the micro-structurals such as such as oxide semiconductor nano wire, nano-pillar, nanocone, or nano powder etc.The height of micro structure array is preferably between 200 nanometers to 2 micron.In the present embodiment, preferred micro structure array is conductor oxidate, can select ZnO, SnO 2deng semi-conducting material.Concrete preparation method can be the preparation method of nano material that hydro thermal method etc. is commonly used.
See b step in Fig. 8, cantilever 10 surface of micro structure array 11 is had to adopt the mode depositing electrically conductive thin layers 12 such as magnetron sputtering in preparation.Conductive film material can select metallic film, conductive oxide film.The deposit thickness of film is preferably 50 nanometer to 400 nanometers.In the present embodiment, conductive film is preferably metallic film, the film of the materials such as such as Ag, Au, Cu, Al.
In the present embodiment, adopt chemical method growing nano array at conduction cantilever surfaces, then use physical method depositing electrically conductive thin film electrode layer, to reach the object increasing contact electrode material surface roughness.The present inventor thinks, when the nano array structure that the chemistry of this material surface and physical synthesis method of modifying obtain and another kind of thin-film material contact with each other, these nano-arrays can insert another kind of material to increase friction and contact area, there are some researches show, extra friction effectively can increase with the contact area of increase and contacts charge density, therefore, the existence of these nano-arrays can improve the power output of generator of the present invention.
The second cantilever for conduction replaces the generator of the second frictional layer and the 3rd frictional layer, all micro structure array can be prepared in the upper and lower surface of the second cantilever, see Fig. 9, at the equal deposition oxide micro structure array 11 of the upper and lower surface of the second cantilever 10, then there is the upper and lower surface depositing electrically conductive thin layer 12 of the second cantilever of oxide micro structure array 11 in preparation, the upper and lower surface of the second cantilever obtains the micro structure array of conduction.
Select beallon material with the overarm arm of three conductions, the first frictional layer and the 4th frictional layer adopt polydimethylsiloxane materials, specifically introduce the preparation process of the cantilever type impulse generator of the present embodiment.
See Figure 10, to the beallon shell fragment of 6.5 cm x 2.8 cm x 0.2 millimeter be of a size of as the second cantilever 211, the Hydrothermal Growth of lower surface employing thereon diameter is the nanometer zinc oxide array of 200 nanometers, then on zinc oxide array deposit thickness be 100 nanometers copper film layer as contact electrode formed micro structure array 215, Figure 11 be the copper film layer surface topography deposited; Using the beallon shell fragment of two chip size 4.5 cm x 2.8 cm x 0.2 millimeter as the first cantilever 111 and the 3rd cantilever 311, then the first cantilever 111 lower surface and the 3rd cantilever 311 upper surface respectively spin coating one deck be of a size of 3.2 cm x 2.8 cm x, 0.6 millimeter of dimethyl silicone polymer insulating barrier as the first frictional layer 112 and the second frictional layer 312; Finally with rectangle fixture G, three cantilevers are fixed up, make the first cantilever 111 and the 3rd cantilever 311 respectively directly over the second cantilever 211 and immediately below, and the free end of three cantilevers is all in the same side of fixture G, and the first cantilever 111 and the 3rd cantilever 311 and the second cantilever 211 is made to have a fixed gap.In the weight M that the free end fixed mass of the second cantilever 211 is 12.59 grams, to strengthen the vibrating effect of the second cantilever between the first cantilever and the second cantilever.
In the present embodiment, the roughness on Copper thin film contact electrode layer (the micro structure array decorative layer on the second cantilever 211 surface) surface has larger impact to power output, it is generally acknowledged, material surface is more coarse, the area that can effectively contact is less, produce less contact electric charge, thus correspondingly obtain lower power output.But the present inventor is surprised to find that, introduces the special appearance with certain surface roughness and can improve power output on the contrary.By by nanometer zinc oxide array and the metallic film nano-array conductive layer in conjunction with formation second cantilever surfaces, the Chemical Physics comprehensive modification method of this material surface can improve power output of the present invention widely.The present inventor thinks, through metallic film material and the easy elastically-deformable dimethyl silicone polymer insulating barrier contact squeeze of this method modification, these nano-arrays can increase contact area and friction, there are some researches show, extra contact area contacts charge density with rubbing effectively to increase, therefore, the setting of these nano-arrays can improve the power output of generator.
The signal of telecommunication that the generator of various embodiments of the present invention exports is the alternating-current pulse signal of telecommunication, and can connect full-bridge rectifier at the output of generator, be the DC pulse signal of telecommunication by the output signal rectification of generator.The pulse electrical signal that generator exports, not only can directly apply to the fields such as electrochemistry as the pulse power, can also be used to charge to energy-storage travelling wave tube, such as capacitor or lithium ion battery etc., and the electric energy stored can be used for providing electric power for portable compact electronic equipment, be with a wide range of applications.
Under the effect of external periodic force, cantilever type impulse generator in the present embodiment is carried out to the measurement of open circuit voltage and rectification short circuit current, result respectively as shown in Figure 12 and Figure 13, Figure 12 is the open circuit voltage measurement result of cantilever type impulse generator under frequency is the effect of 3.7Hz external periodic force, and Figure 13 is the rectification short circuit current measurement result of cantilever type impulse generator under frequency is the effect of 3.7Hz external periodic force.Can see from experimental result, open circuit voltage and the rectification short circuit current maximum of cantilever type impulse generator reach 101 volts and 55.7 microamperes respectively.
Under the effect of external periodic force, particularly under low-frequency mechanical vibrations external force, the open circuit voltage of different frequency and the measurement of rectification short circuit current have been carried out to cantilever type impulse generator in the present embodiment, result respectively as shown in Figure 14 and Figure 15, Figure 14 is the open circuit voltage measurement result of cantilever type impulse generator under frequency is the effect of 2.5-5.0Hz external periodic force, and Figure 15 is the rectification short circuit current measurement result of cantilever type impulse generator under frequency is the effect of 2.5-5.0Hz external periodic force.Found that, the power output of size to cantilever type impulse generator of the present invention of vibration frequency has an impact, close to resonance frequency by the larger contact area of generation and more effective friction, because contact area reaches extreme value, contact charge density can not increase further, and the output of cantilever type impulse generator reaches extreme value.
Find in the research process of inventor, at the cantilever type impulse generator of various embodiments of the present invention in the middle of real work, the resistance value of applied load has a great impact real output.Along with the increase of load resistor value, the voltage at load two ends increases, and is reduced by the electric current of load, and real output first increases and then decreases, and there is maximum.The present inventor finds through many experiments, and the resistance value corresponding to power output maximum is in megaohm magnitude, and therefore, the present invention can at utmost play its effect when the resistance value of load is megaohm magnitude.It should be noted that, " power output " used herein, refer to the product of the maximum of pulse current and the maximum in the pulse voltage of load two ends formation, namely instantaneous pole is high-power.
The power output of generator of the present invention is except being subject to outside environmental elements, the size of involving vibrations frequency, outside the impact such as the resistance value of applied load, also be subject to the Design and manufacture of cantilever type impulse generator itself, comprise the selection of frictional layer and electrode layer material, and the size of each several part, and the impact of the physics and chemistry character of frictional layer material surface etc.
The above is only preferred embodiment of the present invention, not does any pro forma restriction to the present invention.Any those of ordinary skill in the art, do not departing under technical solution of the present invention ambit, the Method and Technology content of above-mentioned announcement all can be utilized to make many possible variations and modification to technical solution of the present invention, or be revised as the Equivalent embodiments of equivalent variations.Therefore, every content not departing from technical solution of the present invention, according to technical spirit of the present invention to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.

Claims (28)

1. a cantilever type impulse generator, is characterized in that, comprising: the first cantilever having one end to be fixed respectively, the second cantilever and the 3rd cantilever, wherein,
The lower surface of described first cantilever is provided with the first electrode layer, and the lower surface contact of described first electrode layer is provided with the first frictional layer;
The upper surface of described second cantilever is provided with the second electrode lay, and the upper surface contact of described the second electrode lay is provided with the second frictional layer, and the upper surface of described second frictional layer and the lower surface of described first frictional layer are oppositely arranged; The lower surface of described second cantilever arranges third electrode layer, and the lower surface contact of described third electrode layer is provided with the 3rd frictional layer; Described second cantilever is elastic cantilever;
The upper surface of described 3rd cantilever is provided with the 4th electrode layer, and the upper surface contact of described 4th electrode layer is provided with the 4th frictional layer; The upper surface of described 4th frictional layer and the lower surface of described 3rd frictional layer are oppositely arranged;
When described generator is subject to External Force Acting, described second cantilever vibrates between described first cantilever and the 3rd cantilever, described second frictional layer upper surface and described first frictional layer lower surface are at least partly contacting and separating, at least partly described 3rd frictional layer lower surface and described 4th frictional layer upper surface be contacting and separating, have pulse electrical signal to export between described first electrode layer and the second electrode lay and/or between described third electrode layer and the 4th electrode layer.
2. cantilever type impulse generator according to claim 1, is characterized in that, the free end of described first cantilever, the second cantilever and the 3rd cantilever is all in the same side of stiff end.
3. cantilever type impulse generator according to claim 1 and 2, is characterized in that, described first cantilever, the second cantilever and the 3rd cantilever are fixed in same fixture.
4. cantilever type impulse generator according to claim 1 and 2, is characterized in that, described second cantilever also comprises weight, and described weight is arranged on the free end of described second cantilever.
5. cantilever type impulse generator according to claim 1 and 2, is characterized in that, described first cantilever and/or the 3rd cantilever are elastic cantilever.
6. cantilever type impulse generator according to claim 1 and 2, is characterized in that, described second cantilever is electric conducting material, and described second cantilever substitutes described the second electrode lay and third electrode layer.
7. cantilever type impulse generator according to claim 1 and 2, is characterized in that, described first cantilever and/or the 3rd cantilever adopt electric conducting material; Described first cantilever substitutes described first electrode layer, and/or described 3rd cantilever substitutes described 4th electrode layer.
8. cantilever type impulse generator according to claim 6, is characterized in that, described second frictional layer and described 3rd frictional layer adopt electric conducting material, and described second cantilever replaces described second frictional layer and described 3rd frictional layer.
9. cantilever type impulse generator according to claim 8, is characterized in that, upper surface and/or the lower surface of described second cantilever are provided with micro structure array decorative layer.
10. cantilever type impulse generator according to claim 7, is characterized in that, described first frictional layer adopts electric conducting material, and described first cantilever replaces described first frictional layer;
And/or,
Described 4th frictional layer adopts electric conducting material, and described 3rd cantilever replaces described 4th frictional layer.
11. cantilever type impulse generators according to claim 10, is characterized in that, the lower surface of described first cantilever and/or the upper surface of the 3rd cantilever are provided with micro structure array decorative layer.
12. cantilever type impulse generators according to claim 9 or 11, it is characterized in that, described micro structure array decorative layer comprises:
Be arranged on the micro structure array of described cantilever upper surface and/or lower surface;
Be deposited on the conductive membrane layer that preparation has the cantilever surfaces of described micro structure array.
13. cantilever type impulse generators according to claim 12, is characterized in that, described micro structure array is selected from nano wire, nanocone, the nanometer stick array of oxide semiconductor.
14. cantilever type impulse generators according to claim 13, is characterized in that, the height of described micro structure array is 200 nanometers to 2 micron.
15. cantilever type impulse generators according to claim 13 or 14, it is characterized in that, described conductive membrane layer is selected from metal film layer, and the thickness of described thin layer is 50 nanometer to 400 nanometers.
16. according to Claim 8-11 and cantilever type impulse generator described in any one of 13-14, it is characterized in that, described electric conducting material is selected from gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium, and the alloy to be formed by gold, silver, platinum, aluminium, nickel, copper, titanium or chromium, or stainless steel and beallon.
17. cantilever type impulse generators according to claim 1-2, any one of 8-11 and 13-14, it is characterized in that, described first cantilever, the second cantilever and/or the 3rd cantilever are laminated structure.
18. cantilever type impulse generators according to claim 1-2, any one of 8-11 and 13-14, is characterized in that there is electrode sequence difference between described first frictional layer material and the second frictional layer material; Electrode sequence difference is there is between described 3rd frictional layer material and the 4th frictional layer material.
19. cantilever type impulse generators according to claim 18, is characterized in that, the thickness of described first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer is 0.1-0.8 millimeter.
20. cantilever type impulse generators according to claim 18, is characterized in that, described first frictional layer, the second frictional layer, the 3rd frictional layer and/or the 4th frictional layer are selected from insulator or semi-conducting material.
21. cantilever type impulse generators according to claim 20, it is characterized in that, described insulating material is selected from macromolecule polymer material: cellophane or polyester film.
22. cantilever type impulse generators according to claim 20, it is characterized in that, described insulating material is selected from macromolecule polymer material: polytetrafluoroethylene, dimethyl silicone polymer, polyimide film, aniline-formaldehyde resin film, polyformaldehyde film, ethyl cellulose film, polyamide film, melamino-formaldehyde film, polyethylene glycol succinate film, cellulose acetate film, polyethylene glycol adipate film, polydiallyl phthalate film, regenerated fiber sponge films, elastic polyurethane body thin film, styrene-acrylonitrile copolymer copolymer film, styrene-butadiene-copolymer film, staple fibre film, poly-methyl film, methacrylic acid ester film, polyvinyl alcohol film, polyisobutene film, polyurethane flexible sponge films, pet film, polyvinyl butyral film, phenolic resins film, neoprene film, butadiene-propylene copolymer film, natural rubber films, polyacrylonitrile film, poly-(vinylidene chloride-co-acrylonitrile) film or polyethylene third diphenol carbonate thin film, polystyrene, polymethyl methacrylate, Merlon or polymeric liquid crystal copolymer, polychlorobutadiene, polyacrylonitrile, poly-biphenol carbonic ester, CPPG, polyvinylidene chloride, polyethylene, polypropylene, polyvinyl chloride,
The solid solution that described semi-conducting material is selected from silicon, germanium, the IIIth and the Vth compounds of group, the IIth and the VIth compounds of group and is made up of III-V compounds of group and II-VI compounds of group.
23. cantilever type impulse generators according to claim 18, is characterized in that, described first frictional layer or the second frictional layer are selected from electric conducting material; And/or described 3rd frictional layer or the 4th frictional layer are selected from electric conducting material.
24. cantilever type impulse generator according to claim 23, it is characterized in that, described electric conducting material is selected from metal, alloy or conductive oxide, wherein, described metal is selected from gold, silver, platinum, aluminium, nickel, copper, titanium or chromium; Described alloy is selected from alloy, stainless steel, the beallon that gold, silver, platinum, aluminium, nickel, copper, titanium, chromium or selenium are formed.
25. cantilever type impulse generators according to claim 1-2, any one of 8-11,13-14 and 19-24, it is characterized in that, the lower surface of the lower surface of described first frictional layer, the upper surface of the second frictional layer, the 3rd frictional layer and/or the upper surface of the 4th frictional layer have the micro-structural of micron or secondary micron dimension or interspersing or coating of nano material; Described micro-structural is selected from nano wire, nanotube, nano particle, nanometer channel, micron trenches, nanocone, micron cone, nanosphere and micron chondritic.
26. cantilever type impulse generators according to claim 1-2, any one of 8-11,13-14 and 19-24, it is characterized in that, described first frictional layer and the 4th frictional layer are selected from dimethyl silicone polymer, and described second frictional layer and the 3rd frictional layer are selected from beallon.
27. cantilever type impulse generators according to claim 1-2, any one of 8-11,13-14 and 19-24, it is characterized in that, described external force is external periodic force, and the frequency of described external periodic force is close to the resonance frequency of described generator.
28. cantilever type impulse generators according to claim 1-2, any one of 8-11,13-14 and 19-24, is characterized in that, described generator connects the resistance value of load in megaohm magnitude.
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