CN103779247B - 一种将功率半导体模块端子焊接到基板的方法 - Google Patents
一种将功率半导体模块端子焊接到基板的方法 Download PDFInfo
- Publication number
- CN103779247B CN103779247B CN201410034060.5A CN201410034060A CN103779247B CN 103779247 B CN103779247 B CN 103779247B CN 201410034060 A CN201410034060 A CN 201410034060A CN 103779247 B CN103779247 B CN 103779247B
- Authority
- CN
- China
- Prior art keywords
- substrate
- terminal
- welding head
- soldering
- power semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000758 substrate Substances 0.000 title claims abstract description 91
- 238000005476 soldering Methods 0.000 title claims abstract description 34
- 239000004065 semiconductor Substances 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000003466 welding Methods 0.000 claims abstract description 27
- 229910000679 solder Inorganic materials 0.000 claims abstract description 20
- 239000000463 material Substances 0.000 claims abstract description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 19
- 239000000919 ceramic Substances 0.000 claims description 12
- 229910052802 copper Inorganic materials 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 12
- 239000011889 copper foil Substances 0.000 claims description 7
- 239000005030 aluminium foil Substances 0.000 claims description 6
- 238000005269 aluminizing Methods 0.000 claims description 6
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical group O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 5
- 208000037656 Respiratory Sounds Diseases 0.000 description 3
- 229910017083 AlN Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/90—Methods for connecting semiconductor or solid state bodies using means for bonding not being attached to, or not being formed on, the body surface to be connected, e.g. pressure contacts using springs or clips
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
- H01L2021/60007—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process
- H01L2021/60022—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving a soldering or an alloying process using bump connectors, e.g. for flip chip mounting
- H01L2021/60097—Applying energy, e.g. for the soldering or alloying process
- H01L2021/60195—Applying energy, e.g. for the soldering or alloying process using dynamic pressure, e.g. ultrasonic or thermosonic bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/90—Methods for connecting semiconductor or solid state bodies using means for bonding not being attached to, or not being formed on, the body surface to be connected, e.g. pressure contacts using springs or clips
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410034060.5A CN103779247B (zh) | 2014-01-24 | 2014-01-24 | 一种将功率半导体模块端子焊接到基板的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410034060.5A CN103779247B (zh) | 2014-01-24 | 2014-01-24 | 一种将功率半导体模块端子焊接到基板的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103779247A CN103779247A (zh) | 2014-05-07 |
CN103779247B true CN103779247B (zh) | 2016-11-23 |
Family
ID=50571356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410034060.5A Active CN103779247B (zh) | 2014-01-24 | 2014-01-24 | 一种将功率半导体模块端子焊接到基板的方法 |
Country Status (1)
Country | Link |
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CN (1) | CN103779247B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104900617A (zh) * | 2015-05-04 | 2015-09-09 | 嘉兴斯达半导体股份有限公司 | 一种功率半导体模块内部连接结构 |
CN112271142A (zh) * | 2020-10-28 | 2021-01-26 | 安徽瑞迪微电子有限公司 | Igbt功率模块端子与裸铜基板的焊接工艺 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101559547A (zh) * | 2009-04-09 | 2009-10-21 | 上海交通大学 | 适用于超声纳米焊接中焊头与样品的平行度调节方法 |
CN103477429A (zh) * | 2011-05-13 | 2013-12-25 | 富士电机株式会社 | 半导体器件及其制造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010140993A (ja) * | 2008-12-10 | 2010-06-24 | Fuji Electric Systems Co Ltd | 半導体装置およびその製造方法 |
JP2013051366A (ja) * | 2011-08-31 | 2013-03-14 | Hitachi Ltd | パワーモジュール及びその製造方法 |
-
2014
- 2014-01-24 CN CN201410034060.5A patent/CN103779247B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101559547A (zh) * | 2009-04-09 | 2009-10-21 | 上海交通大学 | 适用于超声纳米焊接中焊头与样品的平行度调节方法 |
CN103477429A (zh) * | 2011-05-13 | 2013-12-25 | 富士电机株式会社 | 半导体器件及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN103779247A (zh) | 2014-05-07 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171214 Address after: Jiaxing City, Zhejiang province 314006 Nanhu District Branch Road No. 988 Patentee after: STARPOWER SEMICONDUCTOR Ltd. Address before: Jiaxing City, Zhejiang province 314006 Ring Road No. 18 Sidalu Patentee before: JIAXING STARPOWER MICROELECTRONICS Co.,Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: No.988, Kexing Road, Nanhu District, Jiaxing City, Zhejiang Province Patentee after: Star Semiconductor Co.,Ltd. Address before: No.988, Kexing Road, Nanhu District, Jiaxing City, Zhejiang Province Patentee before: STARPOWER SEMICONDUCTOR Ltd. |