CN103771419B - 一种去除多晶硅中硼的方法 - Google Patents
一种去除多晶硅中硼的方法 Download PDFInfo
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Description
造渣剂 | 温度/℃ | 通气方式 | 硼含量/ppm | |
实施例1 | 无 | 1500~1600 | 与硅液接触反应 | 1.3 |
实施例2 | 无 | 1600~1700 | 与硅液接触反应 | 1.9 |
实施例3 | 1%CaO | 1500~1600 | 与硅液接触反应 | 0.2 |
实施例4 | 5%CaO | 1600~1700 | 与硅液接触反应 | 0.4 |
对比例 | 无 | 2000~2100 | 直接通入硅液 | 3.5 |
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CN103771419A CN103771419A (zh) | 2014-05-07 |
CN103771419B true CN103771419B (zh) | 2016-03-30 |
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CN114671438B (zh) * | 2022-03-31 | 2023-05-09 | 新疆西部合盛硅业有限公司 | 一种重量与温度联锁自动控制吹氧精炼的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101555015A (zh) * | 2009-05-19 | 2009-10-14 | 厦门大学 | 一种多晶硅的除硼提纯方法及装置 |
CN101759186A (zh) * | 2010-02-26 | 2010-06-30 | 乐山乐电天威硅业科技有限责任公司 | 改良西门子法生产多晶硅工艺中除硼、磷的方法 |
CN102030335A (zh) * | 2010-11-16 | 2011-04-27 | 天津大学 | 双塔热耦反应精馏除去氯硅烷体系中硼杂质的方法和装置 |
CN103043665A (zh) * | 2013-01-24 | 2013-04-17 | 厦门大学 | 一种硅粉的制备方法 |
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JPH04193706A (ja) * | 1990-11-28 | 1992-07-13 | Kawasaki Steel Corp | シリコンの精製方法 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101555015A (zh) * | 2009-05-19 | 2009-10-14 | 厦门大学 | 一种多晶硅的除硼提纯方法及装置 |
CN101759186A (zh) * | 2010-02-26 | 2010-06-30 | 乐山乐电天威硅业科技有限责任公司 | 改良西门子法生产多晶硅工艺中除硼、磷的方法 |
CN102030335A (zh) * | 2010-11-16 | 2011-04-27 | 天津大学 | 双塔热耦反应精馏除去氯硅烷体系中硼杂质的方法和装置 |
CN103043665A (zh) * | 2013-01-24 | 2013-04-17 | 厦门大学 | 一种硅粉的制备方法 |
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Address after: 164399, Heihe, Heilongjiang Province five Xiushan Russian electric processing zone Applicant after: HEIHE HESHENG PHOTOVOLTAIC SCIENCE & TECHNOLOGY CO., LTD. Applicant after: He Shenggui industry incorporated company Address before: 164399, Heihe, Heilongjiang Province five Xiushan Russian electric processing zone Applicant before: HEIHE HESHENG PHOTOVOLTAIC SCIENCE & TECHNOLOGY CO., LTD. Applicant before: Zhejiang Hesheng Silicon Industry Co., Ltd. |
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