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CN103760173B - The optical element surface defects screening apparatus and screening method - Google Patents

The optical element surface defects screening apparatus and screening method Download PDF

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CN103760173B
CN103760173B CN 201410015005 CN201410015005A CN103760173B CN 103760173 B CN103760173 B CN 103760173B CN 201410015005 CN201410015005 CN 201410015005 CN 201410015005 A CN201410015005 A CN 201410015005A CN 103760173 B CN103760173 B CN 103760173B
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CN 201410015005
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CN103760173A (en )
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梁龙
李学春
姜有恩
林圆圆
陈醉雨
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中国科学院上海光学精密机械研究所
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Abstract

一种光学元件表面缺陷筛查装置和筛查方法,该装置的构成包括:脉冲激光源、电动位移台、聚焦透镜、PIN管、数据采集卡、计算机和固定件,待测的光学元件通过所述的固定件固定在所述的电动位移台上,在所述的脉冲激光源照射在所述的光学元件上反射后,在该反射光束方向依次设置所述的聚焦透镜和PIN管,所述的PIN管位于所述的该聚焦透镜的像平面;所述的PIN管输出的信号经所述的数据采集卡采集送所述的计算机,所述的计算机的输出端接所述的电动位移台的控制端。 An optical element surface defect screening apparatus and screening method, constituting the apparatus comprising: a pulsed laser source, an electric translation stage, the focus lens, PIN tube, data acquisition card, a computer and a fixed member of the optical element measured by said fixing member is fixed to said motor displacement stage, after the irradiation of the laser pulse source reflected on the optical element, the focusing lens is provided and the PIN diode are sequentially reflected beam direction, the the PIN diode located at the image plane of the focusing lens; data acquisition card PIN diode according to signals output from said collection computer to send the said output end of said electric computer Stages the control side. 本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 The present invention may be performed in real time and recording position information of the basic size and the like of the optical element surface defect, having a simple, real-time, automatic, reliable characteristics.

Description

光学元件表面缺陷筛查装置和筛查方法 The optical element surface defects screening apparatus and screening method

技术领域 FIELD

[0001] 本发明涉及一种光学元件表面缺陷,特别是一种光学元件表面缺陷筛查装置和筛查方法。 [0001] The present invention relates to an optical element surface defects, particularly surface defects, an optical element and a screening method of screening apparatus.

背景技术 Background technique

[0002] 光学元件表面缺陷包括元件加工过程中形成的麻点和划痕、表面镀膜内部的杂质,光学元件内部折射率不均匀性形成的小透镜,以及光学元件使用过程中形成的激光损伤等。 [0002] The optical element comprises a surface pitting defects formed during processing element and scratches, coating the interior surface of the impurity, the internal laser damage lenses and other small non-uniformity index optical element is formed, and an optical element formed during use . 部分损伤点在激光辐照下会发生损伤增长,并且损伤点引起的光场调制会破坏后续光路中的光学元件。 Part damage points increase damage may occur under the laser irradiation, and the light field modulation due to the damage point will destroy the subsequent optical elements in the optical path.

[0003] 现有的缺陷损伤检测技术主要利用激光与光学元件相互作用产生的各种效应来实现。 [0003] Damage conventional defect detection using various techniques to achieve the main effect of the laser generated by the interaction of the optical element. 常见的有等离子体闪光法、散光法、光热法等。 Common are plasma flash method, astigmatism method, a photothermal method.

[0004] 等离子体闪光法是指当脉冲激光作用于光学元件表面,缺陷点会吸收激光,辐照点会迅速升温产生气化,导致原子电离,产生等离子体,出现闪光。 [0004] Plasma flash method means that when the pulse laser light applied to the surface of the optical element, the defective dot will absorb laser light irradiation points are vaporized to produce rapid heating, resulting in ionization of atoms, generating a plasma, by blinking.

[0005] 散射法是采用激光照射光学元件,缺陷点在激光辐照后形成损失后会产生散射光,通过散射光的强度变化来确定该点是不是缺陷点。 [0005] scattering method using a laser irradiation optical element, formed after the defective dot-loss after laser irradiation will produce scattered light, to determine whether the point is not a point defect by the scattered light intensity variation. 目前,常用的缺陷检测技术多采用白光光源照射待测元件产生散射光,通过面阵CCD探测缺陷的信息。 Currently, conventional defect detection techniques use more white light source irradiating the test element to generate scattered light information area CCD defect detection. 利用CCD采集激光辐照前后辐照区域的图像,采用图像相减法实现缺陷判别。 The CCD image acquisition area before and after irradiation of laser irradiation, using the image subtraction method of Defect discrimination. 对介质膜上一点采集两次图像,当两幅图像出现差异时认为该点为缺陷点。 Acquisition of the dielectric film that two images, that is the point when the two point defect image discrepancies. 图像相减法对系统稳定性要求高,否则差分后会出现虚像,从而导致误判。 Subtraction high image stability requirements of the system, there would be the difference of the virtual image, thus resulting in false positives. 另外由于面阵CCD的感光面积较小,对于大口径光学元件的检测需要分块进行,一块光学元件需要采集多幅图像,耗时较久。 Also because of the small area of ​​the photosensitive CCD array, the optical element for testing large block needs to be, a need to capture a plurality of images of the optical element, takes longer.

[0006] 由此可见,如何实现光学元件表面缺陷位置快速、实时、准确记录成为一个急需解决的问题。 [0006] Thus, the surface of the optical element how fast defect location, in real time, accurate records become an urgent problem.

发明内容 SUMMARY

[0007] 本发明针对上述现有检测装置存在的不足,提出一种光学元件表面缺陷筛查装置和筛查方法。 [0007] The present invention is directed to the above-described disadvantages of the conventional detection apparatus provides an optical element surface defects screening apparatus and screening method. 该装置可对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动和可靠的特点。 The device may be real time and recording position information of the basic size and the like of the optical element surface defect, having a simple, real-time, automatic and reliable.

[0008] 本发明的技术解决方案如下: [0008] The technical solutions of the present invention are as follows:

[0009] -种光学元件表面缺陷筛查装置,特点在于其构成包括:脉冲激光源、电动位移台、聚焦透镜、PIN管、数据采集卡、计算机和固定件,待测的光学元件通过所述的固定件固定在所述的电动位移台上,在所述的脉冲激光源照射在所述的光学元件上反射后,在该反射光束方向依次设置所述的聚焦透镜和PIN管,所述的PIN管位于所述的该聚焦透镜的像平面;所述的PIN管输出的信号经所述的数据采集卡采集送所述的计算机,所述的计算机的输出端接所述的电动位移台的控制端。 [0009] - an optical element surface defects species screening apparatus characterized by their configuration comprising: a pulsed laser source, an electric translation stage, the focus lens, PIN tube, data acquisition card, a computer and a fixed member of the optical element measured by the the fixing member fixed on the electric stage according to the displacement, after the irradiation of the pulsed laser source is reflected on the optical element is provided sequentially in the direction of the reflected light beam of the focus lens and a PIN diode, according to the PIN diode located at the image plane of the focusing lens; data acquisition card PIN diode according to signals output from said collection computer to send the said output end of said computer station electric displacement Control terminal.

[0010] 所述的计算机控制所述的电动位移台的运动速度、运动距离,同时控制所述的数据采集卡与所述的脉冲激光源的脉冲时钟同步。 [0010] The computer controls the speed of movement of the electric stage displacement, movement distance, while the clock pulse control of the data acquisition card and the pulsed laser source of synchronization.

[0011] 利用上述光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,其特点在于该方法包括下列步骤: [0011] The method of defect screening apparatus for screening an optical element surface defects by a surface of the optical element, characterized in that the method comprises the steps of:

[0012] ①将待测的光学元件通过所述的固定件固定在所述的电动位移台上,启动所述的计算机驱动并控制所述的电动位移台将所述的脉冲激光源输出的脉冲激光移动到待测光学元件扫描的起点,设定所述的脉冲激光源输出的脉冲激光的脉冲间隔为At,设电动位移台的运动速度为u; [0012] ① optical element measured by said fixing member is fixed in the electric stage according to the displacement, to start the computer drives and controls the output of the pulsed laser source to an electric station according to the displacement pulse move to the start point of the laser scanning optical device under test, the pulses of the pulse laser light is set according to the output of the pulsed laser source interval At, the moving speed of the electric translation stage is set U;

[0013] ②所述的计算机同步控制所述的脉冲激光源、电动位移台和数据采集卡同步工作:当所述的脉冲激光源的第一个脉冲辐照所述的待测光学元件的同时,所述的数据采集卡开始工作,数据采集卡以时间to为起点,在单脉冲内采集m个有效电压值U1,U2,U3…un…Um 并输入计算机,再通过计算机对所述的m个数据采用求和计算\ = U,,第一个脉冲的电压i 记为Vi,所述的脉冲激光源对所述的待测光学元件进行扫描,以后依次记为ν2,ν3···ν Ν; [0013] ② The computer-synchronous control of the pulsed laser source, the electric displacement data acquisition card and the station synchronous operation: when a first test pulse irradiation of the optical element according to the pulsed laser source at the same time the data acquisition card starts to work, the data acquisition card to time as a starting point, the effective voltage value of m collected in a single pulse U1, U2, U3 ... un ... Um and entered into the computer, then a computer of the m sum calculation using the data \ = U ,, a first voltage pulse is referred to as i Vi, the pulsed laser source to the optical element under test is scanned sequentially after referred to as ν2, ν3 ··· ν Ν;

[0014] ③电压序列¥1、¥2,¥3~¥^设置一个允许的最大变化值&¥,当电压¥1的变化大于八V时,记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为U*k* At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 Maximum [0014] ③ voltage sequence ¥ 1, ¥ 2, ¥ 3 ~ ¥ ^ setting an allowable variation value & ¥, when the voltage ¥ variation greater than eight V, referred to as Vk, determined corresponding to the point on the optical element is a defective dot, recording time from the beginning of the scan to the point defect occurrence is k * At, the displacement of the working station distance is U * k * At, due to the known dimensions of the optical elements to obtain location information of the specific defect sites, while, determining the relative size of the point defect according to the size of the value of Vk.

[0015] 本发明的技术效果如下: [0015] Technical effects of the present invention are as follows:

[0016] 本发明的高速PIN管相对于常用的大面阵C⑶成本较低,且转换速度快。 [0016] The present invention is a high speed PIN diode with respect to the commonly used area array C⑶ lower cost, and the conversion speed.

[0017] 本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 [0017] The present invention may be performed in real time and recording position information of the basic size and the like of the optical element surface defect, having a simple, real-time, automatic, reliable characteristics.

附图说明 BRIEF DESCRIPTION

[0018] 图1是本发明光学元件表面缺陷筛查过程的记录装置的示意图。 [0018] FIG. 1 is a schematic view of an optical element of the present invention, the surface defects of the recording apparatus of the screening process.

[0019] 图2是本装置扫描时脉冲光辐照位置示意图。 [0019] FIG. 2 is a schematic view of the position of the pulsed light irradiation apparatus of the present scan.

[0020] 图3是数据采集卡采集电压值与激光脉冲辐照的时序示意图。 [0020] FIG. 3 is a timing diagram illustrating the voltage value acquired laser pulse irradiation data acquisition card.

[0021 ]图中:1 一脉冲激光,2 -电动位移台,3 -聚焦透镜,4一PIN管,5 -数据采集卡,6 - 计算机,7 -固定件和8 -待测光学元件。 [0021] FIG: a pulse laser 1, 2 - electric translation stage, 3 - focusing lens, a PIN diode 4, 5 - data acquisition card, 6 - Computer 7 - Fixed members and 8 - the optical element under test.

[0022] 图2脉冲光从光学元件左上角开始,计算机6控制位移台2带动光学元件8按示意图方向匀速移动,水平方向一行结束后元件上移一个光斑尺寸,水平方向与上一行相反,以此类推。 [0022] FIG. 2 starting from the upper left corner of the pulsed light of the optical element, the computer 6 controls the displacement of the table 2 driven by a constant speed movement of the optical element 8 a schematic view of direction, after the end of a horizontal line shifted spot size, horizontal direction opposite to the element row to forth.

[0023] 图3是数据采集卡5采集输入到计算机6辐照点对应的电压值。 [0023] FIG. 3 is a data acquisition card 5 acquired voltage value input to the computer 6 corresponding irradiation point.

具体实施方式 detailed description

[0024] 下面结合实例和附图对本发明做进一步说明,但不应以此限制本发明的保护范围。 [0024] in conjunction with the following examples and figures further illustrate the present invention but should not be used to limit the scope of the present invention.

[0025] 请参阅图1,图1是本发明光学元件表面缺陷筛查过程的记录装置的示意图。 [0025] Referring to FIG. 1, FIG. 1 is a schematic of the optical element of the present invention is a surface defect of a recording apparatus of the screening process. 由图可见,本发明光学元件表面缺陷筛查装置,构成包括:脉冲激光源1、电动位移台2、聚焦透镜3、PIN管4、数据采集卡5、计算机6和固定件7,待测的光学元件8通过所述的固定件7固定在所述的电动位移台2上,在所述的脉冲激光源1照射在所述的光学元件8上反射后,在该反射光束方向依次设置所述的聚焦透镜3和PIN管4,所述的PIN管4位于所述的该聚焦透镜3的像平面;所述的PIN管4输出的信号经所述的数据采集卡5采集送所述的计算机6,所述的计算机6的输出端接所述的电动位移台2的控制端。 Seen from the FIG., The surface of the optical element of the present invention, a defect screening apparatus configuration comprising: a pulsed laser source 1, electric moving table 2, the focusing lens 3, PIN tube 4, the data acquisition card 5, a computer 6 and the fixed member 7, to be tested 8 on the optical element 2, the pulse laser light source 1 after reflected on the optical element of claim 8, in which the reflected light beam direction are sequentially provided by the fixing member 7 is fixed on the electric stage displacement the focusing lens 3, and 4 a PIN diode, PIN diode according to claim 4 which is located in the image plane of the focusing lens 3; 4 signal output by the PIN diode of the data acquisition card to send said collection computer 5 6, the computer 6 of the output end of the electric displacement control terminal table 2.

[0026] 所述的计算机6控制所述的电动位移台2的运动速度、运动距离,同时控制所述的数据采集卡与所述的脉冲激光源1的脉冲时钟同步。 [0026] The computer 6 controls the moving speed of said electric moving table 2, the movement distance, while controlling said data acquisition card with said pulsed laser source 1 synchronized clock pulses.

[0027] 利用上述的光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,包括下列步骤: [0027] surface of the optical element by using the method of defect screening apparatus for screening an optical element surface defects, comprising the steps of:

[0028] ①将待测的光学元件8通过所述的固定件7固定在所述的电动位移台2上,启动所述的计算机驱动并控制所述的电动位移台2,将所述的脉冲激光源1输出的脉冲激光移动到待测光学元件8扫描的起点,设定所述的脉冲激光源1输出的脉冲激光的脉冲间隔为At,设电动位移台2的运动速度为u; [0028] ① upper 2, to start the computer driving the holding member 8, the optical element measured by said motor 7 is fixed in the displacement stage and controlling the displacement of the electric stage 2, the pulse pulsed laser light outputted from the laser source 1 is moved to the scanning start point 8 optical device under test, the pulsed laser light pulse is set according to an output from the pulsed laser source interval At, provided the speed of the electric displacement movement stage 2 is U;

[0029] ②所述的计算机同步控制所述的脉冲激光源1、电动位移台2和数据采集卡5同步工作:当所述的脉冲激光源1的第一个脉冲辐照所述的待测光学元件8的同时,所述的数据采集卡开始工作,数据采集卡以时间to为起点,在单脉冲内采集m个有效电压值m,u 2,u3… un…Um并输入计算机6,所述的计算机6对所述的m个数据采用求和计算Hi,_第一个脉冲的电压记为Vi,所述的脉冲激光源1对所述的待测光学元件8进行扫描,以后依次记为V2, V3***Vn; [0029] ② The computer-synchronous control of the pulsed laser source 1, the electric displacement stage 5 and data acquisition card 2 synchronization: measured according to a pulsed laser source of a first pulse of the irradiated when while the optical element 8, the operation of the data acquisition card starts, the data acquisition card to time as a starting point, collect the m effective voltage value m in a single pulse, u 2, u3 ... un ... Um and entered into the computer 6, the m data according to the computer 6 pairs of said sum calculation using the Hi, _ a first voltage pulse is referred to as Vi, the optical element 1 is measured according to the pulsed laser source to scan 8, referred to later followed as V2, V3 *** Vn;

[0030] ③电压序列VfVN,设置一个允许的最大变化值Δ V,当电压Vi的变化大于Δ V时,记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为U*k* At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 [0030] Maximum ③ voltage sequence VfVN, set an allowable variation value Δ V, when the change in the voltage Vi is greater than Δ V, referred to as Vk is, determined corresponding to the point on the optical element is a defective dot, recording scan from the beginning to the defect occurrence time point is k * At, the displacement of the working station distance is U * k * At, due to the known dimensions of the optical elements to obtain location information of the specific defect sites, while the point defect is determined according to the size of the relative value Vk size.

[0031] 设光学元件尺寸为长Lo,宽d,脉冲光斑直径为D。 [0031] The optical element disposed dimensions of length Lo, broad d, the spot diameter of the pulse D. 当a〈=u*k*At〈a+l时,缺陷点坐标为: When a <= u * k * At <a + when l, defective dot coordinates:

[0032]当a为奇数时,坐标为α〇-υ*1ς*Δ t+a*Lo,aD+D/2): [0032] When a is an odd number, coordinates α〇-υ * 1ς * Δ t + a * Lo, aD + D / 2):

[0033] 当a为偶数时,坐标为(u*k* Δ t_a*Lo,aD+D/2)。 [0033] When a is an even number, coordinates (u * k * Δ t_a * Lo, aD + D / 2).

[0034] 实验表明,本发明可以对光学元件表面缺陷的位置和基本尺寸等信息进行实时的记录,具有简易、实时、自动、可靠的特点。 [0034] The experiment shows that the present invention may be surface defect information and the position of the optical element size and the like substantially real-time recording, with simple, real-time, automatic, reliable characteristics.

Claims (2)

  1. I. 一种利用光学元件表面缺陷筛查装置进行光学元件表面缺陷筛查的方法,该光学元件表面缺陷筛查装置,包括:脉冲激光源(1)、电动位移台(2)、聚焦透镜(3)、PIN管(4)、数据采集卡(5)、计算机(6)和固定件(7),待测的光学元件(8)通过所述的固定件(7)固定在所述的电动位移台(2)上,在所述的脉冲激光源(1)照射在所述的光学元件(8)上反射后,在该反射光束方向依次设置所述的聚焦透镜(3)和PIN管(4),所述的PIN管(4)位于所述的该聚焦透镜(3)的像平面;所述的PIN管(4)输出的信号经所述的数据采集卡巧)采集送至所述的计算机(6),所述的计算机(6)的输出端接所述的电动位移台(2)的控制端,其特征在于该方法包括下列步骤: ① 将待测的光学元件(8)通过所述的固定件(7)固定在所述的电动位移台(2)上,启动所述的计算机驱动并控制所述的电动位移台(2)将所述的脉 I. A surface of the optical element defects using a method of screening apparatus for screening an optical element surface defects, defects of the surface of the optical element screening apparatus, comprising: a pulsed laser source (1), an electric translation stage (2), the focus lens ( 3), PIN tube (4), data acquisition card (5), a computer (6) and the fixing member (7), an optical element (8) to be tested (7) fixed to said stationary member through said motor translation stage (2), irradiating said pulsed laser source (1) an optical element (8) of the upper reflector, the focusing lens are sequentially disposed in the direction of the reflected light beam (3) and a PIN diode ( 4), said PIN diode (4) located at the focus of the lens (3) of the image plane; PIN diode according to the signal (4) outputted from the data acquisition card Qiao) to said collection a computer (6), the output end of said computer (6) is an electric displacement stage (2) a control terminal, characterized in that the method comprises the following: ① From the tested optical element (8) said fixing member (7) fixed to the electric translation stage (2), starting the computer controls the electric drive and displacement station (2) the pulse 冲激光源(1)输出的脉冲激光移动到待测光学元件(8)扫描的起点,设定所述的脉冲激光源(1)输出的脉冲激光的脉冲间隔为A t,设电动位移台(2)的运动速度为U; ② 所述的计算机同步控制所述的脉冲激光源(1)、电动位移台(2)和数据采集卡(5)同步工作:当所述的脉冲激光源(1)的第一个脉冲福照所述的待测光学元件(8)的同时,所述的数据采集卡开始工作,数据采集卡W时间to为起点,在单脉冲内采集m个有效电压值m, U2,U3…Un…Um并输入计算机(6),再通过计算机(6)对所述的m个数据采用求和计算V=I;化,第一个脉冲的电压记为Vi,所述的脉冲激光源(1)对所述的待测光学元件(8)进行 Impulse source (1) output from the pulse laser beam scanning optical device under test is moved to the starting point (8), the pulses of the pulse laser light is set to pulsed laser source (1) output from the interval A t, the displacement of the electric station is provided ( 2) moving speed U; ② the synchronous control computer pulsed laser source (1), the displacement of the electric station (2) and the data acquisition card (5) synchronous operation: when said pulsed laser source (1 ) while the first measured optical element according to a pulse fu as (8), said data acquisition card starts to work, the time to the data acquisition card W as a starting point, collect the m effective voltage value m in a single pulse , U2, U3 ... Un ... Um and entered into the computer (6), and then the m data using V = I sum calculation by a computer (6); of, referred to the voltage Vi for the first pulse, the the pulsed laser source (1) of the tested optical element (8) is
  2. 1. 扫描,W后依次记为V2 ,V3…Vn; ③ 电压序列Vi、V2,V3-,Vn,设置一个允许的最大变化值AV,当电压Vi的变化大于AV时, 记为Vk,确定光学元件上对应的点就是一个缺陷点,记录从开始扫描到该缺陷点出现的时间为k* At,则位移台工作距离为u*k* At,由于光学元件的尺寸已知,得到缺陷点的具体位置信息,同时,根据Vk的大小值确定缺陷点的相对大小。 1. Scan, after sequentially denoted as W V2, V3 ... Vn; ③ sequence voltages Vi, V2, V3-, Vn, set a maximum allowable variation value AV, when the change in the voltage Vi is larger than AV, Vk is referred to, to determine the corresponding point on the optical element is a defect point, the recording starts scanning from the time of occurrence of the defect point k * At, the displacement of the working station distance u * k * At, due to the known dimensions of the optical elements to obtain the defective dot the specific location information, and to determine the relative size of the point defect according to the size value Vk.
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CN1662808A (en) * 2002-05-06 2005-08-31 应用材料股份有限公司 Optical technique for detecting buried defects in opaque films
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