CN103743340B - The measuring system of a kind of angle and volume coordinate and measuring method - Google Patents
The measuring system of a kind of angle and volume coordinate and measuring method Download PDFInfo
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- CN103743340B CN103743340B CN201310737161.4A CN201310737161A CN103743340B CN 103743340 B CN103743340 B CN 103743340B CN 201310737161 A CN201310737161 A CN 201310737161A CN 103743340 B CN103743340 B CN 103743340B
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Abstract
The present invention relates to the measuring system of a kind of angle and volume coordinate, it comprises: a supporting regulon, and described supporting regulon comprises a turntable, a lifting table, a translation stage and a vibration-isolating platform; One measuring unit, described measuring unit comprises an autocollimator, a laser range finder, an industrial camera, one first catoptron and one second catoptron, described autocollimator, laser range finder, industrial camera, the first catoptron and the second catoptron are positioned at same vertical plane and can move with described translation stage together simultaneously, and the laser that sends of described laser range finder after the first catoptron and the reflection of the second catoptron can with the light shaft coaxle of autocollimator; And a system control unit, described system control unit comprises a system control interface, a monitor and an industrial computer.The present invention relates to a kind of this measuring system that adopts further and measure the angle of testing sample and the method for volume coordinate.
Description
Technical field
The invention belongs to angle and distance measuring field, the robotization angle of particularly a kind of large scale and high accuracy angle measurement, range finding and spatial coordinate measuring system and measuring method.
Background technology
Along with the fast development of the modernization of industry, large-scale precision machine-building and heavy construction propose more and more higher requirement to the measurement of angle, coordinate in installing.When single-piece or low-angle are debug, general collimator or with alignment function transit survey optical reference between angular relationship.
At present, the research of collimation technique is very ripe, develops into digital CCD photoelectric collimator by traditional optical collimator, and measuring accuracy can reach 0.02 ".Usually, the measurement range of collimator is limited, be generally no more than ± 2000 ".Because measurement range is very little, when the angle in object different measuring face to be measured exceedes collimator measurement range, target to be measured all can not enter visual field, and therefore collimator can not complete separately the high-acruracy survey of space angle on a large scale, more cannot realize efficient robotization.Electronic theodolite measuring system with the high-precision electronic transit of more than two for core measuring equipment, with angle forward intersection principle, noncontacting measurement is realized to measured object, precision is high, scope is wide, but it is numerous and diverse to debug process, need in measuring process to rely on human eye to aim at each measurement point, measurement efficiency is low, cannot realize the robotization of measuring process.Total powerstation is implemented to measure to measured object with polar coordinate measurement principle, measurement range from several meters to 200 meters, measuring accuracy is high, for electronic theodolite measuring system, have that cost is low, easy to operate, the foundation of surving coordinate system be fast, the feature such as long of holding time, but in high precision alignment measurement job applications, still need to adopt the special operation means such as hand-held reflecting prism to measure, robotization aspect Shortcomings.Digital Photogrammetric System precision is high and build a station convenient, flexible, but the restriction of measurement range camera subject parameter, be not suitable for the situation that measuring distance is larger.Laser tracker measurement range is large, pointing precision is high, can active tracing moving target, but all needs cooperative target mirror, and measuring process needs operating personnel's myotatic reflex target to move, cannot the automatic identification of realize target and measurement.
But, large-scale precision equipment is debug in process, frequent requirement takes measurement of an angle with coordinate to ensure assembly precision simultaneously, but, the while of current angle and coordinate in precision measurement on a large scale, usually adopt the mode that multiple measuring equipment is combined, as the coupling of many transits, transit and laser tracker combination etc., and need a large amount of human assistance in measuring process, thus cause the automaticity of measuring system low.
Summary of the invention
Therefore, necessaryly provide a kind of not only simple but also the measuring system of angle with low cost and volume coordinate and measuring method.
A measuring system for angle and volume coordinate, it comprises:
One supporting regulon, described supporting regulon comprises a turntable, a lifting table, a translation stage and a vibration-isolating platform, described vibration-isolating platform has a plane as supporting surface, in plane definition one X-direction and a Y-direction at the supporting surface place of this vibration-isolating platform, the direction vertical with the supporting surface of this vibration-isolating platform is defined as a Z-direction, described lifting table and translation stage are arranged at intervals on the supporting surface of this vibration-isolating platform along described X-direction, and described turntable is arranged on this lifting table;
One measuring unit, described measuring unit comprises an autocollimator, a laser range finder, an industrial camera, one first catoptron and one second catoptron, described autocollimator, laser range finder, industrial camera, the first catoptron and the second catoptron are positioned at same vertical plane and can move with described translation stage together simultaneously, and the laser that sends of described laser range finder after the first catoptron and the reflection of the second catoptron can with the light shaft coaxle of autocollimator; And
One system control unit, described system control unit comprises a system control interface, a monitor and an industrial computer, and autocollimator, laser range finder, industrial camera, turntable, lifting table and translation stage are connected to described industrial computer by described system control interface.
Adopt the measuring system of above-mentioned angle and volume coordinate to measure the angle of testing sample and a method for volume coordinate, it comprises the following steps:
Step S10, starts described measuring system;
Step S11, the mode of operation arranging industrial camera is maximum field of view, searches for and judges near the picture centre of testing sample center whether under Large visual angle pattern, if judge, conclusion is "No", enter step S12, if judge, conclusion is "Yes", then enter step S13;
Step S12, controls lifting table and translation stage motion, until testing sample is centrally located near the picture centre of industrial camera, and enters step S13;
Step S13, the mode of operation arranging industrial camera is small field of view, searches for and judges that near the picture centre of testing sample center whether under small field of view pattern, conclusion is "No" if judge, enters step S14, and conclusion is "Yes" if judge, then enter step S15;
Step S14, controls lifting table and translation stage motion, until testing sample is positioned near the picture centre under small field of view pattern, and enters step S15;
Step S15, opens autocollimator, judges whether autocollimator has registration, if judge, conclusion is "No", enters step S16, if judge, conclusion is "Yes", then record the registration β of autocollimator, determine the initial angle γ=β of this testing sample, and enter step S17;
Step S16, judge the angle of testing sample relative to XOZ plane, the rotation direction of turntable is determined with this, control turntable motion until autocollimator has registration, the registration β of the angle value α that record turntable turns over and autocollimator, determine the initial angle γ=alpha+beta of this testing sample, and enter step S17;
Step S17, opens laser range finder, and whether the hot spot of detection laser is in testing sample center, if judge, conclusion is "No", enters step S18, if judge, conclusion is "Yes", the then distance measurement value x of recording laser stadimeter, and the volume coordinate of this testing sample geometric center is determined with this; And
Step S18, controls lifting table and translation stage motion, until the hot spot of laser and testing sample center superposition, the encoder feedback value z of the distance measurement value x of recording laser stadimeter, the encoder feedback value y of translation stage and lifting table, and the volume coordinate of this testing sample geometric center is determined by x, y, z.
Compared with prior art, the simple in measurement system structure of angle provided by the invention and volume coordinate, and adopt the method for the angle of this measuring system measurement testing sample and volume coordinate simple to operate.
Accompanying drawing explanation
Fig. 1 is the structural representation of the angle of embodiment of the present invention employing and the measuring system of volume coordinate.
Fig. 2 is the angle that adopts of the embodiment of the present invention and the autocollimator of measuring system of volume coordinate and the annexation schematic diagram of laser range finder.
Fig. 3 is the angle that adopts of the embodiment of the present invention and the autocollimator of measuring system of volume coordinate and the light path design schematic diagram of laser range finder.
Fig. 4 is that the angle of embodiment of the present invention employing and the measuring system of volume coordinate measure the angle of testing sample and the principle of work schematic diagram of volume coordinate.
Fig. 5 is that the angle of embodiment of the present invention employing and the measuring system of volume coordinate measure the angle of testing sample and the workflow diagram of volume coordinate.
Main element symbol description
| The measuring system of angle and volume coordinate | 10 |
| Measuring unit | 100 |
| Autocollimator | 101 |
| Optical axis | 1012 |
| Laser range finder | 102 |
| Laser | 1022 |
| Industrial camera | 103 |
| Web member | 104 |
| First catoptron | 105 |
| Second catoptron | 106 |
| First is dull and stereotyped | 1041 |
| Second is dull and stereotyped | 1042 |
| First hollow circular cylinder | 1043 |
| Second hollow circular cylinder | 1044 |
| Fixed block | 1045 |
| Supporting regulon | 200 |
| Precise rotating platform | 201 |
| Lifting table | 202 |
| Translation stage | 203 |
| Vibration-isolating platform | 204 |
| Sample support frame | 205 |
| System control unit | 300 |
| System control interface | 301 |
| Monitor | 302 |
| Industrial computer | 303 |
| Testing sample | 400 |
Following embodiment will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Embodiment
Large scale and high accuracy angle provided by the invention and spatial coordinate measuring system and measuring method is described in detail below with reference to accompanying drawing.
Refer to Fig. 1, the embodiment of the present invention provides an angle and spatial coordinate measuring system 10, and this angle and spatial coordinate measuring system 10 comprise measuring unit 100, supporting regulon 200 and system control unit 300 3 functional modules.Described measuring unit 100 comprises autocollimator 101, laser range finder 102, industrial camera 103, a connection piece 104,1 first catoptron 105 and one second catoptron 106.Described supporting regulon 200 comprises precise rotating platform 201, lifting table 202, translation stage 203, vibration-isolating platform 204 and a sample bracing frame 205.Described system control unit 300 comprises system control interface 301, monitor 302 and an industrial computer 303.
Concrete, described vibration-isolating platform 204 has a plane as supporting surface.The embodiment of the present invention definition direction parallel with the supporting surface of this vibration-isolating platform 204 is X-direction and Y-direction, and defining the direction vertical with the supporting surface of this vibration-isolating platform 204 is Z-direction.Described lifting table 202 and translation stage 203 are arranged at intervals on the supporting surface of this vibration-isolating platform 204, and described lifting table 202 is along the X direction away from described translation stage 203.Described lifting table 202 can move along Z-direction, this lifting table 202 for locate and encoder feedback testing sample 400 along the coordinate of Z axis.Described translation stage 203 can move along Y-direction, this translation stage 203 for locate and encoder feedback testing sample 400 along the coordinate of Y-axis, and coordinate the distance measurement value of laser range finder 102, the volume coordinate that can realize testing sample 400 is measured.Described precise rotating platform 201 is fixedly installed on this lifting table 202.The axle that described precise rotating platform 201 can be parallel to Z-direction around one rotates, and this precise rotating platform 201 and autocollimator 101 play a part to take measurement of an angle simultaneously.Described sample support frame 205 is fixedly installed on this precise rotating platform 201, for supporting testing sample 400.Be appreciated that described sample support frame 205 is alternate configurations, namely this testing sample 400 can directly be arranged on precise rotating platform 201.In the present embodiment, described precise rotating platform 201 for having angular displacement encoder feedback, as the rad level high precision precise rotating platform of Circular gratings, inductosyn, angular encoder etc.Described lifting table 202 and translation stage 203 are the position encoded feedback of band, as lifting table and the translation stage of line grating, LVDT, inductance and electric capacity gauge head etc.Described precise rotating platform 201 is the round platform that a bottom surface is parallel to the supporting surface of vibration-isolating platform 204, and it can rotate around central shaft.Described sample support frame 205 is a right cylinder, and its bottom surface perpendicular to precise rotating platform 201 is arranged.Be appreciated that structure and the shape of described precise rotating platform 201, lifting table 202, translation stage 203, vibration-isolating platform 204 and sample support frame 205 are not limit, can design as required later.
Described autocollimator 101 is fixedly installed on this translation stage 203, for measuring the angle of testing sample 400.Described laser range finder 102 and industrial camera 103 to be fixedly installed on above this autocollimator 101 and to be fixedly connected with this autocollimator 101.So-called top refers to the side of autocollimator 101 away from vibration-isolating platform 204.The height of described industrial camera 103 is higher than the height of this laser range finder 102, and this laser range finder 102 is positioned near lifting table 202 side.Described autocollimator 101, laser range finder 102, industrial camera 103, first catoptron 105 be positioned at same vertical plane with the second catoptron 106 and can together with move with described translation stage 203 simultaneously.Described autocollimator 101, laser range finder 102, first catoptron 105 and the second catoptron 106 link together by described web member 104.The shoot laser 1022 of described laser range finder 102 is parallel to X-direction, and parallel with the optical axis 1012 of described autocollimator 101.Described laser range finder 102 is for monitoring the coordinate of testing sample 400 along X-axis, and the hot spot of laser 1022 that this laser range finder 102 sends is for vision guide.Described industrial camera 103 is for the image of Real-time Collection testing sample 400.
With further reference to Fig. 2, described web member 104 comprises one first flat board 1041,1 second flat board 1042, one first hollow circular cylinder 1043 and one second hollow circular cylinder 1044.Described first dull and stereotyped 1041 and interval parallel with the second flat board 1042 is arranged.Described first hollow circular cylinder 1043 is arranged between the described first dull and stereotyped 1041 and second flat board 1042, and the axis of described first hollow circular cylinder 1043 is parallel with this first flat board 1041.This first dull and stereotyped 1041 surfaces are fixed in the side of described first hollow circular cylinder 1043.Described second flat board 1042 can be directly fixed on the side of described first hollow circular cylinder 1043, also can and this first hollow circular cylinder 1043 interval arrange.Preferably, described second dull and stereotyped 1042 is arranged with this first hollow circular cylinder 1043 interval, and described second flat board 1042 with a fixed block 1045 is set between this first hollow circular cylinder 1043 this second flat board 1042 is connected with this first hollow circular cylinder 1043.Described second hollow circular cylinder 1044 is arranged perpendicular to described first dull and stereotyped 1041, and is arranged at the side of described first hollow circular cylinder 1043 away from described autocollimator 101.One section of described second hollow circular cylinder 1044 is fixed on the described first dull and stereotyped 1041 surfaces, and the other end extends to described second dull and stereotyped 1042 and penetrates this second flat board 1042.Preferably, the external diameter of described second hollow circular cylinder 1044 is less than the internal diameter of described first hollow circular cylinder 1043.Described first hollow circular cylinder 1043 is sheathed and be fastened on described autocollimator 101, and the central shaft of described first hollow circular cylinder 1043 is parallel to the optical axis 1012 of described autocollimator 101.Described laser range finder 102 is fixed on the second dull and stereotyped 1042 surfaces of web member 104, described first catoptron 105 and the second catoptron 106 are fixed on described second hollow circular cylinder 1044, thus realize the connection of described autocollimator 101, laser range finder 102, first catoptron 105 and the second catoptron 106.
With further reference to Fig. 3, described first catoptron 105 and the second catoptron 106 are for reflecting the shoot laser 1022 of described laser range finder 102.Described first catoptron 105 and the second catoptron 106 parallel interval are arranged, and are fixed on described second hollow circular cylinder 1044.Preferably, described second hollow circular cylinder 1044 side has two parallel grooves, and described first catoptron 105 and the second catoptron 106 insert and be fastened in this groove.In light path near the light out part that described first catoptron 105 is arranged at described laser range finder 102.The minute surface of described first catoptron 105 and the shoot laser 1022 of described laser range finder 102 are in 45 degree of angles, and this makes this shoot laser 1022 propagate along mutually described second catoptron 106 of Z-direction after the first catoptron 105 reflects.Described second catoptron 106 is arranged on the optical axis 1012 of described autocollimator 101.The optical axis 1012 of the minute surface of described second catoptron 106 and described autocollimator 101 is in 135 degree angles, and the laser 1022 reflecting this second catoptron 106 of arrival through the first catoptron 105 is coaxial with the optical axis 1012 of autocollimator 101 or overlap after the reflection of the second catoptron 106.
Be appreciated that, the structure of described web member 104 is not limited to said structure, as long as autocollimator 101, laser range finder 102, first catoptron 105 and the second catoptron 106 can be connected and fixed, and the laser 1022 that laser range finder 102 is sent can be coaxial with the optical axis 1012 of autocollimator 101 or overlap after the first catoptron 105 and the reflection of the second catoptron 106.
Described industrial computer 303 is a computing machine, it is for sending signal, Received signal strength, processing signals and storing data, to control the operation of described autocollimator 101, laser range finder 102, industrial camera 103, precise rotating platform 201, lifting table 202 and translation stage 203.Described system control interface 301 is for being connected to described industrial computer 303 by autocollimator 101, laser range finder 102, industrial camera 103, precise rotating platform 201, lifting table 202 and translation stage 203.Described monitor 302 is for the man-machine interaction of the measuring system 10 of angle and volume coordinate.
With further reference to Fig. 4, below introduce the work measurement principle of the measuring system 10 of described angle and volume coordinate.By gathering the angle value α of the precise rotating platform 201 and angle value β of autocollimator 101, the angle value of testing sample 400 relative to reference plane can be calculated; By the distance measurement value of laser range finder 102, the coordinate figure along X-axis of testing sample 400 can be obtained; By the position encoded value of feedback of translation stage 203, the coordinate figure of testing sample 400 along Y-axis can be obtained; By the position encoded value of feedback of lifting table 202, the coordinate figure of testing sample 400 along Z axis can be obtained.Whole measuring process, carries out visual search and guiding by industrial camera 103, realizes the robotization of angle and volume coordinate measurement.
With further reference to Fig. 5, below introduce and adopt the measuring system 10 of described angle and volume coordinate to measure the angle of testing sample 400 and the method for volume coordinate.
What the present invention measured is the coordinate of testing sample 400 geometric center and the normal angle of testing sample 400 measuring surface.This surving coordinate is relative value, and measurements available coordinate system XYZ and initial point O thereof is as computing reference.Before measuring, a certain reflecting surface first demarcating testing sample 400 is measuring surface, and this system 10 measurement and calculation angle is the angle between this measuring surface and YOZ plane.The embodiment of the present invention is described for block prism minute surface for described testing sample 400.Described measuring surface is the face towards autocollimator 101 of block prism.
Step S10, starts measuring system 10;
Step S11, the mode of operation arranging industrial camera 103 is maximum field of view, searches for and judges near the picture centre of testing sample 400 center whether under Large visual angle pattern, if judge, conclusion is "No", enter step S12, if judge, conclusion is "Yes", then enter step S13;
Step S12, controls lifting table 202 and translation stage 203 moves, until testing sample 400 is centrally located near the picture centre of industrial camera 103, and enters step S13;
Step S13, the mode of operation arranging industrial camera 103 is small field of view, searches for and judges near the picture centre of testing sample 400 center whether under small field of view pattern, if judge, conclusion is "No", enter step S14, if judge, conclusion is "Yes", then enter step S15;
Step S14, controls lifting table 202 and translation stage 203 and moves, until testing sample 400 is positioned near the picture centre under small field of view pattern, and enters step S15;
Step S15, open autocollimator 101, judge whether autocollimator 101 has registration, i.e. angle measurement, if judge, conclusion is "No", enters step S16, if judge, conclusion is "Yes", then record the registration β of autocollimator 101, determine the initial angle γ=β of this testing sample 400, and enter step S17;
Step S16, judge the angle of testing sample 400 relative to XOZ plane, the rotation direction of precise rotating platform 201 is determined with this, controlling precise rotating platform 201 moves until autocollimator 101 has registration, the registration β of the angle value α that record precise rotating platform 201 turns over and autocollimator 101, determine the initial angle γ=alpha+beta of this testing sample 400, and enter step S17;
Step S17, open laser range finder 102, whether the hot spot of detection laser 1022 is in testing sample 400 center, if judge, conclusion is "No", enter step S18, if judge, conclusion is "Yes", then the distance measurement value x of recording laser stadimeter 102, and determines the volume coordinate of this testing sample 400 with this;
Step S18, control lifting table 202 and translation stage 203 move, until the hot spot of laser 1022 and testing sample 400 center superposition, the encoder feedback value z of the distance measurement value x of recording laser stadimeter 102, the encoder feedback value y of translation stage 203 and lifting table 202, and pass through x, y, z determine the volume coordinate of this testing sample 400 geometric center.
In described step S11, realize searching for by image processing algorithms such as template matches, target identifications and judge testing sample 400 center whether in the picture near the heart.
In described step S16, judge the angle of testing sample 400 relative to XOZ plane by image processing algorithms such as Corner Detection.
In described step S17, whether carry out the hot spot of detection laser 1022 in testing sample 400 center by the image processing algorithm such as Corner Detection, Hough transform.
From above measuring process: the measurement of angle scope of this measuring system 10 is 360 degree, measuring accuracy is determined by the kinematic accuracy of precise rotating platform 201 and autocollimator 101 measuring accuracy.By the precision configuration of precise rotating platform 201 and autocollimator 101, the high-precision measurement of angle of rad level on a large scale can be realized and.For volume coordinate, measuring accuracy is determined by the kinematic accuracy of the measuring accuracy of laser range finder 102, translation stage 203 and lifting table 202, and measurement range is determined by the range of the range of laser range finder 102, the range of translation stage 203 and lifting table 202.
Be more than single goal measuring process, when measuring multiple target to be measured, repeat above process and carrying out data processing, the relative angle between multiple target to be measured and volume coordinate relation can be obtained.As from the foregoing, this invention can realize the automatic measurement of large scale and high accuracy angle and volume coordinate.
In addition, those skilled in the art also can do other changes in spirit of the present invention, and certainly, these changes done according to the present invention's spirit, all should be included within the present invention's scope required for protection.
Claims (10)
1. a measuring system for angle and volume coordinate, is characterized in that, it comprises:
One supporting regulon, described supporting regulon comprises a turntable, a lifting table, a translation stage and a vibration-isolating platform, described vibration-isolating platform has a plane as supporting surface, in plane definition one X-direction and a Y-direction at the supporting surface place of this vibration-isolating platform, the direction vertical with the supporting surface of this vibration-isolating platform is defined as a Z-direction, described lifting table and translation stage are arranged at intervals on the supporting surface of this vibration-isolating platform along described X-direction, and described turntable is arranged on this lifting table;
One measuring unit, described measuring unit comprises an autocollimator, a laser range finder, an industrial camera, one first catoptron and one second catoptron, described autocollimator, laser range finder, industrial camera, the first catoptron and the second catoptron are positioned at same vertical plane and can move with described translation stage together simultaneously, and the laser that sends of described laser range finder after the first catoptron and the reflection of the second catoptron can with the light shaft coaxle of autocollimator; And
One system control unit, described system control unit comprises a system control interface, a monitor and an industrial computer, and autocollimator, laser range finder, industrial camera, turntable, lifting table and translation stage are connected to described industrial computer by described system control interface.
2. the measuring system of angle as claimed in claim 1 and volume coordinate, it is characterized in that, described lifting table can move along Z-direction, this lifting table for locate and encoder feedback testing sample along the coordinate of Z axis.
3. the measuring system of angle as claimed in claim 1 and volume coordinate, it is characterized in that, described translation stage can move along Y-direction, this translation stage for locate and encoder feedback testing sample along the coordinate of Y-axis, and coordinating the distance measurement value of this laser range finder, the volume coordinate realizing testing sample is measured.
4. the measuring system of angle as claimed in claim 1 and volume coordinate, is characterized in that, the axle that described turntable can be parallel to Z-direction around rotates, and this turntable and autocollimator play a part to take measurement of an angle simultaneously.
5. the measuring system of angle as claimed in claim 1 and volume coordinate, it is characterized in that, described supporting regulon comprises a sample bracing frame further, and the erection of this sample support is placed on this turntable.
6. the measuring system of angle as claimed in claim 1 and volume coordinate, it is characterized in that, described turntable is the rad level high precision precise rotating platform with angular displacement encoder feedback, and described lifting table is lifting table and the translation stage of being with position encoded feedback.
7. the measuring system of angle as claimed in claim 1 and volume coordinate, it is characterized in that, described autocollimator is arranged on this translation stage, described laser range finder and industrial camera are arranged at above this autocollimator, the height of described industrial camera is higher than the height of this laser range finder, and this laser range finder is positioned near lifting table side, the shoot laser of described laser range finder is parallel to X-direction, and parallel with the optical axis of described autocollimator.
8. the measuring system of angle as claimed in claim 1 and volume coordinate, it is characterized in that, described measuring unit comprises a connection piece further, and described autocollimator, laser range finder, the first catoptron and the second catoptron link together by this web member; Described web member comprises one first dull and stereotyped, one second flat board, one first hollow circular cylinder and one second hollow circular cylinder; Described first dull and stereotyped with the second platen parallel and interval arranges, described first hollow circular cylinder is arranged between described first dull and stereotyped and the second flat board, and dull and stereotypedly to fix with the second flat board with described first; Described second hollow circular cylinder is arranged at the side of described first hollow circular cylinder away from described autocollimator perpendicular to described first flat board, and dull and stereotyped dull and stereotyped fixing with second with described first; Described first hollow circular cylinder is sheathed and be fastened on described autocollimator, and described laser range finder is fixed on the second planar surface of web member; Described first catoptron and the second catoptron are arranged on described second hollow circular cylinder.
9. the measuring system of angle as claimed in claim 8 and volume coordinate, is characterized in that, described first catoptron and the second mirror parallel interval are arranged, and are fixed on described second hollow circular cylinder; In light path near the light out part that described first catoptron is arranged at described laser range finder, and the minute surface of described first catoptron and the shoot laser of described laser range finder are 45 degree of angles, thus this shoot laser is propagated after the first catoptron reflection along mutually described second catoptron of Z-direction; Described second catoptron is arranged on the optical axis of described autocollimator, and the minute surface of described second catoptron and the optical axis of described autocollimator are 135 degree of angles, thus make through the first catoptron reflection arrive the laser of this second catoptron after the reflection of the second catoptron with the light shaft coaxle of autocollimator.
10. adopt the measuring system of angle as claimed in any one of claims 1-9 wherein and volume coordinate to measure the angle of testing sample and a method for volume coordinate, it comprises the following steps:
Step S10, starts described measuring system;
Step S11, the mode of operation arranging industrial camera is maximum field of view, searches for and judges near the picture centre of testing sample center whether under Large visual angle pattern, if judge, conclusion is "No", enter step S12, if judge, conclusion is "Yes", then enter step S13;
Step S12, controls lifting table and translation stage motion, until testing sample is centrally located near the picture centre of industrial camera, and enters step S13;
Step S13, the mode of operation arranging industrial camera is small field of view, searches for and judges that near the picture centre of testing sample center whether under small field of view pattern, conclusion is "No" if judge, enters step S14, and conclusion is "Yes" if judge, then enter step S15;
Step S14, controls lifting table and translation stage motion, until testing sample is positioned near the picture centre under small field of view pattern, and enters step S15;
Step S15, opens autocollimator, judges whether autocollimator has registration, if judge, conclusion is "No", enters step S16, if judge, conclusion is "Yes", then record the registration β of autocollimator, determine the initial angle γ=β of this testing sample, and enter step S17;
Step S16, judge the angle of testing sample relative to XOZ plane, the rotation direction of turntable is determined with this, control turntable motion until autocollimator has registration, the registration β of the angle value α that record turntable turns over and autocollimator, determine the initial angle γ=alpha+beta of this testing sample, and enter step S17;
Step S17, opens laser range finder, and whether the hot spot of detection laser is in testing sample center, if judge, conclusion is "No", enters step S18, if judge, conclusion is "Yes", the then distance measurement value x of recording laser stadimeter, and the volume coordinate of this testing sample geometric center is determined with this; And
Step S18, controls lifting table and translation stage motion, until the hot spot of laser and testing sample center superposition, the encoder feedback value z of the distance measurement value x of recording laser stadimeter, the encoder feedback value y of translation stage and lifting table, and the volume coordinate of this testing sample geometric center is determined by x, y, z.
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