CN103730311A - Cathode luminescence device - Google Patents
Cathode luminescence device Download PDFInfo
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- CN103730311A CN103730311A CN201310706756.3A CN201310706756A CN103730311A CN 103730311 A CN103730311 A CN 103730311A CN 201310706756 A CN201310706756 A CN 201310706756A CN 103730311 A CN103730311 A CN 103730311A
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Abstract
The invention relates to the technical field of geologic materials and archaeology research, and discloses a cathode luminescence device. The cathode luminescence device comprises an electronic gun, a sample chamber, a vacuum pump and a controller, wherein the sample chamber comprises a hollow shell and a sealing lead glass cover, an opening is formed in the upper portion of the shell, the sealing lead glass cover is matched with the opening of the shell, the shell and the sealing lead glass cover are used in cooperation to form a vacuum cavity, a vacuum pump connector is arranged on the shell, the shell is connected with the vacuum pump through the vacuum pump connector, a sample stand is arranged in the vacuum cavity, a transverse movement mechanism and a longitudinal movement mechanism are arranged on the sample stand, and are connected with the controller, and the electronic gun is installed on the sample chamber, and is communicated with the vacuum cavity of the sample chamber. Due to the fact that the built-in mechanisms are used for adjusting the positions of samples, the positions of the samples can be accurately adjusted, tightness is improved, and working efficiency is improved.
Description
Technical field
The present invention relates to geological materials, archaeological research technical field, particularly relate to a kind of cathodoluminescence device.
Background technology
Petrology and mineralogy belong to geoscience, can make scientific research personnel effectively understand structure composition and the history of evolution thereof of the earth, and have important Research Significance at aspects such as prospecting mineral and energy resources to petrology and mineralogical research.Microscope is the main tool that scientific research personnel is used in rock forming mineral research aspect always in the last hundred years, but microscope is slightly inadequate again in the micro-zone analysis of high-precision requirement is measured, such as the mineral such as potassic feldspar, plagioclase and quartz are under the microscope with regard to indistinguishable, and potassic feldspar, plagioclase and quartz can demonstrate different glow colors under cathodoluminescence.Use cathodoluminescence and microscopical cooperation as the means of the meticulous rocks and minerals of research to make up microscopical deficiency, widened the scope of geological sciences researchs, disclosed the genesis mechanism of very rocky fine structure and mineral.
As shown in Figure 1, general main electron gun 200, sample room 100, vacuum pump 300 and 400 4 parts of controller of comprising of current cathodoluminescence device.Electron gun 200 is connected with controller 400 respectively with vacuum pump 300, by controller 400, is controlled.Vacuum pump 300 is used to sample room 100 that vacuum environment is provided, and electron gun 200 is connected to the high voltage interface of controller 400 for divergent bundle, and the surface that electron beam is got to rock forming mineral forms cathodoluminescence.Observe the cathodoluminescence of rock forming mineral and take pictures with microscope 500.The electron gun 200 of prior art uses thermal electron rifle.
The workflow of cathodoluminescence device mainly comprises: a, startup vacuum pump make in sample room in vacuum state; B, whether the vacuum gauge numerical value on chamber select the high voltage unit on can opening controller per sample; After c, unlatching high pressure, observe the electron gun voltage and current value of indicating on controller, by making voltage and current value reach desired value to the adjusting of control valve on sample room; D, voltage and current just reach after desired value can be by the Cathodoluminescence of microscopic examination rock forming mineral, and can to it, take pictures by microscopical camera.
There is following defect in prior art:
1, the position of the specimen holder in sample room regulates by external knob, and operating personnel need to regulate by external knob the position of specimen holder, thereby observes the Cathodoluminescence of sample zones of different.External knob becomes the gas leakage point of sample room with needing through hole, through hole being connected of specimen holder, has lengthened the time that sample room is vacuumized; Need to regulate manually, reduce operating efficiency; And the accuracy of manual adjustment is low.
2, electron gun installation direction is parallel with sample surfaces, and the direction that need to use magnet to change electron beam could be bombarded to sample surfaces, needs the artificial position of adjusting magnet, operates cumbersome; Sample surfaces is being subject to after beam bombardment, there will be an irregular hot spot in edge, and in hot spot, the electronic beam current intensity of each position differs larger, causes to observe and the effect of taking pictures declines.
3, prior art adopts thermal electron rifle to need independent filament heating power supply, and this power consumption that has not only increased whole device has also increased the complexity of controller.Thermal electron rifle also needs specific anode strip to carry out work, and the damage that electron gun and anode strip all can be subject in various degree in the course of the work need to regularly be changed, and has reduced the operating efficiency of device.
4, the voltage and current value of electron gun is carried out manual adjustment by the mechanically controlled valve on electron gun, and this has not only increased operation easier but also has been more difficult to get stable voltage and current value, and the rock forming mineral illumination effect arriving by microscopic examination can be not very good yet.
Summary of the invention
(1) technical problem that will solve
The object of this invention is to provide and improve tightness and cathodoluminescence device that can fine adjustment sample position.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides cathodoluminescence device, comprise electron gun, sample room, vacuum pump and controller, described sample room comprises: a sealed lead glass cover that mate with the hollow housing of opening and with its opening on top, and described housing coordinates formation vacuum chamber with sealed lead glass cover; Described housing is provided with the vacuum pump interface being connected with vacuum pump; In described vacuum chamber, be provided with specimen holder, specimen holder is provided with the transverse moving mechanism and the longitudinal moving mechanism that are connected with controller; Described electron gun is arranged on sample room, is communicated with the vacuum chamber of sample room.
Wherein, described electron gun and specimen holder have angle.
Wherein, described angle is 20～30 °.
Wherein, the lower central position of described housing is provided with light inlet window.
Wherein, described electron gun is pop-up electron gun.
Wherein, described electron gun is provided with electronic control valve, and described electronic control valve is connected with controller, receives the signal of controller.
Wherein, described sample room is also provided with vacuum gauge, and described vacuum gauge is connected with controller, and vacuum gauge is measured the vacuum degree of sample device chamber and sent vacuum degree signal to controller.
Wherein, described sample room is also provided with electronics vent valve, and described electronics vent valve is connected with controller.
(3) beneficial effect
The beneficial effect of cathodoluminescence device provided by the invention:
(1) use the mechanism of built-in adjusting sample position, fine adjustment sample position, improves tightness, increases work efficiency;
(2) use pop-up electron gun, working life is longer, and replacement frequency is low, increases work efficiency;
(3) voltage and the electric current of use Electronic Control valve regulation electron gun, improve the accuracy regulating, and reduce manual operation;
(4) electron gun and specimen holder have certain angle, do not need to use magnetic patch to change the path of electron beam, and bombardment effect is more regular, improves observing effect.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of cathodoluminescence device;
Fig. 2 is electron gun and the sample room phantom of cathodoluminescence device;
In figure, 100: sample room; 200: electron gun; 201: electronic control valve; 300: vacuum pump; 400: controller; 500: microscope; 1: housing; 2: sealed lead glass cover; 3: vacuum pump interface; 4: vacuum chamber; 5: transverse moving mechanism; 6: specimen holder; 7: light inlet window; 8: longitudinal moving mechanism; 9: electronics vent valve; 10: vacuum gauge.
Embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following instance is used for illustrating the present invention, but is not used for limiting the scope of the invention.
As shown in Figure 1, cathodoluminescence device of the present invention, comprise electron gun 200, sample room 100, vacuum pump 300 and controller 400, sample room 100 comprises: a sealed lead glass cover 2 that mate with the hollow housing 1 of opening and with its opening on top, and housing 1 coordinates formation vacuum chamber 4 with sealed lead glass cover 2; Housing 1 is provided with the vacuum pump interface 3 being connected with vacuum pump 300; In vacuum chamber 4, be provided with specimen holder 6, specimen holder 6 is arranged on the position that can observe by sealed lead glass cover 2.Specimen holder 6 is provided with the transverse moving mechanism 5 and the longitudinal moving mechanism 8 that are connected with controller 400; Electron gun 200 is arranged on sample room 100, is communicated with the vacuum chamber 4 of sample room 100.
In use procedure, sample is placed on specimen holder 6, thereby controller 400 is controlled transverse moving mechanism 5 and the longitudinal moving mechanism 8 mobile example frame 6 of working, so that sample is positioned at electron gun 200, can accurately bombard and see through the position that sealed lead glass cover 2 can be observed.Make Quality control frame in this way, adopt external knob to regulate compared with specimen holder with prior art, regulate and do not need to operate by artificial mechanism, operating efficiency is high, and degree of regulation is accurate.External knob need not be installed, reduce gas leakage point, the time vacuumizing is short, can comparatively fast test simultaneously, increases work efficiency, and keeps higher vacuum degree, and test effect is good.
Further, electron gun 200 has the angle of 20～30 ° with specimen holder 6.Electron gun 200 has certain angle with specimen holder 6, without using external magnetic field effect electron beam just can directly bombard sample, and can occur that an edge is clear and definite at sample surfaces, the hot spot of rule and electronic beam current even intensity, be easy to observe.
Further, the lower central position of housing 1 is provided with light inlet window 7.By light inlet window 7, the convenient observation of sample being carried out to the phenomenons such as printing opacity.
Further, electron gun 200 adopts pop-up electron gun.Do not need filament heating power supply, reduce the power consumption of device and the complexity of controller, simultaneously without heating, shorten the time of preparation, operating efficiency improves.Without changing anode strip, useful life is longer, and operating efficiency is high.
Further, electron gun 200 is provided with electronic control valve 201, and control valve 201 is connected with controller 400, receives the signal of controller.Adopt the voltage and current of electronic control valve control electron gun, without manually regulating, raise the efficiency, degree of regulation is more accurate simultaneously, and experiment effect is good.
Further, sample room is also provided with vacuum gauge 10, and vacuum gauge 10 is connected with controller 400, and vacuum gauge 10 is measured the vacuum degree of sample device chamber 100 and sent vacuum degree signal to controller 400.The vacuum degree of the vacuum gauge 10 interior vacuum chambers 4 in sampling chamber 100 is to controller 400, and controller 400 is controlled vacuum pump 300 and vacuumized, until reach the vacuum values of setting.Adopt such control mode, make operating personnel without vacuum pump is operated separately, simplified operating procedure, increase work efficiency.
Further, sample room 100 is also provided with electronics vent valve 9, and electronics vent valve 9 is connected with controller 400.Controller 400 is controlled electronics vent valve 9 and is exitted.
The foregoing is only preferred embodiment of the present invention, in order to limit the present invention, within the spirit and principles in the present invention not all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (8)
1. a cathodoluminescence device, comprise electron gun, sample room, vacuum pump and controller, it is characterized in that, described sample room comprises: a sealed lead glass cover that mate with the hollow housing of opening and with its opening on top, and described housing coordinates formation vacuum chamber with sealed lead glass cover; Described housing is provided with the vacuum pump interface being connected with vacuum pump; In described vacuum chamber, be provided with specimen holder, specimen holder is provided with the transverse moving mechanism and the longitudinal moving mechanism that are connected with controller; Described electron gun is arranged on sample room, is communicated with the vacuum chamber of sample room.
2. cathodoluminescence device as claimed in claim 1, is characterized in that, described electron gun and specimen holder have angle.
3. cathodoluminescence device as claimed in claim 2, is characterized in that, described angle is 20～30 °.
4. cathodoluminescence device as claimed in claim 1, is characterized in that, the lower central position of described housing is provided with light inlet window.
5. cathodoluminescence device as claimed in claim 1, is characterized in that, described electron gun is pop-up electron gun.
6. cathodoluminescence device as claimed in claim 1, is characterized in that, described electron gun is provided with electronic control valve, and described electronic control valve is connected with controller, receives the signal of controller.
7. cathodoluminescence device as claimed in claim 1, is characterized in that, described sample room is also provided with vacuum gauge, and described vacuum gauge is connected with controller, and vacuum gauge is measured the vacuum degree of sample device chamber and sent vacuum degree signal to controller.
8. cathodoluminescence device as claimed in claim 1, is characterized in that, described sample room is also provided with electronics vent valve, and described electronics vent valve is connected with controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310706756.3A CN103730311B (en) | 2013-12-19 | 2013-12-19 | Cathode luminescence device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310706756.3A CN103730311B (en) | 2013-12-19 | 2013-12-19 | Cathode luminescence device |
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| Publication Number | Publication Date |
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| CN103730311A true CN103730311A (en) | 2014-04-16 |
| CN103730311B CN103730311B (en) | 2016-03-30 |
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| CN201310706756.3A Active CN103730311B (en) | 2013-12-19 | 2013-12-19 | Cathode luminescence device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113252642A (en) * | 2021-04-30 | 2021-08-13 | 燕山大学 | Device and method for rapidly determining components of non-metallic inclusions in steel |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11273609A (en) * | 1998-03-23 | 1999-10-08 | Hitachi Ltd | Signal switching device in cathode luminescence image observing device |
| CN201867315U (en) * | 2010-09-20 | 2011-06-15 | 北京美嘉图科技有限公司 | Microcell sampling instrument |
| CN202421509U (en) * | 2010-09-20 | 2012-09-05 | 北京美嘉图科技有限公司 | Cold cathode auxiliary power spectrum system |
-
2013
- 2013-12-19 CN CN201310706756.3A patent/CN103730311B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11273609A (en) * | 1998-03-23 | 1999-10-08 | Hitachi Ltd | Signal switching device in cathode luminescence image observing device |
| CN201867315U (en) * | 2010-09-20 | 2011-06-15 | 北京美嘉图科技有限公司 | Microcell sampling instrument |
| CN202421509U (en) * | 2010-09-20 | 2012-09-05 | 北京美嘉图科技有限公司 | Cold cathode auxiliary power spectrum system |
Non-Patent Citations (2)
| Title |
|---|
| 王衍琦 等: "《阴极发光显微镜在储层研究中的应用》", 30 April 1996, article "《阴极发光显微镜的结构》", pages: 2 - 4 * |
| 王衍琦 等: "《阴极发光显微镜在储层研究中的应用》", 30 April 1996, 石油工业出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113252642A (en) * | 2021-04-30 | 2021-08-13 | 燕山大学 | Device and method for rapidly determining components of non-metallic inclusions in steel |
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| CN103730311B (en) | 2016-03-30 |
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