CN103728544A - Detection device - Google Patents
Detection device Download PDFInfo
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- CN103728544A CN103728544A CN201210382092.5A CN201210382092A CN103728544A CN 103728544 A CN103728544 A CN 103728544A CN 201210382092 A CN201210382092 A CN 201210382092A CN 103728544 A CN103728544 A CN 103728544A
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- light
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- pick
- focusing unit
- light focusing
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A detection device comprises a carrier, a spot measurement device, a light sensing device and a light condensation device. The carrier is used for supporting a plurality of light emitting diode wafers to be measured. The spot measurement device comprises two probes and a power supply unit, the two ends of each probe are electrically connected with one light emitting diode wafer and the power supply unit respectively, so that the corresponding light emitting diode wafer emits a plurality of rays of light. The light sensing device is arranged on one side of the light emitting surface of each light emitting diode wafer and used for receiving the rays of light emitted by the corresponding light emitting diode wafer. The light condensation device is arranged between the light emitting diode wafers and the light sensing device and used for gathering the rays of light emitted by the corresponding light emitting diode wafer.
Description
[technical field]
The invention relates to a kind of pick-up unit, relate to especially a kind of pick-up unit for detection of LED wafer luminescence efficiency.
[background technology]
Along with the lifting of scientific-technical progress and quality of the life, modern more becomes to paying attention to for illumination.From from ancient times by substance combustion to carry out torch, animals and plants oil lamp, candle, the kerosene lamp of luminous lighting, use the luminous incandescent lamp of electric power, fluorescent light, or be light emitting diode (the light-emitting diode commonly using now, LED), all epochmaking role is played the part of in display lighting in mankind's daily life.
Light emitting diode is to send monochromatic light, to reach the effect of illumination or warning by the hole combination of electronics electricity.Light emitting diode is compared to conventional light source, has that luminescence efficiency is high, a long service life, the advantage such as cracky, reaction velocity be not fast.Due under the acceleration of promotion energetically of government in recent years and each city LED street lamp scale expands, use LED to be seen everywhere as lighting use.
General conventional point measurement machine is to detect the luminescence efficiency of LED wafer.Point measurement machine is to provide LED wafer luminous voltage source by probe, the light that LED wafer sends is by the microscope carrier of carrying LED wafer, via the light sensing apparatus of point measurement machine, collect light again, and then judge the luminescence efficiency of LED wafer.But the light that LED wafer sends is the possible restriction because of light sensing apparatus reconnaissance range, and impact detects the accuracy of LED wafer luminescence efficiency.
[summary of the invention]
Because the problem of above-mentioned existing skill, a wherein object of the present invention is providing a kind of pick-up unit exactly, to solve light sensing apparatus, receives the not good problem of optical efficiency.
According to another object of the present invention, a kind of pick-up unit is proposed, the light sending to assemble LED wafer.
According to a further object of the present invention, a kind of pick-up unit is proposed, accurately to detect the luminescence efficiency of LED wafer.
For reaching aforementioned object, the present invention proposes a kind of pick-up unit, and this pick-up unit comprises microscope carrier, spot measurement device, light sensing apparatus and light focusing unit.Microscope carrier is in order to carry a plurality of LED wafers to be measured, and spot measurement device comprises two probes and a power supply unit, two ends of probe are electrically connected respectively one and the power supply unit of a plurality of LED wafers, to make this LED wafer send complex trace light.Light sensing apparatus is located at a side of the exiting surface of LED wafer, in order to receive the complex trace light sending by LED wafer.In addition, light focusing unit is located between LED wafer and light sensing apparatus, in order to reach the object of assembling the complex trace light that sends of LED wafer.And light focusing unit and microscope carrier interlock, use via mobile microscope carrier, to detect the another one of a plurality of LED wafers.Wherein, microscope carrier is consisted of higher than more than 90% material light penetration, and light sensing apparatus can be for example integrating sphere, solar panels, photoelectric crystal or light resistance.
According to the first aspect of the present invention, light focusing unit of the present invention is condensing film, and more particularly, condensing film is the diaphragm that a surface has a plurality of microstructures, in order to assemble by the complex trace light of condensing film.
According to the second aspect of the present invention, light focusing unit of the present invention is condensing film, condensing film comprises base material and a plurality of microstructure with relative upper and lower surface, and these a plurality of microstructures are located at a side surface of the adjacent light sensing apparatus of base material, in order to assemble by the complex trace light of condensing film.Wherein, a plurality of microstructures there is no particular restriction, it is for example and without limitation to the bossy body of a plurality of prism columns, a plurality of arc column or a plurality of tool curved surfaces, and above-mentioned prism columns has the first inclined-plane and the second inclined-plane, and the first inclined-plane and the second inclined-plane form a drift angle; The peak of above-mentioned arc column is circular-arc.
According to elicit illness state sample of the present invention, light focusing unit of the present invention is convergent lens.
According to the 4th aspect of the present invention, light focusing unit of the present invention is lens combination.
According to the 5th aspect of the present invention, light focusing unit of the present invention is light-guide device, and light-guide device comprises incidence surface and exiting surface, and the area of exiting surface is less than the area of incidence surface, and incidence surface is towards LED wafer, and exiting surface is towards light sensing apparatus.
According to the 6th aspect of the present invention, light focusing unit of the present invention is light-guide device, and light-guide device includes at least one optical fiber.
According to the 7th aspect of the present invention, light focusing unit of the present invention is the Multilayer Film of a tool different refractivity.
From the above, pick-up unit of the present invention, it can have one or more following advantage:
(1) pick-up unit of the present invention, assembles by light focusing unit the light that LED wafer sends, and to solve light sensing apparatus, receives the not good problem of optical efficiency.
(2) pick-up unit of the present invention, the light sending by light-guide device guiding LED wafer, to improve light by light focusing unit and to arrive the probability of light sensing apparatus.
(3) pick-up unit of the present invention, can reach the object of accurate detection LED wafer luminescence efficiency.
[accompanying drawing explanation]
Fig. 1 is the diagrammatic cross-section of the first embodiment of pick-up unit of the present invention.
Fig. 2 is the diagrammatic cross-section of the second embodiment of pick-up unit of the present invention.
Fig. 3 A is the first aspect diagrammatic cross-section of light focusing unit of the present invention.
Fig. 3 B to Fig. 3 D is respectively the diagrammatic cross-section of three kinds of demonstration example in the second aspect of light focusing unit of the present invention.
Fig. 4 A is the elicit illness state sample diagrammatic cross-section of light focusing unit of the present invention.
Fig. 4 B is the 4th aspect diagrammatic cross-section of light focusing unit of the present invention.
Fig. 5 A is the 5th aspect diagrammatic cross-section of light focusing unit of the present invention.
Fig. 5 B is the 6th aspect diagrammatic cross-section of light focusing unit of the present invention.
Fig. 6 is the 7th aspect diagrammatic cross-section of light focusing unit of the present invention.
10, A: LED wafer
100: spot measurement device
12: probe
13: power supply unit
15: light sensing apparatus
L1: light
18: microscope carrier
20: light focusing unit
22: base material
17: electronic installation
30: microstructure
32: prism columns
33: arcuation post
34: bossy body
P1: the first inclined-plane
P2: the second inclined-plane
V1: drift angle
50: incidence surface
52: exiting surface
54: optical fiber
60: the film of high index of refraction
62: the film of low-refraction
[embodiment]
Refer to Fig. 1, the diagrammatic cross-section of its first embodiment that is pick-up unit of the present invention.As shown in Figure 1, pick-up unit of the present invention comprises microscope carrier 18, spot measurement device 100, light sensing apparatus 15 and light focusing unit 20.Microscope carrier 18 is in order to carry a plurality of LED wafers 10 to be measured, and spot measurement device 100 comprises two probes 12 and a power supply unit 13, two ends of probe 12 are electrically connected respectively one A and the power supply unit 13 of a plurality of LED wafers, to make this LED wafer A send complex trace light L1.Light sensing apparatus 15 is located at a side of the exiting surface of LED wafer A, the complex trace light L1 sending in order to receive LED wafer A.In addition, light focusing unit 20 is located between LED wafer A and light sensing apparatus 15, in order to reach the object of assembling the complex trace light L1 that LED wafer A sends.And, light focusing unit 20 be optionally with microscope carrier 18 interlocks, use via mobile microscope carrier 18, to detect the another one of a plurality of LED wafers 10.Wherein, microscope carrier 18 is consisted of higher than more than 90% material light penetration, and light sensing apparatus 15 can be for example integrating sphere, solar panels, photoelectric crystal or light resistance.
As shown in Figure 1, pick-up unit of the present invention is applicable to detect the luminescence efficiency of LED wafer 10, its testing process is as follows: the power supply unit 13 of spot measurement device 100 provides the voltage source of the one A of LED wafer via probe 12, to make this LED wafer A send complex trace light L1; The complex trace light L1 incident microscope carrier 18 that LED wafer A sends; By the complex trace light L1 incident light focusing unit 20 of microscope carrier 18, and light focusing unit 20 is assembled this complex trace light L1; And light sensing apparatus 15 receives the complex trace light L1 that light focusing unit 20 is assembled, and by the electronic installation 17 being electrically connected with light sensing apparatus 15, presented the luminescence efficiency of LED wafer A.
Refer to Fig. 2, the diagrammatic cross-section of its second embodiment that is pick-up unit of the present invention.As shown in Figure 2, pick-up unit of the present invention comprises microscope carrier 18, spot measurement device 100, light sensing apparatus 15 and light focusing unit 20.Microscope carrier 18 is in order to carry a plurality of LED wafers 10 to be measured, and spot measurement device 100 comprises two probes 12 and a power supply unit 13, two ends of probe 12 are electrically connected respectively one A and the power supply unit 13 of a plurality of LED wafers, to make this LED wafer A send complex trace light L1.Light sensing apparatus 15 is located at a side of the exiting surface of LED wafer A, the complex trace light L1 sending in order to receive LED wafer A.In addition, light focusing unit 20 is located between LED wafer A and light sensing apparatus 15, in order to reach the object of assembling the complex trace light L1 that LED wafer A sends.And, light focusing unit 20 be optionally with microscope carrier 18 interlocks, use via mobile microscope carrier 18, to detect the another one of a plurality of LED wafers 10.Wherein, light sensing apparatus 15 can be for example integrating sphere, solar panels, photoelectric crystal or light resistance.
As shown in Figures 1 and 2, the difference of the first embodiment of the present invention and the second embodiment be in, the complex trace light L1 that the LED wafer of the second embodiment sends is not by microscope carrier 18, but direct incident light focusing unit 20, to reach the object of collected light L1.Therefore, the microscope carrier 18 of second embodiment of the invention need not consist of the material of the high light penetration of tool characteristic.
As shown in Figure 2, pick-up unit of the present invention is applicable to detect the luminescence efficiency of LED wafer 10, its testing process is as follows: the power supply unit 13 of spot measurement device 100 provides the voltage source of the one A of LED wafer via probe 12, to make this LED wafer A send complex trace light L1; The complex trace light L1 incident light focusing unit 20 that LED wafer A sends, and by light focusing unit 20 to assemble this complex trace light L1; And light sensing apparatus 15 receives the complex trace light L1 that light focusing unit 20 is assembled, and by the electronic installation 17 being electrically connected with light sensing apparatus 15, presented the luminescence efficiency of LED wafer A.
Because the present invention is to reach the object of assembling the complex trace light that sends of LED wafer by light focusing unit, several aspects that only list light focusing unit at this are to further illustrate the form of light focusing unit of the present invention, but these aspects are not in order to limit the present invention.Refer to Fig. 3 A to Fig. 5 B, the diagrammatic cross-section of its first aspect to the six aspects that are light focusing unit of the present invention.But, the embodiment of modifying under any spirit that does not depart from the claims in the present invention and category, the scope that all belongs to the present invention and apply for protection.
Refer to Fig. 3 A, its first aspect diagrammatic cross-section that is light focusing unit of the present invention.As shown in Figure 3A, light focusing unit 20 of the present invention is condensing film, and condensing film is the diaphragm that a surface has a plurality of microstructures 30.In the first aspect of the light focusing unit of the embodiment of the present invention, condensing film is prepared in integrally formed mode, for example, with impression (embossing), the modes such as (injection) that penetrates, make.
Refer to Fig. 3 B to Fig. 3 D, it is respectively the diagrammatic cross-section of three kinds of demonstration example in the second aspect of light focusing unit of the present invention.As shown in Fig. 3 B to Fig. 3 D, light focusing unit 20 of the present invention is condensing film, condensing film comprises base material 22 and a plurality of microstructure with relative upper and lower surface, these a plurality of microstructures are located at a side surface (upper surface of base material or lower surface) of the adjacent light sensing apparatus of base material 22, in order to assemble by the complex trace light of condensing film.Wherein, the microstructure of the second aspect is the bossy body 34 of prism columns 32, arc column 33 or tool curved surfaces, refer to Fig. 3 B, above-mentioned prism columns 32 is located at a side surface (upper surface or lower surface) of base material 22, each prism columns 32 has the first inclined-plane P1 and the second inclined-plane P2, and the first inclined-plane P1 and the second inclined-plane P2 form a drift angle V1.Because the object of the prism columns 32 of the second aspect is to assemble the light of incident light focusing unit 20, the scope that therefore any angle that makes prism columns 32 possess the drift angle V1 of collected light function all belongs to the present invention and applies for protection; Refer to Fig. 3 C, above-mentioned arc column 33 is located at a side surface of base material 22 (upper surface or lower surface), and its peak is circular-arc, assembles by this light of incident light focusing unit 20; Referring again to Fig. 3 D; the bossy body 34 of above-mentioned tool curved surfaces is located at a side surface (upper surface or lower surface) of base material 22; light by curved surfaces with gathering incident light focusing unit 20; and arc column 33 is neither limited to specific radian with bossy body 34, the scope that any curved surfaces with collected light function all belongs to the present invention applies for protection.
In addition, in the second aspect of the light focusing unit of the embodiment of the present invention, the method for making of microstructure can be for example for to be coated with (coating process), net-point printing (dot printing), etching (etching process), laser, chemical vapour deposition technique (chemical vapor deposition in the exiting surface of light focusing unit, the process such as CVD), with the exiting surface formation rule in light focusing unit or irregular coarse surface.And the material of microstructure can be for example polystyrene (polys tyrene), silicon dioxide (silicon dioxide), poly-acryl (polyacrylic), monox (silicon oxide), silicon nitride (silicon nitride), silicon oxynitride (silicon oxynitride) or fluorocarbons (fluorinated carbon).
Refer to Fig. 4 A, the elicit illness state sample diagrammatic cross-section that it is light focusing unit of the present invention.As shown in Figure 4 A, light focusing unit 20 of the present invention can be for example convergent lens.
Refer to Fig. 4 B, its 4th aspect diagrammatic cross-section that is light focusing unit of the present invention.As shown in Figure 4 B, light focusing unit 20 of the present invention can be for example lens combination.Wherein, the lens numbers of lens combination is not limited to specific quantity, as long as can make light focusing unit 20 reach collected light function, all should fall into the claimed scope of the present invention.
Refer to Fig. 5 A, its 5th aspect diagrammatic cross-section that is light focusing unit of the present invention.As shown in Figure 5A, light focusing unit 20 of the present invention is light-guide device, and light-guide device comprises incidence surface 50 and exiting surface 52, and the area of exiting surface 52 is less than the area of incidence surface 50, and incidence surface 50 is towards LED wafer, and exiting surface 52 is towards light sensing apparatus.In addition, the both sides of the light focusing unit 20 of the 5th aspect are more provided with the surface with reflection ray function, and incidence surface 50 is that surface and exiting surface 52 through having thus reflection ray function interconnects.When the light of incident light focusing unit 20 exposes to above-mentioned light focusing unit 20 both sides surperficial, light will be gone back to the inside of light focusing unit 20 by the surface reflection of this tool reflection ray function, therefore can reach the object of further collected light.
Refer to Fig. 5 B, its 6th aspect diagrammatic cross-section that is light focusing unit of the present invention.As shown in Figure 5 B, light focusing unit 20 of the present invention is light-guide device, and light-guide device includes at least one optical fiber 54, to guide the complex trace light of incident light focusing unit 20.But light-guide device of the present invention is not limited to the optical fiber 54 shown in Fig. 5 B, in other words, the scope that any light-guide device with directing light function all belongs to the present invention applies for protection.Moreover, via announcement of the present invention, have the knack of this skill person and should understand kind and the pattern size of the light-guide device with directing light function, therefore repeat no more.
Refer to Fig. 6, its 7th aspect diagrammatic cross-section that is light focusing unit of the present invention.The Multilayer Film (Fig. 6 schematically illustrates double-layer films) that light focusing unit 20 of the present invention is a tool different refractivity, the rete 60 of high index of refraction is stacked together with the rete 62 of low-refraction, by the rete of high index of refraction 60 towards light sensing apparatus, by the increase of refractive index to assemble the light of incident light focusing unit 20, the method for making of Multilayer Film can be for example for being coated with or the mode such as coating makes.In addition; light focusing unit 20 of the present invention is more preferred from the Multilayer Film of a tool gradually changed refractive index; wherein, the rete quantity of Multilayer Film is not limited to specific quantity, as long as can make light focusing unit 20 reach collected light function, all should fall into the claimed scope of the present invention.
In sum, the light that pick-up unit of the present invention sends to assemble LED wafer by light focusing unit, the efficiency that raising light sensing apparatus is collected light, uses the accuracy of the luminescence efficiency that increases pick-up unit measurement LED wafer.
The foregoing is only illustrative, but not be restricted person.Anyly do not depart from spirit of the present invention and category, and equivalent modifications or change that it is carried out all should be contained in claim protection domain.
Claims (15)
1. a pick-up unit, is characterized in that, this pick-up unit at least comprises:
One microscope carrier, this microscope carrier is in order to carry a plurality of LED wafers to be measured;
One spot measurement device, this spot measurement device comprises two probes and a power supply unit, and two ends of these probes are electrically connected respectively one and this power supply unit of these LED wafers, to make this LED wafer send complex trace light;
One light sensing apparatus, this light sensing apparatus is located at a side of the exiting surface of this LED wafer; And
One light focusing unit, this light focusing unit is located between this LED wafer and this light sensing apparatus.
2. pick-up unit as claimed in claim 1, wherein this light focusing unit and this microscope carrier interlock.
3. pick-up unit as claimed in claim 1, wherein this light focusing unit is condensing film.
4. pick-up unit as claimed in claim 3, wherein this condensing film is the diaphragm that a surface has a plurality of microstructures.
5. pick-up unit as claimed in claim 3, wherein this condensing film comprises a base material and a plurality of microstructure, this base material has relative upper and lower surface, and these microstructures are located at a side surface of this light sensing apparatus of vicinity of base material, in order to assemble by these light of this condensing film.
6. pick-up unit as claimed in claim 5, wherein these microstructures are a plurality of prism columns, and each these prism columns has one first inclined-plane and one second inclined-plane, and this first inclined-plane and this second inclined-plane form a drift angle.
7. pick-up unit as claimed in claim 5, wherein these microstructures are a plurality of arc columns.
8. pick-up unit as claimed in claim 5, wherein these microstructures are the bossy body of a plurality of tool curved surfaces.
9. pick-up unit as claimed in claim 1, wherein this light focusing unit is convergent lens.
10. pick-up unit as claimed in claim 1, wherein this light focusing unit is lens combination.
11. pick-up units as claimed in claim 1, wherein this light focusing unit is a light-guide device, this light-guide device comprises an incidence surface and an exiting surface, the area of this exiting surface is less than the area of this incidence surface, wherein this incidence surface is towards this LED wafer, and this exiting surface is towards this light sensing apparatus.
12. pick-up units as claimed in claim 11, wherein this light-guide device includes at least one optical fiber.
13. pick-up units as claimed in claim 1, wherein this light focusing unit is the Multilayer Film of a tool different refractivity.
14. pick-up units as claimed in claim 1, wherein this microscope carrier is consisted of higher than more than 90% material light penetration.
15. pick-up units as claimed in claim 1, wherein this light sensing apparatus is integrating sphere, solar panels, photoelectric crystal or light resistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210382092.5A CN103728544A (en) | 2012-10-10 | 2012-10-10 | Detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210382092.5A CN103728544A (en) | 2012-10-10 | 2012-10-10 | Detection device |
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|---|---|
| CN103728544A true CN103728544A (en) | 2014-04-16 |
Family
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|---|---|---|---|
| CN201210382092.5A Pending CN103728544A (en) | 2012-10-10 | 2012-10-10 | Detection device |
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| CN (1) | CN103728544A (en) |
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| CN104075879A (en) * | 2014-06-06 | 2014-10-01 | 致茂电子(苏州)有限公司 | Light emitting diode measurement device |
| CN105182097A (en) * | 2015-06-15 | 2015-12-23 | 黄染之 | Electrical detection equipment used for detecting wafers |
| WO2020206825A1 (en) * | 2019-04-11 | 2020-10-15 | 武汉华星光电半导体显示技术有限公司 | Display panel and electronic device |
| CN112665825A (en) * | 2019-10-15 | 2021-04-16 | 成都辰显光电有限公司 | Detection device |
| CN112986786A (en) * | 2021-04-28 | 2021-06-18 | 常州纵慧芯光半导体科技有限公司 | Detection device of light source and detection method of light source |
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Application publication date: 20140416 |