CN103727888A - Method and device for measuring film thickness of color filter - Google Patents
Method and device for measuring film thickness of color filter Download PDFInfo
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- CN103727888A CN103727888A CN201310740245.3A CN201310740245A CN103727888A CN 103727888 A CN103727888 A CN 103727888A CN 201310740245 A CN201310740245 A CN 201310740245A CN 103727888 A CN103727888 A CN 103727888A
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- color filter
- film thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
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Abstract
The invention relates to a method and device for measuring film thickness of a color filter. The method comprises the following steps of S1, shooting the color filter by using a color camera to obtain a color image of the color filter, S2, carrying out color gradation matching on the collected color image to recognize different color areas and a background area in the color image, S3, locating and measuring the center of each color area, and measuring the central film thickness of each color area and the film thickness of the background area. Through the implementation of the method and device for measuring the film thickness of the color filter, the areas of different R, G, B colors on the color filter can be recognized accurately, the measuring result difference caused by the fact that the measuring areas selected by measuring personnel are different is avoided by measuring the center positions of the color areas, and the measuring errors caused by the fact that the detected color filter is placed unevenly can be eliminated.
Description
Technical field
The present invention relates to liquid crystal display manufacturing technology, more particularly, relate to a kind of chromatic color filter film thickness measuring method and device.
Background technology
RGB(Red, Green, Blue) processing procedure is the key point that TFT-LCD panel color forms, and in the production of chromatic color filter (Color Filter), by the thickness of management and control rgb light resistance film forming, guarantees color quality.RGB thickness measures the 3 kinds of modes that mainly contain: contact type probe measurement, optical profile type 3D modeling, optical profile type refraction convert.Wherein optical profile type 3D modeling, with it, measure the advantages such as kind is many, measurement flexibility ratio is high, stability and reliability is good, measurement speed is fast, in TFT-LCD industry, more and more applied, and be more suitable for integrated measurement all-in-one, can effectively be reduced equipment cost.
Existing optical profile type 3D metering system is that the image of chromatic color filter GTG figure is shown, then according to this GTG figure, identifies R, G, tri-kinds of pixel regions of B, in the measurement of carrying out each pixel region.Due to R pixel and B pixel very approaching in GTG figure, testing staff is easy to two kinds of pixel regions to be obscured on the one hand, device software is also easy to mistake coupling when identification measures automatically on the other hand, cause occurring detecting mistake, even identification angle is set at the marginal position of pixel region, also can cannot accurately identify different pixel regions from the accuracy limitations of exposure sources because of the size at identification angle; In addition, the detection position difference that different testing staff sets, also can cause the result of measuring there are differences.
Summary of the invention
The object of the invention is to, for existing chromatic color filter, in testing process, cannot accurately tell the defect that the color type of pixel region of detection and different testing staff can draw different testing results, a kind of chromatic color filter film thickness measuring method and the device that can accurately differentiate and measure is provided.
The present invention provided chromatic color filter film thickness measuring method is provided and comprises the following steps:
S1, use colour TV camera are taken chromatic color filter, obtain the coloured image of chromatic color filter;
S2, for the coloured image collecting, carry out color range coupling, identify each in coloured image and have color region and the background area of different colours;
S3, measure respectively the thickness of each color region and background area; Wherein, the film thickness measuring method of each color region is: the position of first determining the central point of each color region, then measure the thickness of the central spot of this color region, and the thickness that is this color region with respect to the altitude record of background area by the central spot at this color region.
Chromatic color filter film thickness measuring method of the present invention, wherein step S3 also comprises: be provided with the detection block of foresight, mobile described detection block, to described color region, makes in the central area of foresight in color region.
Chromatic color filter film thickness measuring method of the present invention arranges diameter and is the identification circle of 20 microns to 40 microns in the foresight of described detection block, when described identification circle is in color region to be detected, determines in the central area of described foresight in color region.
Chromatic color filter film thickness measuring method of the present invention, the background detection frame in the arranged outside of described detection block for detection of background area, is used this background detection frame to determine the position, background area that need to detect thickness.
Chromatic color filter film thickness measuring method of the present invention, described step S3 also comprises, uses White Light Interferometer to measure the thickness of chromatic color filter corresponding within the thickness of chromatic color filter corresponding within described identification circle and background detection frame.
The present invention also provides a kind of chromatic color filter film thickness measurement device, comprising:
Colour TV camera, for taking chromatic color filter, obtains the coloured image of chromatic color filter;
The color range recognizer component being connected with colour TV camera, for the coloured image collecting is carried out to color range coupling, identifies each in coloured image and has color region and the background area of different colours;
The fixation and recognition assembly being connected with color range recognizer component, the center for location survey to each color region;
The film thickness measuring assembly being connected with fixation and recognition assembly, measures for the center thickness to a kind of color region and the thickness of background area, and the thickness that is this color region with respect to the altitude record of background area by the central spot at this color region.
Chromatic color filter film thickness measurement device of the present invention, described location survey assembly comprises the detection block with foresight, location survey assembly moves described detection block to described color region, makes in the central area of foresight in color region.
Chromatic color filter film thickness measurement device of the present invention, is provided with diameter and is the identification circle of 20 microns to 40 microns in the foresight of described detection block, when described identification circle is in color region to be detected, determine in the central area of described foresight in color region.
Chromatic color filter film thickness measurement device of the present invention, the outside of described detection block is provided with the background detection frame for detection of background area, and described background detection frame is for determining the position, background area that need to detect thickness.
Chromatic color filter film thickness measurement device of the present invention, described film thickness measuring assembly is white light interferometer, described white light interferometer is measured within described identification circle the thickness of chromatic color filter corresponding within the thickness of corresponding chromatic color filter and background detection frame.
Implement chromatic color filter film thickness measuring method of the present invention and device, can accurately tell the region of the different colours of R, G on chromatic color filter, B, simultaneously by measuring the center position of color region, avoid the measurement result difference causing because of the difference of the selected measured zone of survey crew, can also eliminate the measuring error that out-of-flatness causes of putting of chromatic color filter because detecting.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the present invention will be described, wherein:
Fig. 1 is the sectional view of the chromatic color filter measured of the present invention;
Fig. 2 adopts prior art to carry out to chromatic color filter the image that GTG shooting obtains;
Fig. 3 is the process flow diagram of the present invention's chromatic color filter film thickness measuring method that preferred embodiment provides first;
Fig. 4 is the image according to the chromatic color filter of the present invention's acquisition;
Fig. 5 is the schematic diagram of the coloured image of Fig. 4 being selected to detection position;
Fig. 6 is the cut-open view longitudinally of detection pixel of Fig. 5;
Fig. 7 is the functional block diagram of chromatic color filter film thickness measurement device of the present invention;
Fig. 8 is the structural representation of the present invention's chromatic color filter film thickness measurement device that preferred embodiment provides first;
The structural representation of the chromatic color filter film thickness measurement device that Fig. 9 provides for another embodiment of the present invention.
Embodiment
Below by the drawings and specific embodiments, the present invention will be described.
Be illustrated in figure 1 the horizontal section structural representation of the chromatic color filter (Color Filter) using in TFT-LCD.This chromatic color filter comprises the glass substrate 100 that is positioned at bottom, on glass substrate 100, by various ways such as deposition, plated films, form the lighttight black matrix" 400(blackmatrix of one deck, BM), between black matrix" 400, be provided with the pixel cell of different colours, for example, at Fig. 1, comprise the red pixel 201(R pixel of repeated arrangement in order), blue pixel 202(B pixel) and green pixel 203(G pixel).Above these pixel cells and black matrix" 400, be coated with indium oxide layer tin 300(ITO).When need to show different colors, by its printing opacity whether of TFT circuit control corresponding to each pixel cell.Obviously, the thickness of each pixel cell can affect the quality of Show Color greatly, and the thickness of black matrix" 400 affects the mutual interference degree of the color between adjacent pixel cell.
In prior art, adopt gray scale image measuring method to measure, and adopt in the image as shown in Figure 2 obtaining in this way chromatic color filter, the gray scale image of red pixel 201, blue pixel 202 is very approaching, is easy to occur identification error.Even identification angle is set at the edge of pixel cell, if the edge of blue pixel in Fig. 2 202 is non-smooth curve, but for considering of aperture opening ratio, identification angle should not arrange excessive, add the lower exposure sources of RGB exposure manufacture process service precision, the identification angle of doing is in fact conventionally not obvious, the differentiation of RGB is helped little.
In order overcoming, in existing gray scale image mensuration, to be difficult to identification and measurement result can occur the problem that measurement result is not identical with the difference of survey crew, to the invention provides chromatic color filter film thickness measuring method as shown in Figure 3.First in step S1, use colour TV camera to take from the front of chromatic color filter, obtain the coloured image of chromatic color filter, the structure of this coloured image as shown in Figure 4.In order to occur in the image that guarantees to need the color region of measuring to obtain in shooting, conventionally take 3 or above colored pixels, for example the colored pixels that comprises 3 next-door neighbours in Fig. 4.
In step S2, for the coloured image collecting in previous step, carry out color range coupling, to identify regions of different colours and background area in coloured image.For example in Fig. 4,3 different colored pixels are respectively: red pixel 201, blue pixel 202 and green pixel 203, background is black matrix" 400.By color range, identify, tester can judge the position that needs the pixel of measuring exactly, can not obscure with other pixel, thereby avoid existing gray scale image mensuration to be difficult to distinguish the picture element flaw of red blue two kinds of colors.
Distinguish after the color that needs to detect, need to determine which position of concrete detection pixel as thickness measure, due in manual measurement, the detection position that different testing staff chooses is different, can cause the result detecting to have deviation.In order to overcome this problem, by the center of automatic detection colored pixels, overcome this problem in the present embodiment.In step S3, location survey, to the center of each color region, is measured the center thickness of each color region and the thickness of background area.Be illustrated in figure 5 a schematic diagram that detects green pixel 203.Detection block with cross foresight 503 is moved to the top of coloured image Green pixel 203, detection block 503 is slightly larger than the size of green pixel 203, make whole green pixel drop on the inside of detection block 503, a circular identification circle 504 is set simultaneously in cross foresight, in the present embodiment, the diameter of identification circle 504 is 20 to 40 microns, when regulating detection block 503, need to guarantee that identification circle 504 is positioned at the inside of green pixel 203 all the time, when identification circle 504 does not exceed the inner space of green pixel 203, can determine that foresight now drops on the zone line of green pixel 203.By the detection block 503 of such setting, near of central point is dropped in the position that can take care of yourself detection green pixel 203 thickness, because near thickness fluctuating pixel center point is minimum, thereby can reflect the most accurately the thickness value of this green pixel 203.
In order to overcome chromatic color filter to be detected, when placing, there is the problem tilting and cause thickness measure to go out accurately, in the both sides up and down of detection block 503, be provided for detecting the background detection frame (501,502) of black matrix".By detecting the thickness of black matrix" of two background detection frames (501,502), can eliminate because place the detection error that tilts to bring.Its principle as shown in Figure 6.Fig. 6 is green pixel 203 in Fig. 5 cut-open view longitudinally.When chromatic color filter fails to realize while keeping flat completely, for the thickness of green pixel 203, detect and certainly exist error, and by detecting the thickness of the corresponding black matrix" 400 of two background detection frames (501,502), then by the processing of software, using the line of the check point of two black matrix"s 400 as horizontal line, after level has defined, need to set reference position and calculate thickness, be the thickness of this green pixel 203 by the central spot at this green pixel 203 with respect to the altitude record of the background area of background detection frame (501,502).Because product comprises various rete aliasings, in actual production, also often need to be take diverse location as benchmark, thus calculate relative thickness.For example detect the thickness of green pixel 203 with respect to black matrix" 203, or with respect to thickness of glass substrate 100 etc.
Background detection frame (501,502) is in the present embodiment positioned at the both sides up and down of detection block 503, can measure along the inclination situation of green pixel 203 vertical directions.It will be understood by those of skill in the art that background detection frame (501,502) also can be arranged on the left and right sides of green pixel 203, to eliminate the measuring error that inclination in a lateral direction brings.
In the present embodiment, can adopt the method for multiple existing detection thickness to carry out film thickness measuring to the region of each colored pixels and black matrix".For example conventional detection mode is to use a White Light Interferometer, utilizes White Light Interferometer to build the surperficial 3D pattern of chromatic color filter, then calculates the thickness of measuring position.
If Fig. 7 is the functional block diagram of chromatic color filter film thickness measurement device provided by the present invention, chromatic color filter film thickness measurement device provided by the present invention comprises that one for taking the colour TV camera of chromatic color filter, after this colour TV camera obtains the coloured image of chromatic color filter, coloured image is sent on the color range recognizer component being connected with colour TV camera.This color range recognizer component is analyzed by color range, determines the different colours pixel on coloured image; When determine on coloured image different colours pixel time, survey crew just can be determined the thickness that need to measure which colored pixels accurately.When determining after color, location survey assembly navigates to the position of measurement the zone line of colored pixels, then by film thickness measuring assembly, measured the thickness of this zone line, because the thickness of the zone line of colored pixels rises and falls minimumly, can obtain thickness measurement data the most accurately.
The concrete chromatic color filter film thickness measurement device as shown in Figure 8 that the invention provides.Directly over chromatic color filter to be detected, be provided for Color Image Acquisition system and the membrane thickness measuring system of the front color pattern that gathers chromatic color filter.In an attainable embodiment, along light path, set gradually interference objective 540, spectrum groupware 530 and the image-forming assembly 510 with half-reflection and half-transmission characteristic from bottom to top.45 ° of tilted-putted spectroscopes 550 are installed in spectrum groupware 530, on the sidewall of spectrum groupware 530, offer light hole with the position of spectroscope 550 sustained heights, at the aperture position of light hole, lay white light source 520, the white light that white light source 520 sends can be radiated on spectroscope 550.
When measuring, first interference objective 540 is not installed, by image-forming assembly 510, gather the coloured image of chromatic color filter, that is, image-forming assembly 510 is used as colour TV camera.The coloured image collecting is sent to the image processing system (not indicating in the drawings) being connected with image-forming assembly 510 and carry out analyzing and processing, this image processing system comprises color range recognizer component and fixation and recognition assembly.First image processing system carries out color range identification to the coloured image collecting, to identify red pixel 201, blue pixel 202 and the particular location of green pixel 203 on black matrix" 400.Then image processing system adopts detection block 503 as shown in Figure 5, need to monitor the pixel of thickness and draw a circle to approve, thereby determine the position of detecting.
Complete after the determining of the identification of above-mentioned color range and detection position, interference objective 540 is arranged on to the bottom of spectrum groupware 530, carry out the film thickness measuring of selection area.The white light sending from white light source 520 is through the reflection of spectroscope 550, be radiated on interference objective 540, the half of this white light sees through interference objective 540 and is radiated on chromatic color filter to be detected, and second half is reflected, and is radiated on image-forming assembly 510 through spectroscope 550; And see through interference objective 540 after being irradiated to chromatic color filter, along being reflected back on image-forming assembly 510, produce the phenomenon of white light interference.Utilize white light same tone short, be difficult for producing the characteristic of interfering, see through the frequency light wave close with amplitude, can form low same tone white light interference ripple, and chromatic color filter surface undulation will affect the generation height of interference wave, follow this height change, ask for and interfere zero optical path difference position, can obtain the integral surface profile of chromatic color filter to be measured, and then determine the object under test height of this pixel.
Consider that image-forming assembly conventional in white light interferometer 510 is for CCD, do not having lensed auxiliary under, its imaging performance is general, for this reason, the present invention improves on the measurement mechanism shown in Fig. 8, and another embodiment of measurement mechanism is as shown in Figure 9 provided.In the present embodiment, original interference lens 540 with semi-transparent semi-reflecting characteristic are arranged on a rotary converter 570, on converter 570, are also provided with one for gathering the colour TV camera 560 of colour picture.
When the measurement mechanism that uses the present embodiment carries out film thickness measuring, first the colour TV camera on converter 570 560 is rotated on the optical axis position of spectrum groupware 530, utilize colour TV camera 560 to gather the coloured image of chromatic color filter, the coloured image collecting is sent to the image processing system (not indicating in the drawings) being connected with colour TV camera 560 and carry out analyzing and processing, first image processing system carries out color range identification to the coloured image collecting, to identify red pixel 201, blue pixel 202 and the particular location of green pixel 203 on black matrix" 400.Then image processing system adopts detection block 503 as shown in Figure 5, need to monitor the pixel of thickness and draw a circle to approve, thereby determine the position of detecting.
After determining the position of detection, rotate converter 570, to interfere lens 540 to be converted on the optical axis position of spectrum groupware 530, then utilize identification circle 504 in White Light Interferometer identification Fig. 5 and the thickness of two background detection frames (501,502) institute corresponding region.Thickness by three above-mentioned monitored areas detects, and can eliminate the measuring error of bringing due to the inclination of chromatic color filter, obtains thickness data accurately.
The film thickness measuring scheme of the chromatic color filter that the present invention is based on white light interferometer is provided in two embodiment of Fig. 8, Fig. 9; those skilled in the art also can adopt other film thickness measuring mode to realize the present invention; as long as its center of being identified and navigated to the colored pixels identifying by color range is measured, within all dropping into protection scope of the present invention.
These are only the specific embodiment of the invention, can not limit scope of the present invention with this, equalization that those skilled in the art in the art do according to this creation changes, and the change known of those skilled in that art, all should still belong to the scope that the present invention is contained.
Claims (10)
1. a chromatic color filter film thickness measuring method, is characterized in that, comprises the following steps:
S1, use colour TV camera are taken chromatic color filter, obtain the coloured image of chromatic color filter;
S2, the coloured image collecting is carried out to color range coupling, identify each in coloured image and have color region and the background area of different colours;
S3, measure respectively the thickness of each color region and background area; Wherein, the film thickness measuring method of each color region is: the position of first determining the central point of each color region, then measure the thickness of the central spot of this color region, and the thickness that is this color region with respect to the altitude record of background area by the central spot at this color region.
2. chromatic color filter film thickness measuring method according to claim 1, is characterized in that, described step S3 also comprises: be provided with the detection block of foresight, mobile described detection block, to described color region, makes in the central area of foresight in color region.
3. chromatic color filter film thickness measuring method according to claim 2, it is characterized in that, described step S3 also comprises: diameter is set in the foresight of described detection block is the identification circle of 20 microns to 40 microns, when described identification circle is in color region to be detected, determine in the central area of described foresight in color region.
4. chromatic color filter film thickness measuring method according to claim 3, it is characterized in that, described step S3 also comprises: the background detection frame in the arranged outside of described detection block for detection of background area, is used this background detection frame to determine the position, background area that need to detect thickness.
5. chromatic color filter film thickness measuring method according to claim 4, it is characterized in that, described step S3 also comprises, uses White Light Interferometer to measure the thickness of chromatic color filter corresponding within the thickness of chromatic color filter corresponding within described identification circle and background detection frame.
6. a chromatic color filter film thickness measurement device, is characterized in that, comprising:
Colour TV camera, for taking chromatic color filter, obtains the coloured image of chromatic color filter;
The color range recognizer component being connected with colour TV camera, for the coloured image collecting is carried out to color range coupling, identifies each in coloured image and has color region and the background area of different colours;
The fixation and recognition assembly being connected with color range recognizer component, the center for location survey to each color region;
The film thickness measuring assembly being connected with fixation and recognition assembly, measures for the center thickness to a kind of color region and the thickness of background area, and the thickness that is this color region with respect to the altitude record of background area by the central spot at this color region.
7. chromatic color filter film thickness measurement device according to claim 6, it is characterized in that, described location survey assembly comprises the detection block with foresight, and location survey assembly moves described detection block to described color region, makes in the central area of foresight in color region.
8. chromatic color filter film thickness measurement device according to claim 7, it is characterized in that, diameter be set be the identification circle of 20 microns to 40 microns in the foresight of described detection block, when described identification circle is in color region to be detected, determine in the central area of described foresight in color region.
9. chromatic color filter film thickness measurement device according to claim 8, is characterized in that, the outside of described detection block is provided with the background detection frame for detection of background area, and described background detection frame is for determining the position, background area that need to detect thickness.
10. chromatic color filter film thickness measurement device according to claim 9, it is characterized in that, described film thickness measuring assembly is white light interferometer, and described white light interferometer is measured within described identification circle the thickness of chromatic color filter corresponding within the thickness of corresponding chromatic color filter and background detection frame.
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| CN201310740245.3A CN103727888B (en) | 2013-12-27 | 2013-12-27 | Chromatic color filter film thickness measuring method and device |
| PCT/CN2014/070482 WO2015096225A1 (en) | 2013-12-27 | 2014-01-10 | Method and apparatus for measuring film thickness of color filter |
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| CN201310740245.3A CN103727888B (en) | 2013-12-27 | 2013-12-27 | Chromatic color filter film thickness measuring method and device |
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| CN103727888B (en) | 2016-06-15 |
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