CN113624458B - Film uniformity detecting system based on double-path full-projection light - Google Patents

Film uniformity detecting system based on double-path full-projection light Download PDF

Info

Publication number
CN113624458B
CN113624458B CN202110956712.0A CN202110956712A CN113624458B CN 113624458 B CN113624458 B CN 113624458B CN 202110956712 A CN202110956712 A CN 202110956712A CN 113624458 B CN113624458 B CN 113624458B
Authority
CN
China
Prior art keywords
film
light
unit
film uniformity
system based
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110956712.0A
Other languages
Chinese (zh)
Other versions
CN113624458A (en
Inventor
董俊
马冬
何俊明
马凡
徐盼盼
姜铭坤
黄小文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anhui Zhongke Deji Intelligent Technology Co ltd
Hefei Institutes of Physical Science of CAS
Original Assignee
Anhui Zhongke Deji Intelligent Technology Co ltd
Hefei Institutes of Physical Science of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anhui Zhongke Deji Intelligent Technology Co ltd, Hefei Institutes of Physical Science of CAS filed Critical Anhui Zhongke Deji Intelligent Technology Co ltd
Priority to CN202110956712.0A priority Critical patent/CN113624458B/en
Publication of CN113624458A publication Critical patent/CN113624458A/en
Application granted granted Critical
Publication of CN113624458B publication Critical patent/CN113624458B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0278Detecting defects of the object to be tested, e.g. scratches or dust

Landscapes

  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The invention discloses a film uniformity detection system based on double-path full-projection light, which comprises an imaging unit, an acquisition unit, a processing unit, a storage unit and a control unit, wherein the imaging unit is used for acquiring the full-path full-projection light; the imaging unit is used for generating P polarized light for uniform illumination and comprises an upper surface imaging unit and a lower surface imaging unit which are respectively positioned on the upper surface and the lower surface of the transparent film, and the P polarized light is respectively incident on the upper surface and the lower surface of the transparent film at the same Brewster angle to realize double-path total transmission; the acquisition unit comprises an objective table and a plurality of linear array cameras, and is used for acquiring the film image and calibrating the multiple cameras; the processing unit is used for identifying the film image by adopting a preset film uniformity detection model and detecting whether the film image is distorted or not so as to realize film uniformity judgment. The invention can detect the uniformity of the upper surface, the lower surface and the inside of the transparent film.

Description

Film uniformity detecting system based on double-path full-projection light
Technical Field
The invention relates to the technical field of film uniformity detection, in particular to a film uniformity detection system based on double-path full-projection light.
Background
The film is widely applied to the fields of liquid crystal televisions, tablet computers, smart phones, vehicle-mounted display screens and the like, is limited by conditions such as production process or production environment, and is easy to generate quality defects in the production process, and mainly shows that the film has uneven thickness, scratches appear on the surface, bubbles are generated in the film, or impurities, dust and the like are doped in the film, so that the film uniformity detection becomes an important ring for controlling the production quality of film materials.
Conventional testing is typically accomplished by visual inspection and simple measurement by experienced test personnel, and the test results lack reliability and accuracy, cannot be quantitatively evaluated, and are difficult to observe for a long period of time. For transparent films such as polyester films, the defect of a large number of isolated noise points of the acquired film images is caused, so that the subsequent processing of the images is seriously influenced, and the judgment accuracy of the uniformity of the films is further influenced.
Therefore, it is desirable to provide a novel thin film uniformity detection system based on two-way full-projection light to solve the above-mentioned problems.
Disclosure of Invention
The invention aims to solve the technical problem of providing a film uniformity detection system based on double-path full-projection light, which can realize the detection of the uniformity of the upper surface, the lower surface and the inside of a transparent film.
In order to solve the technical problems, the invention adopts a technical scheme that: the thin film uniformity detection system based on the double-path full-projection light comprises an imaging unit, an acquisition unit, a processing unit, a storage unit and a control unit;
The imaging unit is used for generating P polarized light for uniform illumination and comprises an upper surface imaging unit and a lower surface imaging unit which are respectively positioned on the upper surface and the lower surface of the transparent film, and the P polarized light is respectively incident on the upper surface and the lower surface of the transparent film at the same Brewster angle to realize double-path total transmission;
The acquisition unit comprises an objective table and two groups of linear array cameras, and is used for acquiring film images and calibrating a plurality of cameras, wherein the two groups of linear array cameras are respectively positioned on the upper surface and the lower surface of the transparent film;
The processing unit is used for identifying the film image by adopting a preset film uniformity detection model and detecting whether the film image is distorted or not so as to realize film uniformity judgment;
the storage unit is used for pre-storing various filtering algorithms, film uniformity detection models and film uniformity and non-uniformity typical film image libraries obtained by the linear array camera;
the control unit is used for setting various control parameters of the imaging unit, the acquisition unit and the processing unit.
In a preferred embodiment of the present invention, the imaging unit includes a light source, a P-polarizer, an optical filter, a collimator lens, a light homogenizing lens and a condensing lens, which are sequentially disposed, wherein the centers of the light source, the P-polarizer, the optical filter, the collimator lens, the light homogenizing lens and the condensing lens are all located on the same axis, the light homogenizing lens is located at the focal point of the condensing lens, the light emitted by the light source passes through the P-polarizer to obtain P-polarized light, the optical filter is used for adjusting the light intensity and the wavelength of the light source, and finally the P-polarized light with uniform illumination is generated after the light passes through the collimator lens, the light homogenizing lens and the condensing lens sequentially.
In a preferred embodiment of the present invention, each group of line cameras is provided with two line cameras at the light and dark areas on the upper and lower surfaces of the transparent film, respectively, to obtain high quality images of all defects.
In a preferred embodiment of the present invention, the objective table is used for carrying a film to be detected, and is matched with an external film conveying system to realize high-precision imaging of the film to be detected, and a start position sensor and an end position sensor are respectively installed at a start treatment position and an end position.
In a preferred embodiment of the present invention, the storage unit is further configured to pre-store a dictionary of parameter relationships between the film defect type and the film transfer speed and the light source and the line camera.
In a preferred embodiment of the invention, the film uniformity detection model provides two detection modes, including a precision mode and a simple mode.
Furthermore, the accurate mode uses a parallel feature extraction network to extract the image features of the film detected region obtained by each linear array camera respectively, then uses a multi-mode fusion network to carry out fusion construction, and carries out training through marked film uniform and non-uniform film image sets.
Furthermore, the simple mode compares the similarity between the film detected area image obtained by each linear array camera and the image obtained by the corresponding linear array camera in the typical film image library, and provides quick and simple detection of whether the film is uniform or not or the designated defect type according to the set detection conditions.
In a preferred embodiment of the present invention, the detection system further comprises a display unit for displaying each film uniformity detection condition on a large screen.
In a preferred embodiment of the invention, the inspection system further comprises an execution unit for detecting an operation after a defective film is detected.
The beneficial effects of the invention are as follows:
(1) According to the invention, the light source sequentially passes through the P polaroid, the optical filter, the collimating lens, the light homogenizing lens and the condensing lens to generate uniformly illuminated P polarized light, and the P polarized light is respectively incident on the upper surface and the lower surface of the transparent film at the same Brewster angle, so that double-path total transmission is realized, and the influence of reflected light on the imaging quality of the linear camera is reduced;
(2) According to the invention, the linear array camera which projects the transmitted light on the upper and lower surfaces of the film to the positions of the bright field and the dark field is used for imaging, the image characteristics are extracted by adopting the characteristic extraction network, and the detection is carried out after the fusion of the multi-mode fusion network, so that the upper and lower surfaces and the internal uniformity of the transparent film are detected;
(3) The film uniformity detection model provides two detection modes, namely an accurate mode and a simple mode, and has more flexibility.
Drawings
FIG. 1 is a block diagram of a preferred embodiment of a dual path full projection light based thin film uniformity detection system according to the present invention;
FIG. 2 is a block diagram of the optical path of the imaging unit;
Fig. 3 is a schematic diagram of the optical path of the detection system.
Detailed Description
The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making clear and defining the scope of the present invention.
Referring to fig. 1, an embodiment of the present invention includes:
A film uniformity detection system based on double-path full-projection light comprises an imaging unit, an acquisition unit, a processing unit, a storage unit, a control unit, a display unit and an execution unit.
Referring to fig. 2, the imaging unit is configured to generate P polarized light for uniform illumination, and includes a light source, a P polarizer, an optical filter, a collimator lens, a light homogenizing lens, and a condensing lens, which are sequentially disposed, and the centers of the light source, the P polarizer, the optical filter, the collimator lens, the light homogenizing lens, and the condensing lens are all located on the same axis, and the light homogenizing lens is located on a focal point of the condensing lens. Light emitted by the light source passes through the P polaroid to obtain P polarized light, then passes through the optical filter to adjust the light intensity and the wavelength of the light source, and sequentially passes through the collimating lens, the light homogenizing lens and the condensing lens to generate uniformly illuminated P polarized light. The imaging units are two groups and comprise an upper surface imaging unit and a lower surface imaging unit, the imaging units are respectively positioned on the upper surface and the lower surface of the transparent film, and P polarized light is respectively incident on the upper surface and the lower surface of the transparent film at the same Brewster angle to realize double-path total transmission.
Further, the light source is a visible light source or a laser light source or an infrared light source.
Referring to fig. 3, the acquisition unit includes an objective table, a sliding guide rail, and two groups of linear array cameras, and is used for acquiring the film image and performing multi-camera calibration.
Furthermore, the linear array camera can adopt a linear array CCD camera or/and a CMOS camera so as to improve imaging efficiency.
The object stage is positioned on the sliding guide rail and can be a certain area of the sliding guide rail. And the external film conveying system conveys the film to be detected to the sliding guide rail. The objective table is used for bearing the film to be detected, and can realize high-precision imaging of the film to be detected by matching with an external film conveying system, like a production line production link, the film to be detected continuously passes through the objective table, and image acquisition and detection can be realized without stopping.
Specifically, the object stage is provided with a starting position sensor and an end position sensor at a starting position and an end position respectively, and image acquisition and detection are automatically started and closed under the signal discrimination of the sensors.
The two groups of linear array cameras are respectively positioned on the upper surface and the lower surface of the transparent film, wherein the upper surface linear array camera is used for receiving light rays transmitted by the upper surface after the lower surface imaging unit is incident on the lower surface for imaging, and the lower surface linear array camera is used for receiving light rays transmitted by the lower surface after the upper surface imaging unit is incident on the upper surface for imaging. As the incident light rays on the upper surface and the lower surface are incident by adopting the Brewster angle, the total transmission can be realized, and the influence of reflected light on the imaging quality of the linear camera is reduced.
Specifically, because a proper imaging mode affects film uniformity detection, such as different defects have different imaging characteristics, and certain defects are sensitive to angles, two linear cameras are respectively arranged on the upper surface, the lower surface bright field and the dark field of a transparent film for a dark field imaging mode and a bright field imaging mode which mainly exist, so that high-quality images of all the defects are obtained.
The multi-camera calibration method comprises the following steps: firstly, aligning a film to be detected to the position of the object stage near the end point through a position sensor arranged on the object stage, giving a coordinate origin O, wherein the whole area of the film to be detected is arranged on the object stage, establishing a world coordinate system by taking the horizontal conveying direction as an X axis and the vertical direction as a Y axis, and dividing grid points of the whole area of the film to be detected; secondly, placing a plurality of calibration plates with known position relations on the objective table, wherein each linear array camera can at least shoot one calibration plate, and the coordinate values of the calibration plates are given under a world coordinate system; finally, each linear array camera collects the image of the object stage containing the calibration plate and performs calibration by adopting a Zhang Zhengyou calibration method, a camera coordinate system is respectively established, the respective pixel coordinates of the calibration plate in the camera coordinate system are obtained, the pixel coordinate system in each camera visual unit is established, the mapping relation between the coordinate value of each pixel unit of the whole pixel coordinate system and the coordinate value corresponding to the world coordinate system is determined, the coordinate value of the grid point is given according to the mapping relation, and the multi-camera calibration is realized.
The processing unit is used for identifying the film image by adopting a preset film uniformity detection model and detecting whether the film image is distorted or not so as to realize film uniformity judgment.
In order to improve the detection accuracy, the processing unit may further perform preprocessing on the film image information, where the preprocessing includes median filtering, gaussian filtering or wavelet threshold filtering denoising on the acquired monitoring area image.
Furthermore, the processing unit can also judge the distortion type of the film image to give the film defect type.
The storage unit is used for pre-storing various filtering algorithms, including median filtering, gaussian filtering, wavelet threshold filtering and innovation self-adaptive Kalman filtering algorithms, a film uniformity detection model, a film uniform and non-uniform typical film image library obtained by the linear array camera, and a parameter relation dictionary for pre-storing film defect types, film conveying speeds, light sources and the linear array camera.
Further, the film uniformity detection model provides two detection modes, including a precise mode and a simple mode, for respectively giving a more accurate but relatively time-consuming detection result and a more accurate but relatively fast detection result, and the film uniformity detection is more flexible.
Specifically, the accurate mode uses a parallel feature extraction network to extract the image features of the film detected region obtained by each linear array camera respectively, then uses a multi-mode fusion network to carry out fusion construction, and carries out training through marked film uniform and non-uniform film image sets.
Wherein the feature extraction network includes, but is not limited to, CNN, RNN, LSTM and like network models, and combinations or variations thereof.
The multi-mode fusion network adopts a full-connection network, and generally adopts 2-4 layers. The output of the former layer of fully-connected network is used as the input of the latter layer of fully-connected network, the input of the first layer of fully-connected network is the characteristic vector obtained by the characteristic extraction network, the output of the last layer of fully-connected network is the characteristic vector representing the uniformity condition of the film, the length of the characteristic vector is equal to the number of film uniformity condition labels contained in a group of input detection data (the uniformity condition labels are detected as a consistency and a non-consistency type, the defect type is detected as a defect type), each element of the characteristic vector respectively represents the probability of uniformity conditions of various films, the type with the maximum probability and the probability exceeding a set threshold is the determined film uniformity classification, and meanwhile, the grid point coordinate range of the defect in the film detected region is given.
Preferably, the characteristic extraction network can adopt a ResNeXt improved U-Net network, and a residual error module is introduced, and mainly comprises two parts of downsampling and upsampling. The downsampling adopts a typical convolution network structure, each feature scale adopts two 3×3 convolutions, and then the 2×2 maximum pooling is used for downsampling, and the channel number of each downsampling feature is doubled. The up-sampling uses the largest pooled up-convolution (the number of characteristic channels is reduced by half), the up-sampling is directly spliced with the characteristic diagram of the downsampled part with the same scale, then two 3X 3 convolutions are used, and finally the characteristic diagram is mapped to the number of channels with the actually required classification number by using 1X 3 convolutions for classification detection.
Specifically, the simple mode compares the similarity between the film detected area image obtained by each linear array camera and the image obtained by the corresponding linear array camera in the typical film image library, and gives out the quick and simple detection of whether the film is uniform or not or the designated defect type according to the set detection conditions. The uniformity detection shown in the following table 1 is performed, and the result judged to be pending can be manually detected again by coding marks, interface popup windows and voice reminding related personnel.
The set detection conditions can be used for constructing a judgment matrix scored by an expert by quantitatively analyzing factors such as similarity, camera number and the like, quantitatively analyzing the influence weight of the factors on a detection result, giving out an expert scoring value based on the factors, and evaluating and classifying the detection result on the basis, for example, whether the uniformity of the film is detected, and whether the film is consistent, undetermined and inconsistent.
TABLE 1
Preferably, when the films are uniform, the film images acquired by the two groups of linear cameras are almost the same, namely have high similarity, and the simple mode can also compare the similarity between the film image to be detected obtained by each group of linear cameras and the film image obtained by the other group of corresponding linear cameras, so that the film uniformity can be rapidly and simply detected without depending on a typical film image library, and the application range is wider.
The control unit is used for setting various control parameters of the imaging unit, the acquisition unit and the processing unit, including the bandwidth of the optical filter, the illumination angle of the light source, the bright-dark domain position of the linear array camera, the acquisition line frequency and the detection mode. Particularly, the acquisition line frequency of the linear array camera is controlled to be matched with the film conveying speed, the maximum conveying speed of the film is limited according to the acquisition line frequency, and the relation between the acquisition line frequency and the film conveying speed satisfies f=v, wherein f represents the acquisition line frequency, v represents the film conveying speed, b represents the amplification ratio of an imaging unit, and s represents the pixel size of the linear array camera. The working parameters of the two imaging units and the two groups of linear array cameras are required to be respectively kept consistent.
Further, the control unit receives film conveying speed information perceived by an encoder in an external film conveying system, carries out high-precision speed measurement by adopting an innovation self-adaptive Kalman filtering algorithm, searches according to a film defect type, the film conveying speed and a parameter relation dictionary of a light source and a linear camera, obtains parameter values of the current light source and the linear camera, and sets the parameter values.
The display unit is used for carrying out large-screen visual display on the uniformity detection condition of each film, and comprises the batch number, the system number, the detection time, the operator information and the like of the currently detected film, the number of the detected films, the number of the films to be detected, the number of qualified films and the like.
Furthermore, the display unit supports the display of terminals such as mobile phones, tablets, computers and the like, can give batch numbers of unqualified films by one key, and supports data export.
The execution unit is used for detecting the operation after the unqualified film.
Furthermore, the execution unit can be customized according to the needs of the customer, such as providing an alarm message, or performing voice playing of the batch number of the unqualified film, etc.
The foregoing description is only illustrative of the present invention and is not intended to limit the scope of the invention, and all equivalent structures or equivalent processes or direct or indirect application in other related technical fields are included in the scope of the present invention.

Claims (9)

1. The film uniformity detection system based on the double-path full-projection light is characterized by comprising an imaging unit, an acquisition unit, a processing unit, a storage unit and a control unit;
The imaging unit is used for generating P polarized light for uniform illumination and comprises an upper surface imaging unit and a lower surface imaging unit which are respectively positioned on the upper surface and the lower surface of the transparent film, and the P polarized light is respectively incident on the upper surface and the lower surface of the transparent film at the same Brewster angle to realize double-path total transmission;
The imaging unit comprises a light source, a P polaroid, an optical filter, a collimating lens, a light homogenizing lens and a condensing lens which are sequentially arranged, wherein the centers of the light source, the optical filter, the collimating lens, the light homogenizing lens and the condensing lens are all positioned on the same axis, the light homogenizing lens is positioned on the focus of the condensing lens, light emitted by the light source passes through the P polaroid to obtain P polarized light, the light intensity and the wavelength of the light source are regulated through the optical filter, and finally the P polarized light which is uniformly illuminated is generated after sequentially passing through the collimating lens, the light homogenizing lens and the condensing lens;
The acquisition unit comprises an objective table and two groups of linear array cameras, and is used for acquiring film images and calibrating a plurality of cameras, wherein the two groups of linear array cameras are respectively positioned on the upper surface and the lower surface of the transparent film;
The processing unit is used for identifying the film image by adopting a preset film uniformity detection model and detecting whether the film image is distorted or not so as to realize film uniformity judgment;
the storage unit is used for pre-storing various filtering algorithms, film uniformity detection models and film uniformity and non-uniformity typical film image libraries obtained by the linear array camera;
the control unit is used for setting various control parameters of the imaging unit, the acquisition unit and the processing unit.
2. The film uniformity detection system based on two-way full-projection light according to claim 1, wherein each group of line cameras is respectively provided with two line cameras at the bright field and dark field positions of the upper surface and the lower surface of the transparent film to obtain all defective high-quality images.
3. The film uniformity detection system based on double-path full-projection light according to claim 1, wherein the objective table is used for carrying a film to be detected, high-precision imaging of the film to be detected is realized by matching with an external film conveying system, and a starting position sensor and an end position sensor are respectively installed at a starting treatment position and an end position.
4. The film uniformity detection system based on two-way full-projection light according to claim 1, wherein the storage unit is further used for pre-storing a film defect type, a film transfer speed and a parameter relation dictionary of a light source and a linear camera.
5. The dual path full projection light based film uniformity detection system of claim 1, wherein the film uniformity detection model provides two detection modes, including a precision mode and a simple mode.
6. The film uniformity detection system based on double-path full-projection light according to claim 5, wherein the accurate mode is obtained by respectively extracting image features of a film detected region obtained by each linear array camera by using a parallel feature extraction network, then performing fusion construction by using a multi-mode fusion network, and training by using marked film uniform and non-uniform film image sets.
7. The film uniformity detection system based on double-path full-projection light according to claim 5, wherein the simple mode is used for rapidly and simply detecting whether the film uniformity is consistent or not or the designated defect type according to the set detection conditions by comparing the similarity between the film detected area image obtained by each linear array camera and the image obtained by the corresponding linear array camera in the typical film image library.
8. The film uniformity detection system based on two-way total projected light according to claim 1, further comprising a display unit for displaying each film uniformity detection condition on a large screen.
9. The system for detecting film uniformity based on two-way full projection light according to claim 1, further comprising an execution unit for detecting an operation after a defective film is detected.
CN202110956712.0A 2021-08-19 2021-08-19 Film uniformity detecting system based on double-path full-projection light Active CN113624458B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110956712.0A CN113624458B (en) 2021-08-19 2021-08-19 Film uniformity detecting system based on double-path full-projection light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202110956712.0A CN113624458B (en) 2021-08-19 2021-08-19 Film uniformity detecting system based on double-path full-projection light

Publications (2)

Publication Number Publication Date
CN113624458A CN113624458A (en) 2021-11-09
CN113624458B true CN113624458B (en) 2024-04-30

Family

ID=78386765

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202110956712.0A Active CN113624458B (en) 2021-08-19 2021-08-19 Film uniformity detecting system based on double-path full-projection light

Country Status (1)

Country Link
CN (1) CN113624458B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115629079A (en) * 2022-10-19 2023-01-20 湖南迪普视智能科技有限公司 Film surface defect detection system and method
CN115791830A (en) * 2022-12-07 2023-03-14 中国联合网络通信集团有限公司 Steel plate detection system, steel plate detection method and electronic equipment

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07325013A (en) * 1994-06-01 1995-12-12 Toppan Printing Co Ltd Phase difference evaluating method for thin film and phase difference evaluating apparatus therefor
JPH10213552A (en) * 1997-01-30 1998-08-11 Olympus Optical Co Ltd Surface fault inspection method
DE102004002194A1 (en) * 2004-01-15 2005-08-04 National Institute Of Advanced Industrial Science And Technology Optical constants measurement system e.g. for reflectance and refraction uses a common bench with tiltable ellipsoidal mirrors to set up optical paths between a light source, sample and detector
CN1752713A (en) * 2005-11-07 2006-03-29 友达光电股份有限公司 Method for monitoring thickness uniformity of optical film layer
JP2007024574A (en) * 2005-07-13 2007-02-01 Dainippon Printing Co Ltd Method and device for inspecting pitch irregularity
TWM447494U (en) * 2012-10-16 2013-02-21 Chuen-Lin Tien Device for simultaneously measuring thermal expansion coefficient and biaxial modulus of thin film
CN109154770A (en) * 2016-05-24 2019-01-04 富士胶片株式会社 Transparent membrane, transparent screen and image display system and transparent poster
CN110763434A (en) * 2018-07-27 2020-02-07 上海和辉光电有限公司 Homogeneity detection device of polycrystalline silicon thin layer
CN111609997A (en) * 2020-05-07 2020-09-01 中国科学院光电技术研究所 Detection apparatus suitable for transmission-type optical element optical path uniformity measurement
CN215865742U (en) * 2021-08-19 2022-02-18 中国科学院合肥物质科学研究院 Film uniformity detection system based on double-path all-projection light

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07325013A (en) * 1994-06-01 1995-12-12 Toppan Printing Co Ltd Phase difference evaluating method for thin film and phase difference evaluating apparatus therefor
JPH10213552A (en) * 1997-01-30 1998-08-11 Olympus Optical Co Ltd Surface fault inspection method
DE102004002194A1 (en) * 2004-01-15 2005-08-04 National Institute Of Advanced Industrial Science And Technology Optical constants measurement system e.g. for reflectance and refraction uses a common bench with tiltable ellipsoidal mirrors to set up optical paths between a light source, sample and detector
JP2007024574A (en) * 2005-07-13 2007-02-01 Dainippon Printing Co Ltd Method and device for inspecting pitch irregularity
CN1752713A (en) * 2005-11-07 2006-03-29 友达光电股份有限公司 Method for monitoring thickness uniformity of optical film layer
TWM447494U (en) * 2012-10-16 2013-02-21 Chuen-Lin Tien Device for simultaneously measuring thermal expansion coefficient and biaxial modulus of thin film
CN109154770A (en) * 2016-05-24 2019-01-04 富士胶片株式会社 Transparent membrane, transparent screen and image display system and transparent poster
CN110763434A (en) * 2018-07-27 2020-02-07 上海和辉光电有限公司 Homogeneity detection device of polycrystalline silicon thin layer
CN111609997A (en) * 2020-05-07 2020-09-01 中国科学院光电技术研究所 Detection apparatus suitable for transmission-type optical element optical path uniformity measurement
CN215865742U (en) * 2021-08-19 2022-02-18 中国科学院合肥物质科学研究院 Film uniformity detection system based on double-path all-projection light

Also Published As

Publication number Publication date
CN113624458A (en) 2021-11-09

Similar Documents

Publication Publication Date Title
CN113624458B (en) Film uniformity detecting system based on double-path full-projection light
US20080111989A1 (en) Transparent material inspection system
WO2014139231A1 (en) System and method for testing and regulating uniformity of light intensity of light source
CN107884414B (en) System and method for detecting surface defects of mirror surface object by eliminating influence of dust
US20040131245A1 (en) Method and apparatus for quantitatively evaluating scintillation, antiglare film and method of producing the same
WO2017202114A1 (en) Method and apparatus for determining illumination intensity for inspection, and optical inspection method and apparatus
Le et al. Novel framework for optical film defect detection and classification
CN114993614A (en) AR head-mounted equipment testing equipment and testing method thereof
CN115187553A (en) DIC strain detection device and method based on speckle image display
CN108986170A (en) A kind of line-scan digital camera method for correcting flat field suitable for field working conditions
CN215865742U (en) Film uniformity detection system based on double-path all-projection light
CN115015112A (en) Defect detection device and method
CN113740034B (en) Film uniformity detecting system based on optical interference
CN113624459B (en) Thin film uniformity detection system based on coherent tomography
CN215865741U (en) Film uniformity detection system based on optical diffraction
CN215865743U (en) Film uniformity detection system based on line structured light
CN215865745U (en) Film uniformity detection system based on optical interference
CN215865744U (en) Film uniformity detection system based on coherent tomography
CN113624461B (en) Film uniformity detection system based on line structured light
CN113624457B (en) Thin film uniformity detection system based on optical diffraction
US11796418B2 (en) Contact lens defect analysis and tracing system
CN217112049U (en) Screen color uniformity detection device
CN112326681B (en) Method for correcting and detecting lens cleanliness by utilizing defocusing difference flat field
JP3357968B2 (en) Lenticular lens sheet defect inspection method
CN112161956A (en) Lens detection method, device and system and readable storage medium

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant