CN103726018A - Film coating baffle device adopting microwave remote control - Google Patents
Film coating baffle device adopting microwave remote control Download PDFInfo
- Publication number
- CN103726018A CN103726018A CN201310545333.8A CN201310545333A CN103726018A CN 103726018 A CN103726018 A CN 103726018A CN 201310545333 A CN201310545333 A CN 201310545333A CN 103726018 A CN103726018 A CN 103726018A
- Authority
- CN
- China
- Prior art keywords
- baffle plate
- substrate plane
- microwave
- motor
- microwave remote
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Abstract
A film coating baffle device adopting microwave remote control comprises a substrate plane clamp, a microwave remote control unit, a transmitting antenna, a microwave receiver, a high-temperature resistant battery, a control circuit, a motor, a connecting wire, a connecting rod and a baffle. The microwave remote control unit controls the motor to operate and drives the connecting rod to drive the baffle to rotate after a microwave remote control signal emitted by the transmitting antenna is received by the microwave receiver and processed by the control circuit, so that the baffle is located in the reasonable position below the substrate plane clamp as required, and the film coating baffle device has the remote-control, economical, convenient and efficient control effect on the baffle position.
Description
Technical field
The present invention relates to plated film, particularly a kind of microwave remote control baffle plate with plated film device.
Background technology
Film preparing technology is widely used in preparing the aspects such as solar energy film, nano-micro structure, optical thin film, optoelectronic film now.In film preparation process, in filming equipment vacuum chamber clean, bleed and deflation course consumes the most of the time, really very short for the time of plated film.For production, particularly, when the film product of the different film of evaporation system, need to carry out several times, cleaning, bleed and deflation course of continuous repeating vacuum chamber, has extended product processing time, has reduced the utilising efficiency of filming equipment.For experiment, even if set identical processing parameter,, also can there is difference in film of the same race prepared by different batches in performance.Therefore, from enhancing productivity and testing contrast gradient angle, all require to improve equipment, design special control device.
Summary of the invention
The object of the invention is in order to provide a kind of microwave remote control controlled baffle plate with plated film device, this device can be at a coating process, and the film of two batches of evaporations or many batches of differing materials improves the production efficiency of coating process, and can make the contrast effect of experiment strengthen.
Technical solution of the present invention is as follows:
A microwave remote control baffle plate with plated film device, feature is that its formation comprises: substrate plane fixture, microwave remote-control, transmitting antenna, microwave susceptor, high temperature resistant battery, pilot circuit, motor, wire, union lever, baffle plate, has a plurality of through holes for putting glass substrate, described microwave receiver equably on described substrate plane fixture, high temperature resistant battery, pilot circuit, motor is fixed on the upper plane of substrate plane fixture, by described wire by described microwave receiver, high temperature resistant battery, pilot circuit is connected with motor, described union lever is vertically through described substrate plane fixture, the upper end of this union lever is connected with described motor, one end of the lower end of this union lever and described baffle plate fixes in the vacuum chamber that is integrally formed and is placed in coating equipment, described substrate plane fixture is parallel with described baffle plate, the peripheral area of described baffle plate is identical with the peripheral area of described substrate plane fixture, one end of described transmitting antenna is in vacuum chamber, the other end is outside vacuum chamber, described microwave remote-control is outside vacuum chamber, described microwave remote-control is received by described microwave receiver by the microwave remote signal of described transmission antennas transmit, after described pilot circuit is processed, control the running of described motor, drive union lever to drive described baffle plate to rotate, make baffle plate be in as required substrate plane fixture under or other positions, described high-temperature battery is described pilot circuit, microwave receiver, motor provides power supply, and described high-temperature battery place is fixed on described substrate plane fixture top.
The diameter of the upper end of described through hole is larger, and the diameter of lower end is less, and the junction of top and bottom forms a platform, and the edge of described glass substrate is dropped on platform abreast, and does not fall down.
Described microwave receiver, high temperature resistant battery, pilot circuit and motor are placed on described substrate plane fixture dispersedly or integrally.
Described high-temperature battery is on substrate plane fixture, can avoid the material ion pair high-temperature battery of electron beam electronics or evaporation to cause damage.
Beneficial effect of the present invention:
1, advantage of the present invention is that baffle plate by being under substrate plane fixture blocks, and makes the glass substrate in substrate plane fixture can not be by plated film.When baffle plate rotates after 180 degree around union lever, expose the glass substrate in substrate plane fixture, substrate can be by plated film.Therefore, can effectively control the plated film of the glass substrate in substrate plane fixture.
2, cleaning, bleeding and deflation course by vacuum chamber in a filming equipment, utilize baffle plate whether blocking substrate plane fixture, and the Evaporation of electron beam gun to differing materials in crucible tongs, the film of glass substrate lower surface evaporation differing materials that can be in different substrate plane fixtures.Therefore, save in original evaporation differing materials thin-film process repeatedly cleaning, bleed and deflation course of vacuum chamber, can effectively save the plated film time, reach economic, object efficiently.
3, the power supply of comparing film coating apparatus vacuum chamber outside, is placed on the high temperature power supply in vacuum chamber, can effectively avoid in vacuum chamber in substrate plane fixture revolution process, connects the coiling problem that the wire of power supply causes.
4, by adding a transmitting antenna, can solve the shielding problem of the metal shell of filming equipment vacuum chamber to microwave, with the microwave signal that microwave remote-control is produced, pass on the microwave susceptor in vacuum chamber.
5, utilize microwave remote-control to regulate the position of baffle plate in vacuum chamber at filming equipment vacuum chamber outside position launched microwave signal far away, play remote sensing effect.
6, in a word, microwave remote control baffle plate with plated film device of the present invention is a kind of baffle plate with plated film device of controlled, economic, efficient and remote sensing.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of microwave remote control baffle plate with plated film device of the present invention
Fig. 2 is the position view of microwave remote control baffle plate with plated film device of the present invention on filming equipment
Embodiment
Below in conjunction with drawings and Examples, the present invention is described further, but should not limit the scope of the invention with this.
First refer to shown in Fig. 1 to Fig. 2, as seen from the figure, microwave remote control baffle plate with plated film device of the present invention, comprising: substrate plane fixture 1, microwave remote-control 2, transmitting antenna 3, microwave susceptor 4, high temperature resistant battery 5, pilot circuit 6, motor 7, wire 8, union lever 9, baffle plate 10.On described substrate plane fixture 1, evenly have four through hole 1-1, through hole 1-1 size and number are set according to actual needs, described through hole 1-1 upper end is larger, glass substrate can be passed through, described through hole lower end is less, upper through hole, lower through-hole junction form a platform, make that glass substrate edge is parallel to be dropped on platform, and do not fall down.Described microwave receiver 4, high temperature resistant battery 5, pilot circuit 6 and motor 7 are positioned in the upper plane of substrate plane fixture 1.Described microwave receiver 4, high temperature resistant battery 5, pilot circuit 6 and motor 7 can be grouped together each other, or separately, but will guarantee that their position fixes, not along with substrate plane fixture 1 moves and drop.By described wire 8, described microwave receiver 4, high temperature resistant battery 5, pilot circuit 6 and motor 7 are connected.Described substrate plane fixture 1 edge has a duct of running through lower plane on substrate plane fixture 1, and this channel diameter is greater than the diameter of described union lever 9, makes the described vertical passing through substrate level clamp 1 of union lever 9.The upper end of described union lever 9 is connected with the motor 7 that is fixed on described substrate plane fixture 1 upper surface, and the lower end of union lever 9 is fixed on one end of baffle plate 10.The described peripheral area of baffle plate 10 is identical with the peripheral area of substrate plane fixture 1.By described motor 7, drive union lever 9 and baffle plate 10 to rotate, make baffle plate 10 be in as required substrate plane fixture 1 just below or other positions.One end of described transmitting antenna 3 is in vacuum chamber 11, and the other end is outside vacuum chamber 11.Described microwave remote-control 2 is outside vacuum chamber 11.Signal microwave remote-control 2 being sent by described transmitting antenna 3 passes on microwave receiver 4.Described pilot circuit 6 is processed received signal, controls the running of motor 7.Described high-temperature battery 5 provides power supply for described pilot circuit 6, microwave receiver 4, motor 7.Described high-temperature battery 5 is on substrate plane fixture 1, avoids the material ion pair high-temperature battery 5 of evaporation in the electron beam electronics of electron beam gun 12 sputters or crucible 13 to cause damage.
In coating process, in different crucibles 13, deposit different materials, rotating crucible dish 14, the material that can realize in 12 pairs of different crucibles 13 of electron beam gun carries out melting evaporation.Substrate plane fixture 1 embeds in pallet 15, and in order to guarantee the homogeneity of plated film, substrate plane fixture 1 rotates around axle 16 with pallet 15.By the differing materials in the different crucibles 13 of electron beam gun 12 sputters, and whether the blocking of glass substrate in 10 pairs of substrate plane fixtures 1 of baffle plate, the film to glass substrate lower surface evaporation differing materials in substrates of different level clamp 1.Level clamp 1 quantity on pallet 15 can be added according to actual needs.
The above is only the preferred embodiment of the present invention.It should be pointed out that for the person of ordinary skill of the art, under the premise without departing from the principles of the invention, can also make some modification and improvement, these also should be considered as protection scope of the present invention.
Claims (3)
1. a microwave remote control baffle plate with plated film device, be characterised in that its formation comprises: substrate plane fixture (1), microwave remote-control (2), transmitting antenna (3), microwave susceptor (4), high temperature resistant battery (5), pilot circuit (6), motor (7), wire (8), union lever (9), baffle plate (10), on described substrate plane fixture (1), have equably a plurality of through holes (1-1) for putting glass substrate, described microwave receiver (4), high temperature resistant battery (5), pilot circuit (6), motor (7) is fixed on the upper plane of substrate plane fixture (1), by described wire (8) by described microwave receiver (4), high temperature resistant battery (5), pilot circuit (6) is connected with motor (7), described union lever (9) is vertically through described substrate plane fixture, the upper end of this union lever is connected with described motor, one end of the lower end of this union lever and described baffle plate fixes in the vacuum chamber that is integrally formed and is placed in coating equipment, described substrate plane fixture is parallel with described baffle plate, the peripheral area of described baffle plate is identical with the peripheral area of described substrate plane fixture, one end of described transmitting antenna is in vacuum chamber, the other end is outside vacuum chamber, described microwave remote-control is outside vacuum chamber, described microwave remote-control is received by described microwave receiver by the microwave remote signal of described transmission antennas transmit, after described pilot circuit is processed, control the running of described motor, drive union lever to drive described baffle plate to rotate, make baffle plate be in as required substrate plane fixture under or other positions, described high-temperature battery is described pilot circuit, microwave receiver, motor provides power supply, described high-temperature battery place is fixed on described substrate plane fixture top.
2. microwave remote control baffle plate with plated film device according to claim 1, the diameter of the upper end of the through hole (1-1) described in it is characterized in that is larger, the diameter of lower end is less, the junction of top and bottom forms a platform, the edge of described glass substrate is dropped on platform abreast, and does not fall down.
3. microwave remote control baffle plate with plated film device according to claim 1 and 2, is characterized in that described microwave receiver (4), high temperature resistant battery (5), pilot circuit (6) and motor (7) are placed on described substrate plane fixture dispersedly or integrally.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310545333.8A CN103726018A (en) | 2013-11-06 | 2013-11-06 | Film coating baffle device adopting microwave remote control |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310545333.8A CN103726018A (en) | 2013-11-06 | 2013-11-06 | Film coating baffle device adopting microwave remote control |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103726018A true CN103726018A (en) | 2014-04-16 |
Family
ID=50450306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310545333.8A Pending CN103726018A (en) | 2013-11-06 | 2013-11-06 | Film coating baffle device adopting microwave remote control |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103726018A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108374159A (en) * | 2018-03-27 | 2018-08-07 | 北京航天微电科技有限公司 | A kind of vacuum coating equipment and method |
| CN110066983A (en) * | 2019-05-17 | 2019-07-30 | 南京邮电大学 | Film preparation auxiliary device and method for manufacturing thin film |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0499271A (en) * | 1990-08-10 | 1992-03-31 | Olympus Optical Co Ltd | Method and device for forming multilayer thin film |
| JP2010265518A (en) * | 2009-05-15 | 2010-11-25 | Olympus Corp | Film deposition system and film deposition method |
-
2013
- 2013-11-06 CN CN201310545333.8A patent/CN103726018A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0499271A (en) * | 1990-08-10 | 1992-03-31 | Olympus Optical Co Ltd | Method and device for forming multilayer thin film |
| JP2010265518A (en) * | 2009-05-15 | 2010-11-25 | Olympus Corp | Film deposition system and film deposition method |
Non-Patent Citations (1)
| Title |
|---|
| 李雄杰: "《无线电技术与应用》", 28 February 2013, article ""无线电遥控与射频识别技术"", pages: 140-141 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108374159A (en) * | 2018-03-27 | 2018-08-07 | 北京航天微电科技有限公司 | A kind of vacuum coating equipment and method |
| CN110066983A (en) * | 2019-05-17 | 2019-07-30 | 南京邮电大学 | Film preparation auxiliary device and method for manufacturing thin film |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102312199B (en) | Scanning coating device and scan coating assembly | |
| CN201751427U (en) | Linear evaporation source | |
| US20140326178A1 (en) | Electromagnetic vapor deposition apparatus | |
| US9150952B2 (en) | Deposition source and deposition apparatus including the same | |
| CN103726018A (en) | Film coating baffle device adopting microwave remote control | |
| CN104120397A (en) | Method and system for depositing indium tin oxide at low temperature | |
| CN103436844A (en) | Coating device and method for depositing flexible substrate ITO film at low temperature | |
| CN104746031A (en) | A sputtering system | |
| CN203487223U (en) | Coating device for depositing flexible base material ITO (Indium Tin Oxides) film at low temperature | |
| CN207581922U (en) | A kind of magnetron sputtering formula Pvd equipment | |
| CN103031522A (en) | Preparation method of aluminum doped zinc oxide film with gradient performance | |
| CN106567043B (en) | Vapor deposition apparatus and method | |
| US20180371606A1 (en) | Evaporation source heating system | |
| CN103681960A (en) | Multi-step sputtering process for preparation of CIG precursor layer of CIGS (copper indium gallium selenide) film | |
| CN202543317U (en) | Novel MOCVD (Metal Organic Chemical Vapor Deposition) reaction device | |
| CN103489505B (en) | A kind of touch-screen ITO conducting film and preparation method thereof | |
| EP3544048A1 (en) | Heating assembly | |
| CN206849856U (en) | A kind of silicon chip is hidden to split sorting unit and PECVD fully automatic feeding machines | |
| CN102002674A (en) | Surface vacuum coating process of transparent plastics | |
| CN204696221U (en) | Large power waveguide circulator | |
| CN208949405U (en) | Plasma deposition apparatus | |
| CN107032630A (en) | A kind of method for glass magnetron sputtering plating | |
| CN208501082U (en) | A kind of vaporizing-source system and evaporation coating device | |
| CN204005542U (en) | The light source of online optical detector | |
| CN204237860U (en) | Film vapor deposition equipment and film vapor deposition system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20140416 |