CN103698847A - Method for enhancing birefringence of long-chain molecule-type polymer optical waveguide in matching manner - Google Patents
Method for enhancing birefringence of long-chain molecule-type polymer optical waveguide in matching manner Download PDFInfo
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Abstract
The invention discloses a method for enhancing birefringence of a long-chain molecule-type polymer optical waveguide in a matching manner. The method comprises the following steps: performing deep etching on the side wall of the long-chain molecule-type polymer optical waveguide to form air grooves with a certain gradient; preparing metal electrodes to form a polarization electric field parallel with the plane of a waveguide substrate; performing polarization induction to enhance the birefringence of the long-chain molecule-type polymer optical waveguide, and realizing matching on the polarization induced birefringence of the waveguide and the intrinsic birefringence of a long-chain molecule-type polymer material, wherein the optical waveguide is the long-chain molecule-type polymer material, and the prepared metal electrodes are made of gold, silver or other metals. The birefringence of the waveguide induced by the method disclosed by the invention is matched with the birefringence of the long-chain molecule-type polymer material, and therefore, the efficiency of inducing the birefringence of the long-chain molecule-type polymer material by adopting an electric field polarization method can be remarkably improved.
Description
Technical field
The present invention relates to organic electro-optic device technical field, relate in particular to a kind of method that matching strengthens long chain molecule type polymer optical wave guide birefringence.
Background technology
Coherent optical communication system is face the future the effectively the largest capacity of numerous communication new business, large bandwidth, two-forty telecommunications systems, is also unique solution of the above optical-fiber network of data transfer rate 100Gb/s.Multiplexing and the demultiplexing technology of polarization state improves one of gordian technique of transmission digit rate in coherent optical communication system just at present, and the anxious high-performance to be researched and developed of the development of these technology, Primary Component cheaply.These Primary Components comprise polarization state bundling device, polarization state beam splitter, polarization state spinner, polarization state controller etc., all need the optical material preparation that adopts birefringence large.
Polymeric material is also suitable for preparing the required all kinds of Polarization Control devices of the multiplexing coherent optical communication system of polarization state.Fast development along with new organic material, photonic device based on polymeric material shows compelling performance, particularly polymeric material is fluoridized with C-F key replacement c h bond and can be greatly reduced the loss that absorption of vibrations is brought, greatly improve the chemical stability of polymeric material when high-temperature operation, and improve optical damage threshold (L.Eldada, L.W.Shacklette, " Advances in polymer integrated optics; " IEEE J.Sel.Top.Quantum Electron., vol.6, pp.54 – 68,2000.).Simultaneously, the birefringence of polymeric material not only can be changed by changing polymer molecular structure, optical characteristics (as thermo-optic effect, electrooptical effect) that can also be based on polymeric material, by adopting certain outside thermal control, automatically controlled mechanism to realize the regulation and control to the birefringence of polymeric material.
First, by adjusting the birefringence that the molecular structure of polymeric material can reinforcing material.In 2009, American scientists adopt passive or electro-optic polymer material designed 5 kinds carinate or fall carinate light waveguide polarizer, the polarization extinction ratio obtaining is greater than 50dB(M.Sanghadasa, P.R.Ashley, A.J.Guenthner, G.A.Lindsay, and M.D.Bramson, " Design and demonstration of polarizing polymer waveguides using birefringent polymers; " J.Lightwave Technol., vol.27, pp.4667-4677, Nov.2009.).In 2011, scientists study in fluorinated polymer optical waveguide, realize polarization spectro function, by revising organic molecular structure, make polymer molecule form the long chain molecule structure with conjugated double bond, improved the polarizability (J.Kim of fluorinated polymer, K.Kim, M.Oh, J.Seo, Y.Noh, and H.Lee, " Polarization splitting waveguide devices incorporating perfluorinated birefringent polymers, " J.Lightw.Technol., vol.29, pp.1842 – 1846, Jun.2011.).
Except adjusting material molecule structure, adopt polarized electric field can in electro-optic polymer material, induce birefringence, such as at polymethylmethacrylate (PMMA:Poly (methyl methacrylate)) (M.-C.Oh, S.-S.Lee, S.-Y.Shin, W.-Y.Hwang, and J.-J.Kim, " Polymeric waveguide polarization splitter based on poling-induced birefringence, " Electron.Lett., vol.32, pp.324 – 325, 1996.) and polyimide (Polyimide) (M.-C.Oh, M.-H.Lee, and H.-J.Lee, " Polymeric waveguide polarization splitter with a buried birefringent polymer, " IEEE Photon.Technol.Lett., vol.11, pp.1144 – 1146, Sep.1999.) in.Its principle of work be dipole pilot in induced polymer molecule to direction of an electric field, thereby increased along the refractivity of polarised direction polarized light.These work provide practical basis for induced polymer optical waveguide birefringence.
Yet, if adopt electric field polarization method to implement the outside induction to polymeric material birefringence, normally adopt the polarized electric field perpendicular to thin film planar.The waveguide refractivity that this has increased perpendicular to thin film planar polarization direction, has reduced the waveguide refractivity that is parallel to thin film planar polarization direction.The birefringence of induction is contrary often with the birefringence with long chain molecule structural polymer like this, when preparing all kinds of polarization state control device based on polymer optical wave guide, reduced on the contrary the birefringence of polymer optical wave guide, therefore weakened and even can not realize all kinds of polarization states control functions.
Summary of the invention
For solving the problems of the technologies described above, the invention provides a kind of coupling abductive approach that strengthens long chain molecule type polymeric material birefringence.Utilize the present invention, can significantly improve and adopt the induction efficiency of electric field polarization method to long chain molecule type polymeric material birefringence.
The technical solution used in the present invention is as follows:
Matching strengthens a method for long chain molecule type polymer optical wave guide birefringence, and its step is as follows:
Step 1: prepare long chain molecule type polymer optical wave guide
Step 2: go out air channels in long chain molecule type polymer optical wave guide sidewall etch, this air channels sidewall has the gradient;
Step 3: prepare induced polarization metal electrode on the grooved surface of long chain molecule type polymer optical wave guide sidewall air channels:
(1) evaporation, sputter or plated metal in the air channels of long chain molecule type polymer optical wave guide sidewall, form metal electrode to build the polarized electric field parallel with optical waveguide substrate plane;
(2), to the induction that polarizes of long chain molecule type polymer waveguide, strengthen long chain molecule type polymer optical wave guide birefringence.
The long chain molecule type polymkeric substance of described step 1 be polymethylmethacrylate, fluorinated acrylic ester, paracyanogen acid esters, epoxy radicals ultraviolet negative photoresist, with in chromophoric electro-optic polymer any.
The long chain molecule type polymkeric substance of described step 1 is for adopting the crosslinked long chain molecule structural type polymkeric substance forming of ultraviolet light chemistry method.
The air channels degree of depth of described step 2 is from optical waveguide top covering to optical waveguide substrate surface, and groove width should be greater than duct width, is duct width more than 2 times from waveguide distance, and trench slope is 15 °～75 °.
The method that described step 1 is prepared long chain polymer optical waveguide is any in reactive ion etching method, inductively coupled plasma etching method, nanometer embossing.
The method of described step 2 etching air channels is the GTG photomask etching method of being combined with reactive ion etching method, inductively coupled plasma etching method.
The thickness of the metal electrode layer in described step 3 is 200～500nm.
A kind of matching provided by the invention strengthens the method for long chain molecule type polymer optical wave guide birefringence, by go out the air channels of certain slope at waveguide sidewalls deep etching, preparing metal electrode builds and the parallel plane polarized electric field of optical waveguide substrates, induction polarizes, strengthen the birefringence of polymer optical wave guide, and realization mates with the intrinsic birefringence of polymeric material, therefore can significantly improve and adopt the induction efficiency of electric field polarization method to polymeric material birefringence.
Accompanying drawing explanation
Long chain molecule during Fig. 1 non-polarized in thin polymer film is arranged.
Long chain molecule after Fig. 2 polarizes in thin polymer film is arranged.
The polymer optical wave guide structural representation of Fig. 3 non-polarized electrode.
Fig. 4 structural representation of preparing coupling evoked electrode in polymer optical wave guide provided by the invention.
The sectional view of Fig. 5 polymer optical wave guide with coupling evoked electrode provided by the invention.
Description of reference numerals:
1, spacing 15, the trench slope of the induced polarization electrode 6 of polymkeric substance long-chain molecule 2, substrate 3, thin polymer film xsect 4, thin polymer film side 5, thin polymer film side, induced polarization electric field 7, optical waveguide substrate 8, optical waveguide under-clad layer 9, optical waveguide sandwich layer 10, optical waveguide top covering 11, air channels 12, induced polarization electrode 13, induced polarization electric field 2 14, air channels and waveguide core
Embodiment
The present invention propose for strengthening the coupling abductive approach of long chain molecule type polymeric material birefringence, at long chain type polymer optical wave guide sidewall deep etching, to go out to have the air channels of certain slope, prepare metal electrode and form the polarized electric field parallel with planar waveguide substrate, thereby realize the enhancing coupling induction to polymeric material intrinsic birefringence, below in conjunction with accompanying drawing, the present invention be specifically described:
Polymer optical wave guide as the embodiment of patent of the present invention can adopt fluorinated polymeric material.Fluorinated polymeric material generally has lower polarizability, by revising organic molecular structure, can form conjugated double bond structures; Free charge can move along this double bond structure, thereby obtains higher in the direction polarizability, perpendicular to the polarizability of this direction relatively a little less than, embody birefringence.Further, adopt the crosslinked long chain molecule structure forming of the ultraviolet light chemistry method birefringence of reinforced polymeric material intrinsic further.In addition, compare with non-cross-linked polymer, crosslinked polymkeric substance possesses following several advantage: the high tack in heat-flash stability, chemical resistance and chip substrate.
Here simply with matching Enhancement Method and the design of fluorinated acrylic ester (Perfluorinated Acrylate) thin polymer film birefringence, describe, fluorinated acrylate polymer material is comprised to a bar-shaped diphenyl agent structure of fluoridizing phenyl and fluorenylidene formation, and one as the curing perfluoroethylene molecule (J.Kim of terminal, K.Kim, M.Oh, J.Seo, Y.Noh, and H.Lee, " Polarization splitting waveguide devices incorporating perfluorinated birefringent polymers, " J.Lightw.Technol., vol.29, pp.1842 – 1846, Jun.2011.).Such organic molecule has conjugated double bond and electric polarity direction is along molecular structure direction, makes electric charge be easier to shift along this conjugated double bond.Before ultraviolet light cross-linking, initial fluorinated oligomeric thing has molecular weight and is approximately several thousand, adopts the molecular weight of oligomer crosslinked after ultraviolet light irradiation to be increased to tens thousand of, thereby forms long chain molecule structure, Fig. 1.And electric charge easily shifts along the conjugated double bond on long chain molecule structure direction, thereby this material has higher polarizability for the electromagnetic wave of polarization in the direction.
Thin polymer film, the method for making of Fig. 1 is specifically described as follows: take monocrystalline silicon piece as substrate 2, with spin-coating method, long chain molecule type fluoropolymer resin is coated on substrate 2, then carries out the UV-crosslinked polymkeric substance long-chain molecule 1 structure that solidify to form, dry and obtain thin polymer film; Rationally control spin coating speed 1000-3000 rev/min, polymkeric substance long-chain molecule 1 is often arranged as shown in Figure 1, with certain tendentiousness and substrate 2 plane parallel, arranges; Therefore, thin polymer film is comparing along have higher polarizability perpendicular to substrate 2 in-planes along substrate 2 in-planes, such thin polymer film shows as higher refractive index to the transverse electric wave of incident thin polymer film xsect 3 (TE wave:Transverse electric wave), in other words, polymeric material has certain intrinsic birefringence like this.But because long chain molecule 2 also has certain randomness when arranging, so its orientation incomplete and substrate 2 plane parallel.
For such long chain molecule type polymeric material, can adopt outside induction electric field matching and strengthen birefringence.As shown in Figure 2, the preparation of the induced polarization electrode 5 of thin polymer film side is to complete perpendicular to thin polymer film side 4 evaporations, sputter or plated metal, and the induced polarization electric field 6 forming is like this to be parallel to substrate 2 planes.Under the effect of induced polarization electric field 6, in polymkeric substance long-chain molecule 1, conjugated double bond can be to the deflection of polarized electric field direction, Fig. 2, thus strengthened material to the electromagnetic wave polarizing in the direction, the i.e. polarizability of the transverse electric wave of incident thin polymer film xsect 3.Therefore, this induced polarization electric field 6 is the enhancings to the birefringence matching of polymeric material intrinsic.
According to above-mentioned principle, the method for the enhancing long chain molecule type polymer optical wave guide birefringence of the present embodiment is the induced polarization electric field 2 13 that will build matching, and this induced polarization electrode 12 is to prepare in the air channels of the sidewall of optical waveguide.Long chain molecule type polymer optical wave guide consists of optical waveguide under-clad layer 8, optical waveguide sandwich layer 9 and optical waveguide top covering 10, Fig. 3.Optical waveguide sandwich layer 9 is all to adopt long chain molecule type polymeric material with optical waveguide top covering 10, optical waveguide under-clad layer 8, wherein the refractive index of optical waveguide sandwich layer 9 is greater than the refractive index of optical waveguide top covering 10 and optical waveguide under-clad layer 8, thereby has formed the guided wave structure formed of constraint light wave.The preparation of optical waveguide can adopt the methods such as reactive ion etching method (RIE:Reactive ion etching), inductively coupled plasma etching method (ICP:Inductively coupled plasma); And adopt the GTG photomask technology of being combined with the method such as reactive ion etching method, inductively coupled plasma etching method can prepare the groove 11 that possesses certain slope.
Induced polarization electrode 12 as patent of the present invention is the polarized electric fields that build matching.Outer electrode is in the past prepared in waveguide top surface, with create electrode under waveguide substrate perpendicular to the electric field on optical waveguide substrates surface.The birefringence of polarized electric field induction and the intrinsic birefringence being formed by polymkeric substance long-chain molecular structure are contrary thus.This contradiction can be solved with the parallel plane induced polarization electric field 2 13 that mates of optical waveguide substrate 7 by building.
Embodiments of the invention illustrate as follows with reactive ion etching method:
Optical waveguide under-clad layer 8 is with spin-coating method, long chain molecule type polymeric material to be coated on optical waveguide substrate 7, carries out front oven dry; The pattern of optical waveguide sandwich layer 9 is to adopt photoetching process to form under mask plate, be about to be spin-coated on optical waveguide under-clad layer 8 as the polymeric material of sandwich layer, evaporation one deck aluminium film after drying, then spin coating photoresist, after photoresist front baking, with the mask plate that possesses waveguide pattern, carry out photoetching, development, thereby the figure of waveguide mask plate is transferred on photoresist, more aobvious waveguide figure is transferred on aluminium film after hidden; Next step, sample is positioned in reactive ion etching machine, under oxygen atmosphere, carries out reactive ion etching, the blocks ions etching because oxygen and aluminium film reaction generate pellumina, therefore the sandwich layer under aluminium film can retain, and photoresist and the sandwich layer that covers without aluminium film all can be etched away; After etching completes, with sodium hydroxide solution, aluminium film to be removed, the pattern of optical waveguide sandwich layer 9 has completed, and then carries out the UV-crosslinked polymkeric substance long-chain molecular structure that solidify to form, and obtains polymer waveguide sandwich layer 9 after oven dry; On the sample forming in etching, spin coating optical waveguide top covering 10 materials, obtain optical waveguide, Fig. 3 after oven dry.
As previously mentioned, polymkeric substance long-chain molecule 1 is arranged with certain tendentiousness and optical waveguide substrate 7 plane parallel, therefore polymer optical wave guide is along optical waveguide substrate plane direction ratio along having higher refractive index perpendicular to optical waveguide substrate plane direction, in other words, polymer optical wave guide has certain material intrinsic birefringence like this.
On the optical waveguide sample obtaining above, adopt equally foregoing reactive ion etching method to etch the air channels 11 of waveguide sidewalls, i.e. spin coating photoresist on sample, the bed thickness of photoresist is waveguide top covering 10 and waveguide under-clad layer 8 thickness sums, front baking; The gray level mask that possesses groove pattern can produce continually varying light transmission rate at mask plane diverse location, and the light transmission rate increasing along with gash depth increases, will form the photoresist layer of the acclive groove structure of tool by photoetching, development; Sample is positioned over to etching in reactive ion etching machine, and waveguide top covering 10, under-clad layer 8 in photoresist layer and groove structure all can be etched away, thereby prepare and have gradient air channels 11, Fig. 4 at waveguide sidewalls place.
The present embodiment adopts vacuum vapour deposition to prepare induced polarization silver electrode on air channels 11 sidewalls, and the method for preparation also can be selected sputtering method or electrochemical plating, except silver also available other metal is prepared.The polymer waveguide that etches groove is fixed in evaporation chamber, and groove opening direction, is put into silver-colored particle down in evaporation boat.Then close evaporation chamber, to vacuumizing in chamber, to vacuum tightness be 10
-4torr left and right.Regulate electric current to make evaporation boat temperature be increased to silver-colored evaporating temperature.Use crystal-vibration-chip induction to control thickness, metal electrode layer 12 thickness that make institute's evaporation are 200nm～500nm left and right; If thicken metal electrode layer, also can adopt electrochemical plating to add plating.Like this preparation form with the parallel plane polarized electric field 13 of optical waveguide substrate 7, to the induction that polarizes of long chain molecule type polymer waveguide, strengthen the birefringence of long chain molecule type polymer optical wave guide, and realization is mated with the intrinsic birefringence of long chain molecule type polymeric material.
Claims (7)
1. matching strengthens a method for long chain molecule type polymer optical wave guide birefringence, and its step is as follows:
Step 1: prepare long chain molecule type polymer optical wave guide;
Step 2: go out air channels in long chain molecule type polymer optical wave guide sidewall etch, this air channels sidewall has the gradient;
Step 3: prepare induced polarization metal electrode on the grooved surface of long chain molecule type polymer optical wave guide sidewall air channels:
(1) evaporation, sputter or plated metal in the air channels of long chain molecule type polymer optical wave guide sidewall, form metal electrode to build the polarized electric field parallel with optical waveguide substrate plane;
(2), to the induction that polarizes of long chain molecule type polymer waveguide, strengthen long chain molecule type polymer optical wave guide birefringence.
2. a kind of matching according to claim 1 strengthens the method for long chain molecule type polymer optical wave guide birefringence, the long chain molecule type polymkeric substance of described step 1 be polymethylmethacrylate, fluorinated acrylic ester, paracyanogen acid esters, epoxy radicals ultraviolet negative photoresist, with in chromophoric electro-optic polymer any.
3. a kind of matching according to claim 1 strengthens the method for long chain molecule type polymer optical wave guide birefringence, and the long chain molecule type polymkeric substance of described step 1 is for adopting the crosslinked long chain molecule structural type polymkeric substance forming of ultraviolet light chemistry method.
4. a kind of matching according to claim 1 strengthens the method for long chain molecule type polymer optical wave guide birefringence, the air channels degree of depth of described step 2 is from optical waveguide top covering to optical waveguide substrate surface, groove width should be greater than duct width, from waveguide distance, be duct width more than 2 times, trench slope is 15 °～75 °.
5. a kind of matching according to claim 1 strengthens the method for long chain molecule type polymer optical wave guide birefringence, and the method that described step 1 is prepared long chain molecule type polymer optical wave guide is any of reactive ion etching method, inductively coupled plasma etching method, nanometer embossing.
6. a kind of matching according to claim 1 strengthens the method for long chain molecule type polymer optical wave guide birefringence, and the method for described step 2 etching air channels is the GTG photomask etching method of being combined with reactive ion etching method, inductively coupled plasma etching method.
7. a kind of matching according to claim 1 strengthens the method for long chain molecule type polymer optical wave guide birefringence, and the thickness of the metal electrode layer in described step 3 is 200～500nm.
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| CN108387972A (en) * | 2018-03-21 | 2018-08-10 | 武汉永鼎光电子技术有限公司 | A kind of production method of waveguide, demultiplexer and waveguide |
| CN112652668A (en) * | 2019-10-09 | 2021-04-13 | 格芯公司 | Trench-based optical assembly for optoelectronic chip |
| EP4130821A4 (en) * | 2020-03-31 | 2024-04-24 | Kyocera Corp | Optical waveguide module and light source module |
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| CN112652668A (en) * | 2019-10-09 | 2021-04-13 | 格芯公司 | Trench-based optical assembly for optoelectronic chip |
| CN112652668B (en) * | 2019-10-09 | 2023-08-08 | 格芯公司 | Ditch-based optical component for optoelectronic chip |
| EP4130821A4 (en) * | 2020-03-31 | 2024-04-24 | Kyocera Corp | Optical waveguide module and light source module |
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