CN102879923A - Y-branch directional-coupler electro-optic modulator on basis of organic polymers - Google Patents
Y-branch directional-coupler electro-optic modulator on basis of organic polymers Download PDFInfo
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Abstract
The invention discloses a Y-branch directional-coupler electro-optic modulator on the basis of organic polymers, and belongs to the field of optical communication and integrated optics. The Y-branch directional-coupler electro-optic modulator comprises a waveguide structure and an electrode structure; the waveguide structure comprises a Y-branch waveguide and two parallel optical waveguides connected with the Y-branch waveguide, the two optical waveguides form a directional coupler, and the distance between tail ends of the two parallel optical waveguides is increased by an S-bent waveguide; and the electrode structure is a 'Z'-shaped structure and respectively covers the two waveguides of the directional coupler, and an upper section and a lower section of an electrode are parallel to each other and are respectively externally connected with an input power source and a load resistor via two quadrant bent structures.
Description
Technical field
The invention belongs to optical communication and integrated optics field, particularly directional coupling electro-optic modulator provides a kind of Y branch directional coupling electrooptic modulator based on organic polymer.
Background technology
Because low-loss, low cost and the huge bandwidth of optical fiber, optical fiber telecommunications system has been widely used in the communications field.Now, because a large amount of utilizations of cable TV network (CATV) and Optical Controlled Phased Array Antenna system, the transmission of using fibre system to carry out simulating signal more and more is subject to everybody attention.In order undistortedly to get signal transmission, the high linearity of analog optical fiber communication system is the problem that must solve.In the Optical Fiber Transmission process, can transmit by optical fiber in order to make electric signal, it need to be loaded on the light carrier.So we need to access a light modulation device electric signal that needs transmit is loaded on the light wave at system input.Based on different modulation systems, we can be divided into modulation direct modulation and external modulation.The former refers to directly control with electrical modulation signal the parameter of oscillation (light intensity, frequency etc.) of semiconductor light sources, obtains modulated wave or the frequency-modulated wave of optical frequency; The latter allows the constant light carrier of amplitude and the frequency etc. of light source output by modulator, and light signal is modulated the amplitude of light carrier, frequency etc. by the modulator realization.The light source directly advantage of modulation is simple, but modulation rate is subject to the restriction (such as frequency chirp etc.) of the performance degradation under carrier lifetime and the two-forty.The external modulation mode needs modulator, complex structure, but can obtain good modulating performance, be particularly suitable for using under the two-forty.
Electro-optic Modulators particularly has smaller cross-sectional area, and the modulator that can better fetter luminous energy has good application prospect in this field.Commercial integrated electro-optic modulator has had a large amount of market, but since the non-linear distortion that causes of adjustment curve, the very big serviceability that must affect them.These typical adjustment curves are sinusoidal curves, greatly must hinder the widespread use of integrated electro-optic modulator in high linear analogue fibre system.
In the past few years, the whole world is that the technology of seeking reliable and practical raising modulator linearity degree has been done a large amount of work.Up to the present, the technology of comparative maturity can be divided into two classes, that is, and and electronic compensating method and optical means.Wherein, the electronic compensating method need to be used expensive high-velocity electrons components and parts and can only work in the bandwidth of several GHz.Include again the dual-polarization method in the optical means, parallel modulated structure, three sections directional couple and various sandwich construction.But it is too complicated that a common shortcoming of these technology is exactly their structure, although the design of many drive electrodes can improve the linearity and the depth of modulation of modulator, this method can not be applied to High Speed Modulation and electro-optical efficiency is very low.
In addition, the material of making electrooptic modulator mainly contain organic polymer and inorganic crystal material (as
).Than inorganic material, organic polymer is because it has little specific inductive capacity, large electrooptical coefficient, and fast response time, the characteristics such as good processability become the hot topic of whole world research.Therefore, having large nonlinear electro-optic polymer material is the first-selection that we make electrooptic modulator.
In sum, the integrated electro-optic modulator based on organic polymer that development has high linearity, simple structure and low foozle susceptibility is one of current communications field urgent problem, also is one of focus of research.Have modulator simple in structure and that can conveniently mate the electrode of microwave-driven power supply and will have more advantage.
Directional couple formula electrooptic modulator has mainly been used coupled mode theory.This theory is the earliest by J.R. and Pierre Si proposed when last century, studied microwave tube the forties, and S.E. Miller and S.A. thank to the elder brother with regard to having developed this concept subsequently, and had tentatively set up the basic theories of waveguide mode coupling.To the seventies, coupled mode theory begins to be applied in the optical waveguide field.1973, Yariv coupled modes general theory (the Amnon Yariv in the optical waveguide that systematically derived that publishes an article, Coupler-Mode Theory for Guided-Wave Optics. IEEE Journal of Quantum Electron, 1973, QE-9 (9): 919 ~ 933).1976, Herwig Kogelnik and Ronald V. Schmidt publish an article and have analyzed the switching characteristic of counter-rotating Δ β binodal to N joint directional coupler, for subsequently proposition and the development of various fiber waveguide devices based on directional coupler provides theoretical foundation (H. Kogelnik and R. V. Schmidt, Switched directional couplers with alternating Δ β. IEEE Journal of Qournal Electron, 1976, QE-12 (7): 396 ~ 401).After this, based on the electrooptic modulator of directional coupler by large quantity research.1986, Thaniyavarn has reported the Y branch feedback directional coupling electro-optic modulator of a kind of new structure that use inorganic crystal material (Ti:LiNbO3) is made for the first time, he points out that this modulator does not need to arrange bias voltage, half-wave voltage is 7V, low (S. Thaniyavarn than traditional directional couple formula modulator, Modified 1 * 2 directional coupler waveguide modulator. Electron Lett., 1986,22 (18): 941 ~ 942).1991, the people such as Mark L. Farwell design a kind of directional couple formula modulator, its third order intermodulation distortion of test proof is than the little 30dB of traditional MZ modulator (Mark L. Farwell, Zong-Qi Lin, Ed Wooten, and William S. C. Chang, An Electrooptic Intensity Modulator with Improved Linearity, IEEE Photonics Technology Lett., 1991,3 (9): 792 ~ 795).1999, Tavlykaev and Ramaswamy are to feeding back the linearity of the electrooptic modulator of directional coupler based on Y branch, the manufacture craft error, the characteristics such as third order intermodulation distortion size have been done the theoretical analysis of system, a kind of optimization structure (Robert F. Tavlykaev and Ramu V. Ramaswamy that has weighed after each parameter has been proposed, Highly Linear Y-Fed Directional Coupler Modulator with Low Intermodulation Distortion. Journal of Lightwave Technology, 1999,17 (2): 282 ~ 291).In the coming years, many people begin from experiment dimensionally-optimised to this type of coupling mechanism, electrode design, and material selection etc. have been carried out large quantity research, have obtained many breakthrough achievements.2009, the people such as Beomsuk Lee research points out that the linearities of 4 joint Y branches feedback directional couple modulators are better than 2 joints, the SFDR of the 4 joint modulators that they design is than low 14dB (the Beomsuk Lee of 2 joints, Cheyun Lin, Xiaolong Wang, Jingdong Luo, and Alex K. Y. Jen, Domain-Inversion-Equivalent EO Polymer based Y-Fed Directional Coupler Modulator with High Linearity. IEEE/LEOS Winter Topicals Meeting Series, 2009:73 ~ 74); 2010, they use electrooptical coefficient (γ 33) to produce 2 joint Y branch feedback directional couple modulators of a high linearity as the organic polymer of 79pm/V, its SFDR is up to 119dB/ Hz2/3, large 11dB (Beomsuk Lee than traditional MZ modulator, Che-Yun Lin, Alan X. Wang, Raluca Dinu, and Ray T. Chen, Linearized electro-optic modulators based on a two-section Y-fed directional coupler. Applied Optics, 2010,49 (33): 6485 ~ 6488); 2011, they (are realizing high high dynamic range (Beomsuk Lee at a high speed in 2 ~ 8GHz) situations, Che-Yun Lin, Alan X. Wang and Ray T. Chen, Demonstration of a Linearized Traveling Wave Y-Fed Directional Coupler Modulator Based on Electro-Optic Polymer. Journal of Lightwave Technology, 2011,29 (3): 1931 ~ 1936).
Summary of the invention
The object of the present invention is to provide a kind of electrooptic modulator with high linearity and large non-linear inhibition that can be applied to the analog optical fiber system.
The present invention is to achieve these goals by the following technical solutions:
A kind of Y branch directional coupling electrooptic modulator based on organic polymer is characterized in that comprising:
Waveguiding structure: two optical waveguides parallel and spacing is very little that comprise y branch waveguide, connect with y branch waveguide, described two waveguides have consisted of directional coupler, described waveguide tail end enlarges the spacing of two parallel waveguides by the S curved waveguide, so that output terminal and coupling fiber;
Electrode structure: electrode is " Z " font structure, has covered respectively two waveguides of directional coupler, and the electrode two sections are parallel to each other, and respectively by an external input power of 1/4 circular bending structure and loaded impedance.
In the such scheme, the transversary of described waveguide adopts anti-ridge structure.
In the such scheme, the core material refractive index of described waveguide is greater than the refractive index of clad material.
In the such scheme, the two sections coupling length in directional couple district (are the device physical size, be L1 and the L2 among Fig. 1) be 2.85 times of coupling length (namely the light in waveguide is coupled to needed minimum length in another waveguide fully), wherein coupling length is 5000 μ m.
In the such scheme, two sections regional inner sandwich layer material polarised directions are opposite before and after described " Z " font electrode, up and down the difference of propagation constant opposite number each other between waveguide.
In the such scheme, in the core material of described waveguide electric field by direction along the material polarised direction.
In the such scheme, the matched impedance of described electrode is 50 Ω, and external electrode needs ground connection to do prevention of electric shock and device security protection.
The preparation method of a kind of Y branch directional coupling electrooptic modulator based on organic polymer in the such scheme may further comprise the steps:
1) on silicon chip successively the chromium of evaporation one deck 20nm and the gold of electroplating one deck 3 μ m as bottom electrode;
2) the thick covering polymeric material of spin coating one deck 3 μ m is made under-clad layer, and its refractive index is 1.51 at the 1550nm place;
3) method of employing reactive ion beam etching (RIBE) engraves the shape of waveguide at under-clad layer, and etching depth is 0.3 μ m;
4) the polar polymer material that spin coating one deck 2 μ m are thick is as sandwich layer, and its refractive index is 1.67 at the 1550nm place;
5) remove unnecessary gold at the thick gold of sandwich layer deposition one deck 3 μ m, and with wet etching, form polarized electrode;
6) above-mentioned sample is heated under 120 ℃ contacts polarization, polarizing voltage is the pulse voltage of 800V, polarization time 1h;
7) remove polarized electrode with rotten golden liquid;
8) the covering polymkeric substance behind spin coating one deck 3 μ m is as top covering, and its refractive index is 1.55 at the 1550nm place;
9) remove unnecessary gold at the thick gold of sandwich layer deposition one deck 3 μ m, and with wet etching, form modulator electrode.
The present invention has following beneficial effect:
One, light on average is coupled into after by y branch waveguide in up and down two optical waveguides of directional coupler in the course of work of the present invention.In the situation that do not consider waveguide loss and waveguide fabrication fabrication error.When not having extra electric field, because the symmetry of device architecture, the light intensity of exporting in two arms up and down is identical with phase place.Therefore the working point of this device can Lookup protocol on the 3dB point and need not extra bias voltage.Thereby greatly reduce the complexity of device architecture.
Two, there is a domain inversion structures in the present invention in the directional couple district, and namely two sections regional inner sandwich layer material polarised directions are opposite before and after " Z " font electrode, then the difference of propagation constant opposite number each other between waveguide up and down.The electrode structure of this two-way modulation can be when guaranteeing High Speed Modulation the very big linearity that must improve modulator, guaranteed that modulated simulating signal can perfectly as far as possible must keep waveform.
Description of drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is the adjustment curve (dotted line is the MZ modulator, and solid line is the directional couple modulator) of two kinds of modulators.
Fig. 3 is anti-ridge waveguide cross sectional representation.
Fig. 4 is the structural representation of modulator electrode.
Among Fig. 1
,
Represent respectively before and after farmland, the directional couple district counter-rotating in two sections zones up and down the poor of propagation constant between waveguide, L1 and L2 represent respectively coupling length, i.e. the length in two sections zones, farmland, directional couple district counter-rotating front and back.
Mark 1 expression modulator electrode among Fig. 4, mark 2 expression waveguides.
Embodiment
Below in conjunction with accompanying drawing technical scheme of the invention process is carried out concrete description.
Among Fig. 1 y branch waveguide partly length be 688 μ m, the output terminal waveguide core is apart from being 12 μ m; The directional couple partial-length is 28515 μ m; S curved waveguide partial-length is 4750 μ m, and output terminal centre distance is 132 μ m.
Fig. 3 is the employed anti-ridge waveguide cross-sectional view of modulator of the present invention, and wherein cladding thickness is 3 μ m up and down, and core layer thickness is 2 μ m, the high 0.3 μ m of ridge, the wide 5 μ m of ridge.
Fig. 4 is the structural representation of modulator electrode.Wherein the transverse electrode partial width is 17 μ m, and length is 14250 μ m, and electrode is inboard equal in the vertical with directional couple waveguide inboard.The coupling part width is 15 μ m between upper/lower electrode.The radius of 1/4 circular bending electrode part is 1700 μ m.
The lithographic printing of in VLSI (very large scale integrated circuit) is made, using that modulator of the present invention, its fabrication processing follow conventional lines.Concrete method for making is:
At first on silicon chip successively the chromium of evaporation one deck 20nm and the gold of electroplating one deck 3 μ m as bottom electrode.
The covering polymeric material that spin coating one deck 3 μ m are thick is made under-clad layer, and its refractive index is 1.51 at the 1550nm place.
The method of employing reactive ion beam etching (RIBE) engraves the shape of waveguide at under-clad layer, etching depth is 0.3 μ m.
The thick polar polymer material of spin coating one deck 2 μ m is as sandwich layer, and its refractive index is 1.67 at the 1550nm place.
Deposit the thick gold of one deck 3 μ m at sandwich layer, and remove unnecessary gold with wet etching, form polarized electrode.
Above-mentioned sample is heated under 120 ℃ contacts polarization, polarizing voltage is the pulse voltage of 800V, polarization time 1h.
Remove polarized electrode with the golden liquid of corruption.
Covering polymkeric substance behind spin coating one deck 3 μ m is as top covering, and its refractive index is 1.55 at the 1550nm place.
At last, deposit the thick gold of one deck 3 μ m at sandwich layer, and remove unnecessary gold with wet etching, form modulator electrode.
Principle of work of the present invention is as follows,
Light on average is coupled into after by y branch waveguide in up and down two optical waveguides of directional coupler.In the situation that do not consider waveguide loss and waveguide fabrication fabrication error.When not having extra electric field, because the symmetry of device architecture, the light intensity of exporting in two arms up and down is identical with phase place.Therefore the working point of this device can Lookup protocol on the 3dB point and need not extra bias voltage.This will greatly reduce the complexity of device architecture.After having loaded extra voltage on the electrode, the propagation constant between two waveguides is no longer equal, and the symmetry of device is broken, and the light intensity that export in two arms this moment up and down changes.And the propagation constant between two waveguides that the voltages of different sizes cause poor (
) difference, the light intensity of exporting in two arms up and down also can be different, and light signal just can hard to bearly add the modulation of control voltage like this.
In addition, have a domain inversion structures in the directional couple district, namely two sections regional inner sandwich layer material polarised directions are opposite before and after " Z " font electrode, then the difference of propagation constant opposite number each other between waveguide up and down.The electrode structure of this two-way modulation can be when guaranteeing High Speed Modulation the very big linearity that must improve modulator, with guarantee modulated simulating signal can be perfect the retainer waveform.
We suppose that the complex amplitude of the light that transmits in two waveguides is respectively R (z) and S (z), and wherein z represents the transmission direction of light.By the optical waveguide coupled theory of modules (1973, QE-9 (9): 919 ~ 933) we can obtain for Amnon Yariv, Coupler-Mode Theory for Guided-Wave Optics. IEEE Journal of Quantum Electron:
Wherein,
,
Be phase misalignment, i.e. propagation constant poor between two coupled waveguides, its size is relevant with on-load voltage V;
Be two coupling constants between waveguide, its size is to be determined by the refractive index of polymeric material and waveguide spacing;
Be two coupling lengths between waveguide, namely luminous energy is coupled to minor increment in another waveguide fully by a waveguide.
We carry out normalized to the input light intensity, then in the situation that do not consider loss, by behind the y branch waveguide up and down the light initial amplitude of waveguide be
Bring in the top coupling mode equations structure among Fig. 1 is found the solution, we can obtain
Matrix coefficient in the following formula is respectively
In the top matrix expression, the second segment of coupled zone and the transmission matrix of first paragraph in the first, two matrix difference presentation graphs 1 on equation the right, and L1 and L2 are respectively the length of each section.Therefore, under normalizing condition, use coupled mode theory, we can obtain the last Output optical power of waveguide
We can obtain the transmission curve of directional couple modulator by following formula.
Two curves have represented respectively the adjustment curve of two kinds of electrooptic modulators among Fig. 2.Horizontal ordinate
Be the function of on-load voltage V, we come the size of secondary indication on-load voltage with it in the drawings.Wherein, dotted line is the adjustment curve of traditional MZ electrooptic modulator, and it is a sinusoidal curve and has 100% depth of modulation.Solid line is the adjustment curve of modulator of the present invention, and its range of linearity is 94%, and adjusting the degree of depth is 97%.Thus, we can find out, the directional couple modulator not only has the fabulous linearity, and has the great adjustment degree of depth.
In fact, farmland counter-rotating number of times is more, the range of linearity that modulator can obtain and depth of modulation be larger (Xiaolong Wang just, Boem-Suk Lee, Che-Yun Lin, Dechang An and Ray T. Chen, Electrooptic Polymer Linear Modulators Based on Multiple-Domain Y-Fed Directional Coupler. Journal of Lightwave Technology, 2010,28 (11): 1670 ~ 1676), but can increase so simultaneously the size of modulator and the loss of luminous energy, and the manufacture craft difficulty of modulator can strengthen also.Therefore it is very important selecting according to the actual requirements the number of times of farmland counter-rotating.
Claims (8)
1. one kind based on the Y branch directional of organic polymer coupling electrooptic modulator, it is characterized in that comprising:
Waveguiding structure: comprise y branch waveguide, connect with y branch waveguide two parallel and optical waveguide, described two waveguides have consisted of directional coupler, described waveguide tail end enlarges the spacing of two parallel waveguides by the S curved waveguide;
Electrode structure: electrode is " Z " font structure, has covered respectively two waveguides of directional coupler, and the electrode two sections are parallel to each other, and respectively by an external input power of 1/4 circular bending structure and loaded impedance.
2. a kind of Y branch directional coupling electrooptic modulator based on organic polymer according to claim 1, it is characterized in that: the transversary of described waveguide adopts anti-ridge structure.
3. a kind of Y branch directional coupling electrooptic modulator based on organic polymer according to claim 1, it is characterized in that: the core material refractive index of described waveguide is greater than the refractive index of clad material.
4. a kind of Y branch directional coupling electrooptic modulator based on organic polymer according to claim 1, it is characterized in that: the two sections coupling length in directional couple district are 2.85 times of coupling length.
5. a kind of Y branch directional coupling electrooptic modulator based on organic polymer according to claim 1, it is characterized in that: two sections regional inner sandwich layer material polarised directions are opposite before and after described " Z " font electrode, up and down the difference of propagation constant opposite number each other between waveguide.
6. a kind of Y branch directional coupling electrooptic modulator based on organic polymer according to claim 1 or 5 is characterized in that: in the core material of described waveguide electric field by direction along the material polarised direction.
7. a kind of Y branch directional coupling electrooptic modulator based on organic polymer according to claim 1, it is characterized in that: the matched impedance of described electrode is 50 Ω.
8. require the preparation method of the arbitrary described a kind of Y branch directional coupling electrooptic modulator based on organic polymer of 1-7 according to power, may further comprise the steps:
1) on silicon chip successively the chromium of evaporation one deck 20nm and the gold of electroplating one deck 3 μ m as bottom electrode;
2) the thick covering polymeric material of spin coating one deck 3 μ m is made under-clad layer, and its refractive index is 1.51 at the 1550nm place;
3) method of employing reactive ion beam etching (RIBE) engraves the shape of waveguide at under-clad layer, and etching depth is 0.3 μ m;
4) the polar polymer material that spin coating one deck 2 μ m are thick is as sandwich layer, and its refractive index is 1.67 at the 1550nm place;
5) remove unnecessary gold at the thick gold of sandwich layer deposition one deck 3 μ m, and with wet etching, form polarized electrode;
6) above-mentioned sample is heated under 120 ℃ contacts polarization, polarizing voltage is the pulse voltage of 800V, polarization time 1h;
7) remove polarized electrode with rotten golden liquid;
8) the covering polymkeric substance behind spin coating one deck 3 μ m is as top covering, and its refractive index is 1.55 at the 1550nm place;
9) remove unnecessary gold at the thick gold of sandwich layer deposition one deck 3 μ m, and with wet etching, form modulator electrode.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698847A (en) * | 2013-12-27 | 2014-04-02 | 南京邮电大学 | Method for enhancing birefringence of long-chain molecule-type polymer optical waveguide in matching manner |
| CN110174782A (en) * | 2019-05-30 | 2019-08-27 | 电子科技大学 | Electro-optic polymer waveguide mode change-over switch for mode division multiplexing technology |
-
2012
- 2012-09-28 CN CN2012103665722A patent/CN102879923A/en active Pending
Non-Patent Citations (4)
| Title |
|---|
| BEOM SUK LEE,CHE-YUN LIN,ALAN X.WANG,ET.AL.: "Demonstration of a Linearized Travelling Wave Y-Fed Directional Coupler Modulator Based on Electro-Optic Polymer", 《JOURNAL OF LIGHTWAVE TECHNOLOGY》 * |
| BEOMSUK LEE,CHE-YUN LIN,ALAN X.WANG,ET.AL.: "Linearized electro-optic modulators based on a two-section Y-fed directional coupler", 《APPLIED OPTICS》 * |
| ROBERT F.TAVLYKAEV AND RAMU V.RAMASWAMY: "Highly Linear Y-Fed Directional Coupler Modulator with Low Intermodulation Distortion", 《JOURNAL OF LIGHTWAVE TECHNOLOGY》 * |
| XIAOLONG WANG,BEOM-SUK LEE,CHE-YUN LIN,ET.AL.: "Electroptic Polymer Linear Modulators Based on Multiple-Domain Y-Fed Directional Coupler", 《JOURNAL OF LIGHTWAVE TECHNOLOGY》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103698847A (en) * | 2013-12-27 | 2014-04-02 | 南京邮电大学 | Method for enhancing birefringence of long-chain molecule-type polymer optical waveguide in matching manner |
| CN110174782A (en) * | 2019-05-30 | 2019-08-27 | 电子科技大学 | Electro-optic polymer waveguide mode change-over switch for mode division multiplexing technology |
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