CN103684044B - 压电薄膜发电器及其制作方法 - Google Patents
压电薄膜发电器及其制作方法 Download PDFInfo
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- CN103684044B CN103684044B CN201210322584.5A CN201210322584A CN103684044B CN 103684044 B CN103684044 B CN 103684044B CN 201210322584 A CN201210322584 A CN 201210322584A CN 103684044 B CN103684044 B CN 103684044B
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- 230000005611 electricity Effects 0.000 title claims abstract description 28
- 238000002360 preparation method Methods 0.000 title abstract description 16
- 239000012528 membrane Substances 0.000 claims abstract description 114
- 239000000758 substrate Substances 0.000 claims abstract description 83
- 229910052751 metal Inorganic materials 0.000 claims abstract description 60
- 239000002184 metal Substances 0.000 claims abstract description 60
- 230000007246 mechanism Effects 0.000 claims abstract description 20
- 238000004146 energy storage Methods 0.000 claims abstract description 17
- 238000007639 printing Methods 0.000 claims abstract description 17
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 26
- 239000010408 film Substances 0.000 claims description 26
- 229910052733 gallium Inorganic materials 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 24
- 229910045601 alloy Inorganic materials 0.000 claims description 17
- 239000000956 alloy Substances 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 13
- 239000002245 particle Substances 0.000 claims description 12
- 230000003647 oxidation Effects 0.000 claims description 9
- 238000007254 oxidation reaction Methods 0.000 claims description 9
- 239000011370 conductive nanoparticle Substances 0.000 claims description 8
- 229910000743 fusible alloy Inorganic materials 0.000 claims description 8
- 230000008569 process Effects 0.000 claims description 8
- 239000011701 zinc Substances 0.000 claims description 7
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 229910052725 zinc Inorganic materials 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 5
- 238000003860 storage Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 4
- 239000011734 sodium Substances 0.000 claims description 4
- 229910001152 Bi alloy Inorganic materials 0.000 claims description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 3
- 229910000846 In alloy Inorganic materials 0.000 claims description 3
- 229910003251 Na K Inorganic materials 0.000 claims description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 3
- 229910001128 Sn alloy Inorganic materials 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- NDXSUDIGSOJBLQ-UHFFFAOYSA-N [In][Bi][Zn][Sn] Chemical compound [In][Bi][Zn][Sn] NDXSUDIGSOJBLQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 claims description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 claims description 3
- 229910052700 potassium Inorganic materials 0.000 claims description 3
- 239000011591 potassium Substances 0.000 claims description 3
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims 4
- 238000000576 coating method Methods 0.000 abstract description 6
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 17
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 11
- 229910001195 gallium oxide Inorganic materials 0.000 description 11
- 239000007788 liquid Substances 0.000 description 11
- 239000002033 PVDF binder Substances 0.000 description 10
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 10
- 230000000694 effects Effects 0.000 description 8
- 239000011787 zinc oxide Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 5
- 239000002070 nanowire Substances 0.000 description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 210000000031 electric organ Anatomy 0.000 description 4
- 239000002105 nanoparticle Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010792 warming Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- -1 polytetrafluoroethylene Polymers 0.000 description 2
- 229910001006 Constantan Inorganic materials 0.000 description 1
- 229920004934 Dacron® Polymers 0.000 description 1
- 229920001410 Microfiber Polymers 0.000 description 1
- 229910000691 Re alloy Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- WOIHABYNKOEWFG-UHFFFAOYSA-N [Sr].[Ba] Chemical compound [Sr].[Ba] WOIHABYNKOEWFG-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- OJIJEKBXJYRIBZ-UHFFFAOYSA-N cadmium nickel Chemical compound [Ni].[Cd] OJIJEKBXJYRIBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000001808 coupling effect Effects 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000013383 initial experiment Methods 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000010358 mechanical oscillation Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000003658 microfiber Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 1
- 238000010428 oil painting Methods 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- DECCZIUVGMLHKQ-UHFFFAOYSA-N rhenium tungsten Chemical compound [W].[Re] DECCZIUVGMLHKQ-UHFFFAOYSA-N 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
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Claims (9)
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CN201210322584.5A CN103684044B (zh) | 2012-09-03 | 2012-09-03 | 压电薄膜发电器及其制作方法 |
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CN201210322584.5A CN103684044B (zh) | 2012-09-03 | 2012-09-03 | 压电薄膜发电器及其制作方法 |
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CN103684044A CN103684044A (zh) | 2014-03-26 |
CN103684044B true CN103684044B (zh) | 2016-01-27 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105134261B (zh) * | 2015-08-11 | 2018-10-23 | 北京天地玛珂电液控制系统有限公司 | 一种无外接电源的液压能吸收、转换、储存系统和智能阀装置 |
CN106590149A (zh) * | 2016-12-26 | 2017-04-26 | 哈尔滨工程大学 | 基于压电陶瓷纳米粉的墨水及制备方法 |
CN106892401A (zh) * | 2017-01-17 | 2017-06-27 | 天津理工大学 | 一种多层结构纳米发电机及其制备方法 |
CN107196550A (zh) * | 2017-07-11 | 2017-09-22 | 清华大学 | 一种可打印的能量捕获器件 |
CN109567984B (zh) * | 2018-10-31 | 2020-10-23 | 肇庆市华师大光电产业研究院 | 一种电子皮肤及其制备方法和应用 |
CN111114157B (zh) * | 2018-10-31 | 2022-03-01 | 北京梦之墨科技有限公司 | 一种柔版印刷方法 |
CN111076780A (zh) * | 2020-01-06 | 2020-04-28 | 武汉理工大学 | 一种基于流体振荡器的自供能流量无线传感器 |
CN114133273B (zh) * | 2021-12-06 | 2022-10-18 | 湖北大学 | 核壳结构压电材料的制备方法和压电纳米发电机 |
CN115623853B (zh) * | 2022-12-20 | 2023-05-12 | 中南大学 | 一种柔性取向多孔阵列式压电陶瓷发电器件及其制备和应用 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1121586A (zh) * | 1990-08-27 | 1996-05-01 | 伊安·E·基布尔怀特 | 具有传感器的超声波负载指示件 |
EP0932044A1 (en) * | 1997-07-11 | 1999-07-28 | Matsushita Electronics Corporation | Bimorph piezoelectric device for acceleration sensor and method of its manufacture |
CN101194376A (zh) * | 2005-06-10 | 2008-06-04 | 压电公司 | 压电复合传感器 |
TWM432150U (en) * | 2012-02-06 | 2012-06-21 | Yeong-Jen Wu | Soft piezoelectric power generating device |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000030554A1 (en) * | 1998-11-20 | 2000-06-02 | Jones Joie P | Methods for selectively dissolving and removing materials using ultra-high frequency ultrasound |
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2012
- 2012-09-03 CN CN201210322584.5A patent/CN103684044B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1121586A (zh) * | 1990-08-27 | 1996-05-01 | 伊安·E·基布尔怀特 | 具有传感器的超声波负载指示件 |
EP0932044A1 (en) * | 1997-07-11 | 1999-07-28 | Matsushita Electronics Corporation | Bimorph piezoelectric device for acceleration sensor and method of its manufacture |
CN101194376A (zh) * | 2005-06-10 | 2008-06-04 | 压电公司 | 压电复合传感器 |
TWM432150U (en) * | 2012-02-06 | 2012-06-21 | Yeong-Jen Wu | Soft piezoelectric power generating device |
Non-Patent Citations (2)
Title |
---|
含液体金属复合壳体结构的抗强激光特性及其数值模拟;杨阳等;《中国激光》;20110710;第38卷(第7期);第0702010-1至0702010-9页 * |
芯片强化散热研究新领域-低熔点液体金属散热技术的提出与发展;刘静等;《电子机械工程》;20061215;第22卷(第6期);第9-12页,第25页 * |
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