CN103674396A - Minitype dynamic infiltration water pressure sensor - Google Patents
Minitype dynamic infiltration water pressure sensor Download PDFInfo
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- CN103674396A CN103674396A CN201310653653.5A CN201310653653A CN103674396A CN 103674396 A CN103674396 A CN 103674396A CN 201310653653 A CN201310653653 A CN 201310653653A CN 103674396 A CN103674396 A CN 103674396A
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- cup
- pressure sensor
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- water pressure
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Abstract
The invention discloses a minitype dynamic infiltration water pressure sensor which comprises a shell, a cup-shaped base, a stainless steel rear cover, a water permeable stone layer and a signal modulation amplification module. A step surface is arranged on the inner wall of the cup-shaped base, and the water permeable stone layer is mounted on the step surface of the cup-shaped base. The cup-shaped base is embedded into a front cavity and is mounted on the step circular ring surface of the shell. The stainless steel rear cover is mounted at the end, placed on a rear cavity, of the shell, and a silicon nitride thin film covers the inner surface of the cup-shaped base. A pressure sensitive assembly is arranged on the surface, opposite to the water permeable stone layer, of the cup-shaped base, a first leading wire is connected between the pressure sensitive assembly and one end of the signal modulation amplification module in a bridging mode, and a signal cable is embedded into a through hole of the stainless steel rear cover and is connected to the other end of the signal modulation amplification module through a second leading wire. By means of the minitype dynamic infiltration water pressure sensor, the dynamic frequency response and the measurement accuracy of the pressure sensor are improved, the measuring range is greatly increased, sensing precision and sensitivity are also improved, and the degree of linearity of signals of the pressure sensor is improved.
Description
Technical field
The present invention relates to a kind of pressure transducer, relate in particular to a kind of miniature dynamic seepage water pressure sensor.
Background technology
Current, the main flow of measuring water pressure sensor is piezoresistive silicon sensor, its cardinal principle is to utilize the piezoresistive effect of silicon, adopt MEMS technology and integrated circuit technology certain crystal orientation on silicon chip, the techniques such as oxidation for certain position, diffusion or ion implantation doping, photoetching are made the Wheatstone bridge of strain sensitive.Its working range is at 1KPa～100Mpa.Piezoresistive silicon sensor is silicon microchip structure, the direct infiltration water in the mordant mud of contact zones and soil, can not be as direct sensitive surface, it must be encapsulated in Stainless Steel Shell, utilize stainless steel diaphragm as sensitive surface, Stainless Steel Shell inside is full of silicone oil as the medium of conducting pressure, and while therefore using, high frequency Dynamic response signal is difficult for obtaining.Because the stainless steel diaphragm between infiltration water and presser sensor assembly has certain elastic force, affect the measuring accuracy of seepage water pressure sensor.In addition, the infiltration water in soil, with a small amount of mud, is used for a long time, easily stops up and corrodes stainless steel diaphragm sensitive surface, to such an extent as to affecting the measuring accuracy of sensor, more likely damages sensor, makes to measure and cannot carry out.
Summary of the invention
The invention provides a kind of miniature dynamic seepage water pressure sensor, this miniature dynamic seepage water pressure sensor improves Dynamic response and the measuring accuracy of pressure transducer; This sensor does not need silicone oil as pressure transmission medium, has simplified product structure, has dwindled the volume of product; Thermal expansivity is consistent, adopts welding and melten glass powder to seal, need not rubber seal, and effectively prevent presser sensor assembly by the problem of soil permeability aqueous corrosion, improved Acceptable life and the long-time stability of this seepage water pressure sensor.
For achieving the above object, the technical solution used in the present invention is: a kind of miniature dynamic seepage water pressure sensor, comprise housing, by base plate be fixed on cup-shaped substrate, stainless steel bonnet, permeable stone layer and the signal modulator and amplifier module that the circumferential side plate of base plate forms, this inner walls middle part has stepped ring forging face, thereby form the preposition chamber and the rearmounted chamber that are communicated with, a flange is positioned at housing outer surface middle part; Described cup-shaped substrate inwall has step surface, and a permeable stone layer is installed on the step surface of described cup-shaped substrate, thereby forms infiltration water chamber between described permeable stone layer and the bottom of cup-shaped substrate; Described cup-shaped substrate embeds in described preposition chamber and is installed on the stepped ring forging face of described housing; Described stainless steel bonnet is installed on one end that described housing is positioned at rearmounted chamber, and silicon nitride film is covered in the inside surface of described cup-shaped substrate; The thickness of described infiltration water chamber is 1 ~ 2mm, and the base plate diameter of described cup-shaped substrate is 4 ~ 6mm, and described permeable stone layer diameter is 3 ~ 5mm;
The opposing surface of described cup-shaped substrate and permeable stone layer has presser sensor assembly, the first lead-in wire is connected across between described presser sensor assembly and signal modulator and amplifier module one end, and a signal cable embeds in the through hole of stainless steel bonnet and is connected to the described signal modulator and amplifier module other end by the second lead-in wire.
In technique scheme, further improve technical scheme as follows:
1. in such scheme, a thermoplastic sheath is installed on the end face of stainless steel bonnet.
2. in such scheme, described silicon nitride film thickness is 0.5 ~ 1 μ m.
3. in such scheme, one fixedly protective sleeve be installed on one end that described housing is positioned at preposition chamber.
4. in such scheme, described the first lead-in wire is connected with signal modulator and amplifier module one end by a card extender.
5. in such scheme, the base plate of described cup-shaped substrate and side plate are 17-4 stainless steel.
Because technique scheme is used, the present invention compared with prior art has following advantages:
The infiltration water of the miniature dynamic seepage water pressure sensor that the present invention proposes is pressed and is acted directly on the pressure experience face of presser sensor assembly, improves Dynamic response and the measuring accuracy of pressure transducer; This sensor does not need silicone oil as pressure transmission medium, has simplified product structure, has dwindled the volume of product.There is silicon nitride corrosion-resistant coating the inside of pressure-sensing device, in addition, the base material of this sensor housing and pressure-sensing device is all stainless steel, thermal expansivity is consistent, adopt welding and the sealing of melten glass powder, need not rubber seal, effectively prevent presser sensor assembly by the problem of soil permeability aqueous corrosion, improved Acceptable life and the long-time stability of this seepage water pressure sensor.
Accompanying drawing explanation
Accompanying drawing 1 is the miniature dynamic seepage water pressure sensor construction schematic diagram of the present invention;
Accompanying drawing 2 is sensitive element structural representation in the miniature dynamic seepage water pressure sensor of the present invention.
In above accompanying drawing: 1, housing; 2, cup-shaped substrate; 21, base plate; 22, side plate; 23, step surface; 3, stainless steel bonnet; 31, through hole; 4, permeable stone layer; 5, signal modulator and amplifier module; 6, stepped ring forging face; 71, preposition chamber; 72, rearmounted chamber; 8, infiltration water chamber; 9, silicon nitride film; 10, presser sensor assembly; 11, the first lead-in wire; 12, signal cable; 13, the second lead-in wire; 14, thermoplastic sheath; 15, fixing protective sleeve; 16, card extender; 17, flange.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described:
Embodiment: a kind of miniature dynamic seepage water pressure sensor, comprise housing 1, by base plate 21 be fixed on cup-shaped substrate 2, stainless steel bonnet 3, permeable stone layer 4 and the signal modulator and amplifier module 5 that the circumferential side plate of base plate 21 22 forms, this housing 1 inwall middle part has stepped ring forging face 6, thereby form the preposition chamber 71 and rearmounted chamber 72, one flanges 24 that are communicated with and be positioned at housing outer surface middle part; Described cup-shaped substrate 2 inwalls have step surface 23, one permeable stone layers 4 and are installed on the step surface 23 of described cup-shaped substrate 2, thereby form infiltration water chamber 8 between described permeable stone layer 4 and the bottom of cup-shaped substrate 2; Described cup-shaped substrate 2 embeds in described preposition chamber 71 and is installed on the stepped ring forging face 6 of described housing 1; Described stainless steel bonnet 3 is installed on one end that described housing 1 is positioned at rearmounted chamber 72, and silicon nitride film 9 is covered in the inside surface of described cup-shaped substrate 2; The thickness of described infiltration water chamber 8 is 2mm, and base plate 21 diameters of described cup-shaped substrate 2 are 5mm, and described permeable stone layer 4 diameter are 4mm;
The opposing surface of described cup-shaped substrate 2 and permeable stone layer 4 has presser sensor assembly 10, the first lead-in wire 11 is connected across between described presser sensor assembly 10 and signal modulator and amplifier module 5 one end, and a signal cable 12 embeds in the through hole 31 of stainless steel bonnets 3 and is connected to described signal modulator and amplifier module 5 other ends by the second lead-in wire 13.
One thermoplastic sheath 18 is installed on the end face of stainless steel bonnet 3; One fixedly protective sleeve 19 be installed on one end that described housing 1 is positioned at preposition chamber 71.Above-mentioned silicon nitride film 9 thickness are 1 μ m.
Above-described embodiment is only explanation technical conceive of the present invention and feature, and its object is to allow person skilled in the art can understand content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalences that Spirit Essence is done according to the present invention change or modify, within all should being encompassed in protection scope of the present invention.
Claims (6)
1. a miniature dynamic seepage water pressure sensor, it is characterized in that: comprise housing (1), by base plate (21) be fixed on cup-shaped substrate (2), stainless steel bonnet (3), permeable stone layer (4) and the signal modulator and amplifier module (5) that the circumferential side plate (22) of base plate (21) forms, this housing (1) inwall middle part has stepped ring forging face (6), thereby form the preposition chamber (71) and rearmounted chamber (72) that are communicated with, a flange (17) is positioned at housing outer surface middle part; Described cup-shaped substrate (2) inwall has step surface (23), one permeable stone layer (4) is installed on the step surface (23) of described cup-shaped substrate (2), thereby forms infiltration water chamber (8) between described permeable stone layer (4) and the bottom of cup-shaped substrate (2); Described cup-shaped substrate (2) embeds in described preposition chamber (71) and is installed on the stepped ring forging face (6) of described housing (1); Described stainless steel bonnet (3) is installed on one end that described housing (1) is positioned at rearmounted chamber (72), and silicon nitride film (9) is covered in the inside surface of described cup-shaped substrate (2); The thickness of described infiltration water chamber (8) is 1 ~ 2mm, and base plate (21) diameter of described cup-shaped substrate (2) is 4 ~ 6mm, and described permeable stone layer (4) diameter is 3 ~ 5mm;
The opposing surface of described cup-shaped substrate (2) and permeable stone layer (4) has presser sensor assembly (10), the first lead-in wire (11) is connected across between described presser sensor assembly (10) and signal modulator and amplifier module (5) one end, in the through hole (31) of signal cable (12) embedding stainless steel bonnet (3) and by the second lead-in wire (13), is connected to described signal modulator and amplifier module (5) other end.
2. miniature dynamic seepage water pressure sensor according to claim 1, is characterized in that: a thermoplastic sheath (14) is installed on the end face of stainless steel bonnet (3).
3. miniature dynamic seepage water pressure sensor according to claim 1, is characterized in that: described silicon nitride film (9) thickness is 0.5 ~ 1 μ m.
4. miniature dynamic seepage water pressure sensor according to claim 1, is characterized in that: one fixedly protective sleeve (15) be installed on one end that described housing (1) is positioned at preposition chamber (71).
5. miniature dynamic seepage water pressure sensor according to claim 1, is characterized in that: described the first lead-in wire (11) is connected with signal modulator and amplifier module (5) one end by a card extender (16).
6. miniature dynamic seepage water pressure sensor according to claim 1, is characterized in that: base plate (21) and the side plate (22) of described cup-shaped substrate (2) are 17-4 stainless steel.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310653653.5A CN103674396B (en) | 2013-12-06 | 2013-12-06 | Minitype dynamic infiltration water pressure sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310653653.5A CN103674396B (en) | 2013-12-06 | 2013-12-06 | Minitype dynamic infiltration water pressure sensor |
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| CN103674396A true CN103674396A (en) | 2014-03-26 |
| CN103674396B CN103674396B (en) | 2016-06-01 |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2631654A1 (en) * | 1988-05-19 | 1989-11-24 | Rech Geolog Miniere | Method and apparatus for measuring the interstitial pressure in a saturated ground |
| US6046667A (en) * | 1997-12-23 | 2000-04-04 | Honeywell Inc. | Pressure transducer with porous material for media isolation |
| CN101089566A (en) * | 2006-06-14 | 2007-12-19 | 昆山双桥传感器测控技术有限公司 | Combined pressure type soil stress sensor |
| CN201535706U (en) * | 2009-12-03 | 2010-07-28 | 李维平 | Permeable membrane soil hydraulic pressure sensor |
| CN102072795A (en) * | 2009-11-20 | 2011-05-25 | 昆山双桥传感器测控技术有限公司 | Piezoresistive high-frequency high-temperature dynamic pressure sensor |
| CN102680168A (en) * | 2012-06-13 | 2012-09-19 | 水利部交通运输部国家能源局南京水利科学研究院 | Method for recording pore water pressure mutation process during disaster and monitoring device thereof |
| CN203595575U (en) * | 2013-12-06 | 2014-05-14 | 苏州科技学院 | Miniature dynamic osmotic water pressure sensor |
-
2013
- 2013-12-06 CN CN201310653653.5A patent/CN103674396B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2631654A1 (en) * | 1988-05-19 | 1989-11-24 | Rech Geolog Miniere | Method and apparatus for measuring the interstitial pressure in a saturated ground |
| US6046667A (en) * | 1997-12-23 | 2000-04-04 | Honeywell Inc. | Pressure transducer with porous material for media isolation |
| CN101089566A (en) * | 2006-06-14 | 2007-12-19 | 昆山双桥传感器测控技术有限公司 | Combined pressure type soil stress sensor |
| CN102072795A (en) * | 2009-11-20 | 2011-05-25 | 昆山双桥传感器测控技术有限公司 | Piezoresistive high-frequency high-temperature dynamic pressure sensor |
| CN201535706U (en) * | 2009-12-03 | 2010-07-28 | 李维平 | Permeable membrane soil hydraulic pressure sensor |
| CN102680168A (en) * | 2012-06-13 | 2012-09-19 | 水利部交通运输部国家能源局南京水利科学研究院 | Method for recording pore water pressure mutation process during disaster and monitoring device thereof |
| CN203595575U (en) * | 2013-12-06 | 2014-05-14 | 苏州科技学院 | Miniature dynamic osmotic water pressure sensor |
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| CN103674396B (en) | 2016-06-01 |
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Inventor after: Cheng Xinli Inventor after: Tang Yunhai Inventor after: Shen Jiaoyan Inventor after: Wang Bing Inventor after: Qin Changfa Inventor after: Pan Tao Inventor after: Zang Taocheng Inventor after: Wang Wenxiang Inventor before: Tang Yunhai Inventor before: Shen Jiaoyan Inventor before: Cheng Xinli Inventor before: Wang Bing Inventor before: Qin Changfa Inventor before: Pan Tao Inventor before: Zang Taocheng Inventor before: Wang Wenxiang |
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Address after: 215000 No. 298 Binhe Road, Jiangsu, Suzhou Co-patentee after: KUNSHAN SHUANGQIAO SENSOR MEASUREMENT & CONTROL TECHNOLOGY Co.,Ltd. Patentee after: SUZHOU University OF SCIENCE AND TECHNOLOGY Address before: 215009 Suzhou City, Jiangsu province high tech Zone CREE Road, No. 1 Co-patentee before: KUNSHAN SHUANGQIAO SENSOR MEASUREMENT & CONTROL TECHNOLOGY Co.,Ltd. Patentee before: University OF SCIENCE AND TECHNOLOGY OF SUZHOU |
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Effective date of registration: 20200602 Address after: 215300, No. 188, Xiu Hai Road, Zhouzhuang Town, Kunshan City, Jiangsu, Suzhou Patentee after: Kunshan Kunbo intelligent perception Industrial Technology Research Institute Co.,Ltd. Address before: 215000 No. 298 Binhe Road, Jiangsu, Suzhou Co-patentee before: KUNSHAN SHUANGQIAO SENSOR MEASUREMENT & CONTROL TECHNOLOGY Co.,Ltd. Patentee before: SUZHOU University OF SCIENCE AND TECHNOLOGY |