CN104215385A - Dual-diaphragm underwater pressure sensor for water pressure change measurement - Google Patents
Dual-diaphragm underwater pressure sensor for water pressure change measurement Download PDFInfo
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- CN104215385A CN104215385A CN201410517702.7A CN201410517702A CN104215385A CN 104215385 A CN104215385 A CN 104215385A CN 201410517702 A CN201410517702 A CN 201410517702A CN 104215385 A CN104215385 A CN 104215385A
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- diaphragm
- pressure sensor
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- underwater
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Abstract
The invention discloses a dual-diaphragm underwater pressure sensor for water pressure change measurement and belongs to the technical field of the sensors. The dual-diaphragm underwater pressure sensor comprises a shell, and a separator which is used for dividing the interior of the shell into an upper oil liquid chamber and a lower chamber; the top end of the upper oil liquid chamber is an open end, a sensitive diaphragm is arranged on the open end, a pressure sensitive resistor for sensing the stress of the diaphragm is arranged on the sensitive diaphragm, a protective plate is arranged outside the sensitive diaphragm and through holes are formed in the protective plate; a compressive diaphragm is arranged in the lower chamber to divide the lower chamber into a compression chamber and a water inlet chamber, and further is hermetically connected with the inner wall of the shell; a pressure sensor is arranged in the compressive chamber; a water inlet is formed in the shell of the water inlet chamber. The pressure of water is transferred into the sensor by use of two diaphragms, the sensitive diaphragm is used for measuring micro pressure change and the internal pressure sensor is used for measuring large pressure; the dual-diaphragm underwater pressure sensor is capable of bearing and measuring high pressure and also capable of measuring micro water pressure change.
Description
Technical field
The present invention relates to sensor technical field, the Underwater Pressure sensor that the variation in water pressure in particular to a kind of pair of diaphragm structure is measured.
Background technology
Underwater Pressure sensor is widely used in the hydrospace detections such as tide detection, underwater robot job position mensuration; to the detection of the Underwater Pressures such as ocean; especially the detection of large pressure under deep-marine-environment; sensor must bear and measure the large hydraulic pressure at deep-sea; the change of hydraulic pressure can be measured again; this is that existing subsea pressure detects the difficult problem faced, and existing sensor is larger for the measuring error of the change of hydraulic pressure.
Summary of the invention
The object of the present invention is to provide one can bear measure large pressure, again can Measurement accuracy slight pressure change require two diaphragm structures variation in water pressure measurement Underwater Pressure sensor, to solve the problem.
For realizing the object of the invention, the technical scheme adopted is: the Underwater Pressure sensor of the variation in water pressure measurement of a kind of pair of diaphragm structure, comprise housing and enclosure interior is divided into the dividing plate of fluid chamber, top and lower chamber, the top in fluid chamber, top is open end, open end is provided with sensitive diaphragm, sensitive diaphragm is provided with the voltage dependent resistor (VDR) of reaction diaphragm stress, sensitive diaphragm is outside equipped with fender, and fender is distributed with through hole; Lower chamber be provided with lower chamber is divided into compression chamber and intake antrum and with inner walls be tightly connected by pressuring film plate, be provided with pressure transducer in compression chamber, the housing wall of intake antrum offer inlet opening.
Further, described pressure transducer is positioned on dividing plate.
Further, described sensitive diaphragm is circular film.
Further, sensitive diaphragm is arranged on sensor housing by fender.
The invention has the beneficial effects as follows; the pressure of water is delivered to sensor internal by two diaphragms; slight pressure change is measured by sensitive diaphragm; internal pressure sensor measures large pressure; achieve to bear and measure large pressure, can measure again the requirement of slight pressure change, there is the protective device by water two diaphragm outsides of sensor; so neither affect water pressure to measure, diaphragm can be protected again injury-free.
Accompanying drawing explanation
Fig. 1 is the cut-open view of the Underwater Pressure sensor that the variation in water pressure of provided by the invention pair of diaphragm structure is measured.
Embodiment
Also by reference to the accompanying drawings the present invention is described in further detail below by specific embodiment.
The Underwater Pressure sensor that the variation in water pressure that Fig. 1 shows provided by the invention pair of diaphragm structure is measured, comprise housing 1 and be the dividing plate 6 of fluid chamber, top 13 and lower chamber by housing 1 interior separation, fluid chamber, top 13 is full of fluid, the top in fluid chamber, top 13 is open end, open end is provided with sensitive diaphragm 2, and sensitive diaphragm 2 is circular film, sensitive diaphragm 2 is provided with the voltage dependent resistor (VDR) of reaction diaphragm stress, sensitive diaphragm 2 is outside equipped with fender 4, and fender 4 is distributed with through hole; Lower chamber be provided with lower chamber is divided into compression chamber 12 is connected with intake antrum 11 and with housing 1 inner wall sealing by pressuring film plate 3, pressure transducer 5 is provided with in compression chamber 12, pressure transducer 5 is arranged on dividing plate 6, the housing wall of intake antrum 11 offers inlet opening 14.
Sensitive diaphragm 2 is arranged on sensor housing 1 by fender 4, and fender 4 can protect sensitive diaphragm 2, and effect of water pressure can be made again in sensitive diaphragm 2.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. the Underwater Pressure sensor of the variation in water pressure measurement of a two diaphragm structure, it is characterized in that, comprise housing and enclosure interior is divided into the dividing plate of fluid chamber, top and lower chamber, the top in fluid chamber, top is open end, open end is provided with sensitive diaphragm, sensitive diaphragm is provided with the voltage dependent resistor (VDR) of reaction diaphragm stress, sensitive diaphragm is outside equipped with fender, and fender is distributed with through hole; Lower chamber be provided with lower chamber is divided into compression chamber and intake antrum and with inner walls be tightly connected by pressuring film plate, be provided with pressure transducer in compression chamber, the housing wall of intake antrum offer inlet opening.
2. the Underwater Pressure sensor of the variation in water pressure measurement of according to claim 1 pair of diaphragm structure, it is characterized in that, described pressure transducer is positioned on dividing plate.
3. the Underwater Pressure sensor of the variation in water pressure measurement of according to claim 1 pair of diaphragm structure, it is characterized in that, described sensitive diaphragm is circular film.
4. the Underwater Pressure sensor of the variation in water pressure measurement of according to claim 1 pair of diaphragm structure, it is characterized in that, sensitive diaphragm is arranged on sensor housing by fender.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410517702.7A CN104215385A (en) | 2014-09-30 | 2014-09-30 | Dual-diaphragm underwater pressure sensor for water pressure change measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410517702.7A CN104215385A (en) | 2014-09-30 | 2014-09-30 | Dual-diaphragm underwater pressure sensor for water pressure change measurement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104215385A true CN104215385A (en) | 2014-12-17 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410517702.7A Pending CN104215385A (en) | 2014-09-30 | 2014-09-30 | Dual-diaphragm underwater pressure sensor for water pressure change measurement |
Country Status (1)
| Country | Link |
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| CN (1) | CN104215385A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105460184A (en) * | 2015-12-23 | 2016-04-06 | 武汉中航传感技术有限责任公司 | Oil bag structure used for underwater pressure inspection and marine equipment comprising same |
| CN107290083A (en) * | 2017-07-28 | 2017-10-24 | 佛山市川东磁电股份有限公司 | It is a kind of can one side encapsulation double membrane capacitance formula pressure sensors and preparation method |
| CN107576426A (en) * | 2017-07-21 | 2018-01-12 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of silicon on sapphire pressure sensor sensitive structure with self-protection function |
| CN111562044A (en) * | 2020-06-05 | 2020-08-21 | 中国船舶科学研究中心 | Underwater explosion water jet flow load measurement sensor protection device and manufacturing process thereof |
Citations (7)
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| EP0494338A1 (en) * | 1991-01-10 | 1992-07-15 | Johnson Service Company | Pressure sensing element |
| CN2190781Y (en) * | 1994-03-18 | 1995-03-01 | 李载达 | Water level transmitter |
| CN1512156A (en) * | 2002-12-27 | 2004-07-14 | 中国科学院力学研究所 | Measuring method and its device for deep water pressure |
| CN1540301A (en) * | 2003-10-29 | 2004-10-27 | 中国科学院力学研究所 | Device of combined sensor in use for measuring dynamical pressure and static pressure in deep sea |
| CN1710394A (en) * | 2005-07-22 | 2005-12-21 | 合肥工业大学 | Deep sea pressure, flow speed and direction sensor and use thereof |
| CN201607264U (en) * | 2010-02-07 | 2010-10-13 | 王学良 | Pressure balance film device |
| CN204085774U (en) * | 2014-09-30 | 2015-01-07 | 成都卓微科技有限公司 | The Underwater Pressure sensor of the variation in water pressure measurement of a kind of pair of diaphragm structure |
-
2014
- 2014-09-30 CN CN201410517702.7A patent/CN104215385A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0494338A1 (en) * | 1991-01-10 | 1992-07-15 | Johnson Service Company | Pressure sensing element |
| CN2190781Y (en) * | 1994-03-18 | 1995-03-01 | 李载达 | Water level transmitter |
| CN1512156A (en) * | 2002-12-27 | 2004-07-14 | 中国科学院力学研究所 | Measuring method and its device for deep water pressure |
| CN1540301A (en) * | 2003-10-29 | 2004-10-27 | 中国科学院力学研究所 | Device of combined sensor in use for measuring dynamical pressure and static pressure in deep sea |
| CN1710394A (en) * | 2005-07-22 | 2005-12-21 | 合肥工业大学 | Deep sea pressure, flow speed and direction sensor and use thereof |
| CN201607264U (en) * | 2010-02-07 | 2010-10-13 | 王学良 | Pressure balance film device |
| CN204085774U (en) * | 2014-09-30 | 2015-01-07 | 成都卓微科技有限公司 | The Underwater Pressure sensor of the variation in water pressure measurement of a kind of pair of diaphragm structure |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105460184A (en) * | 2015-12-23 | 2016-04-06 | 武汉中航传感技术有限责任公司 | Oil bag structure used for underwater pressure inspection and marine equipment comprising same |
| CN105460184B (en) * | 2015-12-23 | 2017-12-19 | 武汉中航传感技术有限责任公司 | It is a kind of to be used to examine the oil sac structure of pressure and the oceanographic equipment containing it under water |
| CN107576426A (en) * | 2017-07-21 | 2018-01-12 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of silicon on sapphire pressure sensor sensitive structure with self-protection function |
| CN107290083A (en) * | 2017-07-28 | 2017-10-24 | 佛山市川东磁电股份有限公司 | It is a kind of can one side encapsulation double membrane capacitance formula pressure sensors and preparation method |
| CN111562044A (en) * | 2020-06-05 | 2020-08-21 | 中国船舶科学研究中心 | Underwater explosion water jet flow load measurement sensor protection device and manufacturing process thereof |
| CN111562044B (en) * | 2020-06-05 | 2021-10-08 | 中国船舶科学研究中心 | Underwater explosion water jet flow load measurement sensor protection device and manufacturing process thereof |
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Application publication date: 20141217 |
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| RJ01 | Rejection of invention patent application after publication |