CN103646982B - Light trapping structure for thin-film solar cell and manufacturing method - Google Patents
Light trapping structure for thin-film solar cell and manufacturing method Download PDFInfo
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- CN103646982B CN103646982B CN201310674487.7A CN201310674487A CN103646982B CN 103646982 B CN103646982 B CN 103646982B CN 201310674487 A CN201310674487 A CN 201310674487A CN 103646982 B CN103646982 B CN 103646982B
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- 239000010409 thin film Substances 0.000 title claims abstract description 27
- 238000004519 manufacturing process Methods 0.000 title abstract description 5
- 239000000758 substrate Substances 0.000 claims abstract description 42
- 239000010408 film Substances 0.000 claims abstract description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 24
- 239000011248 coating agent Substances 0.000 claims description 23
- 238000000576 coating method Methods 0.000 claims description 23
- 238000005516 engineering process Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- 229910052710 silicon Inorganic materials 0.000 claims description 5
- 239000010703 silicon Substances 0.000 claims description 5
- 230000001795 light effect Effects 0.000 claims description 4
- 238000010276 construction Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 230000002708 enhancing effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims description 2
- 230000006378 damage Effects 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 238000001393 microlithography Methods 0.000 claims description 2
- 229920000620 organic polymer Polymers 0.000 claims description 2
- 239000010970 precious metal Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 239000004332 silver Substances 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 238000010521 absorption reaction Methods 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000001259 photo etching Methods 0.000 description 7
- 239000004411 aluminium Substances 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 239000005350 fused silica glass Substances 0.000 description 1
- 238000007731 hot pressing Methods 0.000 description 1
- 239000012943 hotmelt Substances 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
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- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/542—Dye sensitized solar cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention provides a light trapping structure for a thin film solar cell and a manufacturing method thereof, wherein the light trapping structure consists of a micro lens array (1), a substrate (2) of the micro lens array, a reflecting film layer (4) with a micro hole array and a reflector (5), the positions of the micro hole array on the reflecting film layer (4) correspond to and coincide with the position of the focus of the micro lens array (1) one by one, and a cavity (6) is formed between the reflecting film layer (4) with the micro hole array and the reflector (5). Sunlight is focused by the micro-lens array, then is injected into the cavity through the micro-hole array, and is reflected for multiple times between the reflecting film layer with the micro-hole array and the reflecting mirror, so that the light trapping effect on the sunlight is realized, the sunlight absorption enhancement can be realized by arranging the thin-film solar cell in the cavity, and the photoelectric conversion efficiency is improved. The light trapping structure has the advantages of simple structure, high light energy utilization rate, good compatibility and the like, can be widely applied to various thin-film solar cells, and has wide application prospect in the aspect of exploring high-efficiency thin-film solar cell research.
Description
Technical field
The invention belongs to technical field of solar batteries, relate to a kind of light trapping structure for thin-film solar cells and manufacture method.
Background technology
In recent decades, along with the progress of science and technology, expanding economy, various countries are increasing to the demand of the energy, the non-renewable energy resources such as electric power, coal, oil signal for help repeatedly, increasing country begins look for new clean energy resource and Renewable resource, including solar energy, wind energy, water energy, geothermal energy, ocean energy etc..And solar energy is huge with its reserves, safe and clean etc., and advantage will become 21 century one of clean energy resource being hopeful large-scale application most.
At present, technology is the most ripe and widely used remains crystal silicon solar batteries.But, in order to ensure higher electricity conversion, thickness and the purity of material are all proposed significantly high requirement by crystal silicon solar batteries, thus considerably increase its cost of manufacture.In this case, people have to develop the low-cost solar battery technology being representative with thin-film solar cells.Common thin-film solar cells has non-crystalline silicon, polysilicon, CIGS, cadmium telluride and DSSC etc..But, these thin-film solar cells are compared with traditional crystal silicon solar batteries, and photoelectric transformation efficiency is still relatively low, and this is the thinner thickness due to thin-film solar cells to a certain extent, to the absorbability of sunlight more weak caused by.Therefore, the capture ability of sunlight is considered as a kind of effective means improving thin-film solar cell photoelectric conversion efficiency by the photosensitive layer strengthened in battery.For reaching this purpose, research worker takes the method for multiple sunken light, such as surface texture anti-reflection, Mie scattering increases light path, surface plasma body resonant vibration increases strong light absorption etc., but these methods all refer to the making of nanostructured, not only difficulty of processing is big, and the raising of the efficiency of light energy utilization is also extremely limited.Therefore, find a kind of low cost, easily processing, fall into the good sunlight light trapping structure of light effect and have great importance to improving thin-film solar cell photoelectric conversion efficiency.
Summary of the invention
The technical problem to be solved in the present invention is: for existing thin-film solar cells light trapping structure processed complex, fall into the shortcomings such as light effect is limited, it is proposed to a kind of thin-film solar cells light trapping structure based on microlens array and preparation method thereof.This light trapping structure adopts lenticule optically focused, by sunlight by among aperture " injections " to two pieces reflecting mirror, making sunlight constantly reflection between two pieces of reflecting mirrors, with solar tracking device with the use of, can farthest realize catching sunlight.This light trapping structure has the advantages such as simple in construction, the efficiency of light energy utilization is high, compatibility is good, can be widely applied to each based thin film solar cell, improves electricity conversion.
The technical solution adopted for the present invention to solve the technical problems is: a kind of light trapping structure for thin-film solar cells, it is characterized in that: including: microlens array, the substrate of microlens array, reflective coating and reflecting mirror with microwell array, the position one_to_one corresponding of the position of microwell array and microlens array focus and overlapping on reflective coating, forms a cavity between reflective coating and the reflecting mirror with microwell array.
The perforate size of described microwell array should be equal to the focal spot size of microlens array, and its error cannot be greater than 10%.
The described reflective coating thickness with microwell array is not more than the depth of focus of microlens array.
The described reflective coating with microwell array and reflecting mirror have the reflectance of 80% within the scope of solar spectrum.
Each based thin film solar cell can be made by prior art, including thin film silicon solar cell, compound film solaode, DSSC and organic polymer solar cell in described cavity.
The method making above-mentioned light trapping structure, it is characterised in that: comprise the following steps:
Step (1), making microlens array on a transparent substrate, make the focal plane of microlens array be positioned at the lower surface of transparent substrates, this post-treatment has the transparent substrates of microlens array to be the substrate (2) of microlens array；
Step (2), microlens array substrate (2) lower surface apply one layer of negative photoresist；
Step (3), utilize ultraviolet exposure machine irradiate microlens array upper surface, due to lenticular focussing force, the negative photoresist being in lenticule focal point is exposed；
Step (4), be exposed after negative photoresist developed after, can microlens array substrate (2) lower surface obtain with microlens array focus photoresist array one to one；
Step (5), processing have photoresist array microlens array substrate (2) lower surface deposition one layer of reflectance coating；
Step (6), stripping technology is utilized to be removed by the photoresist array of substrate (2) lower surface of microlens array, thus obtaining the reflective coating with microwell array；
Step (7), one piece of reflecting mirror of processing, be placed in the lower section of the reflective coating with microwell array, makes one cavity of formation between two reflectings surface, can complete the making of light trapping structure；
In described step (1), the thickness of transparent substrates should be equal to the focal length of microlens array, and its error cannot be greater than 10%；
In described step (2), the thickness of negative photoresist cannot be greater than the depth of focus of microlens array；
In described step (5), the thickness of reflectance coating cannot be greater than the depth of focus of microlens array.
The present invention compared with prior art has the advantage that
1, for strengthening structure and surface plasma local enhancing structure relative to sub-wavelength anti-reflection structure, scattering, the present invention has better sunken light effect, and without processing nanostructured, more without using the precious metal materials such as gold, silver, the making of light trapping structure can be completed, the advantage such as there is simple in construction, to fall into light ability higher only with the microlithography technology of technology relative maturity；
2, owing to the present invention realizes falling into light function by external structure, the internal structure of thin-film solar cells not being had destruction, without influence on the electric property of solaode, therefore compatible higher, the scope of application is wider.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of light trapping structure in the embodiment of the present invention 1；
Fig. 2 is the schematic diagram of the step 1 Surface Machining microlens array on a transparent substrate of the present invention；
Fig. 3 is the step 2 schematic diagram at the substrate lower surface coating negative photoresist of microlens array of the present invention；
The step 3 that Fig. 4 is the present invention utilizes microlens array to focus on the schematic diagram that negative photoresist carries out uv-exposure；
Fig. 5 is that the step 4 of the present invention is to the schematic diagram after the substrate lower surface negative photoresist development of microlens array；
Fig. 6 is the step 5 schematic diagram at the substrate lower surface photoetching offset plate figure surface deposition of reflective film of microlens array of the present invention；
Fig. 7 is that the step 6 of the present invention utilizes stripping technology to obtain the schematic diagram of the reflective coating with microwell array in the substrate lower surface of microlens array；
Fig. 8 is the schematic diagram that the step 7 of the present invention forms cavity between reflective coating and reflecting mirror with microwell array of the substrate lower surface of microlens array；
In figure: 1 is microlens array；2 is the substrate of microlens array；3 is negative photoresist；4 is the reflective coating with microwell array；5 is reflecting mirror；6 is the cavity formed between the reflective coating with microwell array and reflecting mirror.
Detailed description of the invention
The present invention is discussed in detail below in conjunction with the drawings and the specific embodiments.But below example is only limitted to explain the present invention, protection scope of the present invention should include the full content of claim, and namely the technical staff in field can be realized the full content of the claims in the present invention by following example.
Embodiments of the invention 1 are a kind of lenticule bores is 500 μm, is 1mm in base material mid-focal length, and lens centre is spaced apart the light trapping structure of 800 μm, and lenticular material is fused quartz, and substrate thickness is 1mm.
The procedure of processing of this light trapping structure is:
(1) utilizing hot melt to make microlens array in the quartz substrate of 1mm thickness, the bore of microlens array is 500 μm, and the focal length in quartz material is 1mm, and lens centre is spaced apart 800 μm；
(2) apply, in the substrate lower surface of microlens array, negative photoresist that a layer thickness is 0.5um and carry out front baking；
(3) utilize 436nm ultraviolet exposure machine to irradiate microlens array upper surface, the negative photoresist being in lenticule focal point is exposed；
(4), after negative photoresist after being exposed is developed, can obtain and microlens array focus dot matrix photoetching offset plate figure one to one in the substrate lower surface of microlens array；
(5) substrate lower surface having the microlens array of dot matrix photoetching offset plate figure in processing deposits the aluminum film that a layer thickness is 100nm；
(6) the dot matrix photoetching offset plate figure of the substrate lower surface of stripping technology removing microlens array is utilized, it is thus achieved that with the metallic aluminium reflecting layer of microwell array；
(7) one piece of aluminium reflector of processing so that it is form a cavity with the metallic aluminium reflecting layer with microwell array, the making of light trapping structure can be completed.
Embodiments of the invention 2 are a kind of lenticule bores is 400 μm, is 2mm in base material mid-focal length, and lens centre is spaced apart the light trapping structure of 600 μm, and lenticular material is plastics, and substrate thickness is 2mm.
The procedure of processing of this light trapping structure is:
(1) method utilizing hot pressing in the plastic-substrates of 2mm thickness makes microlens array, and the bore of microlens array is 400 μm, and the focal length in plastic-substrates is 2mm, and lens centre is spaced apart 600 μm；
(2) apply, in the substrate lower surface of microlens array, negative photoresist that a layer thickness is 1um and carry out front baking；
(3) utilize 365nm ultraviolet exposure machine to irradiate microlens array upper surface, the negative photoresist being in lenticule focal point is exposed；
(4), after negative photoresist after being exposed is developed, can obtain and microlens array focus dot matrix photoetching offset plate figure one to one in the substrate lower surface of microlens array；
(5) substrate lower surface having the microlens array of dot matrix photoetching offset plate figure in processing deposits the aluminum film that a layer thickness is 200nm；
(6) the dot matrix photoetching offset plate figure of the substrate lower surface of stripping technology removing microlens array is utilized, it is thus achieved that with the metallic aluminium reflecting layer of microwell array；
(7) one piece of aluminium reflector of processing so that it is form a cavity with the metallic aluminium reflecting layer with microwell array, the making of light trapping structure can be completed.
The non-detailed disclosure of the present invention partly belong to techniques known.
Although above the illustrative detailed description of the invention of the present invention being described; so that those skilled in the art understand the present invention; it is to be understood that; the invention is not restricted to the scope of detailed description of the invention; to those skilled in the art; as long as various changes limit and in the spirit and scope of the present invention determined, these changes are apparent from, and all utilize the innovation and creation of present inventive concept all at the row of protection in appended claim.
Claims (2)
1. the light trapping structure for thin-film solar cells, it is characterized in that, including: microlens array (1), the substrate (2) of microlens array, reflective coating (4) and reflecting mirror (5) with microwell array, the lower surface of the substrate (2) of microlens array it is positioned at the reflective coating (4) of microwell array, and the position one_to_one corresponding of the position of microwell array and microlens array (1) focus and overlapping, form a cavity (6) between reflective coating (4) and the reflecting mirror (5) with microwell array；
The perforate size of described microwell array should be equal to the focal spot size of microlens array, and its error cannot be greater than 10%；
The described reflective coating thickness with microwell array is not more than the depth of focus of microlens array；
The described reflective coating with microwell array and reflecting mirror have the reflectance of 80% within the scope of solar spectrum；
Each based thin film solar cell can be made by prior art, including thin film silicon solar cell, compound film solaode, DSSC and organic polymer solar cell in described cavity；
This is used for the light trapping structure of thin-film solar cells for sub-wavelength anti-reflection structure, scattering enhancing structure and surface plasma local enhancing structure, this light trapping structure being used for thin-film solar cells has better sunken light effect, and without processing nanostructured, more without using gold, silver precious metal material, the making of light trapping structure can be completed only with the microlithography technology of technology relative maturity, there is simple in construction, fall into the advantage that light ability is higher；
This light trapping structure being used for thin-film solar cells realizes falling into light function by external structure, and the internal structure of thin-film solar cells is not had destruction, and without influence on the electric property of solaode, therefore compatible higher, the scope of application is wider.
2. the method for making light trapping structure described in the claims 1, it is characterised in that: comprise the following steps:
Step (1), making microlens array on a transparent substrate, make the focal plane of microlens array be positioned at the lower surface of transparent substrates, this post-treatment has the transparent substrates of microlens array to be the substrate (2) of microlens array；
Step (2), microlens array substrate (2) lower surface apply one layer of negative photoresist；
Step (3), utilize ultraviolet exposure machine irradiate microlens array upper surface, due to lenticular focussing force, the negative photoresist being in lenticule focal point is exposed；
Step (4), be exposed after negative photoresist developed after, can microlens array substrate (2) lower surface obtain with microlens array focus photoresist array one to one；
Step (5), processing have photoresist array microlens array substrate (2) lower surface deposition one layer of reflectance coating；
Step (6), stripping technology is utilized to be removed by the photoresist array of substrate (2) lower surface of microlens array, thus obtaining the reflective coating with microwell array；
Step (7), one piece of reflecting mirror of processing, be placed in the lower section of the reflective coating with microwell array, makes one cavity of formation between two reflectings surface, can complete the making of light trapping structure；
In described step (1), the thickness of transparent substrates should be equal to the focal length of microlens array, and its error cannot be greater than 10%；
In described step (2), the thickness of negative photoresist cannot be greater than the depth of focus of microlens array；
In described step (5), the thickness of reflectance coating cannot be greater than the depth of focus of microlens array.
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| CN109087959B (en) * | 2017-04-02 | 2021-08-17 | 韩少茹 | Solar cell packaging structure |
| CN107863406A (en) * | 2017-12-11 | 2018-03-30 | 浙江宝利特新能源股份有限公司 | A kind of reflectance coating and photovoltaic module and preparation method for photovoltaic module |
| CN109192807A (en) * | 2018-08-31 | 2019-01-11 | 中国电子科技集团公司第四十四研究所 | Near-infrared response photodetector of lenticule light trapping structure and preparation method thereof |
| CN110111683B (en) * | 2019-04-24 | 2021-02-23 | 浙江大学 | Ultrathin one-way light-transmitting screen and design method thereof |
| CN110795826B (en) * | 2019-10-08 | 2023-09-01 | 天津大学 | Optimization method applied to micro-lens structure of photovoltaic building integrated thin-film solar cell |
| CN113419300A (en) * | 2021-07-21 | 2021-09-21 | 上海芯物科技有限公司 | Micro-lens array |
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| CN102216695A (en) * | 2008-09-19 | 2011-10-12 | 加利福尼亚大学董事会 | System and method for solar energy capture and related method of manufacturing |
| JP4878354B2 (en) * | 2008-05-14 | 2012-02-15 | 株式会社ユニバーサルエンターテインメント | Solar cell device and solar cell system |
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| KR100981685B1 (en) * | 2007-10-19 | 2010-09-10 | 재단법인서울대학교산학협력재단 | solar cell apparatus based on microlens array and method for fabricating the same |
| JP5483391B2 (en) * | 2008-05-14 | 2014-05-07 | 株式会社ユニバーサルエンターテインメント | Dye-sensitized solar cell and dye-sensitized solar cell system |
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| JP4878354B2 (en) * | 2008-05-14 | 2012-02-15 | 株式会社ユニバーサルエンターテインメント | Solar cell device and solar cell system |
| CN102216695A (en) * | 2008-09-19 | 2011-10-12 | 加利福尼亚大学董事会 | System and method for solar energy capture and related method of manufacturing |
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